Institute for Materials Research University of IMOMEC Associated Lab IMEC corrected dynamicalexperiments. thisway in-situ SEMexperimentsare In available. kg canbemounted uponthespecimenstage. BothFEG-SEM’s are foreseen drift withown to developed perform software NordlysII detector). The beamlithography Quanta200FEG-SEMhas additionallyanelectron Samplesupto 3 Nabity). system (JC materialsinformation canbeobtainedwiththeEBSDsystem (Oxford ofcrystalline (former Instruments HKL Technology) with low vacuum andESEM(upto 40hPa)) to accommodate thewidest rangeofsamplesany SEMsystem. The crystallographic The FEIQuanta200FEG-SEMisaversatile highresolution microscope scanningelectron withthree vacuummodes(highvacuum, lines, grain growth inmetallizations(e.g. Cu). isavailable AlsotheCLdetector onthisSEM. andanautomatedfacility recording system allowing thestudyofdynamicalprocesses aselectromigration ininterconnecting The PhilipsXL30FEG-SEMisequippedwithawafer and/or4needlescombined connectors prober withaheating withelectrical both equippedwithanEDX system withEDAX withaSi(Li)detector orBrukersoftware.. microscopesIMOMEC hastwo scanningelectron withafieldemissiongun(Philips XL30FEG-SEMandFEIQuanta200FEG-SEM) System descriptionandspecifications Nowadays SEM’s are alsooperational inthree vacuummodes(highvacuum,low SE mode. lateral resolution oftheSEMtechnique inimaging modecanbeintheorder of1nmin dopants (CL :CathodoLuminescence; Current),…. BeamInduced EBIC:Electron The thepresence Diffraction), BackScatter / ofdefects (EBSD:Electron structure the crystal information aboutthechemicalcomposition (EDX :Energy Dispersive X-ray detection), alsoalotof andBSE:BackScatteringElectrons) Electrons modes (SE:Secondary Nowadays are ofdetectors available avariety to obtainbesidestheclassicalimaging todetectors buildimages, mapsand/orspectra. generates different signals (SE,BSE, X-rays, ligh ofthematerial understudyand focused beamisscanneduponthesurface electron information canbeobtainedfrom macro down to nanoscale. DuringaSEMstudy material research becausefor awhole range ofdifferent industrial/research sectors microscopy electron Scanning tools within (SEM)isoneofthemostusedcharacterising Equipment (SEM) Microscopy Electron Scanning t,…) whichcanbepickedupby different chemical analysis; first check of RoHS compliancy ofmaterials,…chemical analysis; firstcheckofRoHS compliancy evaluation ofcoatings,and incross-section; failure corrosion analysis; study; ofmicroelectronic examplesare devices typical atthesurface :inspection Some treatment, decapsulation,cleavage,…). way ordestructive destructive (e.g. embeddinginaresin followed by polishing Depending ontheinformation to begathered studiesare carriedoutonanon- research domains(materials science, chemistry, pharmacy, biology, geology…). MicroscopyDue to Electron itsversatility Scanning canbeusedinmany studies ofdynamicalprocesses. samples. The digitized SEMallows continuous in-situSEM imaging to perform vacuum andESEM(environmental SEM))to accommodate thewidestrangeof

Measurement example

Some typical applications are, most of them at surface and/or cross-sectional view : • inspection of microelectronic devices • evaluation of coatings : topography, layer build-up, composition • corrosion study • failure analysis • chemical analysis (point, mapping,...) to reveal compositional changes within materials • first check of RoHS compliancy of materials • crystallographic information of (poly-)crystalline materials : crystal structure, grain size, orientation • dynamical experiments (e.g. electromigration, grain growth,…) • EBIC measurements to reveal dopant differences in semi-conductors • Electron beam lithography

Study of grain growth in electroplated (ECD) copper films upon thin Cu PVD coated substrates : EBSD maps of a 500nm Cu seedlayer (50W) on a 10nm TaN/5nm α-Ta barrier (100W) taken respectively 4 days, 1 week and 2 weeks after deposition

EBIC at doped Si layers upon ceramic EBSD pattern of Si grain Electromigration on Al Blech structure

Si nanowires with In catalyst on the top EBSD study on CVD diamond film CVD diamond film

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