micromachines Article MEMS Deformable Mirrors for Space-Based High-Contrast Imaging Rachel E. Morgan 1,* , Ewan S. Douglas 2,* , Gregory W. Allan 1, Paul Bierden 3, Supriya Chakrabarti 4,5, Timothy Cook 4,5 , Mark Egan 6, Gabor Furesz 6, Jennifer N. Gubner 1,7, Tyler D. Groff 8 , Christian A. Haughwout 1, Bobby G. Holden 1, Christopher B. Mendillo 5, Mireille Ouellet 9 , Paula do Vale Pereira 1 , Abigail J. Stein 1, Simon Thibault 9, Xingtao Wu 10, Yeyuan Xin 1 and Kerri L. Cahoy 1,11,* 1 Department of Aeronautics and Astronautics, Massachusetts Institute of Technology, Cambridge, MA 02139, USA;
[email protected] (G.W.A.);
[email protected] (J.N.G.);
[email protected] (C.A.H.);
[email protected] (B.G.H.);
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[email protected] (Y.X.) 2 Department of Astronomy, Steward Observatory, University of Arizona, Tucson, AZ 85719, USA 3 Boston Micromachines Corporation, Cambridge, MA 02138, USA;
[email protected] 4 Department of Physics, University of Massachusetts Lowell, Lowell, MA 01854, USA;
[email protected] (S.C.);
[email protected] (T.C.) 5 Lowell Center for Space Science and Technology, University of Lowell, Lowell, MA 01854, USA;
[email protected] 6 Department of Physics, Massachusetts Institute of Technology, Cambridge, MA 02139, USA;
[email protected] (M.E.);
[email protected] (G.F.) 7 Department of Physics, Wellesley College, Wellesley, MA 02481, USA 8 NASA Goddard Space Flight Center, Greenbelt, MD 20771, USA;
[email protected] 9 Universite Laval, Québec