Background Statement for SEMI Draft Document 5829B

Background Statement for SEMI Draft Document 5829B Line-item Revisions to SEMI E171-0515 Specification for Predictive Carrier Logistics (PCL)

Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.

Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background

All six line items of SEMI Doc. #5829A passed; however, following issues are left to be amended.

 It is found that the old mnemonics which should be replaced to new ones through the line item ballots SEMI Doc. #5735/#5829/#5829A are still left nonreplaced in some figures in SEMI Doc. #5829A and need to be replaced.  For better understandability, it is better to include CLJ attributes ‘URPState’ and ‘LSPState’ in Figure A1-3, Figure A1-6, and Figure A1-9 in Appendix 1 as needed.

1 Review Information Task Force Review Committee Review Group: Japan GEM300 TF Japan TC Chapter of Information & Control Global Technical Committee Date: TBD Tuesday, March 8, 2016 Time & Time Zone: TBD 1:30 p.m.- 5:00 p.m. [JST] Location: SEMI Japan, Ichigaya office SEMI Japan, Ichigaya office City, State/Country: Tokyo, Japan Tokyo, Japan Leader(s): Yoshihisa Takasaki (SCREEN Takayuki Nishimura (SCREEN Semiconductor Solution) Semiconductor Solutions Co., Ltd) Yuko Toyoshima (Hitachi High- Mitsuhiro Matsuda (Hitachi Kokusai Technologies) Electric Inc.) Standards Staff: Chie Yanagisawa (SEMI Japan) Chie Yanagisawa (SEMI Japan) 81.3.3222.5863 / cyanagisawa @semi.org 81.3.3222.5863 / cyanagisawa @semi.org

Task Force Review meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation.

This line-item ballot includes the purpose, scope, limitations and terminology sections per SEMI Standards Procedure Guide.

If you need a copy of the documents in order to cast a vote, please contact the following person within SEMI. Chie Yanagisawa SEMI Standards, SEMI Japan Tel: 81.3.3222.5863 Email: [email protected]

Please be advised that voter requests for access to the full Standard must be made at least three business days before the voting deadline. Late requests may not be honored, and if the Standard is not available for this reason, the voter may not use this as justification for rejecting the ballot.

2 SEMI Draft Document 5829B Line-item Revision to SEMI E171-0515: SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL)

Make following line item revisions to the specified part of SEMI E171-0515. Note that the related mnemonic changes specified in SEMI Doc. 5735 are as below. Rename following mnemonics as shown below, as editorial changes. From To Note (Not used for revision)

SoLR Prediction  LR Prediction Load Request Prediction EoLR Prediction  LS Prediction Load Stagnation Prediction SoUR Prediction  UR Prediction Unload Request Prediction EoUR Prediction  US Prediction Unload Stagnation Prediction

SoLRPTime  LRPTime Load Request Predicted Time EoLRPTime  LSPTime Load Stagnation Predicted Time SoURPTime  URPTime Unload Request Predicted Time EoURPTime  USPTime Unload Stagnation Predicted Time

Line Item #1: Rename old mnemonics left nonreplaced in Figure 9, Figure 10, Figure A1-1, Figure A1-4, Figure A1-7, Figure A2-3, and Figure A2-4 to new ones Motivation  The old mnemonics which should be replaced to new ones through the line item ballots SEMI Doc. #5735/#5829/#5829A are still left nonreplaced in the specified figures in SEMI Doc. #5829A and need to be replaced. Action  Rename old mnemonics left nonreplaced to new ones as shown in the new figures Impact  No technical change.

Line Item #2: Rename old mnemonics left nonreplaced in Figure A1-3, Figure A1-6, and Figure A1-9 to new ones, and add columns for CLJ attributes ‘URPState’ and/or ‘LSPState’ as needed to make the table more understandable Motivation  The old mnemonics which should be replaced to new ones through the line item ballots SEMI Doc. #5735/#5829/#5829A are still left nonreplaced in the specified figures in SEMI Doc. #5829A and need to be replaced.  For better understandability, these CFJ Figures are better to include columns for CLJ attributes ‘URPState’ and ‘LSPState’. Action  Rename old mnemonics left nonreplaced to new ones as shown in the new figures  Add columns for CLJ attributes ‘URPState’ and/or ‘LSPState’ as needed (as shown in the new figures) Impact  No technical change.

3 Note: Publication of SEMI E171-1215, reflection of the result of SEMI Doc. 5829, is announced on Dec. 19, 2015 after the Japan I&C Committee meeting held on Dec. 18, 2015 where the committee approved this ballot action. SEMI E171-1215 has no change from SEMI E171-0515 regarding the portions this ballot addresses.

Note: In this document, line items are distinguished by colors. The start point of a line item is marked with the line item number as <#n>, and the end point of a line item is marked with the line item number as . The added text is typically highlighted with underline. Removed text is typically denoted with double strikeout marks. Deleted figure is denoted with <#n>Delete in addition to the double strikeout marks on the bottom of the figure, added figure is denoted with <#n>Add in addition to the underline on the bottom of the figure (may be nested in the tags with the same number). These markings are for highlight in the ballot only. They are not proposed to be included in the updated standard.

Note: For reference purpose, the line items already passed in previous revisions of this line item ballot are left as it was balloted, but are distinguished in Green without line item number tags.

Note: Section numbers may change per the results of various line items which may add or remove sections, and may need to be renumbered appropriately per the result of line items.

Note: For simplicity, the numbers of section, table, and figure in the quotation which may be affected by the deletion and addition by the line items are used for explanations unless otherwise noted.

Note: Where the proposals show text extracted from the existing standard, any references in the text are aligned with current section numbering. However, recognize that various proposals may add or remove sections, requiring adjustment of references. This ballot assumes that SEMI will adjust these references prior to publication.

4 Quotation from: SEMI E171-0515 SPECIFICATION FOR PREDICTIVE CARRIER LOGISTICS (PCL)

This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 10, 2015. Available at www.semiviews.org and www.semi.org in May 2015.

Purpose The purpose of this Standard is to provide a communication scheme for exchanges of carrier logistics related information, especially predictive information, between equipment and the factory system in order to support seamless cascading of carriers for continuous processing of equipment in semiconductor fabrication systems or similar ones. The purpose of this Standard is to provide models which represent carrier logistics management status in equipment to exchange predictive carrier logistics information in order to facilitate better synchronization with the factory system.

Scope This Standard defines a model which represents logistics management of a carrier in equipment as Carrier Logistics Job (CLJ). CLJ includes the following functionalities. State management of logistics management of a carrier Prediction management including submission, resubmission and withdrawal upon a change of predicted information such as time or load port assignment Carrier ID assignment Load port assignment This Standard defines a model which represents management of multiple CLJs in equipment as Carrier Flow Job (CFJ). CFJ includes the following functionalities. Order management of CLJs per process order Prediction management of CLJs per carrier logistics order Carrier scheduling Load port scheduling including a queuing of multiple CLJs on one load port Load port arbitration to CLJs for Internal Buffer Equipment This Standard covers specifications for services to and events from CLJ and CFJ models. This Standard covers PCL specifications for both Fixed Buffer Equipment and Internal Buffer Equipment. This Standard covers compatibility with non-slot-integrity operation. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

Limitations On the Fly Control Purpose — This Standard is not for metrics (especially not for postmortem analysis) of waste times that may be contained in several time slots defined in this Standard due to the design of equipment and/or fab system. It only cares about synchronization between equipment and fab system. Those metrics should be standardized separately if needed.

5 Best Effort Basis — The requirements regarding prediction are on a best effort basis, as a prediction has limited accuracy in nature; moreover, in some cases prediction itself might not be provided. No Prediction Algorithm Covered — This Standard does not cover calculation algorithms for predictions. Only for Critical Equipment — This Standard is intended to be used for equipment for which carrier logistics are critical, and, application of this Standard especially prediction portions may not be needed for equipment to which carrier logistics are not critical. Not for Physical Synchronization of Load Port — This Standard is not intended to provide physical status of load ports.

Referenced Standards and Documents SEMI Standards and Safety Guidelines SEMI E15 — Specification for Tool Load Port SEMI E15.1 — Specification for 300 mm Tool Load Port SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM) SEMI E39 — Object Services Standard: Concepts, Behavior, and Services (OSS) SEMI E40 — Standard for Processing Management (PM) SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface SEMI E87 — Specification for Carrier Management (CMS) SEMI E94 — Specification for Control Job Management (CJM) ISO Standard1 ISO 8601:2004 — Internet Standard for Date/Time Format NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

Terminology Abbreviations and Acronyms AMHS — automated material handling system CEW — Carrier Exchange Window CFJ — Carrier Flow Job CLJ — Carrier Logistics Job FIMS — front-opening interface mechanical standard FOUP — front opening unified pod GEM — generic equipment model PCL — Predictive Carrier Logistics 1. LR — Load Request 2. LS — Load Stagnation 3. UR — Unload Request 4. US — Unload Stagnation Definitions

1 International Organization for Standardization, ISO Central Secretariat, 1, ch. de la Voie-Creuse, CP 56, CH-1211 Geneva 20, Switzerland; Telephone: 41.22.749.01.11, Fax: 41.22.733.34.30, http://www.iso.org 6 automated material handling system (AMHS) — an automated system to store and transport materials within the factory. buffer — a set of one or more locations for holding carriers at or inside the production equipment. carrier — a container, such as a FOUP or open cassette, with one or more positions for holding substrates. Carrier Exchange Window (CEW) — a time slot which is allowed for a load port to unload a used carrier and then load a new carrier between AMHS without disturbing the continuous wafer processing of the equipment. Internal Buffer Equipment may have a CEW with multiple load ports to unload multiple used carriers and load multiple new carriers. carrier flow — a stream of carriers which are loaded into the equipment, used by the equipment, and unloaded from the equipment. Carrier Flow Job (CFJ) — a control action to manage multiple CLJs, which constitute one or more carrier flows, so that the equipment can continue processing seamlessly. Equipment may have multiple Carrier Flow Jobs. Carrier Logistics Job (CLJ) — a control action which manages entire logistics operation of one carrier from Load Queued to Unload Request. CLJ requests loading of a carrier, holds the carrier for use, and requests unloading of the carrier. CarrierID — a readable and unique identifier for the carrier. collection event — an event (or grouping of related events) on the equipment that is considered to be significant to the host. docked position — the position where the carrier is ready for substrate extraction or insertion. End of Load Request (EoLR) — a timing when Load Request state ends. End of Unload Request (EoUR) — a timing when Unload Request state ends. factory system — the control system of factory which includes the host and AMHS. front-opening interface mechanical standard (FIMS) port — the substrate access port where the FOUP is opened and closed. Fixed Buffer Equipment — production equipment that has only fixed load ports and no internal buffer for carrier storage. Substrates are loaded and unloaded directly from the carrier at the load port for processing. host — the factory computer system or an intermediate system that represents the factory and the user to the equipment. internal buffer — a set of locations within the equipment to store carriers. These locations exclude load ports. Internal Buffer Equipment — equipment that uses an internal buffer. load — the operation of placing a carrier on a load port. load port — the interface location on the equipment where carriers are loaded and unloaded. Load Stagnation — a stagnation caused by nonreadiness of a carrier to be loaded to the equipment. nonproduction wafer (NPW) — a wafer which is used not for production but for tuning of equipment and its process performance. object instantiation — the act of storing of information related to a physical or logical entity so that it can be recalled on demand based on its public identifier. Predictive Carrier Logistics (PCL) — transportation control of carriers in a factory, which uses predictive information from composing elements to minimize delay due to the system inertia. process equipment — equipment used to produce product, such as semiconductor devices. This excludes metrology and material handling equipment. production equipment — equipment used to produce product, such as semiconductor devices, including substrate sorting, process, and metrology equipment and excluding material handling equipment.

