DOCSLIB.ORG

Industrial Plasma Engineering. Vol. 2, Applications to Nonthermal Plasma

Total Page：16

File Type：pdf, Size：1020Kb

Download full-text PDF Read full-text
Industrial Plasma Engineering. Vol. 2, Applications to Nonthermal Plasma Industrial Plasma Engineering Volume 2: Applications to Nonthermal Plasma Processing This page intentionally left blank Industrial Plasma Engineering Volume 2: Applications to Nonthermal Plasma Processing J Reece Roth Department of Electrical and Computer Engineering University of Tennessee, Knoxville Institute of Physics Publishing Bristol and Philadelphia c IOP Publishing Ltd 2001 All rights reserved. No part of this publication may be reproduced, stored in a retrieval system or transmitted in any form or by any means, electronic, mechanical, photocopying, recording or otherwise, without the prior permission of the publisher. Multiple copying is permitted in accordance with the terms of licences issued by the Copyright Licensing Agency under the terms of its agreement with the Committee of Vice-Chancellors and Principals. British Library Cataloguing-in-Publication Data A catalogue record for this book is available from the British Library. ISBN 0 7503 0544 4 hardback 0 7503 0545 2 paperback Library of Congress Cataloging-in-Publication Data are available Commissioning Editor: John Navas Production Editor: Simon Laurenson Production Control: Sarah Plenty Cover Design: Victoria Le Billon Published by Institute of Physics Publishing, wholly owned by The Institute of Physics, London Institute of Physics Publishing, Dirac House, Temple Back, Bristol BS1 6BE, UK US Office: Institute of Physics Publishing, The Public Ledger Building, Suite 1035, 150 South Independence Mall West, Philadelphia, PA 19106, USA Typeset in the UK by Text 2 Text, Torquay, Devon Printed in the UK by MPG Books Ltd, Bodmin, Cornwall Contents Contents, Volume 1: Principles viii Preface to Volume 2 ix 14 Surface Interactions in Plasma Processing 1 14.1 Industrial Plasma Processing 1 14.2 Plasma Active Species 6 14.3 Heterogeneous Interactions with Surfaces 9 14.4 Secondary Electron Emission 15 14.5 Sputtering 17 14.6 Ion Implantation in Solids 31 References 35 15 Atmospheric Pressure Plasma Sources 37 15.1 Characteristics of Industrial Plasma Sources 38 15.2 Atmospheric Pressure Corona Sources 46 15.3 Atmospheric Dielectric Barrier Discharges (DBDs) 50 15.4 The One Atmosphere Uniform Glow Discharge Plasma (OAUGDP) 55 15.5 Arcjet Plasma Sources 65 15.6 Inductively Coupled Plasma Torches 69 References 72 16 Vacuum Plasma Sources 74 16.1 Intermediate-Pressure Plasma Sources 74 16.2 Low-Pressure Plasma Sources 93 16.3 High-Vacuum Plasma Sources 108 16.4 Summary of Plasma Source Parameters 109 References 110 17 Plasma Reactors for Plasma Processing 113 17.1 Plasma Reactors for Surface Treatment 115 17.2 Plasma Reactors for Ion Implantation 139 17.3 Reactors for Ion-Beam-Induced Sputter Deposition 146 vi CONTENTS 17.4 Plasma/Cathode Sputter Deposition Reactors 157 17.5 Reactors for Plasma Chemical Vapor Deposition 167 17.6 Plasma Etching Reactors 179 References 193 18 Specialized Techniques and Devices for Plasma Processing 196 18.1 Vacuum System Operation 196 18.2 Workpiece Current Collection 200 18.3 Remote Exposure Configurations 205 18.4 Motional Averaging to Achieve Uniformity of Effect 211 18.5 Gas Flow Distribution 219 18.6 Electrohydrodynamic (EHD) Flow Control 225 References 239 19 Parametric Plasma Effects On Plasma Processing 240 19.1 The Role of the Plasma 240 19.2 Kinetic Parameters of Plasma Processing 243 19.3 RF Power Coupling 249 19.4 Sheath Thickness Above Workpiece 255 19.5 RF Sheath Phenomenology 263 19.6 Formation of Active Species 271 19.7 The Effect of Electron Magnetization on Active-Species Concentration 277 References 283 20 Diagnostics for Plasma Processing 284 20.1 Experimental Parameters 284 20.2 Gas-Phase Process Monitoring 286 20.3 Plasma Diagnostics 295 20.4 Measurement of Surface Topography 313 20.5 Measurement of Surface Composition 315 20.6 Surface Energy Related Diagnostics 318 20.7 Measurement of Electrical