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Background Statement for SEMI Draft Document 4737B NEW STANDARD: GUIDE FOR HEATED SYSTEMS REQUIREMENTS

Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.

Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background

The continuing demand for higher performance heated systems in the semiconductor- manufacturing sector is beginning to require standardization due numerous issues impacting the customer/user base and the manufacturers of heater systems for the semiconductor equipment industry.

Below elements define the various aspect of standard consideration for jacketing heating in semiconductor industry.

These guides can be categorized into five basic sectors of heater jacket activity

1. Materials to heat – direct conductive heating of metals for weldments and valves – and the transfer heating of gases, liquid and vapor flow within the weldment and valving systems therein. 2. Range of temperatures and system performance to be achieved, uniformity, repeatability, speed l 3. Environmental factors – immediate environment of the heater, pressurized gas box and ambient heat loads. 4. Human environmental heater performance factors – outgas issues, cleanliness to manufacturing, and temperature tolerance of materials. 5. Test and verification procedures for heater performance and life cycle determination.

Any one of the above mentioned factors could have major effect on the customer and manufacturer of the heater system due to poor performance creating down time. This document provides a uniform list of requirements for a heater jacket manufacturer to establish specifications for product design, development, test, and manufacturing.

The results of this ballot will be reviewed by the Heater Jacket Task Force and adjudicated the NA Facilities and Gases Committee during their meetings on March 29, 2011 in San Jose, CA. Check www.semi.org/standards for the latest meeting schedule.

For question on the ballot, contact SEMI Staff, Kevin Nguyen at [email protected] Informational Ballot1000A(Blue) Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 4 4 boundaryconditionsheaters. and use of 3.1 3 and guides health and safety appropriate establish to document this of user the other ofprior thelimitations use. applicability regulatoryor to determine of responsibility the is It use. NOTICE: materials heater documentnot elements of is orthemselves.intent this construction, of recommend methods to 2.3 related and labeling, packaging, testing validation. information methods, exchange, feedback controls, specifications, performance requirements, operational of standards considerations, environmental of types all 2.2 to applies document This systems. jacket heater industry. related solar, flat used thepanel, and semiconductor, in electricalheater. jackets resistive custom of manufacturing and test, development, 2.1 2 from listed as requirements select or indicate 16) through Tests, Evaluationand (§ Verification(§ 6) Specifications Electrical should jackets heater custom of Requestors jackets. heater custom of requestors to deliver to manufacturers jacket heater for form generic a as act to is document this of use intended 1.1 1 HEATEDSTANDARD: GUIDEREQUIREMENTS FOR NEW SYSTEMS Draft Document SEMI 4737B reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This www.nfpa.orgWebsite: Park, MA02269 1 Batterymarch Quincy, 1 Per Minute —StandardSLM Liters —Mean Failure Between Time MTBF Sheet —MaterialData MSDS Safety Interrupter Fault GFI —Ground Current —Direct DC Current —Alternating AC 5.1 5 of and Vapors NOTICE: or Gases, Liquids, Flammable of Classification the for Installations LocationsElectrical Areas (Classified) for ChemicalProcess in Hazardous Practice Recommended — 497 NFPA 70 NFPA 4.1

National Fire Protection Association Protection Fire National Referenced Standards Referenced Documents and Limitations Scope Purpose Terminology This document does not advise on specific requirements for safety construction, safety GFI notor for requirements on specific grounding documentrequirements,This does advise The heated. be to structure or surface a to attached or wrapped placed, heaters as defined are systems Heated conditions, boundary and load thermal specifications, electrical of: aspect the discusses herein document The design, rapid in aid to definitions technical of set uniform a provide to is document this of use intended The The requirements. jacket heater uniform documenting for framework a define to is guide this of purpose The Abbreviations andAcronyms Standard NFPA — SEMI standards and Safety Guidelines do not purport to address all safety issues associated with their with associated issues safety all address to purport not do Guidelines Safety and standards SEMI Unless otherwise indicated, all documents cited shall be theversions. latestpublished otherwise documents all cited be shall Unless indicated, National Electrical Code National Electrical 1 Page 2 Document Number Doc. B Date:  SEMI DRAFT 4/9/2018  :B