7 properties — a set of name value pairs assigned to an object or used in a service message to include additional information about the object (e.g., carrier, port, etc.). reinitialization — a process where production equipment is either powered off then powered on or when some kind of hardware or software reset is initiated to cause the equipment to reset and possibly reload its software. On production equipment that contains some kind of mass storage device this can also be called a ‘reboot’. single communication connection — exactly one physical connection using exactly one logical session and a standard set of messages. slot map –– the information that relates which slots in a carrier hold substrates, both correctly and incorrectly. stagnation — a status of a carrier flow, which shows that the equipment is ready to perform a substrate process, but is forced to stop due to nonreadiness of a carrier which loads or unloads substrates. standard message set — messages conforming to standard message specifications. Start of Load Request (SoLR) — a timing when Load Request state starts. Start of Unload Request (SoUR) — a timing when Unload Request state starts. substrate — material held within a carrier. This can be product, or durables such as reticles. undocked — the status of a carrier on a load port or in an internal buffer that is not at the docked position. unload — the operation of removing a carrier from a load port. Unload Stagnation — a stagnation caused by nonreadiness of a carrier which should be unloaded from the equipment.

Conventions Objects Whenever the equipment is required to know about specific kinds of entities and required to manage information concerning these entities, it is useful to treat these entities as objects that comply with the basic requirements of SEMI E39 Object Services Standard (OSS). This is especially true whenever there are a large number of objects of a given type or when the entities are transient rather than permanent. In both cases, it is difficult to describe a general way for the host and equipment to specify which particular entity is referenced and to get information related only to a specific one out of many. By defining these entities as objects that comply with OSS, it is only necessary for the host to specify the type of object and its specific identifier in order to inquire about one or more properties of the specific entity of interest. Object Properties A property (attribute) is information about an individual object that is presented as a name and value pair. The name is a formally reserved text string that represents the property, and the value is the current setting for that property. Properties shall be accessible to the host via the service GetAttr. Using SEMI E39 Object Services Standard, for example, it is possible to: get the list of IDs for the current objects at the equipment, and get the specified properties for one or more individual objects. Rules for Object Properties Attributes with RO (Read Only) access cannot be changed using SetAttr service as defined in OSS. Attributes with RW (Read/Write) access can be changed using SetAttr service as defined in OSS. Additional attributes may be specified by the user or the equipment supplier by using an attribute name starting with ‘UD’ (User Defined). Care should be taken to ensure the name of the attribute is unique. Object Attribute Table The object attribute table is used to list all the attributes related to the defined object as shown below. The access is defined as Read Only (RO) or Read/Write (RW). The Reqd column is used to specify whether the attribute is

8 required (Y), conditional (C), or optional (O) for implementation. Finally, the Form column is used to specify the format of that particular attribute.

Table 1.1.1.1.1.1.1 Object Attribute Table

Attribute Name Definition Access Reqd Form

State Model Methodology A state model consists of four elements: a State Model Diagram, a State Model Definition Table, a State Definition, and a State Transition Table. State Model Diagram — The diagram of the state model uses the Harel State Chart notation. An overview of this notation is presented in an Appendix of SEMI E30. The definition of this notation is presented in Science of Computer Programming 8, “Statecharts: A Visual Formalism for Complex Systems,” by D. Harel, 1987.2 State Model Definition Table — The State Model Definition Table used in this Standard has the following format. This table defines states and possible transition(s) from each state side by side. Each state has one or more transitions. When the transition comes from outside this table, the state definition column associated with the transition may be blank (see #1). When the transition comes from unspecified multiple states with the same condition, the state definition column may say “#Any state,” and there may not be an explicit transition number. Definition of State — Columns under the State column define States with No. (Number), Name and Abstract of Definition. ‘No.’ corresponds to the state number in the associated state diagram. ‘Name’ defines a name of each state. ‘Abstract of Definition’ provides an abstract of the State Definition in the State Definition Table. Definition of Transition — Columns under the Transition column define Transitions with No. (Number), Abstract of Trigger, Abstract of Action, New State, and Comments. ‘No.’ corresponds to transition number in the associated state diagram. ‘Abstract of Trigger’ and ‘Abstract of Action’ provide abstracts of the Trigger and Action in the State Transition Table accordingly. ‘New State’ defines a state number to move to after the transition is completed by pointing to one of the states defined in the state definition in left side of the table. The Comment column may be used to put comments to each transition or their From state.

Table 1.1.1.1.1.1.2 State Model Definition Table

State Transition

No. Name Abstract of Definition No. Abstract of Trigger Abstract of Action New Comments State -#1 -#1 -#1 T00 S00 Snn#2 # Any state#2 -#2 - S03 S00 T01 S01 S04#3 T02 S00 S01 T03 S02 T04 S03 S02 T05#4 S00

S10#5 - - - - S11 T10 S12 S12 T11 S11 S03 T06 S00 #1 When the transition comes from outside of this table, the state definition column may be blank. #2 When the transition comes from unspecified multiple states with the same condition, the state definition column may say ‘#Any state’.

2 Elsevier Science, P. O. Box 945, New York, NY 10159-0945; http://www.journals.elsevier.com/science-of-computer-programming/ 9 #3 A state which has substates. #4 One transition path has multiple cases (trigger and action pairs). #5 A state separated by a dotted line is a parallel state of the state above.

State Definition Table — State definition tables are provided in conjunction with the state diagrams to explicitly describe the definition of each state. A state definition table contains columns for State Number, Mnemonic, State Definition, and Comments.

Table 1.1.1.1.1.1.3 State Definition Table

No. Mnemonic State Definition Comments

State Transition Table — State Transition Tables are provided in conjunction with the state diagrams to explicitly describe the nature of each state transition. A State Transition Table contains columns for Transition Number, Previous State, Trigger, New State, Actions, and Comments. The ‘trigger’ (column 3) for the transition occurs while in the Previous State. The ‘Actions’ (column 5) includes a combination of: Actions taken upon exit of the previous state, Actions taken upon entry of the new state, and Actions taken which are most closely associated with the transition.

Table 1.1.1.1.1.1.4 State Transition Table

No. Previous State Trigger New State Actions Comments

State Model Requirements Requirement — The state models included in this Standard are a requirement for compliance. Equipment shall maintain state models for each of the required state models as defined in this Standard. Equipment shall maintain individual and unique state models for each logical entity instantiated or each physical entity in the equipment that has associated state models. Representation as the Host View — A state model represents the host’s view of the equipment, and does not necessarily describe the internal equipment operation. All state model transitions shall be mapped sequentially into the appropriate internal equipment collection events that satisfy the requirements of those transitions. In certain implementations, the equipment may enter a state and have already satisfied all of the conditions required by the state models in this Standard for transition to another state. In this case, the equipment makes the required transition without any additional actions. Additional Substates — Some equipment may need to include additional substates other than those in this Standard. Additional substates may be added, but shall not change the defined state transitions in this Standard. All expected transitions between states in this Standard shall occur. Uniqueness of Event Identifier — The event identifier reported during a particular state transition change for each of these state models shall be shared for all associated state models but unique for each transition. For example, if the equipment has two load ports and the load port state model defines ten transitions, there must be exactly ten event identifiers for each load port transfer state model but not ten for each physical load port. The information identifying the physical entity or logical entity undergoing the transition will be contained within the associated event report. Events — All state transitions in this Standard, unless otherwise specified, shall correspond to collection events. More explicitly, there must be a unique collection event for each state transition. Events for Multiple AND Substates — When a state model is defined with multiple AND substates, the equipment may report all state entry events with only one collection event.

10 Events for Conditional Path — When conditional paths are defined in the state model, it is not necessary to report any state transition(s) until a terminal state is reached at which time each transition used to reach that state is reported. Object Recognition of Object — From the host point of view, an object is instantiated if the host is able to query the equipment about that object, its current state, and other attributes. Once instantiated, the object is considered destroyed (no longer instantiated) if the response to such queries is ‘unknown object’. Object Identifier (ObjID) — The purpose of an Object Identifier is to allow references to an object within the system. The Object Identifier is assigned when an object is instantiated and should be unchanged or persistent until the end of the object lifecycle. The Object Identifier shall be unique at the equipment during lifecycle of the object. Services Definition of Service — Services are functions or methods that may be provided by either the equipment or the host. A service message may be either a request message, which always requires a response, or a notification message that does not require a response. Notification Message Service — Notification type messages are initiated by the service provider (e.g., the equipment) and the provider does not expect to get a response from the service user. Request Message Service — Request messages are initiated by a service user (e.g., the host). Request messages ask for data or an activity from the provider. Request messages expect a specific response message (no presumption on the message content). Service Message Description — A service message description table defines the parameters used in a service, as shown in the following table:

Service Message Description Table

Service Name Type#1 Description

#1 Type can be either ‘N’ = Notification or ‘R’ = Request & Response.

Service Message Parameter Definition — A service parameter dictionary table defines the description, range, and type for parameters used by services, as shown in the following table:

Table 1.1.1.1.1.1.5 Service Message Parameter Definition Table

Parameter Name Form Description

#1 A row is provided in the table for each parameter used on a service.

Service Message Definition — A service message description table defines the parameters used in a service message, and describes each message and its cause/effect to the equipment, as shown in the following table:

Table 1.1.1.1.1.1.6 Service Message Definition Table

Service Parameter Req/Ind Rsp/Conf Description

Definition of Req/Ind and Rsp/Conf Columns — The columns labeled Req/Ind and Rsp/Conf link the parameters to the direction of the message. The message sent by the initiator is called the ‘Request’. The receiver terms this message the ‘Indication’. The receiver may then send a ‘Response’, which the original sender terms the ‘Confirmation’. 11 Definition of Codes for Req/Ind and Rsp/Conf Columns — The following codes appear in the Req/Ind and Rsp/Conf columns and are used in the definition of the parameters (i.e., how each parameter is used in each direction):

Table 1.1.1.1.1.1.7 Codes For Req/Ind and Rsp/Conf Columns M Mandatory Parameter – must be given a valid value C Conditional Parameter – may be defined in some circumstances and undefined in others. Whether a value is given may be completely optional or may depend on the values of other parameters. U User-Defined Parameter - The parameter is not used = (for response only) Indicates that the value of this parameter in the response must match that in the primary (if defined)

Variable Data Definitions Variable data definitions define variable data requirements. Values of these variables are available to the host via collection event reports and host status queries. Event Report Requirement — The identifier of an object and all of the attributes of that object shall be available for inclusion in event reports associated with that object. Object Attribute Variable in Non-Extinction Event — The object attribute variables in event reports linked to non- extinction event(s) shall contain the values of the attributes after the transition. This requirement allows the receiver of the report to know the current condition of the object. Object Attribute Variable in Extinction Event — The object attribute variables in event reports linked to extinction event(s) shall contain the values of the attributes before the transition unless it is specifically stated that the destruction transition modifies the attribute value. This requirement allows the receiver of the report to know the final condition of the object at the time it was deleted. Subscripted variables are used either as items within a list or to differentiate data representing different entities. Subscripted variables are always valid. Table Format — The following table defines variable data that shall be provided by the production equipment.

