sign in sign up
<<
Home , Pressure measurement, Torr, Vacuum

fDVacuum Measurement

�===Pressure Gauges

Vacuum Pressure Introduction The definition of is an area of and a partial vacuum is any pressure lower than the local being 760 at sea level. Obtainable vacuum for process applications and experiments range from atmospheric pressure all the way down to 10-12 Torr. Vacuum pressure is often labeled by terms rough vacuum(below atmospheric pressure to 10-3 Torr), high vacuum(10-3 to 10-9Torr), and ultra-high vacuum(< 10-9 Torr). These terms can be confusing to a new comer to vacuum technology since high vacuum equals low pressure. There is a direct Vacuum Reference Chart mm in in PSIA connection between Torr I Hg A�soluteI Feet Miles I Meters I Hg Vacuum 1 Hg Absolute 1 I Pa I 1 atm t h e s e vacuum I 1.09 1.09 150,000 28.4 45,720 29.877 0.04 0.02 150 0.00146 o.oo terminologies and I altitude, that is, low 13 13 90,000 17.1 27,459 29.4 0.52 0.26 1760 0.01733 0.02 1 pressure occurs at high 34 34 70,000 13.3 21,357 28.595 1.33 0.65 4490 0.04533 0.04 altitude,(figure 10-1 to 1 the right) shows a 69 69 55,000 10.4 16,781 27.208 2.71 1.33 9170 0.09199 0.09 87 87 50 000 9.5 15 255 26A76 3.44 1.69 11650 0.11599 0.11 vacuum reference 111 111 45,000 8.5 13,730 25.545 4.38 2.15 14820 0.14799 0.15 chart that displays 141 141 40 000 7.6 12 204 24.362 5.56 2.73 18820 0.18798 0.19 vacuum pressure at 179 179 35,000 6.6 10,679 22.86 7.06 3.47 23930 0.23865 0.24 226 226 30,000 5.7 9153 21.017 8.90 4.3Z. 30130 0.30131 0.30

different altitudes. The 282 282 25,000 4.7 7628 18.8 11.12 5.46 37650 0.37597 0.37 350 350 20,000 3.8 6102 16.16 l3.76 6.76 46610 0.46663 InternationalSystem of ::2& Units (abbreviated 429 429 15,000 2.8 4577 13.03 16.89 8.29 57160 0.57195 0.56 522 522 10,000 3050 9.34 2� 10.10 69M2.,. 0.6 0.69 51) - 1.:2.... for pressure is the � 543 543 9000 1.7 2746 1- 8.53 21.39 10.50 I-72400 0.72394 0.71 (Pa) but vacuum 564 564 8000 1.5 2441 7.69 22.23 10.91 75220 0.75194 0.74 586 586 7000 1.3 2136 6.82 23.10 11.34 78190 0.78127 0.77 pressure is often 609 609 6000 1.1 1831 5.93 23.99 11.78 81220 0.81193 0.80

reported in units of 633 633 5000 0.95 1526 5.02 24.90 12.23 84330 0.84393 0.83 Torr, Bar, , 644 644 4500 0.86 1373 4.55 25.37 12.46 85910 0.85859 0.85 656 656 4000 0.76 1220 4.08 25.84 12.69 87490 0.87459 0.86 pounds per square inch 669 669 3500 0.66 1068 3.59 26.33 12.93 89150 0.89192 0.88 absolute (PSI A), 681 681 3000 0.57 915 3.1 26.82 13.17 90810 0.90792 0.90 millimeters of 694 694 2500 0.47 763 2.6 27.32 13.41 92460 0.92525 0.94 706 706 2000 0.38 610 2.1 27.82 13.66 94190 0.94125 0.93 absolute (mmHg), and 719 719 1500 0.28 458 1.59 28.33 13.91 95910 0.95859 0.95 inches of mercury 732 732 1000 0.19 305 1.06 28.86 14.16 97630 0.97592 0.96 vacuum (inH g). 746 746 500 0.09 153 0.54 29.38 14.43 99490 0.99458 0.98 760 760 0 Sea Level 0 0 29.92 14.70 101330 1.01325 1.00 Vacuum technology is globally used in FIG. 10-1 numerous industrial Lower Air Pressure a n d scientific Perfect Vacuum = 0 Torr Pressure Low Density Decreases with applications, many of Outer = 1 x 10·6 to <3 x 10"17 Torr these areas of VI Altitude expertise use different x ..5!! Extremely High Vacuum = 1 10"12 Torr ::::1 656,000 Ft. (.0075 Torr) units to report vacuum u x x Q) __;_; 150,000 Ft. (1.09 Torr) pressure. Ultra High Vacuum = 1 10-9 to 3 10"12 Torr 0 � 100,000 Ft. (8 Torr) High Vacuum = 1 x 10-3 to 3 x 10-9 Torr 10,000 Ft. (522 Torr) Higher 7,000 Ft. (586 Torr) x Pressure 5,000 (633 Torr) Rough Vacuum= 760 to 3 10-3 Torr High Ft. Density 0 (760 Torr) Atmospheric Pressure= 760 Torrat seal Level - Ft.

10·1 www.idealvac.com (505)872-0037 Vacuum f]) ·�-======Pressure Gauges Vacuum Pressure Introduction It is often very important to know the vacuum pressure. When building a new vacuum system, pressure measurement equipment is typically second on the list of required items, just after the vacuum requirements have been specified. Vacuum goes from 760 to 10-12 Torr, more than 1015 powers, and it is easy to understand why one type of vacuum cannot measure the complete range. It often requires two or more different sensors to cover from atmosphere to ultra-high vacuum. We will limit our vacuum gauge discussion here to mainstream modern vacuum gauge technologies, (see figure 10-2 below) which includes the vacuum gauges; Bourdon, Capacitance Manometer, , ­ Enhanced rani, Hot Ionization, Ionization, and Combination Full-Range gauges.

UHV High Rough IIIII( Vacuum I Vacuum I Vacuum Pressure (Torr) 1 o-13 10"11 10"9 1 o-7 1 o-s 1 o-3 10"1 101 103 I I I I I I I I I I I I �ou dol) Gauge Capacitance • Thermocouple Manometer Rough Vacuum e:apacitance Manometer 760 to 1x10-3 Torr

Ciovectron Pi�ani • I I I I I I I I I � I � o UHV Models & Cold Catho.de hiwerted Mag:netrron • I : Comb]nat!on F.uii-Range r Hot Cathode lo� Gauge• � Bourdon Gauge Rough Vacuum 1 o-11 10"9 1 o-7 1 o-s 1 o-3 1 o-1 101 103 105 760 to 1x10-1 Torr Pressure (Pa) FIG. 10-2

Rough Vacuum 760 to 1x10-3 Torr

Full Range Combination [?����CLD�� Rough to High Vacuum 100 to 1x10-9 Torr ��CLD��� r Cold Cathode Inverted Magnetron High Vacuum 1x10-3 to 1x10-12 Torr

www.idealvac.com (505)872-0037 10·2 fDVacuum Pressure Measurement

�Pressure Gauges (Cont.JVacuum Pressure Gauge Introduction These gauges can be grouped into two categories labeled as roughing and high vacuum gauges. Roughing gauges are used to measure vacuum pressure provided by the mechanical roughing in the 760 to 1x10-3 Torr pressure range, which includes, Bourdon, Capacitance Manometer, Thermocouple, and Convection-Enhanced Pirani gauges. High and ultra-high vacuum gauges are used to measure pressure from high vacuum pumps in the 10-3 to 10-12 Torr pressure range, which includes, hot cathode and cold cathode ionization gauges.

There are modern full-range gauges available that measure vacuum pressure from atmosphere to around lQ-9 Torr. These wide-range combination gauges include both a roughing and high vacuum sensors all built into one. They use the roughing sensor to measure vacuum pressure until the pressure is low enough to turn on the high vacuum sensor. These gauges crossover seamlessly from roughing to high (MeasuresDirect Actual Gauges Pressure) vacuum so that un-interrupted vacuum pressure data is displayed to the instrument user. There are full-range gauges available that even compose three measurement technologies into one multi-sensor. Some examples of the full range gauges are the, (1) Convention­ Capacitance Bourdon Enhance Pirani & Hot Cathode,(2) Convention-Enhanced Pirani & Cold Manometer Tube Cathode, (3) Capacitance Diaphragm, Pirani, & Hot Cathode. Full­ range combination vacuum gauge sensors are compact and easy to use but are more expensive than the individual classical vacuum Indirect(Measures Gauges Properties) sensors. Therefore, full-range gauges are often used on clean dry vacuum applications with little chance of sensor contamination and where sensor replacement would be low. Pi rani Hot&Cold There are two basic designs of gauges, those that measure vacuum Thermocouple Cathode pressure directly and those that indirectly provide a pressure reading, (see figure 10-3 to the side.) The direct gauges measure the actual vacuum pressure, per unit area, which include the Bourdon and Basic Design of Pressure Guages Capacitance Manometer. The indirect gauges calculate the vacuum pressure by measuring a physical property of the gas which changes in FIG. 10-3 a predictable manner as gas density changes. The physical property is pressure depend so that if the gas-type and are known then the vacuum pressure can be calculated. The physical property can be energy transfer as heat through the vacuum (Pirani and thermocouple gauges) or particle (hot and cold cathode ionization gauges). The important factor here is, indirect pressure gauges must be calibrated for the gas-type used in the vacuum application, because indirect gauges will provide different pressure readings for different at the same pressure. Most indirect gauges are normally shipped from the factory set up to display the vacuum pressure reading as if the gas-type is air.

10·3 www.idealvac.com (505)872-0037 Vacuum Pressure Measurement f]) ·�======Pressure Gauges

Chemical Pump Reference (Pr) Side Direct Pressure Measurement (Absolute Manometer) High Vacuum

Capacitance Manometer Electronic PCB Capacitance manometers are often used for vacuum pressure measurement where a thin diaphragm deflects with the force applied by the vacuum pressure. They are direct pressure measurement gauges because they actually measure the force from the applied vacuum pressure (see figure 10-4 to the side). In many cases, a baffle is installed in direct line-of-sight between the sensor's vacuum inlet and the diaphragm which is useful at keeping the diaphragm clean of debris. On the opposite side of the diaphragm is a high vacuum reference cavity which contains a Sensor chemical getter pump to maintain high vacuum. A ring-shaped Capsule is mounted in the reference cavity side just behind the diaphragm. The applied force from the vacuum on the application side causes the thin diaphragm to deflect towards the electrode. A change in capacitance between the diaphragm and the ring shaped electrode is produced. An electronic Printed Circuit Board (PCB) measures the capacitance and transmits a de output voltage which is linear and proportional to the applied vacuum pressure.

Most capacitance manometers require an additional Power Supply/Digital Readout which provides the required input power(typically ± 15 VDC) and displays the de output pressure reading from the transducer (typically 0-10 VDC, linear over the • full measurable range of the sensor). The capacitance manometer is often used in the rough vacuum measurement range (1000 to 0.001 To rr) in process applications where the gas make up and can change rapidly. Since the Capacitance Manometer capacitance manometer measures direct force applied from the 10-4 Rough Vacuum vacuum pressure its pressure measurement is independent of FIG. 760 to 1x1Q-3 Torr the gas-type. The ability of capacitance manometers to measure vacuum pressure independent of vacuum gas composition provides a critical advantage over indirect pressure sensors. It is important to purchase a capacitance manometer with the Capacitance manometers are also one of the most accurate full scale pressure range needed for your vacuum application. rough vacuum pressure measurement sensors due to the fact Capacitance manometers for low pressure measurement have a that very small changes in the diaphragm deflection can be much thinner diaphragm that can be deflected by the weak accurately measured. Capacitance manometers are very vacuum . It is okay to leave your low pressure capacitance susceptible to process applications which would generate manometers on at atmospheric pressure. This will not damage deposition materials that could deposit on the diaphragm the sensor. Up to three capacitance manometers are needed to surface. In an effort to protect the diaphragm from process built­ build a high accuracy pressure measurement system, for up, heated models of capacitance manometers are available up example, 1000, 10, and 0.100 To rr transducers. This will provide to 100 °C. This helps keep the process gases from condensing very accurate pressure measurement from atmosphere down to inside the capacitance manometer gauge tube. the lowest measurable limit in the 10-5 To rr range. These systems can become expensive, as a typical capacitance manometer and Capacitance manometers are sold by their full scale pressure its Power Supply/Digital Readout controller can cost $2,500 for range, for example, gauges with full scale values of 1000, 100, 10, the pair. These expenses can be justified since capacitance 1, 0.100 To rr are common. At fu ll scale pressure the diaphragm manometers are the most accurate rough vacuum pressure has reached its maximum displacement and above which measurement devices, are direct measurement sensors, and can pressure measurements are not accurate. For this reason, the respond quickly to dynamic vacuum pressure changes. gauge controller is designed to stops displaying measured pressure just above the full scale range.

www.idealvac.com (505)872-0037 10·4 fDVacuum Pressure Measurement �Pressure Gauges

Bourdon Gauge The Bourdon gauge is a direct pressure measurement device that actually measures the force from the vacuum pressure. The Bourdon gauge, (see figure 10-5 on the side) has a coil spring like material that holds the vacuum. As the vacuum pressure changes so does the forces on the coil, which will change its shape. Small gears and levers are often used to amplify the movement of a gauge needle which will display the corresponding pressure. Bourdon gauges are the least expensive and only adequate for coarse vacuum pressure measurements, accuracy are typically 10 To rr. More precise bourdon gauges can be manufactured but are not cost competitive to cheaper electronic gauges, such as, thermocouple and Pi ra ni.

Bourdon Gauge Rough Vacuum 760 to 10 Torr

Indirect Pressure Measurement Gauges Thermocouple gauges measure the thermal energy-transfer "heat WALLS (T =TAl transport" property of the vacuum gas to indirectly calculate and display the � vacuum pressure. In the thermocouple gauge, a wire is heated by a constant ....----....::....--..., current power supply (see Fig. 10-6 to the side). A thermocouple is attached to the hot wire and is used to measure its temperature. As gas molecules collide with the hot wire they can carry away heat and transfer it to the neighboring walls of the thermocouple tube sensor (the thermal sink). The distance between the hot wire and sensor body is small, typically on the order of a few mean-paths to allow for effective thermal conductivity. The heated sensor wire is cooled as the vacuum pressure increases and while in JUNCTION AND free molecular flow, thermal conductivity by molecular collisions increases FIG. 10-6 = linearly with pressure. However, the heat removal from the hot wire to the SOURCE OF HEATER (T T2) sensor body becomes non-linear as the pressure is further increased into the CONSTANT CURRENT (H) viscous flow regime, where gas-gas collision can reorient molecule back toward the heated wire.

The graph of heat removal versus pressure (see Fig. 10-7 to the side) would converge to a constant value if it were not for convection current which helps

transfer heat to the sensor body walls. In viscous gas flow, molecules closest ..... Q) to the hot wire heat up and undergoes thermal expansion where ...... en forces cause the hot gas to rise producing the convection current. For this 1::: reason, most thermocouple sensors measure pressure in the 0.001 to 1 To rr ro ..= range, it is possible to extend the range of a thermocouple sensor towards ...... ro atmospheric pressure if it takes into account for from Q) :I: conventional currents. Thermocouple sensors are inexpensive devices for measuring the lower portion of the rough vacuum and are often used to measure pressure of the roughing lines for mechanical pumps. Thermocouple sensors are only 'rough' indicators to monitor mechanical pump vacuum levels and signal when crossover pressure has been reached. 10-4 1 760 FIG. 10-7 Pressure (Torr) ====�---======-�

10·5 www.idealvac.com (505)872-0037 Vacuum Pressure Measurement� ·�======�--Pressure Gauges

(Cont.) Indirect Pressure Measurement Pirani and Convection Enhanced Pirani Gauges The Pi rani vacuum gauge is another thermal conductivity gauge, Molecules have to collide many times before they reach the which is very similar to the thermocouple gauge, but the outer body of the sensor (the thermal sink). The convection­ resistance of the heated wire is measured to determine vacuum enhanced Pirani gauges take advantage of the convention pressure (see thermocouple gauge discussion from previous current inside the sensor to extend its pressure measurement page). The Pirani gauge is designed to measure resistance range all the way to atmospheric pressure. imbalance where the heated filament forms one of the arms of a Wheatstone bridge circuit (see figure 10-8 below). The The Pirani gauge is an indirect pressure measurement sensors compensating tube filament R4 is sealed in an envelope at a where measured readings are gas-type dependent. Some vacuum level greater than 0.001 To rr. The pressure gauge circuit caution should be advised from the facts that heavier gases have is then balanced as close as possible by changing the resistance poor heat transfer rates and that the standard convention­ of R1 while the vacuum pressure on the pressure sensor filament enhanced Pi rani gauges are calibrated for N2 (basically the same R2 is held around 10-4 To rr. As the vacuum pressure increases, as Air). This could lead to dangerous overpressure gas molecules transport heat away from the filament, and the conditions when back filling a vacuum systems with a heavier gas resistance of the pressure sensor R2 will move to a lower value like . The danger arises if the vacuum system operator does which unbalances the circuit. The vacuum pressure is calculated not correct the gauge display reading for the correct gas-type, for from the pressure induced imbalance in the Wheatstone bridge example, a standard gauge calibrated for N2 displays 24 To rr circuit. Just as with the thermocouple gauges, thermal when the chamber is at 760 To rr of argon. The operator would be conductivity by molecular collisions increases linearly with fooled into thinking that the chamber was still under pressure pressure over the 0.001 to 1 To rr pressure range. However, the and continue to increase the system to a critical over-pressured heat removal becomes non-linear as the pressure is further state. increased into the viscous flow regime, where gas-gas collision can reorient molecules back towards the heated wire.

