Background Statement for SEMI Draft Document 3846A Revision to SEMI E10-0304E, SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM), with title change to: SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION

NOTICE: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this Document. NOTICE: Recipients of this Document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, ‘patented technology’ is defined as technology for which a patent has been issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background The E10-0304E Standard is past the mandatory five-year review period and in need of a thorough review by the user community. At the same time, the E10 Revision Task Force has undergone their own review of the Document in order to clarify and expand the content based on user input and experiences. It is our belief that we have not changed the overall intent of SEMI E10 and have only made changes and additions to further its aim of defining the method to consistently measure equipment RAM and utilization. The major revisions include:  multi-path cluster tool (MPCT) RAM metrics moved to the main body as official metrics  clarification and addition of new definitions  several new metrics added and some previous metrics updated or retired  metrics have been standardized for all equipment types, including MPCTs This is a revised version of Document 3846 from that balloted in Cycle 4, 2011, which was failed by the NA Metrics Technical Committee at the NA SEMICON West 2011 Meetings and returned to the E10 Revision Task Force. This version directly addresses the concerns of a single reject voter. The first concern was distinguishing the productive time for one intended process set (IPS) from another. The logic for determining E10 states for IPSs has been altered for the tracking system to designate the Nonscheduled state for any IPS not in active use. This change required several supporting statements and Notes throughout the Document regarding the Nonscheduled state. The second concern was for the missing handling of division-by-zero errors, for which § 8.1.3 has been added explaining the general handling of such cases. Unrelated to the single reject vote, this version also includes a number of very useful clarifications. For example, the Document consolidates on the term ‘bound’ rather than ‘limit’ when describing the endpoints of confidence intervals, especially in § 9. Also, a top-to-bottom editorial pass has been made to bring the Document into compliance with the latest SEMI Standards Style Manual. Due to the extensive nature of the editing, no mark-up version of the changes is provided so the main body and Related Information 1 of the draft should be reviewed in their entirety. No other significant changes were made to Appendices 1 and 2, but these should also be reviewed in their entirety. The breakout of Total Time into the six SEMI E10 major states of Productive Time, Standby Time, Engineering Time, Scheduled Downtime, Unscheduled Downtime and Nonscheduled Time has not been fundamentally changed. As part of this revision, we have promoted the MPCT RAM metrics section from Related Information 1 in E10- 0304E to the main body of the revised Document, which will formalize this material and make it an official part of the E10 Standard. In addition, state priority reporting was added to the MPCT RAM metrics.

i A large number of defined terms and acronyms were either substantially revised or added; in many cases the added definitions are from other SEMI Standards. These are: component part, consumable material, consumable part, continuous downtime event, downtime event, engineering time, equipment, equipment module, equipment-related failure, equipment system, failure, host, intended function, intended process set (IPS), key group (K), mainframe equipment module, MPCT, noncluster tool, nonconsumable part, nonprocessing equipment module, nonscheduled time, nonsupplier, observation period, processing equipment, process path, productive time, module, recipe, scheduled downtime, single-path cluster tool (SPCT), standby time, state, supplier, training (off-line), and unscheduled downtime. Of these definition changes, the reviewer should especially focus on changes to differentiate consumable materials and consumable parts and the clause added to the failure definition to clarify that subsequent problems occurring during a continuous unscheduled downtime are not counted as additional failures. In addition, the term ‘Intended Process Flow’ was changed to ‘Intended Process Set (IPS)’ and added as a definition. This is more equipment- centric terminology and reduces confusion with other definitions for ‘process flow’. For consistency and ease of application, metrics have been standardized so one comprehensive set of metrics can be used for each IPS and the following equipment types: noncluster tool, SPCT, MPCT, and individual equipment modules that are part of an SPCT or MPCT. The reviewer should especially focus on this major change from the prior limited set of unique metrics for IPSs and MPCTs. To assist the reviewer in understanding these changes, please review the table below:

Status in Metric Motivation Letter Ballot MTBF No change p MFD New Mean failure duration for failures during productive time is a p companion metric to MTBF that supports calculation of ‘inherent p availability’ for a renewal cycle of strictly productive time and related time for failures. E-MTBF No change p

MTBFu New Added as alternatives to MTBF , etc. where engineering time and p MFDu New standby time are considered part of ‘normal’ equipment operation E-MTBF New u and not exempt from reliability measurement (e.g., equipment undergoing acceptance testing and qualification prior to production release or being used primarily for long-term process development). MCBF RETIRED Changed to specific uptime and productive time versions for E-MCBF RETIRED consistency with MTBF metrics.

MCBFu New

E-MCBFu New MCBF New p E-MCBF New p Total Uptime New Added for consistency and completeness with utilization metrics and to bridge to uptime definition in SEMI E79. Operational Uptime No change Equipment-Dependent Uptime UPDATE Metrics are redefined to more clearly and accurately reflect the Supplier-Dependent Uptime UPDATE original intention. Whereas the original denominator subtracts Equipment-Dependent UPDATE quantities from operations time to imply a conditional operations Scheduled Downtime time, the new denominator is defined as the sum of explicit Supplier-Dependent Scheduled UPDATE quantities with the same objective. Downtime Equipment-Dependent New Unscheduled downtime metrics are added for completeness and Unscheduled Downtime consistency to demonstrate that the conditional uptime, scheduled

ii Status in Metric Motivation Letter Ballot Supplier-Dependent New downtime, and unscheduled downtime add up to 100% of the Unscheduled Downtime conditional operations time. MTTPM New A new metric with a similar concept to MTTR, but to measure equipment system maintainability in terms of just PM time. MTTR No change E-MTTR No change MTOL No change TFR New Two fundamentally new metrics that measure against a 24x7 Impairment Time New timeline regardless of equipment system complexity. TFR measures the count of equipment module failure events and Impairment Time measures time when one or more equipment module failures is ongoing. These are simple, pragmatic measurements of maintainability, especially for MPCTs. Operational Utilization No change Total Utilization No change

A new Related Information 1 section “MTBF, Renewal Processes, and the Exponential Distribution” was added to explain the origins of MTBF and why it is significant in regards to predicting survival times. As this is Related Information, it is not an official part of the Standard. A completely revised Related Information 2 section (replacing prior Related Information 1) is also planned to give additional examples for calculating the new MPCT metrics, but will be completed for a subsequent revision. Once this technical content is completed in the main body, appropriate examples will be created. These following sections have not had any significant technical content changes from E10-0304E: Appendix 1: CONFIDENCE BOUND FACTORS Appendix 2: RELIABILITY GROWTH OR DEGRADATION MODELS

Note concerning SEMI E58 (Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services): Changes and additions to the substates of SEMI E10 states will result in the revised Document being temporarily out of synch with SEMI E58. The E58 ARAMS TF will need to come out of hiatus at a future date to make these changes or the E10 Revision TF may have to do so. In addition for consistency to E58, the revision now uses E58 state abbreviations (e.g., PRD, SBY) and references to time have been replaced by state or substate where appropriate.

Review and Adjudication Information Task Force Review Committee Adjudication Group: E10 Revision Task Force NA Metrics Technical Committee Date: October 24, 25, and 26, 2011 October 26, 2011 Time & Time zone: 0800-1200 PDT (Each day) 1330-1800 PDT Location: SEMI Headquarters SEMI Headquarters City, State/Country: San Jose, CA San Jose, CA Leader(s): Michael Werre (Intel) David Bouldin (Fab Consulting) David Busing (KLA-Tencor) Mark Frankfurth (Cymer) Standards Staff: Paul Trio (SEMI NA) Paul Trio (SEMI NA) 408.943. 7041 408.943.7041 [email protected] [email protected]

iii iv Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and eiig promne o Ps a ucin o qimn ouelvl promne hn dfnn MPCT defining 2.3 then performance, module-level equipment IPSs for of required MPCTs defined. is and handling special any function presented, metric each For a performance. 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(RAM) performance of a andmaintainability utilization a providing by equipment manufacturing 1.1 1 AND MAINTAINABILITY AVAILABILITY, (RAM) AND UTILIZATION AND MEASUREMENT EQUIPMENTRELIABILITY, DEFINITION OF (RAM), MAINTAINABILITY with FORchangeSPECIFICATION title to: AVAILABILITY,AND OFMEASUREMENT EQUIPMENT RELIABILITY, toSEMIE10-0304E, DEFINITIONRevision AND FOR SPECIFICATION Draft Document SEMI 3846A reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This and isbySEMI E79. productivity efficiency equipment systems.Equipment addressed 3.4 being as distinguished who the equipmentsystem,independentperforms the function. issues of of be may downtime of portions functional by determined are states equipment and the Otherwise, supplier. the on dependent or equipment events the to related downtime certain that except supplier, or user 3.3 type. equipment or user each for factors) human strategies, maintenance environment, recipes, processes, specifications, 3.2 E58and bySEMI SEMIE116. addressed 3.1 3 degradation. growthreliability and 2.4 Scope Purpose Limitations Limitations This Document defines metrics for: Document basic This cluster single-path tools, noncluster include that systems equipment to applicable are herein defined metrics All an for time of periods and conditions all which into states basic exclusive mutually six defines Document The semiconductor of suppliers and users between communication for basis common a establishes Document This The metrics defined herein do not address efficiency, productivity, diminished throughput, or capacity of capacity or throughput, diminished productivity, efficiency, address not do herein defined metrics The to failures system equipment for responsibility of assignment for guidance any provide not does Document This (e.g., conditions operational the on dependent are Document this in contained calculations the of results The is but Document, this of scope the within not is performance and states equipment of tracking Automated and uncertainty MTBF of measurement for concepts addresses Document this in included material Supporting 2.3.2 2.3.1 2.3.4 impairment total and offline, rate, rate. failure time 2.3.3 uptime. dependent Utilization Maintainability Availability Reliability — including mean time between failures and mean cycles betweenfailures. cycles and betweenfailures —includingmean time mean — including total utilization and operational utilization. —including operational utilization total and — including total uptime, operational uptime, equipment-dependent uptime, and supplier- and uptime, equipment-dependent uptime, operational uptime, total including — — including mean time to repair, mean time to (perform) preventive maintenance, mean maintenance, preventive (perform) to time mean repair, to time mean including — Page 5 jn l jn Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 5.1 of Use and 5 Acquisition the for Documentation NOTICE: Supplier-Provided Equipment for Guide EquipmentManufacturing — E149 SEMI Equipment for Tracking Performance SEMI E116—Specification Equipment Definitionand for Measurement of Productivity SEMI E79—Specification Behavior, Concepts, (ARAMS): Services and Standard Maintainability and Availability, Reliability, Automated — E58 SEMI Semiconductor (COO) Ownership tofor CostManufacturing Equipment of Metrics SEMI E35—Guide Calculate 4.1 4 and practices, health and other ofprior thelimitations use. applicability regulatoryor to determine safety appropriate establish to Documents the of users the of responsibility the is It use. NOTICE: general. reliability in istreatment of theory a and equipment systems,asnot herein, comprehensive defined 3.5 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Terminology StandardsReferenced Acronyms Acronyms Standards SEMI to importance of concepts reliability basic of treatment concise a provide to intended is Document This 5.1.6 5.1.5 5.1.4 5.1.3 5.1.2 5.1.1 5.1.22 5.1.21 5.1.20 5.1.19 5.1.18 5.1.17 5.1.16 5.1.15 5.1.14 5.1.13 5.1.12 5.1.11 5.1.10 5.1.9 5.1.8 5.1.7 Unless otherwise indicated, all Documents cited shall otherwisetheversions. Documentslatestpublished all cited be Unless indicated, its with associated issues safety address to purport not do Guidelines Safety and Standards SEMI This E-MTTR E-MTBF E-MTBF E-MCBF E-MCBF DT COO ARAMS AMSAA MPCT MFD MFD MCBF MCBF LN LCB K IPS HPP ENG MTBF MTBF —key group — downtime —downtime 2 —intended set process —liquid nitrogen — cost of ownership —cost of — lower confidence —lower bound —engineering u p — homogeneous Poisson process — mean failure duration for —meanduring uptime failures duration failure for time —meanduring productive failures duration failure u p — Army Materials Systems —Army Materials Analysis Activity —multi-path tool cluster u p — mean time between failures during uptime betweenfailures time —mean during productive betweenfailures time time —mean — Automated Reliability, Availability, and Maintainability Standard— Automatedand Reliability, Availability, Maintainability — mean time to repair during equipment-related to failures time repair —mean — mean cycles between failures during uptime betweenfailures cycles —mean time during productive betweenfailures cycles —mean u p u p — mean uptime time betweenequipment-related —meanfailures time uptime betweenequipment-related failures —meantime productive — mean cycles between equipment-related during uptime failures —mean cyclesbetween time equipment-related during productive failures —mean cyclesbetween

Page 6 jn l jn Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 5.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 2: NOTE be should it but system, distribution facility a by or equipment in treated a the manner.consistent for exchanger heat dedicated a by provided be may water cooling process example, For method. delivery the on based materials consumable distinguish not does definition this company, 1: NOTE Definitions wafers, die, assembly components), monitor/filler units (e.g., test wafers), and facility utilities (e.g., electricity, (e.g., utilities facility and wafers), test (e.g., units monitor/filler components), assembly die, wafers, mold equipment water, include (e.g.,not cooling substrates production cards), do probe carriers, (e.g., water, tools Examples support parts), consumable (e.g., parts ultrapure component frames). lead solvents, wire, acids, bonding sources, (e.g., implant (e.g., liquids solids air), compounds), Ar, (e.g., gases include Examples 5.2.4 Alsosometimes operation. called[SEMI capable of E149] just independent part. normally considered 5.2.3 the same come may not Thesupplier. from may equipmentmodules together. or linked mechanically modules 5.2.2 when required.function 5.2.1 5.1.34 5.1.33 5.1.32 5.1.31 5.1.30 5.1.29 5.1.28 5.1.27 5.1.26 5.1.25 5.1.24 5.1.23 vial, t efr t nedd fnto. Dwtm nlds shdld dwtm n unscheduled and downtime scheduled includes Downtime function. intended its downtime. perform to available, 5.2.8 process that systems equipment In processed. units processed. number batches the innumber ofunits of the cyclesequals batches, of number the equals cycles of number the individually, units process that systems equipment In subsystem. or system equipment an for steps testing or manufacturing, 5.2.7 vice a event. not downtime continuous versais or a is state downtime a to state state downtime unscheduled an to state downtime scheduled a from transition productive a but event, downtime continuous the from transition a example, For state. nondowntime a from state 5.2.6 intended function. perform its equipment to allow the to replacement requires periodic It year. one less than of expectancy life predictable a with equipment 5.2.5 exhaust).

Life Life expectancy comesconcept from E35. SEMI Since the source of these consumable materials may vary from equipment to equipment, site to site, and company to company and site, to site equipment, to equipment from vary may materials consumable these of source the Since yl — cycle — event downtime continuous part consumable material consumable — part component — tool cluster — availability onie(T — (DT) downtime UDT UCB TFR SPCT SDT SBY PRD PM OOS MTTR MTTPM MTOL — preventive maintenance —preventive —standby — total failure rate failure —total downtime —scheduled —productive — unscheduled downtime —unscheduled bound confidence —upper — out of— out specification — mean time to repair —mean to time — single-path cluster tool— single-path cluster — mean time off-line time —mean — mean time to [perform] preventive maintenance to time maintenance preventive [perform] —mean n opee oeainl sqec icuig ui od ad ula) o processing, of unload) and load unit (including sequence operational complete one the probability that the equipment system will be in a condition to perform its intended its perform to condition a in be will system equipment the that probability the an equipment system made up of multiple integrated equipment processing equipment processing equipment integrated multiple of up made system equipment an — component part of the equipment that is consumed by the process operation of the of operation process the by consumed is that equipment the of part component — the operations time when the equipment system is not in a condition, or is not is or condition, a in not is system equipment the when time operations the a constituent part, which can be separated from or attached to an assembly, not assembly, an to attached or from separated be can which part, constituent a

— h mtra ue b r nspot o teeupet ytm t ay time. any at system equipment the of support in or by used material the a downtime event when an equipment system transitions into a downtime a into transitions system equipment an when event downtime a Page 7 jn l jn Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This operator to the equipment. [SEMI to E116] the equipment. operator a during occurring 5.2.16 problems subsequent failure; a is state downtime failures. additional counted arenot downtime as unscheduled continuous unscheduled the to initialevent the Only state. transition downtime unscheduled an into event downtime a is failure a states, E10 SEMI of terms In failure. system equipment an cause could errors human or malfunctions, supply utility or facility problems, recipe process or software failures, subsystem or component more or One function. intended its perform cannot and (MPCTs), tools 5.2.15 cluster multi-path in (IPSs) modules, sets equipment process tools, MPCTs. intended noncluster (SPCTs), includes tools This cluster desired. is single-path utilization and (RAM) maintainability and availability, reliability, of tracking independent the which for storage or transportation, metrology, inspection, 5.2.14 input). 5.2.13 equipmentmodule. processing aor equipmentmodule nonprocessing a either 5.2.12 (e.g., equipment peripheral or support auxiliary E149]. equipment). heat [SEMI pumps, effluent/exhaust treatment exchangers, vacuum direct all including storing), transporting, processing, (e.g., experiments, engineering conduct 5.2.11 to operated is but exist), problems the usagenotof the equipmentis normal production. where of indicative especially process or equipment (no function 5.2.10 scheduled a within transition substate a anstate. adowntime unscheduled substatewithin statedowntime transition nor neither is state downtime A versa. vice or state downtime scheduled an than other a from state state downtime unscheduled a an into transition from a be can state event downtime downtime A state. downtime unscheduled unscheduled an into (2) or state downtime scheduled a than other 5.2.9 function. Maintenance refers to function, not an organization; it includes adjustments, change of consumable of change material, adjustments, includes it organization; an not function, to refers Maintenance function. 5.2.22 of intendeda time. itfunction period specified perform its within can where 5.2.21 gas download, distribution. and and power recipe like services information resources, computing shared include Examples module. equipment individual an for than rather large at system equipment the of functionality represent to (MPCT) tool cluster multi-path a modeling in 5.2.20 key a hencethegroup MPCT.mainframeequipmentmodule. may A (K) include and IPSs all of failure a cause to sufficient is (K) group key the of failure the where (MPCT) tool cluster multi-path 5.2.19 more or one at modules equipment alternative include manypaths. containprocess the mayone process.Antherefore IPS or steps of may IPS An (IPSs). sets process intended such more or one have may (MPCT) tool cluster A multi-path equipment operation. foruser the byspecified isand process 5.2.18 is equipment time of period environmentalThe intended more function. equipmentmay have than Complex one temperature, (e.g., pressure). condition operating base reaching bonding. and initialization wire equipment includes and function intended deposition its performing vapor physical as as well such as equipment, functions metrology process for functions measurement and equipment transport for functions transport 5.2.17 downtime event — — event downtime ananblt — maintainability mainframe group(K) key (IPS) set process intended — function intended host — failure system equipment equipment-related failure module equipment equipment time engineering maintenance — — maintenance

software upgrades, — the factory computer system or an intermediate system that represents the factory and the and factory the represents that system intermediate an or system computer factory the — any unplanned or unscheduled event that changes an equipment system to a condition where it where condition a to system equipment an changes that event unscheduled or unplanned any