Table 1.1.1.1.1.1.8 Variable Data Definitions

Variable Name Description Type Access Comment

PCL Conceptual Descriptions Conceptual Descriptions — This chapter defines and describes a concept of PCL. This chapter does not contain any requirements. Load/Unload Readiness on Load Port and Relationship with SEMI E87 — In order to avoid conflicts and to be coexistent with SEMI E87 CMS, this Standard only provides a scheduling information of carrier logistics, and does not represent physical readiness for Load/Unload which is covered by SEMI E87. Key Timings for Carrier Logistics — There are four key timings for carrier logistics between equipment and the factory system. PCL focuses on providing these timings and their predictions as shown below. (See definition of PCL for state names.) Basic Timings — There are two key timings and their predictions for carrier logistics between equipment and the factory system. SoUR (Start of Unload Request): Timing when a carrier completes and its unload is requested EoLR (End of Load Request): Timing when a carrier is loaded UR (Unload Request) Prediction: Predicted timing when a carrier completes and its unload is requested

12 LS (Load Stagnation) Prediction: Predicted timing by which a carrier has to be loaded to avoid stagnation

Figure 1 Key Timings for PCL

Additional Timings — There are two additional key timings and their predictions, mainly for Internal Buffer Equipment. SoLR (Start of Load Request): Timing when a carrier load is requested EoUR (End of Unload Request): Timing when a carrier is unloaded LR (Load Request) Prediction: Predicted timing at which Load Request state starts. This prediction is introduced to indicate the predicted timing at which the equipment requests loading of a carrier for the CLJ. Note that the physical readiness of load port to load the carrier should be confirmed via SEMI E87. US (Unload Stagnation) Prediction: Predicted timing by which the carrier has to be unloaded to avoid stagnation. US Prediction is used when there is no subsequent Load Request or Unload Request which implies Unload Stagnation Prediction timing to the host (or AMHS). For example, Load Stagnation Prediction of subsequent Load Request on the same load port implies that the Unload Request and the subsequent Load Request should be completed by the predicted time given by the Load Stagnation Prediction, so, US Prediction is not required.

Figure 2 Additional Key Timings for PCL

Introduction of Carrier Logistics Job (CLJ) — In order to model the logistics control of a carrier, including the key timings and their predictions, this Standard introduces CLJ, which represents each carrier’s logistics control. CLJ models the management process of a carrier from the request for a new carrier to sending the carrier as shown below. Load Queued: This state is introduced mainly for Internal Buffer Equipment to represent the situation in which Load Request Prediction or Load Stagnation Prediction is done, however the equipment is not capable to accept a carrier for the prediction yet (typically because no space is available in Internal Buffer yet). In case CLJs are assigned to 13 load ports in order by their predicted times and there is no possibility of dead lock, Load Request state may be used instead of Load Queued state for simplicity. See Application note for Internal Buffer Equipment in Appendix for an example. Load Request: This state is introduced to represent the situation in which the equipment is requesting load of a carrier. Load Stagnation Prediction, Unload Request Prediction, or Unload Stagnation Prediction may also be done. This state does not always mean physically ready to load. Carrier Valid: A carrier is loaded and not completed yet by the equipment. Unload Request Prediction or Unload Stagnation Prediction may also be done. Unload Request: The equipment is requesting unload of the carrier. Unload Stagnation Prediction may also be done. This state does not always mean physically ready to unload. In Internal Buffer Equipment, the carrier may still be in Internal Buffer.

Figure 3 States and Predictions of CLJ Object

Introduction of Carrier Exchange Window (CEW) — Because the resources of equipment are limited, the number of carriers which can reside in the equipment is also limited. So, in normal cases, loading of new carriers follows after unloading of used carriers. These timings form a window in which AMHS should exchange those carriers. Definition of CEW — See Terminology section. CEW for Fixed Buffer Equipment — In Fixed Buffer Equipment, loading of a new carrier follows after unloading of a used carrier on each load port. Normally, during CEW, other load ports hold required carriers for cascading of wafers. A carrier has overhead times such as confirmation of carrier ID, opening of the door, confirmation of wafer existence on slots, and creation of process job before the wafers become ready for process, overhead times such as closing of the door, purging with inert gas, and undock after the process completion, and equipment has a wafer queue. Due to those overhead times, Carrier Valid requires Handover Periods. The Handover Period is determined by equipment according to its configuration and operation.

Figure 4 Definition of CEW in Two Load Port Fixed Buffer Equipment

14 Figure 5 Definition of CEW in Three Load Port Fixed Buffer Equipment

CEW for Internal Buffer Equipment — In Internal Buffer Equipment, loading of new carriers may follow after unloading of used carriers on multiple load ports. Normally, during CEW, internal buffers hold required carriers for cascading of wafers. CLJs and CEW — CLJs which form a batch may typically be dealt as a group. Predictions may be done at the same time; however the predicted times for those CLJs may be different according to the structure of the equipment. In the example shown in the following figure, currently, Unload Request Predictions of CLJs which form Batch 0 (CLJ 0 through CLJ 3) are already done. At the timing of Batch 1 formation, Unload Request Predictions of CLJ 4 through CLJ 7 are done, and just after them, to make Batch 2 formed by then, Load Stagnation Predictions of CLJs for Batch 2 (CLJ 8 through CLJ 11) may be calculated. Thus, the Unload Request Predictions for Batch 0 and Load Stagnation Predictions for Batch 2 form CEW. The timing, when Unload Request state ends and Load Queued state changes to Load Request state, depends on the timing when AMHS completes the unload.

Figure 6 CLJs and CEW in Typical Internal Buffer Equipment

Load Port View of CLJs and CEW — CLJs may be assigned to load ports as shown in the following figures. In the case of Bi-Direction, two load ports are used to unload four carriers, then, to load four carriers. In the case of Uni- 15 Direction, one load port is used to unload four carriers, and another load port is used to load four carriers. This Standard supports scheduling aspect and actual (physical) readiness of carrier load/unload on load port should be controlled by using SEMI E87 and SEMI E84.

Figure 7 Load Port View of CLJs and CEW in Internal Buffer Equipment (Bi-Direction)

Figure 8 Load Port View of CLJs and CEW in Internal Buffer Equipment (Uni-Direction)

Introduction of Carrier Flow Job (CFJ) — In order to define the relationship between CLJs, this Standard introduces CFJ, which manages a carrier flow. CFJ manages the order of CLJs and predicted timings, etc.

<#1>Delete

16 <#1>Add Figure 9 Image of Data Provided by CFJ

Scalable Specifications — In order to enable gradual application to the existing designs, this Standard provides building blocked scalable specifications. Examples are shown in the following table. See Appendices for explanations.

Table 1.1.1.1.1.1.9 Scalability

Name Type#1 Main States#2 Predictions Assignment#3 Notes

FB IB LQ LR CV UR LR LS UR US LP CID Interim A - - - R R - - R - - - UR Prediction only LP-Based A - - R R - - R R - - - Load port by load port Basic A - - R R - - R R - R O Basic for Fixed Buffer Bi-Direction - A - R R R - R R - R R Bi-Direction Internal Buffer Uni-Direction - A R R R R R R R R R R Uni-Direction Internal Buffer #1 FB = Fixed Buffer Equipment, IB = Internal Buffer Equipment. #6 LQ = Load Queued, LR = Load Request, CV = Carrier Valid, UR = Unload Request. #7 LP = Load Port, CID = Carrier ID. #8 A = Applicable, R = Required, O = Optional, - = Not required.

Relationship of the Entities in PCL — The CLJ and CFJ objects have relationships shown in the following figure.

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17 <#1>Add Figure 10 Relationship Model of CFJ and CLJ Objects

PCL Requirements PCL Requirements — The PCL Standard defines the behavior, data, and services required for the following objects of equipment. This Standard provides a standard interface for host/equipment communications regarding the following information. Carrier Flow Job (CFJ) Object — CFJ is defined in the section ‘Carrier Flow Job (CFJ) Object Requirements.’ Carrier Logistics Job (CLJ) Object — CLJ is defined in the section ‘Carrier Logistics Job (CLJ) Object Requirements.’ Reporting Scheme of Time for PCL — Every PCL event or service reports the timing as a combination of current time of the equipment clock and predicted time per the equipment clock in order to be free from a time difference problem between the host and equipment. The host is strongly recommended to compare the host clock and equipment clock, and to understand the reported time per equipment clock in host time per host clock. Prediction Resubmission Threshold for PCL — PCL allows resubmission of predictions to report updated value. However, in order to avoid too many resubmissions, resubmission can only be made when the new value satisfies PTimeSensitivity and PTimeSenseDB definitions. PCL Variable Data Definitions — This section defines variable data requirements for PCL. Values of these variables are available to the host via collection event reports and host status queries.

Table 1.1.1.1.1.1.10 PCL Variable Data Definitions

Variable Name Description Type Access Comment PCLActive Activate PCL functionality. Enumerated: RW This determines whether CFJ PCLActive = PCL functionality is PCLActive, PCLInactive and CLJ are active or inactive. Active PCLInactive = PCL functionality is Inactive Default is PCLInactive. PTimeSensitivity Sensitivity to decide resending of Positive integer [%] RW While the duration from current predicted times defined in this time to the predicted time is Standard. The purpose of this long, small changes are not variable is to prevent too frequent important. resends. Predicted times shall not be The predicted time is expected resent if the change of remaining to become precise when the time is smaller than this percentage. duration becomes shorter.

18 Variable Name Description Type Access Comment PTimeSenseDB Dead-band of sensitivity to resend Positive integer [sec] RW It is meaningless to resend small predicted time. The purpose of this changes to which the factory variable is to prevent too frequent system, including the host and resends. Predicted times shall not be AMHS, cannot respond. resent if the change of remaining time is smaller than this value.

