Reporting on Today and Tomorrow’s Energy, Environmental and Industrial Technologies
[1st Featured Article] Smart Community Projects Transforming the Global Energy System
[2nd Featured Article] Intellectual Property Management at NEDO
Perspective on Future Technologies Dai Tamesue
New Energy and Industrial Technology Development Organization Directing the Future Contents Perspectives on Future Technologies
02 Perspectives on Future Technologies Dai Tamesue Changing 04 1st Featured Article Mindsets through Smart Community Technology Projects Transforming the Global Energy System Dai Tamesue 06 Key Word 1 Installing Solar Power Generation (PV) I believe that media has been a catalyst that strengthened the relationship between sports and technology. Without the birth of the technology we call “television,” sports would never have become the kind of industry it is today. 08 Key Word 2 Technology has had a variety of effects on sports, both positive and negative, Distributed Resource Aggregation and I believe that as technology continues to evolve further it will develop a 2nd Featured Article new relationship with sports. For example, with sensors placed on a player’s 12 body, the t-shirt you are wearing could be synchronized with the player’s 10 Key Word 3 Intellectual Property heart rate and the spectator’s experience could be extended beyond just Expansion of the Energy Market in Asia watching sports. Another possibility is related to athletes’ injuries. The actual causes of athletic injuries are often not well known, but in the future the Management at NEDO clothes players wear could be able to read changes in muscle hardness or collect data while sleeping that could be used to predict the possibility of trouble. These technologies could be used to extend the length of player’s career and possibly improve performance as a result. I feel that the sports 16 Easy to Understand! world is already awaiting these technologies. News Release Commentary I also believe once blockchain technology becomes firmly established there will be big innovations that occur in the area of ticketing. Obviously, the Fiberless Thermal Insulator with High Strength evolution of technology has also been affecting sports gear such as equipment and Low Thermal Conductivity Capable of Use at and sportswear. In recent years, the Paralympics have been attracting more High Temperature Developed attention and some players have shared their visions of participating in the Olympics. At the center of this discussion is the emerging question of whether athletic performance is improving as a result of human improvements or 18 After Project Follow Up! improvements in equipment. I believe that it is due to both, and in my opinion it is better to keep the Olympics and Paralympics as two separate events. NEDO Project Success Stories However, I also think it would be good for the world to see a Paralympic Playback History athlete beat an Olympic athlete if only just once. Thanks to technology, the Dai Tamesue boundaries between disabled and healthy people have been narrowed to the Vol 4. Super Head Electronic Technology Born in Hiroshima in 1978. First Japanese point that there is almost no gap between them and a seamless connection sprinter to win a medal in a track event at a Development Promotion Project World Competition. Three-time Olympian. between both sides. I think it is important to recognize how society changes Current Japanese record holder for Men’s when the “mindset” that humans conceive as natural is changed. 400 meter hurdle (as of March 2017). Currently he operates Samurai Co., Ltd., a In this way, technology enables paradigm shifts in human consciousness. By company that works on sports-related projects. The books he has written include making it possible to do things people don't think they are capable of or “Hashiru Tetsugaku (Philosophy of perceive as impossible, technology is profoundly significant in provoking Running)” (Fusosha Publishing Inc.) and “Akirameru Chikara (Power of Surrender)” changes in people’s “mindsets.” (President Inc.). 2017 No.64
Reporting on Today and Tomorrow’s Energy, Environmental, and Industrial Technology “Focus NEDO” is the public relations magazine of the New Energy and Industrial Technology Development Organization (NEDO), introducing the public to NEDO’ s various projects and technology development activities related to energy, environmental and industrial technologies.
02 Focus NEDO 2017 No.64 03 st Solar Power Generation 1 Featured Article Smart Community Projects Distribution
Transforming the Global Generation Transmission Energy System System Operator Thermal Power Generation Transmission Office Distribution “Smart Communities” focus on expanding the use of renewable energy and making the whole society smarter. NEDO has conducted projects both domestically and internationally to demonstrate the systems and technologies necessary to accomplish this transformation. Here you’ll find an introduction to the current situation surrounding smart community development and NEDO’s activities.
Accommodating Distribution Electric Vehicle Wind Power Generation
Residential Area Smart community deals with the introduction Factory of distributed energy including renewable energy, the establishment of bidirectional power grids involving users on the demand side such as households and commercial users, and the efficient control of the balancing between electricity supply and demand.
begun to spread from the end users of the grid system*. In response issues that have been emerging. These result from changes occurring Japanese technology packages combining Japanese technologies. NEDO’s Demonstration Projects Aiming to NEDO is proceeding with the demonstration of technologies to address among business models. However, with the strong recognition that the essential purpose needs Transform of the Structure of Electricity the needs of this new situation. Through such experiences spreading “In the taxi industry, ride-share services originating from the to be to improve local public infrastructure, which is a characteristics Supply and Demand Japanese technology in overseas situations, NEDO is helping Japanese United States have become popular globally. Similarly, in the electric of the solution business, NEDO has been focusing more closely on As Japan progresses towards fully unbundled electric power system by companies to understand the necessity of innovation in this field, and power industry, a system is being built to enable users on the demand the so-called “local company alliance” problem of which local 2020, a big change in the relationship between the supply and demand of NEDO aims for the overseas results to provide feedback that can be side to directly and flexibly share their surplus electric power. These companies to work with and how to engage in business development. electricity is about to occur due to the massive introduction of distributed applied to Japan as well.” are examples of a change happening globally across various Providing matchmaking with such local business partners is also a renewable energy sources like solar power. In North America and NEDO’s demonstration projects have been conducted around the industries. Japan shouldn’t lag behind in this development,” says very important function of NEDO’s demonstration projects. Europe, where unbundling of electric power companies progressed world. In industrialized countries NEDO looks for business models that Morozumi. Based on the points above, this Focus NEDO will introduce the during the 2000s, fixed price purchasing rules to promote the use of apply to areas where the deregulation of the electricity market has NEDO constantly keeps an eye on trends among technology current status and issues surrounding smart community as well as renewable energy using