— the combination of hardware and software required to perform an operation or activity or operation an perform to required software and hardware of combination the — equipment module equipment — a subset of equipment modules that are common to all intended process sets (IPSs) in a in sets (IPSs) intended process all to common are that equipment modules of subset — a the act of sustaining equipment in or restoring it to a condition to perform its intended its perform to condition a to it restoring or in equipment sustaining of act the — a system of equipment capable of independently hosting material for processing, for material hosting independently of capable equipment of system a — an initial state transition event either (1) into a scheduled downtime state from a state a from state downtime scheduled a into (1) either event transition state initial an — the time when the equipment system is in a condition to perform its intended its perform to condition a in is system equipment the when time the — — — the probability that the equipment will be retained in, or restored to, a condition a to, restored or in, retained be will equipment the that probability the a manufacturing function that the equipment was built to perform. This includes This perform. to built was equipment the that function manufacturing a repair, preventive maintenance (PM), etc., no matter who performs the task. nomatter maintenance(PM), preventive who etc., performsthe repair, an indivisible entity within an equipment system. An equipment module may be may module equipment An system. equipment an within entity indivisible an — any failure solely caused by the equipment (e.g., not causedbytheout-of-specification solely equipment(e.g., failure an —any — a predetermined set of equipment modules that is used to achieve a achieve to used is that modules equipment of set predetermined a — — an individual abstract equipment module that may be used optionally used be may that module equipment abstract individual an — Page 8 jn l jn Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 5.2.35 and stations. processing processing of include chambers equipmentmodules 5.2.34 maintenancethe preventive SDT 5.2.33 panel. 5.2.32 5.2.31 1quarter,during pastwhich 90days) tracked. performancemonths, equipmentsystem is 5.2.30 third-party- independent and personnel, suppliers. maintenance third-party independent personnel, maintenance house in- as such system equipment an to resources other or information, materials, parts, provide that agents as as well host) or (operator user the include Examples delay. maintenance of source the classifying for used supplier 5.2.29 5.2.28 robotic include prealigners. load/unloadlocks, and handlers, modules equipment nonprocessing of Examples equipment. the through units of conditioning 5.2.27 to intended function. performits allow equipment to part component another with failure) a to due (e.g., replacement require may It equipment. the of operation 5.2.26 5.2.25 unit. fromto sequences vary in that unit modules 5.2.24 5.2.23 function due planned to events. downtime function 5.2.42 atime. period for specified conditions, of 5.2.41 betweenruns to or cycles. processing change subject units. the by seen environment processing the determines that agent processing a of control 5.2.40 downtime. unscheduled in and downtime included scheduled reboot system control recipes), routines, initialization periods, stabilization up, warm- down, pump includes It function. intended its perform can it where condition a to equipment the return 5.2.39 recipes), warm-up, cool-down, purging, includes It work. 5.2.38 5.2.37 5.2.36 modules. no alternative reliability recipe — ramp-up time productive product path process module equipment processing event (PM) maintenance preventive — operator timeoperations — — period observation — nonsupplier time — nonscheduled module equipment nonprocessing — part nonconsumable noncluster tool — (MPCT) tool cluster multi-path timemanufacturing — scheduled downtime scheduled etc. Ramp-down is only included in scheduled downtime and unscheduled in is etc.and downtime downtime. included scheduled Ramp-down only ramp-down — — ramp-down — — units produced during productive time producedduring productive (seeunit). —units the preplanned and reusable portion of the set of instructions, settings, and parameters under parameters and settings, instructions, of set the of portion reusable and preplanned the

— the portion of a maintenance procedure required, after the hands-on work is completed, to completed, is work hands-on the after required, procedure maintenance a of portion the control equipment’s the through equipment the with locally communicates who person any — a specific set of modules a unit passes through for which each module is unique and has and unique is module each which for through passes unit a modules of set specific a — h rbblt ta h qimn il prom is itne ucin ihn stated within function, intended its perform will equipment the that probability the — an acting agent of relevance to an equipment system other than the primary equipment primary the than other system equipment an to relevance of agent acting an — the time in which the equipment system function. which its performing in theis — theequipment time intended the portion of a maintenance procedure required to prepare the equipment for hands-on for equipment the prepare to required procedure maintenance a of portion the

an equipment system made upof one equipmentmodule.an only processing made equipmentsystem total time minus time time. nonscheduled total — the time when the equipment system is not available to perform its intended its perform to available not is system equipment the when time the — the time when theisproduction. equipmentsystem be in to when utilized scheduled the time not a specified continuous interval of calendar time (e.g., 72 hours, 6 weeks, 3 weeks, 6 hours, 72 (e.g., time calendar of interval continuous specified a the sum of productive time and time standby oftime. the sum productive component part of the equipment that is not normally consumed by the process the by consumed normally not is that equipment the of part component , etc. It does not include equipment or process test time. Ramp-up is only is Ramp-up time. test process or equipment include not does It etc. ,

substate occurs before the equipment exits the scheduled downtime state. thedowntime equipmentexitsthe scheduled substate before occurs — an indivisible production entity within an equipment system.Examples equipment an within entity indivisible production an

— a cluster tool in which the units visit a subset of the equipment the of subset a visit units the which in tool cluster a — a downtime event into a scheduled downtime (SDT) state where state (SDT) downtime scheduled a into event downtime a —

an indivisible equipment entity that supports the movement or movement the supports that entity equipment indivisible an Page software load, restoring dynamic values (e.g., parameters, (e.g., values dynamic restoring load, software software backup, storing dynamic values (e.g., parameters, (e.g., values dynamic storing backup, software 9 jn l jn Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date:

Recipes DRAFT may be may  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 5.3 Symbols done during the course of normal work functions. On-the-job training typically does not interrupt operation or operation interrupt not does typically training On-the-job functions. work normal of course the during done 5.2.53 only Off-linein trainingis time. oftime. outside included nonscheduled operations 5.2.52 tracked and for card, accounted be must probe states equipment basic carrier, six all accurately. time, total wafer of representation valid cassette, a have (e.g., operation 5.2.51 normal of course controller/monitor). the during it 5.2.50 (OEM). manufacturer orequipment vendor original 5.2.49 withinstate includes various (active).the aresponseto Behavior stimuli.[SEMI given E58] current 5.2.48 stabilization cool-down, warm-up, down, reboot,system pump includes It routines, initialization state. periods, nonscheduled a leaving when function, 5.2.47 operated.not is system equipment the but available, are facilities and materials consumable and function intended its perform 5.2.46 and uponbetweenuser supplier. as agreed equipmentoperation for in included 5.2.45 only is Shutdown condition. safe 5.2.44 a reach to necessary procedures any time. nonscheduled includes It state. 5.2.43 5.3.3 5.3.2 5.3.1 intendedspecifications. function its within performing 5.2.59 period. time specified 5.2.58 or downtime the equipment’sFrom viewpoint, of portion any include 5.2.57 not does and time, engineering time. nonscheduled and standby, productive, includes 5.2.56 intended function. may performits awhere restored to it equipment is condition 5.2.55 5.2.54 specialwithout categorization. nonscheduled) and standby (except state equipment any in included be therefore can and activities maintenance Ai M Li verification run — — run verification utilization — user — uptime downtime unscheduled — unit — (on-the-job) training — (off-line) training — time total — tool support — supplier — state — start-up standby operation) (equipment — specification single-path cluster tool — shutdown

— — — load lock i alternative equipmentmodule alternative equipment module etc. Start-up is etc.time. includednonscheduled Start-up only in any wafer, substrate, die, packaged die, or piece part thereof. part piece packagedthereof. substrate,die, or any wafer, die, a static set of conditions and associated behavior. While all of its conditions are met, the state is state the met, are conditions its of all While behavior. associated and conditions of set static a

any entity interacting with the equipment, either locally as an operator or remotely via the host. the via remotely or operator an as locally either equipment, the with interacting entity any time — — time

the time when the equipment system is in a condition to perform its intended function. It function. intended its perform to condition a in is system equipment the when time the — provider of equipment and related services to the user (e.g., unit manufacturer). Also called Also manufacturer). unit (e.g., user the to services related and equipment of provider the time required for equipment to achieve a condition where it can perform its intended its perform can it where condition a achieve to equipment for required time the all time (at the rate of 24 hours/day, 7 days/week) during the observation period. In order to In order period. the observation during 7 days/week) hours/day, 24 of rate the (at time all the percentage of time the equipment system is performing its intended function during a during function intended its performing is system equipment the time of percentage the the time required to put the equipment in a safe condition when entering a nonscheduled a entering when condition safe a in equipment the put to required time the a tool that, although not part of the equipment, is required by and becomes integral with integral becomes and by required is equipment, the of part not although that, tool a the time, other than nonscheduled time, when the equipment system is in a condition to condition a in is system equipment the when time, nonscheduled than other time, the a single cycle of the equipment (using (using equipment the of cycle single a the instruction of personnel in the operation and/or maintenance of equipment done equipment of maintenance and/or operation the in personnel of instruction the

— the time from when the equipment system has experienced a failure until failure a experienced has system equipment the when from time the — (SPCT) the instruction of personnel in the operation and/or maintenance of equipment of maintenance and/or operation the in personnel of instruction the software load, restoring dynamic values (e.g., parameters, recipes), control recipes), parameters, (e.g., values dynamic restoring load, software both the operator and the host the operatorboth and

— a cluster toola one follow only path. cluster whichprocess in units all the documented set of intended functions within set ofthe stated documented intended conditions functions Page 10

represent the user.represent the jn l jn units or no units no or units Document Number: 3846A Number: Document ) used to establish that it is it that establish to used ) Doc. 3846A Doc. 3846A Date: 2011/08/29Date: computerized DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 5.3.8 5.3.7 5.3.6 5.3.5 5.3.4 T Si r — PMj P

— — —

number of failuresnumber transport equipmentmodule — mainframe equipment module mainframe equipment serial equipmentmoduleserial processing equipment module j equipmentmodule processing

Page 11 jn l jn Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 6.1 6 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Equipment States Tracking Equipment and Requirements Equipment StatesEquipment support certain metrics and other examples and guidance. other for support metrics certain operation manufacturing to required a are that some that give does but substates, possible resolution all list to tracking attempt no makes Document equipment This desires. the achieve to required are as substates many 6.1.3 production a operator, an a engineer). maintenancetechnician, process (e.g., a technician, it performs who matter no way same the classified is example, for procedure, 6.1.2 failure.that from arising or to contributing problems constituent underlying of number the of regardless time in point any at failure one most at to subject be must system equipment Any time. in point any at state E10 SEMI one only and one in be must system equipment Any fall. must time of periods and conditions equipment all which into states 6.1.1 h qimn tts ae dtrie y fnto, nt b raiain n ie maintenance given 1 Any organization. by not function, by determined are states equipment The equipment basic six defines Document this metrics), RAM (e.g., performance equipment measure To

is a stack chart of the six basic equipment states. These basic equipment states can be divided into as into divided be can states equipment basic These states. equipment basic six the of chart stack a is

Equipment Uptime Manufacturing

Equipment Downtime Time

Equipment State StackChartEquipment State

NONSCHEDULED UNSCHEDULED ENGINEERING PRODUCTIVE SCHEDULED DOWNTIME DOWNTIME Figure 1 Figure Page STANDBY TIME TIME TIME TIME 12

jn l jn

Operations Time Total Time Total

Document Number: 3846A Number: Document

Doc. 3846A Doc. 3846A

Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This either is “Support.”“Process” or type task E116 SEMI the and state ‘manufacturing’ a in be to known is system equipment the where events state BUSY module 3: NOTE of part as specified not are that times fromtime. be excluded recipesshall specifically productive production similar However, time. productive in included specifically be shall recipes 6.1.5.1    

    

Shutdown/Start rebuild, Inst Off periods time Unworked used in the RAM equations given later in this Document. The blocks of time associated with the basic states basic the with substatesthesections. aredescribedfollowing in and associated time of blocks The Document. this in later given equations RAM the in used 6.1.4 Engineering runs done in conjunction withunits in split runs (e.g., production lotsEngineering done conjunction applications) ,new supportunits operations test or processing support otherequipment) (e.g., to Manufacturing processes Rework a party for third Work and to unitsrecipe download) production and (includingloading of internal the unloading equipment Regular theactivities: following function. state The includes productive intended 6.1.5    - allation, modification, modification, allation, Nonscheduled training line Software engineering engineering Equipment engineering Process Times for heating, cooling, purging, pump down, cleaning, etc., that are specified as part of production of part as specified are that etc., cleaning, down, pump purging, cooling, heating, for Times

or upgrade or Time Productive state events may be derived from SEMI E58 (ARAMS) state change data or SEMI E116 (EPT) equipment (EPT) E116 SEMI or data change state (ARAMS) E58 SEMI from derived be may events state Productive Productive (PRD) State — — State (PRD) Productive in given are substates and states basic the with associated time of blocks Key Engineering

Time - up

     

specified times specified recipe Production units production with runs Engineering operations support Manufacturing Rework party third for Work production Regular Uptime Productive

Time

Total Time Total

The time (productive time) in which the equipment system is performing its performing is system equipment the which in time) (productive time The Manufacturing

Time Equipment State Hierarchy

      

times Waiting/inactive system automation ext. from input No available results test production No down module tool cluster Associated too support No units No operator No

equipment Standby

Figure 2 Figure Time Page

13 l

Operations

Time      

Unspecified related Facilities material C Out delay Maintenance Repair jn l jn hange of consumable of consumable hange

- Unscheduled of Downtime - spec input spec

Document Number: 3846A Number: Document Downtime 2 . These blocks of time are time of blocks These .       

Unspecified related Facilities material consumable of Change testProduction Maintenance delay Setup maintenance Preventive

Doc. 3846A Doc. 3846A Date: 2011/08/29Date:

Downtime Scheduled

DRAFT



SEMI

 LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This to supplier the expect they or that meet improve performance level. if program recommended the from deviation any identify to obligated are Users level. performance 5: NOTE 6.1.8.1 in metrics.used these §§ See not are substates SDT Other metrics. equipment-dependent and supplier-dependent accurate support to required are consumables 4: NOTE                      SDT maintenance delay, nonsupplier maintenance SDT delay, supplier maintenance SDT setupSDT maintenance preventive SDT mutually following the substates: exclusive into divided is downtime Scheduled conditions. equipment upon or based be usage, may equipment events time, These events. downtime planned to due function intended its perform to available 6.1.8 qualification) software Software engineering(e.g., equipmentevaluation) engineering(e.g., Equipment characterization) process engineering(e.g., Process state engineering The state. productive the from arise theactivities: following includes to considered be not should conditions extreme such under Failures production. normal of indicative not is equipment the of usage the where especially experiments, engineering conduct to operated is but exist), problems process or equipment (no function intended its perform 6.1.7 loadunload times,and for orwaiting Waiting times inactive including automation input host) from(e.g., systems No external production for results test available review No tool cluster down equipmentmodule Associated probe carrier, card) supporttool wafer cassette, (e.g., No metrologyequipment) unitsno ofsupport (e.g., equipment,such available available dueas No lack to lunches, (e.g., meetings) operator available breaks, No includes theactivities: following The not theis standby equipmentsystem state but operated. available, are facilities and materials consumable and function intended its perform to condition a in is system 6.1.6 is performing its intended function its within performing is intended specifications. run Verification power). specified reaches source ignites, plasma correct, is flow gas problem, without transfer units pressure, base reaches chamber (e.g., test Equipment basedor intervalsequipmentusage, conditions. may be upontime, Scheduled during operation. failure equipment of likelihood the reduce to designed replacement), part consumable (e.g., intervals scheduled action Preventive unspecifiedSDT facilitiesSDT related consumable changematerialSDT of productionSDT test SDT Preventive Maintenance Maintenance Preventive SDT

The substates SDT preventative maintenance; SDT setup; SDT maintenance delay, supplier; and SDT change of change SDT and supplier; delay, maintenance SDT setup; SDT maintenance; preventative SDT substates The Scheduled Downtime (SDT) State — — State (SDT) Downtime Scheduled — State (ENG) Engineering Standby Equipment suppliers are responsible for recommending a PM program to achieve a predetermined equipment predetermined a achieve to program PM a recommending for responsible are suppliers Equipment

SY tt — State (SBY)

