Capacitorr Pumps MK5 Series Layout 1 25/05/2012 15.03 Pagina 2 B.VS.12.4

CapaciTorr Pumps MK5 Series_Layout 1 25/05/2012 15.03 Pagina 2 B.VS.12.4

Cartridge

CapaciTorr cartridges are based on getter material St 172, which is configured in the form of sintered porous disks. These sintered porous disks are arranged in the cartridge structure in a way to optimize speed and capacity performance. The C400-2 DSK cartridge also includes, in its structure, the pump heating element. Lainate, Italy - Avezzano, Italy - Bologna, Italy - Weil am Rhein, Germany - Nanjing, P.R. of China - Shanghai, P.R. of China - Tokyo, Japan - Seoul, Korea - Jhubei City, Taiwan - Colorado Springs CO, USA - San Luis Obispo CA, USA - Watsonville CA, Pump Body USA - New Hartford NY, USA - Bethel CT, USA - Menlo Park CA, USA CapaciTorr® Pumps MK5 Series The optional pump body is a simple double flanged nipple. If desired, the pump can be mounted nude inside the vacuum system to fully exploit its pumping speed. The pump The SAES Getters Group manufacturing companies are ISO9001 certified, the Asian and Italian companies are body is leak tested to 1.5 x 10-10 scm3/s. ISO14001certified also. Full information about certifications for each company of the Group is available on the corporate website at: www.saesgetters.com Heater © 2012 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered trademark of SAES Getters S.p.A., its subsidiaries and affiliates. SAES Getters reserves the right to change or modify product specifications at any time without notice.

The heater of CapaciTorr D2000, D1000, D200, D100 and D50 pumps consists of a SAES Getters S.p.A., Capital Stock Euro 12,220,000 f.p., Executive Office: Viale Italia, 77 - 20020 Lainate (Milan), ItalyRegistered with the Milan Court Companies tantalum wire inside an alumina insulator. This heater assembly also includes the cartridge Register no. 00774910152 and securing components, and additionally the thermocouple in the CapaciTorr D1000 and D2000 models. The heater of the CapaciTorr D400-2 pump consists of a tungsten wire inserted in a ceramic tabulation. This heater is part of the pump cartridge structure. Thermocouple The thermocouple is a K-type electrically insulated within an alumina tube. The thermocouple is available for the CapaciTorr D2000 and D1000 models. Flange The support flange is a standard CF type. The pumps flange is leaked tested to 1.5 x 10-10 scm3/s. Electrical Connector The special connector allows the connection of the pump to the power supply and control unit. The connector is bakeable up to 400 °C.

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CapaciTorr® Pumps MK5 Series

HIGHLIGHTS . CapaciTorr® Pumps – MK5 Series General Features SAES® Getters, the world leader in Gettering Technology, presents the CapaciTorr® Non £ High pumping speed for all active gases Evaporable Getter (NEG) pumps family. £ High sorption capacity and increased lifetime These pumps are based on high porosity sintered materials for maximum performances (speed and capacity) and best mechanical characteristics. £ Constant pumping speed in HV and UHV The series includes a new flange design which makes the overall pump assembly more pressure region simple and compact, with foot print and reliability advantages over the previous series. £ No low pressure limitation (down to 10-12 Torr CapaciTorr pumps find wide use in a variety of applications, alone or in combination with region) traditional UHV pumps. They are particularly suitable to boost the vacuum performances of general purpose vacuum systems, thanks to their high pumping speed for hydrogen and other £ Reversible pumping of hydrogen and its active gases. isotopes Cartridge The special getter material configurations which consist of high porosity getter elements, £ Possibility of operation at room temperature provide improved performance over traditional NEG pumps, and in particular provide a higher after activation, without power capacity resulting in a longer life and in a greater available number of venting-reactivation Pump Body £ Operation in the presence of high magnetic cycles. fields The getter material used in the CapaciTorr pumps is St 172, a sintered material based on the well known St 707 getter alloy. £ Oil free and vibration free in ultra high vacuum St 172 based CapaciTorr pumps are ideal for best performance in terms of speed, and they £ Low weight are particularly well suited for high gas load application where it is necessary to increase the Thermocouple pump operating temperature to boost the material sorption capacity. Typical applications are in the field of particle accelerators, synchrotron radiation sources and Applications Heater related equipment, surface analysis systems and other R&D vacuum systems. £ Improving ultimate vacuum in combination with In addition, CapaciTorr pumps are finding application in semiconductor manufacturing ion, diffusion, cryogenetic or turbomolecular equipment as process pumps in processes such as sputtering, where they can take pumps advantages of the fact that NEG materials do not pump noble gases. In these applications, often requiring high duty cycles from the vacuum pumps, CapaciTorr pumps can take profit of £ Surface analysis systems their capability to withstand multiple air exposures without excessive degradation of their £ Particle accelerators, synchrotron radiation sorption performances. Flange sources and related equipment £ Process pumps for vacuum deposition chambers £ Process pumps for vacuum devices £ Portable vacuum instrumentation £ Pumping, storing and releasing hydrogen Electrical Connector isotopes £ Plasma machines £ Hydrogen traps £ Impurities removal in rare gas filled devices CapaciTorr Pumps MK5 Series_Layout 1 25/05/2012 15.02 Pagina 1

