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Processing ES<:ETE Single Crystal D(X Instrument5 0) Camline Datensysteme GmbH Technology BV Decontrade SA Chell Instruments Equipment & GC + T Gusset Consulting & Eagle-Picher Technologies Coastal Instruments Trading AG GmbH Creative Pathways Inc Products Graphite Die Mold Engelhard-Clal CVD Equipment Corp Hiittinger Elektronik GmbH Sr FHR Anlagmbau (;mbH Cybor Carp Ashers & resist processor Co KG High Temperature Engineering Draeger Tescom GmbH ASTeWApplied Science and Kayex Corp Carp Eagle-PicherTechnoloRies Technology Inc Maintcch Inc Hiittingcr Elektronik GmbH si GmbH AXIC Inc MaTecK GmbH (:v KG Eagle-Picher Technologies ENI,A Division ofAstec America Mcrdls Research Ltd Huntington Mechanical Electron Transfer Technologies Fusion Europe Ltd Mi-Net Technology Ltd Laboratories Inc Inc IPEC Precision MR Semicon Inc IDBTechnologies Ltd Empak Inc Kaijo Carp Parke IMathematical ITS: Intertrade Scientific Ltd ENMETAnalytical Instruments Mattson Technology Inc Laboratories Inc J.1.P ELEC Festo Carp Megatech Ltd Performance Materials Inc Kayo Lindberg Lttl Flowlink SA OSRXM GmbH POW Graphite Inc Lindbcrg/Blue M FlowIleGi Oxford Applied Research PPM Pure Metals GmBH Mattson Technology Inc Flowmcca Inc Oxford Instruments Plasma Kesearch and PVD Materials Megatech Ltd Fluidsystem &K) Ltd Technology Corp MILLIPORE Garlock Sealing Technologies Scmitool Europe Ltd Sico Produktions-I lnd Handels Moritani & Co Ltcl Hale Hamilton Valves Ltd Technics Inc GmbH MR Srmicon Inc ITS: Intertrade Scientific Ltd Tt@I AG Thermcraft Inc Novatron SA Kinetics Chempure Systems Tesam Inc OSRAM GmbH Kinetics Faeth <;mbH ULVAC GmbH DI/water filtration Poco Graphite Inc Kinetics Fluid Systems Ireland IILVAC Technologies Inc Curio Ltd Reinraumetechnik Lanz Ltd Semitool Europe Ltd VC’aVfXTLdt Inc FSI International Inc Kinetics Process Piping Israel Ltd Yield Engineering Hager + Elsiisser Sico Produktions-Lund Handels Matheson T&Gas, Semi-Gas ITS: Intertrade Scientific Ltd GmbH Division Slee Tcchnik GmhH Cryogenics & chillers MILLPORE Mega Systems & Chemicals Smart Scientific Limited Megatech Ltd API) Cryogenics, I.G.C. (Europe) 3SMONICS INC Pall Carp SMI Europe MELPOKE BOC Edwards Ternpress Systems WI Europe Ltd MKS Instruments Inc Cryomech Inc Thermcraft lnc Woritani & Co Ltd CryoPhysics Ltd ProcessTechnology Russian Research Institute of Trade-Link BV Mott carp CTI-Cryogenics Tystar Carp Nichimen America Inc DeMaCo Holland BV Microelectronic Technolog) (RURIMT) IJLVAC GmbH Nippon Sanso FSI International Inc Westdeutschc Quarzschmelze Novatron SA IGC-APD Cryogenics GmbH Co KG Furnace/oven equipment DSMONICS Inc KineticsThermal Systems Yield Engineering Pall Europe Ltd Lake Shore Cryotronics Inc & materials Praxair NV ,Megatech Ltd Advanced Ceramics Carp Gas/fluid control/handling Semi-Gas Systems Ltd MMRTechnologies Inc .idvanced Cr!,stal Sciences Inc components/systems 5outhland Cryogenics SMI Europe 4lliance Sales (Europe) Ltd Stainless Design Corp Aera Carp Southland Cryogenics 4pplied Epi Inc itructured Materials Industries Aera GmbH !:4SM America IllC AG GasTechnology Ltd Crystal growth equipment 4SM Europe BV Swag&k Co 81 materials %XIC Inc Air Liquidr Electronics Systems / ! Alb Lava1 Flow (:ardinal Bearing Engineers Inc Advanced Ceramics Corp Systems Gas purifiers (III-Vs) Kluc M Electric Advanced Furnace Technolog! 4IXTKON Inc Brewer Science Ltd Alliance Sales (Europe) Ltd Applied Epi Inc Cambridge Precision Quartz Hrounley Associates Inc APTech ii Atomergic Chemetak Corp Crystec Technology Trading Centrotherm Applied Control Technology Atramet Inc GmbH Halbleitertechnologie GmbH Arc Machines Inc (kJ’StCl1 Support Systems Inc EhfF Ltd [:rystal Support Systems Inc Berm GmbH Crystallod Inc lohnson Matthey - GPT Crystec Technology Trading BOC Edwards Crvstec’ Technology Trading lohnson Matthey Environmental GmbH Bronkhorst High-Tech BV GmbH Products CSM Industries Brooks Instrument BV CVD Equipment Carp Matheson TriGas, SemiGas WI) Equipment Carp CalTechnix SA ELMA Malachit Division ::VT I.td Camline Datensystcme GmbH
70 Advanced Semiconductors Buyers’ Guide 0961-l 290/00/$ - see front matter 0 2000 Elsevier Science Ltd. All rights reserved. Megatech Ltd Oxford Instruments Plasma Festo Corp Integrated Designs Inc MILLIPORE Technology GEL-PAK Intellemetrics Ltd Moritani & Co Ltd PSP Vacuum Technology Ltd Hillelian Concepts Inc IPEC Precision Pall Corp RF Power Products Infab IJS Inc ITS: Intertrade Scientific GmbH Power + Energy Inc SMI Europe Ionic Systems Inc ITS: Intertrade Scientific Ltd Praxair NV Spectrum Sciences Inc Ishii Tool & Engineering Corp JAWoollamCohc SAES Getters (GB) Ltd Technics Inc Ismeca SA Jobin Yvon SAES Getters SpA Tepla AG Johnson Matthey Electronics Jobin Yvon Ltd SAES Pure Gas Inc Trade-Link BV Kdijo carp Kinetics Fluid Systems Ireland Southland Cryogenics ULVAC GmbH Karl Suss KG GmbH & Co Ltd Wellman CJB Ltd IJnaxis USA Inc Kulicke & Soffa Industries InC KineticsThermal Systems West Associates (Europe) Ltd Veeco Instruments Inc Maschinenfabrik Lauffer KLA-Tencor