policies such as feed-in tariffs or net-metering to preceded Japan and prove the compatibility of Japanese solutions with businesses competing worldwide, and when changing circumstances NEDO’s effort looking at “the beyond”, focusing on three keywords oblige power companies to purchase energy from renewable sources have overseas technologies through compliance with international standards warrant NEDO always attempts to update the objectives of the that are indispensable when thinking about the future new energy come to an end and new business models are beginning to be explored. from organizations such as the International Electrotechnical ongoing projects accordingly. system: the technical elements of “solar power generation (PV)” and Against this background, NEDO has been performing demonstrations Commission (IEC). Meanwhile in emerging countries NEDO “distributed resource aggregation,” and the emerging market in of supply and demand models for electric power from both technical and encourages institutional reform that makes it easier for Japanese Projecting the Future and Understanding “Asia.” business perspectives under a diverse range of global business conditions technology to enter the market and recruits Japanese companies that will Global Trends in anticipation of the introduction of large volumes of renewable energy. work on technology demonstrations. Currently NEDO is conducting With regards to NEDO’s management system of demonstration NEDO believes that these technical and business models also have the projects globally. projects in the field, it is important to establish alliances with local potential to be deployed in Japan in the future. * Grid system: An electricity system that includes all aspects from electricity business partners not only during the project but also for the Director General of the NEDO Smart Community Department Satoshi production such as generation, transmission, transformation and distribution to maintenance of the system after the demonstration is complete. consumers. Morozumi, who has followed developments in this field for 30 years, Between when people started using the term “smart community” says, “The conventional electric power system which generates large around 2010 and the present, the way of thinking about the expansion amounts of power from centralized generators and delivers it to Responding Quickly to Changing Business of business overseas regarding smart community has changed. When Satoshi Morozumi Models through Overseas Demonstrations Director General and Project Manager consumers unidirectionally is beginning to crumble around the world. the smart community demonstration projects were just getting Smart Community Department Instead, the idea of sharing and using distributed power sources has In the course of conducting demonstration projects, there are some started, NEDO was exploring an approach focused on exporting all- NEDO
04 Focus NEDO 2017 No.64 05 st 1 Featured Article Smart Community Projects Transforming the Global Energy System
SmartKEY CommunityMeasure Developing Technologies Projectto 1 Address Output Fluctuations Installing Solar Power Generation (PV) Improving technologies on prediction, control and WORD 1 operation Project to Address Output Fluctuations in
As PV Continues to Spread in Japan and Overseas, Power Grid System Ohara Solar Power Station For the stable utilization of electricity from renewable energy, the output of which NEDO is Working to Tackle the Problems fluct uates by weather condition, NEDO has been developing prediction technologies and control technologies of energy storage facilities using prediction information. With the introduction of purchase systems of surplus energy from renewable energy (Feed-in Tariff), the NEDO also leverages these technologies for developing a supply and demand spread of solar power generation (PV) systems is accelerating as the cost of such systems declines. To deal with simulation system and demonstrates them in a power grid system on Niijima. In the impact of the large-scale introduction of renewable energy sources such as PV, NEDO is conducting addition, NEDO has been developing and standardizing a remote output control advanced projects that approach the problems from multiple perspectives. system which is obligated to be installed for stable and maximum use of renewable energy. Through these efforts, NEDO aims to manage variability of power output by using technologies on prediction, control and operation so as to contribute to
expansion of renewable energy. The Expansion of PV Installations is Accelerating ■Trends in global cumulative renewable electricity generation capacity and annual installation Azuchiyama Wind Power Station in Japan and Abroad 500 Cumu ati e in ta e ca acity nnua in ta e ca acity 250 The preceding global introduction of wind power generation reached a 200 cumulative installed generation capacity of 432 GW in 2015. In addition, in 400 So ar P nnua in ta e ca acity recent years the cost of PV has continuously declined, and as of 2013 the in nnua in ta e ca acity Measure Development of Large-Scale in Cumu ati e in ta e ca acity 150 worldwide cost was less than $1/w worldwide, leading to the expansion of 300 PV installations in earnest around this time. As for the amount of PV So ar P Cumu ati e in ta e ca acity 2 Energy Storage Systems capacity introduced worldwide since 2010, which is shown in the figure to Lower cost, longer life, and greater safety large- 200 100 the right, the cumulative installed generation capacity has expanded rapidly scale energy storage system and reached 219 GW in 2015. In the future, it is estimated that the introduction 50 of PV, which is easier to finance, will surpass the introduction of wind power 100 Development Project of Large-Scale Energy generation. Storage System In Japan also, because of the effects from the feed-in tariff system launched 0 0 in July 2012, PV has rapidly become popular over the last 5 years, and by the 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2 011 2012 2013 2014 2015 To accelerate the mass introduction of renewable energy sources including PV, it is Lead-acid battery and LIC hybrid energy storage system (Izu Oshima) end of August 2016 the installed generation capacity was 35.79 million kW. Source : GWEC, Global Wind Report Annual Market Update 2015 and IRENA database expected that large-scale energy storage systems will be needed to suppress voltage and frequency fluctuations and provide surplus power storage as a grid system Solving the Problems Facing the Mass Introduction ■Trends in the installation of renewable electricity generation facilities in Japan stabilization measure. of PV through Multifaceted Technologies ＧＷ To realize lower cost, longer life and safer energy storage systems, NEDO has 60 f As part o the “2030 Energy Mix” (the Long-term Energy Supply and So ar P developed various types of energy storage systems, including large-scale hybrid in energy storage systems combining lead-acid storage batteries and lithium ion Demand Outlook for FY2030) presented by the Ministry of Economy, Trade 50 and Industry (METI) in July 2015 laying out the planned composition of ioma capacitors (LIC) and a transportable storage battery system equipped with lithium-ion power sources in Japan it is understood that renewable energy will continue 40 eot erma rechargeable batteries. Additionally, NEDO has verified the effectiveness of these to be introduced in the future, with a target of 7% PV and 1.7% wind power Sma an me ium ca e y ro systems in providing grid system stabilization through demonstrations of these energy Transportable battery system with lithium ion 30 rechargeable batteries (Spain) generation in the national Energy Mix. storage systems as part of actual power grid systems in Japan and other countries.