LETTER (YELLOW) BALLOT Informational Ballot1000A(Blue) Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 8 8 7.3.5 7.3.4 7.3.3 7.3.2 7.3.1 7.3 7.2.1 7.2 7.1 7 6.6 6.5 6.4 6.3 6.2 6.1 Electrical from listed as requirements select or indicate should jackets heater through Requirements Testing.Where space insufficient is provided, attachments be by requestor.should provided the custom of Requestors jackets. heater custom 1: NOTE 6 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 9.8 9.7 9.6 9.5 9.4 9.3 9.2 9.1 9 Cable Connectors requirementsCable and and MechanicalLoad parametersThermal Electrical Environmental Environmental Conditions System Model or platform where heater is to be to heaterused______Model is orSystem platform where chamber,______foreline. (s)gas panel, Location e.g. required factoring demand/insulation and form demand Application –thermal system and______Amps per value Rating______Amps total individual only) (max per Current heater and system total______Wattsper ______Wattsindividual per Power heater —13 Phase Frequency —50Hz —24/120/208/ 220/440/230/400Voltage /Or Type —ACCurrent Flow rate ______min/max rate SLMFlow in MSDS.______and internal attach fluid(s) List or to and state gas after i.e. heating______. liquid prior fluid(s) Define Internal heating______staticpressure airflow ______psi. External annotated with of diagram) still ambientair attachment (add Areas diagram) attachment annotated of(add with forced flow Areas to ______°C rangeof operation ______°C temperature Ambient provided: yes profile airflow no (diagram) External Describe any additional heat loss or heat contributors to the target heat requirement. loss heat heat anycontributors heat the or target additional to Describe sensitivity, materials/componentsonheat limits tolerance heat orDescribe ramp flammable function. operation (e.g withgases/liquids) mayor interact that heater any hazards Describe of heaterLocation and removable needreusable ? heaterbe jackets to Do Is the heater to be used in a hazardous location [See NFPA 70/497] in hazardousNFPA ? thebe heaterlocation[See to used a Is The intended use of this document is to act as a generic form for heater jacket manufacturers to deliver to requestors of requestors to deliver to manufacturers jacket heater for form generic a as act to is document this of use intended The tablepin-out ? TypeWire part numberConnector lengthCable keying diagram? Specifications : Indoor/Outdoor - Indoor/Outdoor ifclass____: indoor –cleanroom 60Hz DC Insulation Material: Manufacturer: _____Meters/inches Yes Yes other Page 3 (Select all that apply) that all (Select Conductor Material p/nMfg. ±Meters/inchestolerance No No Document Number Doc. B Date:  SEMI DRAFT 4/9/2018  :B

LETTER (YELLOW) BALLOT Informational Ballot1000A(Blue) Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 11.8 11.7 11.6 11.5 11.4 11.3 11.2 11.1 11 10.3 10.2 10.1 10 9.15 9.14 9.13 9.12 9.11 9.10 9.9 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This the by specified be cannot that document this in section Any be bythe heater defined supplier. requestor may files. CAD or sketches drawings, of attachments 13.1 13 12.9 time (considered fuseto orone use) outboard design12.8.1– thermal heater integral 12.8 12.7 12.6 12.5 12.4 12.3 12.2 12.1 12 Operational Requirements Operational ControlSystem and Specifications Performance PerformanceRequirements Inlet temperatures ______°C Inlet Information Information Exchange List any RoHS requirements - lead free and material restrictions thatapply material free restrictions - requirements and may any lead RoHS List materials REACH as restrictions anyapplicable) (list restrictions EU fuse ____Amps@volts breaker or equivalent Circuit GFI circuit and requirements interlocks, required safety there Are non-groundedheater system. or Grounded capability Temperature Over/Under how MTBF determined if required life and and cyclerequirements Projected point state maximum steady Duty cycleat______% set state non-operational (hours) temperature to from Ramp variance(s) profile(s), and/or tolerance(s) Define temperature set pointtoleranceProcess ____°C and placementoperation issues and Ergonomic heater Human/machine to mountedsensor internallymountedor externally control point: Temperature max °C) ______(min./ requirement temperature Outlet ______(min/maxFluid pressure SIunits) flowregions directionswith be distributiondirections fluid to Flow (attach heated.) diagram and 25%TEOS tobyvolume. He e.g.+ 75%He Fluid ratio maxto mixtureranges(min ratio) 100% Information exchange shall consist of this guide with all sections completely answered by the requestor and requestor the by answered completely sections all with guide this of consist shall exchange Information protocol Alarm or manualnon-resettable or or automatic electrical- interlock –mechanical temperature Over nonresetable or automatic or electrical- manual temperatureor –mechanical indication Low °C required in sensor/s type –rangefor and system - tolerance feedback indicate Temperature -protocolComputer –PCsystem network based PID local or controller/s –on/off, remote - Electronic variac –rheostatic, Electrical –thermostat Mechanical System –summarycompleteControl description Type elements- - apply ¶¶12.2 12.5that  ___°C Page 4 Document Number Doc. B Date:  SEMI DRAFT 4/9/2018  :B