GmbH Sr Co KG Km-Tencor Corp Gas scrubbers, toxic gas Motors, drives, Microminiature Technology InC KnightsTechnology Inc bandling etc engineering & robotics Morgan Semiconductor Leda-Mass Ltd Products Leica Microsystems Inc AIXTRON AG Applied Epi Inc Moritani Sr Co Ltd Lighthouse Worldwide AIX’lXON Inc Dage Electronic Europa- Muehlbduer GmbH Solutions Applied ControlTechnology Vertriebs GmbH Poco Graphite Inc MateridS Development Corp ATM1 EcoSys Corp DyIlXt hC Promecome Electronics lMDC Materials Development ATM1 Inc Elma Engineering RD Automation Corp SA Bionics Instrument Europe BV EpiSoft Shuttleworth Inc Mega Systems & Chemicals BOC Edwards Equipe Technologies SleeTechnik GmbH Megatech Ltd Crystec Technology Trading EURIS Speedline Technologies MKS Instruments Inc GmbH Festo Corp Speedline Technologies Moritani & Co Ltd Formus AG (Deutschland) CAMALOT Division lMST Micro-Sensor-Technologie CS Clean Systems G&N Genauigkeits SPT Roth Ltd Noah Precision Inc CVD Equipment Corp Maschinenbau Nurnberg The ESEC Group Omron Electronics DAS GmbH GmbH Trade-Link BV OnLineTechnologies Inc Delatech Inc Hillelian Concepts Inc Westlake Plastics Co pacific Scientific SARL Division Edwards High Vacuum Huntington Mechanical Williams Advanced Materials Particle Measuring Systems International Laboratories Inc Inc Europe Ltd ENMET Analytical Instruments INFAB GmbH Particle Measuring Systems Inc Flowmeca ITS: Intertrdde Scientific Ltd Processcontrol Pfeiffer Vacuum Ltd JMAR Precision Systems Inc IEM Technologies equipment & monitoring Philips Analytical BV Moore Technologies LUDL Electronic Products Ltd Process Technology Moritani & Co Ltd Materials Development Carp ABB Extrel Realtime Performance Europe ,MST Micro-Sensor-Technologie MDC Materials Development Adolf-Slaby-Inst GmbH BV Sensidyne Inc Corp SA Aera Corp RKI Instruments Inc Southland Cryogenics MicroVision Corp Affinity Industries Inc SAES Pure &S Inc Thomas Swan Scientific Moritani & Co Ltd AI0 Corp Semifab InC Equipment Ltd Multitest Inc Air Liquide Electronics Systems SENTECH Instruments GmbH Wafertech ScandinaviaAB New Focus Alliance Sales (Europe) Ltd Shuttleworth Inc West Associates (Europe) Ltd NSK-RHP Deutschland GmbH Amerimade Technology Inc SleeTechnik GmbH PersysTechnology Ltd Anatel Corp SMI Europe Ion beam equipment & PSP Vacuum Technology Ltd Ando Corp Solid State Measurements Inc services R&D Ingenierie Anordd Corp Sopra Shuttleworth Inc Applied ControlTechnology Structured Materials Industries AXIC Inc Staubli LJnimation Avantes BV Inc Charles Evans &Associates Structured Materials Industries AXIC Inc Commonwealth Scientific Superb Instrumentation Inc Bernt GmbH Tefen UK Ltd RJK) Thomson Industries Inc Bionics Instrument Europe BV Tesam Inc CSM Industries BOC Edwards Dage Electronic Europa- Thomas Swan Scientific Packaging equipment & Bronkhorst High-Tech BV Equipment Ltd Vertriebs GmbH Brooks Instrument BV materials Trace AdytiCal Enhanced Technology CT1 - Cryogenics Products Ltd Ablestik Laboratories Tystar Corp CVD Equipment Corp IJLVACTechnologies Inc ENMETAnalytical Instruments Alliance Sales (Europe) Ltd EMFLtd FE1 Company Aseco Corp US Data EpiSoft Veeco Process Metrology Hiden Analytical Inc ASM Pacific Assembly Products FE1 Company High Voltage Engineering B&G International VG Gas Analysis SyStetTIS Festo Corp Zellweger Analytics Europa Boschman Technologies BV Granville-Phillips Company IBM Analytical Services CamLine Datensysteme GmbH Hiden Analytical Inc Process equipment: IBS Ion Beam Services CamLine 1)atensysteme GmbH Horiba Europe GmbH Infab US Inc Carsem Semiconductor HORIBA Ltd implant, deposition, RTP, Ircon Inc Coors Electronic Package Co ICOS Vision Systems NV CSM Industries ITS: Intertrade Scientific GmbH INFAB GmbH Advanced Crystal Sciences Inc Dage Electronic Europa- Micrion Corp Infdb IJS Inc AETThermal Inc Nordiko USA Inc Vertriebs GmbH Inficon Inc AIXTRON AG Oxford Applied Research Dai Ichi Seiko Co Ltd
Advanced Semiconductors Buyers’ Guide 0961-l 290/00/$ - see front matter 0 2000 71 Elsevier Science Ltd. All rights reserved. AJA International Surface Technology Systems Ltd N Bucher AG Surface Process Laboratories Inc AShI America Technics Inc TtYhlologJ HVA ASM Europe BV Temescal, part of BOC Coating Nichimcn America Inc Infab llS Inc ASM Microchemistry Ltd Technology Nikon (:orp ITS: Intertrade Scientific Ltd AST Elrktronik GmbH Trade-Link BV Nordiko ITSA Inc John Crane Beltib AST Elcktronik IXA Trikon Technologies Inc Novatron SA ,Megarcch Ltd ASTeX/Applied Science and Trikon Technologies Ltd OSR;\M GmbH MKS Instruments Inc Technology Inc T> star Carp Oxford Instruments Plasma Osmonics AXIC Inc ULVAC: GmhII ~l‘Ccllnolog~ OSMONICS INC BPS Nextral IJ1.