CapaciTorr® Pumps MK5 Series

Cartridge

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Cartridge

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® CapaciTorr D 50, D 100, D 200

HIGHLIGHTS The CapaciTorr® D 50, D 100 and D 200 are three miniature pumps that complement the General Features CapaciTorr family line providing large performance in an extremely compact volume. £ High pumping speed for all active In spite of their minimal chamber intrusion (less than 100, 200 and 300 cc respectively) and gases small weight (~300 - 400 g) they feature impressive pumping speed for H2 and the other active gases present in UHV or XHV systems like H O, O , CO , CO and N . £ 2 2 2 2 High sorption capacity and increased This result is achieved through the adoption of a novel special pump design and the use of lifetime the high performance SAES® St 172 sintered porous getter disks. £ Costant pumping speed in HV, UHV All pumps come on a standard CF 35 flange and have a built-in heater that directly and XHV connects to the flange power feed-through (bakeable up to 400 °C). A suitable connector provides an easy and fast connection to the pump power supply for the activation £ Reversible pumping of hydrogen and purposes. its isotopes Only minimal power consumption (30, 45 and 60 W for ~1 hour, respectively) is required £ Possibility of operation at room during the activation. No power is necessary during normal UHV-XHV operation at room temperature after activation, without temperature. Like other NEG (Non Evaporable Getter) pumps they are vibration free and power can operate in presence of high magnetic fields. These pumps are therefore the perfect choice in applications where space and weight £ Operation in the presence of high constraints, absence of vibration and minimal electromagnetic interference must be magnetic fields coupled to excellent pumping performances and UHV - XHV standards. £ Oil free and vibration free in ultra high vacuum £ Low weight

Applications

£ Improving ultimate vacuum in combination with ion, diffusion, cryogenetic or turbomolecular pumps £ Surface analysis systems £ Particle accelerators, synchrotron radiation sources and related equipment Dimensions in mm £ Process pumps for vacuum devices and deposition chambers Ordering Information Product Product description Code £ Portable vacuum instrumentation CapaciTorr D 50 Pump CapaciTorr D 50 5H0166 CapaciTorr D 100 Pump CapaciTorr D 100 5H0163 £ Pumping, storing and releasing CapaciTorr D 200 Pump CapaciTorr D 200 5H0168 hydrogen isotopes Power Supply and Cables £ Impurities removal in rare gas filled Product Product description Code devices D 50 Power Supply CapaciTorr CF 35 D 50 Power Supply 3B0384 we support your innovation D 100 Power Supply CapaciTorr CF 35 D 100 Power Supply 3B0385 D 200 Power Supply CapaciTorr CF 35 D 200 Power Supply 3B0402 Output Cable Cable supply output CF35 D50/D100/D200 3MT 3B0386 Input Cable Cable Mains input CF35 3MT 3B0338 Capacitorr Pumps Scheda D50_100_200_Layout 1 25/05/2012 13.50 Pagina 2

® CapaciTorr®D50, D100 and D200 CapaciTorr sorption test (according to ASTM F798-97) 1000 D 50, D 100,

H2 100 D 200

10 Sorption Temperature: 25°C Activation:60' @ 7.5 V - 30W (D50) 1 9 V - 45 W (D100) CO 12 V - 60W (D200)

Pumping Speed (l/s) Pumping Speed Sorption pressure: 3E-6 Torr The SAES Getters Group 0,1 manufacturing companies are 0,0001 0,001 0,01 0,1 1 ISO9001 certified, the Asian Sorbed Quantity (Torr · l ) and Italian companies are also CapaciTorr D50 CapaciTorr D100 CapaciTorr D200 ISO14001 certified. Full information about our certifications for each company of the Group is Heating parameters available on our website at: 12 16 www.saesgetters.com CapaciTorr D50 14 10 CapaciTorr D100 12 D.VS.110.1 CapaciTorr D200 8 10

6 8

6 4 Voltage (V) Voltage 4 Current (A) 2 2

0 0 0 100 200 300 400 500 600 700 Temperature (°C)

Voltage (V) Current (A)

Note:The voltage and current vs temperature data, displayed in the graph, have been achieved in nude configuration (NEG Cartridge completely immersed in the chamber).