FIG. 10-8 Pirani Gauge

www.idealvac.com (505)872-0037 10·6 f])Vacuum Pressure Measurement

�Pressure Gauges

(Cont.) Indirect Pressure Measurement Pirani and Convection Enhanced Pirani Gauges

Please see the indicated vs true pressure measurement graph While the vacuum pressure is dropping rapidly the gases expand displayed in (figure 10-9 and 10-10.) Another source of error can and cool, this provides a secondary pathway for removing heat be produced if the convection-enhanced Pirani gauge is not from the hot sensor wire. The convection-enhanced Pirani mounted correctly, most commercial sensors require that they gauge can fa lsely display high up to 1000 To rr during are mounted parallel to the ground. This keeps the convention system evacuation. Once the flow of gases is stopped the current inside the sensor flowing in the designed direction (errors pressure reading will again stabilize to a realistic measured of 20% or more can easily be introduced if the convention­ value. For these reasons, convection-enhanced Pirani gauges enhanced Pi ra ni sensor is not mounted horizontally). are not well suited for measuring pressure changes under dynamic pumping conditions. Overall, the convection­ Rapid evacuation of these convection-enhanced Pirani sensors enhanced Pirani is a popular cost effective rough vacuum will produce significant measurement error for a short period of pressure gauge which can measure from At mosphere to 1x10-4 several seconds. As the rapidly pumped gases expand, the To rr with those measurements below 1 To rr being most removal of heat from the pressure sensor filament is not a normal accurate. convection current but is instead driven by forced convection.

1000 Freon 12 � Ar /r' 1/

) v 10-1 v ( N2, ai r 100 l v / @ I / r �� CH4 /� � I l / 10-2 / \ --� 1\. 10 II �� C0 2 N2, a1r / He J Ar D2 /J/ LFreon 22J _LN,!.,..., Freon /p� � He.J 12J �/ � \ �[CH4 /I Use only when gauge is horizontal / l@' '/ Pressure units equivalent v�� 1um Hg = 1 mTorr = lx1Q-3 Torr /.'l. � Pressure units equivalent �� 1000um Hg = 1 Torr 10-4 1um Hg = 1 mTorr = lx1Q-3 Torr 10-1 � � � 1000um Hg 1 Torr �

2 10- 1 4 10-3 10-2 10- 10-1 10 100 1000 10- Indicated Pressure (Torr) Indicated Pressure (Torr) FIG. 10-9 (nitrogen equivalent) FIG. 10_10 (nitrogen equivalent)

Convectron Gauge Indicated vs.True Pressure Curve; 10-1 to 1000 Torr Convectron Gauge Indicated vs.True Pressure Curve; lQ-4 to lQ-1 Torr

10·7 www.idealvac.com (505)872-0037 Vacuum Pressure Measurement f]) ·�======Pressure Gauges (Cont.) Indirect Pressure Measurement Ionization Gauges (Hot & Cold Cathode) In the high and ultra-high vacuum, gas density is extremely low current is a measure of gas particle density which is proportional so that direct pressure measurement from vacuum forces are too to the total pressure. In the high and ultra-high vacuum range weak to be measured directly. There is not enough there are two types of ionization gauges, hot cathode and cold transfer to the diaphragm of the capacitance manometer to be cathode. Each ionization gauge has its own lower limit where detected. In this range, the vacuum pressure is measured by particle counting is equal to the background noise, its own ionization of the gas, counting, and amplify the ion signal. The ion advantages, and disadvantages. Hot Cathode Ionization Gauges The hot cathode gauge, as its name implies, has a filament cathode that operates at high temperature. In fact, the hot cathode ionization gauge has filament(cathode) grid(anode) three , filament (cathode), grid (anode), and the collector, and is ( + 180 sometimes referred to as a vacuum gauge. In the popular Bayard-Alpert /(+30V) V) design, (see figure 10-11 at right) the filament is held at +30 VDC and is resistively heated to a point that are boiled off by thermal emission I producing around 10 milliamps of thermal current. The helical grid is held at+ 180 VDC where the electrons are accelerated to 150 eV of high-energy by the potential difference between the filament and the grid. Most of the electrons pass through the helical grid and travel in an elliptical motion avoiding the central collector which is held at 0 VDC, grounded respectively. Most of the moving electrons in this enclosed volume transverse back and forth around the grid several times before eventually collide with and being absorbed by the grid. Some of these high-energy electrons collide with gas molecules where an electron is ejected from a molecular orbital leaving the molecule as a positively charged ion. Most of the positive formed inside the grid are accelerated towards the central collector. The positively charged molecular ions impact the collector fo rming an ion current in the collector. The hot cathode ion gauge is more of a particle density counter than and actual pressure gauge. However, since the gas density is proportional to the gas pressure, the vacuum pressure reading can be calculated from the ion current as long as the temperature is constant. The ion current on the collector is measured in picoamps, is amplified, and used to calculate the displayed vacuum pressure value.

X-Ray Limit of Hot Cathode The lowest measurable pressure limit of a hot cathode ionization gauge is set by "ion the X-ray photoelectron induced current generated on the collector. When high­ collector energy electrons from the filament collide with the grid they can produce X-rays +30V = and those X-rays that collide with the collector can eject electrons by the +180 v = (QV) photoelectron effect. Since the ion current and photoelectron current are not distinguishable, this process establishes a background noise level. The lowest A =le I+ measurable pressure limit of a hot cathode ionization gauges design is when the ion current equals the X-ray generated photoelectron current. The improved Bayard-Alpert design has a thin wire collector in the center of a helical grid and FIG. 10-11 UHV versions can have a lower pressure measurement limit of 10-12 To rr (described below); previous less sensitive designs had a large area collector, a (not UHV) higher X-ray photoelectron background current, and lowest measurable Hot Cathode I on Gauge pressure of 10-8 To rr.

www.idealvac.com (505)872-0037 10·8 f])Vacuum Pressure Measurement Pressure Gauges The Sensitivityof Hot Cathode The job of the hot cathode ion gauge controller is to provide the The data in the (fig. 10-12 below) below suggests that larger operating voltages for both the anode and cathode while its molecules and atoms are easier to ionize and therefore have a higher electrometer measures the ion current to display the sensitivity. The upper pressure measurement limit for a hot cathode calculated pressure. The ion gauge design determines its gauges is around 10-3 To rr where the ion current vs pressure , how much ion current can be produced from a relationship deviates from linearity. The non-linearity is due to the selected emission current at a specified pressure value. This reduced mean-free path, a decreased probability that positive gives rise to the definition of ion gauge sensitivity. molecular ions reach the collector, they are removed by increased gas-gas collisions which can knock the positive ion gas molecule lon Current . . ' _ outside the anode grid area. S ens1 tlVI t y- . . Relative E m1ss1on C urrent x p ressure Gas Sensitivity The equation above defines a linear relationship between 0.42-0.53 pressure and ion current which makes the Bayard-Alpert Gauge FIG. 10-12 He 0.18 (BAG) the most accurate indicator of total pressure in the high Approximate H20 0.9 and ultra-high vacuum range. Bayard-Alpert type gauges Relative Sensitivity typically have a sensitivity of 10 To rr-1 when used with nitrogen Ne 0.25 or air. The ion current is also dependent upon the gas-type and of Bayard-Alpert N2 1.00 the pressure reading will change for different gases at the same Gauge Tubes to co 1.05-1 .1 pressure. That is, the gas-type dependent ionization cross­ 02 0.8-0.9 section differs by almost a decade at the electron energies with Different Gases Ar 1.2 in a BAG. The table to the side shows relative sensitivities for a Bayard-Alpert gauge tubes where the gas sensitivity for Hg 3.5 nitrogen (N2) has been normalized to 1. Acetone 5

The pressure of any gas is found by dividing the Construction Styles gauge reading by the relative sensitivity. The Bayard-Alpert design of the hot cathode ionization gauge is manufactured in two different styles: a nude gauge where the I on Collector I on Collector electrode components extend past the vacuum sealing flange; I and a glass enca psulated gauge where the components are � enclosed in an envelope of a glass and the vacuum flanged is a side port off the glass tube (see fig. 10-13 to the side). The glass ion gauges are the least expensive and by fa r the most popular for general high vacuum applications. The nude gauge is more Filament expensive but better suited for ultra-high vacuum process. "'-.. Standard series hot cathode ionization gauges have measurement accuracies better than± SO% which is more than adequate for the average high vacuum system where the user only needs a pressure reference to know that the system is working correctly. Rea listie, gauge-to-gauge pressure measurement variations can be expected to be with± 1S% for identical new gauges and on-site calibration should be required if accuracy greater than± SO% is required from a standard BAG. There are modern high-accuracy hot cathode BAGs available that boost ± 3% measurement accuracy, fo llowing calibration against NIST standards. Virtually all commercially available hot cathode ion gauges are built on the standard Bayard-Alpert design. This makes it possible for generic ion gauge controllers to work with gauges from many different manufacturers.

Nude lon Gauge Glass Encapsulated lon Gauge

10·9 www.idealvac.com (505)872-0037 Vacuum Pressure Measurement f]) �======Pressure Gauges Hot Cathode Glass lon Gauges The glass tubulated Bayard-Alpert hot cathode ion gauges are 0.005 in., this causes the collector to be mechanical un-stability the most common, least expensive, and meet the pressure and easily bent or broken (handle with care). The extra thin UHV measurement needs for most general high vacuum systems. collector wire is not as efficient at collecting the positive gas Their lowest measurable pressure is limited to their X-ray molecule ions. This sensitivity loss is overcome by the improved photoelectron current, just as with nude gauges. Glass gauges double helical grid with enclosed ends that trap the molecular with all-metal sealed Conflat flanges have the same 450 °C ionsuntil they eventually collide with the collector. The improved bakeout temperature as the nude gauges. This is not the case for grid design also acts better at containing the high energy the glass gauges with compression port fittings which are limited electrons so that a lower emission current is need (typically, 4 to the lower bakeout of the 0-ring sealing milliamps of UHV BAGs). material, typically 100 °C. When possible, the largest side port diameter should be chosen to maximize conductance. Glass Filaments tubulated gauge have more surface area than nude gauges which Single and dual-filaments are available for both glass tube and requires a higher attention to . They are fragile and nude hot cathode ionization gauges. Dual filament gauges help can result in a safety . If broken under vacuum they would avoid havingto beak vacuum if a filament burns out. Nude gauges implode. For this reason, they should be shielded, mounted in often have the ability for the vacuum user to replace the areas where they are unlikely to be bumped, and include cables filaments, which adds cost and downtime savings, unlike glass with strain relief. An electrostatic charge can build on the inside gauge tubes which are disposable when the filaments burn out. of glass ion gauge tubes which can cause the pressure reading to become unstable at its lowest measurable pressure limit. To Filaments increase stability of the lowest measurable pressure, some Tu ngsten (W) filaments operates at high temperatures between manufactured models include a conductive thin-coating of 1,900 and 2,200 °C which causes ra pid outgassing of the platinum on the inner glass wall which is connected electrically filament, including contaminate gases which will rapidly to grounded, this gives a slight advantage over uncoated glass evaporate from the filament surface. The ra pid heating of gauges. Glass ion gauges are disposable when the filaments burn surrounding walls at elevated temperatures produce large out. outgassing levels. Such high temperatures also produce increased reactivity of the filament. These characteristics make Nude lon Gauges tungsten not the best choice for UHV measurements. The tungsten filaments undergoes metal at higher The nude hot cathode ionization gauges eliminate the pressure pressures, by a proposed mechanism where (02) and differential normally associated with tubulated gauges. They water molecular (H20) aids in forming tungsten oxides (W02 and have unrestricted conductance allowing for a rapid response to W03). Tu ngsten filaments can act as a weak oxygen pump pressure changes in the . They have minimal permanently removing oxygen from the vacuum gases. Filament surface area and outgassing when compared to the tubulated life can be reduced to 10-20 hours when operated at high gauges. Those with all-metal sealed Conflat flanges can be baked pressures near 10-3 to 10-2 To rr. Under clean dry vacuum out at 450 °C. Nude gauges are more expensive than glass. The conditions with pressures lower than 10-6 To rr, tungsten glowing hot filament is not visible to the vacuum operator which filaments can last 1000's of hours. Tu ngsten filaments are easily increases the chance that it could be accidentally over pressured. to permanently damage if they are exposed to atmosphere while Nude gauges have user replaceable filaments that are a cost hot, that is, one accidental exposure can burn out the filament. effective when they burn out. Tu ngsten filaments are the least expensive, the most popular, and can be identified as an overall straight filament with small Some modern Ultra-High Vacuum (UHV) versions of the nude tightly wound helical curl-like shapes. Tu ngsten filaments style Bayard-Alpert Gauge (BAG) allow for pressure provide better electron emission stability over the long term measurement down to 10-12 To rr. These precision gauges since they are more likely to maintain their original shape. They achieve lower detection limits by reducing the X-ray do not elongate and sag over time as often is the case with photoelectron current. This is done in several manufacturing filaments. changes; by reducing the diameter of the collector wire lowering the X-ray collector collision cross-section, the anode grid (squirrel-cage) is manufactured from fine wire which reducing the amount of X-rays generated, and the grid has enclosed ends to increase its sensitivity up to values of 25 To rr-1 for nitrogen or air. UHV collector wire is fine, often with diameters as small as

www.idealvac.com (505)872-0037 10·10 fDVacuum Pressure Measurement

�Pressure Gauges

Thoriated Iridium Filaments Radiation Resistant

Thoriated Iridium (Th02ir) filaments are prepared by depositing Nuclear and scientific applications, such as, nuclear power plants layers of theria (thorium oxide) on to the iridium metal. These or in particle detectors require vacuum gauge sensors and sensor filaments are very resistant to oxidation and can survive being cables to be resistant to radiation and high temperatures. temporarily turn on at atmospheric pressure; these benefits Ordinary thermoplastic insulation becomes brittle when make them the best choice for applications with repeated exposed to radiation. Wires and cables protected by special operation near 10-3 To rr. Thoriated Iridium filaments operate thermoplastics, such as, Victrex or PEEK insulation resists even around 1400 °C which is relatively cooler than tungsten, allowing high doses of ionizing radiation, performing much better than them to generate less outgassing and be less chemically reactive. PTFE and Te flon cable coverings. The high insulation resistance Thoriated Iridium (Th02ir) filaments are more expensive than and a high breakdown voltage make this insulated cables ideal tungsten and can be identified as smooth ribbon looking material for delicate vacuum instrument signals and high voltage formed in 'hairpin' style u-shape. The iridium filaments are applications, such as, hot cathode ionization cables. Radiation thought to be less stable over time because they are more prone resistant vacuum gauge sensors should be basic in design, to loss their shape elongate and become relatively unsupported. manufactured with all metal sealed bodies, being free of on­ Some iridium filament holder designs include a spring to remove board and circuits that could be damaged by slack as the filament elongates with time. radiation or high temperatures. These same requirements often overlap with the required properties of Ultra-High Vacuum (UHV) systems that require high-temperature bakeout processes. Degas Cleanliness of ion gauges has great effect on its performance. It is The soft X-rays generated, inside the Bayard-Alpert gauge (BAG), possible for the vacuum pressure in a vacuum chamber to be during high energy electron collisions with the anode grid are too dominated by a hot cathode gauge and its surroundings if it has weak in energy to penetrate outside the gauge envelope and are not been correctly degassed. ion gauge degas is accomplished by not considered a risk to the external vacuum chamber resistance heating (12R) or electron bombardment (EB). During components or its operator. 12R degas, a large current, for example, 10 Amps at 8 VAC is passed through the anode grid structure, raising its temperature and driving off contaminants. The degas process also raises the temperature of all electrodes and surrounding surfaces. Degas bakeout is typically 450 °C or higher for 1 hour and is effective at removing impurity that can change the emission efficiency of the cathode filament. The cathode can be poisoned by reactive gases, such as oxygen (02), carbon monoxide (CO), and carbon dioxide (C02). It can take up to several hours after degas to reach thermal equilibrium and display accurate readings.