\‘1\(:‘fechnologies Inc I’crs! .s’I’echnology Ltd Poco Gmphite lnc Cambridge Precision Quartz Unaxis USA Inc Pfciffer \‘iutum Ltcl sc;lnwCl Ltd Canon Europa N.V. Vecco Instruments Inc Plasma-Therm Int Southland Cryogenics Commonwealth Scientific (UK) VERTEQ Inc Pl;lsma(&lrsr Inc Structured Materials Industries Crystec Technology Trading wvrmat Inc. Poco (;raphite Inc Inc GmbII Ramada America Inc Raith <;mbII Swagelok Co CT1 Cryogenics Yield Engineering I~cinrdumct~c‘Ilnil\ Law Two Pneumatic Inc CTI-(Zryogenics RF Power Products Vacuum Generators WC Products Process equipment: Russian Research Institute of VAT Inc (:VD Equipment Carp lithography 81etch etc MicroeIecnwnic Technology VAT ticuum Products Ltd DCA Instruments Oy (RI-RIMT) Demon Vacuum Inc Adolf-Slab>.-Inst GmbII Srdih Sputter equipment & Advanced Energy Industries Inc EnhancedTechnolog? Products Semitool Europe Lttl AI0 Carp materials Ltd SENTE(:II Instruments GmbH Adolf-Slaby-Inst GmbH EpiSoft Align-Rite Ltd Sico Procluktions-I lnd Handels Alcatel Comptech Inc FairchildTechnologies Alliance Salts (Europe) Ltd GmhH i~merimatle~I’echtiolog~ Inc Atomergic Chemetals Carp FairchildTechnologies I’SA Inc SpeedFam Inrernarional Inc Atmmct Inc Ferrofluidics ASM Lithography Surface Technology Systems Ltd Ar;IC Inc FSI International Inc ASML Special Applications Tactron Elcktronik GmbH AXIC Inc. BOC Edwards Genus Inc Tamarack Scientific Co lnc B.L.E. Laboratory Equipment BPS - Nextral Widen A%il!‘ticZal InC Technics Inc Commonwealth Scientific (UK) 1IighTemperdture Engineering GmbH Tegal Corp Blommr Autotnation Comtec Ltd C:orp Trade-Link B\~ BP!, h?XtKiI CSM Industries Hillelian Concepts Inc Trikon Technologies Inc Brewer Science Lttl CT1 Cryogenics Hiittinger Elektronik GmbH & Trikon Technologies Ltd Canon LISA Inc Dage Electronic Europa- (:o KG Unaxis USA Inc CF.11 Technologies Inc Vertriebs GmbH HVA i.ptime Semiconductor Service CT1 Cryogenics D(:A Instruments Oy Ibis Technology Carp Compaq Electron Vision Carp DeMaCo Holland BV IBS Ion Beam Services VERTEQ Inc EL’ Group ENI. A Division ofrlstec IDB Technologies Ltd \vavemat Inc Fairchiltll‘echnologies America Inc Infab IIS Inc Yield Engineering FIIR Anlagenbau GmhH Ferrofluidics Inficon Inc FSI International Inc FHR Anlagenbau GmbH Ionic Systems Inc Seals,flanges, valves, Heidelberg Instruments Gencoa Ltd ITS: Intertrade Scientific GmbH Mikrotechnik GmbH pipework Hiittinger Elektronik GmbH & J.l.P ELEC Hidcn Analytical Inc Advanced Fluid Systems Ltd Co KG Kayo Lindberg Ltd Hillelian (:onccprs Inc Acci <:orp IIVA Lam Research Carp Holtronic Technologies SA AC;RI I Klinststofftechnik GmbH J.1.P ELEC IMattson Technology Inc HoneyveIl Advanced Amerimade Technology Inc Japan Energy/Nimtec Mcgatech Ltd Microelectronic Material ASTI .Johnson Matthey Electronics Mobius Ltd Automated Industrial S! stems MaTecK GmbH Moritani & Co Ltd Hopi Chrp Europe Branch Hiittinger Elektronik GmbH & Inc Megatcch I.td Nordiko USA Inc (:(I KG Hew Manufacturing Co Inc Mi-Net Technology Ltd Oxford Instruments Plasma HVA HOC Edwards Morgan Semiconductor Technology Infab I‘S Inc Bruno L)ockweilcr GmbH Products Pfeiffer Qcuum Ltd Inficon Inc <;aburn-MD<: Ltd Moritani Sr Co Ltd Plasma-Therm lnc Ionic Systems Inc Crran1asea1 Nordiko USA Inc Plasma(2uest Inc IPEC precision CVT 1.td Oxford Applied Research Poco Graphite Inc ITS: Intertrade Scientific Ltcl Douglas Engineering (10 Oxford Instruments Plasma Process Technology JENOPTIK Technologies DuPont Don- Elastomers LLC Technolog) Reinraumetechnik Lanz JEOL UK EVA<: AG Pfeiffer Vacuum Ltd Riber SA Karl Suss KG GmbII & (:o EVAC: International Inc Poco (;raphite Inc Scanwel Ltd Ferrofluidics Pure Tech Inc Semitool Europe Ltd KBTEM-OMO of PLANAR concern Festo Carp Ramet Ltd SEZ AG Lambda Ph!-sik GmbH Flowmcca I&search and PVD IMaterials Smart Scientific Limited Flowmeca Inc Corp Spectrum Sciences Inc Leica Microsystems Lithograph! L&l Gariock Sealing Technologies RF Power Products SpeedFam International Inc MattsonTechnolog?- Inc Grrenc.Tweed & (:(I Lttl SAES Getters SpA Structured Materials industries Hale Hamilton Vah C’S I&l Sairem lnc Megatech Ltd Huntington Mechanical Scanwel Ltd SLJRFACE Metals Research Ltcl
72 Advanced Semiconductors Buyers’ Guide 0961-l 290/00/$ - see front matter 0 2000 Elsevier Science Ltd. All rights reserved. Scientific Vacuum Systems Vacuum: gauges, pumps, Cabot Corp Richardson Electronics Ltd Smart Scientific Limited leak detection etc Crystal GmhH Sopra Surface Technology Systems Crystec Technology Trading Veeco Instruments Inc Aetrium Inc Ltd GmhH Alcatel High Vacuum Technics Inc CT1 - Cryogenics Technology Trade-Link BV CVD Equipment Corp Substrates Ametek Precision Instruments Trikon Technologies Inc Dynatex International Europe GmbH Trikon Technologies Ltd Engis Corp APD Cryogenics, I.G.C. C&As substrates: ULVAC GmbH EURIS (Europe) Ltd semiconducting IJLVAC Technologies Inc FairchildTechnologies Unaxis USA Inc. AXIC lnc FSI International Inc Adolf-Slahy-Inst GmhH Beco Manufacturing Co Inc Airtron Division of Litton Veeco Instruments Inc G&N Genauigkeits Bernt GmbH American Xtal Technology Williams Advanced Materials Maschinenhau Nurnherg Bionics Instrument Europe BV Inc GmhH Atomergic Chemetals Corp BOC Edwards General Scanning Inc Atramet Inc Cerdmaseal HCT SHAPING SYSTEMS SA CMK Ltd Test, burn-in equipment CT1 Cryogenics IDBTechnologies Ltd Comtec Ltd AEHRTest Systems CVT Ltd INFAB GmhH Crystal Specialities Inc Aetrium Inc DeMaCo