CapaciTorr CapaciTorr CapaciTorr Typical Pump Characteristics D 50 D 100 D 200 Alloy Type St 172 St 172 St 172 Alloy Composition ZrVFe ZrVFe ZrVFe Getter Mass (g) 7. 8 13.5 28 Getter Surface (cm2) 66 114 238

H2 55 100 200 Pumping Speed (l/s) CO 30 60 140

H2 78 135 280 Sorption Capacity CO at 25 °C 0.1 0.2 0.56 (Torrll) CO total 70 120 252 Note: Pumping speed data refer to the initial values of the pump. CO capacity based on speed below 8 l/s (D 50) and10 l/s (D 100 and D 200) in nude configuration.

SAES Getters Group © 2012 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered trademark of SAES Getters S.p.A., its subsidiaries and affiliates. www.saesgetters.com SAES Getters reserves the right to change or modify product specifications at any time without notice. [email protected] Capacitorr Pumps Scheda D400_2_Layout 1 29/05/2012 11.35 Pagina 1

CapaciTorr® D 400-2

HIGHLIGHTS The CapaciTorr® D 400-2 pump uses the high performing St 172 (Zr-V-Fe) material in the General Features form of disks to achieve high pumping performances in a very compact configuration. It is £ High pumping speed for all active ideal when maximum pumping speed is needed in a small package. The getter cartridge gases has a built-in heater that directly connects to the flange power feedthrough. A bakeable connector provides an easy and fast connection to the pump power supply for activation £ High sorption capacity and increased purposes. The CapaciTorr D 400-2 pump offers its best performances when mounted lifetime directly in the vacuum system using the standard CF 35 flange. Alternatively the pump can £ Costant pumping speed in HV, UHV be mounted as an appendage using a custom-made pump body. The pumping speed and XHV curves related to different mounting positions and the activation curves are shown in the following page. £ Reversible pumping of hydrogen and its isotopes £ Possibility of operation at room temperature after activation, without power £ Operation in the presence of high magnetic fields £ Oil free and vibration free in ultra high vacuum £ Low weight

Applications

we support your innovation Power supply and cables Product Product description Code NEG Power Supply CapaciTorr CF 35 D 400/B 200 Power Supply 3B0389 Input Cable Cable Mains Input CF 35 3Mt 3B0338 Output Cable Cable Supply Output CF35 D 400/B 200 3Mt 3B0390 Capacitorr Pumps Scheda D400_2_Layout 1 29/05/2012 11.35 Pagina 2

® CapaciTorr® D400-2 CapaciTorr sorption test (according to ASTM F798-97) 1000 D 400-2

100

10 N2 CO Sorption Temperature: 25°C Activation:60' @ 15.75 V (85 W) The SAES Getters Group Pumping Speed (l/s) Pumping Speed Sorption pressure: 3E-6 Torr manufacturing companies are 1 ISO9001 certified, the Asian 0,001 0,01 0,1 1 10 and Italian companies are Sorbed Quantity (Torr · l ) ISO14001certified also. Full nude with body information about our certifications for each Heating parameters company of the Group is 20 6 available on our website at: 18 www.saesgetters.com 16 5

14 D.VS.111.2

12 4

8 3 Voltage (V) Voltage Current (A) 6

4 2

0 1 50 150 250 350 450 550 Temperature (°C) Voltage (V) Current (A)

Note: The voltage and current vs temperature data, displayed in the graph, have been achieved in nude configuration (NEG Cartridge completely immersed in the chamber).

Typical Pump Characteristics CapaciTorr D 400-2 Alloy Type St 172 Alloy Composition ZrVFe Getter Mass (g) 45 Getter Surface (cm2) 380 H 400 Pumping Speed (l/s) 2 CO 180 H 450 Sorption Capacity 2 CO at 25 °C 0.9 (Torrll) CO total 400 Note: Pumping speed data refer to the initial values of the pump without the pump body. CO capacity based on speed below 20 l/s in nude configuration.