On the other hand, the output from PV and wind power generation can 20 fluctuate based on factors in the natural environment such as weather, so when introduced in large quantities it becomes difficult to ensure the balance 10 Measure Controlling Supply-Demand between supply and demand across the entire power grid system and results in a problem where grid operation cannot be maintained. For this reason, in 0 an un u ar an u 3 Balance Using EVs a region where the introduction of PV is especially advanced such as Source : METI “Subcommittee for Reforming Systems Related to the Introduction of Stabilizing the power supply system through Kyushu, the utilization of pumped-storage hydro * during Golden Week in Renewable Energy” meeting handouts coordination with electric vehicles 2016 was maximized to avoid the suppression of PV power output. Furthermore in 2017, since the installed PV capacity will be increased, it is Hawaii’s Smart Grid Demonstration Project expected that suppression of PV power output will be necessary at holidays Utilizing Japanese Control Technology to Utilizing EVs (JUMPSmartmaui project) and during the spring and autumn seasons. Also, since the capacity of the Stabilize a Wind Power Generation Grid System transmission lines for transmitting the backward flow of power from the Although the installation of wind power and PV has progressed significantly in Hawaii, 〜Demonstration in Poland〜 EV rapid charge station power distribution system to the power transmission system in the area is the state’s power grid systems have been heavily affected by fluctuations in renewable Like PV, power output from a wind power generation is influenced by the energy supply because each island has its own independent power grid system. Therefore, almost at its limit it is necessary to take measures to prevent new strains on weather so they both pose challenges to power grid system stability. As an EU the grid system as well. member country and under a national policy to increase the installation of by utilizing the electric storage capacity of EVs, NEDO conducted a demonstration project renewable energy, Poland is one of the most advanced countries in terms of 250 To address these issues, NEDO has been developing and demonstrating 500 累積導入量（GW） 年間導入量（GW） that contributed to stabilizing the massive introduction of renewable energy into the grid multifaceted technologies such as power generation prediction and control introducing wind power generation. NEDO has conducted a demonstration system through various methods including demand response and a virtual power plant. project in Poland to achieve the stable operation of the power grid system technologies for variable power sources, large-scale stationary energy while promoting the installation of renewable energy including wind power. 200 With more than 200 households using EVs participating in the project, NEDO aimed to 400 storage systems, and supply-demand balance control systems utilizing The smart grid d太陽光emonstration 年間導入量 project was started in March 2017 and was globally disseminate a model of society where renewable energy and EVs coexist through electric vehicles (EV). aimed at increasing風力 the 年間導入量 amount of connectable renewable energy capacity programs that maximize the use of renewable energy and contribute to the stabilization of while limiting investment in new transmission and distribution equipment 150 300 風力 累積導入量 * Pumped-storage hydro: Using reservoirs located above and below a power plant, and taking measures to prevent overloads at the time of a transmission line the power grid system while also preserving the convenience of EV users. 太陽光 累積導入量 Demonstrations at a busy shopping mall this system generally uses surplus electricity produced during the night to pump accident through the use of Japan’s unique grid stabilization technology water from the lower pool to the upper pool and then uses water discharged from called “SPS (Special Protection Scheme) and energy storage technology. 100 the upper pool to the lower pool to generate electricity when demand peaks during 200 06 the daytime. Focus NEDO 2017 No.64 07 50 100
0 1995 1996 1997 1998 1999 2000 2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 2012 2013 2014 2015 st Right: Ceremony to celebrate the start of 1Featured Article operations with the residents Smart Community Projects Transforming the Global Energy System (Oshawa, Canada) Below: The roof of a house with the solar panels installed (Oshawa, Canada)
Point 1 New installation Smart Communityof batteries for Project KEY houses WORD 2 Distributed Resource Aggregation Three Points Point 3 New Businesses Have Emerged Around the World to Prepare for Point 2 New services Power utilities gathering entering the the Deregulation of the Electric Power Industry and the Increase small-scale household of Renewable Energy Installations users “Distributed resource aggregation,” the process of consolidating energy produced by distributed sources such Sugimoto: In Canada, to address frequent power outages and collect data from those units. Since everyone’s lifestyle differs, it as PV and EVs and utilizing it efficiently, has been gaining more attention lately. We interviewed three project improve the independence of each household by introducing PV was very important to accommodate each resident’s situation. managers and to hear about the current situation and issues related to the topic. and batteries, NEDO has been conducting demonstrations of peak Sugimoto: I realized the importance of understanding how shift control of power demand by power companies. NEDO is also standards differ based on the country. For example, Canada and examining a business model where power companies own these Japan have different standards and that caused us to expend extra systems and rent the roof of each house to install them. This is a time to respond to the situation. I have learned that even if we
From left win-win business model where power companies earn revenue consider certain specifications to be commonplace, they aren’t Yoshiko Yurugi through sales of the electricity while consumers get paid for always applied in other countries. Director & Project Manager, Smart Community Department renting their roofs to the power companies. NEDO Leveraging Foreign Demonstration Results in Kazuyuki Takada Small-Scale Users Are Key, and It Is Important Japan with an Eye towards Revitalizing the Director & Project Manager, Smart Community Department for Each and Every Resident to Understand the Electricity Market in the Future NEDO Value To take advantage of the demonstration results for the Maria Sugimoto While each country has its own issues regarding electric introduction of systems in Japan, what are the expected issues Chief Officer, Smart Community Department NEDO power conditions, what have you found is important to put and future prospects? these innovations into practical use? Takada: By connecting power conditioners, PV, batteries and Takada: I have realized that cultivating a strong awareness and EVs, it’ll get easier to use these distributed energy resources Takada: The state of Hawaii has a plan to supply 100% of electric understanding among local residents is important. In Hawaii, efficiently and realize “distributed resource aggregation.” Ongoing Projects Matched to the Characteristics power using renewable energy by 2045. So the “JUMPSmartmaui fluctuations in crude oil prices are directly reflected in electricity However, the current situation is that you cannot ensure operation of Different Regions Around the World with the project” worked on demonstrating a system to stabilize the costs so both residents and businesses are very sensitive about without confirming the guaranteed performance from each New Business of Power Infrastructure in Mind electric power supply in combination with local EV usage (also their electricity bills. That’s why they have a good level of manufacturer. For example, you cannot benefit consumers unless Recently, businesses called “aggregators,” which act as a see p.7). On the island of Maui, where the electric power system is awareness regarding renewable energy utilization. During the they can connect the devices from different manufacturers, such facilitator to consolidate small- to-medium-scale renewable independent, there have been efforts to solve problems with the project, we had many opportunities to explain the whole concept as a power conditioner the consumer has already purchased and a energy power generation facilities for power companies, have power frequency becoming unstable that arise from the large- of effective utilization of renewable energy. I heard that kids who new EV manufactured by a different company. It is important to entered the electricity wholesale market. That has made it scale introduction renewable energy. Since EVs can be used as listened to our explanations went home and asked their parents build the necessary business environment including the easier to supply electric power through cooperation between batteries as well, it is possible to use them as a virtual power plant why they don’t have EVs at their homes. I believe this was one of standardization development to expand the business in Japan and suppliers and consumers. NEDO has conducted demonstration by using a large number of EVs to store and discharge electric the reasons we could reach our goal for the number of people around the world. tests of these new business models around the world. Tell us power. By transmitting the stored electric power to the grid using EVs sooner than we expected. Yurugi: Besides private power generation on the demand side, I more about the demonstration tests in Hawaii, the United system or using it by household during the peak time for power Yurugi: In the Greater Manchester project, it was difficult to believe “negawatt transactions” will be established where people Kingdom, and Canada, where the role of the electric power consumption in the evening, we can prevent shortages of electric attract cooperation from the residents. The partners involved in make deals for electricity secured against demand restraints. I users is very important. power. the project including representatives of the municipal housing expect there will be issues with how power suppliers secure power Yurugi: In the UK, they have used gas and kerosene for heating authorities visited every single family and explained the merits of capacity and what penalties there are in the event they cannot historically but are facing the problem of large amounts of switching to the heat pump heating system. Many of them said secure a sufficient amount of power. Since the general public will greenhouse gas emissions. Therefore heat pump technology, what they had was sufficient and refused to switch, so a lot of time also be responsible with regards to demand response and negawatt which extracts heat from the air and reduces greenhouse gas and effort was needed to help them understand the benefits of heat transactions, it will be a big issue to help them understand the emissions by half compared to conventional combustion heating pumps and demand response systems. Even after they started to system and its benefits and get them to participate. systems, has drawn attention. A goal of introducing 6.8 million use the systems, in some cases they removed the internet Sugimoto: Although there are differences in climate and heat pumps by 2030 has been set as a part of the fourth round of connector while they were gone for an extended period of time electricity costs between Canada and Japan, we can apply the data the UK’s carbon reduction plans. At the same time, NEDO came and didn’t reconnect it after they came back, meaning we couldn’t from the demonstrations conducted in Canada to Japan through up with an idea to test whether “demand response” could be simulations. By examining multiple models, we’ll be able to find applied by aggregating small-scale users’ electric power. The UK Demonstration system (UK) the most suitable model which enables us to expand the use of the