Holland BV IPEC precision Crystallod Inc Alliance Sales (Europe) Ltd Duniway Stockroom Corp ITS: Intertrade Scientific GmhH CSM Industries Aseco Corp Edwards HighVacuum ITS: Intertradr Scientific Ltd DORA Texas Corp ASM Assemby Products BV International Kuwano/S 6i C Associates Dowa Mining Co Ltd B&G International EpiSoft Lambda Physik GmhH ELMA Malachit Blue M Electric Granville-Phillips Company Logitech Ltd Enirisorse Venezia Tecnologie Carl Zeiss Jena GmbH Hiden Analytical Inc Maintech Inc S.p.A - EN1 Group Cascade Microtech Europe Ltd Huntington Mechanical Malvern Instruments Ltd Fairchild Technologies Credence Memory Products Laboratories Inc Mega Systems Sr Chemicals Freiberger Compound Delta Design Inc HVA Megatech Ltd Materials GmhH General Scanning Inc IGC-APD Cryogenics Microcontrol Electronic GEL-PAK ITS: Intertrdde Scientific Ltd Inficon Inc MicroVision Corp Global Communications JEM America Cot-p Inland Vacuum Industries Modutek Corp Semiconductor Inc Karl Suss KG GmbH & Co Institute of Vacuum MR Semicon Inc Groupe Arnaud Electronics Kuwano/S & C Associates Technology N BucherAG Surface Process Hitachi Cable Lindberg/Blue M J.1.P ELEC Technology IDB Technologies Ltd Loranger International Corp John Crane Belfah P R Hoffman Machine III/V Reclaim Matelect Ltd Leda-Mass Ltd Products Intercrystal Ltd Materials Development Corp Mass-Vat Inc PersysTechnology Ltd Japan Energy/Nimtec Muehlbauer GmbH Megatech Ltd Process Technology Marketech International Multitest Inc MKS Instruments Inc Shuttleworth Inc MaTecK GmbH PANAMETRICS INC Pfeiffer Vacuum Ltd Sico Produktions-Und Handels M&Net Technology Ltd Shuttleworth Inc Precision Plus Vacuum Parts GmbH Moritani & Co Ltd Southland Cryogenics Inc SperdFam International Inc MT1 Corp Temptronic Corp Riher SA Speedfam-IPEC Ltd Nova Electronic Materials Inc Tesam Inc Richardson Electronics Ltd SPS Semiconductor Production Promecome Electronics Trade-Link BV SAES Getters (GB) Ltd Systems BV Ramet Ltd Trio-Tech International SAES Getters SpA Trade-Link BV Semimetrics Ltd Web Technology Inc Scanwel Ltd TSK America Inc W.M.S.D Sumitomo Electric USA Yamaichi Electronics GmbH Smart Scientific Limited Electronic Materials Group Ultra Tee Mfg Inc Yamaichi Electronics USA Inc Southland Cryogenics WED Ltd Sumitomo Metal Mining Co Ltd Structured Materials Industries Electronics Division Used equipment Inc Tianjin Electronic Materials X-ray equipment Alliance Sales (Europe) Ltd Televac Research Institute AXIC Inc AXIC Inc ULVAC Gm bH VeneziaTecnologie S.p.A. EN1 AX Analytical X-ray Systems Bid Service ULVAC Technologies Inc Group Bede Scientific Inc Blue IM Electric Vacuum Generators Wafer Technology Ltd Bede Scientific Instruments Ltd CrystecTechnology Trading VAT Inc Wafertech Scandinavia AB Blake Industries Inc GmbH VAT Vacuum Products Ltd West Associates (Europe) Ltd BrukerAXS GmbH Edwards High Vacuum VAT Vakuumventile AG Dage Precision Industries Ltd International Veeco Instruments Inc CiaAssubstrates: Ferrofluidics IDB Technologies Ltd HCT SHAPING SYSTEMS SA Semi-insulating Karl Suss KG GmbH & Co Wafering equipment: Inel Adolf-Slaby-Institut GmbH Reinraumetechnic Lanz polish, makings, handling ITS: Intertrade Scientific GmbH American Xtal Technology Semitec Semiconductor etc Lixi Inc Atometgic Chemetals Carp Equipment GmbH A-B Lasers Ltd Mi-Net Technology Ltd Atramet Inc Southland Cryogenics Alliance Sales (Europe) Ltd Moritani & Co Ltd CMK Ltd Techlink Aptek Industries Inc Philips Analytical Comtec Ltd Trade-Link BV Automated Industrial Systems Philips Analytical BV Crystal Support Systems Inc Tystar Carp Inc Crystallod Inc Blomme Automation DORA Texas Corp
0961-I 290/00/$ - see front matter 0 2000 Advanced Semiconductors Buyers’ Guide Elsevier Science Ltd. All rights reserved. 73 Dowa Mining Co Ltd Intercr)-stal Ltd Wafer Technology Ltd 1DORA Texas Carp ELMA Mzl.tchit Marketech International Wafertech Scandinavia AB Eagle-PicherTechnoIogies EMF Ltd MaTecK GmbH West Associates (Europe) Ltd GmbH Enirisorse Venezia Tecnologie Mi-Net Technology Ltd ESCETE Single Crystal S.p.A EN1 Group MT1 Carp Sic wafers Technology BV Firebird Semiconductors Ltd Freiberger Compound Materials Nova Electronic Materials Inc Cree lnc Promecome Electronics tiroupe Arnaud Electronics GmbH CS Clean Systems IDBTechnologies Ltd Furukawa Electric Co Ltd Ramet Ltd Epitronics Carp [nsaco Inc GEL-PAK Shin-Etsu Handotai Co Ltd ESCETE Single Crystal Intercrystal Ltd GroupeArnaud Electronics Showa Denko KK Technology BV International Wafer Service Hitachi Cable Sumitomo Metal Mining Co Ltd GEL-PAK lapan Energy (UK) Ltd IDBTechnologies Ltd Electronics Division IDBTechnoIogies Ltd Kulicke & Soffa Industries Inc III/V Reclaim lnsaco Inc Maintech Inc Intercrystal Ltd Ge substrates, blanks etc Marketech International Marketech International International Wafer Service American Xtal Technology MaTecK GmbH Mi-Net Technology Ltd ITS: Intertrade Scientific Ltd Atomergic Chemetals Corp Mi-Net Technology Ltd MT1 Corp M/A-COM MT1 Carp Atrdmet Inc Okmetic Oyj ,Marketech International Comtec Ltd Okmetic Oy Promecome Electronics