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Advanced Excimer Laser Technologies Enable Green Semiconductor Manufacturing
PROCEEDINGS OF SPIE SPIEDigitalLibrary.org/conference-proceedings-of-spie Advanced excimer laser technologies enable green semiconductor manufacturing Hitomi Fukuda, Youngsun Yoo, Yuji Minegishi, Naoto Hisanaga, Tatsuo Enami Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 10/25/2017 Terms of Use: https://spiedigitallibrary.spie.org/ss/TermsOfUse.aspx Advanced Excimer Laser Technologies Enable Green Semiconductor Manufacturing Hitomi Fukuda*, Youngsun Yoo, Yuji Minegishi, Naoto Hisanaga and Tatsuo Enami Gigaphoton Inc., 400 Yokokura-Shinden, Oyama-shi, Tochigi, JAPAN 323-8558 ABSTRACT "Green" has fast become an important and pervasive topic throughout many industries worldwide. Many companies, especially in the manufacturing industries, have taken steps to integrate green initiatives into their high-level corporate strategies. Governments have also been active in implementing various initiatives designed to increase corporate responsibility and accountability towards environmental issues. In the semiconductor manufacturing industry, there are growing concerns over future environmental impact as enormous fabs expand and new generation of equipments become larger and more powerful. To address these concerns, Gigaphoton has implemented various green initiatives for many years under the EcoPhoton™ program. The objective of this program is to drive innovations in technology and services that enable manufacturers to significantly reduce both the financial and environmental “green cost” of laser operations in high-volume manufacturing environment (HVM) – primarily focusing on electricity, gas and heat management costs. One example of such innovation is Gigaphoton’s Injection-Lock system, which reduces electricity and gas utilization costs of the laser by up to 50%. Furthermore, to support the industry’s transition from 300mm to the next generation 450mm wafers, technologies are being developed to create lasers that offer double the output power from 60W to 120W, but reducing electricity and gas consumption by another 50%. -
The Ringlet by Daniel Harris
The Ringlet by Daniel Harris Click on my name above. It will take you to my home page where you will find links to other stories and my serialized novel "Five Million Yen". Part I: Carl Most of Carl's neighbors considered him a lone taciturn man at best and an eccentric loony at worst. His neighbors knew him as the guy who left his house every morning at eight dressed in a suit and tie. Rarely did anyone see him return to his home, a small bungalow in an old neighborhood in Sarasota. Marge, who lived across the street, decided to follow him one morning. Carl walked to an industrial part of town not a mile from his home. He unlocked and entered a windowless red brick building. Not long after Carl entered the building a young woman rang the bell on his door. She entered the building. Marge had to go to work. She left and went home. The mystery of Carl played on her mind all week. On Saturday morning she again followed Carl. He went to the same address. No women rang his bell. Marge went for a coffee and returned to watch the building where Carl entered. About noon a young woman left the building. Marge decided to ring Carl's bell. A buzzer sounded. Marge pushed the door open. It was a large space filled with huge easels and paintings. The canvasses were very large, twelve feet square or more. Each one had a two-foot long squiggle in the center. The fields of the paintings were different colors, but the long squiggle was some shade of black or brown. -
The Next Generation of Fusion Energy Research