Properties 325 20.8 In Situ Process Monitoring 328 20.9 Endpoint Detection 332 References 333 21 Plasma Treatment of Surfaces 335 21.1 Objectives of Plasma Surface Treatment 335 21.2 Passive Plasma Cleaning 341 21.3 Active Plasma Cleaning 352 21.4 Plasma Sterilization 360 21.5 Treatment of Thin Films 369 21.6 Treatment of Polymeric or Organic Solids 376 21.7 Treatment of Fabrics and Fibers 383 References 396 CONTENTS vii 22 Surface Modification by Implantation and Diffusion 399 22.1 Ion Implantation Technology 399 22.2 Ion Implantation Dose and Depth Profiles 403 22.3 Ion-Beam Implantation 411 22.4 Plasma Ion Implantation 421 22.5 Low-Energy Plasma Thermal Diffusion Treatment 443 References 448 23 Thin-Film Deposition by Evaporative Condensation and Sputtering 451 23.1 Applications of Thin Films 451 23.2 Thin-Film Characteristics 461 23.3 Deposition by Evaporative Condensation 471 23.4 Ion-Beam Sputter Deposition 477 23.5 Plasma-Assisted Ion-Beam Sputter Deposition 490 23.6 Plasma/Cathode Sputter Deposition 495 23.7 Quality Issues in Sputter Deposition 499 References 500 24 Plasma Chemical Vapor Deposition (PCVD) 502 24.1 Thin-Film Deposition by PCVD 502 24.2 Physical and Chemical Processes in PCVD Glow Discharges 510 24.3 Characteristics of Polymeric Thin Films Formed by PCVD 517 24.4 Glow Discharge Polymerization 528 24.5 Glow Discharge Reactors for PCVD 531 24.6 Summary of Deposition Reactor Plasma Parameters 537 References 538 25 Plasma Etching 540 25.1 Survey of Plasma Etching 540 25.2 Pattern Transfer by Plasma-Related Etching 551 25.3 Control Variables for Plasma Etching 573 25.4 The Chemistry of Plasma Etching 578 25.5 Plasma Etching of Microelectronic Materials 597 25.6 Technical Issues in Plasma Etching 605 References 612 Appendices 614 A Nomenclature 614 B Physical Constants 623 C Units and Conversion Factors 624 D Useful Formulae 626 Index 628 Contents Volume 1: Principles 1 Introduction 1 2 Kinetic Theory of Gases 34 3 Motion of Charges in Electric and Magnetic Fields 54 4 Characteristics of Plasma 117 5 Electron Sources and Beams 159 6 Ion Sources and Beams 189 7 Ionizing Radiation Sources 223 8 Dark Electrical Discharges in Gases 237 9 DC Electrical Glow Discharges in Gases 283 10 DC Electrical Arc Discharges in Gases 352 11 Inductive RF Electrical Discharges in Gases 391 12 Capacitive RF Electrical Discharges in Gases 417 13 Microwave Electrical Discharges in Gases 464 Appendices 516 Preface to Volume 2 Volume 1 of this three-volume work is intended to provide a background in the principles of low temperature, partially ionized Lorentzian plasmas that are used industrially. Volumes 2 and 3 are intended to provide a description of plasma-related processes and devices that are of actual or potential commercial importance. The text assumes that the average student or practicing engineer has not recently taken a course in plasma physics, and possesses a background in physics and calculus that ended at the sophomore level. These three volumes are intended to be used as textbooks at the senior or first-year graduate level by students from all engineering and physical science disciplines, and as a reference source by practicing engineers. Use of this second volume as a textbook or reference source assumes that the reader is familiar with the material in Volume 1, or has an equivalent background in low-temperature Lorentzian plasma physics. An introduction to plasma physics and the physical processes important in industrial plasmas is contained in the first four chapters of Volume 1. Chapters 5 through 7 of Volume 1 describe the sources of ion and electron beams and ionizing radiation that are used industrially. Chapters 8 through 10 of Volume 1 describe the physics and technology of DC electrical discharges, and chapters 11 through 13 describe the physics and technology of RF plasma sources. In this second volume, chapter 14 is devoted to some aspects of materials science that are basic to plasma-processing applications. Chapters 15 and 16 are, respectively, devoted to atmospheric and vacuum plasma sources, chapter 17 to the plasma