AMaTecK GmbH Eagle-PicherTechnologies Poco Graphite Inc Ramet Ltd ,Mi-Net Technology Ltd Sico Produktions-Und Handels GmbH Research and PVD Materials .Mitsubishi Chemical JZMF Ltd GmbH carp Optoelectronics Division ESCETE Single Crystal SiCrystal AG semimetrics Ltd MT1 Corp Soitec SA Technology BV 3co Produktions-Und Handels Nova Electronic Materials Inc GEL-PAK Sterling Semiconductor Inc GmbH Promecome Electronics Groupe Arnaud Electronics Technologies and Devices Sumitomo Electric USA Ramet Ltd IDB Technologies Ltd international Inc (TDI) Electronic Materials Group Semimetrics Ltd lrnion lMini&e Marketech International iumitomo Metal Mining Co Ltd Showa Denko KK LMaTecK GmbH Wafer Technology Ltd Sumitomo Electric IJSA Electronics Division Metaleurop SA Wafertech Scandinavia AH Electronic IMaterials Group Tactron Elektronik GmbH Mi-Net Technology Ltd The Roditi International Carp Sumitomo Metal Mining Co Ltd MT1 Carp Silicon-On-Insulator, Electronics Division GmbH Promecome Electronics Tianjin Electronic Materials Silicon-On-Sapphire etc IUnion IMinikre Union Mini&e Adolf-Slaby-Inst GmbH WaferTechnology Ltd Research Institute West Associates (Europe) Ltd VeneziaTecnologie S.p.A. EN1 ATLMI Epitaxial Services, 111-V Wafertech Scandinavia AB William Rowland Ltd Group Division William Rowland Ltd Bicron Crystal Products WaferTechnology Ltd InP substrates Wafertech Scandinavia AB Epitech West Associates (Europe) Ltd Airtron Division of Litton Epitronics Carp Epitaxial American Xtal Technology ESCETE Single Crystal Products & GaN substrates Atomergic Chemetals Corp Technology BV Atramet Inc GEL-PAK Equipment American Xtal Technology Comtec Ltd IbisTechnology Carp ATM1 Epitaxial Services, III-V CrystaComm Inc IPEC precision Division Epitaxy equipment Crystallod Inc Maintech Inc Cermet Inc AIXTRON AG Dowa Mining Co Ltd Marketech International ESCETE Single Crystal AlXTRON lnc ELMA Malachit Mi-Net Technology Ltd Technology BV Apex Co Ltd Enirisorse Venezia Tecnologie Nova Electronic Materials Inc GEL-PAK Applied Epi Inc S.p.A . EN1 Group Okmetic Oyj Marketech International ASM America GEL-PAK Semimetrics Ltd M&Net Technology Ltd ASM Europe BV Global Communications Sico Produktions-Und Handels Nitronex Corp ATM1 EcoSys Corp Semiconductor Inc GmbH Parke Mathematical Centrotherm Groupe Arnaud Electronics SOITEC USA Inc Laboratories Inc Halbleitertechnologie GmbH III/V Reclaim The Roditi International Carp Promecome Electronics CVD Equipment Corp InPact GmbH Sumitomo Electric USA DCA Instruments Inc Intercrystal Ltd LJnion Mini&e Electronic Materials Group Japan Energy (UK) Ltd DCA Instruments Oy Technologies and Devices Japan Energy Corp EMCORE colp international Inc (TDI) Other substrates E&IF Ltd Japan Energy/Nimtec ACRAutomation in Cleanroom West Associates (Europe) Ltd M/A-COM Engelhard-Clal GmbH Marketech International Epigress AB Adolf-Slaby-Inst GmbH EpiSoft GaP substrates Mi-Net Technology Ltd Atomergic Chemetals Carp Airtron Division of Litton MT1 Corp Gold Tech Industries Atramet Inc Atomergic Chemetals Corp Promecome Electronics Hiittinger Elektronik GmbH & Bicron Crystal Products Co KG Atramet Inc Ramet Ltd Cermet Inc DORA Texas Carp Semimetrics Ltd Instruments SA Inc Comtec Ltd ELMA Malachit Showa Denko KK J.1.p. ELEC Crystal GmbH Japan Process Engineering Ltd Epigap Optoelektronik Sumitomo Electric IISA Crystallod Inc GEL-PAK Electronic Materials Group Crystar
74 Advanced Semiconductors Buyers’ Guide 0961-I 290/00/$ - see front matter 0 2000 Elsevier Science Ltd. All rights reserved. Koyo Lindberg Ltd SVTAssociates Inc Okmetic Oy Greene.Tweed Sr Co Ltd LPE United Mineral Sr Chemical OMMIC Hi-Tech Cemmics MattsonTechnology Inc Corp Optoelectronic Research Insaco Inc Metals Research Ltd Voltaix Inc Center (C)KC) Marketech International Mobius Ltd William Rowland Ltd OSemi Inc Mi-Net Technology Ltd Moore Technologies Parke Mathematical Morgan Matroc Ltd Moritani & Co Ltd Epiwafers Laboratories Inc Morgan Semiconductor Nippon Sanso Picogiga Products Akzo Nobel Chemicals Inc OMICRON Associates Procomp Compound MT1 Corp APA Optics OMICRON VAKUUMPHYSIK Semiconductor Division Poco Graphite Inc Apex Co Ltd GmbH RJM Semiconductor LLC Polymer Corp ATiM Inc Oxford Applied Research Atomergic Chemetak Corp Semimetrics Ltd Promecome Electronics Parke Mathematical Shin-Etsu Handotai Co Ltd Research and PVD Materials Bicron Crystal Products Laboratories Inc Showa Denko KK Carp Blue Lotus Micro Devices Performance Materials Inc SiCrystal AG Sico Produktions-Und Handels Centrotherm Riber SA SiGe Microsystems Inc GmbH Halbleitertechnologie GmbH SiGe Microsystems Inc Spire Corp SINTEC CVD LIMITED CoherentTutcore Ltd Smart Scientific Limited Sterling Semiconductor Inc Tactron Elektronik GmbH Comtec Ltd Spire Corp Structured .Materials Industries Techni Verre UK Defence Evaluation and Structured Materials Industries Inc The Carborundum Company Research Agency (DERA) Inc Sumitomo Chemical Co The Roditi International Corp DORA Texas Corp SVT Associates Inc Electronic Materials Division GmbH ELMA Malachit Thomas Swan Scientific Sumitomo