government and the city of Manchester* showed interest in Coor ination o system in Japan. a ance C at orm ou in area et een u y e a att S a re ator NEDO’s idea, and by using heat pumps installed at 550 households an eman Yurugi: In Japan, the system for distributed resource aggregation ro uction n ta ation o in an area under the management of the city of Manchester, NEDO eat um eat um is still at the review stage. NEDO would like to contribute to the conducted the “Smart Community Demonstration Project in a re ation creation of new businesses in Japan by developing solutions Manchester, UK” to demonstrate a demand response system through NEDO’s projects. requesting users to reduce their usage of electric power in order to suppress power consumption during peak times. Po i att Smart meter eat um a or tion it ot ater tan View of the residential building with heat pumps installed (Manchester, UK) * Greater Manchester Managed by Wigan & Leigh Homes, Daikin Air Conditioning UK Limited (November 2016) Su y i e ectricity mar et eman i e
08 Focus NEDO 2017 No.64 09 st 1 Featured Article Smart Community Projects Transforming the Global Energy System
This is why NEDO is introducing Japanese smart community Smart Community Projecttechnology and demonstrating the viability of a smart and eco- KEY Malaysia friendly industrial park. Demonstrating the World’s First Super Half of the 130 companies in this industrial park are Japanese- WORD 3 Expansion of the Energy Market in Asia Quick-Chargeable EV Bus System affiliated companies, and in this project, NEDO has been The city of Putrajaya, located to the south of the Malaysian conducting demonstrations including improvement of the quality capital of Kuala Lumpur, is a preplanned city designed as a “green of electric power supplies by introducing a distribution automation city”. The development of a new administrative capital where system, an uninterruptible power-supply system (UPS), and a government agencies will be concentrated has been advancing voltage stabilization system; suppressing power consumption and The Energy Situation in Asia through the there as well. To make this city a smart community by improving conserving energy by coordinating demand side management and the efficiency of the urban transportation system, NEDO and the factory energy management system(FEMS); and establishing Lens of NEDO’s Projects city signed an agreement in July 2015 to conduct a demonstration basic infrastructure capabilities such as communications. As the project of a super quick charging system and large-scale (12-meter- Indonesian government has set a goal of generating 23% of power Southeast Asia and South Asia, where the population is growing rapidly, are also regions where energy demand long) EV buses with and cutting-edge batteries on board. In June from renewable energy by 2025, discussions to promote energy has been increasing rapidly. NEDO has been conducting projects that can lead to establishing new business 2016, NEDO modified the agreement to include the demonstration conservation have become more active. NEDO and the Ministry models in these emerging markets in Asian countries. Here are some of NEDO’s current efforts and outlook. of the world’s first large-scale double decker EV bus system, of Energy and Mineral Resources of Indonesia have reached an which has more transportation capacity than the single deck bus agreement to build a collaborative relationship between the system. project contractors and Indonesian state-owned power company Putrajaya, Malaysia Since the double decker bus has a higher transportation capacity when conducting the project. ▶Project overview: operating single and double per road area and per driver, they are being introduced in densely deck EV buses on major arterial routes, populated regions including Malaysia and other ASEAN installing and demonstrating a super rapid countries. However, switching to EVs has been considered too India Panipat, India charging system, establishing and Cooperation through Both Providing demonstrating monitoring systems for the difficult as the weight of the vehicle with a battery on board ▶ Technology and Building Capability Project overview: improving supply reliability, quality and charging status of batteries and exceeds the weight limit. In this project, NEDO is demonstrating reducing power distribution loss, providing bus operational conditions that it is possible to solve the problems of weight and operating EV In Panipat, Haryana, located about 90 kilometers north of the operational know-how ▶Project period: FY 2015-FY 2019 (5 years) buses just like diesel buses by combining EV buses equipped with Indian capital of New Delhi, NEDO has been conducting a project ▶Project period: FY 2015-FY 2018 (4 years) to provide technology related to smart grids, which are power ▶Contractors: Toshiba Corporation (batteries, a battery with an appropriate capacity on board with a super quick ▶ Contractors: Fuji Electric Co., Ltd., Sumitomo monitoring systems, etc.), PUES Corporation charger, creating a system capable of running for about 30 transmission networks that efficiently control the balance between Electric Industries, Ltd. (smart grid), THE (EV buses), Hasetec Corporation (super kilometers with 10 minutes of charging time. power supply and demand using ICT, and operational know-how Power Grid Solution Ltd. (capacity building) rapid chargers), Oriental Consultants Global By utilizing Japanese technology NEDO aims to spread this on the Japanese power distribution system to power distribution Co., Ltd. (economical evaluation, etc.) urban transportation package throughout the entire ASEAN area companies in India. This is also one of the fourteen “Smart Grid in addition to making the urban transportation system in Putrajaya Pilot Projects” led by the Ministry of Power, Government of India. more efficient and smarter through the use of IoT. In India, electricity theft and power outages happen frequently, and the power distribution loss, the amount of electricity lost during distribution, is more than seven times as high as in Japan. Indonesia To address these specific issues, NEDO has been conducting Demonstrating How to Make Industrial demonstrations for solutions focused on both technology and Parks Smarter and More Eco-Friendly education. An agreement has been reached between NEDO and In Indonesia, NEDO has been conducting a smart community the Ministry of Finance, Department of Economic Affairs, demonstration project in Suryacipta industrial park in the city of Government of India, the Ministry of Power, Government of Java, Indonesia Karawang, located approximately 50 kilometers east of the India, and the Power Department, Government of Haryana State ▶Project overview: improving the quality of Indonesian capital of Jakarta. In this country, where the high level to establish a project scheme where project contractors provide electric power supply, suppressing the of economic growth is continuing, the growth in energy demand know-how to the local power distribution companies. electric power demand and realizing the has been remarkable. In order to establish a “sustainable society” NEDO aims to contribute to make Indian power grids smarter, energy saving, establishing the basic infrastructure balancing economic and environmental concerns, developing an demonstrate the effectiveness of Japan’s advanced smart grid- advanced energy utilization system is an urgent issue. Especially related technologies, disseminate Japanese technology, and serve ▶Project period: FY 2012-FY 2017 (6 years) in the industrial park, where a large number of industrial sectors as a stepping stone to help Japanese companies expand their ▶ Contractors: Sumitomo Corporation, accounting for approximately one-third energy consumption are business in India. Mitsubishi Electric Corporation, Fuji Electric Co., Ltd., NTT Communications Corporation, concentrated, the growth in energy consumption is significant. Sumisho Machinery Trade Corporation
To understand the present and future of the smart community business June 8 (Thu.) - 9 (Fri.), 2017 supply of clean electric power is a very important issue. In order to start working quickly on finding solutions for the Tokyo Big Sight Creating Smart Communities is a (Tokyo International Exhibition Center) unique challenges of each region, NEDO has conducted Smart Community Summit 2017 Future Challenge demonstration projects focusing on preplanned cities and NEDO and the Japan Smart Community Alliance (JSCA) will jointly host and With Special Circumstances Not Found industrial areas where it is relatively easier to introduce smart organize the “Smart Community Summit 2017.” At the Summit, the most up-to- city-related systems and technologies. In Asia, many of the date information on power systems from Europe, the United States and Japan will in the West electricity businesses are run by state-owned companies, and it be shared through a keynote lecture. The summit also features three sessions - In Southeast Asia and South Asia, although electric power sometimes needs to deal with the dual structure of central “Countermeasures for PV”, “New Energy Business Players”, and “Southeast Asia demand has been increasing in line with economic growth, power governments and local governments. Also, multiple government supplies have not been sufficient to meet the demand. Also, the agencies may be involved so it tends to take longer to make and India as an Emerging Energy Market” – in which lectures and panel discussions level of power distribution loss due to frequent power outages and arrangements for the project. To execute projects, negotiation by experts from Japan and overseas will be held. electricity theft is high, and rapidly growing urban areas face capabilities are required as well as technological capabilities so challenges from air pollution issues and traffic jams. To sustain NEDO has been promoting projects by assuming the role of the http://www.nedo.go.jp/english/event_20170327.html continuous economic growth in these countries, providing a stable central point of contact for the administrative agencies as well.