reactors (or plasma ‘tools’) frequently used industrially, and chapter 18 to specialized methods and devices used in these reactors. Chapter 19 is devoted to the effects of plasma-related parameters on the outcomes of plasma processing. Chapter 20 covers the most frequently used diagnostic methods to measure the independent input variables, the plasma parameters, and the results of plasma processing. Chapters 21 through 25 cover industrial applications categorized as non-thermal plasma processing of materials. Volume 3 will cover thermal plasma processing and plasma devices. ix x PREFACE TO VOLUME 2 Chapters in this volume will cover the melting and refining of bulk materials; subsonic and supersonic plasma aerodynamics; the use of plasmas for synthetic and destructive plasma chemistry; electrical sparking, switchgear, and coronas, all important to the electric utilities; plasma lighting devices; the applications of electrohydrodynamics to electrostatic precipitation and paint spraying; and research and development plasmas with potential for industrial applications. This second volume is not intended to be self-contained. Frequent reference is made to equations, derivations, and data discussed in Volume 1. This volume does not contain derivations from first principles of some advanced material from plasma physics or materials science. Such background can be found in other sources listed among the references at the end of the individual chapters, or in the annotated bibliography that will be included at the end of Volume 3. SI units have been used throughout the text except where conventional usage (e.g., electronvolt, Torr) has become so firmly established that non-SI units are more appropriate. Available technical dictionaries in the fields of physics, chemistry, and electrotechnology generally have an inadequate coverage of the terminology required to discuss the subject of industrial plasma engineering. In an attempt to deal with this problem and increase the value of this book as a reference source, the technical terminology, jargon, and acronyms used in the field of industrial plasma engineering are not only defined and fully discussed, but also italicized and indexed when they first appear in the text.
Load more

Recommended publications
  • Glossary Physics (I-Introduction)
    1 Glossary Physics (I-introduction) - Efficiency: The percent of the work put into a machine that is converted into useful work output; = work done / energy used [-]. = eta In machines: The work output of any machine cannot exceed the work input (<=100%); in an ideal machine, where no energy is transformed into heat: work(input) = work(output), =100%. Energy: The property of a system that enables it to do work. Conservation o. E.: Energy cannot be created or destroyed; it may be transformed from one form into another, but the total amount of energy never changes. Equilibrium: The state of an object when not acted upon by a net force or net torque; an object in equilibrium may be at rest or moving at uniform velocity - not accelerating. Mechanical E.: The state of an object or system of objects for which any impressed forces cancels to zero and no acceleration occurs. Dynamic E.: Object is moving without experiencing acceleration. Static E.: Object is at rest.F Force: The influence that can cause an object to be accelerated or retarded; is always in the direction of the net force, hence a vector quantity; the four elementary forces are: Electromagnetic F.: Is an attraction or repulsion G, gravit. const.6.672E-11[Nm2/kg2] between electric charges: d, distance [m] 2 2 2 2 F = 1/(40) (q1q2/d ) [(CC/m )(Nm /C )] = [N] m,M, mass [kg] Gravitational F.: Is a mutual attraction between all masses: q, charge [As] [C] 2 2 2 2 F = GmM/d [Nm /kg kg 1/m ] = [N] 0, dielectric constant Strong F.: (nuclear force) Acts within the nuclei of atoms: 8.854E-12 [C2/Nm2] [F/m] 2 2 2 2 2 F = 1/(40) (e /d ) [(CC/m )(Nm /C )] = [N] , 3.14 [-] Weak F.: Manifests itself in special reactions among elementary e, 1.60210 E-19 [As] [C] particles, such as the reaction that occur in radioactive decay.