THE NEXT GENERATION OF FUSION ENERGY RESEARCH HEARING BEFORE THE SUBCOMMITTEE ON ENERGY AND ENVIRONMENT COMMITTEE ON SCIENCE AND TECHNOLOGY HOUSE OF REPRESENTATIVES ONE HUNDRED ELEVENTH CONGRESS FIRST SESSION OCTOBER 29, 2009 Serial No. 111–61 Printed for the use of the Committee on Science and Technology ( Available via the World Wide Web: http://www.science.house.gov U.S. GOVERNMENT PRINTING OFFICE 52–894PDF WASHINGTON : 2010 For sale by the Superintendent of Documents, U.S. Government Printing Office Internet: bookstore.gpo.gov Phone: toll free (866) 512–1800; DC area (202) 512–1800 Fax: (202) 512–2104 Mail: Stop IDCC, Washington, DC 20402–0001 COMMITTEE ON SCIENCE AND TECHNOLOGY HON. BART GORDON, Tennessee, Chair JERRY F. COSTELLO, Illinois RALPH M. HALL, Texas EDDIE BERNICE JOHNSON, Texas F. JAMES SENSENBRENNER JR., LYNN C. WOOLSEY, California Wisconsin DAVID WU, Oregon LAMAR S. SMITH, Texas BRIAN BAIRD, Washington DANA ROHRABACHER, California BRAD MILLER, North Carolina ROSCOE G. BARTLETT, Maryland DANIEL LIPINSKI, Illinois VERNON J. EHLERS, Michigan GABRIELLE GIFFORDS, Arizona FRANK D. LUCAS, Oklahoma DONNA F. EDWARDS, Maryland JUDY BIGGERT, Illinois MARCIA L. FUDGE, Ohio W. TODD AKIN, Missouri BEN R. LUJA´ N, New Mexico RANDY NEUGEBAUER, Texas PAUL D. TONKO, New York BOB INGLIS, South Carolina PARKER GRIFFITH, Alabama MICHAEL T. MCCAUL, Texas STEVEN R. ROTHMAN, New Jersey MARIO DIAZ-BALART, Florida JIM MATHESON, Utah BRIAN P. BILBRAY, California LINCOLN DAVIS, Tennessee ADRIAN SMITH, Nebraska BEN CHANDLER, Kentucky PAUL C. BROUN, Georgia RUSS CARNAHAN, Missouri PETE OLSON, Texas BARON P. HILL, Indiana HARRY E. MITCHELL, Arizona CHARLES A. WILSON, Ohio KATHLEEN DAHLKEMPER, Pennsylvania ALAN GRAYSON, Florida SUZANNE M. -
Grooming Standards
CHAPTER TWO GROOMING STANDARDS SECTION 2: PERSONAL APPEARANCE 1. HAIR ........................................................................................................ 2201 2. SHAVING AND MUSTACHES. ........................................................................ 2202 3. HAIRPIECES. ............................................................................................. 2203 4. COSMETICS............................................................................................... 2204 5. FINGERNAILS ............................................................................................ 2205 6. JEWELRY................................................................................................... 2206 7. TATTOOS. ................................................................................................. 2207 8. MUTILATION .............................................................................................. 2208 9. DENTAL ORNAMENTATION ........................................................................... 2209 10. WAIVERABLE CONDITIONS. ......................................................................... 2210 11. NON-WAIVERABLE PRE-EXISTING CONDITIONS. ............................................. 2211 2200. PERSONAL APPEARANCE. BEcausE it is impossiblE to providE ExamplEs of EvEry hairstylE, thE good judgment of lEaders at all lEvEls is kEy to Enforcement of thE USNSCC’s grooming policy. Hair, grooming, and personal appEarancE whilE in uniform shall presEnt a nEat, professional appEarancE. -
I. Excimer Fluorescence, II. Heavy-Atom Spin-Orbital Coupling Effect and Iii. the Electronic Spectra of Ferrocene." (1965)
Louisiana State University LSU Digital Commons LSU Historical Dissertations and Theses Graduate School 1965 Studies in Molecular Spectroscopy; I. Excimer Fluorescence, II. Heavy-Atom Spin-Orbital Coupling Effect and IIi. The lecE tronic Spectra of Ferrocene. Fred Jewel Smith Louisiana State University and Agricultural & Mechanical College Follow this and additional works at: https://digitalcommons.lsu.edu/gradschool_disstheses Recommended Citation Smith, Fred Jewel, "Studies in Molecular Spectroscopy; I. Excimer Fluorescence, II. Heavy-Atom Spin-Orbital Coupling Effect and IIi. The Electronic Spectra of Ferrocene." (1965). LSU Historical Dissertations and Theses. 1092. https://digitalcommons.lsu.edu/gradschool_disstheses/1092 This Dissertation is brought to you for free and open access by the Graduate School at LSU Digital Commons. It has been accepted for inclusion in LSU Historical Dissertations and Theses by an authorized administrator of LSU Digital Commons. For more information, please contact [email protected]. This dissertation has bssn microfilmed exactly as received 6 6 -7 4 8 SMITH, Fred Jewel, 1939- STUDIES IN MOLECULAR SPECTROSCOPY} I. EXCIMER FLUORESCENCE, II. HEAVY- ATOM SPIN-ORBITAL COUPLING EFFECT AND HI. THE ELECTRONIC SPECTRA OF FERROCENE. Louisiana State University, Ph.D., 1965 Chemistry, physical University Microfilms, Inc., Ann Arbor, Michigan STUDIES IN MOLECULAR SPECTROSCOPY; I. EXCIMER FLUORESCENCE, II. HEAVY-ATOM SPIN-ORBITAL COUPLING EFFECT AND III . THE ELECTRONIC SPECTRA OF FERROCENE A Dissertation Submitted to the Graduate Faculty of the Louisiana State University and Agricultural and Mechanical College in partial fulfillment of the requirements for the degree of Doctor of Philosophy in The Department of Chemistry by Fred Jewel Smith B.A., University of Southern Mississippi, 1960 August, 1965 ACKNOWLEDGMENT The author wishes to express his sincere appreciation to Dr. -
