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Progresses in Synthesis and Application of Sic Films: from CVD to ALD and from MEMS to NEMS
micromachines Review Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS Mariana Fraga 1,* and Rodrigo Pessoa 2,* 1 Instituto de Ciência e Tecnologia (ICT), Universidade Federal de São Paulo (Unifesp), São José dos Campos SP 12231-280, Brazil 2 Laboratório de Plasmas e Processos (LPP), Instituto Tecnológico de Aeronáutica (ITA), São José dos Campos SP 12228-900, Brazil * Correspondence: [email protected] (M.F.); [email protected] (R.P.) Received: 2 August 2020; Accepted: 20 August 2020; Published: 24 August 2020 Abstract: A search of the recent literature reveals that there is a continuous growth of scientific publications on the development of chemical vapor deposition (CVD) processes for silicon carbide (SiC) films and their promising applications in micro- and nanoelectromechanical systems (MEMS/NEMS) devices. In recent years, considerable effort has been devoted to deposit high-quality SiC films on large areas enabling the low-cost fabrication methods of MEMS/NEMS sensors. The relatively high temperatures involved in CVD SiC growth are a drawback and studies have been made to develop low-temperature CVD processes. In this respect, atomic layer deposition (ALD), a modified CVD process promising for nanotechnology fabrication techniques, has attracted attention due to the deposition of thin films at low temperatures and additional benefits, such as excellent uniformity, conformability, good reproducibility, large area, and batch capability. This review article focuses on the recent advances in the strategies for the CVD of SiC films, with a special emphasis on low-temperature processes, as well as ALD. In addition, we summarize the applications of CVD SiC films in MEMS/NEMS devices and prospects for advancement of the CVD SiC technology. -
Fluorinated Polymers As Smart Materials for Advanced Biomedical Applications
polymers Review Fluorinated Polymers as Smart Materials for Advanced Biomedical Applications Vanessa F. Cardoso 1,2,* ID , Daniela M. Correia 3,4, Clarisse Ribeiro 1,5 ID , Margarida M. Fernandes 1,5 and Senentxu Lanceros-Méndez 4,6 1 Centro/Departamento de Física, Universidade do Minho, 4710-057 Braga, Portugal; cribeiro@fisica.uminho.pt (C.R.); margaridafernandes@fisica.uminho.pt (M.M.F.) 2 CMEMS-UMinho, Universidade do Minho, DEI, 4800-058 Guimaraes, Portugal 3 Departamento de Química e CQ-VR, Universidade de Trás-os-Montes e Alto Douro, 5001-801 Vila Real, Portugal; [email protected] 4 BCMaterials, Basque Center for Materials, Applications and Nanostructures, UPV/EHU Science Park, 48940 Leioa, Spain; [email protected] 5 CEB—Centre of Biological Engineering, University of Minho, 4710-057 Braga, Portugal 6 IKERBASQUE, Basque Foundation for Science, 48013 Bilbao, Spain * Correspondence: [email protected]; Tel.: +351-253-60-40-73 Received: 11 January 2018; Accepted: 6 February 2018; Published: 8 February 2018 Abstract: Fluorinated polymers constitute a unique class of materials that exhibit a combination of suitable properties for a wide range of applications, which mainly arise from their outstanding chemical resistance, thermal stability, low friction coefficients and electrical properties. Furthermore, those presenting stimuli-responsive properties have found widespread industrial and commercial applications, based on their ability to change in a controlled fashion one or more of their physicochemical properties, in response to single or multiple external stimuli such as light, temperature, electrical and magnetic fields, pH and/or biological signals. In particular, some fluorinated polymers have been intensively investigated and applied due to their piezoelectric, pyroelectric and ferroelectric properties in biomedical applications including controlled drug delivery systems, tissue engineering, microfluidic and artificial muscle actuators, among others. -