UHV versions require electron bombardment (EB) degas due to the thin anode grid wires. In EB the bias voltage can be raised to 500 VDC and the grid is bombarded with high energy electrons emitted from the filament at 30 VDC. An increased emission current of several 10's of milliamps are enough to heat the grid and collector electrodes to a dark red which is very effective at outgassing and removing contaminants providing clean surfaces. UHV gauges are unstable for a period of sometime several hours after degas as the surfaces pacify from the very effective cleaning process. BAG degas in UHV applications is best carried out while heating and outgassing the rest ofthe vacuum systems.

(505)872-0037 Vacuum Pressure Measurement f])

...... ==Pressure """"""' Gauges Cold Cathode Ionization Gauges Cold Cathode Gauges (CCG) measure pressure by ionizing the vacuum gas inside a stable discharge. The ionized molecules carry the current between the two electrodes and the current is measured to calculate the pressure. They can measure vacuum pressure from the 1x10-2 To rr down to the ultra-high vacuum, 10-11 To rr. Cold cathode gauges are often called Penning, Phillips, and magnetron gauges (sometimes called a discharge gauge). How the Cold Cathode Ionization Gauge Works The cold cathode ionization gauge contains two electrodes, an electrical fields increases the rate of ionization per electron, to electrically grounded cathode (electron source) usually cylinder make the paths of the electrons so long that their collision or ring shaped and an anode (electron collector) held at positive probability with gas molecules is sufficiently large to maintain the high voltage (see the inverted magnetron cold cathode gauge discharge. Some collisions are energetic enough to break complex circuits in figure 10-14 below). The potential difference across molecules up into several smaller fragments which can contain these electrode is typically in the 2 to 6 KV positive voltage DC one or more positive ions. These positive molecular ions are with respect to the cathode. A discharge is initiated as a gas attracted to the cathode and since they are relatively massive are molecule is ionized forming a positive molecular ion and its free not trapped by the . The measure of ion current electron, the positive ion is attracted to the grounded cathode reaching the cathode is used to calculate the pressure. The cold electrode while the negatively charged electron is attracted to cathode ion gauge controller measures the ion current and uses the positively charged anode. The gauge operates in a magnetic that to display the calculated pressure. In modern inverted field, around 1000 Gauss (0.1 Te sla), from an external magnet magnetron cold cathode gauges the ion current versus vacuum and is arranged so that the magnetic field lines cross the applied pressure is relatively linear, when compared to older cold cathode electrical field lines. The negatively charged electrons from the designs. discharge deflect through the magnetic field in spiral with an orbiting motion around the central anode A key design requirement of cold cathode ionization gauges is to (see electron trajectories in figure 10-15 below). The discharge keep the discharge stable in a steady-state which requires that the electrons are accelerated to high kinetic energy but are trapped electron cloud be replenished as electrons are captured by the between the two electrodes by the crossed magnetic and anode. This is accomplished as electrons are often ejected from electric fields so that they cannot plummet with straight the cathode when the fast moving positive ion molecules strike it. trajectories from the cathode to the anode. The effect is called a An electron is also generated during each ionizing collision as part trapped electron cloud. Ionization happens when a trapped of the positively charged molecular ion and electron pair electron hits a gas molecule with enough kinetic energy to knock (described above). The electron cloud is held in a stable state an electron from a molecular orbital within the molecule leaving through the whole operating pressure range of the gauge. The it as a positive charged molecular ion. An additional electron is current across the discharge is balanced, that is, the amount of generated as a result of the ionizing collision and it is accelerated positive molecular ions that reach the cathode is equal to the on to repeat the ionization process with another gas molecule. of electrons that escape through the electron cloud to the The cold cathode gauge design with crossed magnetic and anode. magnet envelope E9Magnetic field anode feedthrough into the page c����::����cathode feedthrough

lon and electron trajectories Circuit for operation-of a cold cathode in the inverted magnetron inverted magnetron gauge

www.idealvac.com (505)872-0037 10·12 fDVacuum Pressure Measurement ��-----Pressure Gauges Uppper Pressure Limit Design Versions The upper pressure limit of the cold cathode gauge occurs The cold cathode gauge has several different designs, the around 10-2 To rr where the discharge starts to change to a Penning gauge, the magnetron, and the inverted magnetron see glowing discharge and at this point the ion current vs pressure (Fig. 10-16 below) These designs differ in their ability to trap a becomes non-linear. At higher pressure the gas density increases, stable electron cloud which affects their corresponding mean-free path reduces, and the discharge electrons and ions sensitivity. The Penning gauge is often the least expensive and is collide with neutral gas molecules very frequently. These less stable. The main difference between the magnetron and constant collisions limit the electrons velocity and their kinetic inverted magnetron gauges are that the anode and cathode energy. They are not energetic enough to ionize neutral gas electrodes are inverted (in opposite orientations). In the inverted molecules but instead transfer a portions of their kinetic energy magnetron design, a metal pin anode is surrounded by a to them preparing a neutral gas molecule with stored internal rotationally symmetrical cathode. A permanent-magnet ring is energy. Radiative decay is one of the various ways that the meta­ placed on the exterior of the measurement chamber to generate stable gas molecule can relax, giving off a , releasing its the magnetic field. The inverted magnetron also includes end stored internal energy as . As the gas pressure increases caps on the cathode to better trap the electron cloud and keep towards viscous flow, where gas-gas collisions dominate, the electrons from escaping out the ends. This improvement of the discharge energy is absorbed by the neutral gas molecules. At inverted magnetron allows its design to be more stable in the these higher pressures the discharge current is no longer directly ultra-high vacuum where gas density is very low. In the 10-11 To rr related to the gas pressure and is not useful as a pressure range of the ultra-high vacuum an electron trapped in the measurement. electron cloud can spend minutes before it undergoes a collision with a gas molecule. Conflat Flange

Direction of Magnetic Field

Permanent Magnetic•• •••• Direction of Magnetic Field Ring j ••••••

Perman ! Jf Magne�:� Ring �

Flange

FIG. 10- 16 Pumpi ng Action Penning Magnetron Gauge Cold cathode ionization gauges act as weak with CO, C02.) A characteristic of these gases is their ability to easily estimated pumping on the order of 0.011iters per second. react with most metals forming stable compounds. This getter The pumping mechanism is very similar to how ion pumps work. pumping mechanism can cause cold cathode ionization gauges to When the positively charged molecular ions impact the cathode provide a fa lse reading that is lower than the actual chamber they can eject metal atoms from the cathode surface. This pressure. It is not recommend to connect CCG gauges to the process is called of the cathode where this material vacuum chamber using long narrow vacuum tubing as this would forms a gettering thin film on the wall surfaces ofthe gauge and promote a pressure differential between the gauge and the cathode. The fresh sputtered material film is reactive with gas chamber. molecules forming chemical bonds that trap active gases (N2, 02,

(505)872-0037 Vacuum Pressure Measurement f]) ·�======Pressure Gauges Bakeout Some models are bakeable up to 500 °C with Conflat flanged CFF very similar to the hot cathode ionization gauges. Ta ke the vacuum ports. Bakeout often requires removing the outer body magnetic field into consideration when installing the gauge as it magnet and electrical cable connector. can interfere with sensitive equipment. While the inverted magnetron design ensures good linearity as compared to a standard cold cathode gauges they are generally not as stable and Radiation Resistant linear as a well-maintained Bayard-Alpert type hot cathode ion Cold cathode gauges can be manufactured as radiation resistant gauges. Even though the cold cathode gauge is more chemically pressure sensors. These versions should be all metal sealed, resistant then the hot cathode gauge it still requires should not include on-board electronics, and all electrical maintenance. In some industrial processes, for example, dilute insulators and vacuum feedthroughs should be compatible for organic vapors are present in the pumped gases where the operation in a high ionizing radiation environments. Radiation discharge will break them down fo rming a carbon built-up layer resistant wires and cables should be protected by special on the electrodes making the gauge unstable. This will require the thermoplastics, such as, Victrex or PEEK. The use of Teflon or CCG to be opened and cleaned. PTFE type materials for any component is prohibited.

Conclusion The cold cathode ionization gauge is extremely rugged and are often better suited for industrial applications where the process can be dirty. They are less expensive and have simpler electronics in their gauge controllers than hot cathode ionization gauges. The cold cathode gauge has a robust design which allows them to be opened and cleaned in-house by the vacuum system user without needing to be recalibrated. They are insensitive to the inrush of air and do not have delicate filaments to break or burnout due to high-pressure. They have all metal bodies being robust, virtually unbreakable, and do not have fine grid wires that can be damaged during installation. The cathode and gauge are cold, they operate at room temperature, so outgassing is not as much a problem and they are less reactive to process gases when compared to hot cathode ionization gauges. They operate on less power, typically only a Watt or less, the amount of power decreases as the pressure decreases. They are well suited for applications where the presence of stray electrons and can cause problems in the vacuum system.

Starting a cold cathode gauge can sometime be difficult at lower pressures where gas density is low. This is especially true where contamination build-up on the electrodes can result in extended starting times, especially at high vacuum. Starting the CCG at UHV pressures requires a stray electron to initiate the discharge process. Some manufactured improvements can aid starting, such as, sharp points on electrodes to induce field emission or adding a small radioactive sources to induce the X-ray photoelectron effect. Cold cathode gauges can have pressure measurement jumps, where the positive ion current vs pressure recording skips (producing discounted values). This was more a problem with the original Penning design and less an issue with the improved inverted magnetron gauges. The pressure measurement is dependent on the type of gas measured, this is

www.idealvac.com (505)872-0037 10·14 fDVacuum Pressure Measurement

"""""'"""""'"""""'"""""'"""""'"""'"""""'""-Pressure &auges Hot cathode Ion Ultra High Vacuum liranville Phillips Jft'1Confp ¥lf igurpkl1 ed/11 For:I 1 Ion Gauge Controller \ 19" Half Rack Mount 1i•J 1 Line Digital Display NO Interface Module Cards Series 274 UHV Nude Ion Bayard-Alpert Gauge Electron Bombardment Degas Remote Input/Output Interface Nude ion UHV Reads in To rr, 115 VAC Gauge (for other configurations see below) Measures only high to ultra high pressures no roughing pressures. Bayard-Alpert UHV Gauge Controller operates a IDEAL VACUUM GP Series 274 Nude Bayard-Alpert type ionization gauge in a compact half­ SERIEs 350 ne. e * rack design. The hot cathode ion gauge measures high vacuum pressure P/N P/N p from 1 Q-3 to 1 Q-11 Torr. Cables, I on Gauge Tubes and Interface Module Cards are available but sold separately. P1 04940 350501-0-T1 $1,702.50 Other Configurations for 1 Line Display 350 UHV Controller (Call for Price) 19" Half-Rack Mount 350501 - # - # # GRANVI LLE PHILLIPS Left Mount for 19" Rack 350502 - # - # # P/N Center Mount for 19" Rack 350503 - # - # # With Interface Module Cards NONE RS-232 RS232 or RS-485 switchable w/ 4 setpoints 2 setpoint relays for the ionization gauge Measurement:Un it:s Torr T mbar M �------� pascal �p 1�------1 Power Cord Options North American 115 VAC 1 North American 240 VAC 2 Universal Europe 220 VAC 3 �------� United Kingdom 240 VAC 4 Optional Interface Module Cards for 1-Line Display UHV 350 IDEAL GP Interface Module Cards P/N P/N Price* Emission Range RS-232 computer Interface* P1 04941 350003 $466.25 .01 rnAto 0.1 rnA 0.1 rnAto 1 rnA 1 rnAto 10 rnA 9 2 10 3 11 4 R5232 or RS-485 switchable w/ 4 setpoints* Pl 04942 350027 $686.25 1 x 10- to 1 x 10- Torr 1 x 10- to 1 x 10- Torr 1 x 10- to 1 x 10- Torr 1 2 setpoint relays for the ionization gauge* Pl 04943 350002 $375.50 Readable to 10 I 11 12 1 x 10- Torr 1 x 10- Torr 1 x 10- Torr

lon Gauge Sensitivity 2/Torr to SO/Torr (factory setting is 25/Torr Emission Current 10 uA to 1Om A in 3 decade ranges (from factory 1 mA) Collector Potential OV Grid Potential + 180V during normal operation +530V during degas operation Filament Potential +30V * Only one card Degas EB 40 watts approx. with 15 min. turn off timer can be used with the 3 card option Analog Output 0-1 OV; Logarithmic; 1 V/decade P104942

*Catalog Pricing Subject to Change

(505)872-0037 Vacuum Pressure Measurement f])

Pressure &auges Hot cathode Ion----..""""""""""""""""""""""""""" Jfp p J;l J Ultra High Vacuum Granville Phillips t'1Conf¥ltkl1igur ed IFo Ionr: Gauge Controller 19" Half Rack Mount '\,, 3 Line Digital Display NO Interface Module Cards Series 274 UHV Nude Ion Bayard-Alpert Gauge Dual Convectron Gauge Operation Electron Bombardment Degas Remote Input/Output Interface Reads in To rr, 115 VAC (for other configurations see below) vectron Gauges Bayard-Alpert U HV Gauge Controller operates a Series Measures roughing, high and ultra high pressures. SERIES274 Nude Bayard-Alpert 3 5 Q type ionization gauge and dual convectron gauges in a compact half-rack design. The hot cathode ion gauge measures IDEAL VACUUM GP . high vacuum pressure from 1 o-3 to 1 o-11 Torr and the convectron sensors nee * typically measure atmosphere to 1Q-4 Torr. Cables, lon Gauge Tubes, P/N P/N p ConvectronOther SensorsConf andig Interurfaceations Cards are fo availabler 3 butLi soldne separately. Display P1350 04939 UHV Contr350507oller-0- T1(C all$2,27 for Pric1.25e) 19" Half-Rack Mount 350507 - # - # # GRANVILLE PHILLIPS Left Mount for 19" Rack 350508 - # - # # P/N Center Mount for 19" Rack 350509 - # - # # With Interfa ce Module Cards NONE RS232 or RS-485 switchable w/ 4 setpoints Measurement Units � Torr T 11------'t mbar M r------� pascal p Power Cord Options North American 115 VAC 1 North American 240 VAC 2 r------� Universal Europe 220 VAC 3 United Kingdom 240 VAC 4 Optional Interface Module Card for 3-Line Display UHV 350 IDEAL GP Interface Module Cards P/N P/N Price* Emission Range .01 rnAto 0.1 rnA 0.1 rnAto 1 rnA 1 rnAto 10 rnA RS232 or RS-485 switchable w/ 4 set points P1 04942 350027 $686.25 2 1 x 10-9 to 1 x 10- Torr 1 x 10-10 to 1 x 10-3 Torr 1 x 10-11 to 1 x 10-4 Torr 1 This Card Readable to 10 I 11 12 1 x 10- Torr 1 x 10- Torr 1 x 10- Torr

lon Gauge Sensitivity 2/Torr to SO/Torr (factory setting is 25/Torr Emission Current 10 uA to 1Om A in 3 decade ranges (from factory 1 mA) Collector Potential OV Grid Potential + 180V during normal operation +530V during degas operation Filament Potential +30V Degas EB 40 watts approx. with 15 min. turn off timer Analog Output 0-1 OV; Logarithmic; 1 V/decade

* Catalog Pricing Subject to Change

www.idealvac.com (505)872-0037 10·16 fDVacuum Pressure Measurement

""""""""""'"""""'"""""'"""""'"""""'"""""'"""Pressure &auges Hot cathode Ion Granville Phillips f!tJQIXIflll G��gb� l���n c�:��o��r

l

This is a 370 Stabil-lon Gauge Controller and PS side by side for a 19" rack mount with RS232, Dual Convectron Gauges with 6 Set points, reading Torr. GP Part No. 370501-A 1 B-Tl STANDARD model does not come with dual convectron option.