    [Show full text]
  • Plasma Physics I APPH E6101x Columbia University Fall, 2016
    Lecture 1: Plasma Physics I APPH E6101x Columbia University Fall, 2016 1 Syllabus and Class Website http://sites.apam.columbia.edu/courses/apph6101x/ 2 Textbook “Plasma Physics offers a broad and modern introduction to the many aspects of plasma science … . A curious student or interested researcher could track down laboratory notes, older monographs, and obscure papers … . with an extensive list of more than 300 references and, in particular, its excellent overview of the various techniques to generate plasma in a laboratory, Plasma Physics is an excellent entree for students into this rapidly growing field. It’s also a useful reference for professional low-temperature plasma researchers.” (Michael Brown, Physics Today, June, 2011) 3 Grading • Weekly homework • Two in-class quizzes (25%) • Final exam (50%) 4 https://www.nasa.gov/mission_pages/sdo/overview/ Launched 11 Feb 2010 5 http://www.nasa.gov/mission_pages/sdo/news/sdo-year2.html#.VerqQLRgyxI 6 http://www.ccfe.ac.uk/MAST.aspx http://www.ccfe.ac.uk/mast_upgrade_project.aspx 7 https://youtu.be/svrMsZQuZrs 8 9 10 ITER: The International Burning Plasma Experiment Important fusion science experiment, but without low-activation fusion materials, tritium breeding, … ~ 500 MW 10 minute pulses 23,000 tonne 51 GJ >30B $US (?) DIII-D ⇒ ITER ÷ 3.7 (50 times smaller volume) (400 times smaller energy) 11 Prof. Robert Gross Columbia University Fusion Energy (1984) “Fusion has proved to be a very difficult challenge. The early question was—Can fusion be done, and, if so how? … Now, the challenge lies in whether fusion can be done in a reliable, an economical, and socially acceptable way…” 12 http://lasco-www.nrl.navy.mil 13 14 Plasmasphere (Image EUV) 15 https://youtu.be/TaPgSWdcYtY 16 17 LETTER doi:10.1038/nature14476 Small particles dominate Saturn’s Phoebe ring to surprisingly large distances Douglas P.
    [Show full text]
  • Plasma Physics and Advanced Fluid Dynamics Jean-Marcel Rax (Univ. Paris-Saclay, Ecole Polytechnique), Christophe Gissinger (LPEN
    Plasma Physics and advanced fluid dynamics Jean-Marcel Rax (Univ. Paris-Saclay, Ecole Polytechnique), Christophe Gissinger (LPENS)) I- Plasma Physics : principles, structures and dynamics, waves and instabilities Besides ordinary temperature usual (i) solid state, (ii) liquid state and (iii) gaseous state, at very low and very high temperatures new exotic states appear : (iv) quantum fluids and (v) ionized gases. These states display a variety of specific and new physical phenomena : (i) at low temperature quantum coherence, correlation and indiscernibility lead to superfluidity, su- perconductivity and Bose-Einstein condensation ; (ii) at high temperature ionization provides a significant fraction of free charges responsible for in- stabilities, nonlinear, chaotic and turbulent behaviors characteristic of the \plasma state". This set of lectures provides an introduction to the basic tools, main results and advanced methods of Plasma Physics. • Plasma Physics : History, orders of magnitudes, Bogoliubov's hi- erarchy, fluid and kinetic reductions. Electric screening : Langmuir frequency, Maxwell time, Debye length, hybrid frequencies. Magnetic screening : London and Kelvin lengths. Alfven and Bohm velocities. • Charged particles dynamics : adiabaticity and stochasticity. Alfven and Ehrenfest adiabatic invariants. Electric and magnetic drifts. Pon- deromotive force. Wave/particle interactions : Chirikov criterion and chaotic dynamics. Quasilinear kinetic equation for Landau resonance. • Structure and self-organization : Debye and Child-Langmuir sheath, Chapman-Ferraro boundary layer. Brillouin and basic MHD flow. Flux conservation : Alfven's theorem. Magnetic topology : magnetic helicity conservation. Grad-Shafranov and basic MHD equilibrium. • Waves and instabilities : Fluid and kinetic dispersions : resonance and cut-off. Landau and cyclotron absorption. Bernstein's modes. Fluid instabilities : drift, interchange and kink. Alfvenic and geometric coupling.