Poly[4(5)-Vinylimidazole]/Polyvinylidene Fluoride Composites As Proton Exchange Membranes Jingjing Pan
View metadata, citation and similar papers at core.ac.uk brought to you by CORE provided by RIT Scholar Works Rochester Institute of Technology RIT Scholar Works Theses Thesis/Dissertation Collections 4-1-2009 Poly[4(5)-vinylimidazole]/polyvinylidene fluoride composites as proton exchange membranes Jingjing Pan Follow this and additional works at: http://scholarworks.rit.edu/theses Recommended Citation Pan, Jingjing, "Poly[4(5)-vinylimidazole]/polyvinylidene fluoride composites as proton exchange membranes" (2009). Thesis. Rochester Institute of Technology. Accessed from This Thesis is brought to you for free and open access by the Thesis/Dissertation Collections at RIT Scholar Works. It has been accepted for inclusion in Theses by an authorized administrator of RIT Scholar Works. For more information, please contact [email protected]. Poly[4(5)-Vinylimidazole]/Polyvinylidene Fluoride Composites as Proton Exchange Membranes Jingjing Pan April 2009 Thesis submitted in partial fulfillment of the requirements for the degree of Master of Science in Chemistry. Approved: _______________________________________ Thomas W. Smith (Advisor) ______________________________ Paul Rosenberg (Department Head) Department of Chemistry Rochester Institute of Technology Rochester, New York 14623-5603 Copyright Release Form: INVESTIGATION OF POLY[4(5)-VINYLIMIDAZOLE] COMPOSITES AND THEIR POTENTIAL AS PROTON CONDUCTIVE MEMBRANES I, Jingjing Pan, hereby grant permission to the Wallace Memorial Library of Rochester Institute of Technology to reproduce my thesis in whole or in part. Any reproduction will not be for commercial use or profit. Jingjing Pan April, 2009 i Abstract In the present research, the morphology and thermal chemical characteristics of composite films comprised of poly(vinylidene fluoride) (PVF2) and poly[4(5)-vinylimidazole/vinylimidazolium trifluoromethylsulfonylimide] (PVIm/VIm+TFSI-]) were studied. -
Transport of Dangerous Goods
ST/SG/AC.10/1/Rev.16 (Vol.I) Recommendations on the TRANSPORT OF DANGEROUS GOODS Model Regulations Volume I Sixteenth revised edition UNITED NATIONS New York and Geneva, 2009 NOTE The designations employed and the presentation of the material in this publication do not imply the expression of any opinion whatsoever on the part of the Secretariat of the United Nations concerning the legal status of any country, territory, city or area, or of its authorities, or concerning the delimitation of its frontiers or boundaries. ST/SG/AC.10/1/Rev.16 (Vol.I) Copyright © United Nations, 2009 All rights reserved. No part of this publication may, for sales purposes, be reproduced, stored in a retrieval system or transmitted in any form or by any means, electronic, electrostatic, magnetic tape, mechanical, photocopying or otherwise, without prior permission in writing from the United Nations. UNITED NATIONS Sales No. E.09.VIII.2 ISBN 978-92-1-139136-7 (complete set of two volumes) ISSN 1014-5753 Volumes I and II not to be sold separately FOREWORD The Recommendations on the Transport of Dangerous Goods are addressed to governments and to the international organizations concerned with safety in the transport of dangerous goods. The first version, prepared by the United Nations Economic and Social Council's Committee of Experts on the Transport of Dangerous Goods, was published in 1956 (ST/ECA/43-E/CN.2/170). In response to developments in technology and the changing needs of users, they have been regularly amended and updated at succeeding sessions of the Committee of Experts pursuant to Resolution 645 G (XXIII) of 26 April 1957 of the Economic and Social Council and subsequent resolutions. -