TimeReport — This section defines the format, which is used to report a time in this Standard, by using ISO 8601:2004. TimeReport information shall be reported as specified in this section. YYYY-MM-DDThh:mm:ss.sTZD (e.g., 2014-04-11T15:30:20.34+08:00)

Table 1.1.1.1.1.1.11 Definition of TimeReport

Identifier Description YYYY Four-digit year MM Two-digit month (01 = January through 12 = December) DD Two-digit day of month (01 through 31) T Special separator character (‘T’) used between date and time hh Two digits of hour (00 through 23) (am/pm NOT allowed) mm Two digits of minute (00 through 59) ss Two digits of second (00 through 59) s One or more digits representing a fraction of a second TZD time zone designator (Z, +hh:mm, or –hh:mm)

Carrier Flow Job (CFJ) Object Requirements CFJ Object Definition Definition of CFJ Object — The CFJ object is a software representation of the carrier flow management in the equipment. CFJ manages multiple CLJs which constitute one or more carrier flows. Information about CFJ is encapsulated as an object. This allows the host to exchange information with the equipment about one or more specific CFJs by using services defined in SEMI E39 Object Services Standard. Number of CFJs — Equipment may create multiple CFJs when the equipment manages multiple carrier flows separately per load port. CFJ can be assigned to each load port, to a group of load ports, or to whole equipment depending on the operation of the equipment. (See Appendices for examples.) CFJ Object Descriptions CFJ Object Instantiation — Under normal circumstances, CFJ object is instantiated by the equipment when the equipment is started up. CFJ Object Identifier (ObjID) — The CFJID is the CFJ Object Identifier. The equipment is responsible for ensuring uniqueness of the CFJID prior to instantiation. CFJ Object Destruction — A CFJ Object reaches the end of its lifecycle when the equipment is shut off. CFJ Object Persistence — A CFJ Object may persist over equipment shut down to restart if the carriers still stay in the equipment. Capability to perform this persistence automatically is dependent on equipment design. In any case, when equipment moves into host control with carriers on it, CFJs which represent the carriers shall be created. CFJ Object Functional Requirements Order Management of CLJs — CFJ maintains an ordered list of CLJs. CLJs shall be listed in order of associated wafer access—the CLJs in Unload Request state first, the CLJs in Carrier Valid state, the CLJs in Load Request state, and then the CLJs in Load Queued state. In the same state, CLJs with earlier wafer access shall be listed in 19 higher order. When the order of wafer access is changed, the order of the CLJs in the CFJ shall be aligned to the order. Load/Unload Timing Management of CLJs — CFJ maintains predicted timings of CLJs. CFJ reflects the calculation result of Predictions. This Standard does not define the prediction algorithm or calculation timing. Load Port Assignment to CLJs — CFJ performs load port scheduling and assigns load port to CLJs. Load Port Assignment for Fixed Buffer Equipment — Normally, the load ports used in Load Request and Unload Request states of one CLJ are the same one, and the carrier stays on the same load port all the time. In some cases, a load port may not be assigned at the timing of CLJ creation. Load Port Assignment for Internal Buffer Equipment — Normally, the load ports used in Load Request state and Unload Request state of one CLJ are independent, and the carrier stays on an internal buffer for most of the time. A load port may or may not be assigned at the beginning of Load Request state or Unload Request state. Speculative Assignment of Load Port and On-the-Fly Arbitration — Multiple CLJs may be assigned to the same load port, and final arbitration may be done by the arrival order information from AMHS. This Standard does not define the arbitration algorithm. CFJ Object Attribute Definitions — The following table defines the attributes of CFJ Object. Attributes Maintenance — All attributes in the following table are always maintained and updated by the equipment.

Table 1.1.1.1.1.1.12 CFJ Object Attribute Definition

Attribute Name Definition Access#1 Reqd Form ObjID CFJ object identifier RO Y Text CFJID. Numerical text expression of positive integer ObjID is equipment defined ObjType Object Type RO Y Text = ‘CarrierFlowJob’ MaxCarrierNumber Maximum number of carriers the CFJ RO Y Positive integer can handle Maximum number of CLJs with a carrier which is physically assigned (loaded) CFJData Ordered list of attributes of CLJs RO Y Ordered list of: CLJ attributes except ObjType : Defined in CLJ #1 Even though a value may be marked as RO (read only), the initial value for the attribute may be provided by the host.

CFJ State Model — The following diagrams and tables define the state model of CFJ object. Equipment shall maintain an appropriate number of CFJs. CFJ State Model Diagram

20 Figure 11 CFJ State Model Diagram

CFJ State Model Definition

Table 1.1.1.1.1.1.13 CFJ State Model Definition

State Transition

No. Name Abstract of No.#1 Abstract of Abstract of New Comments Definition Trigger Action#2 State - - (No state) Tf00 Equipment is started Create CFJ Sf01 Sf00 CFJ Created CFJ is created - - - - Sf01 CFJ Inactive CFJ is not active Tf01 Activation of CFJ function CFJ Event Sf02 is done Sf02 CFJ Active CFJ is active Tf02 CFJData change occurred CFJ Event Sc03 CFJData is valid Sf02 Tf03 Set CFJ to inactive CFJ Event Sc01 Sf01 #1 Numeric portion of the transition numbers in this column shall be used as event numbers. #9 Events in the Action column report following information. CFJ Event reports CFJID and CFJData.

CFJ State Definition Table

No. Mnemonic State Definition Comments Sf00 CFJ Created A state in which a CFJ is created and in operation. Sf01 CFJ Inactive CFJ is inactive. CLJ is also inactive. PCL functionalities are not used. Sf02 CFJ Active CFJ is active. CLJ is also active. PCL functionalities are used.

CFJ State Transition Table

Table 1.1.1.1.1.1.15 CFJ State Transition Table

No.#1 Previous State Trigger New State Actions#2 Comments Tf00 (No state) Equipment started CFJ Inactive Create CFLJ Tf01 CFJ Inactive Activate CFJ and CLJ to start use of PCL CFJ Active CFLJ Event functionalities Tf02 CFJ Active Any change in CFJData CFJ Active CFJ Event Tcf3 CFJ Active Inactivate CFJ and CLJ to stop use of PCL CFJ Inactive CFJ Event Tf03 functionalities #1 Numeric portion of the transition numbers in this column shall be used as event numbers. #10 Events in the Action column report following information. CFJ Event reports CFJID and CFJData.

21 CFJ Services — This section defines the message services required to support CFJ functionalities. CFJ Service Message Description — The following table is a list of CFJ services.

Table 1.1.1.1.1.1.16 CFJ Service Message Description

Service Name Type#1 Description GetCFJList R This service gets a list of the CFJ object from the equipment. Use SEMI E39 OSS to get ObjIDList by specifying ObjType and ObjID for ATTRID. GetCFJData R This service gets CFJData attribute of CFJ from the equipment. Use GetAttr service of SEMI E39 OSS for this purpose. PutAMHSArrivalInfo R Optional mainly for Internal Buffer Equipment. This service puts AMHS service information to the equipment. CFJ Event N This equipment originated service reports any change of CFJData. Creation of a CLJ is reported by addition of the CLJ attributes to the CFJData. State change of a CLJ is reported by change of the CLJ attributes in the CFJData. Deletion of a CLJ is reported by deletion of the CLJ attributes from the CFJData. #1 The ‘Type’ column is used to indicate whether the service consists of a request/response message pair, ‘R’, or a single notification message, ‘N’.

CFJ Service Message Parameter Definition — The following is a list of required parameters used in conjunction with CFJ service messages.

Table 1.1.1.1.1.1.17 CFJ Service Message Parameter Definition

Parameter Name Form Description CFJList List of CFJID List of CFJID CFJID Text ID of CFJ CFJData Ordered list of: Variable Data of CFJ CLJ attributes except ObjType: Defined in CLJ AMHSArrivalInfo Ordered list of: Optional Arrival information of AMHS mainly for Structure: Internal Buffer Equipment. CLJID EstimatedArrivalTime AMHSArrivalInfoResp Enumerated: OK, NG Reply from equipment to AMHSArrivalInfo service

CFJ Service Message Definitions — The following tables specify the allowable/required parameters for each service. PutAMHSArrivalInfo — This service is used to inform the arrival order and estimated timings of AMHS vehicles assigned for the CLJs to CFJ.

Table 1.1.1.1.1.1.18 PutAMHSArrivalInfo Service Parameter Definitions

Parameter Name Req/Ind Rsp/Conf Description CFJID M - ID of CFJ AMHSArrivalInfo M - Arrival information of AMHS vehicles AMHSArrivalInfoResp - M Reply from Equipment EquipmentResponse

22 CFJ Event — This service is used to inform state changes of CFJ.

Table 1.1.1.1.1.1.19 CFJ Event Service Parameter Definitions

Parameter Name Req/Ind Rsp/Conf Description CFJID M - ID of CFJ CFJData M - Variable Data of CFJ

CFJ Variable Data Definitions — This section defines variable data requirements for CFJ. Values of these variables are available to the host via collection event reports and host status queries.

Table 1.1.1.1.1.1.20 CFJ Variable Data Definitions

Variable Name Description Type Access Comment CFJID ObjID of CFJ Numerical text expression of RO CFJID is equipment defined positive integer MaxCarrierNumber Maximum number of carriers Positive integer RO the CFJ can handle Maximum number of CLJs with a carrier physically assigned CFJData Ordered list of attributes of CLJs Ordered list of: RO Event is sent upon any CLJ attributes except ObjType : change Defined in CLJ