— —

the operation of equipment after preventive action to demonstrate equipment functionality equipment demonstrate to action preventive after equipment of operation the — — the processing and evaluation of units after preventive action to establish that the equipment the that establish to action preventive after units of evaluation and processing the a predefined maintenance procedure (including equipment ramp-down and ramp-up), at ramp-up), and ramp-down equipment (including procedure maintenance predefined a 8.3.3 and 8.3.4 The time (standby time), other than nonscheduled time, when the equipment the when time, nonscheduled than other time), (standby time The — The time for the following procedures as specified bythe specified supplier: theprocedures following — Thefor as time . The time (engineering time) when the equipment system is in a condition to condition a in is system equipment the when time) (engineering time The The time (scheduled downtime) when the equipment system is not is system equipment the when downtime) (scheduled time The Page 14 jn l jn Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and setup, or repair procedure. It also does not include the time results. Ittest also does repairincludewhile for procedure. waiting not the setup, or PM, a following done testing any include not does it and production, of running the to, transparent or with, in parallel the done be that can that confirm testing include to not does operation, It specifications. equipment within function for intended its specifications performing is user equipment the in defined as units, of evaluation for uptime 6.1.8.5 delay maintenance SDT An down and to postpone maintenance. due an the to equipment administrativedecision leave be also may substate results. delay maintenance nonsupplier-controlled SDT An test state. downtime scheduled parts, a as during point any at nonsupplier-controlled such occur may substate information personnel, nonsupplier-controlled nonsupplier or for materials, waiting consumable is it because function 6.1.8.4 consumable supplier-controlled state. downtime point scheduled any during a parts, at occur supplier-controlled may substate delay maintenance personnel, SDT An results. test as supplier such information supplier-controlled or for materials, waiting is it because function download Recipe time. 6.1.8.3 setup SDT under conversions as tracked be should thatactivities are regular, intervention automated of should trackedfunctions processing be under time. productive manual significant require that or 7: NOTE from recommendeddeviation the procedures. 6: NOTE 6.1.8.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This downtime. unscheduled than other state a to transition next the to downtime unscheduled than other state a from downtime unscheduled to 6.1.9.1 substates. 6.1.8.8 facilities- SDT the The facilities include: substate. related in included is function intended its perform can it where otherwise condition a if to equipment the example, return to For substate. facilities-related required time all repair, SDT or upgrade, change, facilities the scheduled a of result a in as needed are actions included PM unnecessary be shall below listed facilities the created by downtime Any facilities. out-of-specification scheduled of result a as solely function intended its perform 6.1.8.7 obtaining in consumableIt doesmaterial. include not delays the material. consumable change 6.1.8.6       performing its intendedspecifications. function its within performing run source Verification ignites, plasma correct, is flow gas problem, without power). specified reaches transfer units pressure, base reaches chamber production test Equipment normal of part as (e.g., parameter etc., include Examples configuration, adjustment. gasadjustment handler flow) current, temperature, and beam upgrades). package and type, rebuilds, modifications, unit permanent (excluding process, processing in change a accommodate Conversion failure until equipment is restored to a condition where it may perform its it equipmentisconditionintended mayfunction. perform until a where failure restored to 6.1.9 host other with Communications equipmentor links computers liquid nitrogen exhaust, [LN connections water,facility cooling gases, power, (e.g., Facility count) (e.g.,humidity, vibration,particle temperature, Environmental A continuous instance of unscheduled downtime is called a failure. A failure spans from the first transition first the from spans failure A failure. a called is downtime unscheduled of instance continuous A — Unspecified SDT — Facilities-Related SDT — Material Consumable of Change SDT — Test Production SDT — Nonsupplier Delay, Maintenance SDT — Supplier Delay, Maintenance SDT SetupSDT —

Equipment suppliers are responsible for recommending procedures for conversion. Users are obligated to identify any identify areto Users obligated proceduresconversion. recommending for for responsible are suppliers Equipment Recipe download activities that are unusual or infrequent, that have especially significant impact on equipment time, equipment on impact significant especially have that infrequent, or unusual are that activities download Recipe nceue onie(D)Sae—— State (UDT) Downtime Unscheduled

— the time required to complete an equipment alteration (hardware and/or software) necessary to necessary software) and/or (hardware alteration equipment an complete to required time the

—

The time for the following activities related to a setup as specified bythe specified supplier: a time to related setup theactivities as following The for — the operation of equipment after conversion to demonstrate equipment functionality (e.g., functionality equipment demonstrate to conversion after equipment of operation the the processing and evaluation of units after conversion to establish that equipment is equipment that establish to conversion after units of evaluation and processing the Any scheduled downtime that is not specifically tracked under one of the above the of one under tracked specifically not is that downtime scheduled Any The time (production test downtime) for the scheduled interruption of equipment of interruption scheduled the for downtime) test (production time The The time (scheduled facilities-related downtime) when the equipment cannot equipment the when downtime) facilities-related (scheduled time The The time during which the equipment cannot perform its intended its perform cannot equipment the which during time The The time during which the equipment cannot perform its intended its perform cannot equipment the which during time The The time for the scheduled interruption of equipment uptime to uptime equipment of interruption scheduled the for time The The time from when the equipment system has experienced a experienced has system equipment the when from time The Page 15 jn l jn Document Number: 3846A Number: Document 2 ]) Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and actively repaired to bring it back to a productive state in response to a failure that is assigned to the supplier. the to assigned is that failure a to response in state productive a includes repairtheactivities: time following Complete to back it bring to repaired actively 6.1.9.5 these in used not are §§ metrics. See substates UDT Other metrics. equipment-dependent and supplier-dependent accurate support to required 8: NOTE 6.1.9.4 nonequipment-related failuresfailures. The remaining are the supplier. 6.1.9.3 additional as counted be not shall and events onset failure failures. not are downtime unscheduled of substates between Transitions failures. of count a requiring metrics all for used be shall event onset failure The downtime. unscheduled 6.1.9.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This the to assigned not is that failure a to response in state productive a following includes repairthe activities: supplier. time Complete to back it bring to repaired actively being 6.1.9.6                 failure (e.g., component part replacement) and return the equipment to a condition where it can perform its perform can it where condition a to equipment function. intended the return and replacement) part component (e.g., failure restarting recycling, resetting, action Corrective Diagnosis unspecifiedUDT facilities-relatedUDT material changeof consumable UDT out-of-spec input UDT nonsupplier maintenancedelay, UDT supplier maintenancedelay, UDT repair, nonequipment-related UDT repair, equipment-related UDT is performing its intended function its within performing is intended specifications. run Verification power). specified reaches source ignites, plasma correct, is flow gas problem, without transfer units pressure, base reaches chamber (e.g., test Equipment its perform can it where condition a to function. equipment intended the return and replacement) part component (e.g., failure restarting recycling, resetting, action Corrective Diagnosis function itswithin performing is intended specifications. run Verification power). specified reaches source ignites, plasma correct, is flow gas problem, without transfer units pressure, base reaches chamber (e.g., test Equipment D ear oeupetRltd—— Nonequipment-Related Repair, UDT — Equipment-Related Repair, UDT statedivided downtime is unscheduled themutually following substates: The into exclusive to assigned are responsibilities and/or causes whose failures all of subset a are failures Equipment-related A

The substates UDT repair; equipment-related; UDT maintenance delay, supplier; and UDT change of consumables are consumables of change UDT and supplier; delay, maintenance UDT equipment-related; repair; UDT substates The failure onset event onset failure 8.3.3 — the procedure of identifying the source of an equipment problem or failure. failure. an of equipmentproblem —theidentifying or procedure sourceof failure. an of equipmentproblem —theidentifyingor procedure sourceof and — the operation of equipment after corrective action to demonstrate equipment functionality equipment demonstrate to action corrective after equipment of operation the — — the operation of equipment after corrective action to demonstrate equipment functionality equipment demonstrate to action corrective after equipment of operation the — — the processing and evaluation of units after corrective action to establish that the equipment the that establish to action corrective after units of evaluation and processing the — equipment the that establish to action corrective after units of evaluation and processing the — — the maintenance procedure (including equipment ramp-down and ramp-up, rebooting, ramp-up, and ramp-down equipment (including procedure maintenance the — — the maintenance procedure (including equipment ramp-down and ramp-up, rebooting, ramp-up, and ramp-down equipment (including procedure maintenance the — 8.3.4 . is the first transition to the unscheduled downtime state from a state other than other state a from state downtime unscheduled the to transition first the is , reverting to a previous software version, software previous a to reverting , version, software previous a to reverting , The unscheduled downtime substate in which the equipment is being is equipment the which in substate downtime unscheduled The The unscheduled downtime substate in which the equipment is equipment the which in substate downtime unscheduled The Page 16 jn l jn etc.) employed to address an equipment an address to employed etc.) equipment an address to employed etc.) Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and intended function as the result of an unscheduled facilities failure. Any downtime created by the facilities listed facilities the by created downtime Any failure. facilities unscheduled an of result the as function intended 6.1.9.11 an by necessitated is that material consumable of material include the not delaysconsumable obtaining in It failure. does unrelated change a involve may it or material, consumable the to directly related failure a involve may This material. consumable change to uptime equipment of interruption unscheduled 6.1.9.10 to prior incurred downtime all short, card probe intermittent an of result a as OOSinputs input as UDT include The identifying thedowntime. problemrecategorized is repair for down put is system prober/tester a if, example, For downtime. input OOS UDT in included be shall below listed inputs the by postpone created and down downtime Any inputs. faulty or OOS by created problems of equipment result a as solely function intended its perform cannot the leave to decision 6.1.9.9 administrative an to due be maintenance. also may maintenance UDT substate A state. delay downtime unscheduled an during point any at occur may substate UDT delay An maintenance results. test as such information nonsupplier-controlled or materials, consumable nonsupplier-controlled parts, nonsupplier-controlled personnel, nonsupplier for waiting is it because function intended its perform cannot 6.1.9.8 delays downtime. atduring any unscheduled point may occur maintenance UDT results. test as such information supplier-controlled or materials, consumable controlled supplier- parts, supplier-controlled personnel, supplier for waiting is it because function intended its perform cannot 6.1.9.7 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This time equipmentshutdownand period for start-up. time unworked includes Each schedule. 6.1.10.1 substates. 6.1.9.12 facilities-related UDT the in included the is return function to intended required its time perform all can outage, facilities include: substate. The it power where 15-minute condition unscheduled a an to of equipment result a as needed is regeneration cryopump unnecessary otherwise an if example, For substate. facilities-related UDT the in included be shall below              osmbe aeil eg, otmntd cd ek tre od dgae ht rss, erdd mold degraded resist, equipmentinputrecipe) or host wrong other Incorrect (e.g., photo degraded bond, target leaky compound) acid, contaminated (e.g., materials Consumable misread interpretation/entry) of erroneous metrologyequipmentout calibration, charts, data (e.g., Test data frames) contaminatedwarped lead warped wafers, wafers, upstream (e.g., problems, process Unit defective reticles) probe carriers, cassettes wafer cards, toolsfaulty Support warped or (e.g., NST IPS (IPSequipmentsystems IPS NST only) Modification Equipment InstallationEquipment Training Off-Line TimePeriods Unworked the activities: following Nonscheduledtime includes production. 6.1.10 host other with Communications equipmentor links LN2) exhaust, connections water,facility cooling gases, power, (e.g., Facility count, (e.g.,humidity,electromagnetic vibration,particle interference) temperature, Environmental D u-fSeiiain(O)Ipt—— Input (OOS) Out-of-Specification UDT — Nonsupplier Delay, Maintenance UDT — Supplier Delay, Maintenance UDT UDT Unspecified — — Unspecified UDT — Facilities-Related UDT — Material Consumable of Change UDT nokdTm eid Periods Time Unworked Nonscheduled (NST) State — — State (NST) Nonscheduled Any unscheduled downtime that is not specifically tracked under one of the above the of one under tracked specifically not is that downtime unscheduled Any — shifts, weekends, holidays, facilities shutdowns, etc. out of the production the of out etc. shutdowns, facilities holidays, weekends, shifts, — The unscheduled downtime substate in which equipment cannot perform its perform cannot equipment which in substate downtime unscheduled The The state in which the equipment system is not scheduled to be utilized in utilized be to scheduled not is system equipment the which in state The The unscheduled downtime substate during which the equipment the which during substate downtime unscheduled The The unscheduled downtime substate during which the equipment the which during substate downtime unscheduled The The unscheduled downtime substate in which the equipment the which in substate downtime unscheduled The Page The unscheduled downtime substate in which there is an is there which in substate downtime unscheduled The 17 jn l jn . Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and od ad ula) o rcsig auatrn, o tsig ses fr a qimn ytm o usse. In subsystem. batches of or number processed. the equals system cycles of number the equipment batches, in units wafers) an process (e.g., that systems units equipment for of In number processed. the steps equals cycles of testing number the individually, or units process manufacturing, that systems equipment processing, of unload) and load unit (including sequence operational complete one is cycle A period. observation each for required also are cycles 6.2 for between idling productive should trackedof periods be in standby rathertime the state than nonscheduled the state. periods IPS moment-to-moment random general, nonscheduled In lot-to-lot. be from perhaps may IPS switch exception frequently that notable MPCTs agile only particularly The schedule. production long-term a in predetermined generally 10: NOTE state. or a ‘afteran productive either itselfoff trackedengineering hours’)mustin shut be 6.1.10.8 or downtime scheduled anstate. downtime unscheduled a either in tracked be must regeneration) cryopump programmed a as such routines maintenance automatic (including 6.1.10.7 activities. of intended itfunctionthese performits after one can where 6.1.10.6 to attributed be cannot time productive production, in utilized be to IPSs.This has directindividual attribution a effect the for on results all metrics productive IPS involving time. scheduled simultaneously are IPSs multiple that extent 9: NOTE § production. in See utilized 6.1.10.5 bytheschedule. regular not PM is or that software) accommodated upgrade (hardware 6.1.10.4 6.1.10.3 other output. productive any 6.1.10.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This in use E10metrics. for classified and be tracked must equipment system each for events substate, downtime and/or state SEMIE10 each 6.3 Tracking Requirements for Equipment Cycles — — Cycles Equipment for Requirements Tracking Tracking Requirements for Downtime Events for Tracking Requirements time off line (MTOL). line off time vice or state mean metric the in downtime used is events downtime continuous of unscheduled count The event. downtime continuous a an not is versa to state downtime scheduled a from transition continuous a a is but state event, downtime downtime a to state productive the from transition a example, For state. nondowntime a 6.3.2 an into transition a a be neither state. is can state downtime event A downtime versa. downtime vice unscheduled an within transition substate A a nor or state downtime scheduled a within transition substate state state. downtime scheduled downtime a unscheduled from state an downtime unscheduled than other state a state downtime from unscheduled an into (2) or state downtime scheduled a than other state a from state downtime 6.3.1 metric the in used is uptime during cycles equipment of MCBF count The time. standby during no cycles be should equipment there states, E10 SEMI of definition By time. engineering during cycles equipment of count the 6.2.2 used the is metric in time MCBF 6.2.1

By the same convention, any production or engineering work (including an unattended operation that may that operation unattended an (including work engineering or production any convention, same the By maintenance all since state, nonscheduled the in counted be cannot equipment to done maintenance Any condition a to equipment the bring to required time qualification any includes state nonscheduled The IPS NST Modification Equipment Installation Equipment Training Off-line

By designating IPSs in the NST IPS substate, productive time is more accurately attributed to individual IPSs. To the To IPSs. individual to attributed accurately more is time productive substate, IPS NST the in IPSs designating By Continuous Downtime Event — Event Downtime Continuous — Event Downtime Uptime During Cycles Equipment of Count Time Productive During Cycles Equipment of Count u . Nonscheduled time is intended for omission of strategically unworked periods from total time and should be should and time total from periods unworked strategically of omission for intended is time Nonscheduled — For an IPS equipment system that is not the IPS or among the IPSs currently scheduled to be to scheduled currently IPSs the among or IPS the not is that system equipment IPS an For — — operation of the equipment exclusively for training purposes that does not result in result not does that purposes training for exclusively equipment the of operation — 7.4.6.1 A downtime event is an initial state transition event either (1) into a scheduled a into (1) either event transition state initial an is event downtime A — equipment is out— equipmentis the productiondue initial schedule to installation. of — equipment is out of the production schedule due to modification, rebuild, or rebuild, modification, to due schedule production the of out is equipment — for detailsonIPS more time. nonscheduled p . a downtime event when equipment transitions into a downtime state from state downtime a into transitions equipment when event downtime a — For each observation period, aside from aggregating the asidetime from period, in aggregating —Foreachobservation For support of certain SEMI E10 metrics, counts of equipment of counts metrics, E10 SEMI certain of support For Page — the count of equipment cycles during productive time plus time productive during cycles equipment of count the — 18 — the count of equipment cycles during productive during cycles equipment of count the — jn l jn Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and the unscheduled downtime state . The count of nonequipment-related repair events is used in the ismetric in nonequipment-related MTTR. .The repair events countused of state downtime the unscheduled exits equipment the occur—before not does substate equipment-related time, repair UDT the occurs—and substate 6.3.4.6 metricsand in MTTR E-MTTR. used the is events repair equipment-related of count The state. downtime unscheduled the exits equipment the before occurs 6.3.4.5 E-MTBF metrics the in used is uptime during MCBF failures equipment-related of count The state. downtime occurs substate equipment-related time, repair UDT the where states 6.3.4.4 is metrics in time E-MTBF equipment-relatedduring productive used failures the count of equipment-related repairsubstate time, occursUDT 6.3.4.3 in used MTBFthe metrics is uptime during failures of count The states. those into transition the after immediately occur that failures 6.3.4.2 MTBF the metrics in used is time productive during failures of count The state. productive the into transition the after immediately occur 6.3.4.1 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This and downtime scheduled both of subsets related of classification aggregated the by require and substates events.downtime metrics downtime the by certain defined are state, subsets These downtime. E10 unscheduled SEMI each in time 6.4 nor UDT substate the repair time, equipment-related substate 11: NOTE Tracking Requirements for Subsets of Downtime of Subsets for Requirements Tracking failure may also be classified as a repair event if a repair substate occurs before the equipment exits the exits equipment the before occurs substate repair a if event repair a follows: areclassified as state. downtime Failures unscheduled as classified state. downtime be unscheduled an also into system may event downtime equipment failure a an is failure cause a states, could E10 SEMI errors of terms human In or failure. malfunctions, supply utility or facility problems, process or recipe software failures, subsystem or part component more or One function. intended its perform cannot 6.3.4 time the(MTTPM). PMismetric in PM mean to count of events used maintenance preventive SDT 6.3.3 substate is used in the metric MTTR. substate used the is metric in 6.4.5 metricsand in MTTR E-MTTR. used the 6.4.4 6.4.3 during used the is metric in uptime MFD failures for downtime unscheduled of sum The states. those into transition the after immediately occur that failures for time includes This engineering states. and standby,the productive, from events failure to related occur that 6.4.2 failures for time includes This state. ismetric in time MFDproductive used the productive the during failures from for downtime unscheduled of sum The state. productive the into transition events the after immediately failure to related substates 6.4.1 u . Nonequipment-Related Repair Event Event Repair Nonequipment-Related Event Repair Equipment-Related Uptime During Failure Equipment-Related Time Productive During Failure Equipment-Related Uptime During Failure Time Productive During Failure