A Fusion Test Facility for Inertial Fusion
A Fusion Test Facility for Inertial Fusion The Fusion Test Facility would be part of an integrated IFE program where the essential elements are developed and implemented as systems in progressively more capable IFE oriented facilities. Fusion Test Facility (FTF) Direct laser drive Sub-megaJoule laser energy Goal of ~150 MW fusion power High flux neutron source Development path to a power plant Presented by Stephen Obenschain U.S. Naval Research Laboratory September 27 2006 Fusion Power Associates Meeting Introduction The scientific underpinnings for ICF has and is being developed via large single shot facilities. The IFE application, while greatly benefiting from this effort, requires a different and broader perspective. • Development of sufficiently efficient and durable high repetition rate drivers. • High gain target designs consistent with the energy application. • Development of economical mass production techniques for targets. • Precision target injection, tracking & laser beam steering. • Reaction chamber design and materials for a harsh environment. • Operating procedures (synchronizing a complex high duty cycle operation) • Overall economics, development time and costs. Individual IFE elements have conflicts in their optimization, and have to be developed in concert with their own purpose-built facilities. HAPL= $25M/yr High Average Power Laser program administered by NNSA See presentations by John Sethian and John Caird this afternoon. Typical GW (electrical )designs have >3 MJ laser drivers @ 5-10 Hz Target Factory Electricity -
Audley's Secret*
“Art Has Well-Nigh Spoiled You”: The Overwhelming System of Things and the (Dis)embodied Woman in Lady Audley’s Secret* Han-ying Liu ABSTRACT As one of the most controversial characters in late nineteenth-century literature, Mary Elizabeth Braddon’s Lady Audley is apparently an angel in the house and in reality a cold-blooded murderess. While reception of this sensation novel centers on the issue of Lady Audley’s madness and her culpability, it is hard to overlook her identity’s deep rootedness in things. This essay aims to discuss the overwhelm- ing system of things in Lady Audley’s Secret, things upon which she struggles to construct her identities and yet which prove to metaphorically (de)limit, dismem- ber, and devour her body. The essay consists of five parts, each discussing one sys- tem of things surrounding Lady Audley’s body. The first part examines the issues of vanity, consumerism, and commodification via discussing glass objects within the text. The second part continues the deliberation upon glass by exploring the imageries of conservatory and hothouse flowers. The third part contemplates the themes of imprisonment and display via Braddon’s imagery of “iron and glass,” which also echoes the 1851 Crystal Palace. The fourth part discusses domestica- tion and domesticity via imageries of wax dolls and doll houses. The fifth part ob- serves how paper enwraps and carries both Lady Audley’s secrets and her actual body parts, metaphorically dismembering her. KEYWORDS Lady Audley’s Secret, sensation novel, things, materiality, materialism, Cinderella Ex-position, Issue No. 40, December 2018 | National Taiwan University DOI: 10.6153/EXP.201812_(40).0011 Han-ying LIU, Assistant Professor, Department of English Language and Literature, Chinese Culture University, Taiwan 163 On June 1, 1859, actress Mary Elizabeth Braddon appeared onstage as Mrs. -
Part 1: April 24, 2007 Presentations