10 Focus NEDO 2017 No.64 11 nd 2 Featured Article Intellectual Property Management at NEDO
Intellectual Property Basic Policy for the Management of Intellectual Property Management at NEDO The two pillars of the “NEDO Intellectual Property Policy” are “intellectual property agreements” and “intellectual property steering committees” As part of the management strategy to maximize the effectiveness of technology development project (NEDO project) NEDO’s management of intellectual property is positioned as improving the effectiveness of the implementation of the project, a implementation, NEDO has promoted and strengthened strategic initiatives in intellectual property (IP). You’ll find a foundation to smoothly accomplish technology development different policy more suitable for a given project may be developed. the views for the management of intellectual property by NEDO (Technology Strategy Center’s Standardization and with a wide range of organizations. To implement projects NEDO gathers knowledge and promotes the optimal management Intellectual Property Unit) and some details of specific activities. smoothly, NEDO publishes the “Basic Policy for the Management of intellectual property to establish the mechanism enabling more of Intellectual Property in NEDO Projects (NEDO Intellectual effective implementation of the intellectual property strategy toward Property Policy)” at the time when posting public solicitations. the exit. The first version of the “NEDO Intellectual Property Policy” was “Although NEDO itself doesn’t conduct technology development developed in December 2010, and it has been applied to all NEDO nor create intellectual property, NEDO can review NEDO projects projects conducted since 2013. Later, as a result of the development ■ NEDO’s Intellectual Property Policy Development Process as a whole and make a calm determination about what direction to of the “Guidelines for Intellectual Property Management in proceed in. So the staff of the Standardization and Intellectual Government-commissioned Research and Development” by METI NEDO has applied the Japanese Bayh-Dole Act since 1999 Intellectual property rights belong to the participants of NEDO th Property Unit always focuses on maximizing the effectiveness of in 2015, NEDO has currently been using the 4 version of the projects: supports commercialization Daiki Sadamitsu the implementation of NEDO projects and promotes the “NEDO Intellectual Property Policy (September 2015 Revision).” ▼ Chief Officer, Standardization and Intellectual management of intellectual property,” says Daiki Sadamitsu, Chief The “NEDO Intellectual Property Policy” has two main pillars. Property Unit Officer of the Standardization and Intellectual Property Unit. To do The first one is to develop “intellectual property agreements” A wide range of organizations from the academic, business, and Technology Strategy Center (TSC), NEDO so, the Unit works with the relevant project management office and between NEDO project participants governing how to handle government communities participate in NEDO projects starts examining the most appropriate and effective ways to handle intellectual property. In the agreement, the rules are set out in terms ▼ intellectual property rights several months prior to the launch of a of maintaining of confidentiality, attribution of results from the What is the “Japanese Bayh-Dole Each participant has different views on how to handle intellectual project to support it. project, licensing of project results, and so on. property resulted from NEDO projects Act”? “The purpose of a NEDO project is not to file a lot of patent The second pillar is to maintain “intellectual property steering NEDO projects are divided into two types of activities – contracted applications. To achieve NEDO’s ambitious technology committees” as the implementation mechanism for the management ▼ projects and grant-based projects. For contracted projects, NEDO development goals and to commercialize the results of NEDO of intellectual property. The role of the steering committee is to It is necessary to set rules for the handling of intellectual property applies Article 19 of the Industrial Technology Enhancement Act, projects in the future, it is important to fully consider many issues discuss and determine how to handle intellectual property in their resulted from NEDO projects at the very beginning of the project the so-called “Japanese Bayh-Dole Act,” which allows companies including open and closed strategies while promoting the project. associated project. ▼ or universities that performed research and development (R&D) To accomplish this, we work with the associated project As a general rule, terms will be set based on the 4th version projects with the government funding to own the intellectual management office to support the management of the project,” says “Basic Policy for the Management of Intellectual Property in NEDO of the “NEDO Intellectual Property Policy”. However, taking Projects” developed in 2010 property rights resulted from the projects with certain conditions. Maki Nakahara, another Chief Officer of the Unit. into consideration the context of the project and with the aim of (currently the 4th version after multiple revisions) Originally, it was based on the Bayh-Dole Act (formally known as the Patent and Trademark Law Amendments Act), a US law established to promote commercialization during a period of ■ Patterns in the Application of the Intellectual Property Policy reduced international economic competitiveness in the late 1970s, The Background of the Establishment of the Case A Case B Case C which enabled patents created as a result of government-funded Bayh-Dole Acts in the US and Japan R&D activities to be the property of the companies or universities As a basic principle, the intellectual property As a basic principle, licensing of the When a project is focused on early-phase that conducted the R&D activities. from a project is consolidated and assigned to project results is permitted between research and its results may be needed For many years in Japan as well, patents and other intellectual US Bayh-Dole Act Japanese Bayh-Dole Act a single Participant X who serves as a “hub” to participants not only in the same research for use in a future successor project, property rights created through government-funded R&D projects provide a strong base for the project structure. theme but also across different research researchers can license their results to belonged to the government. However, in the 1990s, Japan faced In the late 1970s, the international In 1999, at the Council for Industrial competitiveness of the US economy was Competitiveness hosted by the Prime This allows all the project participants to conduct themes. This allows to utilize results participants in following projects as a major issues related to strengthening the competitiveness of declining and the bill was proposed by a Minister, the private sector made research and generate intellectual property from a single research theme throughout principle. Japanese industries, and a bill including the Japanese Bayh-Dole Republican lawmaker and a Democratic recommendations regarding the release of lawmaker in a bipartisan manner. the government-owned patents to using the consolidated accomplishments, the entire project and maximize the Act based on the US Bayh-Dole Act was enacted and the new law ▼ businesses. To enhance the industrial supporting the project outcomes and leading to potential results of the project as a whole. has come into force from October 1999. As a result, NEDO also has In 1980, the Bayh-Dole Act (the Patent and competitiveness, the government decided to commercialization by each participant. been applying the Japanese Bayh-Dole Act to NEDO projects. Trademark Law Amendments Act) was implement a new measure based on the US enacted to award intellectual property rights Bayh-Dole Act. eme eme eme eme ea in ea in o o in o o in including patents resulted