Repair Time for Equipment-Related Failures Failures Equipment-Related for Time Repair Time PM Uptime During Failures for Downtime Unscheduled Time Productive During Failures for Downtime Unscheduled — Failure Event (PM) Maintenance Preventive earTm o oeupetRltdFiue Failures Nonequipment-Related for Time Repair It is possible to have legitimate ‘repairless’ failures that contain neither the UDT repair time, nonequipment-related time, repair UDT the neither contain that failures ‘repairless’ legitimate have to possible is It u and MCBF and — the sum oftime— the sum MTTPM. thePM SDT substateused the is metric in p any unplanned or unscheduled event that changes an equipment system to a condition where it where condition a to system equipment an changes that event unscheduled or unplanned any and MCBF u . — a failure event from the productive, standby, or engineering states. This includes This states. engineering or standby, productive, the from event failure a — p .

substate occurs before the equipment exits the scheduled downtime state. The state. downtime scheduled the exits equipment the before occurs substate u . — a failure event where the UDT repair time, equipment-related time, repair UDT the where event failure a — — a failure event from the productive state. This includes failures that failures includes This state. productive the from event failure a — — a failure event where the UDT repair time, nonequipment-related time, repair UDT the where event failure a — p . — a downtime event into a scheduled downtime state where the where state downtime scheduled a into event downtime a —

before the equipment exits unscheduledThe before state. thedowntime equipment — a failure event from the productive, standby, or engineering or standby, productive, the from event failure a — Page — For each observation period, aside from aggregating the aggregating from aside period, observation each For — . — the sum of the UDT repair, equipment-related substate is substate equipment-related repair, UDT the of sum the — 19 — the sum of the UDT repair, nonequipment-related repair, UDT the of sum the — — a failure event from the productive state where the where state productive the from event failure a — — the sum of all unscheduled downtime substates downtime unscheduled all of sum the —

jn l jn before the equipment exits the unscheduled the exits equipment the before — the sum of all unscheduled downtime unscheduled all of sum the — Document Number: 3846A Number: Document p and E-MCBF Doc. 3846A Doc. 3846A Date: 2011/08/29Date: p .

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A  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 7.2 withinare‘down’. IPSs the MPCT or modules equipment individual although ‘up’ be may MPCT An modules. equipment ‘down’ some and modules entirely tools or states) cluster uptime equipment ‘up’ some of the combination a have single-path to of likely more are MPCTs one states), downtime tools, the in of one in (i.e., (i.e., ‘down’ noncluster ‘up’ entirely While either are performance. modules equipment utilization individual and and (SPCTs), RAM (MPCT) tool cluster path 7.1 7 excluded. 13: NOTE dependence. equipment 12: NOTE reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 7.3 Additional Concepts and TrackingConcepts for IPSsMPCTsand Requirements Additional and Intended Process Set (IPS) Concepts Process Intended multi- and (IPS) set process intended for requirements tracking and concepts additional presents section This Equipment Module Tracking RequirementsEquipment unscheduled downtime (%). downtime unscheduled supplier-dependent and (%), downtime scheduled supplier-dependent (%), the uptime in supplier-dependent used metrics is downtime unscheduled Supplier-dependent substate. supplier delay, maintenance UDT supplier-dependent the and and (%), 6.4.9 downtime scheduled supplier-dependent (%). downtime unscheduled (%), uptime metricssupplier-dependent the in used is downtime scheduled Supplier-dependent substate. supplier delay, maintenance SDT the 6.4.8 equipment- and (%), downtime scheduled (%). downtime unscheduled dependent equipment-dependent the (%), in used uptime is equipment-dependent downtime unscheduled metrics Equipment-dependent substates. material consumable of change UDT 6.4.7 equipment- and (%), downtime scheduled (%). downtime unscheduled dependent equipment-dependent (%), uptime the equipment-dependent in used metrics is downtime scheduled Equipment-dependent substates. material consumable of change SDT and 6.4.6 equipment modules (e.g., handlers, load locks, carrier ports). An individual processing equipment module or module equipment processing one IPSs, in IPS, may equipmentmodule forMPCT. appear ornonprocessing several IPSs all an individual An ports). carrier locks, load handlers, (e.g., modules equipment 7.3.2 the MPCT. within IPSs of are components that modules equipment all for data state SEMIE10 of tracking complete require 7.3.1 MPCT given a on possible MPCTs. apply the theoretically are that to intends user the how on based IPSs ofthe sets definitions different have may supplier, the by of offered as MPCT, same instances Two operation. process equipment for user the between by specified sets process differentiate ‘intended’ and configuration to important is It 7.2.4 isIf IPS the‘down’, MPCT the MPCT down. any MPCTup. in ‘up’, is is are 7.2.3 modules equipment which determines IPS each defines for to ‘up’‘down’. IPS that user required be or the How modules. equipment alternative 7.2.2 one a bythe may MPCT.have IPS, IPSs, few intendedbemany AnIPSs. to performed MPCT or processes 7.2.1

All metrics for IPSs and MPCTs are calculated as functions of equipment module-level data only and only data module-level equipment of functions as calculated are MPCTs and IPSs for metrics All MPCT. the for predetermined be shall IPSs the metrics, utilization and RAM MPCT evaluate to order In several of set a or module equipment unique a of comprised be may IPS an step, process each At of subset a satisfy to used is that MPCT an within modules equipment of subset particular a is IPS An Downtime Unscheduled Supplier-Dependent Downtime Scheduled Supplier-Dependent Downtime Unscheduled Equipment-Dependent Downtime Scheduled Equipment-Dependent qimn oue n IS a nld oh poesn qimn oue n nonprocessing and modules equipment processing both include can IPSs in modules Equipment The SDT unspecified and UDT unspecified substates are not clearly associated with equipment dependence and are and dependence equipment with associated clearly not are substates unspecified UDT and unspecified SDT The The state of the IPSs in an MPCT determines the state of the MPCT. If all of the IPSs in an MPCT are MPCT an in IPSs the of all If MPCT. the of state the determines MPCT an in IPSs the of state The The SDT production test substate is presumed to be primarily dictated by user policy and is excluded from excluded is and policy user by dictated primarily be to presumed is substate test production SDT The — the sum of equipment-dependent scheduled downtime and downtime scheduled equipment-dependent of sum the — Page — the sum of the SDT preventive maintenance, SDT setup, SDT maintenance, preventive SDT the of sum the — — the sum of equipment-dependent unscheduled downtime unscheduled equipment-dependent of sum the — — the sum of the UDT repair, equipment-related and equipment-related repair, UDT the of sum the — 20 jn l jn Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This qimn oue o opoesn qimn oue my b oee ne n asrc mainframe abstract an under modeled be and power gas distribution.and may module equipment module. equipment nonprocessing or module equipment 7.3.3 Certain behavior or functionality that affects the MPCT ‘at large’ and is not clearly attributed to a process a to attributed clearly not is and large’ ‘at MPCT the affects that functionality or behavior Certain

Examples include shared computing resources, information services like recipe download, recipe like services information resources, computing shared include Examples Page 21 jn l jn Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 7.4 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Temporal Mapping of IPSStates Temporal Mapping of andMPCT the output state is ‘down’. The transition events for the output state history are the union set of the transition the of set input for state histories. events the union the are history state output the for events transition The ‘down’. is state output the ‘down’, are modules equipment both the or ‘down’ of is function module equipment a either as if temporally where mapped states, module is equipment state output An 10. = t to 0 are= t M2, period and observation M1 the modules, over shown equipment two for states input The time. over ‘down’ and ‘up’ from change states 7.4.3 as calculated are themselves metrics The order. chronological thesestate histories. functions output of in basis event-by-event an module on the equipment of histories functions of as state generated one are histories least state IPS at and MPCT Document, when this in event metrics the each For evaluated. For be must and change may MPCT and/or IPS modules. the of states the equipment state, changes modules equipment and sets process associated from histories 7.4.2 of as IPS states,aredetermined a equipmentmodule a and function functionMPCT states. of states as determined are states IPS modules. equipment individual of states the on based states MPCT and IPS of history 7.4.1 unit. visited bywere the particular units, of terms in defined be modules equipment all not may if even cycle, one as cycle counts MPCT or IPS MPCT entire the through passing or unit one where IPS an example, For MPCT. or IPS intended entire the the of terms of in function defined be must ‘cycle’ a However, level. module equipment the at cycle of concept 7.3.5 reliabilityavailability. equipmentsystem groupin crucial andoverall is the key improving to understanding belong modules equipment which understanding Furthermore, avoided. are calculations redundant substantial module. equipment mainframe a include may group A key MPCT. the entire hence andIPSsall of failure cause a to sufficient is group the key of failure 7.3.4 in the productive state for the IPS or MPCT to be in the productive state. For downtime states, a more a states, downtime For state. productive the in be to MPCT or IPS §§ function in defined reliability complicated the for state productive the in the in be all must states module the be stateIPS MPCT state,one for bestate. that only must to Forthe equipmentmodule same in productive or equipment input the state, nonscheduled the like states E10 SEMI some For 7.4.5 state values.input the of function a as value state output an derive to event transition state input each at applied is function logic a Regardless, mortem. post performed be may also mapping Temporal system. tracking performance equipment 7.4.4 Equipment Module SetEquipment Module Output Individual asaFunction State of Input Equipment Module States There are different types of temporal mapping depending on the target SEMI E10 state to be evaluated. be to state E10 SEMI target the on depending mapping temporal of types different are There E10-compliant SEMI a by received and generated is event each as performed be may mapping Temporal 3 state input of function a as IPS or MPCT an for history state output an provides mapping Temporal a generate to used is section this in time—defined over mapping mapping—or temporal of method The Cycles Equipment of Count the where MPCT an in IPSs all to common are that modules equipment of subset a is (K) group’ ‘key A

presents an example of a very simple temporal mapping where equipment module input and output and input module equipment where mapping temporal simple very a of example an presents Module Module States Input

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By accurately modeling a key group and leveraging it in calculations, in it leveraging and group key a modeling accurately By 7.5 is required to state.is the output determine required Figure 3 Figure Page time = = 22 Up

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Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: 10

DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This state.downtime unscheduled the in is IPS the then states, downtime unscheduled in modules equipment to only due state downtime 7.4.6.3 state,the the productive nonscheduled thensucharein in all IPSs state. declared not productive the in is IPS the then state, metrics IPS all 7.4.6.2 for results the time, on effect operations direct in a designated has attribution simultaneously This are IPS. IPSs specific productive involving time. multiple a to that attributed extent be the cannot time To productive production. in utilized be to scheduled 14: NOTE entire the If time. nonscheduled for designated be to onemust operations is IPS in forbe be then attime. to least designated MPCT designated time, not nonscheduled is MPCT entire the until or (are) time, is IPSs operations or for IPS different designated a until time operations in remain shall time operations given in any designated at IPSs production in Any utilized time. be to scheduled be shall IPS an one If only then state. time, nonscheduled a the at IPS in one declared only uses be MPCT shall production in utilized be to scheduled not is that IPS Any time. 7.4.6.1 for determining the SEMI E10 state of an IPS based on the SEMI E10 states of its constituent equipment constituent its of states flow. E10 whole. a as SEMI IPS the the for state nonscheduled on the of based designation direct a IPS on and an modules of state E10 SEMI the determining for 7.4.6 Next, if the IPS is not in the nonscheduled state and if any equipment module in the IPS is in the productive the in is IPS the in module equipment any if and state nonscheduled the in not is IPS the if Next, operations in or state nonscheduled the either in be to declared directly be must whole a as IPS an First, Otherwise, based on the reliability function of equipment module states for an IPS, if an IPS is in a in is IPS an if IPS, an for states module equipment of function reliability the on based Otherwise,

Temporal Mapping of the Six Basic SEMI E10 States for an IPS an for States E10 SEMI Basic Six the of Mapping Temporal By designating IPSs in the nonscheduled state, productive time is more accurately attributed to those IPSs that are that IPSs those to attributed accurately more is time productive state, nonscheduled the in IPSs designating By Temporal Mapping of Equipment Module StatesTemporal SEMI MappingE10 of toIPS State SEMI an E10 f(UDT f(UDT f(SDT Any Any IPS andeq. SDT modules) Nonscheduled? IPS Reliability IPS Reliability IPS Reliability Engineering?

Productive? eq. modules only) eq. only) modules eq. modulesin = 0 (down) = 0 (down) = 0 (down) eq. modulesin state. If a module in the productive state belongs to more than one IPS that is that IPS one than more to belongs state productive the in module a If state. declaredin NO NO NO NO, NO NO IPSin Operations Time Figure 4 Figure Page YES YES YES YES YES YES 23 ScheduledDowntime in IPS UnscheduledDowntime in IPS (pure) in Productive IPS in Nonscheduled IPS IPS in Standby IPS in Engineering IPS UnscheduledDowntime in IPS (mixed) jn l jn — This section provides the logical flow logical the provides section This — Document Number: 3846A Number: Document 4 illustrates this logical this illustrates Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and equipment modules in either the scheduled or unscheduled downtime state), no equipment modules are in the in are modules state.nonscheduled equipment no state), downtime the in are modules unscheduled equipment the of all not and state, engineering the in are or modules equipment no state, productive scheduled the either in modules equipment 7.4.6.7 engineering state. 7.4.6.6 downtimestates,unscheduled the said may be a IPSbe to in ‘mixed’ downtime state. unscheduled and downtime scheduled both in in modules equipment to due ‘down’ is states,but downtime scheduled pure in modules equipment modules equipment and states 17: NOTE downtime unscheduled in modules equipment IPS state. downtime the unscheduled states,in downtime thenis scheduled the both to due state downtime 7.4.6.5 scheduled the in is IPS the then states, downtime scheduled state.downtime in modules equipment to only due state downtime 7.4.6.4 said be ‘pure’be to in unscheduled downtime. 16: NOTE function thatreliability for IPS. 15: NOTE reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This flow for determining the SEMI E10 state of an MPCT as a function of the SEMI E10 states of its constituent its of states E10 § E10states SEMI asin IPS determined SEMI the of function a as MPCT an of state E10 SEMI the determining for flow 7.4.7 Otherwise, the IPS is in the standby state. The standby state means that the IPS is not ‘down’ (from ‘down’ not is IPS the that means state standby The state. standby the in is IPS the Otherwise, the in is IPS the then state, engineering the in is IPS the in module equipment one least at if Otherwise, a in is IPS an if IPS, an for states module equipment of function reliability the on based Otherwise, a in is IPS an if IPS, an for states module equipment of function reliability the on based Otherwise,

Temporal Mapping of the Six Basic SEMI Basic Six the of Mapping Temporal For an IPS, the failure of an equipment module may or may not result in a failure of the entire IPS depending on the on depending IPS entire the of failure a in result not may or may module equipment an of failure the IPS, an For When the IPS is in a downtime state due only to equipment modules in unscheduled downtime states, the IPS may IPS the states, downtime unscheduled in modules equipment to only due state downtime a in is IPS the When When the IPS is not in a downtime state due to either equipment modules in pure unscheduled downtime states or states downtime unscheduled pure in modules equipment either to due state downtime a in not is IPS the When Temporal Mapping of IPS States StateTemporal E10 Mapping E10 of toMPCT SEMI SEMI an

or or Nonscheduled? ALL Nonscheduled? Nonscheduled? SDT, UDT, SDT, or UDT, Engineering? ALL ALL Productive? Any Any IPSs in SDT IPSs in IPSs in IPS in IPS in NO NO NO NO NO 7.4.6 . 5 YES YES YES YES YES illustrates this illustrates logicalflow.

