Polarization
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Digital Light Deflection and Electro-Optical Laser Scanning For
DISSERTATION submitted to the Combined Faculties for the Natural Sciences and for Mathematics of the Ruperto-Carola University of Heidelberg, Germany for the degree of Doctor of Natural Sciences Put forward by M. Sc. Jonas Marquard Born in Hamburg Oral examination: December 13, 2017 DIGITALLIGHTDEFLECTIONAND ELECTRO-OPTICALLASERSCANNINGFOR STEDNANOSCOPY referees: Prof. Dr. Stefan W. Hell Prof. Dr. Wolfgang Petrich ABSTRACT Electro-optical deflectors provide a very attractive means of laser scan- ning in coordinate-targeted super-resolution microscopy due to their high scanning precision and high scanning velocity. Setups equipped with electro-optical deflectors demonstrate especially high resolving powers, fast imaging and reduced photobleaching. Two major shortcomings limit a widespread application of such de- vices. Their polarizing properties prevent de-scanning causing either a loss in signal or an increased background signal and the restricted deflection angles severely narrow the field of view. Herein, I report solutions to both of these problems. The polariza- tion issue is evaded via a passive polarization rectifier that allows unpolarized light to pass the laser scanner. The field of view is nearly doubled through a digital light deflector composed of a Pockels cell and a Wollaston prism. This principle could be extended by N stages of the same kind yielding a field of view enlargement by a factor of 2N. Thus, the work at hand paves the way for ultrafast electro-optical laser scanning with a large field of view. ZUSAMMENFASSUNG Aufgrund ihrer präzisen und äußerst schnellen Laserstrahlablenkung eignen sich elektrooptische Deflektoren im besonderen Maße für die Anwendung in hochauflösenden Laserscanning-Mikroskopen jenseits der Beugungsgrenze. -
Optics Sample Material.Pdf
fiziks Institute for NET/JRF, GATE, IIT-JAM, M.Sc. Entrance, JEST, TIFR and GRE in Physics 4. Polarization of Light Plane of Incidence Incident ray, reflected ray, refracted ray and normal to incidence forms a plane that plane is plane of incidence. Plane of Polarization The plane passing through the direction of propagation and containing no vibration is called the “Plane of Polarization”. 4.1 Production of Plane Polarized Light Different methods of production of polarized light (i) Polarization by reflection (ii) Polarization by refraction (iii) Polarization by selective absorption (iv) Polarization by double refraction (v) Polarization by scattering 4.1.1 Polarization by Reflection If a linearly polarized wave (Electric vector associated with the incident wave lies in the plane of incidence) is incident on the interface of two dielectrics with the angle of incidence equal to . If the angle of incidence is such that 1 n2 p tan n1 then the reflection coefficient is zero. p No reflected p Plane polarized Air n1 n 2 Partiallypolarized Glass H.No. 40-D, Ground Floor, Jia Sarai, Near IIT, Hauz Khas, New Delhi-110016 Phone: 011-26865455/+91-9871145498 Website: www.physicsbyfiziks.com | Email: [email protected] 1 fiziks Institute for NET/JRF, GATE, IIT-JAM, M.Sc. Entrance, JEST, TIFR and GRE in Physics Thus if an unpolarized beam is incident with an angle of incidence equal to p , the reflected beam is plane polarized whose electric vector is perpendicular to the plane of incidence. Above equation is known as Brewster’s law. The angle p is known as the polarizing angle or the Brewster angle. -
Wide-View-Angle \Lambda/4 Plates for Diagnosing 193-Nm Lithography
OPTICAL REVIEW Vol. 16, No. 2 (2009) 188–191 Wide-View-Angle =4 Plates for Diagnosing 193-nm Lithography Tools Yohko FURUTONO and Hiroshi NOMURA Semiconductor Company, Toshiba Corporation, 8 Shinsugita-cho, Isogo-ku, Yokohama 235-8522, Japan (Received July 18, 2008; Accepted November 13, 2008) We developed new =4 plates, which are insensitive to angle of incidence at 193 nm. Thanks to the development of the wide-view-angle =4 plates, a polarimeter reticle is able to measure the polarization of illumination of immersion lithography tools. The wide-view-angle =4 plates are composed of four crystal plates; two are made of crystalline quartz categorized as positive