Fluoride Respectively
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(12) United States Patent (10) Patent No.: US 9,048,183 B2 Ganguli Et Al
USOO9048183B2 (12) United States Patent (10) Patent No.: US 9,048,183 B2 Ganguli et al. (45) Date of Patent: Jun. 2, 2015 (54) NMOSMETAL GATE MATERIALS, (52) U.S. Cl. MANUFACTURING METHODS, AND CPC .......... HOIL 21/28008 (2013.01); C23C I6/06 EQUIPMENT USING CVD AND ALD (2013.01); C23C 16/32 (2013.01); PROCESSES WITH METAL BASED (Continued) PRECURSORS (58) Field of Classification Search (71) Applicant: Applied Materials, Inc., Santa Clara, None CA (US) See application file for complete search history. (56) References Cited (72) Inventors: Seshadri Ganguli, Sunnyvale, CA (US); Srinivas Gandikota, Santa Clara, CA U.S. PATENT DOCUMENTS (US); Yu Lei, Belmont, CA (US); Xinliang Lu, Fremont, CA (US); Sang 5,055,280 A 10/1991 Nakatani et al. Ho Yu, Cupertino, CA (US); Hoon Kim, 6,139,922 A 10/2000 Kaloyeros et al. Santa Clara, CA (US); Paul F. Ma, Santa (Continued) Clara, CA (US); Mei Chang, Saratoga, CA (US); Maitreyee Mahajani, FOREIGN PATENT DOCUMENTS Saratoga, CA (US); Patricia M. Liu, Saratoga, CA (US) KR 2003OOO9093. A 1, 2003 s OTHER PUBLICATIONS (73) Assignee: APPLIED MATERIALS, INC., Santa International Search Report PCT/US2011/033820 dated Jan. 5, Clara, CA (US) 2012. (*) Notice: Subject to any disclaimer, the term of this (Continued) patent is extended or adjusted under 35 Primary Examiner — Yasser A Abdelaziez U.S.C. 154(b) by 0 days. (74) Attorney, Agent, or Firm — Patterson & Sheridan, LLP (21) Appl. No.: 14/147,291 (57) ABSTRACT Embodiments provide methods for depositing metal-contain (22) Filed: Jan. 3, 2014 ing materials. The methods include deposition processes that form metal, metal carbide, metal silicide, metal nitride, and (65) Prior Publication Data metal carbide derivatives by a vapor deposition process, including thermal decomposition, CVD, pulsed-CVD, or US 2014/O12O712 A1 May 1, 2014 ALD. -
A THESIS Topics in the Chemistry of Niobium and Tantalum Pentafluorides and Other Higher Halides Submitted to the University Of
A THESIS Topics in the Chemistry of Niobium and Tantalum Pentafluorides and other Higher Halides Submitted to the University of .Glasgow by J. C. Fuggle B.A. in part fulfillment of the reopj.ireme.nts for the degree of Doctor of Philosophy in the Faculty of Science Work presented in this thesis is the result of research carried out by the author, in the Chemistry Department of the University of Glasgow, between October 1968 and Kay -1971 except where specific reference is made to other publication ftLAS<30W 1 v/iivERsmn LIBRARY:_J ProQuest Number: 11012000 All rights reserved INFORMATION TO ALL USERS The quality of this reproduction is dependent upon the quality of the copy submitted. In the unlikely event that the author did not send a complete manuscript and there are missing pages, these will be noted. Also, if material had to be removed, a note will indicate the deletion. uest ProQuest 11012000 Published by ProQuest LLC(2018). Copyright of the Dissertation is held by the Author. All rights reserved. This work is protected against unauthorized copying under Title 17, United States Code Microform Edition © ProQuest LLC. ProQuest LLC. 789 East Eisenhower Parkway P.O. Box 1346 Ann Arbor, Ml 4 8 1 0 6 - 1346 This thesis is dedicated to all those who have played a part in my education and in particular to my parents, whose share in the work involved was greatest, and probably most arduous. ”Ad apris ki bien conuist ahan" Song of Roland nThe converse is also true." - Ph.D student GLASGOW 1971 I gratefully record my obligation to my supervisors, Professor P. -