Figure 5 Figure Page E10 States for an MPCT an for States E10 24 MPCTin Standby MPCTin Engineering UnscheduledDowntime MPCTin ScheduledDowntime MPCTin MPCTin Productive MPCTin Nonscheduled jn l jn — This section presents the logical the presents section This — Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and and not the IPSsand state. of the all nonscheduled arein state, engineering the in are modules) equipment no (hence IPSs no state, productive the in are modules) equipment orstate), thedowntime scheduled (hence unscheduled either noIPSs in equipmentmodules statedowntime (from 7.4.7.6 7.4.7.5 function.intended its perform can state nonscheduled the in not are that IPSs the of none when MPCT the on occurs failure A IPSs. of definition its 19: NOTE state. but thendowntime scheduledthe inMPCTunscheduled in IPSis all state, not downtime the are 7.4.7.4 is state. downtime the MPCT scheduled in 7.4.7.3 18: NOTE 7.4.7.2 7.4.7.1 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, the this distribute and/or reproduce in to granted is Permission standard. adopted or official an as modules construed be to is page this on material No program. Standards International SEMI the of document draft a is This equipment any If substate. nonsupplier-dependent delay, maintenance SDT the or IPS in the then is nonsupplier-dependent, or MPCT supplier-dependent substates, delay maintenance SDT the of either in 7.4.8.2 the then substate, supplier-dependent supplier-dependent or substate. themaintenancedelay, IPS MPCTSDT in is delay, maintenance SDT the in are state downtime scheduled the in are that 7.4.8.1 state to and IPS MPCTs.state both Metrics MPCT 7.4.8 For the in are IPSs the of all not that means state standby The state. standby the in is MPCT the Otherwise, IPSisthe MPCTengineeringstate. in is Otherwise, ifthe any MPCT engineeringstate, in then the nonscheduled the or unscheduled) or (scheduled state downtime a in are MPCT an in IPSs all if Otherwise, then state, nonscheduled the or state downtime scheduled the in are MPCT an within IPSs all if Otherwise, IPSis state, thenOtherwise, ifthe any MPCT productive in nonscheduled inthenstate. IPSsthe all MPCTnonscheduled in anIf is MPCTthe state, within are Otherwise, for any point in time where all equipment modules that are in the scheduled downtime state are state downtime scheduled the in are that modules equipment all where time in point any for Otherwise,

Temporal Mapping of Scheduled Downtime Substates Downtime Scheduled of Mapping Temporal

The is degree which IPS MPCT to efficient an in productiveor when the state addressed SEMI is by E79. For MPCTs, the failure of an equipment module may or may not result in a failure of the entire MPCT depending on depending MPCT entire failurethe a of in result not may or may module equipment an of failure MPCTs,the For an IPS or an MPCT in the scheduled downtime state, for any point in time where all equipment modules all where time in pointany for state,downtime scheduled the in an MPCT orIPS an — This section presents the logical flow for assigning substates within the scheduled downtime scheduled the within substates assigning for flow logical the presents section This —

Substates Scheduled Downtime for and of IPS MPCT 6 illustrates this logical flow. this illustrates logical Scheduled Downtime Scheduled in MPCT or IPS SDT maintenance delay? SDT maintenance delay, All All supplier SDT eq. modules in SDT eq. modules in - dependent? NO NO Figure 6 Figure Page 25 YES YES

and Scheduled Downtime State Events for IPS and IPS for Events State Downtime Scheduled and • • • • • be dispositioned as SDT: IPS or MPCT substate must nonsupplier SDT maintenance delay, IPS or MPCT in supplier SDT maintenance delay, IPS or MPCT in facilities related unspecified change of consumable material production test preventive maintenance - jn l jn dependent - dependent Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date:

state. DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and events are considered only at the equipment module level in the metric in MTTPM. at the areconsideredthelevel only equipmentmodule events 7.4.8.4 unspecified SDT MPCT or IPS the of cleardisposition defensible a and If SPCT. or tool, noncluster module, equipment individual an for as manner same the in MPCT or IPS the 7.4.8.3 in not is MPCT or substates. of themaintenancedelay SDT one IPS the then substates, delay maintenance SDT the of one in not are state downtime scheduled reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This failure. equipment-related an also is event the then state, downtime unscheduled the leaves system equipment the before substate repair related 7.4.9.4 individual or then the be IPS MPCTUDT in made, is substate. unspecified cannot an for as manner same the delay in maintenance MPCT UDT or the tool,SPCT.IfIPS clear MPCT and noncluster disposition UDTequipment module, defensible of or a or substate the IPS in the for not dispositioned MPCT be or must IPS substate an UDT For the substate. substate, delay maintenance UDT the in not is MPCT 7.4.9.3 the IPS MPCTnonsupplier-dependent in is substate, maintenance delay, then or the UDT supplier-dependent delay, maintenance UDT the in are state UDT a in modules equipment all not but substate, delay 7.4.9.2 supplier-dependent substate. maintenancedelay, the UDT in is MPCT or IPS the then substate, supplier-dependent delay, maintenance UDT the in are state UDT a in modules 7.4.9.1 state to orstate IPS MPCTs. Metrics MPCT 7.4.9 If any equipment modules in a UDT state are not in the UDT maintenance delay substate, then the IPS or IPS the then substate, delay maintenance UDT the in not are state UDT a in modules equipment any If maintenance UDT the in are state UDT a in modules equipment all where time in point any for Otherwise, equipment all where time in point any for state, downtime unscheduled the in MPCT an or IPS an For PM whole; a as MPCT an or whole a as IPS an for event PM a of concept a define not does Document This for dispositioned be must substate SDT substate, the delay maintenance the SDT in not orIPS MPCT an For For a failure event for an IPS or an MPCT, if any equipment module is in a ‘nonzero’ UDT equipment- UDT ‘nonzero’ a in is module equipment any if MPCT, an or IPS an for event failure a For Temporal Mapping of Unscheduled Downtime Substates and Unscheduled Downtime Events for IPS and IPS for Events Downtime Unscheduled and Substates Downtime Unscheduled of Mapping Temporal

substate.

— This section presents the logical flow for assigning substates within the unscheduled down unscheduled the within substates assigning for flow logical the presents section This — Substates ofandSubstates IPSs UnscheduledMPCTs for Downtime Unscheduled Downtime inor MPCT IPS 7 illustrates this logical flow. this illustrates logical UDT maintenanceUDT delay? maintenanceUDT delay, All All supplier downeq. modules in downeq. modules in - dependent? NO NO

substate cannot be made, then the IPS or MPCT is in the SDT, the in is MPCT or IPS the then made, be cannot substate Figure 7 Figure Page YES YES 26 UDT maintenanceUDT delay, IPS or MPCTin • • • • • • be IPS or MPCTsubstate must nonsupplier maintenanceUDT delay, IPS or MPCTin supplier unspecified facilities change of consumable material out repair, repair, equipment dispositioned - of jn l jn - - spec input nonequipment dependent - related - dependent as UDT: - related - related Document Number: 3846A Number: Document

substate. Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 7.5.1.1 7.5 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Modeling Reliability Intended for Functions Sets Modeling Process mutually parallel relationship (i.e., if any one of the alternative equipment modules is up, then connectivity then up, is modules equipment alternative through stillthe steppossible). that is This in illustrated of one any if (i.e., relationship parallel mutually 7.5.4 = S1 Si = IPS (e.g., values state constituent the of product the as calculated is constituents serial for value state in illustrated is This network). the through possible not is connectivity then step, single any through 7.5.3 modules equipment downtime unscheduled and downtime together. scheduled for or modules, equipment downtime 7.5.2 is is the andstate ‘down’. the state ‘up’ 0when The ‘down’. when connectivity 1 to equal is the value state a determine it has IPS each that and otherwise module equipment relationships each Mathematically, ‘up’; parallel network. the is through and series IPS have the network then IPS network, an in IPS modules the equipment through ‘connectivity’ is there If IPS. 7.5.1 consequently, the entire MPCT) the entire down. is consequently, (and, MPCT the in IPS each down, MPCTis group key this If the stations. cooling multiple or locks in load multiple as such IPS every in appears that differentiation modules process equipment any of of subset regardless a is group key The IPS. each of state 7.5.6 the ‘down’, are modules equipment alternative the of all If ‘up’. or the IPS0,or to ‘down’. evaluates 1,and to state the squarebracketsevaluates value in expression 1, to evaluates value state IPS the and 7.5.5 For example, All IPSs in an MPCT can contain a single ‘key group’ (K), where the state of the key group affects the affects group key the of state the where (K), group’ ‘key single a contain can MPCT an in IPSs All 0, to evaluates brackets square the in expression the 1), = (Ai ‘up’ is module equipment alternative any If S step, process general any At possible not is connectivity if (i.e., relationship serial mutually a have IPS an within steps process The performed, being function reliability particular the on Depending the comprise that modules equipment the through flow network a as modeled is state ‘up/down’ IPS An  S2  S3 S3  S4). Parallel Alternative Equipment ModulesStep aProcess at Parallel Alternative

Serial ProcessStepswithinSerial IPS an S1 IPS = 1 − =IPS 1− x = 1 − [(1 − A1) 1− [(1 A1) = , the set of alternative equipment modules, Ai (if any are present), have a have present), are any (if Ai modules, equipment alternative of set the ,

. The key group may include sets of alternative equipment modules equipment alternative of sets include may group key The S2  M

Figure 9 Figure 8 Figure i i=1 3 i=1 to Page

= = A3 A2 A1

S  0, if module i is down is i module if 0, up is i module if 1, (1 − Ai) (1 − x 9 (1 − A2) (1 − 27 . The state value through this state value calculatedas: step is . The S3  jn l jn S4 (1 − A3)] (1

M

i = 1 may apply for only scheduled only for apply may 1 = Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: 8 . The IPS The . DRAFT  

i=1 to 4 to i=1 SEMI (2) (2) (3) (1)  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and The equivalent truth table for this logic equivalent this table truth for shownThe is in 7.5.6.3 group. key the in included also is PM3 IPS, the of regardless PM3 visit units all since And group. key the in included also is P, module, equipment mainframe The MPCT. the in IPSs all by used MPCT this for modules equipment support 7.5.6.2 point-to-point all performs T, arm, P. mainframeequipmentmodule, to abstract areallocated at large an MPCT transport single A the affecting issues other Any MPCT. the from units MPCT. unload to used is that lock load a is L3 Lastly, PM3. visits unit the every which into after PM2, or PM1 either units is unit any by visited module load equipment processing first The transportation. to used are that modules 7.5.6.1 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 7.5.6.4 Table 1

IPS1 uses the key group equipment modulePM1PM2, uses processing inIPS1 and the key either or as shown P = K is K, group, key the for function value state The in shown as K, group, key The in shown example The Truth TableforKeyGroup,Example1 Truth L2 L1

T

PM2 PM1 Example, Defining Equipment Modules Defining Example, aKey Group in K 10

P is an MPCT with seven equipment modules. L1 and L2 are load lock equipment lock load are L2 and L1 modules. equipment seven with MPCT an is 1 1 1 = MPCT Example Equipment Modules, 1 PM3 P L1 11 0 1 1

, includes the three load locks and the transport that are the common the are that transport the and locks load three the includes , L3 L2 1 0 1 L2 L1 IPS ExampleIPS 1

K else . Figure 10 Figure Figure 12 Figure 11 Figure Page T 1 1 1 T 28 T = Transport = Transport T PMj Li PM2 PM1

= Load Lock i, i = 1, 2, 3 2, Lock Load = 1, i = i, = Processing = L3

 1 1 1 L3 [1 − (1 − L1) L1) − (1 − [1 jn l jn PM3 1 1 1 PM3 Equipment Equipment K 0 1 1 1  (1 − L2)] L2)] − (1 Module Document Number: 3846A Number: Document

Module j, j = 1, 2, 3 1, 2, = j j, Module

 Doc. 3846A Doc. 3846A Date: 2011/08/29Date: T T 12  . L3 L3 DRAFT

  PM3. SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and may have associated downtime time without a downtime event occurring during that observation during that event withoutdowntime period. time occurring downtime associated may a have period observation an Hence, counted. period,still is period observation the within observation occurs that time downtime of portion the the to prior occurs that event downtime a For state. downtime the of time end or time start the 8.1.2.2 or period. after the observation includedmetricsifstateexited thedowntime arenot in related is during even period observation the before occur that events Downtime exited. is state downtime related the when of regardless metrics 8.1.2.1 8.1 8 Table 2 in 7.5.6.5 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This change to made attempt an with coincident occur downtime uptimeareincludedthis timescheduled in nonscheduled an calculation. state or to from that Failures calculation. this in included is uptime Only time. that during failures of number the by divided uptime failures; between function intended its performing of capable 8.2.1.1 IPS states for temporal § as basedin willmapped anddefined this the in MPCTs be onthe section metrics the of all MPCTs, and IPS For failure. without time, of period specified a for conditions, operating specified 8.2 UCB LCB appropriate not (see§ estimates and is calculating metrics these For undefined. therefore are and calculated be cannot metrics these for estimates point singe-value the error, divide-by-zero a in resulting denominators the in cases, these In equipment. reliable highlyor maintenance equipment, low periods, observation shorter forevents especially downtime zero or events, repair zero events, PM 8.1.3.2 be still (see§ calculated can estimate (LCB) bound confidence lower a However, undefined. therefore are and calculated metrics be these cannot for estimates point singe-value the cases, these In shorter equipment. for reliable especially highly or error, periods divide-by-zero observation a in resulting denominators the in etc. events, downtime zero failures, 8.1.3.1 2 RAM and Measurementand RAM Utilization : Observation Periods forObservation Metrics qimn eiblt — Reliability Equipment unlikely. unlikely. 8.1.3 noreverdouble-counted. neitheris downtime events periods, downtime 8.1.2 at alevel. given aconfidence MTBF demonstrate desired 1 Appendix supplier. 8.1.1 8.2.1 MTBF § in defined metrics maintainability equipment the For § in defined metrics reliability equipment the For of regardless metrics applicable all in counted is period observation the during occurs that time Downtime applicable all in included are period observation the during occur that failures including events Downtime K = IPS1 for function value state The Truth Table for the State Function, Example 1 TablefortheStateFunction,Example Truth Mean Time Between Failure Calculations Failure TimeBetween Mean aremetricsfor errors divide-by-zero so that duration appropriate of specified beshall periods Observation observation multiple over that ensure to followed be shall rules following the system, equipment any For the and user the by upon agreed and specified be shall period observation an metrics, calculate To u — 9.6

Mean uptime between failures; the average equipment system uptime that the equipment was equipment the that uptime system equipment average the failures; between uptime Mean ), but an upper confidence bound(UCB) estimate cannot.), anconfidence but upper ¶

2.2.9 Measurement of the equipment’s ability to perform its intended function, within function, intended its perform to ability equipment’s the of Measurement provides some guidance on establishing the observation period time needed to needed time period observation the establishing on guidance some provides MTBF u = K 1 1 1  [1 − (1 − PM1) PM1) − (1 − [1 # of failures# of uptime during PM1 else 0 1 1 Page uptime 29 PM2 9.4 8.2 1 0 1 8.4 ). , the possibility exists of having the case of zero of case the having of exists possibility the ,  , the possibility exists of having the case of zero of case the having of exists possibility the , (1 − PM2)]. The equivalent truth table is shown is table truth equivalent The PM2)]. − (1 IPS1 0 1 1 1 jn l jn Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: 7 . DRAFT  SEMI (4)  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and during productive time divided by the number of failures during productive failures dividedbythe number time time. of during productive 8.2.1.5 state any from change to made in calculation. state a areincluded this to downtime productive unscheduled is attempt an when occur that Failures calculation. this in included is time productive Only time. that during failures of number the by divided time productive failures; between function 8.2.1.4 this in included nonscheduled is from change uptime to in calculation. anstate orto areincluded this downtime uptime time scheduled Only made attempt time. an with that coincident during occur that failures failures Equipment-related equipment-related calculation. of number the by divided uptime that 8.2.1.3 of during uptime. byfailures divided the number 8.2.1.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This during uptime. failures 8.2.2.1 failures of causes root the and time total categorizing and accurately. tracking also but information, failure capturing of E-MTBF Using calculation. this in included are state productive a to time unscheduled than other state any from change to made is attempt an when occur that failures of number the Equipment-related calculation. this by in included is time divided productive Only time. that during time failures equipment-related productive failures; equipment-related between function intended its performed 8.2.1.6 8.2.2 the equipment was capable of performing its intended function between these equipment-related failures; equipment-related these between function intended its performing of capable was equipment the E MFD MTBF E-MTBF MFD MCBF - MTBF Mean Cycle Between Calculations Failure Cycle Mean p u p — u —

— — — Mean productive time between failures; the average time average the failures; between time productive Mean — p u

— Mean failure duration for failures during uptime; unscheduled downtime for failures during uptime during failures for downtime unscheduled uptime; during failures for durationfailure Mean — MFD Mean failure duration for failures during productive time; unscheduled downtime for failures for downtime unscheduled time; productive during failures for duration failure Mean Mean cycles between failures during uptime; the average number of equipment cycles between cycles equipment of number average the uptime; during failures between cycles Mean E-MTBF

