Transport-Of-Intensity-Based Phase Imaging to Quantify the Refractive Index Response of 3D Direct- Write Lithography

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Transport-Of-Intensity-Based Phase Imaging to Quantify the Refractive Index Response of 3D Direct- Write Lithography University of Colorado, Boulder CU Scholar Electrical, Computer & Energy Engineering Faculty Electrical, Computer & Energy Engineering Contributions 1-22-2018 Transport-of-intensity-based phase imaging to quantify the refractive index response of 3D direct- write lithography. David J Glugla Madeline B Chosy Marvin D Alim Amy C Sullivan Robert R McLeod Follow this and additional works at: https://scholar.colorado.edu/ecen_facpapers This Article is brought to you for free and open access by Electrical, Computer & Energy Engineering at CU Scholar. It has been accepted for inclusion in Electrical, Computer & Energy Engineering Faculty Contributions by an authorized administrator of CU Scholar. For more information, please contact [email protected]. Vol. 26, No. 2 | 22 Jan 2018 | OPTICS EXPRESS 1851 Transport-of-intensity-based phase imaging to quantify the refractive index response of 3D direct-write lithography 1,* 2 3 DAVID J. GLUGLA, MADELINE B. CHOSY, MARVIN D. ALIM, AMY C. 1 1,3 SULLIVAN, AND ROBERT R. MCLEOD 1Department of Electrical, Computer, and Energy Engineering, University of Colorado Boulder, Boulder, CO 80309, USA 2Department of Chemistry, Carleton College, Northfield, MN 55057, USA 3Materials Science and Engineering Program, University of Colorado Boulder, Boulder, CO 80309, USA *[email protected] Abstract: Precise direct-write lithography of 3D waveguides or diffractive structures within the volume of a photosensitive material is hindered by the lack of metrology that can yield predictive models for the micron-scale refractive index profile in response to a range of exposure conditions. We apply the transport of intensity equation in conjunction with confocal reflection microscopy to capture the complete spatial frequency spectrum of isolated 10 μm-scale gradient-refractive index structures written by single-photon direct-write laser lithography. The model material, a high-performance two-component photopolymer, is found to be linear, integrating, and described by a single master dose response function. The sharp saturation of this function is used to demonstrate nearly binary, flat-topped waveguide profiles in response to a Gaussian focus. © 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement OCIS codes: (120.0120) Instrumentation, measurement, and metrology; (160.0160) Materials; (220.0220) Optical design and fabrication. References and links 1. K. M. Davis, K. Miura, N. Sugimoto, and K. Hirao, “Writing waveguides in glass with a femtosecond laser,” Opt. Lett. 21(21), 1729–1731 (1996). 2. S. Nolte, M. Will, J. 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