UCRL-MI-231268 IFE Science and Technology Strategic Planning Workshop - Part 1: April 24, 2007 Presentations To select an individual presentation, click the table of contents entry on the next page or click the title on the agenda for Day 1 (using the Hand Tool icon). To save only a portion of this document, go to File/Print, select Adobe PDF as your printer, specify the desired range of pages, and save to a new file name. This document was prepared as an account of work sponsored by an agency of the United States Government. Neither the United States Government nor the University of California nor any of their employees, makes any warranty, express or implied, or assumes any legal liability or responsibility for the accuracy, completeness, or usefulness of any information, apparatus, product, or process disclosed, or represents that its use would not infringe privately owned rights. Reference herein to any specific commercial product, process, or service by trade name, trademark, manufacturer, or otherwise, does not necessarily constitute or imply its endorsement, recommendation, or favoring by the United States Government or the University of California. The views and opinions of authors expressed herein do not necessarily state or reflect those of the United States Government or the University of California, and shall not be used for advertising or product endorsement purposes. Portions of this work performed under the auspices of the U. S. Department of Energy by University of California Lawrence Livermore National Laboratory under Contract W-7405-Eng-48. Part 1 Contents Agenda ........................................................................................................................................ 3 Presentations 1. Welcome and Perspectives, Ed Synakowski, LLNL............................................................ -
NRL Nike Laser Focuses on Nuclear Fusion 20 March 2013
NRL Nike Laser focuses on nuclear fusion 20 March 2013 concept, numerous laser beams are used to implode and compress a pea-sized pellet of deuterium-tritium (D-T) to extreme density and temperature, causing the atoms to fuse, resulting in the release of excess energy. In an ICF implosion, a progressively diminishing portion of the beams will engage the shrinking pellet if the focal spot diameter of the laser remains unchanged. For optimal coupling, it becomes desirable to decrease the laser focal spot size to match the reduction in the pellet's diameter, minimizing wasted energy. This is the Nike Laser -- focal zooming. Credit: U.S. "Matching the focal spot size to the pellet Naval Research Laboratory throughout the implosion process maximizes the on- target laser energy," Kehne said. "This experiment validates the engineering of focal zooming in KrF lasers to track the size of an imploding pellet in Researchers at the U.S. Naval Research inertial confinement fusion." Laboratory have successfully demonstrated pulse tailoring, producing a time varying focal spot size With single-step focal zooming implemented, the known as 'focal zooming' on the world's largest Nike laser provides independent control of pulse operating krypton fluoride (KrF) gas laser. shape, time of arrival, and focal diameter allowing greater flexibility in the profiles and pulse shapes The Nike laser is a two to three kilojoule (kJ) KrF that can be produced. The flexibility in pulse system that incorporates beam smoothing by shaping provides promising uses in both future induced spatial incoherence (ISI) to achieve one experiments and laser diagnosis. -
6 5 • Vacuum Ultraviolet Ar Excimer Emission Initiated by High Intensity Laser Produced Electrons
JP0050803 JAERI-Cont" 2000-006 6 5 • Vacuum Ultraviolet Ar Excimer Emission Initiated by High Intensity Laser Produced Electrons Shoichi Kubodera and Wataru Sasaki Department of Electrical and Electronic Engineering and Photon Science Center, Miyazaki University Gakuen Kibanadai Nishi 1-1, Miyazaki, 889-2192 Japan We have observed Ar2* emission using a tabletop femtosecond high intensity laser as an excitation source. High intensity laser produced electrons via an optical field induced ionization (OFI) process initiated the Ar2* production kinetics, which made themselves analogous to those produced in an electron beam produced plasma. A fast conductive cooling of the OFI plasma was found to be appropriate to initiate the excimer formation kinetics more efficiently. Keywords: Vacuum ultraviolet, Excimer molecule, Short pulse laser, Conductive cooling There have been considerable demands for the development of compact short wavelength lasers in the vacuum ultraviolet (VUV) spectral