370 UHV Controller Techn ica l SPECIFICATIONS Controller measuring range for N2 or air UHV Stabil-lon Gauge (with convectron) Stabil-lon Gauge Torr 2x 10-11 to 999 Torr Measuring range for N2or air 9 2 7 9 2 mbar 2x1Q·11 to 1.33 x103 mbar 0.1 mA emission 4 x 1Q· to 2 x 1Q· Torr, 5 to 3 x 1Q· Pa, 5 x 1Q· to 3 x 1Q· mbar 11 4 9 2 11 4 Pa 2 x 1Q·9 to 1.33 x 1 oS Pa 4.0 mA emisson (UHV) 2 x 10- to 5 x 1Q· Torr, 3 x 1Q· to 7 x 1Q· Pa, 3 x 1Q· to 7 x 1Q· mbar 4 Extended Range Stabil-lon Gauge (with convectron) 4.0 mA emission (ext.) 2 x 1Q·10to 5 x 1Q·4 Torr, 3 x 1Q·B to 7 x 1Q·2 Pa, 3 x 1Q·10to 7 x 1Q· mbar 11 9 11 Torr 2x 10·10to 999 Torr X-ray limit (UHV) 2 x 10· Torr, 3 x 1Q· Pa, 3 x 1Q· mbar mbar 2 x 10-10 to 1.33 x 103 mbar Materials exposed to gas All vacuum fired, UHV compatible B Pa 2 X 1Q· to 1.33 X 1 OS Pa Gauge operating temp. 0' C to 50' C ambient, non condensing B 4 3 3 Accuracy for N2 ± 4% of reading from 1 x 1Q· Torr to 1 X 1Q· Torr Internal volume 73.0 cm , (4.45 inch ) to the port screen B 4 Repeatability ± 3% of reading from 1 x 1Q· Torr to 1 X 1Q· Torr Gauge bakeout temp. 450' C maximum (non-operating, cable removed) Emission Current 0.1 mA and 4.0 mA Max. gauge cable length 61 meters (200 ft.) Stabil-lon analog output 1 /decade, logarithmic, 0 to 10 Vdc Degas Electron bombardment, 40W, 1 to 30 min. adjustable Convectron Gauge4 (Optiona-2 l) 4 3 Power required 90 to 130 Vac, or 180 to 250 Vac, 50/60 Hz, 220W max Range for N2or air 1 X 1Q· to 999 Torr, 1 X 1 o to X 1.33 1 OS Pa, 1 X 1Q· to 1.33 X 10 mbar Operating temp. 0' C to 40' C ambient, non-condensing Mounting position Horizontal preferred, with port down Non-operating temp. -40' C to 70'( Sensor material Gold plated tungsten Display 3 digits, plus exponent, green LED, Torr, mbar, or Pa Materials exposed to gas 304 stainless steel, nickel iron alloy, borosilicate glass polymide Digital Interface options RS-232, RS-485 or IEEE-488 Internal volume 33 cm3 (2.14 inch3) Convectron gauge option Operates 2 gauges Gauge operating temp. 0' C to 50' C ambient, non condensing Analog output 1 volt/decade, logarithmic, 0 to 7 Vdc Gauge bakeout temp. 1 50'( maximum, non-operating, cable disconnected Setpoint options 2 relays for Stabil-lon gauge or 6 relays (2 per channel) Cable bakeout temp. 105' C maximum Configuration Single pole, double throw (SPOT) Max. gauge cable length 152 meters (500 feet) Contact rating 5 A at 250 Vac, SA at 40 Vac, resistive load

* Catalog Pricing Subject to Change

(505)872-0037 Vacuum Pressure Measurement f]) Pressure &auges Hot cathode Ion Granville Phillips E14Q1XIflll G��gb� l���n c�:��o��r Configured For: 19" Rack Mount w/side by side PS 3 Line Digital Display RS232, 6 Set Points GP Stabii-Ion Gauge GP Dual Convectron Gauge (Optional) Electron Bombardment Degas Remote Input/Output Interface Reads in mbar, 115 VAC (see below for other pressure readout) •

IDEAL VACUUM GP . P/N P/N p nee * • t Stabil-lon � Co t on t Gauge ••• ����! P1 04976 370501-000-M1 $2,956.80 The Granville-Phillips Stabil-lon Vacuum Gaugeand Controller combine the latest technology in ionization gauges and control Selectronics,ERIES giving3 7 0 you the most reliable and accurate vacuum pressure measurements for your systems and research. Bright LEOs display the pressures read by the Stabil-lon and Convectron Gauges. The flexible, modular design offers a range of computer interfaces, setpoint control relays, dual Convectron Gauge operation, and digital display in Torr, Millibar, or Pascal to meet your specific requirements. Other features include analog output, selectable emission3 Line current, degasDisplatimer, y and 370 selectable UH N2/V Ar gasContr for Convectron.oller ST (CANDARDall foModelr doesPric note) include Dual Convectron.

GRANVILLE PHILLIPs PIN Configuration Options: 370 ### - ### - ## Left mount side by side with Power Supply for 19.. rack 501 Half rack mount with remote Power Supply 502 1 t Interface Opt ions (Slot X) NONE 0 RS232 A RS-485 B IEEE-488 c

Gauge Optio ns (Slot Y) NONE Dual Convectron Gauge o1 l Setpoint Options (Slot Z) I NONE 0 2 setpoint relays for Stabil-lon Gauge A 6 setpoint relays, 2 per channel B Display Options Torr T mbar M Pa p IDEAL P/N GP PIN Price* Power Cord 0 ptions Interface Module Cards RS·232 computer interface 370110 North America 1 15vac & Japan 1 OOvac 1 · =.Jl 370150 North America 240vac 2 RS-485 computer interface I Universal Europe 220vac 3 1- IEEE·488 computer interface I 3701 11 - United Kingdom 240vac 4 Dual Convectron Gauge •J • 370106 Interface Module C ards Select up to three option cards - one for Process control w/ 2 set point relays for ion gauge ;t f 370108 s• !:::::, each slot. The con troller will be assembled with the option cards Process control w/ 6 set point relays, 2 per channel 05349 3701 07 $565.60 installed. The card s are also sold separately see side box. Call 505-872-0037 for tPricese1

*Catalog Pricing Subject to Change

www.idealvac.com _.vacuum roducts 10·18 (505 872-0037 Id eap ( fDVacuum Pressure Measurement

"""""'"""""'"""""'"""""'"""""'"""""'"""""'"""Pressure &auges Hot cathode Ion sTANDARD MOD EL Dual Ion Vacuum Gauge Controller (Can be ordered with Optional liranvl .11 e phI.11. I PS f.1qMLtkJ1ll llIN TERFACE MODULE CARDS)

2 lon Gauges Glass Tubes or Nude, (not UHV) one at a time This is the STANDARD MODEL Three Line Display Dual Hot Cathode I on Vacuum Gauge Controller and P.S. side by side for a 19" rack mount. Measures Two ionizaiton gauges (IG) GlassTubulated or Nude (NOT ���r SPECI FICATIONS UHV) oneatatimeinTorr. Ideal Vacuum Part Number P1 04901 Displayc�0r?t� Unit Green LED, Torr, mbar, Pa (1 unit per controller) -11 1 Controller Pressure Range Lower -1 X lQ Torr I Upper -1 X 1 o- Torr Optional Interface Module Cards for 3-Line Display 307 VGC Emission Current Controlled, adjustable from 0.01 to 1 O.OmA Interface Module Cards IDEAL GP Ionization Gauge Analog, (B-A) and other compatible ion gauges & Mounting Hardware P/N P/N Price* Standard Electrometer Sensitivity and emission adjustments for IG tube Dual Convectron Gauges P104902 307013 $576.25 Operating Temp. 40' C maximum ambient Power Required 90 to 130VAC, or 180 to 250Vac, 50/60, 220W max. Dual Thermocouple Gauges P104903 307014 $725.00 Additional Module and Function Specifications Process Control with 6 set points P104904 307017 $531 .25 Available Interfaces IEE-488, RS232 or RS485, Pressure Data & Set Points Process Control with 2 set points P104905 307018 $233.75 Remote ON/OFF control for IG1, IG2 and degas Dual lon Gauge IEEE 488 P104906 307020 $563.75 High Performance UHV Extends pressure to 2 X 10-11 Convectron & Capacitance Diaphragm P104907 307026 $776.25 Electrometer Provides Electron Bombardment power adj. control Linear Analog Output I Thermocouple & I on P104908 307100 $272.50 Sensitivity adj. & independent control for 2 ion gauges Remote Input/Output for I on Gauge status Convectron Gauge Pressure 1 x 1 o-4 to 990 Torr with two GP 275 Tubes P104909 307012 $142.50 Thermocouple Gauge Pressure 1 x lQ-3 to 990 Torr with two GP 270 Tubes RS-232 Computer Interface Module P104900 307019 $485.00 Capacitance Manometer Max. capacitance range 1-10 -100-1000 Torr Mount Hardware for 1 or 2 P.S. 19" rack P104910 307008 $94.50 Process Controls Two channel (for IG only). Six channel (all gauges) P. S. cable and plate for side by side 19" rack P10491 1 307009 $94.50 2 I on Gauge Operation Two tube sequential operation, Hot B/A Type Mounts control unit on left or right 19" rack P104912 307010 $94.50 Remote Input/Output Provides status contacts for IG1, IG2 fault Mounts control unit in center of 19" rack P104913 307011 $94.50 detection, ON/OFF Controls, & lock out switches Mounts 2 control units side by side 19" rack P104914 307021 $94.50 Degas Half rack panel for mounting Power Supply P104915 3071 14 $94.50

* Catalog Pricing Subject to Change

(505)872-0037 Vacuum Pressure Measurement f]) Pressure &auges Hot cathode Ion v cu��a :�;ec����roller Granville Phillips E14RIXfiltllConf a iguJred For: 19" Half Rack Mount 3 Line Digital Display 274 glass turbulated or nude NOT UHV BA gauges Electron Bombardment Degas Remote Input/Output Interface Reads in To rr, 115 VAC (for other configurations see

2 Convectron Gauges 2 Thermocouple Gaug (with optional card) (with optional card) IDEAL GP . P/N P/N p nee *

NUDE • ! • t GLASS 1 P104901Standard 30750 model runs2-000-Tl 2 ion gauges (1 at a time)$1 992 50 The Granville-Phillips Dual lon Gauge Controller combines the latest technology in ionization gauges and control electronics, SERIgiving youEs the most30 reliable7 and accurate vacuum pressure measurements for your systems and research. Bright LEOs display the pressures read by the lon Gauges, Convectron Gauges and Thermocouple Gauges {depending on modules}. The flexible, modular design offers a range of computer interfaces, setpoint control relays, dual Convectron Gauge operation, and digital display in Torr, Millibar, or Pascal to meet your specific requirements. With availableOp moduletionss, controls for fo ur3 gau Lineges, measuring Displa pressurey 307from 2 x VG1 o·l lC Torr Contr to atmospherollere, with (C none,all two fo or sixr processPrice) control set points. Configured for Series 274 glass tubulated or nude GRANVILLE PHILLIPS P/N (NOT UHV) Bayard Alper gauges with resistive degas _Le_ft_m__ou_n_t _sid_e_b�y_s_id_e_w_it_h_Po_w_e_r_Supp�ly_fo_r___r_a_ck 30__75_0_ �� ______1 9'' __ 2 ____ _ ### -## Half rack mount with remote Power Supply 307501 ------Interface Options (Slot X) NONE 0 RS232 A RS-485 8 �------� IEEE-488 c Linear Analog Output D Gauge Options (Slot Y) NONE 0 Dual Convectron Gauge 1 �------� Convectron I Capacitance Diaphragm 2 Dual Thermocouple 3 Gauge Option s (Slot Z) NONE 0 2 setpoint relays for ion gauge A �------� 6 setpoint relays, 2 per channel B 6 setpoint relays, user configurable c Display Options Torr mbar Pa T l Power Cord Options � �r------� North America 115vac & Japan 100 vac 1 North America 2 �------� Universal Europe 220vac 3 United Kingdom 240vac 4

* Catalog Pricing Subject to Change

www.idealvac.com (505)872-0037 10·20 fDVacuum Pressure Measurement

"""""'"""""'"""""'"""""'"""""'"""""'"""""'"""Pressure &auges combination Combination Vacuum AlillENT rarian l/ltlll1tltl Gauge Controller Measures atmosphere to 1 x 10-11 Torr Features Include: depending on module card ------(with OPTIONAL Interfa ce and gauge type. Operates up to 12 gauges Displays up to 8 gauges at once 8 gauge set points Fully programmable RS232/485 FRG-nomo User Configurable Pressure units To rr, Mbar, Pa Operates ALL Agilent Vacuum Gauges:

• Convection (thermocouple & ConvecTorr)

• Hot filament ion gauges

• Inverted magnetron I (cold cathode or Penning) ""��.,li4 ConvecTorr '1

The AgilentTechnologies Combination Vacuum allows up to six XGinterfaceS-600 cards to be installed. This makes for practically any combination to suit your particular vacuum needs. This yields maximum flexibility for diffe rent types of vacuum sensor/gauges to be used. The XGS-600 controller allows for simultaneous operation of up to 12 gauges and can display readings for up to 8 gauges at any one time. All settings are stored in flash memory, so no worry about reprogramming after a power outage. All interface cards, cables and sensor/gauges sold separately. PVG-500 IMG-100 'onal lnterface Module Cards & Install Hardware for XGS-600 S PECIFICATIONS UserXG InterS-600face LCD monochrome dot matrix, 240 X128, white back light, 5 button keypad Display Capability Up to eight simultaneous channels of pressure measureme Dual Convectron Gauge Card R3084301 up to a 5 character user label for each, up to two channels Dual Analog Input Card R3487301 Profibus DP Interface Card R3494301 in a large font, readable from 25 ft., updates every 200 msec Rack Mou::..:n;..:.tin"'g 1 9 '' Oc...:.FF C:.:e::.c.n.:.:ter 1 P:..::I ac:.:te=---- P...!.1.04_,_- ,_1 4,_,0'--- L6422301- $99. 99 auge Capability Up to 4 Hot filament BA gauges including metal, glass, and ;=-=;.:..C� ;.:: -,;.;;". � .;:= ":::-';o, :: :c ;:c:-7:�::-;:-; -7� �� Rack Mounting 19" On' Center 2 Plates P1 04141 L6423301 $99.99 nude UHV types using the HFIG cards, up to S IMG's using the Tilt Stand for XGS-600 Accessory p1 04142 R3124301 $99.99 IMG cards, up to 12 rough gauges using the Dual Convectron Gauge Cards, up to 12 Active Gauges using Dual Analog Input Cards Measurement Range 1 x 1 o-1 1 Torr to Atm depending on card and gauge type Setpoints Eight normally open set points (open collector), with independently programmable ON and OFF delays, manual override Setpoint Response 20 msec. max. (with delay set to 0.0 sees.) Serial Comm. RS232 and RS485, Profibus DP (optional) Analog Outputs 1 v/dec LOG, 0-1 OVFS, on each card with 200 msec update 1/0 Control HFIG card, Remote gauge ON/OFF, F1 1 select, degas ON/OFF inputs, Status Output IMG card, Remote gauge ON/OFF Status Output Dual Convection Card, Remote CAL inputs, Status Outputs Dual Analog Input Card, Remote CAL inputs, Status Output Power Universa1 1 00-240 VAC, 2 50/60hz

*Catalog Pricing Subject to Change

(505)872-0037 Vacuum Pressure Measurement f]) Pressure &auges combination------"""""""' Combination Vacuum ' AlillENT rarian JI '(tf,'Jq tJ/) Gauge Controller User configurable with 4 (optional) interface cards for the following Agilent pressure sensor I gauges.

u le s Pressure Range in Torr � ds Types of Sensor Gauge � � ConvecTorr Gauges atm to 1 x 1Q-4 [ 531/536 Thermocouple Gauges atm to 1 x 1 o-3 ConvecTorr Simulator ���7�i;;;ison 760 to 1 o-4 Thermocouple Simulator 760 to 1 o-4 [ ���7�;::;1'on o 572 B/A Glass Ion Gauges 10-3 to 2 x 10-1 o 571 B/A Glass Ion Gauges 1 x 10-3 to 2 x 10-1 o 563 B/A Glass Ion Gauges 1 x 10-3 to 2 x 10-1 MBA 100/200 B/A Metal ion Gauges 1 x 1 0-2 to 2 x 10-9 1 UHV-24/P B/A Nude Ion Gauges 1 x 1 o-3 to 2 x 1 o-1 IMG-1 00 Inverted Magnetron Gauge 1 x 1 o-3 to 5 x 1 o-9 c 1 IMG-300 Inverted Magnetron Gauge 1 x 1 o-3 to 2 x 1 o-1 CT-1 00 Active Rough Vacuum Gauges 100 to 1 x 1 o-4 PVG-500/500S/502S Pirani Gauges 7 50 to 3.7 5 x 1 o-4 CDG-500 Capacitance Diaphragm 1 000 to 1 PGC-750/PCG-752 Pi rani Gauges 1125 to 3.8 x 1 o-s [ FRG-700/FRG-702 Full Range Gauges 760 to 3.8 x 1 o-9 FRG-720/FRG-730 Pi rani & B/A Sensor 760 to 3.8 x 1 o-10 P1 041 22 XGS600HOMOCOA 1 (With Analog Card) $1,480.00 All these sensor gauges are available through 505-872-0037. P1 041 21 XGS600HOMOCO (No cards Installed) $1,077.34 this catalog or just call us at *Construct the Part Number with all your requirements, then call us and we will give you a price. Configuration Part for 8 Line Display XGS-600 Controller For particular Interface Module Cards see opposite page Agilent PIN XGS-600 Combination Controller, w/1 Dual Analog Input Card (see pic above) XGS600H OMOCOA 1

