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Digital Light Deflection and Electro-Optical Laser Scanning For
DISSERTATION submitted to the Combined Faculties for the Natural Sciences and for Mathematics of the Ruperto-Carola University of Heidelberg, Germany for the degree of Doctor of Natural Sciences Put forward by M. Sc. Jonas Marquard Born in Hamburg Oral examination: December 13, 2017 DIGITALLIGHTDEFLECTIONAND ELECTRO-OPTICALLASERSCANNINGFOR STEDNANOSCOPY referees: Prof. Dr. Stefan W. Hell Prof. Dr. Wolfgang Petrich ABSTRACT Electro-optical deflectors provide a very attractive means of laser scan- ning in coordinate-targeted super-resolution microscopy due to their high scanning precision and high scanning velocity. Setups equipped with electro-optical deflectors demonstrate especially high resolving powers, fast imaging and reduced photobleaching. Two major shortcomings limit a widespread application of such de- vices. Their polarizing properties prevent de-scanning causing either a loss in signal or an increased background signal and the restricted deflection angles severely narrow the field of view. Herein, I report solutions to both of these problems. The polariza- tion issue is evaded via a passive polarization rectifier that allows unpolarized light to pass the laser scanner. The field of view is nearly doubled through a digital light deflector composed of a Pockels cell and a Wollaston prism. This principle could be extended by N stages of the same kind yielding a field of view enlargement by a factor of 2N. Thus, the work at hand paves the way for ultrafast electro-optical laser scanning with a large field of view. ZUSAMMENFASSUNG Aufgrund ihrer präzisen und äußerst schnellen Laserstrahlablenkung eignen sich elektrooptische Deflektoren im besonderen Maße für die Anwendung in hochauflösenden Laserscanning-Mikroskopen jenseits der Beugungsgrenze. -
Wide-View-Angle \Lambda/4 Plates for Diagnosing 193-Nm Lithography
OPTICAL REVIEW Vol. 16, No. 2 (2009) 188–191 Wide-View-Angle =4 Plates for Diagnosing 193-nm Lithography Tools Yohko FURUTONO and Hiroshi NOMURA Semiconductor Company, Toshiba Corporation, 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan (Received July 18, 2008; Accepted November 13, 2008) We developed new =4 plates, which are insensitive to angle of incidence at 193 nm. Thanks to the development of the wide-view-angle =4 plates, a polarimeter reticle is able to measure the polarization of illumination of immersion lithography tools. The wide-view-angle =4 plates are composed of four crystal plates; two are made of crystalline quartz categorized as positive uniaxial crystals, and two are made of sapphire categorized as negative uniaxial crystals. Since the birefringent crystals differ in regard to which is the higher of the two refractive indices for the ordinary ray and for the extraordinary ray, their combination mitigates the retardation change at oblique incidence. We measure the retardation change of the new =4 plates by the Senarmont method. Results show that the change of retardation is mitigated within an angular range of incidence of Æ20. # 2009 The Optical Society of Japan Keywords: polarization, lithography, quarter-wave-plate, retardation, birefringent 1. Introduction Lithography is a key technology for the mass production of LSIs. For the progress of miniaturization of LSIs, it is necessary to control several properties of lithography tools. 0-λ plate ( n > n ) Polarization of illumination should also be one of these e o λ /4 plate properties in the near future.1) For the two-beam interference ( ne < no ) through an objective with an NA above 1, the p-component of polarization of an incident light in resist does not wholly Fig. -
PME557 Engineering Optics
