International Standard Iso 14644-1:2015(E)
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INTERNATIONAL ISO STANDARD 14644-1 Second edition 2015-12-15 Cleanrooms and associated controlled environments — Part 1: Classification of air cleanliness by particle concentration Salles propres et environnements maîtrisés apparentés — Partie 1: Classification de la propreté particulaire de l’air Reference number ISO 14644-1:2015(E) Este documento ha sido adquirido por CVTEC el 3 de Febrero de 2016. © ISO 2015 Para poder utilizarlo en un sistema de red interno, deberá disponer de la correspondiente licencia de AENOR ISO 14644-1:2015(E) COPYRIGHT PROTECTED DOCUMENT © ISO 2015, Published in Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized otherwise in any form orthe by requester. any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either ISO at the address below or ISO’s member body in the country of Ch. de Blandonnet 8 • CP 401 ISOCH-1214 copyright Vernier, office Geneva, Switzerland Tel. +41 22 749 01 11 Fax +41 22 749 09 47 www.iso.org [email protected] ii Este documento ha sido adquirido por CVTEC el 3 de Febrero de 2016.© ISO 2015 – All rights reserved Para poder utilizarlo en un sistema de red interno, deberá disponer de la correspondiente licencia de AENOR ISO 14644-1:2015(E) Contents Page Foreword ........................................................................................................................................................................................................................................iv Introduction ..................................................................................................................................................................................................................................v 1 Scope ................................................................................................................................................................................................................................. 1 2 Normative references ...................................................................................................................................................................................... 1 3 Terms and definitions ..................................................................................................................................................................................... 1 3.1 General ........................................................................................................................................................................................................... 1 3.2 Airborne particles ................................................................................................................................................................................ 2 ................................................................................................................................................................................... 3 3.4 Testing instrumentation (see Annex F) ............................................................................................................................. 3 3.3 Occupancy states .............................................................................................................................................................. 4 4 Classification ............................................................................................................................................................................................................ 4 3.5 Instrument specifications .............................................................................................................................................................................. 4 4.2 Particle size(s) ......................................................................................................................................................................................... 4 4.14.3 OccupancyISO Class number state(s) .................................................................................................................................................................................. 4 4.4 Designation ................................................................................................................................................................................................ 5 4.5 Intermediate decimal cleanliness classes and particle size thresholds ................................................. 5 5 Demonstration of compliance ................................................................................................................................................................ 6 5.1 Principle ........................................................................................................................................................................................................ 6 5.2 Testing ............................................................................................................................................................................................................ 6 5.3 Airborne particle concentration evaluation .................................................................................................................. 6 5.4 Test report ................................................................................................................................................................................................... 6 Annex A (normative) Reference method for classification of air cleanliness by particle concentration .................................................................................................................................................................................... 8 Annex B (informative) Examples of classification calculations .............................................................................................13 Annex C (informative) Counting and sizing of airborne macroparticles .....................................................................22 Annex D (informative) Sequential sampling procedure ................................................................................................................27 Annex E (informative) Specification of intermediate decimal cleanliness classes and particle size thresholds ..............................................................................................................................................................................34 Annex F (informative) Test instruments ........................................................................................................................................................36 Bibliography .............................................................................................................................................................................................................................37 © ISO 2015 – All rights reservedEste documento ha sido adquirido por CVTEC el 3 de Febrero de 2016. iii Para poder utilizarlo en un sistema de red interno, deberá disponer de la correspondiente licencia de AENOR ISO 14644-1:2015(E) Foreword ISO (the International Organization for Standardization) is a worldwide federation of national standards bodiescommittee (ISO hasmember been bodies).established The haswork the of rightpreparing to be International represented Standardson that committee. is normally International carried out throughorganizations, ISO technical governmental committees. and non-governmental, Each member body in interestedliaison with in ISO, a subject also take for whichpart in a thetechnical work. electrotechnical standardization. ISO collaborates closely with the International Electrotechnical Commission (IEC) on all matters of The procedures used to develop this document and those intended for its further maintenance are described in the ISO/IEC Directives, Part 1. In particular the different approval criteria needed for the editorial rules of the ISO/IEC Directives, Part 2 (see www.iso.org/directives). different types of ISO documents should be noted. This document was drafted in accordance with the Attention is drawn to the possibility that some of the elements of this document may be the subject of patenton the ISOrights. list ISOof patent shall declarationsnot be held responsible received (see for www.iso. identifyingorg/patents any or all). such patent rights. Details of any patent rights identified during the development of the document will be in the Introduction and/or constitute an endorsement. Any trade name used in this document is information given for the convenience of users and does not assessment, as well as information about ISO’s adherence to the WTO principles in the Technical ForBarriers an explanation to Trade (TBT) on seethe themeaning following of ISOURL: specific terms and expressions related to conformity The committee responsible for this documentForeword is ISO/TC - Supplementary209, Cleanrooms information and associated controlled environments. This second edition cancels and replaces the first edition (ISO 14644-1:1999), which has been technicallyISO 14644 consistsrevised throughout.of the following parts, under the general title Cleanrooms and associated controlled environments: — Part 1: Classification of air cleanliness by particle concentration