from government- ▼ u Partici ant u Partici ant eme eme ea in o o in funded R&D projects to project performers. On October 1, 1999, the “Act on Special u Partici ant re earc re earc re earc roject roject roject roject roject roject Aiming to Maximize the Effectiveness ▼ Measures Concerning Industrial Patents awarded to universities increased Revitalization” was put into effect, a,ba,b ee of NEDO Project Implementation aa dd a,b e and technology development by private including a system (the so-called Japanese a d a,b,a,b,cc companies was accelerated. The US Bayh-Dole Act) that enables commissioned a,b,c a,b,a,b,ee A wide range of organizations from the academic, business, and economy regained its competitiveness researchers to retain rights to inventions a,b,e government communities are involved in NEDO projects, and through new venture creation, etc. developed through the R&D using government funding under certain bb ee perspectives on intellectual property vary substantially based on conditions. b e each of their positions. In response, the Technology Strategy ▼ eme eme Center’s Standardization and Intellectual Property Unit supports To make the Japanese Bayh-Dole Act a eme icen in icen in permanent system, it was transferred to icen in the management of intellectual property with the objective of enforcement under the Industrial ccc fff smoothly facilitating the promotion of NEDO projects and resulting Technology Enhancement Act (enforced c,dc,dc,d ccc from August 6, 2007). i cu ion i cu ion i cu ion technology applications thereafter so the organizations involved don’t have disagreements or conflicts regarding the intellectual property. * a-f are project participants
12 Focus NEDO 2017 No.64 13 nd 2 Featured Article Intellectual Property Management at NEDO
Supporting Integrated Exit Strategies Building Bridges from Results to Applications through “Patent Matching” through Survey and Matching Services Introducing NEDO’s technology seeds through participations in intellectual property exchange meetings around Japan A new service NEDO has been providing since 2015 is “patent “Agreement for the Promotion of Next Generation Industries” NEDO has been conducting various activities regarding intellectual property beyond just the support and enhancement of matching.” With the agreement of the patent holders, the members focused on the further promotion of patent matching. intellectual property management for NEDO projects. Flagship activities include the “intellectual property usage survey of the Standardization and Intellectual Property Unit work to “NEDO attended a lot of intellectual property events - eight times (Bayh-Dole survey)” and “patent matching” services. coordinate with local municipalities and introduce patented in FY2015 and five times in FY2016 - conducted by local technologies generated through NEDO projects to small and municipalities including the cities of Kawasaki, Aomori in Aomori Intellectual Property Rights in medium-sized enterprises (SMEs). Prefecture, Hamamatsu in Shizuoka Prefecture, Okaya in Nagano ■ Relationship between Intellectual Property Rights In addition to taking advantage of the intellectual property events Prefecture, and Kitakyushu in Fukuoka. NEDO asks the local Contracted Projects and Industrial Property Rights to introduce the patents to a large number of SMEs, NEDO also municipalities for information on the local needs in advance, and Intellectual property rights resulted from NEDO’s contracted works with the businesses individually by listening to the strengths tries to introduce patents tailored to meet the characteristics of each nte ectua projects include industrial property rights such as patent rights, Co erin t e Pro erty i t and needs of each company to explore and recommend potential community,” says Sadamitsu. copyrights, and know-how. As explained on page 12, under the re i tere o ject technology seeds suited to the company’s situation. terms of the Japanese Bayh-Dole Act the rights to intellectual n u tria In June 2016, NEDO and Kawasaki City officially signed an Pro erty i t etc
property developed through NEDO projects in principle belong to e u te rom t e outcome o n u tria roject contracte y the project participants under certain conditions. However, Pro erty i t icen in ne otiation tec no o y artner i etc project participants are required to report to NEDO when they file Co yri t applications for, register, transfer, and use their intellectual Patent property rights. See o er ar e cor oration uni er itie etc Sma an me ium enter ri e S i t to recei e “NEDO used to require participants to report the necessary ti ity mo e ri t in u tria ro erty ri t no o Sur ey re on e Pre entin tren t nee information by submitting paperwork, but to reduce the ● ntro ucin t e ee o en nterme iation ● administrative burden and improve operational efficiency NEDO nter ie un er tan in nee Pre entin nee e i n ri t e ore t e ● has allowed them to report those aforementioned four items oration recommen ation o ee c o e ice recommen ation ac ui ition ir arty through an online system since October 2015. We encourage o a ri t o re on e icen in nte rate circuit e ore urin a ication a ai a e oca munici a itie *1 ayout e i n ri t inancia in titute etc NEDO project participants to make use of the information page inc u in coor inator on NEDO’s website,” says Director of NEDO’s Asset Management Plant breeder’s ot un er ir arty Pre entin Cooperation n er tan in t e con i eration icen in NEDO’s seeds in ormation on S Department Susumu Kubo. ri t o i e
*1 Information on submitting intellectual property rights-related reports and ir arty applications through the online system icen in arro in o n t e ee not a ai a e http://www.nedo.go.jp/itaku-gyomu/chizai_tsuuchi.html (Japanese) n er tan in t e ee i e y to matc t e nee o S
Local Municipality Interview! Kawasaki City x NEDO Using the “Bayh-Dole Survey” to Understand the State of Patents Revitalizing the Local Economy through Support for Survey uncovers the status of utilization of approximately 20,000 patents Intellectual Property Matching
The “Survey on Utilization of Patents” (hereafter referred to as ■ Results of the Survey on Utilization of Patents Yoshiji Kimura the “Bayh-Dole Survey”) is a joint effort administered by the (Bayh-Dole Survey) Manager in charge of Open-innovation Promotion, Planning Section, Economic and Labor Affairs Bureau, City of Kawasaki NEDO has been invited to intellectual property events Standardization and Intellectual Property Unit and the Asset c uire or e en i e ur o e Management Department. The Bayh-Dole Survey is conducted in Commercia i e y hosted by local municipalities including Kawasaki City. What t e atent o er What is the motivation behind starting to support kind of roles do you expect NEDO to serve? order to understand the utilization of approximately twenty- thousand patents generated as outcomes of NEDO projects since intellectual property matching? We expect NEDO to utilize information from a wide range of P anne the Japanese Bayh-Dole Act was established. P anne to icen in to a t ir arty commercia i ation y Kawasaki City is known as a “manufacturing town” and many technical fields and network with large corporations to help inc u in cro icen in t e atent o er SMEs are gathered here. Some of the local companies have been revitalize local economies. The efforts of Kawasaki City have been NEDO is trying to reduce administrative burdens for project participants by providing notifications of the procedures that must trying to expand their business; for example, companies doing earning the attention of other local municipalities as the so-called o re on e processing and assembly work as subcontractors have been trying “Kawasaki Model.” What we can do on our own is limited, but we be performed for NEDO (including reports at the time of application and registration) and drawing attention to points in the to create their own products and enter new business areas. So we would like to support