United States Patent (19) 11 Patent Number: 4,734,514 Melas Et Al
United States Patent (19) 11 Patent Number: 4,734,514 Melas et al. 45 Date of Patent: Mar. 29, 1988 54 HYDROCARBON-SUBSTITUTED ANALOGS Organometallic Compounds of Arsenic, Antimony, and OF PHOSPHINE AND ARSINE, Bismuth, pp. 120-127. PARTICULARLY FOR METAL, ORGANIC Hagihara, et al., Handbook of Organometallic Com CHEMICAL WAPOR DEPOSTION pounds (1968), pp. 560, 566, 571, 574, 579,581. 75 Inventors: Andreas A. Melas, Burlington; Hagihara, et al. Handbook of Organometallic Com Benjamin C. Hui, Peabody, both of pounds (1968), pp. 720-723, 725-726. Mass.; Jorg Lorberth, Kisolapoff, et al., Organic Phosphorus Compounds, Weimar-Niederweimar, Fed. Rep. of vol. 1, pp. 4-11, 16-27. Germany Kuech, et al. "Reduction of Background Doping in Metal-Organic Vapor Phase Epitaxy of GaAs using 73) Assignee: Morton Thiokol, Inc., Chicago, Ill. Triethyl Gallium at Low Reactor Pressures', Appl. 21 Appl. No.: 828,467 Phys. Lett., Oct. 15, 1985. TZSchach, et al., Zur Sythese Zeitschrift fur Anorganis 22 Filed: Feb. 10, 1986 che und Allgemeine Chemie, Band 326, pp. 280-287 (1964). Related U.S. Application Data Primary Examiner-Paul F. Shaver 63 Continuation-in-part of Ser. No. 664,645, Oct. 25, 1984. Attorney, Agent, or Firm--George Wheeler; Gerald K. 5ll Int. Cl* ................................................ CO7F 9/70 White 52 U.S.C. .......................................... 556/70; 568/8; 57 ABSTRACT 568/17 58 Field of Search ........................ 556/70,568/8, 17 Organometallic compounds having the formulas: 56 References Cited U.S. PATENT DOCUMENTS x-y-y H 3,657,298 4/1972 King et al......................... 556/7OX OTHER PUBLICATIONS wherein N is selected from phosphorus and arsenic, His Kosolapoffetal, Organic Phosphorus Compounds, vol.
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