High Purity Inorganics
High Purity Inorganics www.alfa.com INCLUDING: • Puratronic® High Purity Inorganics • Ultra Dry Anhydrous Materials • REacton® Rare Earth Products www.alfa.com Where Science Meets Service High Purity Inorganics from Alfa Aesar Known worldwide as a leading manufacturer of high purity inorganic compounds, Alfa Aesar produces thousands of distinct materials to exacting standards for research, development and production applications. Custom production and packaging services are part of our regular offering. Our brands are recognized for purity and quality and are backed up by technical and sales teams dedicated to providing the best service. This catalog contains only a selection of our wide range of high purity inorganic materials. Many more products from our full range of over 46,000 items are available in our main catalog or online at www.alfa.com. APPLICATION FOR INORGANICS High Purity Products for Crystal Growth Typically, materials are manufactured to 99.995+% purity levels (metals basis). All materials are manufactured to have suitably low chloride, nitrate, sulfate and water content. Products include: • Lutetium(III) oxide • Niobium(V) oxide • Potassium carbonate • Sodium fluoride • Thulium(III) oxide • Tungsten(VI) oxide About Us GLOBAL INVENTORY The majority of our high purity inorganic compounds and related products are available in research and development quantities from stock. We also supply most products from stock in semi-bulk or bulk quantities. Many are in regular production and are available in bulk for next day shipment. Our experience in manufacturing, sourcing and handling a wide range of products enables us to respond quickly and efficiently to your needs. CUSTOM SYNTHESIS We offer flexible custom manufacturing services with the assurance of quality and confidentiality. -
Synthesis of Hydrofluorocarbon Ethers and New Amorphous Fluoropolymers with Cyclic Fluorocarbon Ether Units
Clemson University TigerPrints All Dissertations Dissertations August 2016 Synthesis of Hydrofluorocarbon Ethers and New Amorphous Fluoropolymers with Cyclic Fluorocarbon Ether Units Xiaolin Liu Clemson University, [email protected] Follow this and additional works at: https://tigerprints.clemson.edu/all_dissertations Recommended Citation Liu, Xiaolin, "Synthesis of Hydrofluorocarbon Ethers and New Amorphous Fluoropolymers with Cyclic Fluorocarbon Ether Units" (2016). All Dissertations. 2539. https://tigerprints.clemson.edu/all_dissertations/2539 This Dissertation is brought to you for free and open access by the Dissertations at TigerPrints. It has been accepted for inclusion in All Dissertations by an authorized administrator of TigerPrints. For more information, please contact [email protected]. SYNTHESIS OF HYDROFLUOROCARBON ETHERS AND NEW AMORPHOUS FLUOROPOLYMERS WITH CYCLIC FLUOROCARBON ETHER UNITS A Dissertation Presented to the Graduate School of Clemson University In Partial Fulfillment of the Requirements for the Degree Doctor of Philosophy Materials Science and Engineering by Xiaolin Liu August 2016 Accepted by: Joseph S. Thrasher, Ph.D., Committee Chair Marek W. Urban, Ph.D. Gary C. Lickfield, Ph.D. Stephen H. Foulger, Ph.D. ABSTRACT The main focus of this work is the synthesis of hydrofluorocarbon ethers (HFEs). New synthetic methods and new HFEs were successfully developed. In Chapter 1, new HFEs were synthesized with tetrafluoroethylene (CF2=CF2, TFE) as new engineered fluids. The fluorinated olefins’ addition to alcohols is a more conventional approach to HFEs, and in our group a synthetic method consists of three steps was attempted: a. radical addition of tetrafluoroethylene (TFE) to 2,2-dimethyl-1,3-dioxolane compound; b. hydrolysis of the fluorinated dioxolane compound to make a diol; c. -