Carrier Logistics Job (CLJ) Object Requirements CLJ Object Definition Definition of CLJ Object — The CLJ object is a software representation of the carrier logistics control in the equipment. Information about CLJ is encapsulated as an object. This allows the host to exchange information with the equipment about one or more specific CLJs by using services defined in SEMI E39 Object Services Standard. Handoff Readiness on Load Port and CLJ — Load Request and Unload Request states, or Load Port Assignment parallel states only provide a schedule among multiple CLJs, and do not represent physical readiness for handoff. Load Port state of E87 shall be used to ensure physical readiness of the load port for handoff. Number of CLJ Objects — Equipment may create multiple CLJs in order to feed substrates continuously through its process modules. The number of CLJs depends on the structure of the equipment and the depth of predictions. 11.1: In principle, equipment normally has two CLJs per one carrier position where a carrier can nontemporarily reside in the equipment, one is the CLJ which currently occupies the carrier position, and the other is the CLJ which is queued to the carrier position. Generally, the carrier positions are load ports in Fixed Buffer Equipment, and internal buffers for Internal Buffer Equipment. Note that, in general, the load ports of Internal Buffer Equipment are not counted in carrier positions where a carrier can nontemporarily reside as they are in the critical path between AMHS and internal buffers and used as temporary positions to handoff carriers to and from AMHS. When equipment uses its load ports as nontemporary carrier positions, they are counted as carrier positions. In other words, normally, Fixed Buffer Equipment expects the same number of CLJs with the number of load ports as currently assigned jobs and another same number of CLJs as the next jobs Internal Buffer Equipment expects the same number of CLJs with the number of internal buffers (and internal FIMS ports) as currently assigned jobs and another same number of CLJs as the next jobs. CLJ Object Descriptions CLJ Object Instantiation — Under normal circumstances, CLJ object is instantiated by the equipment when the equipment recognizes a requirement to deal with a carrier. Host Triggered Instantiation — An instantiation which is triggered by the host. The host may request as many CLJ creations as the host plans in order to give predictive information to the equipment. The equipment creates those CLJs and manages the execution order of them by communicating with the host. This Standard does not define the algorithm to decide the order. 23 Equipment Triggered Instantiation — An instantiation which is triggered by the equipment. A CLJ object is instantiated when the equipment recognizes that the equipment can receive new carrier. CLJ Object Identifier (ObjID) — The CLJID is the CLJ Object Identifier. The equipment is responsible for ensuring uniqueness of the CLJID prior to instantiation. CLJ Object Destruction — A CLJ Object reaches the end of its lifecycle in the following two cases. Normal Destruction (Completion) — A CLJ object is destructed when the carrier is unloaded from the equipment. Abnormal Destruction (Abortion) — A CLJ object is destructed when the CLJ is cancelled before receiving a carrier or aborted before unloading the carrier for some reasons such as an error. CLJ Object Persistence — A CLJ Object may persist over equipment shut down to restart if the carriers still stay in the equipment. Capability to perform this persistence automatically is dependent on equipment design. In any case, when equipment moves into host control with a carrier on it, a CLJ which represents the carrier shall be created. CLJ Object Functional Requirements CLJ Main State Management — A function to manage the main state of CLJ. The CLJ main state represents the actual (nonpredictive) portion of the behavior. Predictions — A function to predict the requested start or end timing of Load Request or Unload Request state by equipment. Equipment may assert Prediction whenever the equipment can predict those timings. Load Request (LR) Prediction (Optional) — An optional function which predicts the timing at which Load Request state starts. This function is an option mainly for Internal Buffer Equipment. In normal cases, Fixed Buffer Equipment does not need to implement this function. Load Stagnation (LS) Prediction (Optional) — An optional function which predicts Load Stagnation timing by which the CLJ should be loaded with a carrier (Load Request state should be completed) and should move to Carrier Valid state for seamless cascading. When the carrier is not loaded and valid by this predicted timing, stagnation of the carrier flow is likely to occur, and the stagnation of the equipment process may occur. Unload Request (UR) Prediction — A function which predicts the start timing of Unload Request state, at which the equipment ends all work with the carrier and requests unload. Unload Stagnation (US) Prediction (Optional) — An optional function which predicts Unload Stagnation timing by which the CLJ should be unloaded with the carrier (Unload Request state should be completed) and should be deleted for seamless cascading. When the carrier is not unloaded by this predicted timing, subsequent carrier load (or unload in internal buffer equipment) may be delayed and likely to cause the stagnation. Carrier ID Assignment (Optional) — An optional function which manages the assignment of a carrier to the CLJ. In case neither check nor negotiation of the order of carrier handling is done through PCL functionalities, this option may not be required. Late Carrier Assignment — A function to assign carrier after CLJ is created. This enables the use of Load Request function, in which equipment basically does not know which carrier will be assigned. Carrier Type (Optional) — An optional attribute to indicate which kind of carrier is dealt with the CLJ. Load Port Assignment (optional) — An optional function which manages the assignment of a load port to the CLJ. A CLJ uses load port in order to perform physical handoff operation between AMHS at the last part of Load Request or Unload Request state. Dynamic Load Port Assignment (optional) — An optional function which creates CLJ without load port assignment and assigns a load port when a coordination is done. This function is mainly for Internal Buffer Equipment. Since load ports in Internal Buffer Equipment are places which can temporarily be used for both Load and Unload, assignment of them should be done just before Load/Unload operation for more effective scheduling. CLJ Object Attribute Definitions — The following table defines the attributes of CLJ object. Who to maintain the Attributes — All attributes in the following table are always maintained and updated by the equipment. Validity of Attributes of Parallel States — Attributes of parallel states are valid only when the parent state is active.

24 Table 1.1.1.1.1.1.21 CLJ Object Attribute Definition

Attribute Name Definition Access#1 Reqd Form ObjID CLJ object identifier. RO Y Text. CLJID. Numerical text expression of positive integer. ObjID is equipment defined. ObjType Object Type. RO Y Text = ‘CarrierLogisticsJob’ CarrierFlowID Optional RO O Unsigned Integer Identifier of carrier flow ‘0’: Default carrier flow This indicates in which carrier flow ‘1’ or more: User defined carrier flow this CLJ belongs to. CLJState The main state of CLJ State Model RO Y Enumerated: LoadQueued, LoadRequest, CarrierValid, UnloadRequest LRPState Optional RO O Enumerated: Current state of LR Prediction parallel LRNotPredicted, LRPredicted state LRPTime Optional RO O Uses format defined for TimeReport Predicted time of LR Prediction LSPState Optional RO O Enumerated: Current state of LS Prediction parallel LSNotPredicted, LSPredicted state LSPTime Optional RO O Uses format defined for TimeReport Predicted time of LS Prediction URPState Current state of UR Prediction parallel RO Y Enumerated: state URNotPredicted, URPredicted URPTime Predicted time of UR Prediction RO Y Uses format defined for TimeReport USPState Optional RO O Enumerated: Current state of US Prediction parallel USNotPredicted, USPredicted state USPTime Optional RO O Uses format defined for TimeReport Predicted time of US Prediction CLJCarrierType Optional RO O Enumerated: Type of carrier ProcessCarrier, EmptyCarrier, NPWCarrier CLJCarrierID ID of carrier which is dealt with the RO Y Text 0–80 characters CLJ. Carrier ID may not be assigned Identifier of a carrier. The CLJCarrierID shall be until a carrier is loaded and confirmed. same as the CarrierID defined in SEMI E87. When carrier ID is not specified yet, A zero length is used for ‘CarrierID is not yet this attribute shall inform it. specified’ CLJLPID Load port ID RO Y Unsigned integer. ID of load port which will be used by 0 = Load port is not assigned the CLJ Non 0 = Load port number The CLJLPID is compatible with the load port number defined in SEMI E87 which says “The load port number shall be assigned incrementally from the bottom left to bottom right, then top left to top right when facing the front of the equipment.” #1 Even though a value may be marked as RO (read only), the initial value for the attribute may be provided by the host.

CLJ State Model — The following diagrams and tables define the state model of CLJ object. Equipment shall maintain appropriate number of CLJs to achieve continuous substrate processing.

25 CLJ State Model Diagram

Figure 12 CLJ State Model Diagram

26 CLJ State Model Definition

Table 1.1.1.1.1.1.22 CLJ State Model Definition

State Transition

No. Name Abstract of No.#1 Abstract of Abstract of New Comments Definition Trigger Action#2 State - - (No state) Tc00 New CLJ demand without Create CLJ Sc01 Early creation of load request CLJ Event CLJ Tc02 New CLJ demand with Create CLJ Sc02 Normal creation load request CLJ Event Tc04 New CLJ demand Create CLJ Sc03 For Interim triggered by AMHS CLJ Event solution use only Sc00 CLJ Created A CLJ is created and Tc07 Any fatal error occurred. Delete CLJ -(No CLJ is aborted active. CLD Event state) Sc30 UR Start of Unload Request - - - - A state for parallel Predictable is predictable state definition 1Sc20 LS End of Load Request is - - - - A state for parallel Predictable predictable state definition Sc10 LR Start of Load Request is - - - - A state for parallel Predictable predictable state definition Sc01 Load The CLJ is queued in Tc01 The CLJ requests load CLJ Event Sc02 Queued CFJ Sc11 LR Predictions of the start Tc10 None None Sc12 Parallel state of Prediction of Load Request Sc10 Sc12 LR Not Start timing of LR is not Tc11 Prediction is done LRP Event Sc13 Predicted predicted Sc13 LR Start timing of LR is Tc12 Prediction is changed LRP Event Sc13 Prediction update Predicted predicted Tc13 Prediction is withdrawn LRP Event Sc12 Sc02 Load The CLJ is requesting Tc03 A carrier is loaded CLJ Event Sc03 Request load of a carrier Sc21 LS Predictions of the end of Tc20 None None Sc22 Parallel state of Prediction Load Request Sc20 Sc22 LS Not Start timing of LS is not Tc21 Prediction is done LSP Event Sc23 Predicted predicted Sc23 LS Start timing of LS is Tc22 Prediction is changed LSP Event Sc23 Prediction update Predicted predicted Tc23 Prediction is withdrawn LSP Event Sc22 Sc03 Carrier The CLJ is loaded with Tc05 The carrier is closed and CLJ Event Sc04 Valid a carrier ready for unload Sc31 UR Predictions of the start Tc30 None None Sc32 Parallel state of Prediction of Unload Request Sc30 Sc32 UR Not Start timing of UR is Tc31 Prediction is done. URP Event Sc33 Predicted not predicted Sc33 UR Start timing of UR is Tc32 Prediction is changed URP Event Sc33 Prediction update Predicted predicted Tc33 Prediction is withdrawn URP Event Sc32 Sc04 Unload The CLJ is requesting Tc06 The carrier is unloaded Delete CLJ -(No CLJ is completed Request unload of a carrier CLD Event state) Sc41 US Predictions of the end of Tc40 None None Sc42 Parallel state of Prediction Unload Request Sc00

27 State Transition

No. Name Abstract of No.#1 Abstract of Abstract of New Comments Definition Trigger Action#2 State Sc42 US Not Start timing of US is not Tc41 Prediction is done USP Event Sc43 Predicted predicted Sc43 US Start timing of US is Tc42 Prediction is changed USP Event Sc43 Prediction update Predicted predicted Tc43 Prediction is withdrawn USP Event Sc42 Sc50 Load Port Load Port assignment. Tc50 None None Sc51 Parallel state of Assignment Sc00 Sc51 LP Not CLJ is not assigned on Tc51 Load port assignment LP Event Sc52 Assigned load port Sc52 LP Assigned CLJ is assigned on load Tc52 Load port re-assignment LP Event Sc52 port Tc53 Load port assignment LP Event Sc51 withdrawal Sc60 Carrier ID Carrier ID assignment. Tc60 None None Sc61 Parallel state of Assignment Sc00 Sc61 CID Not Carrier ID is not Tc61 Carrier ID assignment CID Event Sc62 Assigned assigned Sc62 CID Carrier ID is assigned Tc62 Carrier ID reassignment CID Event Sc62 Assigned Tc63 Carrier ID withdrawal CID Event Sc61 #1 Numeric portion of the transition numbers in this column shall be used as event numbers. #11 Events in the Action column report the following information. CLJ Event reports CLJID and CLJState CLD Event reports CLJID and previous CLJState LRP Event reports CLJID, LRPState and LRPTime LSP Event reports CLJID, LSPState and LSPTime URP Event reports CLJID, URPState and URPTime USP Event reports CLJID, USPState and USPTime CID Event reports CLJID, CLJCarrierType and CLJCarrierID LP Event reports CLJID and CLJLPID

CLJ State Definition Table

No. Mnemonic State Definition Comments Sc00 CLJ Created A state in which a CLJ is created and in operation. Sc01 Load Queued Optional The CLJ is queued in CFJ, but is not requesting load of a carrier yet. This state may not be required when Load Request Prediction is not used.