region. Such compact short wavelength lasers would be applicable to various scientific and industrial fields, such as photochemistry, biological science, and new types of materials processing. Currently available practical compact VUV lasers are the ArF excimer laser at 193 tun and the F2 laser at 157 run, both of which are excited by a compact discharge device. Recently more attention is paid to short wavelength lasers in the VUV in the future optical lithography industry. Rare gas excimers have long been one of the very few laser media in the VUV spectral region [1]. The emission wavelength of Ar2* is 126 run which is long enough to use transmission optical elements such as MgF2 and LiF. The Kr2* laser has an even longer emission wavelength centered at 147 mn which relaxes the conditions for optics and would become a competitor to the F2 laser at 157 run. -
Clinical Vignette Abstracts NASPGHAN Annual Meeting October 10-12, 2013
Clinical Vignette Abstracts NASPGHAN Annual Meeting October 10-12, 2013 Poster Session I Eosphagus Stomach 11 Successful Use of Biliary Ducts Balloon Dilator in Repairing Post-Surgical Esophageal Stricture in premature infant. I. Absah, Department of Pediatirc Gastroenterology and Hepatology, Mayo Clinic college of Medicien, Rochester, Minnesota, UNITED STATES. Absah, M.B. Beg, Department of Pediatirc Gastroenterology and Hepatology, SUNY Upstate Medical University, Syracuse, New York, UNITED STATES. Background: Esophageal atresia (EA) with or without tracheoesophageal fistula (TEF) is the most common type of gastrointestinal atresia with occurrence rate of I in 3,000 to 5,000 births. There are 5 major varieties of EA. The most common variant of this anomaly consists of a blind esophageal pouch with a fistula between the trachea and the distal esophagus, which occurs in 84% of the time. Treatment is by extra-pleural surgical repair of the esophageal atresia and closure of the tracheoesophageal fistula. Complications may include leakage to the mediastinum, fistula recurrence, GERD, and stricture formation at the anastomosis site. Benign stricture occurs in 40% of the cases after surgical repair. These benign post-surgical strictures cause feeding difficulties and require treatment. Esophageal dilation is 90% effective, but strictures that do not respond to dilation must be resected surgically. Case report: A 52 days old premature baby that was born at 35 weeks presented with feeding difficulty, due to benign esophageal stricture 44 days after surgical repair of EA and TEF. The luminal diameter of the stricture was ≤ 4mm, for that regular balloon esophageal dilators (smallest = 6mm) couldn’t be used. -
Dinner Heads List Saturday, November 4—Gnome Club Home Coming H
EXTRA!! EXTRA!! Patronize Our Advertisers Attend Home Coming Dinner Look for The Roadrunner Start the Alumni Celebration Stickers in the Windows Off Right by Taking Part Down Town When in the Turkey Dinner Shopping Held in Ebbets Hall VOL. XIII Santa Barbara, California, Monday, October 30, 1933 No. 6 Program for Home Coming Publicity Camp aigu Thursday, November 2—Football rally, Fox theatre, Many Campus Organizations 7:00 p.m. Parade and bonfire. for S. B. State College Friday, November 3—Assembly at eleven o’clock col to Take Part in Home Coming lege auditorium, Sciots band and chanters. Home coming dinner Ebbets hall, State college, 6:00 p.m. sharp. Occi dental vs. Santa Barbara, Pershing park, 8:00 p.m. Dance Is Directed by Lions State college music hall, after game. Celebration; Dinner Heads List Saturday, November 4—Gnome club Home Coming H. Clapp, President of the Club, Judges breakfast, Mannings, 11:00 a.m. Tau Omega, Home Com S. B. Merchants Take FormerToastmaster editor of the Road- Students Hold Pep Local Campus As Cultural ing dance (sport) fraternity house comer Santa Barbara runner, Dixon MacQuiddy, . and Islay streets. Delta Sigma Epsilon,, breakfast, Planta Part in C.ollege who is to preside as master Rally on Phelps Center of City Activities of ceremonies next Friday tion, 9:30 a.m. Delta Zeta Delta supper dance, Vista Mar night at th e Home Coming Field Thursday Extensive plans for familiarizing residents of Santa Bar Monte, 9:00 p.m. banquet. bara with the academic and extra-curricular activities of the Sunday, November 5—Tau Gamma alumni breakfast.