Electric IJSA Uptime Semiconductor Service EMCORE carp Equipment Ltd EMF Ltd Electronic Materials Group Company Trade-Link BV Super Epitaxial Products Engelhard-Clal VG Semicon Enhanced Technology SVTAssociates Inc IR materials: II-VIs Wavemat Inc Technologies and Devices Products Ltd Atomergic Chemetals Corp International Inc (TDI) Epigap Optoelektronik AtrdItIet hC Tecstar lnc Epitaxy source materials Epistar Corp <:i-ptdhd InC ‘I’hr Roditi International Corp & gases Epitaxial Products Defence Evaluation and GmbH Akzo Nobel Chemicals Inc International Ltd Research Agency (DERA) Three-Five Compounds Akzo Nobel Polymer Epitaxial Technologies, LLC DORA Texas Corp TLC Precision Wafer Chemicals LLC Epitech Eagle-Picher Technologies Technology Inc Atlantic Metals 8r Alloys Inc Epitronics Corp GmbH Ilnion Mini&e Atramet Inc ESCETE Single Crystal ESCETE Single Crystal IInited Epitaxy Co Ltd BOC Gases Technology BV Technology BV Visual Photonics Epitaxy Co Electron Transfer Technologies Ferdinand-Braun-Institut Intercrystal Ltd Inc Furukawa Electric Co Ltd Japan Energy (UK) Ltd ELMOS GC + T Gusset Consulting Infra-Red & Johnson Matthey Electronics EMF Ltd &Trading AG LasIRvis Optoelectronic Epichem Inc Hitachi Cable Related Components Epichem Ltd (UK) Hitachi Cable America Inc Materials Marketech International Groupe Arnaud Electronics Insaco Inc MdTecK GmbH Inertec Institute of Electronics, IMi-Net Technology Ltd Japan Energy Carp National Academy of Ceramics, quartz & i&IT1 Cot-p Matheson TriGas, Semi-Gas Sciences of Belarus related materials Ramet Ltd Division Intelligent Epitaxy Technology Advanced Ceramics Corp Semimetrics Ltd Metaleurop SA IllC Aldrich Chemical Company Mi-Net Technology Ltd Intercrystal Ltd Inc IR materials: IILVs IQE plc Mining And Chemical Products Boedeker Plastics Inc Airtron Division of Litton IQE (Europe) Ltd Moritani & Co Ltd Bullen Ultrasonics Inc Akzo Nobel Polymer IQE Inc Morton International Inc Cambridge Precision Quartz Chemical5 LLC Morton International SA ITS: Intertrade Scientific Ltd Carbone ofAmerica Atometgic Chemetals Corp Japan Energy (UK) Ltd Pall Europe Ltd Coors Electronic Package Co Atramet Inc Japan Energy Corp Parke Mathematical Corning Inc Centrotherm Kopin Corp -Wafer Laboratories Inc Craftech Industrial Halbleitertechnologie GmbH Engineering Group Praxair CSM Industries Charles Evans &Associates Maintech Inc Praxair NV CVD Equipment Corp Coherent Tutcore Ltd MBE Technology Pte Ltd Promecome Electronics CVD Products Inc Crystallod Inc MBE Technology USA Inc Rhodia Rare Earth Inc EMF Ltd Defence Evaluation and Mi-Net Technology Ltd Robm and Haas Company Engelhard-Clal Research Agency (DERA) Mitsubishi Chemical Metalorganics ESCETE Single Crystal DORA Texas Corp Optoelectronics Division SGS Mochem Products GmbH Technology BV Dowa Mining Co Ltd MooreTechnologies Solkatronic Chemicals (A Furon SA Eagle-PicherTechnologies MT1 Corp Business Unit of Air Products GC + T Gusset Consulting & GmbH Nitronex Corp & Chemicals Inc) Trading AG ELMA iMalachit Nordic Epitaxy Southland Cryogenics Goodfellow Cambridge Ltd ESCETE Single Crystal NTT-AT Strem Chemicals Graphite Die Mold Technology BV OES/ITRI
0961-l 290/001$ - see front matter 0 2000 Advanced Semiconductors Buyers’ Guide Elsevier Science Ltd. All rights reserved. 75 Inclillm carp of America Hexawave Inc OPT Semiconductor Division IMite1 Semiconductor AB Intercrystal Ltd Hitachi (Device Development Mitsubishi Electric Europe BV IMitsubishi Electric Corp HF & Japan Energy (UK) Ltd Centre) Motorola Semiconductor OPT Semiconductor Division Johnson Matthey Electronics Hittite IMicrowave Products Sector IMitsubishi Electric Europe BV Jx crystals Itlc Honeywell Murata IMoritani & Co Ltd LaslRvis Optoelectronic Hughes Aircraft NEL, Compound Semiconductor IVanovation Technologies Components Hungarian Academy of Device Division IVichia Corp Marketech International Sciences, Division of Infineon Nitronex Corp IWronex Corp MaTecK GmbH Technologies AG Northrop Grumman (3cean Optics Inc Matheson Tri-Gas, Semi-Gas Microwave Devices OMMIC (3ES/ITRI Division M/A-COM Pantronix Carp (3mron Electronics Mi-Net Technology Ltd Matsushita Electronics Corp Raytheon (3ptekTechnology Inc MT1 Corp Microwave Technology Inc RF Micro Devices (3ptoelectronic Research Center Ramet Ltd Mitsubishi Electric Corp HF & Richardson Electronics Ltd (ORC) Rhodia Rare Earth Inc OPT Semiconductor Division Rockwell (3ptotek Ltd Semimetrics Ltd Mitsubishi Electric Europe BV Sanders, a Lockheed Martin 1Pantronix Corp Showa Denko KK Motorola Semiconductor Company 1Prema Prazisions Elektronik Tecstar Inc Products Sector Sanyo GmbH Union Mini&e NEC SiGe Microsystems Inc 1?RP Optoelectronics Ltd United Epitaxy Co Ltd Network Device Sony (2T Optoelectronics WaferTechnology Ltd NorthernTelecom Stanford Microdevices 1Roper Scientific/Acton OKI Tactron Elektronik GmbH Research Superconductors OMMIC Teledyne Electronic ‘iDL Inc Technologies