LETTER (YELLOW) BALLOT Informational Ballot1000A(Blue) Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Dashed Lines/thick lines ? Lines/thick Dashed lines drawingsScaled preferred. drawingstoscale Are ? active receive to load thermal for limits boundary physical - heating. views perspective 3 with drawing 2D Perspective 3 2D drawing ? DXF Format: Media: Printed 15 14.7 14.6 14.5 requirements. 14.4 14.3 14.2 14.1 14 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Labels for —Safety Safety SEMI S1 Equipment Guideline 17.1 17 16.2 16.1 16 c. b. a. HeatTargets Physical -substrate dashed ifline andCheck boundaries indicatethick boundaries.active indicate heating lines insulation RelatedDocuments Tests, VerificationEvaluation and SystemSpecifications Drawings, Materials and Documents Packaging, Specificationsand Labeling As-built install drawings and programming maps installAs-built and drawings programming for required (yes/no)Manuals operation code bar and specifications drawingssystem System and type package materials, compatible cleanroom in packaging e.g., requirements, Shipping control elements of heatersand Packaging and documentation attached Part numbers required information -and List format Labels SEMI Safety GuidelinesSEMI materials report test(s)Required and by:Validation performed Substrate sample not required Substrate sample not be purchasedSubstrate sample to heater by supplier be providedSubstrate sample to requestorby STEP Digital PDF Mixed Yes___ Yes___ Yes___ other vendor specified No No ____ Drawing# No___ No___ Page 5 other NA Rev: Document Number Doc. B Date:  SEMI DRAFT 4/9/2018  :B

LETTER (YELLOW) BALLOT Informational Ballot1000A(Blue) Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and the risk of infringement of such rights are entirely their own suchresponsibility. infringement areentirely rights their the of risk of this in mentioned items any and copyrights, or rights patent such any with of determination that advised expressly are standard this connection of Users standard. in asserted copyrights or position rights patent no any takes of (SEMI) validity the International respecting Materials and Equipment Semiconductor standard, this of publication By without change notice. to subject are standards These herein. mentioned equipment relevant or other materials and any sheets, respecting literature, data product labels, product user. instructions, the manufacturer's to of refer responsibility to the cautioned solely are is Users standard the of suitability the of determination The application. particular NOTICE: Reach OrganizationalConformance EU Special Community (CE) European (CSA) Standards Association Canadian Laboratory (UL)Underwriters Codes Electrical Local 17.3 and testing for Specifications environmentsand Design, —CleanroomsPartstartup and4: ISO controlled construction, associated 14644-4 2: Part environments controlled associated and to ISO with continued14644-1 monitoring compliance prove Cleanrooms — 14644-2 ISO cleanliness environments of Classification —CleanroomsPart and1: air ISO controlled associated 14644-1 17.2 for Liquid —SafetySystem Process SEMI S3 Guidelines Heating Semiconductor Guideline for andManufacturing Equipment Safety —Environmental, Health, SEMI S2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 4 Rd, Northbrook, 60062,Website: www.ul.com333 Pfingsten IL 3 41.22.733.34.30; Website: www.iso.ch 41.22.749.01.11; Fax: Telephone: 2

Website: www.csa.caWebsite: Underwriters Laboratory International Organization for Standardization, ISO Central Secretariat, 1 rue de Varembé, Case postale 56, CH-1211 Geneva 1rue Case56,CH-1211 Secretariat, de 20,Switzerland. for postale Varembé, Organization Central Standardization,ISO International Others Standar ISO SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any for herein forth set standards the of suitability the to as representations or warranties no makes SEMI d 2

Document Number Doc. B Date:  SEMI DRAFT 4/9/2018  :B

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