    [Show full text]
  • Plasma Descriptions I: Kinetic, Two-Fluid 1
    CHAPTER 5. PLASMA DESCRIPTIONS I: KINETIC, TWO-FLUID 1 Chapter 5 Plasma Descriptions I: Kinetic, Two-Fluid Descriptions of plasmas are obtained from extensions of the kinetic theory of gases and the hydrodynamics of neutral uids (see Sections A.4 and A.6). They are much more complex than descriptions of charge-neutral uids because of the complicating eects of electric and magnetic elds on the motion of charged particles in the plasma, and because the electric and magnetic elds in the plasma must be calculated self-consistently with the plasma responses to them. Additionally, magnetized plasmas respond very anisotropically to perturbations — because charged particles in them ow almost freely along magnetic eld lines, gyrate about the magnetic eld, and drift slowly perpendicular to the magnetic eld. The electric and magnetic elds in a plasma are governed by the Maxwell equations (see Section A.2). Most calculations in plasma physics assume that the constituent charged particles are moving in a vacuum; thus, the micro- scopic, “free space” Maxwell equations given in (??) are appropriate. For some applications the electric and magnetic susceptibilities (and hence dielectric and magnetization responses) of plasmas are derived (see for example Sections 1.3, 1.4 and 1.6); then, the macroscopic Maxwell equations are used. Plasma eects enter the Maxwell equations through the charge density and current “sources” produced by the response of a plasma to electric and magnetic elds: X X q = nsqs, J = nsqsVs, plasma charge, current densities. (5.1) s s Here, the subscript s indicates the charged particle species (s = e, i for electrons, 3 ions), ns is the density (#/m ) of species s, qs the charge (Coulombs) on the species s particles, and Vs the species ow velocity (m/s).
    [Show full text]
  • Rheology of Human Blood Plasma: Viscoelastic Versus Newtonian Behavior
    week ending PRL 110, 078305 (2013) PHYSICAL REVIEW LETTERS 15 FEBRUARY 2013 Rheology of Human Blood Plasma: Viscoelastic Versus Newtonian Behavior M. Brust,1 C. Schaefer,1 R. Doerr,1 L. Pan,2 M. Garcia,2 P.E. Arratia,2 and C. Wagner1,* 1Experimentalphysik, Universita¨t des Saarlandes, Postfach 151150, 66041 Saarbru¨cken, Germany 2Department of Mechanical Engineering and Applied Mechanics, University of Pennsylvania, Philadelphia, Pennsylvania 19104, USA (Received 16 August 2012; revised manuscript received 5 December 2012; published 15 February 2013) We investigate the rheological characteristics of human blood plasma in shear and elongational flows. While we can confirm a Newtonian behavior in shear flow within experimental resolution, we find a viscoelastic behavior of blood plasma in the pure extensional flow of a capillary breakup rheometer. The influence of the viscoelasticity of blood plasma on capillary blood flow is tested in a microfluidic device with a contraction-expansion geometry. Differential pressure measurements revealed that the plasma has a pronounced flow resistance compared to that of pure water. Supplementary measurements indicate that the viscoelasticity of the plasma might even lead to viscoelastic instabilities under certain conditions. Our findings show that the viscoelastic properties of plasma should not be ignored in future studies on blood flow. DOI: 10.1103/PhysRevLett.110.078305 PACS numbers: 83.50.Jf, 83.60.Wc, 87.19.UÀ Blood is a complex fluid that consists of a suspension of microfluidic devices. The two investigated blood replace- blood cells in a liquid plasma which contains mostly water ment solutions with the same shear but different elonga- as well as proteins, mineral ions, hormones, and glucose.
