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Capacitorr Pumps MK5 Series Layout 1 25/05/2012 15.03 Pagina 2 B.VS.12.4

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Capacitorr Pumps MK5 Series Layout 1 25/05/2012 15.03 Pagina 2 B.VS.12.4 CapaciTorr Pumps MK5 Series_Layout 1 25/05/2012 15.03 Pagina 2 B.VS.12.4 Cartridge CapaciTorr cartridges are based on getter material St 172, which is configured in the form of sintered porous disks. These sintered porous disks are arranged in the cartridge structure in a way to optimize speed and capacity performance. The C400-2 DSK cartridge also includes, in its structure, the pump heating element. Lainate, Italy - Avezzano, Italy - Bologna, Italy - Weil am Rhein, Germany - Nanjing, P.R. of China - Shanghai, P.R. of China - Tokyo, Japan - Seoul, Korea - Jhubei City, Taiwan - Colorado Springs CO, USA - San Luis Obispo CA, USA - Watsonville CA, Pump Body USA - New Hartford NY, USA - Bethel CT, USA - Menlo Park CA, USA CapaciTorr® Pumps MK5 Series The optional pump body is a simple double flanged nipple. If desired, the pump can be mounted nude inside the vacuum system to fully exploit its pumping speed. The pump The SAES Getters Group manufacturing companies are ISO9001 certified, the Asian and Italian companies are body is leak tested to 1.5 x 10-10 scm3/s. ISO14001certified also. Full information about certifications for each company of the Group is available on the corporate website at: www.saesgetters.com Heater © 2012 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered trademark of SAES Getters S.p.A., its subsidiaries and affiliates. SAES Getters reserves the right to change or modify product specifications at any time without notice. The heater of CapaciTorr D2000, D1000, D200, D100 and D50 pumps consists of a SAES Getters S.p.A., Capital Stock Euro 12,220,000 f.p., Executive Office: Viale Italia, 77 - 20020 Lainate (Milan), ItalyRegistered with the Milan Court Companies tantalum wire inside an alumina insulator. This heater assembly also includes the cartridge Register no. 00774910152 and securing components, and additionally the thermocouple in the CapaciTorr D1000 and D2000 models. The heater of the CapaciTorr D400-2 pump consists of a tungsten wire inserted in a ceramic tabulation. This heater is part of the pump cartridge structure. Thermocouple The thermocouple is a K-type electrically insulated within an alumina tube. The thermocouple is available for the CapaciTorr D2000 and D1000 models. Flange The support flange is a standard CF type. The pumps flange is leaked tested to 1.5 x 10-10 scm3/s. Electrical Connector The special connector allows the connection of the pump to the power supply and control unit. The connector is bakeable up to 400 °C. we support your innovation SAES Getters Group www.saesgetters.com [email protected] CapaciTorr Pumps MK5 Series_Layout 1 25/05/2012 15.02 Pagina 1 CapaciTorr® Pumps MK5 Series HIGHLIGHTS . CapaciTorr® Pumps – MK5 Series General Features SAES® Getters, the world leader in Gettering Technology, presents the CapaciTorr® Non £ High pumping speed for all active gases Evaporable Getter (NEG) pumps family. £ High sorption capacity and increased lifetime These pumps are based on high porosity sintered materials for maximum performances (speed and capacity) and best mechanical characteristics. £ Constant pumping speed in HV and UHV The series includes a new flange design which makes the overall pump assembly more pressure region simple and compact, with foot print and reliability advantages over the previous series. £ No low pressure limitation (down to 10-12 Torr CapaciTorr pumps find wide use in a variety of applications, alone or in combination with region) traditional UHV pumps. They are particularly suitable to boost the vacuum performances of general purpose vacuum systems, thanks to their high pumping speed for hydrogen and other £ Reversible pumping of hydrogen and its active gases. isotopes Cartridge The special getter material configurations which consist of high porosity getter elements, £ Possibility of operation at room temperature provide improved performance over traditional NEG pumps, and in particular provide a higher after activation, without power capacity resulting in a longer life and in a greater available number of venting-reactivation Pump Body £ Operation in the presence of high magnetic cycles. fields The getter material used in the CapaciTorr pumps is St 172, a sintered material based on the well known St 707 getter alloy. £ Oil free and vibration free in ultra high vacuum St 172 based CapaciTorr pumps are ideal for best performance in terms of speed, and they £ Low weight are particularly well suited for high gas load application where it is necessary to increase the Thermocouple pump operating temperature to boost the material sorption capacity. Typical applications are in the field of particle accelerators, synchrotron