SAES Getters Group www.saesgetters.com © 2012 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered [email protected] trademark of SAES Getters S.p.A., its subsidiaries and affiliates. SAES Getters reserves the right to change or modify product specifications at any time without notice. Capacitorr Pumps Scheda D1000_bis_Layout 1 29/05/2012 11.33 Pagina 1

CapaciTorr® D 1000

HIGHLIGHTS The CapaciTorr® D 1000 pump uses highly porous St 172 sintered getter disks (Zr-V-Fe General Features alloy). The pump is able to reach 1000 l/s pumping speed for hydrogen in UHV conditions. £ High pumping speed for all active The St 172 getter cartridge is mounted on a heater structure using a single heater element, gases and it is available on CF63 and CF100 flanges. The flanges (AISI 316 LN) are conveniently supplied with a custom made bakeable electrical connector which combines power and £ High sorption capacity and increased thermocouple pins, for best integration and minimum footprint. St 172 material offers lifetime superior gas diffusivity characteristics and allows operation at room or intermediate £ Costant pumping speed in HV, UHV temperatures (200 °C) to increase the sorption capacity in presence of high gas loads. The and XHV pump sorption speed is at its maximum when the pump is mounted directly in the vacuum system without a body. The pumping speed curves related to different mounting positions £ Reversible pumping of hydrogen and and the activation curves are shown in the enclosed graphs. its isotopes £ Possibility of operation at room temperature after activation, without power £ Operation in the presence of high magnetic fields £ Oil free and vibration free in ultra high vacuum £ Low weight

Applications

£ Improving ultimate vacuum in combination with ion, diffusion, cryogenetic or turbomolecular pumps £ Surface analysis systems £ Particle accelerators, synchrotron radiation sources and related equipment £ Process pumps for vacuum devices and deposition chambers £ Portable vacuum instrumentation £ Pumping, storing and releasing hydrogen isotopes Dimensions in mm £ Impurities removal in rare gas filled Ordering Information devices Product Product description Code St 172 Cartridge with built-in Heater CapaciTorr D 1000 4H0468 we support your innovation CF63 base flange with Connector CapaciTorr base flange CF63 4H0467 CF100 base flange with Connector CapaciTorr base flange CF100 4H0469 Pump Body CF63 Body CF63 4H0241 Pump Body CF100 Body CF100 4H0224 Capacitorr Pumps Scheda D1000_bis_Layout 1 29/05/2012 11.33 Pagina 2

® CapaciTorr® D1000 CapaciTorr sorption test (according to ASTM F798-97) 10000 D 1000

1000 H2

100

10 Sorption Temperature: 25°C 1 Activation:60' @ 50 V (210 W)

Pumping Speed (l/s) Pumping Speed The SAES Getters Group Sorption pressure: 3E-6 Torr N2 CO manufacturing companies are 0,1 ISO9001 certified, the Asian 0,01 0,1 1 10 100 and Italian companies are also Sorbed Quantity (Torr · l ) ISO14001 certified. Full information about our certifications for each Heating parameters company of the Group is 60 5 available on our website at: 4,5 www.saesgetters.com 50 4 D.VS.112.1 40 3,5 3 30 2,5 2 20 Voltage (V) Voltage 1,5 Current (A) 10 1 0,5 0 0 0 100 200 300 400 500 600 700 Temperature (°C)

Voltage (V) Current (A)

Note:The voltage and current vs temperature data, displayed in the graph, have been achieved in nude configuration (NEG Cartridge completely immersed in the chamber).

Typical Pump Characteristics CapaciTorr D 1000 Alloy Type St 172 Alloy Composition ZrVFe Getter Mass (g) 136 Getter Surface (cm2) 1140 H 1000 Pumping Speed (l/s) 2 CO 600 H 1360 Sorption Capacity 2 CO at 25 °C 4 (Torrll) CO total 1224 Note: Pumping speed data refer to the initial values of the pump without the pump body. CO capacity based on speed below 30 l/s in nude configuration. Power supply and cables Product Product description Code NEG Power Supply NEG pump controller V1.1 3B0351 NEG Power Supply RS 485 NEG pump controller V1.1 800P 3B0366 Input Cable Cable Mains Input V1.1 2Mt 3B0336 Output Cable Cable supply output with K-TC/3Mt-V1.1-HT 3B0420 SAES Getters Group © 2012 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered trademark of SAES Getters S.p.A., its subsidiaries and affiliates. www.saesgetters.com SAES Getters reserves the right to change or modify product specifications at any time without notice. [email protected] Capacitorr Pumps Scheda D2000_bis_Layout 1 29/05/2012 11.32 Pagina 1