the revitalization of not only Kawasaki City reporting process that may require special attention. thought about the ways we could help them as a city and started to but also local economies around the country through joint efforts etaine a re earc support intellectual property matching in FY2007. with NEDO. In addition, as part of the Bayh-Dole Survey, a survey focusing icen e to a t ir arty an e e o ment on patents which are either already registered or in the process of inc u in cro icen in outcome What kind of matching do you support specifically? it o i i ity o registration is conducted annually to understand the actual state of commercia i ation As an example, some intellectual property such as patents held by application from the perspectives of commercialization by the large corporations may not be used because it doesn’t match the Commercia i ation a an one scale their business operates at in the market but could be utilized patent holder, licensing to others, and prevention of technology development by others, The results are published on NEDO’s by SMEs. I believe that it is very important to have large *2 etaine a re earc an e e o ment outcome corporations, research organizations and SMEs in the city website (see the graph to the right). it out o i i ity o commercia i ation collaborate with each other. To serve in the role of bridging them, *2 Usage of Bayh-Dole based Research and Development Outcomes http://www.nedo.go.jp/jyouhoukoukai/shisankanri_chitekizaisan.html Survey sample included 16,949 patent applicants and rights holders regarding we need to understand each party’s position and needs so we can (Japanese) 13,391 patents registered or with applications pending as of October 1, 2016. deal with them appropriately. We would like to support them in a (18,639 total responses including blank responses and multiple answers) way that the SMEs can take advantage of their own strengths. A scene from an intellectual property Mr. Kimura of Kawasaki City (right) and matching event Mr. Sadamitsu of NEDO (left)
14 Focus NEDO 2017 No.64 15 Easy to understand! Featured Accelerating Energy Conservation Further News Release Technology Reducing Unused Thermal Energy News Release Through the economical reduction, reuse, and recycling of unused thermal energy and further 13th of February 2017 improvements to energy efficiency throughout the society, NEDO aims to create a new industry Fiberless Theral Insulator with High Strength and focusing on new energy conservation technologies. ommentary Low Thermal Conductivity Capable of Use at High Temperature Developed C A special feature that aims to make news releases full of - Energy Consumption Reduced by Approximately jargon, technical terms and difficult technologies easier 38% through the Combination of Low Thermal Here are the key points! to understand by focusing in on the important points. Conductivity and High Strength - This conveys NEDO’s state-of-the-art technological A high-strength, high-performance insulation The new material does not include RCF material which can be used at high temperatures (refractory ceramic fiber), which is designated as achievements and activities with an easy-to-understand and possess low thermal conductivity while a specially-controlled substance under regulatory explanation. maintaining high strength was developed. supervision which has restrictions on use.
Electricity consumption was reduced by 38% The material has a thermal conductivity of 0.25 compared to a furnace using conventional W/mK or lower, a compressive strength of 10 MPa insulating firebricks! or higher, and can be used at temperatures as high as 1,450°C so it can be used as lining materials News Release for industrial furnaces just like conventional Fiberless Thermal Insulator with High Strength and Low Thermal insulating firebricks. Conductivity Capable of Use at High Temperature Developed - Energy Consumption Reduced by Approximately 38% through the Combination ◆ of Low Thermal Conductivity and High Strength - Commentary
16 Focus NEDO 2017 No.64 17 Project Follow Up! Playback NEDO History The results of NEDO projects are utilized in manufacturing processes used by companies and final products available for consumers. In this within the electron beam are scattered by the glass of the error, a new calculus equation to quickly and accurately series, we look at untold stories of how technology development projects mask and the reflected backscattered electrons prevent figure out the electron dose control in accordance with scaled the high, difficult wall to successful commercialization and what copying of the line pattern design. the write time required was developed. As a result, it PROJECT came after, summarizing past articles in “NEDO Project Success Stories.” An accelerating voltage of at least 50 kV is required became possible to reduce the dimensional deviation for electron beams capable of sharp, high-definition caused by the proximity effect to 2 nm or less even if A view of an electron beam mask writer “EBM” main body pattern formation. However, when injecting electrons at an electron beam at a high accelerating voltage of 50 kV 50 kV, the area of the resist affected by backscattering, was used, compared to around 200 nm without correcting SUCCESS STORIES spreads to around 30 μm. The sections with denser circuit the proximity effect. patterns receive more backscatter resulting in the lines In addition, it was designed in a way so that the Vol 4. drawn becoming thicker. It is called the “proximity correction calculation for a part of the mask patterns Super Head Electronic Technology effect” because sections in the design that are close to where the circuit patterns will be written later can be Development Promotion Project each other are affected (see Figure 2). performed while another part is being written on the In order to use highly accelerated electrons to write mask. The design also allows the calculation results to be Electron Beam Mask Writer Boasts a miniaturized pattern in higher definition with less processed quickly and in large volume in electric circuits. Overwhelming Global Market Share backscatter of electrons, it is necessary to deal with the Through these efforts, a writer which writes quickly as it “proximity effect” caused by the backscattering. The calculates the correction of the dosages almost in real- dimensional variability caused by the proximity effect time was created and the resulting high-speed, high- What is the “Super Head Electronic Technology from an accelerating voltage of 50 kV can be as high as accuracy mask writer was successfully commercialized. Development Promotion Project”? 200 nm, which is a critical problem for manufacturing masks when the target fabrication dimension of an LSI In FY1995 when the project started, the further miniaturization Achieving a World Market Share of semiconductor integrated circuits (Large-Scale Integration: design mask is 180 nm (720 nm on the mask). of Almost 100% and Becoming Besides this challenge, in the course of designing the LSI) was essential to the development of high-performance Essential to the Information and information communication equipment to support our mask writer that can realize smaller feature size and advanced information society. However, to accomplish the higher operation speed of LSI circuits, there were also Communication Society smaller feature size and higher integration in LSIs, there were many other challenges to solve in order to enable high- With the outcomes from the continuous development a lot of technical challenges to deal with in order to produce speed, high-accuracy writing, so the technologies the of various new technologies including NEDO high-definition masks. Therefore, this NEDO project was NEDO project worked on covered a wide range. projects, NuFlare Technology’s new products made launched and ran through FY2001 to support the improvement a huge difference on performance compared to their of “lithography technology,” which