Mean uptime time between equipment-related failures; the average equipment system uptime system equipment average the failures; equipment-related between time uptime Mean enpoutv iebteneupetrltdfiue;teaeaetm time average the failures; equipment-related between time productive Mean p E-MTBF = MFD = MTBF p u = unscheduled downtime for downtime unscheduled during time failures productive u # of equipment-related failures during time equipment-related failures # of productive = p = unscheduled downtime for failures for downtime uptimeunscheduled during # of equipment-related failures during equipment-relatedfailures # of uptime # of failures during failures time# of productive during failures time# of productive # of failures# of uptime during productive timeproductive timeproductive p Page , therefore, requires that the user not only have the capability the have only not user the that requires therefore, , uptime 30 jn l jn the equipment performed its intended its performed equipment the Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: the equipment the other than other DRAFT  SEMI (9) (8) (7) (6) (5)  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and states for the IPS and MPCTs as defined in defined and thestates IPS MPCTs § for as mapped temporal the on based be will section this in metrics the of all MPCTs, and IPS For required. when function 8.3 time. betweenequipment-relatedduring productive failures equipmentcycles of 8.2.2.4 failuresproductive time. during between 8.2.2.3 equipment-related during uptime. failures equipment cyclesbetween 8.2.2.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This qimn viaiiy—— Availability Equipment 8.3.1 dependent metrics depend on the following three fundamental quantities, each expressed in of following eachexpressed time: units dependquantities, fundamental onthe three metrics dependent § in defined as MPCT and IPS the for states mapped temporal the on based be will section this in metrics the of all MPCTs, and IPS For delays. maintenance supplier and user of effect the disregarding and 8.3.3 duringoperations the periodandtime. nonscheduled time disregarding of function 8.3.2 time. during total E-MCBF MCBF E-MCBF Equipment-Dependent Metrics Equipment-Dependent — Uptime Operational — Uptime Total equipment-dependent scheduled downtime scheduled equipment-dependent p — — p u — — — Mean cycles between failures during productive time; the average number of equipment cycles equipment of number average the time; productive during failures between cycles Mean E-MCBF E-MCBF Mean cycles between equipment-related failures during productive time; the average number average the time; productive during failures equipment-related between cycles Mean en cce ewe qimn-eae alrs drn pie h vrg ubr of number average the uptime; during failures equipment-related between cycles Mean MCBF The percentage of time the equipment is in a condition to perform its intended function intended its perform to condition a in is equipment the time of percentage The p = = operational uptime (%)=operational uptime MCBF u = The probability that the equipment will be in a condition to perform its intended its perform to condition a in be will equipment the that probability The p = The percentage of time the equipment is in a condition to perform its intended its perform to condition a in is equipment the time of percentage The total uptime (%)=total u # of equipment-related failures during equipment-relatedfailures # of uptime = # of equipment-related failures during equipment-relatedfailures # of productive equipment cycles during time equipment productive cycles — The performance of the equipment based solely on equipment merit equipment on solely based equipment the of performance The — # of failures during failures time# of productive equipment cycles during time equipment productive cycles equipment cycles during uptime cyclesduring equipment uptime cyclesduring equipment 7 . # of failures# of uptime during = Page + SDT change SDT material consumable + of setup SDT + uptime SDT preventive maintenance preventive SDT 31 total timetotal operations time operations time uptime x 100 x 100 jn l jn Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: 7 . Equipment- . DRAFT  (16) (15) (14) (13) (12) (11) (10) SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and events. events. downtime unscheduled equipment-dependent to due function intended its perform to available not is equipment the 8.3.3.3 downtime scheduled equipment-dependent to due such asevents.events PM function intended its perform to available not is equipment the 8.3.3.2 onequipment merit. solely function performitsbased ato in condition intended 8.3.3.1 21: NOTE 20: NOTE reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This merit and solely function supplier performits based maintenancedelays. to condition intended onequipment 8.3.4.1 downtime100%.(%) unscheduled = 22: NOTE equipment-dependent unscheduled downtime (%) = downtime unscheduled equipment-dependent equipment-dependent scheduled downtime (%) = downtime scheduled equipment-dependent Supplier-dependent metrics depend on the following three fundamental onthethree following depend quantities: metrics Supplier-dependent § in defined as MPCT and IPS the for states mapped temporal the on based be will section this in metrics the of all MPCTs, and IPS For delays. maintenance user of effect the disregarding and delays maintenance supplier 8.3.4 supplier-dependent unscheduled downtime = downtime supplier-dependent unscheduled Equipment-Dependent Unscheduled Downtime Unscheduled Equipment-Dependent Downtime Scheduled Equipment-Dependent Uptime Equipment-Dependent Supplier-Dependent Uptime Supplier-Dependent equipment-dependent unscheduled downtime = downtime unscheduled equipment-dependent equipment-dependent operations = equipment-dependent time

SDT and unspecifiedunspecified UDT are clearly not associated equipment withdependence and excluded. are SDT test presumed beproduction is to dictated by policy and primarily user excluded equipment is from dependence. Supplier-Dependent Metrics Supplier-Dependent supplier-dependent scheduled downtime scheduled supplier-dependent supplier-dependent operations timesupplier-dependent operations = equipment-dependent uptime (%) =equipment-dependent qimn-eedn pie () + eupetdpnet shdld dwtm % equipment-dependent + (%) downtime scheduled equipment-dependent + (%) uptime Equipment-dependent — The percentage of supplier-dependent operations time the equipment is in a in is equipment the time operations supplier-dependent of percentage The — — The percentage of equipment-dependent operations time the equipment is equipment the time operations equipment-dependent of percentage The — — The performance of the equipment based solely on equipment merit and merit equipment on solely based equipment the of performance The — = — The percentage of equipment-dependent operations that time of percentage equipment-dependent —The + equipment-dependent unscheduled downtime unscheduled equipment-dependent + downtime scheduled equipment-dependent + + supplier-dependent unscheduled downtime supplier-dependentunscheduled + downtime supplier-dependent scheduled + Page + supplier maintenance delay maintenance supplier UDT+ delay maintenance supplier SDT + equipment-dependent operationsequipment-dependent — The percentage of equipment-dependent operations time operations equipment-dependent of percentage The — uptime uptime equipment-dependent unscheduled downtime unscheduled equipment-dependent downtime scheduled equipment-dependent equipment-dependent scheduled downtime scheduled equipment-dependent equipment-dependent unscheduled downtime downtime unscheduled equipment-dependent + UDT change of UDT change material + consumable 32 UDT repair, equipment-related equipment-dependent operations time operations equipment-dependent time operations equipment-dependent uptime time jn l jn x 100 100 Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: x 100 x DRAFT  (24) (23) (22) (19) (18) (17) (21) (20) SEMI 7 .  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This supplier-dependent uptime (%)= uptime supplier-dependent Page supplier-dependent operations supplier-dependent 33 uptime jn l jn time x 100 Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  (25) SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and delay downtime), divided by the number ofevents downtime), by PM divided theduringperiod. number that delay maintenance including not but time, test process and equipment (including period time specified a hours) man during total incurred necessarily not time, (elapsed time PM all of sum the function; intended its perform can it where 8.4.1.1 of intendedatime. itfunctionperiod specified performits within can where 8.4 (%) downtime = 100%. 23: NOTE events. downtime itsdue unscheduled to to intended available function not equipment is perform 8.3.4.3 events,PM downtime itsdue scheduled such to to events. intendedas available function not equipment is perform 8.3.4.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This that repair events of during period. byequipment-related divided the number downtime), delay maintenance including not but a time, during test process incurred and equipment hours) (including man period time total specified necessarily not time, (elapsed time the repair function; failure intended equipment-related its all perform of can sum it where condition a to equipment the return and failure equipment-related 8.4.1.3 duringperiod. that of downtime), by repair divided theevents number delay maintenance including not but time, test process and equipment (including period time specified a during incurred hours) man total necessarily not time (elapsed time repair all of sum the function; intended its perform can it where 8.4.1.2 supplier-dependent unscheduled downtime (%)= downtime supplier-dependent unscheduled Equipment Maintainability — — Maintainability Equipment section will be treated as the equipment module-level aggregate in both the numerator and denominator. aggregate as theand numerator both willthe equipmentmodule-level in besection treated 8.4.1 supplier-dependent scheduled downtime (%)= downtime supplier-dependent scheduled -TR — — E-MTTR — MTTR — MTTPM Downtime Unscheduled Supplier-Dependent Downtime Scheduled Supplier-Dependent

The metrics in this section apply to all equipment systems. For IPS and MPCTs, all of the metrics in this in metrics the of all MPCTs, and IPS For systems. equipment all to apply section this in metrics The Supplier-dependent uptime (%) + supplier-dependent scheduled downtime (%) + supplier-dependent unscheduled supplier-dependent + (%) downtime scheduled supplier-dependent + (%) uptime Supplier-dependent Mean time to repair; the average time to correct a failure and return the equipment to a condition a to equipment the return and failure a correct to time average the repair; to time Mean Mean time to PM; the average time to complete a PM and return the equipment to a condition a to equipment the return and PM a complete to time average the PM; to time Mean en tm o rpi uig eupetrltd fiue; te aeae tm o cret an correct to time average the failures; equipment-related during repair to time Mean MTTR = E-MTTR = The probability that the equipment will be retained in, or restored to, a condition a to, restored or in, retained be will equipment the that probability The MTTPM =

+ nonequipment-relatedrepair events #of

# of equipment-related repair events# of + UDT repair, nonequipment-related # of equipment-relatedrepair events# of UDT repair, equipment-related UDT repair, equipment-related — SDT preventiveSDT maintenance — Page The percentage of supplier-dependent operations time the time operations supplier-dependent of percentage The The percentage of of percentage The supplier-dependent scheduled downtime downtime scheduled supplier-dependent # of PM# of events supplier-dependent unscheduled downtime downtime unscheduled supplier-dependent 34 supplier-dependent operations timesupplier-dependent operations supplier-dependent operations timesupplier-dependent operations jn l jn supplier-dependent operations time operations supplier-dependent 100 Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A x Date: 2011/08/29Date: 100 x DRAFT  (30) (29) (28) (27) (26) SEMI the  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and performance). Calculated in this way, impairment time is in no way analogous to MTTR, MTOL, or other downtime other or MTOL, MTTR, to analogous way no in is time impairment way, this in Calculated performance). failure same the roughly have systems equipment both in modules systemequipment (where modules equipment equipment more with an than performance the better reflect systemis to equipment expected be an denominator naturally hence, may The time; modules equipment calendar fewer downtime. to with limited unscheduled is It in aggregated. not is is which module time, total equipment system equipment one least at when period observation an in time of periods all of mapping temporal a is numerator The complexity. system equipment of effect negative 8.4.2.2 metrics ofthis in any Document. reciprocal MTBF a equipment (where modules not is TFR equipment way, this in Calculated performance). more failure same the roughly with have systems equipment both in system modules equipment an than reflect metric may this modules The with equipment fewer performance aggregated. with better not system equipment is an it hence, time; time; calendar total to system limited is equipment denominator is denominator The failures. module-level equipment of equipmentsystemaggregate is numerator effect count of negative The the complexity. reflectingthe potentially time 8.4.2.1 (including downtime all of sum the delayofobservation events downtime bycontinuous time)divided the number duringperiod. an maintenance is MTOL combined. downtime unscheduled and downtime scheduled to due 8.4.1.4 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This have effectwill the of IPSthat time utilizationinflating such IPSproductive be metrics rendered may unusable. individual This member. a to is module the attributed which for IPSs all be to attributed be will time cannot productive module’s common the modules cases, these In IPSs. common the for time productive then common, in modules have to tend IPSs those 24: NOTE mapped in defined and thestates IPS MPCT § for as temporal the on based be will section this in metrics the of all MPCTs, and IPS For period. time specified 8.5 metrics this in Document. performance Equipment Utilization Equipment nqe t h erc n ti eto, te nmrtr r eie s priua qimn module-level equipment particular as defined are numerators simply the equipmentsystem. thecount failure andfor downtime unscheduled are the numerators the section, this MPCT, or IPS an not is that system equipment an For downtime. unscheduled and counts in failures of aggregates metrics the to Unique 8.4.2 reflect bottom-line equipmentutilization. reflect 8.5.1 impairment time (%)= impairment time Impairment Time (%) Time Impairment (TFR) Rate Failure Total function intended its perform to available not is equipment time average the off-line; time Mean — MTOL

Total Utilization — — Utilization Total MPCTs. or IPS for even denominator, the as time total system equipment have section this in metrics The For MPCT equipment systems where multiple IPSs are simultaneously scheduled to be utilized in production and production in utilized be to scheduled simultaneously are IPSs multiple where systems equipment MPCT For — The percentage of time the equipment is performing its intended function during a during function intended its performing is equipment the time of percentage The — MTOL =MTOL — A percentage of unscheduled downtime versus total time reflecting the potentially the reflecting time total versus downtime unscheduled of percentage A — The percentage of productive time during total time. This calculation is intended to intended is calculation This time. total during time productive of percentage The total utilizationtotal (%) = TFR =TFR — The rate of equipment module-level failures versus equipment system total system equipment versus failures module-level equipment of rate The — time when at least one equipment module in oneis least time whenat equipment down unscheduled scheduled downtime + unscheduled + downtime downtime scheduled 7 # of equipment module-level failures equipment # of . # of continuous# of events downtime equipment total system time Page equipment system total system timeequipment productive time productive 35 total timetotal 100 jn l jn x Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: x 100 DRAFT  (34) (33) (32) (31) SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and related failures productive during time E-MCBF productive time MCBF related failures uptimeduring E-MCBF uptime MCBF equipment-relatedfailures E-MTBF productive time MFD MTBF equipment-relatedfailures E-MTBF uptime MFD MTBF Table 3 Table 3 8.6 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Metrics Summary Tables Summary Metrics 8.6.1 shift work different with operations between comparisons utilization equipment sincedoes includetime. configurations, not nonscheduled it for used be to intended 8.5.2 p u — failureMean duration failures for during — failureMean duration failures for during p u p u Mean between— productive time failures timeMean between— uptime failures Mean — cycles failuresbetween during Mean — cycles failuresbetween during p u p u Reliability Metrics Mean between— productive time — Mean — cycles equipment-between Mean — cycles equipment-between Reliability Metrics — Reliability Utilization Operational Mean uptime timeMean between uptime Metric operational (%)= utilization For IPS andmetricsmapped based to ForIPS MPCTs,is § states input per ontemporal —

The percentage of productive time during operations time. This calculation is calculation This time. operations during time productive of percentage The (uptime) / of during (# failures uptime) (unscheduled downtime failures uptime) for during (uptime) (# failures uptime)/ of during time) / of (# equipment-related during failures productive (equipment cycles productive during time) / of during (# failures productive time) (equipment cycles productive during time) / of (# equipment-related during failures uptime) (equipment cycles uptime)during (equipment cycles uptime)during / of (# equipment-related during failures uptime) (productive time) time) (# failures productive/ of during time) (unscheduled downtime failures productive for during (productive / of time) (# failures productive during time) / (# equipment-related/ of failures uptime) during / ( of during / # failures uptime) Page 36 productive time productive operations time operations 100 Formula jn l jn x Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: Paragraph Reference 8.2.1.3 8.2.1.2 8.2.1.1 8.2.2.4 8.2.2.3 8.2.2.2 8.2.2.1 8.2.1.6 8.2.1.5 8.2.1.4 DRAFT  (35) SEMI 7 .  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and i TFR Total rate— failure MTOL off-lineMean — time related failures E-MTTR to Mean — repair time equipment-during MTTR to Mean — repair time maintenance(PM) MTTPM to Mean preventive — [perform]time supplier-dependentunscheduled (%) downtime supplier-dependentscheduled (%) downtime supplier-dependent uptime (%) equipment-dependentunscheduled (%) downtime equipment-dependentscheduled (%) downtime equipment-dependent uptime (%) operational uptime (%) (%) total uptime Table 5 Table 5 the denominator. in module aggregate performance and equipment numerator 8.6.3.1 Table 4 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Table 6 denominator. systemin nonaggregate the performance and equipment numerator 8.6.3.2 mpairment time (%) mpairment time 8.6.3 7 8.6.2 . Group 2, for IPS and MPCTs, input to metrics is based on aggregate equipment module performance in the in performance module equipment aggregate on based is metrics to input MPCTs, and IPS for 2, Group the in performance module equipment aggregate on based is metrics to input MPCTs, and IPS for 1, Group Availability Metrics Maintainability MetricsGroup2 Maintainability MetricsGroup1 Maintainability Metrics Maintainability Metrics — Metrics Availability Metric Metric Metric / equipment total( system time) (time at when is least unscheduledequipment in one module down (# equipment of module-level /systemfailures) total (equipment time) For all IPS and MPCTs, input to metrics is based on temporal mapped states per § per states mapped temporal on based is metrics to input MPCTs, and IPS all For (supplier-dependentunscheduled downtime / (supplier-dependent time)operations (supplier-dependentscheduled downtime (uptime (equipment-dependentunscheduled downtime / (equipment-dependent time)operations (equipment-dependentscheduled downtime (uptime (uptime (uptime / (supplier-dependent/ operations time) (equipment-dependent/ operations time) (scheduled unscheduled downtime downtime)+ (UDT repair, equipment-related) of + # nonequipment-related repair events) repair,+ UDT related) nonequipment (UDT repair, equipment related (SDT maintenance) / preventive of events) (# PM Page / (# continuous events)/ of downtime (# equipment-related/ of repair events) (# equipment-related/ of repair events x x x x 100) (supplier-dependent / operations time) 100) (equipment-dependent / operations time) 100) (operations / time) 100) (total / time) 37 Formula Formula jn l jn Formula Document Number: 3846A Number: Document x 100) x x 100) 100) x 100) x 100) Doc. 3846A Doc. 3846A Date: 2011/08/29Date: Paragraph Paragraph Reference Reference Paragraph Reference 8.4.2.2 8.4.2.1 8.4.1.4 8.4.1.3 8.4.1.2 8.4.1.1 8.3.4.3 8.3.4.2 8.3.4.1 8.3.3.3 8.3.3.2 8.3.3.1 8.3.2 8.3.1 DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and operational utilization total (%) utilization u ofdne bud n MT n te qimn ananblt erc itd i in listed metrics maintainability equipment other and MTTR inappropriate. on bounds confidence put 9.4 improvement testing. § or degradation). growthreliability is there when (e.g., present § MTBF. calculate to meaningful is it and trends degradation or improvement no are there Therefore, distribution. exponential the to according distributed 9.3 the MTBF 9.2 within period. theofcontained amount the observation time of observedand failures upon the number depending varies Precision estimate. point the of precision or uncertainty the indicate not do They estimates. point 9.1 distributed).exponentially in listed metrics reliability equipment 25: NOTE 9 Table 7 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 4or to more had failures. have advantageous is it precision, of view of point the From wide. be will less intervals confidence be and will estimate, point MTBF LCB the half MTBF than the 4, under is failures of number the when that means This 4. exceeds or equals failures 9.6.1.2 the MTBF usefulcontractually. and often LCB,LCB performanceis anstatistic, as and used this is important 9.6.1.1 arezerofailures. there when performance for estimate UCB no is There LCB). MTBF desired the obtain to failures no had that time productive of row first the in given are MTBF the for factors LCB period, observation ( look-up table by obtained factors from 9.6 data combine to appropriate also is It way. same the in point equipmentbeingway, usedof improve estimates. theorderto MTBF same precision in identical E-MCBF or E-MTBF to apply procedures These example. for units, or cycles by replaced are hours where metrics, reliability equipment similar for estimates point 9.5