Piezoelectricity in PVDF and PVDF Based Piezoelectric Nanogenerator: a Concept
IOSR Journal of Applied Physics (IOSR-JAP) e-ISSN: 2278-4861.Volume 9, Issue 3 Ver. I (May. – June. 2017), PP 95-99 www.iosrjournals.org Piezoelectricity in PVDF and PVDF Based Piezoelectric Nanogenerator: A Concept Binoy Bera1,*, Madhumita Das Sarkar2 1,2Department of computer science and engineering, West Bengal University of Technology, Kolkata – 700064, India Abstract: Polyvinylidene fluoride or simply PVDF is one of the most important semicrystalline polymers which generate piezoelectricity when a pressure or mechanical force applied on it. It has four crystalline phases α, β, ɣ and δ depending on the chain conformation structure. Among them α is non polar phase and β and ɣ are polar phase. Piezoelectricity in PVDF arises due to the β and ɣ phase formation. Several materials have been introduced for the preparation of nanogenerator. Among them PVDF (polyvinylidene fluoride) is most interesting material used in nanogenerator preparation due to its flexibility, bio- compatiable, nontoxic in nature. It is used in nanogenerator application due to its good ferroelectric, piezoelectric and pyroelectric properties. In this article we describe little bit concept about PVDF, its piezoelectricity and PVDF based nanogenerator. Application of piezoelectric nanogenerator is also briefly described here. Keywords: PVDF, nanogenerator, piezoelectricity, β phase, electrospinning, electroactive phase, Poling process. I. Introduction Polyvinylidene fluoride, or polyvinylidene difluoride, (PVDF) is a highly non- reactive thermoplastic fluoropolymer produced by the polymerization of vinylidene difluoride. PVDF has four crystalline phases α, β, ɣ and δ depending on the chain conformation. Among them α is thermodynamically most stable and non polar in nature. β and ɣ are polar phase. -
Gas-Phase Chemistry of Methyl-Substituted Silanes in a Hot-Wire Chemical Vapour Deposition Process
University of Calgary PRISM: University of Calgary's Digital Repository Graduate Studies The Vault: Electronic Theses and Dissertations 2013-08-27 Gas-phase Chemistry of Methyl-Substituted Silanes in a Hot-wire Chemical Vapour Deposition Process Toukabri, Rim Toukabri, R. (2013). Gas-phase Chemistry of Methyl-Substituted Silanes in a Hot-wire Chemical Vapour Deposition Process (Unpublished doctoral thesis). University of Calgary, Calgary, AB. doi:10.11575/PRISM/26257 http://hdl.handle.net/11023/891 doctoral thesis University of Calgary graduate students retain copyright ownership and moral rights for their thesis. You may use this material in any way that is permitted by the Copyright Act or through licensing that has been assigned to the document. For uses that are not allowable under copyright legislation or licensing, you are required to seek permission. Downloaded from PRISM: https://prism.ucalgary.ca UNIVERSITY OF CALGARY Gas-phase Chemistry of Methyl-Substituted Silanes in a Hot-wire Chemical Vapour Deposition Process by Rim Toukabri A THESIS SUBMITTED TO THE FACULTY OF GRADUATE STUDIES IN PARTIAL FULFILMENT OF THE REQUIREMENTS FOR THE DEGREE OF DOCTOR OF PHILOSOPHY DEPARTMENT OF CHEMISTRY CALGARY, ALBERTA August, 2013 © Rim Toukabri 2013 Abstract The primary decomposition and secondary gas-phase reactions of methyl- substituted silane molecules, including monomethylsilane (MMS), dimethylsilane (DMS), trimethylsilane (TriMS) and tetramethylsilane (TMS), in hot-wire chemical vapour deposition (HWCVD) processes have been studied using laser ionization methods in combination with time of flight mass spectrometry (TOF-MS). For all four molecules, methyl radical formation and hydrogen molecule formation have been found to be the common decomposition steps on both tungsten (W) and tantalum (Ta) filaments. -