    [Show full text]
  • In Vitro Demonstration of Cancer Inhibiting Properties from Stratified Self-Organized Plasma-Liquid Interface
    www.nature.com/scientificreports OPEN In vitro Demonstration of Cancer Inhibiting Properties from Stratifed Self-Organized Plasma-Liquid Received: 2 March 2017 Accepted: 11 September 2017 Interface Published: xx xx xxxx Zhitong Chen1, Shiqiang Zhang1, Igor Levchenko2,3, Isak I. Beilis4 & Michael Keidar1 Experiments on plasma-liquid interaction and formation of thinly stratifed self-organized patterns at plasma-liquid interface have revealed a nontrivial cancer-inhibiting capability of liquid media treated at self-organized interfacial patterns. A pronounced cancer suppressing activity towards at least two cancer cells, breast cancer MDA-MB-231 and human glioblastoma U87 cancer lines, was demonstrated in vitro. After a short treatment at the thinly stratifed self-organized plasma-liquid interface pattern, the cancer inhibiting media demonstrate pronounced suppressing and apoptotic activities towards tumor cells. Importantly, this would have been impossible without interfacial stratifcation of plasma jet to thin (of several µm) current flaments, which plays a pivotal role in building up the cancer inhibition properties. Furthermore, thinly stratifed, self-organized interfacial discharge is capable to efciently control the ROS and RNS concentrations in the cancer-inhibiting media. In particular, abnormal ROS/ RNS ratios are not achievable in discharges since they do not form stratifed thin-flament patterns. Our fndings could be tremendously important for understanding the cancer proliferation problem and hence, the potential of this approach in tackling the challenges of high cancer-induced mortality should be explored. Despite tremendous eforts undertaken, cancer and cancer-related diseases still remain among the most dan- gerous and mortiferous abnormalities responsible for about 13% of human death cases, totally accounting for more than 7 million per year1.
    [Show full text]
  • Research Report
    INSTITUTE OF PLASMA PHYSICS NAOOYA UNIVERSITY Equations for a Plasma Consisting of Matter and Antimatter A. H. Nelson and K. Ikuta IPPJ-131 August 1972 RESEARCH REPORT NAGOYA, JAPAN Equations for a Plasma Consisting of Matter and Antimatter A. H. Nelson end K. Ikuta IPPJ-131 August 1972 Further communication about this report is to be sent to the Research Information Center, Institute of Plasma Physics, Nagoya Uniyersity, Nagoya, JAPAN. Contents Page Abstract 1)Introduction 1 2)Basic Equations 3 2.1) Individual Particle Equations 5 2.2) Ambiplasma Equations 10 2.3) Oebye length in an Ambiplasma 23 3)Waves in an Ambiplasma 25 3.1) Linearized, Cnllisionless Equations 25 3.2) Longitudinal Waves with Bo = 0 28 3.2.1) The dispersion relations 28 3.2.2) Plasma type waves 31 3.2.3) Acoustic type waves 33 3.3) Transverse waves with Bo * k = 0 33 3.3.1) The dispersion relation 33 T.3.2) High Frequency waves 35 3.3.3) Low Frequency waves 39 References 40 ' Figure 1 41 Acknowledgement 42 Abstract A set of fluid type equations is derived to describe the macroscopic behaviour of a plasma consisting of a mixture of matter and antimatter •> The equations ?xe written in a form which displays the full symmetry of the medium with respect to particle charge and mass, a symmetry absent in normal plasmas. This symmetry of the equations facilitates their manipulation and solution, and by way of illustration the equations are used to analyze the propagation of electromagnetic and acoustic waves through a matter-antimatter plasma.