28 No. Mnemonic State Definition Comments Sc02 Load Request The CLJ is requesting load of a carrier. This state may not be required when Load Stagnation Prediction is not used. This state is not equal to ready to load. Logical readiness to load is determined by the position of the CLJ in CFJ. Physical readiness to load shall be confirmed by using SEMI E87 functionalities. Fixed Buffer Equipment: In normal cases, the CLJ is assigned on a load port. Internal Buffer Equipment: The CLJ may or may not be assigned on a load port at the beginning of this state. Multiple CLJs may be in Load Request state considering a dynamic use of multiple load ports for multiple CLJs in AMHS arrival order. The arbitration algorithm is not defined in this Standard. Sc03 Carrier Valid The CLJ is loaded with a carrier. The carrier is waiting for the use or in use, and is valid for the equipment. This state starts with the end of SEMI E84 sequence for load, and ends when the use of the carrier at FIMS port (Load port for Fixed Buffer Equipment, internal FIMS port for Internal Buffer Equipment) is completed, the door is closed, undocked or ready to undock, and the equipment has no operation other than unload. Sc04 Unload Request The CLJ is requesting unload of the carrier assigned to the CLJ. This state is not equal to ready to unload. Logical readiness to unload is determined by the priority of the CLJ in CFJ. Physical readiness to unload shall be confirmed by using SEMI E87 functionalities. Fixed Buffer Equipment: In normal cases, the CLJ stays assigned on the same load port. Internal Buffer Equipment: The CLJ may not be assigned on a load port at the beginning of this state when arbitration of load ports to CLJs is done by the arrival order information from AMHS. Sc10 LR Predictable A super state of Load Queued state This state has LR Predictable parallel state. In this state, LR Prediction function is active. Sc11 LR Prediction An optional parallel state of LR Predictable state This state represents the status of Start of Load Request Prediction. Sc12 LR Not Predicted The start timing of Load Request state is not predicted. Sc13 LR Predicted The start timing of Load Request state is predicted. Sc20 LS Predictable A super state of Load Queued and Load Request states This state has LS Predictable parallel state. In this state, LS Prediction function is active. Sc21 LS Prediction An optional parallel state of LS Predictable state This state represents the status of End of Load Request Prediction. Sc22 LS Not Predicted The start timing of Load Stagnation is not predicted. Sc23 LS Predicted The start timing of Load Stagnation is predicted. Sc30 UR Predictable A super state of Load Queued, Load Request, and Carrier Valid states This state has UR Predictable parallel state. In this state, UR Prediction function is active. Sc31 UR Prediction A parallel state of UR Predictable state This state represents the status of Start of Unload Request Prediction. Sc32 UR Not Predicted The start timing of Unload Request state is not predicted. Sc33 UR Predicted The start timing of Unload Request state is predicted. Sc41 US Prediction An optional parallel state of CLJ Created state This state represents the status of End of Unload Request Prediction.

29 No. Mnemonic State Definition Comments Sc42 US Not Predicted The start timing of Unload Stagnation is not predicted. Sc43 US Predicted The start timing of Unload Stagnation is predicted. Sc50 Load Port Assignment An optional parallel state of CLJ Created This state represents the status of Load Port Assignment. Sc51 LP Not Assigned The CLJ is not assigned on load port yet. Sc52 LP Assigned The CLJ is assigned on load port. Sc60 Carrier ID Assignment An optional parallel state of CLJ Created This state represents the status of Carrier ID Assignment. Sc61 CID Not Assigned Carrier ID (CLJCarrierID) is not assigned to the CLJ yet. Sc62 CID Assigned Carrier ID (CLJCarrierID) is assigned to the CLJ.

CLJ State Transition Table

Table 1.1.1.1.1.1.24 CLJ State Transition Table

No.#1 Previous State Trigger New State Actions#2 Comments Tc00 (No state) New Carrier Logistics demand occurred. Load Queued Create CLJ Early creation of CLJ CLJ Event Tc01 Load Queued Request loading of a carrier. Load Request CLJ Event Tc02 (No state) New Carrier Logistics demand occurred Load Request Create CLJ Normal creation of CLJ and is requesting load of a carrier. CLJ Event Tc03 Load Request A carrier is loaded and SEMI E84 Carrier Valid CLJ Event Factory level timing which sequence is completed. indicates that the carrier is under control of equipment Tc04 (No state) New Carrier Logistics demand occurred Carrier Valid Create CLJ For Interim solution only by arrival of AMHS while no CLJ is CLJ Event assigned on the load port. Tc05 Carrier Valid The carrier is ready to unload. Carrier Unload CLJ Event Load port may not be door shall be closed and undocked before Request assigned yet this transition. In case the load port has a purge capability, it shall also be done before this transition. Tc06 Unload Request The carrier is unloaded. (No state) Delete CLJ Normal completion CLD Event Tc07 CLJ Created Any fatal error. (No state) Delete CLJ Abnormal end CLD Event Error report Tc10 LR Prediction None. LR Not None Predicted Tc11 LR Not Start timing of Load Request state is LR Predicted LRP Event Predicted predicted. Tc12 LR Predicted Predicted start timing of Load Request LR Predicted LRP Event state is changed. Tc13 LR Predicted Predicted start timing of Load Request LR Not LRP Event state is withdrawn. Predicted Tc20 LS Prediction None LS Not None Predicted Tc21 LS Not Start timing of Load Stagnation is LS Predicted LSP Event Predicted predicted.

30 No.#1 Previous State Trigger New State Actions#2 Comments Tc22 LS Predicted Predicted start timing of Load Stagnation LS Predicted LSP Event is changed.

Tc23 LS Predicted Predicted start timing of Load Stagnation LS Not LSP Event is withdrawn. Predicted Tc30 UR Prediction None UR Not None Predicted Tc31 UR Not Start timing of Unload Request state is UR Predicted URP Event Predicted predicted.

Tc32 UR Predicted Predicted start timing of Unload Request UR Predicted URP Event state is changed.

Tc33 UR Predicted Predicted start timing of Unload Request UR Not URP Event state is withdrawn. Predicted Tc40 EoUR None US Not None Assignment Predicted US Prediction Tc41 US Not Start timing of Unload Stagnation is US Predicted USP Event Predicted predicted.

Tc42 US Predicted Predicted start timing of Unload US Predicted USP Event Stagnation is changed.

Tc43 US Predicted Predicted start timing of Unload US Not ESoUR Event Stagnation is withdrawn. Predicted USP Event Tc50 Load Port None. LP Not None Assignment Assigned Tc51 LP Not Assigned CLJ is assigned on load port. LP Assigned LP Event Tc52 LP Assigned CLJ is re-assigned on load port. LP Assigned LP Event Tc53 LP Assigned Load port assignment withdrawal. LP Not LP Event Assigned Tc60 Carrier ID None. CID Not None Assignment Assigned Tc61 CID Not Carrier ID assignment. CID Assigned CID Event Assigned Tc62 CID Assigned Carrier ID reassignment. CID Assigned CID Event Tc63 CID Assigned Carrier ID withdrawal. CID Not CID Event Assigned #1 Numeric portion of the transition numbers in this column shall be used as event numbers. #12 Events in the Action column report the following information. CLJ Event reports CLJID and CLJState CLD Event reports CLJID and previous CLJState LRP Event reports CLJID, LRPState and LRPTime LSP Event reports CLJID, LSPState and LSPTime URP Event reports CLJID, URPState and URPTime USP Event reports CLJID, USPState and USPTime CID Event reports CLJID, CLJCarrierType and CLJCarrierID LP Event reports CLJID and CLJLPID

31 CLJ Services — This section defines the message services required to support CLJ functionalities. CLJ Service Message Description — The following table is a list of CLJ services.

Table 1.1.1.1.1.1.25 CLJ Service Message Description

Service Name Type#1 Description GetCLJList R Optional This service gets a list of the CLJ objects from the equipment. Use SEMI E39 OSS to get ObjIDList by specifying ObjType and ObjID for ATTRID. GetCLJAttributes R Optional This service gets the attributes of specified CLJ from the equipment. Use GetAttr service of SEMI E39 OSS for this purpose. CLJ Event - These CLJ related events are internal events and are reported to the host through CFJ Event from CLD Event the CFJ which manages the CLJ. LRP Event LSP Event URP Event USP Event CID Event LP Event #1 The ‘Type’ column is used to indicate whether the service consists of a request/response message pair, ‘R’, or a single notification message, ‘N’.

CLJ Variable Data Definitions — This section defines variable data requirements for CLJ compliant equipment. Values of these variables are available to the host via collection event reports and host status queries.

Table 1.1.1.1.1.1.26 CLJ Variable Data Definitions

Variable Name Description Type Access Comment CLJID ObjID of CLJ Numerical text expression of RO CLJID is equipment defined positive integer CarrierFlowID Optional Unsigned Integer RO Identifier of carrier flow ‘0’: Default carrier flow This indicates in which carrier flow ‘1’ or more: User defined this CLJ belongs to. carrier flow CLJState The main state of CLJ State Model Enumerated: RO LoadQueued, LoadRequest, CarrierValid, UnloadRequest LRPState Optional Enumerated: RO Current state of LR Prediction LRNotPredicted, LRPredicted parallel state LRPTime Optional Uses format defined for RO Predicted time of LR Prediction TimeReport LSPState Optional Enumerated: RO Current state of LS Prediction LSNotPredicted, LSPredicted parallel state LSPTime Optional Uses format defined for RO Predicted time of LS Prediction TimeReport URPState Current state of UR Prediction Enumerated: RO parallel state URNotPredicted, URPredicted

32 Variable Name Description Type Access Comment URPTime Predicted time of UR Prediction Uses format defined for RO TimeReport USPState Optional Enumerated: RO Current state of US Prediction USNotPredicted, USPredicted parallel state USPTime Optional Uses format defined for RO Predicted time of US Prediction TimeReport CLJCarrierType Optional Enumerated: RO Type of carrier ProcessCarrier, EmptyCarrier, NPWCarrier CLJCarrierID Optional Text 0–80 characters RO ID of carrier which is dealt with the Identifier of a carrier. The CLJ. Carrier ID may not be assigned CLJCarrierID shall be same as until a carrier is loaded and the CarrierID defined in SEMI confirmed. In case carrier ID is not E87. specified yet, this variable shall A zero length is used for inform it. ‘CarrierID is not yet specified’ CLJLPID Optional Unsigned integer RO Load port ID 0 = Load port is not assigned ID of load port which will be used by Non 0 = Load port number the CLJ The CLJLPID is compatible with the load port number defined in SEMI E87 which says “The load port number shall be assigned incrementally from the bottom left to bottom right, then top left to top right when facing the front of the equipment.”

Requirements for Compliance Following table provides a checklist for PCL compliance.