UncertaintyMeasurements forSome Equipment Reliability Metrics Since MTTR distributions may not follow an exponential distribution assumption, applying these procedures to procedures these applying assumption, distribution exponential an follow not may distributions MTTR Since independently are failures between times the and constant is rate failure the that assume procedures These for (UCB) bound confidence upper and (LCB) bound confidence lower a calculating by described is Precision §§ in defined maintainability and availability, reliability, equipment of measures The Calculation of LCBs and UCBs and LCBs of Calculation of precision the measuring to well equally apply section this in to referred tables and procedures all that Note states per § states per 8.6.4 pedx1crepn t ifrn vle o of values ranging 95% to are typical fromchoices. levels 80% Confidence different to correspond 1 Appendix and period observation the during observed failures 9.6.1 Note that the factors in in factors the that Note goodas least at is it that level) given confidence a (at has demonstrated measured equipment being the Since Utilization Metrics

Calculation of the MTBF LCB MTBF the of Calculation — Metrics Utilization calculations and presenting this confidence interval along with the MTBF with point this andinterval the presenting along estimate. confidence calculations For purposes of simplicity, this section refers to MTBF; however, substitutions can be made for many of the of many for made be can substitutions however, MTBF; to refers section this simplicity, of purposes For Metric 7 . (%) 1.1 (productive (productive time (productive time For all IPS and MPCTs, input to metrics is based on temporal mapped SEMI E10 SEMI mapped temporal on based is metrics to input MPCTs, and IPS all For 1.1 in Appendix 1 for a 90% confidence level are less than 0.5 until the number of number the until 0.5 than less are level confidence 90% a for 1 Appendix in 3 providing they are exponentially distributed (e.g., MFD (e.g., distributed exponentially are they providing — To obtain MTBF LCBs and UCBs, multiply the MTBF point estimate by estimate point MTBF the multiply UCBs, and LCBs MTBF obtain To — and and 10 — Use Use — applies when the failure times indicate that a nonconstant failure rate is rate failure nonconstant a that indicate times failure the when applies 1.1 in Appendix 1). For the case when there are zero failures during the during failures zero are there when case the For 1). Appendix in x x / time)100) (operations / time)100) (total 1.1 in Appendix 1 to obtain a k a obtain to 1 Appendix in Page r n h oun crepn t ifrn vle o of values different to correspond columns the and conf 38 Formula is the confidence level desired. The rows of of rows The desired. level confidence the is 10 would typically apply during prototype reliability during prototype apply typically would jn l jn 1.1 r;conf (e.g., they multiply the amount of amount the multiply they (e.g., factor, where where factor, Document Number: 3846A Number: Document u and MFD and 7 and and Doc. 3846A Doc. 3846A 5 Date: 2011/08/29Date: 8 r n and p is the number of number the is are single-value are may often not be not often may Paragraph Reference 6 8.5.2 8.5.1 a be may DRAFT  1.1 conf SEMI in .  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and MTBF 1.2.6 MTBF 9.6.3.1 equipment MTBF to (corresponding MTBF The failures. 9.6.2.1 equipment MTBF to (corresponding MTBF The failures. 9.6.1.3 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This at of MTBF an demonstrated 400hours confidence at an level. 80% least have will we occurred, have failures 4 than more no if and hours 2688 accumulated hours. 2688 = 6.72 × 400 have we When systems. equipment multiple across period observation is the split or equipment one on this do required can We period observation the of length the means That 6.72. find and 1 Appendix from factor appropriate the up look We failures. less or four with test qualification a pass to able be to want 9.6.5.2 possible. whenever failures, §§ in discussion the in mentioned As chance. by test the failing equipment acceptable an of possibility the increase to is length period observation minimum a using 9.6.5.1 isfor 90% equipmentMTBF LCBhours, the a true estimate From 9.6.4.1 length of theestimate. observationbythis thelength of period obtain LCB factor to to (corresponding 9.6.4 80% an give to combine UCB 90% a and LCB 90% a Therefore, UCB. 90% give 95% to a interval. aandUCB 90% 95%a interval. confidence wouldcombine LCB Similarly, confidence a for true is same the and an has LCB 90% A interval. the of end – (1 × 100 a give to combined be can MTBF 9.6.3 of values ranging 95% to aretypical fromchoices. levels 80% Confidence different to correspond 1 Appendix and period observation the during observed failures 9.6.2 period needed. period on based factor a by multiplied in factors an the of using length the calculated Next, be can level. needed confidence period given observation a at objective MTBF required a confirm to us allow still and failures, of number maximum a pick must first we confidence, 9.6.5 and and 1.1 p p . §§ (see respectively 380.8 and 114 are UCB and LCB 90% The hours. 200 = 6 / 1200 is estimate point Example of however, cost, The failures. no allowing by obtained are lengths period observation minimum that Note Example Example Example Example in Appendix 1, the 90% confidence level LCB factor is 0.434. That means that 1200 × 0.434 = 520.8 = 0.434 × 1200 that means That 0.434. is factor LCB level confidence 90% the 1, Appendix in 1.2.7 Choosing an observation period length in order to be able to demonstrate a required MTBF at a given a at MTBF required a demonstrate to able be to order in length period observation an Choosing — Failures Zero Are There when LCB MTBF the of Calculation MTBF the for Interval Confidence a of Calculation theCalculation MTBFUCB of in Appendix 1). The interval (114, 380.8) is then an 80% confidence interval for the true equipment true the for interval confidence 80% an then is 380.8) (114, interval The 1). Appendix in — During a given calendar quarter, an equipment was productive for 1200 hours and had 6 had and hours 1200 for productive was equipment an quarter, calendar given a During — — During a calendar quarter, an equipment was productive for 1200 hours and had zero failures. zero had and hours 1200 for productive was equipment an quarter, calendar a During — The failures. 6 had and hours 1200 for productive was equipment an quarter, calendar a During — 6 had and hours 1200 for productive was equipment an quarter, calendar given a During — — We would like to confirm an equipment MTBF of 400 hours at an 80% confidence level. We level. confidence 80% an at hours 400 of MTBF equipment an confirm to like would We — p p . . r r r r = 6 failures) is 1.904. That means that 200 × 1.904 = 380.8 hours is a 90% UCB for the true the for UCB 90% a is hours 380.8 = 1.904 × 200 that means That 1.904. is failures) 6 = = 6 failures) is 0.570. That means that 200 × 0.570 = 114.0 hours is a 90% LCB for the true the for LCB 90% a is hours 114.0 = 0.570 × 200 that means That 0.570. is failures) 6 = p p on etmt i 10 20hus 0 UBfco fo from factor UCB 90% A hours. 200 = 6 / 1200 is estimate point on siae s 10 6 20hus A 0 LB fco fo from factor LCB 90% A hours. 200 = 6 / 1200 is estimate point r r = 0) to obtain a a obtain to 0) = r and the desired confidence level to obtain the total length of an observation an of length total the obtain to level confidence desired the and —Use k 0;conf 

/2 = 0.1 chance of not being low enough to capture the true MTBF, true the capture to enough low being not of chance 0.1 = /2 factor corresponding to the desired confidence level. Multiply the Multiply level. confidence desired the to corresponding factor 1.1  9.6.1.2 ) confidence interval. Here Here interval. confidence ) in Appendix 1 to obtain a k Appendixa obtain in 1to Page r n h oun crepn t ifrn vle o of values different to correspond columns the and , it is advantageous to design a test that allows at least four least at allows that test a design to advantageous is it , conf p 39 . is the confidence level desired. The rows of of rows The desired. level confidence the is C n C ie,10×[ – [1 × 100 (i.e., UCB and LCB — r , that can occur during the observation period observation the during occur can that , jn l jn 1.1 in Appendix 1. The required MTBF is MTBF required The 1. Appendix in Use the first row of of row first the Use  /2 is the chance of missing on either on missing of chance the is /2 r;conf factor, where factor, Document Number: 3846A Number: Document 1.1 1.1 Doc. 3846A Doc. 3846A 1.1 Date: 2011/08/29Date: r is the number is of the in Appendix 1 Appendix in in Appendix 1 Appendix in in Appendix 1 Appendix in  /2]) for the for /2]) DRAFT  1.1 1.1 conf SEMI in in .  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and occur during productive time (other failures can occur, but usedreliability fit arenot canto productivefailures models). (other these occur, time occur during is data failure of time Exact must model thefit trends. used to failures The adequacy. for fit the test and model, AMSAA anfit trends,for test to needed (degradation) growth reliability for test general a with along 2, Appendix in described are models AMSAA These (AMSAA). Activity Analysis Systems Materials Army U.S. the by developed 10.3 equipment states. six the of each within duration by if monitored continuously points is starting time total other if from accomplished easily or is 0) This time appropriate. as set (often equipment the of use productive initial the from measured as 10.2 trends, reliabilityandappropriate fit models. to improvement or degradation certain if or equipment, reliability detect to the order in required is recording failure of for time Exact used. be must methods life other and misleading of end the near and inappropriate is calculation MTBF (typical overall an then out), wearing degrading are and over-stressed been have is subassemblies reliability if or run-in) life and early debug and also verification design during (typical improving is reliability If period. observation the over constant 10.1 MTBF/E-MTBF in of defined 26: NOTE 10 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Reliability Growth Degradationor Measurement failure would be 174hours. wouldbe failure of time exact the week, fifth of the day the third into hours 2 occurred failure second a If hour day). 8 an of half plus week per hours 40 = 8 × 5 of weeks (3 hours 124 is failure of time exact The operation. of weeks four first the of end the before occur failures more No operation. day’s next the of start the until repaired not is and day, the through half-way fails it use, of weeks three first the After utilization. productive 100% assume simplicity, 10.2.1 Reliability Growth (Degradation) Models — — Models (Degradation) Growth Reliability — Recording Failure of Time Exact are E-MCBF) (or E-MTBF and MCBF) (or MTBF the when only meaningful are calculations previous The

For purposes of simplicity, this section refers to MTBF; however, substitutions can be made for the defined variationsdefined madethe be for can substitutions however, refersMTBF; section to this simplicity, of purposes For Example — An equipment system is intended for use during first shift operation five days a week. For week. a days five operation shift first during use for intended is system equipment An — 3 . Clock times of failure must be converted to durations of cumulative time cumulative of durations to converted be must failure of times Clock A useful family of reliability growth (degradation) models was models (degradation) growth reliability of family useful A Page 40 jn l jn Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A Date: 2011/08/29Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 1.1 A1.2.1 A1.2 r use to order In level. confidence given a at MTBF desired A1.1.2 given in is measurement, equipment reliability equipment the in occurs and rarely data advance in specified is failures occur. failures of many that until observed number the where data, failure-censored is alternative of period fixed a for isinThe ofwill andthat unknown advance. failures cycles the number occur number ora of time for predetermined observed is equipment the where data, cycle-censored or time-censored of case common the A1.1.1 A1.1 27: NOTE date approval[insert of by SC]. A&R NOTICE BOUND FACTORSCONFIDENCE 1 APPENDIX reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This A1.2.5 A1.2.4 A1.2.3 MTBF A1.2.2 , you might observe during the observation period and still be able to meet the required MTBF observeduringable objective. the observationandmeet to the , youstill might be period : : Calculating Confidence BoundFactors Calculating Confidence Introduction UPPER For failure-censored data, MTBFFor failure-censored onthisof aregiventhe first based in row are0failures formula Factors there use to when For 0fails, use: MTBF above is MTBF true the that α) – (1 × 100 is level confidence the cases, both In in found data time-censored for factors UCB and LCB the for formulas the are here reference, For 1.1 1.1 1.1 : The material in this Appendix is an official part of SEMI E10 and was approved by full letter ballot procedures on procedures ballot letter full by approved was and E10 SEMI of part official an is Appendix this in material The :

and chi squaredistribution tables areused. and This offers Appendix detailed related § information to apply to both kinds of kinds censored both apply to data. and and can be used to plan equipment assessment or qualification tests in order to be able to demonstrate a demonstrate to able be to order in tests qualification or assessment equipment plan to used be can 1.1 contain factors that multiply an MTBF point estimate to obtain LCBs and UCBs. UCBs. and LCBs obtain to estimate point MTBF an multiply that factors contain UPPER F B T M

1.1 F B T M MTBF

contains LCB factors for failure-censored data. Since failure-censored Since data. failure-censored for factors LCB contains is the same, but the LCB factor in same, is the LCB but factor the

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1.1 is: is: Document Number: 3846A Number: Document Doc. 3846A Doc. 3846A 1.1 Date: 2011/08/29Date: LOWER . 1.1 and below and applies in applies DRAFT 1.1  (A1-4) (A1-3) (A1-2) (A1-1) SEMI and  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table A1.1 Table A1.1 confidence the correspondingdesired to level. the factor level. given confidence the bound at lowera obtain to factor A1.2.6 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Failures, Failures, r Number of 500 100 50 30 20 15 12 10 9 8 7 6 5 4 3 2 1 0 Use Use Sided Lower Confidence Bound Factors for the MTBF (Time-CensoredorCycle-Censored MTBF Data) Sided LowerConfidenceBoundFactorsforthe 1.1 for time- or cycle-censored data. Multiply the MTBF or MCBF MCBF or MTBF the Multiply data. cycle-censored or time- for 0.987 0.969 0.953 0.935 0.916 0.899 0.883 0.868 0.859 0.848 0.834 0.817 0.795 0.763 0.718 0.644 0.494 1.091 60% 0.976 0.943 0.918 0.892 0.864 0.841 0.821 0.802 0.790 0.777 0.760 0.740 0.714 0.679 0.630 0.553 0.410 0.831 70% 0.703 0.684 0.661 0.632 0.595 0.544 0.467 0.334 0.621 0.962 0.915 0.879 0.844 0.809 0.780 0.755 0.733 0.719 80% Confidence LevelConfidence Page 42 For 0 failures, multiply the operating hours or cycles by cycles or hours operating the multiply failures, For 0 0.662 0.642 0.618 0.589 0.550 0.499 0.423 0.297 0.527 0.954 0.897 0.856 0.816 0.777 0.745 0.718 0.694 0.679 85% jn l jn 0.616 0.595 0.570 0.539 0.500 0.449 0.376 0.257 0.434 0.944 0.877 0.829 0.783 0.739 0.704 0.675 0.649 0.634 90% point point Document Number: 3846A Number: Document estimate by the appropriate the by estimate 0.554 0.532 0.507 0.476 0.437 0.387 0.318 0.211 0.334 0.929 0.847 0.790 0.737 0.688 0.649 0.617 0.590 0.573 95% Doc. 3846A Doc. 3846A Date: 2011/08/29Date: 97.5% 0.508 0.485 0.459 0.429 0.391 0.342 0.277 0.179 0.271 0.916 0.822 0.759 0.700 0.647 0.606 0.572 0.544 0.527 DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table A1.1 Table A1.1 confidence level. the given A1.2.7 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Failures, Failures, r Number of 500 100 50 30 20 15 12 10 9 8 7 6 5 4 3 2 1 Use Use Sided Upper Confidence Bound Factors for the MTBFSided UpperConfidenceBoundFactorsforthe 1.1 for time- or failure-censored data. Multiply the MTBF MTBF the Multiply data. failure-censored or time- for 1.012 1.029 1.044 1.060 1.077 1.093 1.108 1.123 1.133 1.144 1.159 1.179 1.205 1.246 1.313 1.453 1.958 60% 1.025 1.058 1.085 1.115 1.147 1.176 1.203 1.230 1.247 1.267 1.294 1.328 1.376 1.447 1.568 1.823 2.804 70% 1.372 1.400 1.435 1.479 1.537 1.618 1.742 1.954 2.426 4.481 1.039 1.093 1.137 1.185 1.237 1.284 1.329 80% Confidence LevelConfidence Page 43 1.470 1.507 1.552 1.610 1.687 1.795 1.962 2.255 2.927 6.153 1.049 1.115 1.170 1.231 1.296 1.357 1.414 85% jn l jn point point 1.607 1.657 1.718 1.797 1.904 2.055 2.293 2.722 3.761 9.491 1.060 1.144 1.214 1.291 1.377 1.456 1.533 90% estimate to obtain an upper bound at bound upper an obtain to estimate Document Number: 3846A Number: Document 19.496 1.843 1.917 2.010 2.131 2.296 2.538 2.928 3.669 5.628 1.078 1.189 1.283 1.389 1.509 1.622 1.733 95% Doc. 3846A Doc. 3846A Date: 2011/08/29Date: 39.498 97.5% 2.085 2.187 2.316 2.487 2.725 3.080 3.670 4.849 8.257 1.094 1.229 1.347 1.482 1.637 1.787 1.935 DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and ofdne ee fif level confidence A1.2.9 Table A1.1 a obtain to needed as long as lasts period observation of failures. number preset or test the means data Failure-censored level. confidence A1.2.8 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Table A1.1 level. confidence Failures,r Number of Failures,r Number of 500 100 50 30 20 15 12 10 9 8 7 6 5 4 3 2 1 20 15 10 Use Use 9 8 7 6 5 4 3 2 1 0 Sided Lower Confidence Bound Factors for the MTBF (Failure-CensoredData) MTBF Sided LowerConfidenceBoundFactorsforthe Observation PeriodLengthGuide 1.1 1.1 for failure-censored data. Multiply the MTBF MTBF the Multiply data. failure-censored for