uniaxial crystals, and two are made of sapphire categorized as negative uniaxial crystals. Since the birefringent crystals differ in regard to which is the higher of the two refractive indices for the ordinary ray and for the extraordinary ray, their combination mitigates the retardation change at oblique incidence. We measure the retardation change of the new =4 plates by the Senarmont method. Results show that the change of retardation is mitigated within an angular range of incidence of Æ20. # 2009 The Optical Society of Japan Keywords: polarization, lithography, quarter-wave-plate, retardation, birefringent 1. Introduction Lithography is a key technology for the mass production of LSIs. For the progress of miniaturization of LSIs, it is necessary to control several properties of lithography tools. 0-λ plate ( n > n ) Polarization of illumination should also be one of these e o λ /4 plate properties in the near future.1) For the two-beam interference ( ne < no ) through an objective with an NA above 1, the p-component of polarization of an incident light in resist does not wholly Fig. -
PME557 Engineering Optics
PME557 Engineering Optics Wei-Chih Wang National Tsinghua University Department of Power Mechanical Engineering 1 W.Wang Class Information • Time: Lecture M 1:20-3:10 (Eng Bldg 1 211) Lab Th 1:10-2:10 PM (TBA) • Instructor: Wei-Chih Wang office: Delta 319 course website: http://depts.washington.edu/mictech/optics/me557.index.html • Suggested Textbooks: - Optical Methods of Engineering Analysis, Gary Cloud, Cambridge University Press. - Handbook on Experimental Mechanics, Albert S. Kobayashi, society of experimental mechanics. - Applied Electromagnetism, Liang Chi Shen, Weber&Schmidt Dubury - Fundamentals of Photonics, B. Saleh, John Wiley& Sons. - Optoelectronics and Photonics: Principles and Practices, S. O. Kasap, Prentice Hall. - Fiber optic Sensors, E. Udd, John Wiley& Sons - Selected papers in photonics, optical sensors, optical MEMS devices and integrated optical devices. 2 W.Wang Class information • Grading Homework and Lab assignments 80% (3 assignments and 3 lab reports) Final Project 20% • Final Project: - Choose topics related to simpleo free space optics design, fiberopic sensors, waveguide sensors or geometric Moiré, Moiré interferometer, photoelasticity for mechanical sensing or simple optical design. - Details of the project will be announced in mid quarter - Four people can work as a team on a project, but each person needs to turn in his/her own final report. - Oral presentation will be held in the end of the quarter on your final project along with a final report. 3 W.Wang Objectives The main goal of this course is to -
Chapter 6 Prism Spectrometer
Contents 1 Spectrometer 1 1.1 Optical spectrometer ......................................... 1 1.2 Mass spectrometer ........................................... 1 1.3 Time-of-flight spectrometer ...................................... 1 1.4 Magnetic spectrometer ........................................ 1 1.5 Resolution ............................................... 2 1.6 References .............................................. 2 2 Prism 3 2.1 How prisms work ........................................... 3 2.1.1 Deviation angle and dispersion ................................ 4 2.2 Prisms and the nature of light ..................................... 4 2.3 Types of prisms ............................................ 5 2.3.1 Dispersive prisms ....................................... 5 2.3.2 Reflective prisms ....................................... 5 2.3.3 Polarizing prisms ....................................... 5 2.3.4 Deflecting prisms ....................................... 6 2.4 In optometry .............................................. 6 2.5 See also ................................................ 6 2.6 References ............................................... 6 2.7 Further reading ............................................ 6 2.8 External links ............................................. 6 3 Minimum deviation 7 3.1 References ............................................... 7 4 Angle of incidence 8 4.1 Optics ................................................. 8 4.1.1 Grazing angle ......................................... 8 4.2 Angle