Table 1.1.1.1.1.1.27 PCL Compliance Statement

Fundamental PCL Requirements PCL Section Implemented PCL Compliant PCL Requirements 8 PCL Requirements 8.1 Carrier Flow Job (CFJ) Object 8.1.1  Yes  No Carrier Logistics Job (CLJ) Object 8.1.2  Yes  No Reporting Scheme of Time for PCL 8.2  Yes  No Prediction Resubmission Threshold for PCL 8.3  Yes  No PCL Value Data Definitions 8.4  Yes  No TimeReport 8.5  Yes  No CFJ Object Requirements 9 CFJ Object Definition 9.1  Yes  No CFJ Object Descriptions 9.2  Yes  No CFJ Object Functional Requirements 9.3 33 Fundamental PCL Requirements PCL Section Implemented PCL Compliant

Order Management of CLJs 9.3.1  Yes  No Load/Unload Timing Management of CLJs 9.3.2  Yes  No Load Port Assignment to CLJs 9.3.3 Load Port Assignment for Fixed Buffer Equipment 9.3.3.1  Yes  No Load Port Assignment for Internal Buffer Equipment 9.3.3.2  Yes  No CFJ Attribute Definitions 9.4  Yes  No CFJ State Model 9.5  Yes  No CFJ Services 9.6  Yes  No CFJ Variable Data Definitions 9.7  Yes  No CLJ Object Requirements 10 CLJ Object Definition 10.1  Yes  No CLJ Object Description 10.2  Yes  No CLJ Object Functional Requirements 10.3 CLJ Main State Management 10.3.1  Yes  No Predictions 10.3.2 Load Request (LR) Prediction (Optional) 10.3.2.1  Yes  No Load Stagnation (LS) Prediction (Optional) 10.3.2.2  Yes  No Unload Request (UR) Prediction 10.3.2.3  Yes  No Unload Stagnation (US) Prediction (Optional) 10.3.2.4  Yes  No Carrier ID Assignment (Optional) 10.3.3  Yes  No Load Port Assignment (Optional) 10.3.4  Yes  No CLJ Object Attribute Definitions 10.4  Yes  No CLJ State Model 10.5  Yes  No CLJ Services 10.6  Yes  No CLJ Variable Date Definitions 10.7  Yes  No

Related Documents SEMI Standards and Safety Guidelines SEMI E148 — Specification for Time Synchronization and Definition of the TS-CLOCK Object

34 APPLICATION EXAMPLES FOR TYPICAL FIXED BUFFER EQUIPMENT

NOTICE: The material in this Appendix is an official part of SEMI E171 and was approved by full letter ballot procedures on August 25, 2014.

Implementations for Typical Fixed Buffer Equipment Purpose — The purpose of this Appendix is to show how the optional functionalities are used for typical Fixed Buffer Equipment. Configuration of the Equipment — This implementation example uses following configuration. Number of Load Ports — Two (Alternative use) Number of carrier flows — One (CarrierFlowID is not used).

Interim Implementation for Typical Fixed Buffer Equipment Purpose of Interim Implementation — The purpose of this implementation is to provide UR Prediction capability with minimal implementation effort. For simplicity, CLJs are managed per load port basis. And, each load port has up to one CLJ. This implementation is easily extendable to LP-Based implementation. Relationship Model of Objects — The CFJ and CLJ relationship for typical Fixed Buffer Equipment is shown below. Number of CFJs — One CFJ is assigned to each load port (two CFJs are used) Number of CLJs — Up to one CLJ is created per load port (= per CFJ) Maximum Number of Carriers (MaxCarrierNumber) — One (for one load port) Load Port Assignment — Not used Carrier ID Assignment — Not used LR Prediction — Not used LS Prediction — Not used UR Prediction — Used US Prediction — Not used

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35 <#1>Add 1. CFJ and CLJ Relationship for Interim Implementation for Typical Fixed Buffer Equipment

CLJ State Model — The CLJ uses the following portions of the CLJ State Model.

2. CLJ State Model for Interim Implementation for Typical Fixed Buffer Equipment

CFJ for Interim Implementation for Typical Fixed Buffer Equipment — In this implementation, CFJ is assigned to each load port. Each CFJ which is assigned to each load port has the following configuration. Each CFJ has up to one CLJ because the CLJ does not have Load Queued state or Load Request state in this implementation.

12.1: The following figure only shows the highlighted attributes of CLJ.

36 <#2>Delete

<#2>Add 3. CFJ for Interim Implementation for Typical Fixed Buffer Equipment

LP-Based Implementation for Typical Fixed Buffer Equipment Purpose of LP-Based Implementation — The purpose of LP-Based implementation is to provide LS Prediction and UR Prediction capabilities with minimum implementation effort. For simplicity, CLJs are managed per load port basis. And, each load port has up to two CLJs, that are current and the next (predicted). So, flexible assignment of load port to CLJ is not covered. Relationship Model of Objects — The CFJ and CLJ relationship for typical Fixed Buffer Equipment is shown below. Number of CFJs — One CFJ is assigned to each load port (two CFJs are used) Number of CLJs — Up to two CLJs are created per load port (= per CFJ) Maximum Number of Carriers (MaxCarrierNumber) — One (for one load port) Load Port Assignment — Not used Carrier ID Assignment — Not used LR Prediction — Not used LS Prediction — Used UR Prediction — Used US Prediction — Not used

37 <#1>Delete

<#1>Add 4. CFJ and CLJ Relationship for LP-Based Implementation for Typical Fixed Buffer Equipment

CLJ State Model — The CLJ uses the following portion of the CLJ State Model.

38 5. CLJ State Model for LP-Based Implementation for Typical Fixed Buffer Equipment

CFJ for One Load Port of Typical Fixed Buffer Equipment — Each CFJ which is assigned to each load port has the following configuration.

12.2: The following figure only shows the highlighted attributes of CLJs.

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<#2>Ad d 6. CFJ for LP-Based Implementation for Typical Fixed Buffer Equipment

39 Basic Implementation for Typical Fixed Buffer Equipment Relationship Model of Objects — The CFJ and CLJ relationship for typical Fixed Buffer Equipment is shown below. Number of CFJs — One CFJ is assigned to whole equipment (one CFJ manages two load ports) Number of CLJs — Up to four CLJs are created Maximum Number of Carriers (MaxCarrierNumber) — Two (one for one load port) Load Port Assignment — Used Carrier ID Assignment — Used LR Prediction — Not used LS Prediction — Used UR Prediction — Used US Prediction — Not used

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<#1>Add 7. CFJ and CLJ Relationship for Basic Implementation for Typical Fixed Buffer Equipment

CLJ State Model — The CLJ uses the following portion of the CLJ State Model.

40 8. CLJ State Model for Basic Implementation for Typical Fixed Buffer Equipment

CFJ for Typical Fixed Buffer Equipment — CFJ which is assigned to the equipment has the following configuration.

<#2>Dele te

41 <#2>A dd 9. CFJ for Basic Implementation for Typical Fixed Buffer Equipment

Transaction and States of Basic Implementation for Typical Fixed Buffer Equipment — Transactions and states are shown in the following table.

Transactions and States

# Action Dir#1 Message & E87#2 LPTS PCL#3 PJ/CJ Event LP1 LP2 CLJ1 CLJ2 CLJ3 CLJ4 Job1 Job2 CLJID CLJID CLJID CLJID (CLJ1,3) (CLJ2,4) =0001 =0002 =0003 =0004 1 Initial State RL RL None None None None None None 2 CLJ1,CLJ2 FE CLJ Event LR LR Created & Load Request 3 CLJ1,CLJ2 LS FE LSP Event Time LS LS Predicted = Now Predicted Predicted 4 FE Start of E84 TB 5 CLJ1 FE CLJ Event CV Carrier Valid (@ End of E84) (Loaded) 6 CLJ1 Slot Map Created Verification /Execute PJ Creation 7 CLJ1 FE URP Event UR UR Predicted Time = T1 Predicted 8 FE Start of E84 TB

42 # Action Dir#1 Message & E87#2 LPTS PCL#3 PJ/CJ Event LP1 LP2 CLJ1 CLJ2 CLJ3 CLJ4 Job1 Job2 CLJID CLJID CLJID CLJID (CLJ1,3) (CLJ2,4) =0001 =0002 =0003 =0004 9 CLJ2 FE CLJ Event CV Carrier Valid (@ End of E84) (Loaded) 10 CLJ2 Slot Map Created Verification /Execute PJ Creation 11 CLJ2 FE URP Event UR UR Predicted Time = T2 Predicted 12 CLJ3 FE CLJ Event LR Load Request 13 CLJ3 FE LSP Event Time LS LS Predicted = T3 Predicted (CEW Started) 14 CLJ1 FE CLJ Event RU UR Unload Request 15 FE Start of E84 TB 16 CLJ1 Deleted FE CLJ Event RL Deleted Deleted (Unloaded) (@End of E84) 17 FE Start of E84 TB None None 18 CLJ3 FE CLJ Event CV Carrier Valid (@ End of E84) (Loaded) 19 CLJ3 Slot Map Created/ Verification Execute PJ Creation 20 CLJ3 FE URP Event UR UR Predicted Time = T4 Predicted 21 CLJ4 FE CLJ Event LR Load Request 22 CLJ4 FE LSP Event Time LS LS Predicted = T5 Predicted (CEW Started) 23 CLJ2 FE CLJ Event RU UR Unload Request 24 FE Start of E84 TB 25 CLJ2 Deleted FE CLJ Event RL Deleted Deleted (Unloaded) (@ End of E84) 26 FE Start of E84 TB None None 27 CLJ4 FE CLJ Event CV Carrier Valid (@ End of E84) (Loaded) 28 CLJ4 Slot Map Created Verification /Execute PJ Creation 29 CLJ4 FE URP Event UR UR Predicted Time = T6 Predicted

43 # Action Dir#1 Message & E87#2 LPTS PCL#3 PJ/CJ Event LP1 LP2 CLJ1 CLJ2 CLJ3 CLJ4 Job1 Job2 CLJID CLJID CLJID CLJID (CLJ1,3) (CLJ2,4) =0001 =0002 =0003 =0004 30 CLJ3 FE CLJ Event RU UR Unload Request 31 FE Start of E84 TB 32 CLJ3 Deleted FE CLJ Event RL Deleted Deleted (Unloaded) (@ End of E84) 33 CLJ4 FE CLJ Event RU None UR None Unload Request 34 FE Start of E84 TB 35 CLJ4 Deleted FE CLJ Event RL Deleted Deleted (Unloaded) (@ End of E84) #1 F = Factory system, E = Equipment. #13 LPTS = Load Port Transfer State, RL = Ready to Load, TB = Transfer Blocked, RU = Ready to Unload. #14 LR = Load Request, CV = Carrier Valid, UR = Unload Request.

44 APPLICATION EXAMPLES FOR INTERNAL BUFFER EQUIPMENT

NOTICE: The material in this Appendix is an official part of SEMI E171 and was approved by full letter ballot procedures on August 25, 2014.

Implementation for Internal Buffer Equipment Purpose — The purpose of this Appendix is to show how the optional functionalities are used for Internal Buffer Equipment. Configuration of the Equipment — This implementation example uses following configuration. Number of Load Ports — Two. Independently usable for both load and unload. Number of carrier flows — One (CarrierFlowID is not used). Number of Carriers for One Batch — Four. Four carriers of wafers for one batch. Number of Internal Buffers for Carriers for Production — Eight. Carriers up to two batches can be stored.