76 Advanced Semiconductors Buyers’ Guide 0961-I 290/00/$ - see front matter 0 2000 Elsevier Science Ltd. All rights reserved. Greene,Tweed & Co Ltd ihuttleworth 11~ carp ‘PM Pure Metals GtiH ‘raxair HCT SHAPING SYSTEMS SA ileeTechnrh .,,!nii Zevatech Inc %axair NV Infab US Inc iouthl,ii::i t.r!ogenics %omecome Electronics Interworld 5;q>crtor Surgical International Environment: toxic ITS: Intertrade Scientific Ltd handling etc ihipley Europe Ltd iolkatronic Chemicals Kaijo Corp Xontract analysis/services Bionics Instrument Europe BV Megatech Ltd iouthland Cryogenics 5ede Scientific Instruments Ltd BOC Edwards rMT Inc IifJmPoRE 3OC Edwards Cool Fog Systems Inc ;nited Mineral & Chemical N BucherAG Surface Process lhell Instruments CS Clean Systems Technology COT ShemTrace Corp Dage Semiconductor Services Voltaix Inc Pall Corp zrystal Support Systems Inc DAS GmbH Web Technology Inc Process Technology 1age Electronic Europa- ENMETAnalytical Instruments Riber SA Vertriebs GmbH Hager + Elsaesser Wafer recycling S&K Products International Inc 3ldorado Technical Services IEM Technologies SEZ AG Inc ITS: Intertrade Scientific Ltd 4merican Silicon Product SMI Europe Epichem Inc Moritani & Co Ltd (ASP) sopra Flowmeca Inc West Associates (Europe) Ltd 4tlantic Metals &Alloys Inc Speedfam-IPEC Ltd Sroupe Arnaud Electronics CMK Ltd TMT Inc Hungarian Academy of Speciality chemicals, Dage Semiconductor Services TSKAmerica 1ncWM.S.D Groupe Arnaud Electronics Sciences, Division of resists, wires, gases etc Uptime Semiconductor Service Microwave Devices III/V Reclaim ACSI (Advanced Chemical Company [BM Analytical Services ITS: Intertrade Scientific Ltd White Knight Pumps Inc [BS Ion Beam Services Systems International) Picopolish ACSI Inc Yield Engineering [nfab US Inc Promecome Electronics Air Products & Chemicals Inc Ionic Systems Inc Semimetrics Ltd Cleanroom equipment I A Woollam Co Inc Aldrich Chemical Company Sico Produktions-Und Handels Inc ACRAutomation in Cleanroom Lighthouse Worldwide GmbH Arch Chemicals NV Silicon Materials Service BV GmbH Solutions ATM1 Inc Advance Tabco Loughborough Surface Analysis Tactron Elektronik GmbH Atomefgic Chemetals Corp AGRU Kunststofftechnik Ltd Union Mini&e Atramet Inc AIXTRON Inc LSA Ltd BOC Edwards Alliance Sales (Europe) Ltd Matelect Ltd BOC Gases Measurement Amerimade Technology Inc Materials Analysis Group Brewer Science Ltd Anatel Corp Parke Mathematical 6 Testing Cambridge Precision Quartz Applied ControlTechnology Laboratories Inc Cyantek Arc Machines Inc Physical Electronics GmbH EKC Technology Ltd Electrical measurement: B &W Projects Inc PSP VacuumTechnology Ltd Electron Transfer Technologies DLTS, EBIC, Hall, PL etc Berkshire Corp SAES Getters (GB) Ltd Inc BOC Edwards Scanwel Ltd Accent Semiconductor ELMOS Cambridge Precision Quartz ShivaTechnologies Inc Technologies EMF Ltd CFMTechnologies Inc Structured Materials Industries Concept Systems Engelhard Corp Contamination Control Inc Dage Precision Industries Ltd Engis Corp Apparel Ltd Uptime Semiconductor Service Enirisorse VeneziaTecnologie Epichem Inc Cool Fog Systems Inc Company S.p.A - EN1 Group FairchildTechnologies Daw Technologies Inc Keithley Instruments General Chemical Corp Forbo-Giubiasco SA KLA-Tencor Distributors Goodfellow Cambridge Ltd Hager + Elsaesser Lake Shore Cryotronics Inc Bid Service Groupe Arnaud Electronics Infab US Inc Lehighton Electronics Inc California Eastern Laboratories Hager -t Elsaesser Interworld Matelect Ltd Cambridge Precision Quartz Hoechst Aktiengesellschaft Ion Systems Materials Development Corp Crystal Support Systems Inc Honeywell Electronic ITS: Intertrade Scientific Ltd MDC Materials Development Crystec Technology Trading Chemicals Lindberg/Blue M Corp SA GmbH Inertec Megatech Ltd Mi-Net Technology Ltd Eagle-Picher Technologies Ionic Systems Inc Meissner + Wurst GmbH & CO MMRTechnologies Inc GmbH JSR Electronics NV MSS CleanTechnology Ltd Optoelectronic Research GroupeArnaud Electronics Less Common Metals Ltd Nordiko USA Inc Center (ORC) ITS: Intertrade Scientific Ltd Mallingkrodt Baker Inc NTA Industries Inc Oxford Instruments MDC Materials Development Matheson T&Gas, SemiGas Pacific Scientific SARL Division Scientific Vacuum Systems Carp SA Division Pall carp Semilab RT Moritani & Co Ltd Mega Systems & Chemicals Particle Measuring Systems Semimetrics Ltd MR Semicon Inc Merck KGAA Europe Ltd Solid State Measurements Inc Richardson Electronics Ltd Microminiature Technology Inc Particle Measuring Systems Inc s0pI-a Scanwel Ltd MiningAnd Chemical Products PersysTechnology Ltd Technical Software Service Sedis Morton International SA Plascore Inc The Roditi International Corp Semi Dice Inc Mueller Feindraht AG ProcessTechnology Gmbh SPS Semiconductor Production N Bucher AG Surface Process PROMIS Systems Corp (UK) VeneziaTecnologie S.p.A. EN1 Systems BV Technology Ltd Group Sydec International Parke Mathematical Reinraumetechnic Lanz Wafertech Scandinavia AB United Mineral & Chemical Laboratories Inc Scientific Vacuum Systems