A Study of the Decomposition of Some Aromatic Diazonium Hexafluorophosphate Salts
University of Windsor Scholarship at UWindsor Electronic Theses and Dissertations Theses, Dissertations, and Major Papers 1-1-1964 A study of the decomposition of some aromatic diazonium hexafluorophosphate salts. William A. Redmond University of Windsor Follow this and additional works at: https://scholar.uwindsor.ca/etd Recommended Citation Redmond, William A., "A study of the decomposition of some aromatic diazonium hexafluorophosphate salts." (1964). Electronic Theses and Dissertations. 6038. https://scholar.uwindsor.ca/etd/6038 This online database contains the full-text of PhD dissertations and Masters’ theses of University of Windsor students from 1954 forward. These documents are made available for personal study and research purposes only, in accordance with the Canadian Copyright Act and the Creative Commons license—CC BY-NC-ND (Attribution, Non-Commercial, No Derivative Works). Under this license, works must always be attributed to the copyright holder (original author), cannot be used for any commercial purposes, and may not be altered. Any other use would require the permission of the copyright holder. Students may inquire about withdrawing their dissertation and/or thesis from this database. For additional inquiries, please contact the repository administrator via email ([email protected]) or by telephone at 519-253-3000ext. 3208. A STUDY OF THE DECOMPOSITION OF SOME AROMATIC DIAZONIUM HEXAFLUOROPHOSPHATE SALTS BY WILLIAM A. REDMOND A Thesis Submitted to the Faculty of Graduate Studies through' the Department of Chemistry in Partial Fulfillment of the Requirements for the Degree of Doctor of Philosophy at the University of Windsor Windsor, Ontario 1964 Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. -
NON-HAZARDOUS CHEMICALS May Be Disposed of Via Sanitary Sewer Or Solid Waste
NON-HAZARDOUS CHEMICALS May Be Disposed Of Via Sanitary Sewer or Solid Waste (+)-A-TOCOPHEROL ACID SUCCINATE (+,-)-VERAPAMIL, HYDROCHLORIDE 1-AMINOANTHRAQUINONE 1-AMINO-1-CYCLOHEXANECARBOXYLIC ACID 1-BROMOOCTADECANE 1-CARBOXYNAPHTHALENE 1-DECENE 1-HYDROXYANTHRAQUINONE 1-METHYL-4-PHENYL-1,2,5,6-TETRAHYDROPYRIDINE HYDROCHLORIDE 1-NONENE 1-TETRADECENE 1-THIO-B-D-GLUCOSE 1-TRIDECENE 1-UNDECENE 2-ACETAMIDO-1-AZIDO-1,2-DIDEOXY-B-D-GLYCOPYRANOSE 2-ACETAMIDOACRYLIC ACID 2-AMINO-4-CHLOROBENZOTHIAZOLE 2-AMINO-2-(HYDROXY METHYL)-1,3-PROPONEDIOL 2-AMINOBENZOTHIAZOLE 2-AMINOIMIDAZOLE 2-AMINO-5-METHYLBENZENESULFONIC ACID 2-AMINOPURINE 2-ANILINOETHANOL 2-BUTENE-1,4-DIOL 2-CHLOROBENZYLALCOHOL 2-DEOXYCYTIDINE 5-MONOPHOSPHATE 2-DEOXY-D-GLUCOSE 2-DEOXY-D-RIBOSE 2'-DEOXYURIDINE 2'-DEOXYURIDINE 5'-MONOPHOSPHATE 2-HYDROETHYL ACETATE 2-HYDROXY-4-(METHYLTHIO)BUTYRIC ACID 2-METHYLFLUORENE 2-METHYL-2-THIOPSEUDOUREA SULFATE 2-MORPHOLINOETHANESULFONIC ACID 2-NAPHTHOIC ACID 2-OXYGLUTARIC ACID 2-PHENYLPROPIONIC ACID 2-PYRIDINEALDOXIME METHIODIDE 2-STEP CHEMISTRY STEP 1 PART D 2-STEP CHEMISTRY STEP 2 PART A 2-THIOLHISTIDINE 2-THIOPHENECARBOXYLIC ACID 2-THIOPHENECARBOXYLIC HYDRAZIDE 3-ACETYLINDOLE 3-AMINO-1,2,4-TRIAZINE 3-AMINO-L-TYROSINE DIHYDROCHLORIDE MONOHYDRATE 3-CARBETHOXY-2-PIPERIDONE 3-CHLOROCYCLOBUTANONE SOLUTION 3-CHLORO-2-NITROBENZOIC ACID 3-(DIETHYLAMINO)-7-[[P-(DIMETHYLAMINO)PHENYL]AZO]-5-PHENAZINIUM CHLORIDE 3-HYDROXYTROSINE 1 9/26/2005 NON-HAZARDOUS CHEMICALS May Be Disposed Of Via Sanitary Sewer or Solid Waste 3-HYDROXYTYRAMINE HYDROCHLORIDE 3-METHYL-1-PHENYL-2-PYRAZOLIN-5-ONE -
Pp-03-25-New Dots.Qxd 10/23/02 2:38 PM Page 379
