Rochester Institute of Technology RIT Scholar Works Articles 10-14-2008 Plasma-Controlled Metal Catalyst Saturation and the Initial Stage of Carbon Nanostructure Array Growth Igor Levchenko University of Sydney Ken Ostrikov CSIRO Materials Science and Engineering Davide Mariotti Rochester Institute of Technology Anthony Bruce Murphy CSIRO Materials Science and Engineering Follow this and additional works at: http://scholarworks.rit.edu/article Recommended Citation I. Levchenko, K. Ostrikov, D. Mariotti, and A.B. Murphy, Journal of Applied Physics 104, 073308 (2008). https://doi.org/10.1063/ 1.2996272 This Article is brought to you for free and open access by RIT Scholar Works. It has been accepted for inclusion in Articles by an authorized administrator of RIT Scholar Works. For more information, please contact
[email protected]. JOURNAL OF APPLIED PHYSICS 104, 073308 ͑2008͒ Plasma-controlled metal catalyst saturation and the initial stage of carbon nanostructure array growth ͒ I. Levchenko,1,a K. Ostrikov,2,1 D. Mariotti,3 and A. B. Murphy2 1Plasma Nanoscience, School of Physics, The University of Sydney, Sydney NSW 2006, Australia 2CSIRO Materials Science and Engineering, P. O. Box 218, Lindfield NSW 2070, Australia 3Department of Microelectronic Engineering, Rochester Institute of Technology, Rochester, New York 14623, USA ͑Received 11 July 2008; accepted 18 August 2008; published online 14 October 2008͒ The kinetics of the nucleation and growth of carbon nanotube and nanocone arrays on Ni catalyst nanoparticles on a silicon surface exposed to a low-temperature plasma are investigated numerically, using a complex model that includes surface diffusion and ion motion equations. It is found that the degree of ionization of the carbon flux strongly affects the kinetics of nanotube and nanocone nucleation on partially saturated catalyst patterns.