Method for Preparing Gaseous Metallic Fluoride
Europaisches Patentamt 0 333 084 J European Patent Office (p) Publication number: A2 Office europeen des brevets EUROPEAN PATENT APPLICATION @ Application number: 89104364.8 @) lnt.Cl.4:C01B 9/08 © Date of filing: 11.03.89 Priority: 16.03.88 JP 60271/88 Applicant: MITSUI TOATSU CHEMICALS INC. 16.03.88 JP 60272/88 No. 2-5, Kasumigaseki 3-chome 16.03.88 JP 60273/88 Chiyoda-Ku Tokyo 100(JP) 16.03.88 JP 60274/88 11.11.88 JP 283749/88 Inventor: Harada, Isao, Mr. 5-7-2, Hikoshima Sakomachi Date of publication of application: Shimonoseki-shi Yamaguchi-ken(JP) 20.09.89 Bulletin 89/38 Inventor: Yoda, Yukihiro, Mr. 6-1-23, Hikoshima Sakomachi Designated Contracting States: Shimonoseki-shi Yamaguchi-ken(JP) DE FR GB IT Inventor: iwanaga, Naruyuki, Mr. 5-7-1, Hikoshima Sakomachi Shimonoseki-shi Yamaguchi-ken(JP) Inventor: Nishitsuji, Toshihiko, Mr. 5-9-6-505, Hikoshima Sakomachi Shimonoseki-shi Yamaguchi-ken(JP) Inventor: Kikkawa, Akio, Mr. M-408, 3-1, Shinakada Nishimachi Shimonoseki-shi Yamaguchi-ken(JP) Representative: Schiiler, Horst, Dr. Kaiserstrasse 69 D-6000 Frankfurt/Main 1(DE) © Method for preparing gaseous metallic fluoride. © The method for preparing a gaseous metallic fluoride is here disclosed which comprises reacting a metal or its oxide with a fluorine gas or nitrogen trifluoride gas, the aforesaid method being characterized by comprising the steps of mixing the metal or its oxide with a molding auxiliary comprising a solid metallic fluoride which does I not react with fluorine and nitrogen trifluoride; molding the resulting mixture under pressure; and contacting the [molded pieces with the fluorine gas or nitrogen trifluoride gas, while the molded pieces are heated. -
Vanadium, Niobium, and Tantalum
SCIENTIFIC CIRCULATIONS LTD. Ill ica$ti>oifrn London, WJL A TEXT-BOOK OF INORGANIC CHEMISTRY VOLUME VI. PART III. In ELBVBN VOLUMES. Medium 8vo. Cloth. Prices are net. Postage extra. A TEXT-BOOK OF INORGANIC CHEMISTRY. EDITED BT J. NEWTON FEIBND, D.Sc., PH.D., F.I.C., Carnegie Gold Medallist. An Introduction to Modern Inorganic Chemistry. By J. NEWTON H. F. V. B.So. FRIEND, D.Sc. (B'ham), Ph.D. (Wurz) ; LITTLE, to Ltd. W. E. S. VOLUME I. (Lond.), A.R.C.S., Chief Chemist Thorium, ; H. V. A. TURNER, D.Sc. (Lond.). The Inert Grases, By BRISCOE, D.Sc. (Lond.), A.R.C.S. A. JAMIESON WALKER, f" The Alkali Metals and their Congeners. By VOLUME II. B.A. F.I.C. i-xxvi +379. 20s. { Ph.D. (Heid.), (Q.U.B.), Pp. I. The Alkaline Earth Metals. By MAY SYBIL BURR (n&e 346. 20s. LESLIE), D.Sc. (Leeds). Pp. i-xxvi + JOSHUA 0. VOLUME III. PART II. Beryllium and its Congeners. By GREGORY, SYBIL D.Sc. B.Sc. (Lond.), F.I.C., and MAY BURR, (Leeds). (PARTPp. i-xxvi + 320. 18s. the Bare Earth Metals. ( Aluminium and its Congeners, including B.Sc. A.R.C.S., Chief Chemist to VOLUME IV. \ By H. F. V. LITTLE, (Lond.), 485. | Thorium, Ltd. Second Petition. Pp. xxviii + 18s. Carbon and its Allies. By B, M. CAVEN, D.Sc. (Lond.), F.LO. V, / VOLUME Edition. i-xxi +468. 18s. I Second Pp. PART I. Nitrogen. By E. B. R. PRIDEAUX, M.A., D.So., F.I.C., and H.