Configure your XGS-600 Controller with cards, constructing your part number XGS600H_M _p Choose the number HFIG** Cards you want, from 0 to 4 f Choose the number of IMG* (cold cathode) Cards you want, from 0 to 5 Choose the number of Dual Convectron Gauge Cards, r each card runs 2 convection type gauges, from 0 to 6 Choose the number of Active Gauge Cards (Analog Input) each card runs 2 Active Gauges, from 1 to 6 ------' If ordering Profibus DP Option, Add a "P" ------' NOTE:

• The XGS-600 has 6 gauge card slots permitting a total of 6 cards. Interface Module Cards Needed

• Up to four slots can be used for HFIG** Cards. If Four of these are chosen, one IMG* card or up to two Dual Convection Cards may be selected also. fo r Different Sensor Gauges

• Up to five slots can be used for IMG* Cards. If five of these are chosen, no additional gauge � Dual Convectron Gauge Card cards may be selected. @ Hot Filament ion Gauge (HFIG} Card

• All six slots may be used for Dual Convection Gauge Cards or Dual Analog Input Cards. @ Inverted Magnetron ion Gauge (IMG} Card

• HFIG**, IMG*, and Dual Convection Cards can be used with Dual Analog Input Cards. ® Dual Analog Input Card *IMG- Inverted Magnetron Gauge **HFIG - Hot Filament ion Gauge

* Catalog Pricing Subject to Change fDVacuum Pressure Measurement

"""""'"""""'"""""'"""""'"""""'"""""'"""""'"""Pressure &auges combination AGILENT lll$f,itlll (Other Gauges are Available llarian Combination Vacuum for the XGS-600, Sensors/Gauges and Cables Gauge Controller Just Call Us at 505-872-0037)

SensorTypes/ GaugeGauges Size Range in Torr IDEAL P/N Agilent P/N Price* FRG-700 Pirani/lnverted Magnetron Combination Gauge P1 03349 FRG700KF25 FRG-700 Pirani/lnverted Magnetron Combination Gauge P1 03350 FRG700CF35 IMG100 Cold Cathode Inverted Magnetron Gauge P104147 R0310301 IMG100 Cold Cathode Inverted Magnetron Gauge P104148 R0310302 IMG100 Cold Cathode Inverted I

ion B/A Singl Gauge NWKF40 1 X 1 to 2 x 1 MBA 100 Hot Cathode ion B/A Single Iridium Filament Gauge 2.75" CF 1 x 1 o-2 to 2 x 1 o-9 MBA 200T Hot Cathode I on B/A Dual Tungsten Filament Gauge NWKF25 1 x 1 o-2 to 2 x 1 o-9 MBA 200T Hot Cathode I on B/A Dual Tungsten Filament Gauge NWKF40 1 x 1 o-2 to 2 x 1 o-9 $335_00 MBA 200T Hot Cathode I on B/A Dual Tungsten Filament Gauge 2.75" CF 1 x 1 o-2 to 2 x 1 o-9 P104163 R1170123 $387.50 ConvecTorr Convection Type Tube Sensor, Platinel Filament 1/8" M-NPT atm to 1 x 10-4 P104150 L9090301 $185.00 ConvecTorr Convection Type Tube Sensor, Platinel Filament 1.33" CF atm to 1 x 10-4 P104151 L9090302 $189.95 ConvecTorr Convection Type Tube Sensor, Platinel Filament NWKF16 atm to 1 x 10-4 P104152 L9090305 $199.95 ConvecTorr Convection Type Tube Sensor, Platinel Filament NWKF25 atm to 1 x 10-4 P104153 L9090306 $212.50 ConvecTorr Convection Type Tube Sensor, Platinel Filament 4 VCR-F atm to 1 x 10-4 P104154 L9090303 $200.37 ConvecTorr PTypeSimula tor Reference Tube atm to 1 x 10-4 P104617 L7382301 $339.60 CDG-500 Capacitance Dia hragm Gauge (No Set points) P1 04769 CDGSOOT0001KF16 $1,800.00 CDG-500 Capacitance Diaphragm Gauge (No Set points) P1 04772 CDGSOOT001 OKF16 $1,800.00 CDG-500 CaEacitance DiaEhragm Gauge (No Set EOints) P1 04776 CDGSOOT01 OOKF16 CDG-500 i i 04750 CDGSOOTl OOOKF16 PVG-500 Active Pi rani Gauge 750 to 3.75 x 1 o-4 P104000 PVGSOOKF16 PVG-500 Active Pirani Gauge Tungsten Filament has setEoints 750 to 3.75 x 1 o-4 na PVGSOOK16S CALL PVG-500 Active Pi rani Gauge nickel Filament /setpoints (corrosive) NWKF16 750 to 3.75 x 1 o-4 na PVG502KF16S CALL

SignalCable Type andCables Controller it Fits for XGS-IiOO SensoIDEAL P/N rs/GAgilent P/N augesPrice* Thermocouple Gauge Controller Cable, for XGS-600, Multi-Gauge, Senn Torr Controllers, 10ft. ConvecTorr Gauge Controller Cable, for XGS-600, Multi-Gauge, Senn Torr Controllers, 10ft. IM G1 00 Inverted Magnetron Cable, for XGS-600, Multi-Gauge, Senn Torr Controllers, 10ft. IM G300/IMG-UHV Inverted Magnetron Cable, for XGS-600, Multi-Gauge, Senn Torr Controllers, 10ft. Nude Ion Gauge UHV-24/24E, for XGS-600, Multi-Gauge, Senn Torr Controllers, 10ft. (Agilent Only Bakeable) Nude Ion Gauge UHV-24/24p, for XGS-600, Multi-Gauge, Senn Torr Controllers, 10ft. (Agilent Only Non-Bakeable) MBA 100/200 Meta l ion Gauge Cable, for XGS-600, Multi-Gauge, Senn Torr Controllers, 10ft. B/A Ion Gauge Glass Tubes 563, 564, 571, 572, for XGS-600, Multi-Gauge, Senn Torr Controllers, 10ft. FRG-720 B/A Pirani, with OEen active Eort, for XGS-600 Controllers, 10ft. PVG-500 Active Pi rani IMG with open active ports, for XGS-600, AGC-100, AGD-100 Controllers, 10ft. XGS-600 cable with flying leads, for XGS-600 Controller, 10ft. XGS-600 cable with flying leads, for XGS-600 Controller, 25 ft. XGS-600 cable with flying leads, for XGS-600 Controller, 50 ft.

(505)872-0037 Vacuum Pressure Measurement f]) Pressure &auges combination Combination Vacuum Gauge Controller INFICDN Gauges and Cables Measures 1125 to 1 x 10-10 To rr ___ • ��--::::_--:::_--::::_-:::;_-:::;_-:::;_-:::;_� ���• � ��--::::_--:::_--::::_-:::;_-:::;_-:::;_-:::;__� ���� depending on gauge type. 2 J 4 56 2 J 4 ,,,,,, '''' - � ,- ,- � ,- , M 1I CI � C ,-, M ,-,c, �c ,-, ,- ,­ � - ,- ,- ,-,o�c ,-, 1 , ,o =• c ,-, I ,-, Ct Ct � :B � ,- ,- ,-, Ct -CA.Rt. Ct.lf( u HV ORu. )f'-' '- ' • ,-, o �c ,-, .... � .

8 88 8 88 88 VGC403 8 _.:::� VGC402 _.:::� VGC401

IDEAL VACUUM lnficon IDEAL VACUUM lnficon IDEAL VACUUM lnficon p • P/N P/N Price* P/N P/N Price* P/N P/N nee* P1 04438 398-021 $2,187.90 P1 04437 398-020 $1,772.55 P1 04436 398-010 $1,088.81

The VGC400 Series is your complete for process pressure VGC4measurement00 and S control.erieS Compatible with all INFICON active pressure gauges, the VGC400 controllers can monitor the entire pressure range from (1 125 to 1 Q-10Torr) and the set point status. Features Include: Auto ID of connected INFICON gauges, User selectable measurement unit (mbar, Torr, Pascal, micron), High resolution - 16 bit AID converter, Up to six adjustable setpoints with adjustable hysteresis may be assigned to any channel (depending on model), Programmable 0 to 10 V chart recorder output with logarithmic I linear characteristics for each gauge or gauge combination (VGC402/403 only), Firmware upgrades available on-line and easily downloaded via the RS232 interface. Compact bench-top model design can easily be mounted in a panel or 19 inch rack, Wide range power supply 90 to 250V, 50 to 60Hz.

· S P E C I F I CAT I 0 N S VGC400 5 erIe5 VGC401 VGC402 VGC403 Measurement Channels/Displays 1 2 3 Features Include: Display LED LCD LCD •Auto ID of all INFICON Gauges Pressure Range Torr to -1 1125 to3.75 x 1 o-1o 1125 to3.75 x 1 o-1o 1125 1.5 X 10 0 •1, 2 or 3 line LED/LCD displays Setpoints •User selectable (mbar, To rr, Pascal) Setpoint Relays 4 6 •High resolution 16 bit A/D Converter Channel Asignment 1 or 2 1/2 or 3 •Up to six adjustable setpoints with Adjustment Range Sensor dependent Sensor dependent Sensor dependent adjustable hysteresis may by assigned to any channel Hysteresis Adjustable Adjustable Adjustable •Programmable 0 to 10 V chart recorder Relay Contact potential free charge potential free charge potential free charge over contact over contact over contact output with logarithmic/linear Connector D-sub, 9 pin, male D-sub, 25 pin, female D-sub, 25 pin, female characteristics for each gauge or gauge 0 .. 1 0 volt, sensor 0.. 1 0 volt, sensor 0 .. 1 0 volt, sensor Analog Output Range analog output signal analog output signal analog output signal combination (VGC402/403 only) Programmable Analog Output 1 •Firmware ungradable via RS232 •Easily mounted in panel or 19" rack Connector D-sub, 9 pin, male D-sub, 9 pin, male D-sub, 9 pin, male •Power range 90-250 VAC 50/60hz Interface RS232 Connector D-sub, 9 pin, male D-sub, 9 pin, male D-sub, 9 pin, male

*Catalog Pricing Subject to Change

www.idealvac.com (505)872-0037 10·24 fDVacuum Pressure Measurement

...... Pressu re &auges combination

Theses Gauges work with ANY va cuum t ep e ac FPM Sealed INFICON MPG400 Pi rani & Cold Cathode INFICON MPG400 Pi rani & Cold Cathode s Inverted Magnetron Gauge - NWKF25 Inverted Magnetron Gauge - NWKF40 INFICDN Gauiles and cabYe Operating range of 7 x1 o-9 Torr Operating range of 7 x1 o-9 Torr For VGC4DD Series Vacuum Controllers P/N P104425 Price $1,292.85 P/N P104424 Price $1,41 5.70

LCD Screen LCD Screen points NO- Set points 2- Set INFICON COG Capacitance Diaphragm INFICON MPG401 Pi rani & Cold Cathode INFICON PCG 550 Pi rani Capacitance INFICON PCG 550 Pi rani Capacitance Gauge Cable, D-sub 15 pin female/FCC,! Oft. Inverted Magnetron Gauge - CF 2.75" Diaphragm, Tungsten Filament - KF16 Diaphragm, Tungsten Filament - KF16 Connects all the SKY CDG Gauges to VCG400 -9 5 5 Operating range of 7 x1 o Torr Operating range of 3.8 x1 o- Torr Operating range of 3.8 x1 o- Torr Series Controllers P/N P104439 Price $1,801 .80 P/N P104923 Price $810.00 P/N P104435 Price $735.00 P/N P104426

INFICON Gauge Cable, D-sub 15 pin female/ INFICON Gauge Cable, Connector FCC I FCC, INFICON MPG400 Gauge FPM-Sealed INFICON MPG400 Gauge FPM-Sealed 15 pin male, 1Oft. 10ft. Repair Kit Repair Kit Connects all the CDG, BAG, BPG, BCG, HPG Connects all the PCG, PEG, MPG Contains: Pi rani element, support ring, Contains: Support ring, 2-0-Rings, Ignition Gauges to VCG400 Series Controllers Gauges to VCG400 Series Controllers 2-0-Rings, ignition aids, anode complete aids P/N P104427 Price $198.40 P/N P104428 Price $181.15 P/N P104430 Price $514.80 P/N P104429 Price $99.50

(1 )Mounting Tool (1 O)lgnition for Ignition Aids wit�1�:s�n ��!:dTh���gh INFICON MPG401 Gauge All metal Aids INFICON MPG Ol Gauge All metal seals Repair Kit contains: Pi rani element, . � INFICON MPG400/401 Gauge INFICON MPG400/401 Gauge screw & co fitting, anode ext. piece, anode seals Repair K1t . Ignition Aids Mounting Tool for ignition aids pper _ . . . . complete ignition air' seal & centering ring Contams: Centenng rmg, seal, 1gn1t10n a1ds Contains: 10 ignition aids Contains: 1 tool to replace the ignition aids P/N P104431 Price $514.80 P/N P104432 Price $228.15 P/N P104433 Price $104.20 P/N P104434 Price $42.25 * Catalog Pricing Subject to Change

(505)872-0037 Vacuum Pressure Measurement f]) Pressure &auges combination PDR900 Vacuum Measures 1500 to 1 x 10-10 To rr depending on gauge type. Gauge con roller LCD menu dlspl y for easy�Interface M• .s _ � _ _ Featu• Alarmres In for clvacuumude: line or venting fa ilure • Easy to read 5 digit LED Dis _ _ • Code for unauthorized access to critical settings • Three high power set pomt relays . . • Calibrate transducers quickly and easily • Auto setup or plug and play functlonali � _ � • Easy output of analog output and communication • Leak dete t1on tool for system d1a nost1cs � � _ • Compact for bench or rack mounting • Data loggmg tool fo r process momtonng ...... • Alummum hous1ng su1ted for field serv1ce apps. • SImp 1-fI le· d se t up a d con flg of t rans d ucers � • Power' 100 to 240 VAC/ 50-60hz • Front panel set pomt relay status • RoHS and CE compliance Measures ALL MKS 900 Series Vacuum Transducers PDR 900 spEc I F I cAT I 0 N s Display Range 1 500 to 1 1 0- The PDR900 powersupplyand readout unit is a stand X 10 MKalone, Ssingle PDR channel9QQ controller for use with the Series 900 MKS digital vacuum Pressure Units Torr, mbar, Pascal transducers. The instrument sets new standards for vacuum gauge controllers Operating Temperature 5' to 40C (41 to 1 04F) and can be used as a stand-alone power supply readout unit or as a tool for Storage Temperature -10 to 55'( (14'to 131 'F) configuration, calibration and diagnostics of system integrated transducers in Power 100-240 VAC, 50-60 hz, 25W OEM applications. The PDR900 controller is the ideal solution for vacuum User Interface RS232/RS485 analog output measurement, configuration of digital transducers and advanced system & diagnostics. The controller features an easy to use menu-driven user interface, Relays Up to 3 relays, SPDT which guides the user through setup and configuration of remote transducer Relay Contact Rating 4 A@ 250 VAC, resistive parameters. The readout unit communicates digitally with the transducer which Display 5 digit, 14.2mm, green LED eliminates analog measurement noise coupling via transducer cables. The unit 1.4 1bs. automatically detects thetransducertype, and can be used with both RS232 and Compatible MKS Transducers RS485 transducers. 901 P, 902, 909AR, 925, 925C, 919, 971,972, 973, 974, 979, 999 IDEAL VACUUM MKS . * PIN P/N p nee Not compatible with 909/909A or 903 analog tansducer P102879 PDR900-12-US $778.00

�_::?-. .,.) Series909AR MIG Transducer "