radiation sources and Applications Heater related equipment, surface analysis systems and other R&D vacuum systems. £ Improving ultimate vacuum in combination with In addition, CapaciTorr pumps are finding application in semiconductor manufacturing ion, diffusion, cryogenetic or turbomolecular equipment as process pumps in processes such as sputtering, where they can take pumps advantages of the fact that NEG materials do not pump noble gases. In these applications, often requiring high duty cycles from the vacuum pumps, CapaciTorr pumps can take profit of £ Surface analysis systems their capability to withstand multiple air exposures without excessive degradation of their £ Particle accelerators, synchrotron radiation sorption performances. Flange sources and related equipment £ Process pumps for vacuum deposition chambers £ Process pumps for vacuum devices £ Portable vacuum instrumentation £ Pumping, storing and releasing hydrogen Electrical Connector isotopes £ Plasma machines £ Hydrogen traps £ Impurities removal in rare gas filled devices CapaciTorr Pumps MK5 Series_Layout 1 25/05/2012 15.02 Pagina 1 CapaciTorr® Pumps MK5 Series HIGHLIGHTS . CapaciTorr® Pumps – MK5 Series General Features SAES® Getters, the world leader in Gettering Technology, presents the CapaciTorr® Non £ High pumping speed for all active gases Evaporable Getter (NEG) pumps family. £ High sorption capacity and increased lifetime These pumps are based on high porosity sintered materials for maximum performances (speed and capacity) and best mechanical characteristics. £ Constant pumping speed in HV and UHV The series includes a new flange design which makes the overall pump assembly more pressure region simple and compact, with foot print and reliability advantages over the previous series. £ No low pressure limitation (down to 10-12 Torr CapaciTorr pumps find wide use in a variety of applications, alone or in combination with region) traditional UHV pumps. They are particularly suitable to boost the vacuum performances of general purpose vacuum systems, thanks to their high pumping speed for hydrogen and other £ Reversible pumping of hydrogen and its active gases. isotopes Cartridge The special getter material configurations which consist of high porosity getter elements, £ Possibility of operation at room temperature provide improved performance over traditional NEG pumps, and in particular provide a higher after activation, without power capacity resulting in a longer life and in a greater available number of venting-reactivation Pump Body £ Operation in the presence of high magnetic cycles. fields The getter material used in the CapaciTorr pumps is St 172, a sintered material based on the well known St 707 getter alloy. £ Oil free and vibration free in ultra high vacuum St 172 based CapaciTorr pumps are ideal for best performance in terms of speed, and they £ Low weight are particularly well suited for high gas load application where it is necessary to increase the Thermocouple pump operating temperature to boost the material sorption capacity. Typical applications are in the field of particle accelerators, synchrotron radiation sources and Applications Heater related equipment, surface analysis systems and other R&D vacuum systems. £ Improving ultimate vacuum in combination with In addition, CapaciTorr pumps are finding application in semiconductor manufacturing ion, diffusion, cryogenetic or turbomolecular equipment as process pumps in processes such as sputtering, where they can take pumps advantages of the fact that NEG materials do not pump noble gases. In these applications, often requiring high duty cycles from the vacuum pumps, CapaciTorr pumps can take profit of £ Surface analysis systems their capability to withstand multiple air exposures without excessive degradation of their £ Particle accelerators, synchrotron radiation sorption performances. Flange sources and related equipment £ Process pumps for vacuum deposition chambers £ Process pumps for vacuum devices £ Portable vacuum instrumentation £ Pumping, storing and releasing hydrogen Electrical Connector isotopes £ Plasma machines £ Hydrogen traps £ Impurities removal in rare gas filled devices CapaciTorr Pumps MK5 Series_Layout 1 25/05/2012 15.03 Pagina 2 B.VS.12.4 Cartridge CapaciTorr cartridges are based on getter material St 172, which is configured in the form of sintered porous disks. These sintered porous disks are arranged in the cartridge structure in a way to optimize speed and capacity performance. The C400-2 DSK cartridge also includes, in its structure, the pump heating element. Lainate, Italy - Avezzano, Italy - Bologna, Italy - Weil am Rhein, Germany - Nanjing, P.R. of China - Shanghai, P.R. of China - Tokyo, Japan - Seoul, Korea - Jhubei City, Taiwan - Colorado Springs CO, USA - San Luis Obispo CA, USA - Watsonville CA, Pump Body USA -
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