to determine the observation period length needed to demonstrate a desired MTBF at a given a at MTBF desired a demonstrate to needed length period observation the determine to 0.989 0.978 0.971 0.966 0.961 0.958 0.956 0.955 0.954 0.954 0.953 0.954 0.955 0.958 0.966 0.989 1.091 60% r failures occur failures 0.693 20.68 15.67 10.67 50% 9.67 8.67 7.67 6.67 5.67 4.67 3.67 2.67 1.68 0.978 0.952 0.935 0.920 0.906 0.895 0.886 0.878 0.874 0.869 0.863 0.856 0.849 0.840 0.830 0.820 0.831 70% utpytethe Multiply . 0.916 21.84 16.69 11.52 10.48 60% 9.43 8.38 7.35 6.29 5.24 4.18 3.11 2.02 k Factor Givenk For Confidence Levels 0.812 0.799 0.791 0.782 0.771 0.759 0.744 0.725 0.701 0.668 0.621 0.964 0.923 0.896 0.870 0.846 0.828 80% Confidence LevelConfidence eie MB ytethe by MTBF desired Page 23.88 18.48 13.02 11.91 10.80 75% 9.68 8.56 7.42 6.27 5.11 3.92 2.69 1.39 44 0.771 0.755 0.745 0.734 0.721 0.706 0.688 0.665 0.635 0.593 0.527 0.956 0.906 0.872 0.841 0.812 0.790 85% point point estimate to obtain a lower bound at the given the at bound lower a obtain to estimate jn l jn 24.73 24.73 80% 19.23 13.65 12.52 11.38 10.23 1.61 9.07 7.90 6.72 5.52 4.28 2.99 0.945 0.945 0.885 0.723 0.704 0.693 0.680 0.665 0.647 0.626 0.599 0.564 0.514 0.434 0.844 0.806 0.772 0.745 k 90% atr orsodn oto corresponding factor Document Number: 3846A Number: Document 29.06 29.06 90% 21.29 15.40 14.21 13.00 11.77 10.53 2.30 9.28 7.99 6.68 5.32 3.89 0.930 0.930 0.855 0.659 0.637 0.623 0.608 0.591 0.571 0.546 0.516 0.477 0.422 0.334 0.804 0.759 0.717 0.685 95% Doc. 3846A Doc. 3846A Date: 2011/08/29Date: 30.89 95% 23.10 16.96 15.70 14.43 13.15 11.84 10.51 97.5% 3.00 3.00 r 9.15 7.75 6.30 4.74 0.918 0.830 0.610 0.585 0.571 0.555 0.536 0.514 0.488 0.456 0.415 0.359 0.271 0.772 0.720 0.674 0.639 DRAFT and the and  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and The interarrival times are 30, 130, 60, and 140. The total number of reversals is 3 + 1 + 1 = 5. is 1+ total of1= are30,130,60,and reversals 3+ interarrival140.The number times The A2.2.1.1 a count it reversal. we j, as X have we time any words, other In sequence. the in value greater subsequent any before occurs value X with be might these period failures, a For occurred. they order the in times interarrival the writing by Begin described. be will [4] Mann A2.2.1 A2.2 data. areevidentthetime equipmentfailure in improvement trends reliability when used be may that model powerful and known well a of description a as well as suspected, is failures A2.1.3 calculationbe and misleading. awill MTBF constant A2.1.2 Tobias and [2]. Trindade and § in described factors bound confidence § in given MTBF of definition the underlies assumption HPP An (HPP). process Poisson homogeneous constant a is failures of occurrence of rate (theoretical) the then distribution, exponential same the from sampled times random independent A2.1.1 A2.1 28: NOTE date approval[insert of by SC]. A&R NOTICE GROWTH DEGRADATIONOR MODELS RELIABILITY 2 APPENDIX reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Level Confidence Table A1.1 be can calculatedfrom: approximation) A2.2.4 confidence –α) significantatlevel. the 100 × (1 statistically A2.2.3 degradationtrend. indicates a expected A2.2.2 Sample Size TestingforTrends Introduction For For For than reversals of number smaller a trend; improving an indicates reversals of number expected than larger A nonparametric A of occurrence of rate time-varying a if applied be may that trend for test simple a contains appendix This a longer no is failures of occurrence of rate the then time, with degrading or improving either is reliability If are system equipment repairable a of times’) ‘interarrival as (known failures between times the If 6 5 4 9 8 7 r : The material in this Appendix is an official part of SEMI E10 and was approved by full letter ballot procedures on procedures ballot letter full by approved was and E10 SEMI of part official an is Appendix this in material The :

For example, suppose an equipment has has equipment an suppose example, For This offers Appendix detailed related § information to r r r Critical Values greater than 12, approximate critical values for the number of reversals (based on Kendall’s normal Kendall’s on (based reversals of number the for values critical approximate 12, than greater use 12, to up Reversals ProvideReversals Evidence Degradation) of Single-Sided Lower ValueFewSingle-Sided Critical (Too 99% 6 4 2 1 0 1  reverse arrangement test arrangement reverse , X , and the MTBF is just 1/ just is MTBF the and 1.1 R R 2 r;1- , …, X …, , ( r below (adapted from [2]) to determine whether a given number of reversals, reversals, of number given a whether determine to [2]) from (adapted below ; 

1

the Number of Reversals for the Reverse Arrangement TestataGiven fortheReverseArrangement the NumberofReversals -  ) r  . Starting from left to right, define a reversal as any instance in which a lesser a which in instance any as reversal a define right, to left from Starting . z l a c i t i r c 95% 9 9 6 4 2 1 0 and and 1 ( 2 . These concepts are described in detail in Ascher and Feingold [1] Feingold and Ascher in detail in described are concepts These . r r  devised by Kendall [3] and further developed into a table by table a into developed further and [3] Kendall by devised = 4 failures at 30, 160, 220, and 360 hours of productive time. productive of hours 360 and 220, 160, 30, at failures 4 = 5 Page 2 7  ( ) . This situation is known in the reliability literature as a as literature reliability the in known is situation This . r 90% 11  8 5 3 1 0 1 45 10 ) r . .  r ( r 4  Single-Sided CriticalUpper Value Many (Too jn l jn Reversals ProvideReversals Evidence Improvement) of 1 ) 90% 25 20 16 12  9 6 2 1 Document Number: 3846A Number: Document 95% 27 22 17 13 9 6 Doc. 3846A Doc. 3846A Date: 2011/08/29Date: i < X < 8 99% 30 24 19 14 10 , and the and , DRAFT j and i < i and (A2-1)  R SEMI , is , r  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and with the value MTBF the value with MTBF by denoted value instantaneous an has and A2.2.8 applications. in successful wide reliabilitymodel).model proved rangeof This a AMSAA growth has the by used model relationship power the into observation empirical this developed [6] Crow 0.6. and 0.3 between slope The of paper. plot graph a that observed [5] Duane reliability. equipment’s versus the improve to taken are actions to and down analyzed causes are failures root where testing, improvement reliability during case the be typically will This trend. A2.2.7 A2.2.6 trend.degradation 136 observing while trend, improvement likely a signals reversals more of reversals A2.2.5.1 are there reversals when of ( use reversals) of number small (a trends degradation For trend. improvement an detecting for value critical the calculates formula significance, A2.2.5 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This underestimate. trend improvement the slope improvement ignoring an give equations model AMSAA MTBF instantaneous The an and 0.43 of estimate paper. log-log on Using trend 40. improvement = linear 1 to a + appears which 0 show plot, + Duane the 2 shows A2-1 + Figure 2 likely. + is trend 0 improvement + an indicating 5 level, + confidence 7 + 7 + 9 + 7 is reversals A2.2.9.2 the toachieved MTBF model the estimate AMSAA use and trend improvement an be to appears there whether Determine hours. 511 and 410, 390, 287, 252, 180, 67, 41, 35, 20, 18, time: productive of points following the at recorded were failures Eleven time. productive of hours A2.2.9.1 MTBF the using A2.2.9 Sample Size I t

k ( In equation, this time with improving is MTBF the testing improvement reliability during that assumes model AMSAA The Model Growth Reliability AMSAA using test arrangement shows an the reverse application giventhefor The next in section example equation this In 12 11 10 , where where , T Solution Example for formula the failures, 17 with example, For oiidmxmmlklho siae estimates likelihood maximum modified ) that are described in [2][6]. are described in that and ) R z 17,95 critical r )( t = 88. The maximum number of reversals is 17 × 16 / 2 = 136. That means that observing 88 or 88 observing that means That 136. = 2 / 16 × 17 is reversals of number maximum The 88. = k r r is the equipment system age at the time of of time the at age system equipment the is — — MTBF — .8,fr9%sgiiac,significance, 95% for 1.282, =  1) / 2 minus minus 2 / 1) I

( Reversals ProvideReversals Evidence Degradation) of Single-Sided Lower ValueFewSingle-Sided Critical (Too The interarrival times are: 18, 2, 15, 6, 26, 113, 72, 35, 103, 20, and 101. The number of number The 101. and 20, 103, 35, 72, 113, 26, 6, 15, 2, 18, are: times interarrival The T  ). A point estimate of the MTBF). after estimatea of A of test point the 16 12  9 is the reliability improvement (Duane) slope and is estimated by is reliability is slope and estimated improvement (Duane) the z of this line measures the rate of reliability growth. Typical empirical values of of values empirical Typical growth. reliability of rate the measures line this of r critical failures. p is used for this example. During a calendar quarter an equipment system has 550 has system equipment an quarter calendar a During example. this for used is oe rm te ciia aus o h tnad nra itiuin (o 90% (for distribution normal standard the of values critical the from comes

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F B T M point estimate at 550 hours of 87.2. Note that a standard calculation standard a that Note 87.2. of hours 550 at estimate point  I (  I at the end of the atquarter. the end t 1 z given by Crow [6]. Crow developed confidence bounds for bounds confidence developed Crow [6]. Crow by given ). When the test ends at time time at ends test the When ). I

critical ( Page - T

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1.1 Single-Sided CriticalUpper Value Many (Too jn l jn Reversals ProvideReversals Evidence Improvement) of , this is significant at greater than the 95% the than greater at significant is this , T r )( hours with hours  43 37 31 r r 88 = 48 or less reversals signals a likely a signals reversals less or 48 = 88  1) / 2 is just the total possible number possible total the just is 2 / 1) T , the MTBF becomes a constant a becomes MTBF the , r failures is given is by: failures Document Number: 3846A Number: Document 46 39 33 z critical Doc. 3846A Doc. 3846A Date: 2011/08/29Date: = 2.33). The 2.33). = 1.1 50 43 36 DRAFT . (A2-3) (A2-2)   SEMI lie t k / k  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 6. 5. 4. 3. 2. 1. A2.3 or to appendices. references with SEMIE10sections data, appropriate reliability A2.2.10 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This R.J., Serfling,R.J., eds., pp.126-134 SIAM, 1974; Philadelphia, Systems,” Repairable Complex for Analysis “Reliability L.H., Crow, 563-566 2,pages volume Monitoring,” Reliability to Approach Curve “Learning J.T., Duane, Test Against “Nonparametric Trend,” H.B., Mann, Measure New of M.G., “A RankCorrelation,” Kendall, 1995 Trindade, D.C. and P.A. Tobias, Feingold, H. and H. Ascher, References iue A- umrzs te rcmedd poeue t olw we nlzn qimn system equipment analyzing when follow to procedure recommended the summarizes A2-2 Figure

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= MTBF (MTBF MFD) / = + ReliabilityRenewal Cycle ” Reliability RenewalReliability Cycle UP ‘ up Figure R1-1 Figure ’ segment of cycle) / (average time for whole cycle) time /whole segment offor cycle) (average Page 48 Failure DOWN jn l jn p and MFD “ Equipment Renewed Document Number: 3846A Number: Document p . ” (R1-2) Doc. 3846A Doc. 3846A Date: 2011/08/29Date: (R1-1) DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and not only the expected value of this distribution. of the Itthe expectedthis issolitary only parameter value not of distribution. also R1.2.1 R1.2 be may value MTBFof this E10, SEMI in (implicitly) assumed reciprocalThe time. productive from failures cumulative the divided by time productive cumulative the as estimated is distribution exponential the Because above. defined R1.1.5 scheduled the and time‘up’‘down’ entirely from is excluded neither consideration. is nor state.downtime under Nonscheduled covered issues maintenance general other and PM excludes specifically segment ‘down’ the Also, equipment. that of envelope’ the ‘pushing are engineers equipment when different be to failures of likelihood the expecting implicitly time, engineering from failures and time engineering excludes specifically segment ‘up’ the MTBF For state. productive the only to related time requalification subsequent and time, repair time, failure the is MTBF With week. per days R1.1.4 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This R1.2.4.1 estimated. be may scenarios specific for risk of measures distribution, that of parameter accurate the is MTBF the that and failures R1.2.4 says its a property that or not system’s function is age wear. resistancefailure of Qualitatively, the memoryless to time previous R1.2.3.1 thatthe exponential to property distribution. exclusive the is memoryless R1.2.3 R1.2.2 Exponential Distribution and Exponentialand Distribution MTBF To the extent that the analysts believe the exponential distribution to be representative of times between times of representative be to distribution exponential the believe analysts the that extent the To time additional an ‘up’ remain will system a that probability The longer a remainThe afor period than that will probability system ‘up’ is MTBF failures. between time the of distribution exponential an assumes implicitly E10 SEMI in MTBF MTBF metric the of meaning The 7 by hours 24 represent not need process renewal particular a of segments ‘down’ and ‘up’ of collection The p In this case, the distribution of the additional time time additional the of distribution the case, this In For example, if MTBF probability1000 hoursFor example, survival = for (200%MTBF) 500hours, if of 13.5%. the of is expresses how often similar equipmentsystems expressessimilar a productive howresultin often failofstrictly time. should as usage 1.1 t . This defies the expectation that an equipment system is more likely to fail the longer it has been up. been has it longer the fail to likely more is system equipment an that expectation the defies This . below shows the probability of survival time as a percentage of the MTBF. survival a timeof below percentage shows of the as probability PDF f( PDF p , the ‘up’ segment of the renewal cycle is productive time only and the ‘down’ segment ‘down’ the and only time productive is cycle renewal the of segment ‘up’ the , Pr(X> Pr(X> CDF f( CDF x , MTBF)(1 MTBF) / = t + StDev(f( Pr(X > t)Pr(X = exp(- > s x | X> t) |X> t) , MTBF)1–exp(- = E(f( p , then, is literally the productive time of the average renewal cycle as cycle renewal average the of time productive the literally is then, , x , MTBF)) =, MTBF)) MTBF x = Pr(X> = = exp(-( Pr(X> = =, MTBF)) MTBF = exp(-= exp(-( = Page s t t s t t / MTBF) / / MTBF) / + + + + ) x s s exp(- s 49 s ) / exp(- / ) MTBF) ) / >) Pr(X x - is the same as for a new unit and is independent of the of independent is and unit new a for as same the is / MTBF), MTBF), / t ) / ) MTBF) x

/ MTBF), / t jn l jn ) ) x s >= 0 >= , having already been ‘up’ ‘up’ been already having , t x t / MTBF) / is given is by: >= 0 >= Document Number: 3846A Number: Document

(R1-11) (R1-10) Doc. 3846A Doc. 3846A Date: 2011/08/29Date: t (R1-12) (R1-8) , demonstrates , (R1-5) (R1-4) (R1-3)

DRAFT (R1- (R1- (R1-6)  SEMI 9 7 p ) ) ,  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone: 408.943.6900 Fax:408.943.6900 Phone: 408.943.7943 CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and individual data records provide a pathway to understanding and eliminating those failures. pathwayand provide eliminating understanding dataa to records individual failures, of impact the measure to metrics supporting to addition in So failures. with data system nonequipment even R1.3.5 equipmentsystem a part andmore possibly of together significant issue.clustered R1.3.4 for testing as types. failure between dependence such analyses, for failures filter to used be may attributes The downtime. cumulative and count specific both and deviation, standard as R1.3.3 such calculated, be may parameters statistical given data. tofailure treatment be can censored appropriate other though, points, data R1.3.2 following: including withcycle’sfailure, cycle statistics the attributesregarding and the renewal reliability R1.3.1 R1.3 Table R1.1 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This copyrights, their ofown the risk responsibility. ofsuch areentirely infringement rights and or rights patent such any of determination that advised expressly are Guideline Safety or Standard this of Users Guideline. Safety patent or Standard this any in mentioned of items any with validity connection in the asserted copyrights or respecting rights position no takes SEMI Guideline, Safety or Standard this of publication By change to subject are Guideline Safety and Standards notice.without herein. mentioned equipment The or application. materials any literature,particular relevant respecting other any and sheets, data for product labels, product herein instructions, manufacturer’s to forth refer to set cautioned Guidelines Safety are Users user. the and of responsibility the solely is Guideline Safety or Standard Standards the of suitability the of determination the of suitability the to NOTICE:     Survival Time (% of (% MTBF) Probability Additional non-SEMI E10 classifications (e.g., failing equipment subsystem or failure mode and product or product and mode failure or of familyatprocess time failure) subsystem equipment failing (e.g., classifications E10 non-SEMI Additional nonequipment-related time, nonsupplier delay, time,maintenancedelay) and supplier maintenance repair repair equipment-related (e.g., failure the within statistics E10 SEMI Cumulative failure nonrepair or event, repair nonequipment-related event, repair equipment-related event: downtime E10 SEMI of type The endand start time, duration The AnalyzingFailureTimes and Duration BetweenDistributions Failures for Nonexponential Having the individual failure start and end times allows the correlation of other equipment system data and data system equipment other of correlation the allows times end and start failure individual the Having are failures if see graphically to analysis an allows failures of list time-ordered individual the just Having by analyses Pareto for data of separation the allows attributes E10 non-SEMI and E10 SEMI the Having individual With durations. failure individual the of mean the as calculated be can MFD list, a such Given each for records data individual maintain to be would practice’ ‘best a analyses, useful of number a For Semiconductor Equipment and Materials International (SEMI) makes no warranties or representations as representations or warranties no makes (SEMI) International Materials and Equipment Semiconductor Exponential Distribution Probability of Survival TimeasaPercentageofMTBFExponential DistributionProbability ofSurvival 77.9% 25% 50% 60.7% 47.2% 75% 36.8% 100% Page 50 22.3% 150% jn l jn 13.5% 200% 5.0% 300% Document Number: 3846A Number: Document 1.8% 400% Doc. 3846A Doc. 3846A Date: 2011/08/29Date: 0.7% 500% DRAFT  SEMI  LETTER BALLOT