    [Show full text]
  • A Review of Recent Advances of Dielectric Barrier Discharge Plasma in Catalysis
    nanomaterials Review A Review of Recent Advances of Dielectric Barrier Discharge Plasma in Catalysis Ju Li 1, Cunhua Ma 1,*, Shengjie Zhu 1, Feng Yu 1 , Bin Dai 1 and Dezheng Yang 2,3 1 Key Laboratory for Green Processing of Chemical Engineering of Xinjiang Bingtuan, School of Chemistry and Chemical Engineering, Shihezi University, Shihezi 832003, China; [email protected] (J.L.); [email protected] (S.Z.); [email protected] (F.Y.); [email protected] (B.D.) 2 Laboratory of Plasma Physical Chemistry, School of Physics, Dalian University of Technology, Dalian 116024, China; [email protected] 3 Key Laboratory of Ecophysics, College of Sciences, Shihezi University, Shihezi 832003, China * Correspondence: [email protected]; Tel.: +86-0993-205-8775 Received: 28 August 2019; Accepted: 21 September 2019; Published: 9 October 2019 Abstract: Dielectric barrier discharge plasma is one of the most popular methods to generate nanthermal plasma, which is made up of a host of high-energy electrons, free radicals, chemically active ions and excited species, so it has the property of being prone to chemical reactions. Due to these unique advantages, the plasma technology has been widely used in the catalytic fields. Compared with the conventional method, the heterogeneous catalyst prepared by plasma technology has good dispersion and smaller particle size, and its catalytic activity, selectivity and stability are significantly improved. In addition, the interaction between plasma and catalyst can achieve synergistic effects, so the catalytic effect is further improved. The review mainly introduces the characteristics of dielectric barrier discharge plasma, development trend and its recent advances in catalysis; then, we sum up the advantages of using plasma technology to prepare catalysts.
    [Show full text]
  • Fluid Model of Plasma and Computational Methods for Solution E
    WDS'06 Proceedings of Contributed Papers, Part III, 180–186, 2006. ISBN 80-86732-86-X © MATFYZPRESS Fluid Model of Plasma and Computational Methods for Solution E. Havl´ıˇckov´a Charles University, Faculty of Mathematics and Physics, V Holeˇsoviˇck´ach 2, 180 00 Prague, Czech Republic. Abstract. This contribution gives basic insight into the fluid modelling in plasma physics. The main aim of the paper is to offer brief conspectus of equations that form the fluid model of plasma and to point out the differences between the theoretical model in general form as derived from the Boltzmann equation and the fluid model which is commonly used in practical simulations. Second part of the contribution summarizes computational methods which are often used for solution of the described model, as they were the most widely mentioned in literature. Introduction The simulation of plasma processes can be based on various approaches. The microscopic description of plasma is for many practical purposes too detailed or computationally too complicated and in some applications we need not to know the information about the behaviour of individual particles. Fluid model describes macroscopic plasma phenomena and reveals how the statistical plasma parameters evolve in time and space. Fluid model of plasma Theoretical description of plasma Fluid model of plasma is based on partial differential equations (PDEs) which describe the macro- scopic quantities such as density, flux, average velocity, pressure, temperature or heat flux. Governing PDEs can be derived from the Boltzmann equation (BE) by taking velocity moments. Zero moment of ∞ + 3 the Boltzmann equation ( −∞ (BE) d v) yields continuity equation for the particle density R ∂n Qρ + ∇ · (n~u) = (1) ∂t m ∞ ∞ + 3 1 + 3 Density and average velocity are defined as n = −∞ f d v and ~u = n −∞ ~vf d v.
    [Show full text]
  • Phenomenological Review on Quark–Gluon Plasma: Concepts Vs
    Review Phenomenological Review on Quark–Gluon Plasma: Concepts vs. Observations Roman Pasechnik 1,* and Michal Šumbera 2 1 Department of Astronomy and Theoretical Physics, Lund University, SE-223 62 Lund, Sweden 2 Nuclear Physics Institute ASCR 250 68 Rez/Prague,ˇ Czech Republic; [email protected] * Correspondence: [email protected] Abstract: In this review, we present an up-to-date phenomenological summary of research developments in the physics of the Quark–Gluon Plasma (QGP). A short historical perspective and theoretical motivation for this rapidly developing field of contemporary particle physics is provided. In addition, we introduce and discuss the role of the quantum chromodynamics (QCD) ground state, non-perturbative and lattice QCD results on the QGP properties, as well as the transport models used to make a connection between theory and experiment. The experimental part presents the selected results on bulk observables, hard and penetrating probes obtained in the ultra-relativistic heavy-ion experiments carried out at the Brookhaven National Laboratory Relativistic Heavy Ion Collider (BNL RHIC) and CERN Super Proton Synchrotron (SPS) and Large Hadron Collider (LHC) accelerators. We also give a brief overview of new developments related to the ongoing searches of the QCD critical point and to the collectivity in small (p + p and p + A) systems. Keywords: extreme states of matter; heavy ion collisions; QCD critical point; quark–gluon plasma; saturation phenomena; QCD vacuum PACS: 25.75.-q, 12.38.Mh, 25.75.Nq, 21.65.Qr 1. Introduction Quark–gluon plasma (QGP) is a new state of nuclear matter existing at extremely high temperatures and densities when composite states called hadrons (protons, neutrons, pions, etc.) lose their identity and dissolve into a soup of their constituents—quarks and gluons.
