Trichlorosilane Production

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Novel Materials, Processes and Technologies 20.3 DESIGN & DEMONSTRATION OF lpm anhydrous hydrogen chloride with 5 lpm nitrogen (as diluent) TRICHLORO SILANE (TCS) PRODUCTION to produce trichlorosilane at 10 kg/day rate by the following TECHNOLOGY IN BENCH SCALE LEVEL. reactions. Silicon in various grades is the most popular raw material for semiconductor industry. Large scale production of semiconductor grade silicon requires TriChloroSilane (TCS) as feed Hydrogen chloride and nitrogen gas is mixed in a mixing tank stock for its relative ease of purification to the desired degree. and then heated to the desired temperature before feeding in This is highly inflammable, corrosive and hazardous material. the fluidized bed reactor. Silicon is fed to the reactor from a bin o Present indigenous effort in Heavy Water Division, is to produce intermittently. Reactor is maintained at 240 C and slightly above crude trichlorosilane (main impurity is silicon tetrachloride), from atmospheric pressure to obtain optimum yield. The gaseous metallurgical grade silicon powder and anhydrous hydrogen stream from the reactor passes through a set of cartridge filter o chloride gas as raw material. This will be purified further by and cooled in a condenser to –80 C by dry ice in acetone. Most distillation. of the trichlorosilane produced is condensed in this condenser and non-condensables such as hydrogen and un-reacted Sufficient quantity of TCS was produced for further processing. hydrogen chloride are scrubbed by sodium hydroxide to neutralise The plant has been operated successfully for sufficient time. hydrogen chloride. The rest is vented to atmosphere. Condensed crude trichlorosilane is stored in an insulated 100 litre storage tank. The test facility uses 75 mm diameter and 2250 mm tall, fluidized V. K.Tangri <[email protected]> bed reactor metallurgical grade silicon powder 175 micron S. K. Das <[email protected]> (average particle size for 65 mesh and 100 mesh screens) and 5 - 138 BARC HIGHLIGHTS Chemical Sciences & Engineering.

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ST/SG/AC.10/1/Rev.16 (Vol.I) Recommendations on the TRANSPORT OF DANGEROUS GOODS Model Regulations Volume I Sixteenth revised edition UNITED NATIONS New York and Geneva, 2009 NOTE The designations employed and the presentation of the material in this publication do not imply the expression of any opinion whatsoever on the part of the Secretariat of the United Nations concerning the legal status of any country, territory, city or area, or of its authorities, or concerning the delimitation of its frontiers or boundaries. ST/SG/AC.10/1/Rev.16 (Vol.I) Copyright © United Nations, 2009 All rights reserved. No part of this publication may, for sales purposes, be reproduced, stored in a retrieval system or transmitted in any form or by any means, electronic, electrostatic, magnetic tape, mechanical, photocopying or otherwise, without prior permission in writing from the United Nations. UNITED NATIONS Sales No. E.09.VIII.2 ISBN 978-92-1-139136-7 (complete set of two volumes) ISSN 1014-5753 Volumes I and II not to be sold separately FOREWORD The Recommendations on the Transport of Dangerous Goods are addressed to governments and to the international organizations concerned with safety in the transport of dangerous goods. The first version, prepared by the United Nations Economic and Social Council's Committee of Experts on the Transport of Dangerous Goods, was published in 1956 (ST/ECA/43-E/CN.2/170). In response to developments in technology and the changing needs of users, they have been regularly amended and updated at succeeding sessions of the Committee of Experts pursuant to Resolution 645 G (XXIII) of 26 April 1957 of the Economic and Social Council and subsequent resolutions.
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