Transducers and Signal **Cables for MKS PDR900 MKS Type Gauge Size Range in Torr IDEAL P/N MKS P/N Price* HPS 901 P Plus MicroPirani Piezo Loadlock Transducer (RS232) NWKF25 1 000 to 1 X 1 o-s P102866 901 P-21030 $632.50 HPS 902 Absolute Piezo Transducer (RS232) NWKF16 1000 to 10·1 P102872 902-1 113 $563.00 HPS 909AR Digital and Analog Hot Cathode Transduce (RS232) NWKF40 10·2 to 1 o-9 P102873 909AR-51 $1,221 .00 HPS 910 DuaiTrans MicroPirani Absolute Piezo Transducer (RS232) NWKF16 1500 to 1 o-s P102871 910-11 $635.00 i)llj : HPS 925 MicroPiraini Transducer (RS232) NWKF25 atm to 1 o-5 P102867 925-21030 $560.00 �.... �.::.� ��:!: __uc:e< ,.., , HPS 971 UniMag Transducer (RS232) NWKF25 1 x 10·3 to 5 x 1 o-s P102868 971-21020 $710.00 HPS 974 Quad Mag MicroPirani Piezo Cold Cathode Trans. (RS232) NWKF40 1 000 to 1 X 1 0-8 P102870 974-91020 $1,325.00 HPS 9798 MicroPirani or Hot Cathode Transducer (RS232) NWKF40 atm to 10·10 P102874 9798-51 $1,543.00 HPS 999 Quattro Multi-Sensor Hot Cathode Transducer (RS232) NWKF40 atm to 10·10 P102875 999-51 $1,954.70 Cable, PDR900 to 901 P/909AR/910/925/971/972/974/9798/999, 15 Pin, 10ft., R5232 NA NA P102878 100013620 $85.00 Cable, PDR900 to 902, 9 Pin, 10ft., RS232 NA NA P102877 10001 3613 $85.00 ** Many other flange inlet sizes of each transducer available, just call

* Catalog Pricing Subject to Change fDVacuum Pressure Measurement """""'"""""'"""""'"""""'"""""'"""""'"""""'"""Pressu re &auges combination or 1, 2, G Channet��!!ro�J t�3�!t� o l rr p n n g e s PFEIFFER ///// 1//llil iiiiili! �fo ������1 !!�, de --- � Featu es Inclu I --- r ' - ///// · HI/Ill illiiii Operates up to 1 2 or 6 gauges • h i ' llaffJ11ll�l ///// /IllI II iii iii Measure to 3.75 x 10-11 To rr Max1Gauge --,_,,,,//, ,,, u'''1, '1111 Jiiiiii Easy to operate - ///// //IIIII illlui Nonvolatile parameter memory PFEIFFER Set points A T Interfa ce RS232/422 MaxiGaugeM Pressure units To rr, Mbar, Pa

Operates ALL PfeifferVa cuum Gauges: CH 1 mbar F• • PIRANI - TPR 261, TPR 265, TPR 280, TPR 281 1 4. 1 E -06l'lll Node�j • PIRANI CAPACITANCE - PCR 260 • COLD CATHODE - IKR 251, IKR 261, IKR 270 • FULL RANGETM cc - PKR 251, PKR 261 • PROCESS ION - IMR 265 • FULL RANGETM BA - PBR 260 IDEAL VACUUM Pfeiffer MaxiGauge • CAPACITANCE - CMR 261 - CMR 275 P/N TPG 256A P/N ne. e * • PIEZO - APR 250 thru APR 267 p P103416 PTG28760 $2,650.00 Transmitters/Sensors lor Control Units

Pfeiffer Type Gauge/Transmitter Size** Range in Torr IDEAL P/N Pfeiffer P/N Price* Compact Full Range Gauge PKR 251 NWKF25 1 00 to 1 x 10-9 P103214 PTR2600 $1,399.95 Compact Full Range Gauge PKR 251 CF 2.75 in. 1 00 to 1 x lQ-9 P1 03215 PTR2602 $1,595.00 Compact Pirani Capacitance Combo Gauge PCR 260 NWKF16 1000 to 10-4 P103413 PTR26850 $634.00 Compact Pirani Hot Cathode Combo Gauge PBR 260 NWKF25 750 to 1 x 10-10 P103414 PTR27000 $1,281 .00 I IIIII I IIIII na $142.50 Sensor/Transmitter Signal Cable 1Oft. na P103216 PT448250T Ill Ill ** Other sizes and types of transmitters/sensors available Ill Ill IIIII\ IIIII\ IIIII\ IIIII\ PFEIFFER 111111 111111 SPETPG261CIFIC TPG262AT IONSTPG2S6A T P G Series PFEIFFER VA CUUM Q-3Torr PFEIFFER VA CUUM Auto changeover, Pi rani-cold cathode 6x1 0 x 1 Dua/Gauge 5/ng/eGauge

AR Connections for transmitter 2 6max. AR E - :8 E -:8 Display rate 10 1/s 10 1/s 41/s ,-,,-,,-,,-,,-, ,-,,-,,-,,-,,-,0. - CJ . Cl. Cl. 0 -CJ0,_. Cl. Cl.SP SPI Cl. 0 •1 ON DE<" C.AL OFS SP SP< Error signal: Working contact 1 piece 1 piece 1 piece •2 ON OEG c•. OFS SP3 SP•

Filter time constant 1.2/0.4/0.02 s 1.2/0.4/0.02 s 2.1/0.32/0.1 s

Interface RS-232-C RS-232-C RS-232-C/RS422

Voltage 90-250 Vac, 50/60hz 90-250 Vac, 50/60hz 90-250 Vac, 50/60hz

Measurement range max. 41 253 Torr 41253 Torr 41253 Torr gauge Measurement range min. 3.75 x 10-1 1 Torr 3.75 x 10-1 1 Torr depenaent 3.75 x 10-1 1 Torr TPG 262 TPG 261 Set point: Changeover contact 2 pieces 4 pieces 6 pieces IDEAL VACUUM PIN IDEAL VACUUM P/N P103213 Set point: Current max. 1 A 1 A 3A P103415 PFEIFFER PIN PFEIFFER P/N 60 VDC 60 VDC Set point: Voltage max. 60 VDC PTG28280 PTG28030 Signal Output 0-10V 0-10V 0-10V Controls up to Controls up to Transmitters Transmitter Weight 1.1 kg (2.5 lbs.) 1.1 kg (2.5 1bs.) 2.1 kg (4.75 1bs.) 2 1 Price $1,995.99 Price $ 1 ,225.00

* Catalog Pricing Subject to Change

www.idealvac.com (505)872-0037 Vacuum Pressure Measurement f])

Pressure &auges Thermocouple......

IHIRMDCDUPLI controllers and Gauges FeatuTeledres Inclyneude: HasMeasurtingses 10-2 to 10-4 To rr depending on gauge type. VI Digital Gauge controller Meters: VI Analog • Thermocouple Range 10-2 to lQ-4 To rr • Bright easy to read Digital or Analog Readings

• Available in To rr, mbar or Pascal • Compatible with large selection of Thermocouple Tu bes and Calibration Reference Tu bes

• 6 ft. power cable & 8 ft. sensor cable included Thermocouple Va cuum Tu bes: • Thermocouple Range 10-2 to lQ-4 To rr • Corrosion-Resistant

• Non-Contaminating

• Stable Calibration • Color Coded for Easy Identification

• Rugged Under Demanding Conditions VT Digital and Analog Vacuum Gauge Meters/Controllers VT Gauge Meters/Controllers Digital and Analog Range in Torr IDEAL P/N Teledyne PIN Price* Digital Thermocouple Gauge Controller for DV-4 Tubes 0.1 -20 Torr (10-2) P102050 55-288DV4 $545.00 Analog Thermocouple Gauge Controller for DV-4 Tubes 0.1 -20 Torr (10-2) P102052 VT-4-X-Y $535.00 Analog Thermocouple Gauge Controller w/enclosed cabinet for DV-4 Tubes 0.1 -20 Torr (10-2) P102053 VT-4B-X-Y $61 1.16 Digital Thermocouple Gauge Controller for DV-6 Tubes 1 -1000 mTorr (10-3) P102051 55-288DV6 $545.00 Analog Thermocouple Gauge Controller for DV-6 Tubes 1 - 1000 mTorr (10-3) P102055 VT-6-X-Y $535.00 Analog Thermocouple Gauge Controller w/enclosed cabinet for DV-6 Tubes 1 - 1000 mTorr (10-3) P102056 VT-6B-X-Y $709.84 Analog Thermocouple Gauge Controller w/2 set point relays panel mount for DV-6 Tubes 1 -1000 mTorr (1 o-3) P104917 CVT26A-O-O $899.96 Analog Thermocouple Gauge Controller for DV-5 Tubes 0.1 -100 mTorr(10-4) P102054 VT-5A-X-Y $775.00 S875 00 Analog Thermocouple Gauge Controller w/enclosed cabinet for DV-5 Tubes 0.1 -100 mTorr(10-4) P102057 VT-5AB-X-Y · Analog Controller w/enclosed cabinet Hand Held Portable Thermocouple Vacuum Gauge Controller for DV-4 or DV-6 Tubes 0.1 -1000 mTorr (10-3) P102058 HPM 4/6 $860.64 VT Thermocouple Gauge Tubes DV-4, DV-5, DV·B VT Thermocouple Gauge Tubes Size Range in Torr IDEAL P/N Teledyne PIN Price* DV-4D Thermocouple Gauge Tube 1/8 in. MNPT 0.1 - 20 Torr (1 o-2) P102048 55-19 $97.68 DV-4R Ruggedized Thermocouple Gauge Tube 1/8 in. MNPT 0.1 - 20 Torr (1 o-2) P102047 55-19R $130.68 DV-4D Thermocouple Gauge Tube NWKF-16 0.1 - 20 Torr (1 o-2) P102612 55-258 $253.44 DV-4D Thermocouple Gauge Tube NWKF-25 0.1 - 20 Torr (1 o-2) P102613 55-266 $253.44 DV-4D Thermocouple Gauge Tube 4-VCR 0.1 - 20 Torr (1 o-2) P102614 55-227 $238.92 DB-16D Reference Tube For DV-4 Tubes na 0.1 - 20 Torr (1 o-2) P105176 DB-16D $402.50 DV-6M Thermocou�le Gauge Tube 1/8 in. MNPT 1-1000 mTorr po-3) P102046 55-38 $91.08 DV-6R Ruggedized Thermocouele Gauge Tube 1/8 in. MNPT 1-1000 mTorr (10-3) P102045 55-38R $104.28 DV-6M Thermocouple Gauge Tube NWKF-16 1 -1000 mTorr 10-3 P102616 55-251 $242.88 DV-6M Thermocou�le Gauge Tube NWKF-25 1-1000 mTorr (10-3) P102617 55-267 $242.88 DV-6M Thermocou�le Gauge Tube 4-VCR 1-1000 mTorr (10-3) P102618 55-283 $191.40 DV-6R Thermocou�le Gauge Tube CF 1.33 in. 1-1000 mTorr (10-3) P104376 55-38R-CF $272.55 DV-65 Ruggedized Thermocou�le Gauge Tube with ca� 1/8 in. MNPT 1-1000 mTorr(1 0-3) P105174 DV-65 $210.00 DB-16D Reference Tube For DV-6 Tubes na 1 -1000 mTorr (1 0-3) Call DB-20 $402.50 DV-5M Thermocou�le Gauge Tube 1/8 in. MNPT 0.1 -100 mTorr (10-4) P102049 67-6 $150,48 DV-5M Thermocou�le Gauge Tube 4-VCR 0.1 -100 mTorr (10-4) P102615 55-230 $275.88 DB-18 Reference Tube for DV-5M Tubes na 0.1 -100 mTorr (10-4) Call DB-18 $402.50 DB-31 Reference Tube for DV-8M Tubes na 0-10 mTorr Call DB-31 $402.50

* Catalog Pricing Subject to Change fDVacuum Pressure Measurement

"""""'"""""'"""""'"""""'"""""'"""""'"""""'"""Pressure &auges Thermocouple AlillENT rarian

THERMOCOUPLECost Effective Controllers Contr for Pressureoller Measurs andemen Gaugest. The RGC1 00 and RGC150 includes the Thermocouple Tube and Cable to provide a pre-calibrated turnkey rough vacuum solution. .. 9 Measures 760 to 10-3 To rr e dependi on gauge type. IDEAL VACUUM Agilent RGC-100 AgilentTechnologies P/N P/N Price* P105092 RGC150 $896.50 P1 05091 (Ethernet) RGC150E $1,283.50

To rr SPECIFICAT I 0 N S MeasurementRGC1 00 Range/150 760 to 1.5 X 1 Q-3 Torr Vacuum Fitting 1/8 inch MNPT Interface Cable 10ft. Sensor Agilent 531 TC gauge tube Display 6 Digit LED Analog Output 0-SVDC Voltage 100-240 VAC, 50-60 hz Setpoints Yes on RGC1 SO I Optional on RGC1 00 Optional Communication Yes P1 01659 (Torr) RGC1 OOT $565.00 Other Configurations Available, Call (505) 872-0037 for a Quote. P1 05090 (Mbar) RGC1 OOM $565.00 Replacement SENSORS

Agilent 536 Thermocouple Gauge Tube, Stainless Steel, with a baffle,1/ 8 inch MNPT Agilent 531 Thermocouple Gauge Tube, 1/8 inch MNPT Agilent 536 Thermocouple Gauge Tube, Stainless 3 Operating range of 2 to 1 x1Q- Torr Steel, with a baffle,4 VCR 3 P/N P1 041 17 (536) Price $146.50 Operating range of 2 to 1 x1o- Torr P/N P101658 (531) Price $80.50 P/N P1 041 16 Price $139.95

Agilent 536 Thermocouple Gauge Tube, Stainless Agilent 536 Thermocouple Gauge Tube, Stainless Agilent 536 Thermocouple Gauge Tube, Stainless Steel, with a baffle, 1.33 inch CF Conflat Steel, with a baffle,NWKF16 Steel, with a baffle, NWKF25 3 3 Operating range of 2 to 1 x1o-3 Torr Operating range of 2 to 1 x1o- Torr Operating range of 2 to 1 x1o- Torr P/N P1041 18 Price $169.95 P/N P104171 Price $139.95 P/N P�l\:\!291,995.99 Pricel!rl�ii��5

* Catalog Pricing Subject to Change Vacuum Pressure Measurement f])

Pressure &auges convectron""""'""""'""""'""""'""""'"" Granville Phillips FiaQtilltl71c:: :��·�:�.�����m Measures atmosphere to 10-4 To rr depending on gauge type.