Advanced Semiconductors Buyers’ Guide 0961-l 290/00/$ - see front matter 0 2000 77 Elsevier Science Ltd. All rights reserved. Instrumentation Research ogitech Ltd :RTechnology iAES Getters (GB) Ltd oughborough Surface Analysis jage Electronic Europa- Anatel Corp iAES Getters SpA Ltd Vertriebs GmbH Arbin Instruments icanwel Ltd SA Ltd Bage Precision Industries Ltd Avantes BV iENTECH Instruments GmbH late&t Ltd ligital Instruments,Veeco AXS Analytical X-ray Systems iOpEi laterials Development Carp Metrology Group BekaAssociates Ltd ipiricon Inc IDC Materials Development SCETE Single Crystal Bernt GmbH rechnical Sofrware Service Carp SA Technology BV Bionics Instrument Europe BV relevac 4i-Net Technology Ltd EI Company Blake Industries Inc rhermomicroscopes 4icrion Cot-p ienerdl Scanning Inc HOC Edwards lhXAm$tid 4icroVision Corp Iitachi Scientific Instruments Bronkhorst High-Tech B\’ rrade-Link BV 4MRTechnologies Inc Ioriba Europe GmbH Burleigh Instruments Inc Eellweger Analytics Aorgan Semiconductor COS Vision Systems NV CAMECA Products DB Technologies Ltd Cerprobe Europe Ltd Materials )cean Optics Inc nstruments SA Inc ChemIcon lnc onic Systems Inc analysis/characterisation/in IMICRON Associates Climet Instruments Co MICRON VAKUUhWHYSK TS: Intertrade Scientific GmbH Coherent Tutcore Ltd spection equipment GmbH TS: Intertrade Scientific Ltd Cranfield Precision Inc mB Extrel >mron Electronics EOL UK CTI-Cryogenics kccent Semiconductor )n-LineTechnologies Inc EOL LISA Inc Dage Precision Industries Ltd Technologies >xford Instrumenrs MAR Precision Systems Inc Digital Instruments,Veeco Aetrium Inc ‘acific Precision Laboratories obin Yvon Metrology Group Allied High Tech Products Im ‘hilips AnalyticaI (BTEM-OMO of PLANAR EpiSoft B.L.E. Labontory Equipment ‘hilips Analytical BV concern Hewlett Packard GmbH GmbH ‘ROBION 78 Advanced Semiconductors Buyers’ Guide 0961-l 290/00/$ - see front matter 0 2000 Elsevier Science Ltd. All rights reserved. Temperature ProcessTechnology Enirisorse Venezia Tecnologie SVTAssociates Inc control/measurement Semifab Inc S.p.A - EN1 Group VeneziaTecnologie S.p.A. EN1 Structured Materials Industries Fraunhofer Institute for Solar Group Aetrium Inc Inc Energy S!-stems Affinity Industries Inc SVTAssociates Inc Future Horizons Societies/Associations Blue M Electric Tactron Elektronik GmhH Gateway Modeling BOC Edwards Association of Vacuum Temptronic Corp CC +T Gusset Consulting & CI Systems Ltd Equipment Manufacturers The Roditi International Corp Trading A(; Cool Fog Systems Inc International Gmbh Hillelian Concepts Inc CryoPhysics Ltd Flowmeca Inc Tystar Corp Integrated Circuit Engineering Delta Design Inc ICOS Vision Systems NV Uptime Semiconductor Service KLA-Tencor Engelhard-Clal Institution of Electrical Company LSA Ltd EpiSoft Engineers Luwa Lepco Ircon Inc JEMI IIK Ltd Mijbius Ltd ITS: Intertrade Scientific GmbH VDMA Fachverband Societies, RJM Semiconductor LLC ITS: Intertrade Scientific Ltd PRODIICTRONIC Strategy Analytics Ltd Johnson Matthey Electronics Consultants & Structured Materials Industries KineticsThermal Systems Universities/Government Research Inc Lake Shore Cryotronics Inc Tefen UK Ltd research organisations Lighthouse Worldwide Organisations VeneziaTecnologie S.p.A. EN1 CM Solutions Group CNR-MASPEC Lindbermlue M Consultants Defence Evaluation and Materials Development Corp Private research Research Agency (DERA) MDC Materials Development Ansoft Carp Europe Black SrVeatch LLP organisations Ferdinand-Brdun-Institut Carp SA Institute of Electronics, Megatech Ltd Clean Room Consulting GmbH Adolf-Slaby-Inst GmbH Commonwealth Scientific National Academy of MMRTechnologies Inc Enirisorse Venezia Tecnologie Sciences of Belarus MS1 Electronics Inc (UK) S.p.A - ENI Group Crystallod Inc JEMI UK Ltd Neslab Instruments IIMEC Moscow Institute of Electronic Defence Evaluation and Neslab Instruments Europe BV JEMI IJK Ltd Technology (MIET) Noah Precision Inc Research Agency (DERA) Nanopowder Enterprises Inc EMF Ltd Optoelectronic Research Omron Electronics SOpGi Center (ORC) Enhanced Technology On-Line Technologies Inc Structured ,Materials Industries Univeristy of California at Products Ltd Oxford Instruments Inc Santa Barbara The IR camera, using a 905 nm laser diode system, measures etches rates and calls the endpoints of ternary and quaternary layers of Ill-V materials. It can be positioned accurately on the wafer using a manual or motorized X-Y Inicflcramclrlc Signal Camera * translation stage and a digital image of the wafer surface provided by an integrated CCD. Pattern recognition is also available for automatic positioning. Used as a stand-alone system or integrated into a Multisem platform for multiple chamber process control it is driven by the software platform including real time in-situ process control, user programmable steps, and high sensitivity endpoint algorithms. Data management and reprocessing allows review and post process analysis of runs. France 7. route d’Egly - 91290 Arpa~on Tel+33164909365 Fax+33160839183 USA : +1 732 494 8660 Germany : +49 46 23 17-O E-mail : lfg-sales@jobin-sofiexom Italy : + 39 2 57 60 30 50 Japan :+81356677351 Uk:+442082048142 0961-l 290/00/$ - see front matter 0 2000 Advanced Semiconductors Buyers’ Guide Elsevier Science Ltd. All rights reserved. 79