Bi-Direction Implementation for Internal Buffer Equipment Relationship Model of Objects — The CFJ and CLJ relationship for Internal Buffer Equipment is shown below. Number of CFJs — One. For flexible use of load port. Number of CLJs — Up to 12 CLJs. Four CLJs for the wafers in process, four CLJs for the wafers being unloaded, and four CLJs for the wafers to be loaded. Maximum Number of Carriers (MaxCarrierNumber) — Eight Load Port Assignment — Used Carrier ID Assignment — Used LR Prediction — Not used LS Prediction — Used UR Prediction — Used US Prediction — Not used

10. CFJ and CLJ Relationship for Bi-Direction Implementation for Internal Buffer Equipment

CLJ State Model — The CLJ uses the following portion of the CLJ State Model. 45 11. CLJ State Model for Bi-Direction Implementation for Internal Buffer Equipment

CFJ for Internal Buffer Equipment — CFJ has the following configuration. CFJ has 12 CLJs at maximum; four are for the carriers in process, four are carriers for being unloaded, and four are for carriers to be loaded. The First Table — The first table in the following figure shows the timing at which the Predictions for Batch 2 are just done. At this timing, Unload Request Predictions of CLJs for Batch 0 are already done and those CLJs are about to move to Unload Request state. On the other hand, the carriers for Batch 1 (C4 through C7) are loaded and are in Carrier Valid state, and Unload Request Prediction is done. This enables the equipment to predict the timing by which the equipment needs to have the carriers for Batch 2. The Second Table — The second table shows the timing at which CLJ 00 and CLJ 01 are deleted as the carriers for them are already unloaded and CLJ 02 and CLJ 03 are in Unload Request state. As CLJ 00 and CLJ 01 are deleted, the resources to make CLJ 08 and CLJ 09 Load Request state are ready. The Third Table — The third table shows the timing at which all CLJs for Batch 0 are deleted as the carriers for them are unloaded and CLJ 08 and CLJ 09 become Carrier Valid state as the carriers for them are loaded. As CLJ 02 and CLJ 03 are deleted, the resources to make CLJ 10 and CLJ 11 Load Request state are ready.

46 <#1>De lete

<#1>Ad d 12. CFJ for Bi-Direction Implementation for Internal Buffer Equipment (Load Queued State is Used)

47 Simplification — In this implementation, Load Queue state may be replaced with Load Request state for simplification because the host can understand the resource availability of the equipment as the MaxCarrierNumber is set to eight.

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48 <#1>Ad d 13. CFJ for Bi-Direction Implementation for Internal Buffer Equipment (Load Queued State is not Used)

Transaction and States of Bi-Direction Implementation for Internal Buffer Equipment — Transactions and states are shown in the following table.

Transactions and States

# Action#1 Dir#2 Message & E87#3 PCL#4 PJ Event LPTS /CJ#5

C C C C L L L L C C C C C C C C J J L L J J J J L L L L L L L L o o P P 1 2 3 4 J J J J J J J J b b 1 2 / / / / 1 1 1 5 6 7 8 9 1 2 1 1 1 1 0 1 2 3 4 5 6 1 Initial State RL RL N N N N N N N N N N N N N N 2 CLJ1~ 12 8 FE CLJ Event LR LR LR LR LR LR LR LR Created & CLJ1~8 Load Request 3 CLJ1~8 FE LSP Event Time LSP LSP LSP LSP LS Predicted CLJ1~4= Now 4 FE Start of E84 TB 5 CLJ1 Carrier FE CLJ Event CV Valid (Loaded) (@ End of E84)

49 # Action#1 Dir#2 Message & E87#3 PCL#4 PJ Event LPTS /CJ#5

C C C C L L L L C C C C C C C C J J L L J J J J L L L L L L L L o o P P 1 2 3 4 J J J J J J J J b b 1 2 / / / / 1 1 1 5 6 7 8 9 1 2 1 1 1 1 0 1 2 3 4 5 6 6 CLJ1 Recognition of Carrier and Wafer 7 CLJ1 Carrier RL Move to IB 8 FE Start of E84 TB 9 CLJ2 Carrier FE CLJ Event CV Valid (Loaded) (@ End of E84) 10 CLJ2 Recognition of Carrier and Wafer 11 CLJ2 Carrier RL Move to IB 12 FE Start of E84 TB 13 CLJ3 Carrier FE CLJ Event CV Valid (Loaded) (@ End of E84) 14 CLJ3 Recognition of Carrier and Wafer 15 CLJ3 Carrier RL Move to IB 16 FE Start of E84 TB 17 CLJ4 Carrier FE CLJ Event CV Valid (Loaded) (@ End of E84) 18 CLJ4 Recognition of Carrier and Wafer 19 CLJ4 Carrier RL Move to IB 20 PJ Creation 21 CLJ1~4 UR FE URP Event Time URP URP URP URP C/ Predicted = T2 E 22 CLJ5~8 LS FE LSP Event Time LSP LSP LSP LSP Predicted CLJ5~8 =T1 23 FE Start of E84 TB 24 CLJ5 Carrier FE CLJ Event CV Valid (Loaded) (@ End of E84) 25 CLJ5 Recognition of Carrier and Wafer 26 CLJ1 Carrier RL Move to IB 27 FE Start of E84 TB 28 CLJ6 Carrier FE CLJ Event CV Valid (Loaded) (@ End of E84) 50 # Action#1 Dir#2 Message & E87#3 PCL#4 PJ Event LPTS /CJ#5

C C C C L L L L C C C C C C C C J J L L J J J J L L L L L L L L o o P P 1 2 3 4 J J J J J J J J b b 1 2 / / / / 1 1 1 5 6 7 8 9 1 2 1 1 1 1 0 1 2 3 4 5 6 29 CLJ6 Recognition of Carrier and Wafer 30 CLJ6 Carrier RL Move to IB 31 FE Start of E84 TB 32 CLJ7 Carrier FE CLJ Event CV Valid (Loaded) (@ End of E84) 33 CLJ7 Recognition of Carrier and Wafer 34 CLJ7 Carrier RL Move to IB 35 FE Start of E84 TB 36 CLJ8 Carrier FE CLJ Event CV Valid (Loaded) (@ End of E84) 37 CLJ8 Recognition of Carrier and Wafer 38 CLJ8 Carrier RL Move to IB 39 PJ Completed D (Job1) 40 PJ Creation N C/ (Job2) E 41 CLJ9~12 Load LQ LQ LQ LQ Queued 42 CLJ9~12 LS FE LSP Event Time LSP LSP LSP LSP Predicted = T5 43 CLJ5~8 FE URP Event Time URP URP URP URP UR Predicted = T6 44 CLJ1 Unload FE CLJ Event RU UR Request 45 CLJ2 Unload FE CLJ Event RU UR Request 46 FE Start of E84 TB 47 CLJ1 Deleted RL D LR (Unloaded) 48 CLJ9 Load FE CLJ Event N Request 49 CLJ3 Unload FE CLJ Event RU UR Request 50 FE Start of E84 TB 51 CLJ2 Deleted RL D LR (Unloaded) 52 CLJ10 Load FE CLJ Event N Request 51 # Action#1 Dir#2 Message & E87#3 PCL#4 PJ Event LPTS /CJ#5

C C C C L L L L C C C C C C C C J J L L J J J J L L L L L L L L o o P P 1 2 3 4 J J J J J J J J b b 1 2 / / / / 1 1 1 5 6 7 8 9 1 2 1 1 1 1 0 1 2 3 4 5 6 53 CLJ4 Unload FE CLJ Event RU UR Request 54 FE Start of E84 TB 55 CLJ3 Deleted RL D LR (Unloaded) 56 CLJ11 Load FE CLJ Event N Request 57 FE Start of E84 TB 58 CLJ4 Deleted RL D LR (Unloaded) 59 CLJ12 Load FE CLJ Event N Request 60 FE Start of E84 TB CV 61 CLJ9 Carrier FE CLJ Event Valid (Loaded) (@ End of E84) 62 CLJ9 Recognition of Carrier and Wafer 63 CLJ9 Carrier RL Move to IB 64 FE Start of E84 TB CV 65 CLJ10 Carrier FE CLJ Event Valid (Loaded) (@ End of E84) 66 CLJ10 Recognition of Carrier and Wafer 67 CLJ10 Carrier RL Move to IB 68 FE Start of E84 TB CV 69 CLJ11 Carrier FE CLJ Event Valid (Loaded) (@ End of E84) 70 CLJ11 Recognition of Carrier and Wafer 71 CLJ11 Carrier RL Move to IB 72 FE Start of E84 TB CV 73 CLJ13~16 Load Queued 74 CLJ12 Carrier FE CLJ Event Valid (Loaded) (@ End of E84) 75 CLJ12 Recognition of Carrier and Wafer

C C C C L L L L C C C C C C C C J J L L J J J J L L L L L L L L o o P P 1 2 3 4 J J J J J J J J b b 1 2 / / / / 1 1 1 5 6 7 8 9 1 2 1 1 1 1 0 1 2 3 4 5 6 76 CLJ12 Carrier RL Move to IB 77 PJ Completed D 78 PJ Creation LQ LQ LQ LQ C/ N 79 CLJ13~16 LS FE LSP Event LSP LSP LSP LSP E Predicted Time = T9 80 CLJ9~12 FE URP Event Time URP URP URP URP UR Predicted = T10 81 CLJ5 Unload FE CLJ Event RU UR Request 82 CLJ6 Unload FE CLJ Event RU UR Request 83 FE Start of E84 TB 84 CLJ5 Deleted RL D (Unloaded) 85 CLJ13 Load FE CLJ Event LR N Request 86 CLJ7 Unload FE CLJ Event RU UR Request 87 FE Start of E84 TB 88 CLJ6 Deleted RL D (Unloaded) 89 CLJ14 Load FE CLJ Event LR N Request 90 CLJ8 Unload FE CLJ Event RU UR Request 91 FE Start of E84 TB 92 CLJ7 Deleted RL D (Unloaded) 93 CLJ15 Load FE CLJ Event LR N Request 94 FE Start of E84 TB 95 CLJ8 Deleted RL D (Unloaded) 96 CLJ16 Load FE CLJ Event LR N Request 97 FE Start of E84 TB CV 98 CLJ13 Carrier FE CLJ Event Valid (Loaded) (@ End of E84) 99 CLJ13 Recognition of Carrier and Wafer 100CLJ13 Carrier RL Move to IB 101 FE Start of E84 TB CV 102CLJ14 Carrier FE CLJ Event Valid (Loaded) (@ End of E84)

C C C C L L L L C C C C C C C C J J L L J J J J L L L L L L L L o o P P 1 2 3 4 J J J J J J J J b b 1 2 / / / / 1 1 1 5 6 7 8 9 1 2 1 1 1 1 0 1 2 3 4 5 6 103CLJ14 Recognition of Carrier and Wafer 104CLJ14 Carrier RL Move to IB 105 FE Start of E84 TB 106CLJ15 Carrier FE CLJ Event CV Valid (Loaded) (@ End of E84) 107CLJ15 Recognition of Carrier and Wafer 108CLJ15 Carrier RL Move to IB 109 FE Start of E84 TB 110CLJ16 Carrier F CLJ Event CV Valid (Loaded) E (@ End of E84) #1 IB = Internal Buffer #2 F = Factory system, E = Equipment #3 LPTS = Load Port Transfer State, RL = Ready to Load, TB = Transfer Blocked, RU = Ready to Unload #4 N = None, LR = Load Request, CV = Carrier Valid, UR = Unload Request, LQ = Load Queued, LSP = LS Predicted, URP = UR Predicted, D = Deleted #5 Job1 = Boat 1 for CLJ1-4, CLJ9-12, Job2 = Boat2 for CLJ5-8, CLJ13-16, N = None, C = Created, E = Execute, D = Deleted

54 NOTICE: SEMI makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice. By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights and the risk of infringement of such rights are entirely their own responsibility.