    [Show full text]
  • Surface Tension of Blood Serum, and the Determination of the Surface Tension of Biological Fluids
    THE SURFACE TENSION OF BLOOD SERUM, AND THE DETERMINATION OF THE SURFACE TENSION OF BIOLOGICAL FLUIDS BY HENRY N. HARK-INS A WILLIAM D. HARKINS (From the Departmni of Chemistry, University of Chicago, Chizago) (Received for publication January 4, 1929) INTRODUCTION This investigation was undertaken in order to obtain a more exact knowledge of the surface tension of undiluted blood serum, and its variation under various clinical conditions, than is given by the work reported earlier by others (1-12). It was found that practically all previous investigators have made errors in the experimental procedure or in the calculation of their results, usually in both, of such a high magnitude as to make their data almost entirely worthless. Thus a new field is opened up for future investigation. The mean value obtained for the surface tension of undiluted normal blood serum is 52 dynes per centimeter at 200 and 48 dynes at 370C. The result at the higher temperature agrees moderately well with the mean value found by Morgan and Woodward (7), but it is known that the method by which their results were calculated gives values which are too low. The average of all of their values at 370 is 45.5 while the average of all of our results is 46.2. However, their work repre- sents a great forward step, as it is of a much higher degree of accuracy than that of any of the other earlier investigators. Almost all of the values obtained by others are of an altogether different order of magni- tude, since they are from 10 to 20 dynes too high.
    [Show full text]
  • Bactericidal Action of the Reactive Species Produced by Gas-Discharge Nonthermal Plasma at Atmospheric Pressure: a Review Lindsey F
    IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 34, NO. 4, AUGUST 2006 1257 Bactericidal Action of the Reactive Species Produced by Gas-Discharge Nonthermal Plasma at Atmospheric Pressure: A Review Lindsey F. Gaunt, Clive B. Beggs, and George E. Georghiou Abstract—Biological decontamination using a nonthermal gas discharge at atmospheric pressure in air is the subject of signifi- cant research effort at this time. The mechanism for bacterial de- activation undergoes a lot of speculation, particularly with regard to the role of ions and reactive gas species. Two mechanisms have been proposed: electrostatic disruption of cell membranes and lethal oxidation of membrane or cytoplasmic components. Results show that death is accompanied by cell lysis and fragmentation in Gram-negative bacteria but not Gram-positive species, although cytoplasmic leakage is generally observed. Gas discharges can be a source of charged particles, ions, reactive gas species, radicals, and radiation (ultraviolet, infrared, and visible), many of which have documented biocidal properties. The individual roles played by these in decontamination are not well understood or quantified. However, the reactions of some species with biomolecules are doc- umented otherwise in the literature. Oxidative stress is relatively well studied, and it is likely that exposure to gas discharges in air causes extreme oxidative challenge. In this paper, a review is presented of the major reactive species generated by nonthermal plasma at atmospheric pressure and the known reactions of these Fig. 1. Kinetics of the inactivation process. A multislope survivor curve for with biological molecules. Understanding these mechanisms be- Pseudomonas aeuroginosa on a nitrocellulose membrane filter exposed to glow comes increasingly important as plasma-based decontamination discharge at atmospheric pressure (from [16]).
    [Show full text]