Features Include: • Convectron range atmosphere to 1 x l0-4 To rr

• Built in Convectron simulator for self calibration

• N2, Ar, He, Co2 curves are stored in memory for accurate pressure measurements

• Compatible with large selection of Convectron Tu bes

• Self diagnosis Optional: AC Power su • AC to 24VDC Converter Power Supply in 110 or 220 VAC

Signal Cable or • Signal Cable to Convectron Sensors

27S Convectron Sensors • All GP 275 Convectron Gauge Sensors NOT INCLUDED Replaces Older Model GP37S Controller 5 Year Manufacture warranty GP 475 Controllers & Power Supplies GP 475 CONVECTRON Gauge Controllers & Power Supplies IDEAL P/N GP P/N Price* GP 475 Convectron Vacuum Pressure Gauge Controller (no set points) P103969 475001-00-T $629.95 GP 475 Convectron Vacuum Pressure Gauge Controller (2 set points) P103970 475001-A2-T $868.75 GP Power Supply for GP 475 Gauge Controller, 1Oft., (11 0-120 VAC) P1041 12 475008-1 $126.25 GP Power Supply for GP 475 Gauge Controller, 1Oft., (220-240 VAC) P1041 13 475008-2 $126.25 GP Power Supply for GP 475 Gauge Controller, 1Oft., (220 VAC Europe) P104189 475008-3 $126.25 GP Power Supply for GP 475 Gauge Controller, 1Oft., (240 VAC UK) P104190 475008-4 $136.25 GP Power Supply for GP 375 (Legacy) Gauge Controller, 1Oft., (1 1 0-120 VAC) P102692 375006 $85.00 GP Power Supply for GP 375 (Legacy) Gauge Controller, 1Oft., (220-240 VAC) P102693 375007-2 $135.00 GP Convectron Gauge Sensors & Signal Cables GP 275 CONVECTRON Gauge Sensors Flange Type T IDEAL GP P/N · Capatible with 275, 375, 475 Convectron Controllers orr P/N p nee * GP 275 Convectron Vacuum Pressure Gauge Sensor 1/8 in. MNPT atm to 1 x 10·4 P101660 275071 $162.50 GP 275 Convectron Vacuum Pressure Gauge Sensor 1.33 in. CF atm to 1 x 10·4 P102578 275256 $245.00 GP 275 Convectron Vacuum Pressure Gauge Sensor 2.75 in. CF atm to 1 x 10-4 P102684 275238 $199.00 GP 275 Convectron Vacuum Pressure Gauge Sensor 8 VCR 1/2 in. atm to 1 x 10-4 P102685 275282 $224.95 GP 275 Convectron Vacuum Pressure Gauge Sensor 4 VCR 1/4 in. atm to 1 x 10-4 P102686 275185 $195.00 GP 275 Convectron Vacuum Pressure Gauge Sensor NWKF16 atm to 1 x 10-4 P102687 275203 $189.95 GP 275 Convectron Vacuum Pressure Gauge Sensor NWKF25 atm to 1 x 10-4 P102579 275196 $199.95 GP 275 Convectron Vacuum Pressure Gauge Sensor NWKF40 atm to 1 x 10-4 P102580 275316 $245.00 GP 275 Calibration Gauge Zero Pressure Simulator na atm to 1 x 10-4 P104898 275243 $215.00 GP 275 Calibration Gauge VARIABLE Pressure Simulator na atm to 1 x 10-4 P104899 275244 $225.00 GP 475 or 375 Convectron Controller Signal Cable 10ft. na P104111 475012-10 $126.25 GP 475 or 375 Convectron Controller Signal Cable 25 ft. na P104184 475012-25 $155.00 GP 475 or 375 Convectron Controller Signal Cable so ft. na P104185 475012-50 $182.50 GP 475 or 375 Convectron Controller Signal Cable 100ft. na P104186 475012-100 $243.75 GP 475 or 375 Convectron Controller Signal Cable 200 ft. na P104187 475012-200 $400.00 GP 375 (Legacy) Convect ron Controller Signal Cable 10ft. na P102850 375012-10 $99.50 GP 275 (Legacy) Convectron Controller Signal & Power Cable 10ft. na P102691 275-TC-CABLE $199.95 GP 307 Convectron & Capacitance Controller Signal Cable 10ft. na P104873 307027 $220.00

* Catalog Pricing Subject to Change fDVacuum Pressure Measurement

""""""""""""""""""""""""""""""""""""""""""""""Pressure &auges convectron c-::::::n Granville PhillipsMeasures atmos MH toS 10-4 ToEiaQtialfla�rr depending on gauge type. II; I

All in One MINI Convectron Module Pressure Gauge with Digital or Light Readout with MINI Convectron 275 Gauge Sensor Built In AC Power Supply is not included Features Include: • Range atmosphere to 1 x lQ-4 To rr • Programmable functions • Individual calibration • Replaceable MINI 275 Gauges • All metal package • Wide selection of inlet connectors • Digital 3 figure LED or vacuum light • AC Power Tra nsformer not included Replacement M I N I 2 . Convectron • Process set pomts Gauge sensor GP MKS 275 MINI Modules&MINI Convectron Sensors

275817 NWKF40 P105661 275808-EU 275913-EU-T 275818 AC Transformer For ALL Model 275 Mini Convectron Module Gauges P105340 275933 $97.50

* Catalog Pricing Subject to Change Vacuum Pressure Measurement f])

Pressure &auges con�vectron Convectron Pirani MIS EiJQI41flt1 Gauge Controller

317 Convection lnhanced Pirani Sensors Measures 1000 to 10-3 To rr depending on gauge type. Features Include: • Convectron range 1Q+3 to 1Q-3 To rr • Fewer controls fo r simplified operation and lower cost • LED digital display fo r wider angle viewing & large readout • Compatible with large selection of Series 317 Convection Pirani sensors (shielded) Micron, Pascal and Mbar readouts available • Rapid responsiveness fo r application pressures IDEAL VACUUM MKS • Two independent relay set points for process control P/N P/N Price* • LED set point status indicators • Series 317 Sensors highly reliable with repeatable presssures (1 1 Svac/Torr) call Pl 03326 947-A-1 20-TR • Gas-type sensitivity useful fo r leak detection • CE Compliant 7 The Series 947 Convection-Enhanced Pi rani Controller offers many standard features at a low price, and is easy to use. An M 94 analog output signal proportional to pressure is standard and is accessible from the rear of the controller. With a wide measurementKs range to 1 Q-3 Torr, the HPS® Series 947 Convection-Enhanced Pi rani Controller is ideal for rough to medium vacuum applications. This includes measurement of roughing and fo reline pressures, activation of high vacuum sensors, or start-up of a system process with the standard relay set points. The Series 947 Controller is not only suitable for all vacuum industrial applications such as semiconductor or food processing, but also analytical applications and research. It is useful as either a small system controller or as a module in more sophisticated pressure control environments. The 947 can also use a wide selection of MKS 317 Convection Pirani Sensors for accurate pressure measurements. Comes with Torr readings, two setpoints and power cord. A convectron signal cable is optional but is availablefrom this website. See listings below. Series MKS Shielded Convection Pirani Sensors MKS 317 Convection Pi rani Sensor31 (Shielded)7 Size Range in Torr IDEAL P/N MKS PIN Price* Series 317 Sensor, Shielded NWKF16 10+3 to 10-3 P103327 103170010SH $282.40 Series 317 Sensor, Shielded NWKF25 10+3 to 10-3 P103328 103170027SH $288.00 Series 317 Sensor, Shielded 1/8 inch MNPT 10+3 to 10-3 103170011SH Series 317 Sensor, Shielded 8 VCR 10+3 to 10-3 103170012SH Series 317 Sensor, Shielded 4 VCR 10+3 to 10-3 103170029SH Series 317 Sensor, Shielded CF 1.33 in. 10+3 to 10-3 103170013SH Series 317 Sensor, Shielded CF 2.75 in. 10+3 to 10-3 103170014SH Series 317 Sensor, Shielded 15mm Tube 10+3 to 10-3 103170016SH Series 317 Sensor, Shielded 18mm Tube 10+3 to 10-3 103170018SH Series 317 Sensor Signal cable 10 ft. na P103329 103170006SH $95.00 Series 317 Sensor Signal cable 25 ft. na 103170007SH

* Catalog Pricing Subject to Change

www.idealvac.com (505)872-0037 10·32 fDVacuum Pressure Measurement

"""""'"""""'"""""'"""""'"""""'"""""'"""""'"""Pressure &auges cold cathode EiaQlili!�£1 cold cathode MilS Vacuum Gauge Measures 10-2 to 10-10 To rr depending on gauge type.

MKS 423 1-Mag Cold Cathode Sensor

KF25 943 Features Include: • Wide pressure measurement range 10-2 to 10-10 To rr • Digital LED display with set point status indicators • Large choice of cold cathode sensors 423 or 421 I-Mag • Fast system control with two setpoints • Sensor tubes may be mounted in any position • No filaments to burn out • No need to degas the gauge • No adjustment in emission current or filament voltage required • Cleaning of sensor is easy with a demountable tube Does not come with Cold Cathode Signal Cable or 423 1-Mag Sensors • Sensor tube less susceptible to contamination IDEAL VACUUM MKS due to isolated collector P/N P/N Price* P1 03330 (1 1 5vac/Torr) 943-120V60-TR-PC $940.00 220VAC, mbar, pascal models also available

The 943 Cold Cathode vacuum gauge system is well- M 943 suited for industrial, process and analytical applications includingKS pressure measurement of high vacuum chambers and control of high vacuum systems. Areas of applications may include high energy , analytical instruments, laser production, ion implantation, spectrometry, or PVD. The 943 digital controller features two standard independent relay set points, which allows you to confidently control your process. Adj ust the set points from the front panel while viewing the display. Red LEDs indicate set point activation status. The Series 943 displays pressure from 10-2 to 10-10 To rr using a high visibility LED display. Tw o types of analog output are standard, fo r remote monitoring of pressure. An internal converter provides output that allows a simple log conversion from voltage to pressure over the entire operating range. A fast responding, buffered analog output is also provided through the 15 pin accessory connector on the rear panel. Front panel functions allow the user to disable the high voltage, as well as set a pressure at which the cold cathode will �::::!��Pib automatically turn off. This prevents the controller from displaying incorrect readings when the pressure goes above the operating ra nge of the sensor. MKS 423 1-Mag Cold Cathode Sensors MKS 423 1-Mag Sensors Size Range in Torr IDEAL P/N MKS P/N Price* 423 1-Mag Sensor NWKF25 10-2 to 10-10 P103331 104230004 $385.00 423 1-Mag Sensor NWKF40 10-2 to 10-lo na 104230001 $425.00 423 1-Mag Sensor CF 2.75 in. 10-2 to 10-10 na 104230002 $485.00 Cold Cathode Signal Cable 10ft. na P103332 100007873 $245.00 Cold Cathode Signal Cable 50 ft. na P103370 100002395 $325.00

*Catalog Pricing Subject to Change

(505)872-0037 Vacuum Pressure Measurement f])

Pressure &auges Capacitance Mano...... meters Digital Power Supply and Readout MKS The PDR 2000 is a versatile, low cost solution for powering and displaying the MKS Baratron family of transducers. This unit can deliver up to 0.75 PDR2000 Amps of ± 15 VDC to operate one or two heated or unheated units. Both units are simultaneously MeasurMeasureses .02Capacitance to 25000 To rr depending Manome on gauge type.ters powered, so the user may alternate between readings by pressing a front panel select button. The readings are also available on demand via the RS-232 interface. Two process relay trip points are available and may be assigned to either manometer. Upper and lower settings allow the user complete control over the hysteresis of the control trip point. The relays have isolated outputs and are rated for 2 Amps at 240 VAC. The advanced power supply design operates on any input from 100 VAC to 240 VAC. Selection of engineering unit is also available for To rr/mtorr, or mbar/microbar. It is also CE marked, making it a universal instrument for international applications.

IDEAL VACUUM MKS P/N P/N p nee. * P102062 PDR2000AO CALL

CABLES for PDR2000 IDEAL P/N MKS P/N Price* 626/627/628/722 with 15 pin to PDR2000 P102063 (820005-1-Ml $145.00 722/750/850/852 with 9 pin to PDR2000 P102061 (820005-2-Ml $145.00

PDR 2000 spEcIFIcAT I 0 N s Display Type 4 digits (9999) Red LED Display Range 0.01 mtorr to 10.00 ktorr Channels 2 Relay Trip Points 2, assignable to either channel Outputs Analog Continuous 0-SVDC, 0-1 OVDC each channel Digital RS232 Controls Gauge Select, Full Scale Adj., Calibrate, Zero, Setpoint l low or high, Setpoint 2 1ow or high, Torr/mbar select Weight lib. Voltage 100-240 VAC 50-60hz Compatible MKS Baratrons 626, 627, 628, 722 with 15 pin cable 722, 750, 850, 852 with 9 pin cable

* Catalog Pricing Subject to Change f.D.Vacuum Pressure Measurement

"""""'"""""'"""""'"""""'"""""'"""""'Pressure liaugesCapacitance Manometers

Call Us For M KS I W1fHJjn}'.Jlf(! w PRICE 6290 j_}_lliCapacit ance Manometers HEATED Baratron Part Number Ordering Part Number EXAMPLE 11T 4 CODE EXAMPLE The can be had at either temperature range 6290 B ( J B 6290 (9pin} Absolute Capacitance Manometers 45°( or 100°( and uses a 9-pin D-subminiature electrical 9-pin D-connector, standard sensor 629D 629D connector for "drop-in" compatibility with many competitive Pressure Ranges Full Scale (Torr) products. Te mperature controlled capacitance manometers 0.02 (available on 45' models only) U2T are much less affected by ambient temperature changes 0.05 U5T than the unheated Baratrons. Heating the sensor also reduces 0.10 .1T or eliminates the possibility of process byproducts depositing 0.25 RET inside the manometer to cause drift, which can have a 1 on significant effect on system availability and repeatability. 2 02T The Ty pe 629D also offers an optional external zero set 10 11T 11T capability, allowing its zero to be set remotely - a major 20 21T advantage in many process tools that do not permit easy 100 12T 1000 13T access to the Absolute Baratron Capacitance Manometer. Fitting Sizes Baratron works with MKS PDR-C-1, PDR-C-2, 1/2 inch O.D. (12.7mm) tube (no fitting,_,_) ------;-- - PR4000, 6608, PDR2000 Power Supplies --; - ---::- Swagelok 8 VCR, female B 1.33 inch O.D. Conflat, rotatable

c

45'( 1 00'( Options Standard confi guration, vertical calibration 1 Heater status indication, vertical calibration 2 External zero, vertical cal (N/A for 0.02 Torr or 1 OO'C/0.05 Torr products 3 Heater status, external zero, vertical cal 4 4 (N/A for 0.02 Torr or 1 OO'C/0.05 Torr products) Standard confi guration, horizontal calibration (< 1 Torr only) 5 Heater status indication, horizontal calibration (< 1 Torr only) 6 External zero, horizontal cal (45'( products with 0.05, 0.10, 0.25 Torr ranges; 7 100oC products with 0.10 and 0.25 Torr ranges) Heater status, external zero, horizontal cal 8 (45'( products with 0.05, 0.1 0, 0.25 Torr ranges; 100'( products with 0.10 and 0.25 Torr ranges) Connector 9-pin D-connector, thread locks B B 9-pin D-connector, slide locks p

* Catalog Pricing Subject to Change facuum Pressure Measurement f])

Pressure &auges Capacitance Manometers"""""""""""""""""

t 1 Call Us For MKS -�! f r' LJ[JJLftJ_:_;u. :-tJIBJ LWUJ PRICE 6228 & 6268 -- Capacitance Manometers Part Number Ambient Temperature 8aratrons ordering Part Number EXAMPLE 6270 11T B c 1 B cooE EXAMPLE The 6228 (terminal block) and the 6268 (15pin) Absolute Capacitance Manometers are unheated and are the most economical of all the 600 Ambient temp; terminal block connector, standard sensor 6228 series of Baratrons. They are available in full scale pressure Ambient temp; 15-pin D-connector; standard sensor 6268 45'( sensor; 15-pin D-connector; standard sensor 627D 627D vacuum ranges from 0.1 to 1000 To rr and are suited for 1 OO'C sensor; 15-pin D-connector; standard sensor 628D many industrial, electronic, and research applications. Pressure Ranges Full Scale (Torr) 6270 & 6280 - 0.02 (available on 627D only) U2T HEATEO 8aratrons 0.05 (available on 627D and 628D only) U5T 0.10 (not available on 6228) .1T The and the are 6270 (45oC) 6280 (lOOoC) (15pin) 0.25 (not available on 6228) RE T temperature controlled capacitance manometers that 1 on are much less affected by ambient temperature changes 2 02T than the unheated Baratrons. Heating the sensor also reduces 1 o 11T 11T or eliminates the possibility of process byproducts depositing 20 21T inside the manometer to cause drift, which can have a 1 oo 12T significant effect on system availability and repeatability. 200(available on 627D, 628D only) 22T They are available in lower fu ll scale pressure ranges than 0 unheated products, which permits their use in more �� 200� 0 (available on 6270, 6280 only) �23T�� demanding processes. All of models are internally the 5000 (available on 627D, 628D only) 53T regulated to their specified operating temperature. 10,000 (available on 627D, 628 D only) 14T Baratrons work with MKS PDR-C-1, PDR-C-2, 15,000 (available on 627D, 628 D only) R8T PR4000, 6608, PDR2000 Power Supply Controllers 20'-'-,,o_oo:-'-(a'--va'--il-,-ab-:-'-le--'-on-'-627-:-'-D,-'-628 D -'-o n-:-'-'ly'-----l ----- 24T __ --,- -,- ,-:--::------:-:c==--- 25,000 (available on 627D, 628 D only) RCT Fitting Sizes

1/2 inch O.D. ( 12.7mm) tube (no fitting,_,_) ------'A-- - ::------=- Swagelok 8 VCR, female 8 8 1.33 inch O.D. Conflat, rotatable (1) C NW KF16 (2) D NW KF25 (2) Q Swagelok 8 VCO, Female E 2.75 inch O.D. Conflat, rotatable (1) L Accuracy (o/oof Reading) 0.12% (627D 1 Torr range and higher) c c 0.15% (627D in 0.25, 0.1 0, 0.05 Torr ranges) D 0.25% (6228, 6268, 628D, 627D in 0.02 Torr range) 0.50% (628D in 0.25, 0.1 0, 0.05 Torr ranges) Options Standard Configuration, Vertical Calibration, 627D, 628D, 1Torr & higher 1 Temp/Heater Status, Vertical Calibration, 627D, 628D, 1 Torr & higher 2 Connector 15-pin D-connector, thread locks (627D, 628D only) 8 8 15-pin D-connector, slide locks (627D, 628D only) p (1) Available only on ranges of 1000 Torr and less. (2) Available only on ranges of 5000 Torr and less, and 2000 & 5000 Torr ranges use an ove rpressure ring.