is the core technology used Conquering the “Proximity Effect” competitors’ and now the world market share for their in the semiconductor production process. to Write Circuits with Higher equipment is almost 100%. It can also be said that their Definition high-definition mask exposure technology has enabled smartphones and tablets to become smaller and lighter The “Super Head Electronic Technology Development of finer circuit pathways on the same-sized chip to do Takayuki Abe, senior specialist of NuFlare Technology’s with more advanced functions. In addition, behind the Promotion Project” was a NEDO project focused so. In the 1990s, Etec Systems, Inc. in the U.S. led the Marketing Department, was the one who tackled the popularization of these small communication devices, on the R&D of the “electron beam mask writer” world in commercial fine electron beam mask writers solution to the “proximity effect” issue after originally it is essential to maintain and enhance the high speed which enabled the writing of more miniaturized and captured more than 90% of the world market at one working on this research for a long time. A new algorithm and high capacity of server computers, and most server circuits in preparation for smaller feature size and point, but even using their equipment it was difficult to for real-time control of the dose of the electron beam computers contain LSI circuit technology developed by higher integration in LSIs. NuFlare Technology, Inc. achieve the next generation of miniaturized circuits. To for the “direct-write” approach had been previously NuFlare Technology. (Toshiba Corporation and Toshiba Machine Co., Ltd. conquer the difficulties of miniaturizing semiconductors developed and the precision of the technique had been “It was our first commercialization effort and we felt verified in computer simulations. So, in this project, the A photomask at that time), thanks to the results of this project to further, NEDO’s “Super Head Electronic Technology huge pressure too. But because of our hard work we (Picture of a mask used for drawing results from that research were applied to develop the position calibration) enable ultra-microfabrication, has now achieved Development Promotion Project” was started in FY1995 now have the biggest market share in the world and more than a 90% share of the world market for this with the aim of quickly developing a cost effective and electron beam mask writer. After going through trial and we are very satisfied with it,” says Yoshiaki Hattori of technology. This accomplishment has supported the high-precision next-generation “electron beam mask NuFlare Technology’s Mask Lithography Engineering ectron eam e o ure development of lightweight, compact, high-performance writer” with the ability to write a high-definition mask Department. information and communication equipment. pattern in a short period of time. e i t ayer eta ayer Pattern ritin Starting with the success of developing an electron a beam mask writer for 180 nm critical dimension design Photomasks Enabling the Mass Challenges Standing in the Way node LSIs in 1998, to keep up with the state of annual Production of Highly-Miniaturized of Developing a Next-Generation ma e e e o ment LSI circuit production miniaturization advances, the most up-to-date current model has realized a current density e i t tri in Circuits for Digital Equipment “Electron Beam Mask Writer” of 1,200 A/cm2, uses a three-stage objective deflection tc in The unprecedentedly high-integration and further The companies participating in the project, Toshiba Figure 1 architecture, and incorporates resist heating correction refinement of semiconductor integrated circuits has Corporation and Toshiba Machine Co., Ltd. (NuFlare Principles of Creating a Photomask capabilities for the 7 nm technology node LSI circuits. supported the popularization of digital information Technology, Inc. now following a company split-up), had While most semiconductor-related equipment has a short The proximity effect is a phenomenon that changes the and communication equipment such as smartphones been working on the development of technology to enable dimension of a pattern being drawn corresponding to lifespan due to the development of new technologies, and tablet PCs. LSIs are electronic circuits that have the writing of smaller feature size circuits since the 1970s. surrounding pattern density, caused by backscattered electrons. In the case that electron beams are exposed just as the LSI circuit data shown on the left NuFlare Technology’s miniaturized mask processing a large number of electronic components including Originally, there was a circuit writing technology called below, it will show up as the actual resulted written pattern on the right below – the upper middle part where the pattern density is higher will be thicker, and the lower middle part technology has maintained its position as the world’s resistors, capacitors, diodes, and transistors integrated on “direct-write,” a method of writing circuits directly onto where the pattern’ s density is lower will be thinner. most advanced technology for more than ten years. a semiconductor substrate such as silicon, and the size a silicon wafer, but the mass-production of smaller LSI S ata o ure attern e u te ritten attern NuFlare Technology has been conducting R&D for of the circuits are already in the nanometer range (one circuits was enabled by using a “photomask” containing the next generation of machines so their electron beam Patternin ac cattere nanometer = one billionth of a meter). The “photomask”, the original circuit pattern and exposing it to electrons to e ectron mask writer will continue to support the development of the term for the “photographic negative” equivalent copy the design onto the silicon wafer. As LSI circuits many information and communication equipment in the future. used in the creation of LSI circuits, is what enabled the achieved smaller feature and higher integration, it was ectron eam mass-production of those ultra-miniaturized circuits (see expected that more minute writing would be available njecte e ectron In “NEDO Project Success Stories”, we interview ac cattere Figure 1). by increasing the accelerating voltage of the electron e i t e ectron the developers including corporations involved in To improve the performance of an LSI circuit, it is beam used to write the circuit pattern on the photomask. e the project and post success stories on the website. necessary to increase the degree of integration of the However, it needed to overcome a challenge called the a ate circuit, which requires technology that allows the writing “proximity effect,” a phenomenon where the electrons Figure 2 ac cattere e ectron http://www.nedo.go.jp/content/100799089.pdf What is the “proximity effect”?
18 Focus NEDO 2017 No.64 19 Domestic Offices
● Head Office ● Kansai Branch Office MUZA Kawasaki Central Tower, 16F-20F Umeda Dai Building, 6F, 3-3-10 1310 Omiya-cho, Saiwai-ku Umeda, Kita-ku Kawasaki City, Kanagawa 212-8554 Japan Osaka 530-0001 Japan Tel: +81-44-520-5100 Tel: +81-6-6341-5403 Fax: +81-44-520-5103 Fax: +81-6-6341-5405
Overseas Offices
● Washington, D.C. ● Europe ● Beijing 1901 L Street, N.W., Suite 720 10, rue de la Paix 75002 2001 Chang Fu Gong Office Building Washington, D.C. 20036 U.S.A. Paris, France Jia-26, Jian Guo Men Wai Street Tel: +1-202-822-9298 Tel: +33-1-4450-1828 Beijing 100022, P.R. China Fax: +1-202-822-9259 Fax: +33-1-4450-1829 Tel: +86-10-6526-3510 Fax: +86-10-6526-3513 ● Silicon Valley ● New Delhi 3945 Freedom Circle, Suite 790 9th Floor, Hotel Le Meridien ● Bangkok Santa Clara, CA 95054 U.S.A. Commercial Tower, Raisina Road 8th Floor, Sindhorn Building Tower 2 Tel: +1-408-567-8033 New Delhi 110 001, India 130-132 Wittayu Road, Lumphini Fax: +1-408-567-9831 Tel: +91-11-4351-0101 Pathumwan Fax: +91-11-4351-0102 Bangkok 10330, Thailand Tel: +66-2-256-6725 Fax: +66-2-256-6727
s Cent o e o s C t n n e tt ne o o en s n e t June 2017 (1st Edition)