pp-03-25-new dots.qxd 10/23/02 2:38 PM Page 379 HYDROGEN SULFIDE 379 HYDROGEN SULFIDE [7783-06-4] Formula: H2S; MW 34.08 Synonyms: sulfur hydride; sulfureted hydrogen Occurrence and Uses Hydrogen sulfide occurs in natural gas. It also is found in many sewer gases. It is a by-product of many industrial processes. Trace amounts of dis- solved H2S are found in wastewaters in equilibrium with dissolved sulfides and hydrosulfides. It also is found in volcanic eruptions, hot springs and in troposphere. The average concentration of H2S in the air is about 0.05 ppb. The most important applications of hydrogen sulfide involve the production of sodium sulfide and other inorganic sulfides. Hydrogen sulfide obtained as a by-product often is converted into sulfuric acid. It also is used in organic syn- thesis to make thiols or mercaptans. Other applications are in metallurgy for extracting nickel, copper, and cobalt as sulfides from their minerals; and in classical qualitative analytical methods for precipitation of many metals (see Reactions). It also is used in producing heavy water for nuclear reactors. Physical Properties Colorless gas; characteristic odor of rotten eggs; odor threshold 1ppm; sweetish taste; fumes in air; flammable gas, burns with a pale blue flame; refractive index at 589.3nm, 1.000644 at 0°C and 1 atm; density 1.539 g/L at 0°C; critical temperature 100.4°C; critical pressure 88.9 atm; liquefies at –60.7°C; solidifies at –85.5°C; velocity of sound 289 m/sec in H2S gas; slightly soluble in water (0.4% at 20°C); pH of a saturated aqueous solution 4.5; slight- ly acidic; diffusivity in water at 16°C, 1.77x105 cm2/sec; soluble in carbon disulfide, methanol, acetone; very soluble in N-methylpyrrolidinone and alka- nolamines (salt formation occurs: salt dissociates on heating); liquid H2S dis- solves sulfur and SO2. -
Gasket Chemical Services Guide
Gasket Chemical Services Guide Revision: GSG-100 6490 Rev.(AA) • The information contained herein is general in nature and recommendations are valid only for Victaulic compounds. • Gasket compatibility is dependent upon a number of factors. Suitability for a particular application must be determined by a competent individual familiar with system-specific conditions. • Victaulic offers no warranties, expressed or implied, of a product in any application. Contact your Victaulic sales representative to ensure the best gasket is selected for a particular service. Failure to follow these instructions could cause system failure, resulting in serious personal injury and property damage. Rating Code Key 1 Most Applications 2 Limited Applications 3 Restricted Applications (Nitrile) (EPDM) Grade E (Silicone) GRADE L GRADE T GRADE A GRADE V GRADE O GRADE M (Neoprene) GRADE M2 --- Insufficient Data (White Nitrile) GRADE CHP-2 (Epichlorohydrin) (Fluoroelastomer) (Fluoroelastomer) (Halogenated Butyl) (Hydrogenated Nitrile) Chemical GRADE ST / H Abietic Acid --- --- --- --- --- --- --- --- --- --- Acetaldehyde 2 3 3 3 3 --- --- 2 --- 3 Acetamide 1 1 1 1 2 --- --- 2 --- 3 Acetanilide 1 3 3 3 1 --- --- 2 --- 3 Acetic Acid, 30% 1 2 2 2 1 --- 2 1 2 3 Acetic Acid, 5% 1 2 2 2 1 --- 2 1 1 3 Acetic Acid, Glacial 1 3 3 3 3 --- 3 2 3 3 Acetic Acid, Hot, High Pressure 3 3 3 3 3 --- 3 3 3 3 Acetic Anhydride 2 3 3 3 2 --- 3 3 --- 3 Acetoacetic Acid 1 3 3 3 1 --- --- 2 --- 3 Acetone 1 3 3 3 3 --- 3 3 3 3 Acetone Cyanohydrin 1 3 3 3 1 --- --- 2 --- 3 Acetonitrile 1 3 3 3 1 --- --- --- --- 3 Acetophenetidine 3 2 2 2 3 --- --- --- --- 1 Acetophenone 1 3 3 3 3 --- 3 3 --- 3 Acetotoluidide 3 2 2 2 3 --- --- --- --- 1 Acetyl Acetone 1 3 3 3 3 --- 3 3 --- 3 The data and recommendations presented are based upon the best information available resulting from a combination of Victaulic's field experience, laboratory testing and recommendations supplied by prime producers of basic copolymer materials. -