PME557 Engineering Optics Wei-Chih Wang National Tsinghua University Department of Power Mechanical Engineering 1 W.Wang Class Information • Time: Lecture M 1:20-3:10 (Eng Bldg 1 211) Lab Th 1:10-2:10 PM (TBA) • Instructor: Wei-Chih Wang office: Delta 319 course website: http://depts.washington.edu/mictech/optics/me557.index.html • Suggested Textbooks: - Optical Methods of Engineering Analysis, Gary Cloud, Cambridge University Press. - Handbook on Experimental Mechanics, Albert S. Kobayashi, society of experimental mechanics. - Applied Electromagnetism, Liang Chi Shen, Weber&Schmidt Dubury - Fundamentals of Photonics, B. Saleh, John Wiley& Sons. - Optoelectronics and Photonics: Principles and Practices, S. O. Kasap, Prentice Hall. - Fiber optic Sensors, E. Udd, John Wiley& Sons - Selected papers in photonics, optical sensors, optical MEMS devices and integrated optical devices. 2 W.Wang Class information • Grading Homework and Lab assignments 80% (3 assignments and 3 lab reports) Final Project 20% • Final Project: - Choose topics related to simpleo free space optics design, fiberopic sensors, waveguide sensors or geometric Moiré, Moiré interferometer, photoelasticity for mechanical sensing or simple optical design. - Details of the project will be announced in mid quarter - Four people can work as a team on a project, but each person needs to turn in his/her own final report. - Oral presentation will be held in the end of the quarter on your final project along with a final report. 3 W.Wang Objectives The main goal of this course is to -
Chapter 6 Prism Spectrometer
Contents 1 Spectrometer 1 1.1 Optical spectrometer ......................................... 1 1.2 Mass spectrometer ........................................... 1 1.3 Time-of-flight spectrometer ...................................... 1 1.4 Magnetic spectrometer ........................................ 1 1.5 Resolution ............................................... 2 1.6 References .............................................. 2 2 Prism 3 2.1 How prisms work ........................................... 3 2.1.1 Deviation angle and dispersion ................................ 4 2.2 Prisms and the nature of light ..................................... 4 2.3 Types of prisms ............................................ 5 2.3.1 Dispersive prisms ....................................... 5 2.3.2 Reflective prisms ....................................... 5 2.3.3 Polarizing prisms ....................................... 5 2.3.4 Deflecting prisms ....................................... 6 2.4 In optometry .............................................. 6 2.5 See also ................................................ 6 2.6 References ............................................... 6 2.7 Further reading ............................................ 6 2.8 External links ............................................. 6 3 Minimum deviation 7 3.1 References ............................................... 7 4 Angle of incidence 8 4.1 Optics ................................................. 8 4.1.1 Grazing angle ......................................... 8 4.2 Angle -
Polarization
CHAPTER 6 Polarization He flung himself on his horse and rode madly off in all directions. —Stephen Leacock, Gertrude the Governess 6.1 INTRODUCTION Optical polarization is the main way the vector wave nature of light manifests itself in practical problems. We’ve encountered plane waves, which are always perfectly polarized, and the Fresnel formulas, which predict the intensity and polarization of plane waves leaving a dielectric surface. Here we go into the measurement and manipulation of polarization, and how not to get in trouble with it. Polarization components such as retarders and Faraday rotators are mysterious to lots of people, but are actually fairly simple devices unless you try to get deeply into the physics of how they do what they do. Being practical folk, we’ll stick with their phenomenology and keep their inner workings pretty well out of it. The major uses of polarization components in optical systems are to control reflections, as in sunglasses and fiber isolators, and to split and combine beams without the heavy losses caused by ordinary beamsplitters. 6.2 POLARIZATION OF LIGHT 6.2.1 Unpolarized Light If you send thermal light through an analyzer,† twist the control ring as you may, the same proportion of the light comes through. This remains true if you put any sort of lossless polarization device ahead of it; a wave plate or a Faraday rotator doesn’t change the polarization at all. Thus we say that thermal light is unpolarized. This is a poser, because we know that any optical field can be decomposed into plane electromagnetic †Analyzers and polarizers are physically identical, but an analyzer is thought of as detecting the polarization state produced by the polarizer—in communications terms, the analyzer is part of the receiving section, and the polarizer is part of the transmitting section.