CapaciTorr® D 2000

HIGHLIGHTS The CapaciTorr® D 2000 MK5 pump is the highest performing pump of the CapaciTorr General Features series. With the use of a special highly porous sintered Zr-V-Fe getter material, St 172, the pump is able to reach 2000 l/s pumping speed for hydrogen in UHV conditions. The St 172 £ High pumping speed for all active gases getter cartridge is mounted on a heater structure using a single heater element, and it is available on CF100 and CF150 flanges. The flanges (AISI 316 LN) are conveniently supplied £ High sorption capacity and increased with a custom made bakeable electrical connector which combines power and lifetime thermocouple pins, for best integration and minimum footprint. St 172 material offers £ Costant pumping speed in HV, UHV superior gas diffusivity characteristics and allows operation at room or intermediate and XHV temperatures (200 °C) to increase the sorption capacity in presence of high gas loads. The pump sorption speed is at its maximum when the pump is mounted directly in the vacuum £ Reversible pumping of hydrogen and system without a body. The pumping speed curves related to different mounting positions its isotopes and the activation curves are shown in the enclosed graphs. £ Possibility of operation at room temperature after activation, without power £ Operation in the presence of high magnetic fields £ Oil free and vibration free in ultra high vacuum £ Low weight

Applications

£ Improving ultimate vacuum in combination with ion, diffusion, cryogenetic or turbomolecular pumps £ Surface analysis systems £ Particle accelerators, synchrotron radiation sources and related equipment £ Process pumps for vacuum devices and deposition chambers £ Portable vacuum instrumentation Dimensions in mm £ Pumping, storing and releasing Ordering Information hydrogen isotopes Product Product description Code £ Impurities removal in rare gas filled Base flange with Connector and Heater CapaciTorr CF100 MK5 4H0439 devices Base flange with Connector and Heater CapaciTorr CF150 MK5 4H0438 we support your innovation Base flange with Connector, Heater and Body CapaciTorr CF100 MK5 J 4H0441 Base flange with Connector, Heater and Body CapaciTorr CF150 MK5 J 4H0442 St 172 Getter Cartridge C 2000 DSK 4H0418 Capacitorr Pumps Scheda D2000_bis_Layout 1 29/05/2012 11.32 Pagina 2

® CapaciTorr® D2000 CapaciTorr sorption test (according to ASTM F798-97) 10000 D 2000

1000 H2

100

Sorption Temperature: 25°C 10 Activation:45' @ 110 V (495 W) N2 CO The SAES Getters Group Pumping Speed (l/s) Pumping Speed Sorption pressure: 3E-6 Torr manufacturing companies are 1 ISO9001 certified, the Asian 0,001 0,01 0,1 1 10 and Italian companies are also Sorbed Quantity (Torr · l ) ISO14001 certified. Full nude CF100 body information about our certifications for each Heating parameters company of the Group is 120 6 available on our website at: www.saesgetters.com 100 5

80 4 D.VS.113.1 60 3 40 2 Voltage (V) Voltage 20 1 Current (A) 0 0 50 150 250 350 450 Temperature (°C) Voltage (V) Current (A)

Note:The voltage and current vs temperature data, displayed in the graph, have been achieved in nude configuration (NEG Cartridge completely immersed in the chamber). Typical Pump Characteristics CapaciTorr D 2000 Alloy Type St 172 Alloy Composition ZrVFe Getter Mass (g) 225 Getter Surface (cm2) 1900 H 2000 Pumping Speed (l/s) 2 CO 1000 H 2250 Sorption Capacity 2 CO at 25 °C 5 (Torrll) CO total 2000 Note: Pumping speed data refer to the initial values of the pump without the pump body. CO capacity based on speed below 50 l/s in nude configuration.

Power supply and cables Product Product description Code NEG Power Supply NEG pump controller V1.1 3B0351 NEG Power Supply RS 485 NEG pump controller V1.1 800P 3B0366 Input Cable Cable Mains Input V1.1 2Mt 3B0336 Output Cable 3Mt lenght Cable supply outpu t V1.1-5 3Mt 3B0337 Output Cable 5Mt lenght Cable supply output V1.1-5 5Mt 3B0361