Customer Information Regarding Material Resistance in Compressed Air Preparation
Customer information regarding material resistance in compressed air preparation Polycarbonate reservoirs for filter regulators, filters, and lubricators Everywhere the presence of these media cannot be avoided, such as in paint booths, gluing machines, Polycarbonate is the longest known and most vulcanization plants, etc., the use of metal reservoirs processed material in the world for reservoirs of is required. compressed air maintenance units. The high Problematic is the use of solvents not only in pressure and temperature resistances, as well as immediate contact with the reservoir, but also in its good compatibility with the normally used media immediate vicinity. For example, trichlorethylene such as water, oils and greases are some of its vapors from the compressor’s intake air can cause advantages. crack formation in the polycarbonate reservoir. Only The only “weakness” of this plastic is its clean the reservoirs using a slightly damp cloth. Only susceptibility to media that can be referred to use water to do this and, if necessary, a mild collectively using the term “solvents”. From this detergent without chemical additives. range, the materials relevant to the use of If a lubricator is used, please only use suitable compressed air preparation units are summarized pneumatic oils, e.g. AVENTICS pneumatic oil, order here: no. 8982000010 – 1L. Detergents : Trichloroethylene, (usually from outside) perchloroethylene, In most cases, the use of (pneumatic) oils with benzene, additives, for example antifreeze, results in damage super/regular gasoline to or destruction of the reservoirs and must thus be avoided. Alternatively, we recommend the use of Solvents : Acetone, metal reservoirs. (from outside/inside) paint thinners, alcohols, esters Polycarbonate can react to permanent UV-light irradiation and weathering. -
Microflex Gloves Chemical Compatibility Chart
1 1 1 2 2 3 1 CAUTION (LATEX): This product contains natural rubber 2 CAUTION (NITRILE: MEDICAL GRADE): Components used 3 CAUTION (NITRILE: NON-MEDICAL GRADE)): These latex (latex) which may cause allergic reactions. Safe use in making these gloves may cause allergic reactions in gloves are for non-medical use only. They may NOT be of this glove by or on latex sensitized individuals has not some users. Follow your institution’s policies for use. worn for barrier protection in medical or healthcare been established. applications. Please select other gloves for these applications. Components used in making these gloves may cause allergic reactions in some users. Follow your institution’s policies for use. For single use only. NeoPro® Chemicals NeoPro®EC Ethanol ■NBT Ethanolamine (99%) ■NBT Ether ■2 Ethidium bromide (1%) ■NBT Ethyl acetate ■1 Formaldehyde (37%) ■NBT Formamide ■NBT Gluteraldehyde (50%) ■NBT Test Method Description: The test method uses analytical Guanidine hydrochloride ■NBT equipment to determine the concentration of and the time at which (50% ■0 the challenge chemical permeates through the glove film. The Hydrochloric acid ) liquid challenge chemical is collected in a liquid miscible chemical Isopropanol ■NBT (collection media). Data is collected in three separate cells; each cell Methanol ■NBT is compared to a blank cell which uses the same collection media as both the challenge and Methyl ethyl ketone ■0 collection chemical. Methyl methacrylate (33%) ■0 Cautionary Information: These glove recommendations are offered as a guide and for reference Nitric acid (50%) ■NBT purposes only. The barrier properties of each glove type may be affected by differences in material Periodic acid (50%) ■NBT thickness, chemical concentration, temperature, and length of exposure to chemicals.