* Catalog Pricing Subject to Change fDVacuum Pressure Measurement �==Pressu re &auges Ion Gauges Granville Phillips 274 ��:� These Glass Tu bes typically work with and Ideal Vacuum Granville Phillips, MKS, Perkin Elmer, Vanan. and Veeco Pressure Controllers

on S GP 274 DUAL Tungsten, 15mm OD I GaUge 'u be Inlet Pyrex Glass lon Gauge 3 DUAL Tungsten Filaments with two Operating range of 1 x1 o- to 2 x1 o-9 Torr opposing helical filaments having six leads P/N P104510 274037 Price $172.00

in. 3/4 3/4 in.

GP 274 DUAL Tungsten, 3/4 in. OD GP 274 DUAL Tungsten, 1 in. OD GP 274 DUAL Tungsten, 3/4 in. OD GP 274 DUAL Tungsten, 1 in. OD Inlet Pyrex Glass lon Gauge Inlet Pyrex Glass lon Gauge Kovar Metal Pyrex Glass I on Gauge Kovar Metal Pyrex Glass lon Gauge 3 9 3 9 Operating range of 1 x1 o- to 2 x1 o- Torr Operating range of 1 x1 o- to 2 x1 o- Torr Operating range of 1 x1 o-3 to 2 x1 o-9 Torr Operating range of 1 x1o-3 to 2 x1o-9 Torr PIN P104502 274012 Price $145.00 P/N P104505 274015 Price $158.00 P/N P104503 27401 3 Price $164.00 P/N P104504 274016 Price $178.00

CF 2.75 CF 2.75 in. 3/4"0.0. 1"0.0. 1

GP 274 DUAL Tungsten, CF 1.33 in. GP 274 DUAL Tungsten, CF 2.75 in. GP 274 DUAL Tungsten, CF 2.75 in. IDEAL VAC DUAL Tungsten, 1 in. OD 3/4 in. Inlet Pyrex Glass lon Gauge 3/4 in. Inlet Pyrex Glass I on Gauge 1 in. Inlet Pyrex Glass I on Gauge Inlet Pyrex Glass I on Gauge 3 9 3 3 3 9 Operating range of 1 x1o- to 2 x1o- Torr Operating range of 1 x1 o- to 2 x1 o-9 Torr Operating range of 1 x1 o- to 2 x1 o-9 Torr Operating range of 1 x1 o- to 2 x1 o- Torr P/N P104524 274021 Price $232.00 P/N P104506 274017 Price $250.00 P/N P104507 274018 Price $255.00 P/N P102041 Price $115.00

KF25 CF 1.33 3/4"0.0. -----­

IDEAL VAC DUAL Tungsten, KF25 1SO IDEAL VAC DUAL Tungsten, KF40 ISO IDEAL VAC DUAL Tungsten, CF 1.33 in. IDEAL VAC DUAL Tungsten, CF 2.75 in. NW25 Inlet Pyrex Glass I on Gauge NW40 Inlet Pyrex Glass I on Gauge 3/4 in. Inlet Pyrex Glass lon Gauge 1 in. Inlet Pyrex Glass lon Gauge 3 3 9 Operating range of 1 x1o- to 2 x1o-9 Torr Operating range of 1 x1o-3 to 2 x1o-9 Torr Operating range of 1 x1o-3 to 2 x1o-9 Torr Operating range of 1 x1o- to 2 x1o- Torr P/N P102042 Price $165.00 P/N P102040 Price $165.00 P/N P102043 Price $170.00 P/N P102044 Price $165.00

* Catalog Pricing Subject to Change Vacuum Pressure Measurement f]) Pressure &auges Ion Gauges Granville���:�� Phillips 274 and Ideal Vacuum '------" 15mm 3/4 in. GP 274 Test Gauge with Single Tho ria Inn Gauge Tubes Coated Iridium Filament Gauge I Iridium Filaments with Glass tubulated test gauge with theria- Thoria Coating leads coated iridium filament, pumped down to GP 274 1ridium Filament, 15mm OD GP 274 1ridium Filament, 3/4 in. OD & 4 Inlet Glass lon Gauge Inlet Pyrex Glass lon Gauge These Glass Tubes typically work with approximately 1 o-s Torr and sealed off. Pyrex 3 9 3 9 Granville Phillips, MKS, Perkin Elmer, NOT to be used as a pressure reference. Operating range of 1 x1 o- to 2 x1 o- Torr Operating range of 1 x1 o- to 2 x1 o- Torr Varian and Veeco Pressure Controllers P/N P1 04501 27403 1 Price $267.00 P/N P1 04508 274036 Price $184.00 PIN P1 04328 274002 Price $1 88.00

3/4 in. 1 in.

--" GP 274 1ridium Filament, 1 in. OD GP 274 1ridium Filament, 3/4 in. OD GP 274 1ridium Filament, 1 in. OD GP 274 1ridium Filament, KF25 1SO Inlet Pyrex Glass lon Gauge Kovar Metal Pyrex Glass I on Gauge Kovar Metal Pyrex Glass I on Gauge NW25 Inlet Pyrex Glass lon Gauge 3 9 3 9 3 9 Operating range of 1 x1o- to 2 x1Q- Torr Operating range of 1 x1o- to 2 x1Q- Torr Operating range of 1 x1 o-3 to 2 x1 o-9 Torr Operating range of 1 x1o- to 2 x1o- Torr P/N P104330 274005 Price $199.00 P/N P1 04329 274003 Price $21 0.00 P/N P104331 274006 Price $226.00 P/N P104509 274032 Price $238.00

CF 2.75 l"lnlet

CF 1.33 ·,�

I GP 274 1ridium Filament, CF 1.33 in. GP 274 1ridium Filament, CF 2.75 in. GP 274 1ridium Filament, CF 2.75 in. IDEAL VAC Iridium Filament, 1 in. OD 3/4 in. Inlet Pyrex Glass lon Gauge 3/4 in. Inlet Pyrex Glass I on Gauge 1 in. Inlet Pyrex Glass I on Gauge Inlet Pyrex Glass I on Gauge 3 9 3 3 9 3 9 Operating range of 1 x1 o- to 2 x1 o- Torr Operating range of 1 x1 o- to 2 x1 o-9 Torr Operating range of 1 x1 o- to 2 x1 o- Torr Operating range of 1 x1 o- to 2 x1 o- Torr P/N P1 04500 274020 Price $250.00 P/N P104498 274007 Price $273.00 P/N P1 04499 274008 Price $273.00 P/N P102035 Price $145.00

· �- '-"�'-�t�'J � " CF�2.75r _/ _/ IDEAL VAC Iridium Filament, KF25 1SO IDEAL VAC Iridium Filament, KF40 ISO IDEAL VAC Iridium Filament, CF 1.33 in. IDEAL VAC Iridium Filament, CF 2.75 in. NW25 Inlet Pyrex Glass I on Gauge NW40 Inlet Pyrex Glass lon Gauge 3/4 in. Inlet Pyrex Glass lon Gauge 1 in. Inlet Pyrex Glass I on Gauge 3 9 Operating range of 1 x1Q-3 to 2 x1o-9 Torr Operating range of 1 x1Q-3 to 2 x1o-9 Torr perating range of 1 x1Q-3 to 2 x1o-9 Torr Operating range of 1 xl0- to 2 xl0- Torr P/N P102036 Price $195.00 P/N P102037 Price $195.00 P/N P102038 Price $195.00 P/N P102039 Price $280.84

*Catalog Pricing Subject to Change

www.idealvac.com (505)872-0037 10·38 fDVacuum Pressure Measurement Pressure &auges Ion Gauges G ra_n�ill A e/ liiLENT PhillipsBayard I Alper J t

5 Leads SingleNUDE & Dual lon Thoria GauCoated gesIridium Filaments with or without pin guards GP 274 NUDE B/A lon Gauge 2.75 in. CF, DUAL GP 274 NUDE B/A lon Gauge 2.75 in. CF, SINGLE These Nude Gauges typically work with Thoria Coated Iridium Filament, EB Degas Thoria Coated Iridium Filament, Resistive 3 Granville Phillips, MKS, Perkin Elmer, Operating range of 1 x1o-3 to 2 x10 -11 Torr Operating range of 1 x1o- to 2 x1o-11 Torr Varian and Veeco Pressure Controllers P/N P104512 274023 Price $590.00 PIN P104513 274028 Price $544.00

UHV

GP 274 NUDE B/A lon Gauge 2.75 in. CF, DUAL Thoria GP 274 NUDE B/A lon Gauge 2.75 in. CF, SINGLE GP 274 NUDE B/A lon Gauge NW KF40, SINGLE Coated Iridium Filament, EB Degas, Pin Guard Thoria Coated Iridium Filament, Pin Guard, Resistive Thoria Coated Iridium Filament, Pin Guard, Resistive 3 Operating range of 1 x1 o-3 to 2 x1 o-11 Torr Operating range of 1 x1o- to 2 x1o-11 Torr Operating range of 1 x1 o-3 to 2 x1 o-11 Torr PIN P104515 274042 Price $656.00 P/N P104516 274043 Price $622.00 P/N P104518 274053 Price $635.00

= = NOT UHV

UHV t =

(Electron Bombardment degas only) (Resistive or Electron Bombardment degas)

GP 274 NUDE B/A Filament Replacement Kit for GP 274 NUDE B/A Filament Replacement Kit for GP 274 NUDE B/A lon Gauge NW KF40, DUAL NUDE DUAL Thoria Coated Iridium lon Gauges NUDE SINGLE Thoria Coated Iridium lon Gauges Thoria Coated Iridium Filament, EB Degas, Pin Guard This is a Kit Only, I on Gauges and Controllers sold separately. This is a Kit Only, I on Gauges and Controllers sold separately. 3 11 Operating range of 1 x1o- to 2 x1 o- Torr For Granville Phillips GP274 NUDE ION GAUGES ONLY For Granville Phillips GP274 NUDE ION GAUGES ONLY P/N P104520 274058 Price $668.00 P/N P104522 274025 Price $275.00 P/N P104523 274029 Price $225.00

--- -- Extended Range - 1 x1o-3 to 5x1o- 12 =:c

t - ,)_

UHV UHV

• Agilent NUDE B/A Filament Replacement Kit Agilent UHV-24 NUDE B/A lon Gauge 2.75 in. Agilent UHV-24P NUDE B/A lon Gauge 2.75 in. for NUDE DUAL Thoria Coated Iridium lon Gauges CFF, DUAL Thoria Coated Iridium Filament CFF, DUAL Thoria Coated Iridium Filament This is a Kit Only, I on Gauges and Controllers sold separately. 3 3 12 Operating range of 1 x1o- to 2 x1o-11 Torr Operating range of 1 x1o- to 5 x1o- Torr For AGILENT UHV-24 NUDE ION GAUGES ONLY P/N P104144 Agilent 9715007 Price $623.04 P/N P104145 Agilent 9715015 Price $705.64 P/N P1041 57 Agilent 9710028 Price $215.86

*Catalog Pricing Subject to Change

(505)872-0037 Vacuum Pressure Measurement f]) Pressure &auges Ion Gauges

���:�� Granville PhillTheseips NUDE Gag ues274 typica lly work with Granville Phillips, MKS, Perkin Elmer, NUDE I 0 n G auge s Vanan. and Veeco Pressure Controllers DUAL Tungsten Filaments with two opposing helical filaments

UHV UHV UHV 5 Leads

GP 274 NUDE B/A lon Gauge 2.75 in. CF, DUAL 5 Leads 5 Leads Tungsten Filament, EB Degas 3 Operating range of 1 x1 o- to 2 x1 o-11 Torr P/N P104511 274022 Price $545.00 GP 274 NUDE B/A lon Gauge 2.75 in. CF, DUAL GP 274 NUDE B/A lon Gauge NW KF40, DUAL Nude B/A lon Gauge Flange-Less Dual Tungsten Tungsten Filament, EB Degas, Pin Guard Tungsten Filament, EB Degas F'l1a men-t 61e asd 3 3 0.peratmg range of 1x1 o- to 2ox1 -11 T orr Operating range of 1 x1 o- to 2 x1 o-11 Torr Operating range of 1 x1o-3 to 2 x1o-11Torr P/N P105909 Price $495.00 P/N P104514 274041 Price $622.00 P/N P104517 274050 Price $557.00

� = GP 274 Replacement Filament for NUDE B/A ion 2.75 in CF Gauge DUAL Tungsten Filament, EB Degas Only For Granville Phillips GP274 NUDE ION GAUGES ONLY This is a Kit Only, I on Gauges and Controllers sold separately. UHV E�:�A--: - PIN P104521 274024 Price $184.00

5 Leads

With calibration memory module. I on gauge for use with 370 Stabil lon Gauge Controllers. - Agilent Varian UHV-24 Replacement Filament for GP 274 NUDE B/A lon Gauge NW KF40, DUAL GP 370 Metal Stabil-lon Gauge Extended Range NUDE B/A lon Gauge DUAL Tungsten Filament Tungsten Filament, EB Degas, Pin Guard w/Dual Yttria Coated Iridium Filaments, 2.75 in. CF This is a Kit Only, I on Gauges and Controllers sold separately. 3 11 Operating range of 1 x1 o- to 2 x1 o- Torr Operating range of 99 torr to 2 x1 o-11 torr For VARIAN UHV-24 NUDE ION GAUGES ONLY P/N P104519 274057 Price $635.00 P/N P1 04666 370120 Price $835.00 P/N P104156 Agilent 9710018 Price $153.44

* Catalog Pricing Subject to Change fDVacuum Pressure Measurement

"""""'"""""'"""""'"""""'"""""'"""""'"""""'"""Pressure &auges Ion sensor cables > Granville Phillips CAB L ES for I on Gauge Controllers These are cables only and do not come with ion gauge tubes

GP 270 & 280 ION Gauge Controller Cable, for Glass GP 340 ION Gauge Controller Cable, for glass I on GP 307 & 330 ION Gauge Controller Cable, for Glass I on Gauges 10ft. long, controls a single glass ion gauge gauge tube 1oft. long, controls 1 glass ion tube lon Gauge 10ft. long, controls a single glass ion gauge P/N P102059 270007 Price $198.90 P/N P102068 303022 Price $189.95 P/N P102689 307042 Price $169.95

GP 307, 330, 340 ION Gauge Controller Cable, for NUDE GP 307 Gauge Controller Cable for glass lon Gauge, GP 358 Micro lon Gauge Controller Cable, for 355 Mini lon Gauge with push on pins 1oft. for nude ion gauge for remote mounting of PS10f t. long, controls a single lon gages 10ft. long, controls 1, 355 mini ion gauge P/N P1 02690 307046 Price $155.00 glass ion gauge P/N P104886 307030 Price $179.00 P/N P1 02069 35801 1-10 Price $325.00

Gauge Controller Cable for NUDE lon Gauge with GP 307, 330, 340 ION Gauge Controller Cable, for NUDE GP 307 Gauge Cable for NUDE lon Gauge, pin guard connector for remote mounting of PS lon Gauge, pin guard connector, for side by side mount with push-on pins, for remote mounting of PS 10 ft. long, single gauge P/N P104888 307034-CE Price $325.75 10 ft. long, single gauge P/N P104889 307046-CE Price $250.00 10 ft. long, single gauge P/N P104887 307034 Price $235.00

Gauge Controller Cable, For NUDE GP 350 UHV ION Gauge Controller Cable, For NUDE GP 270 ION Gauge Controller Cable, for NUDE Gauges 25 ft. long, controls a single nude ion gauge Gauges 50 ft. long, controls a single nude ion gauge lon Gauges 10ft. long, controls a single nude ion gauge P/N P104946 350005 Price $306.25 P/N P104947 350006 Price $550.00 P/N P102683 270009 Price $225.00

* Catalog Pricing Subject to Change

(505)872-0037 Vacuum Pressure Measurement f]) Pressure &auges sensor cables

Granville Phillips : - : ���� ! CAB L ES for Thermocouple, Convectron, Capacitance Diaphragm and Stabil-lon Gauge Controllers These are Cables only and do not come with sensor gauges

GP 307, 316 or 358 Convectron or Capacitance GP 275 Convectron signal and power cable GP 375 or 475 Convectron signal cable Manometer Gauge Controller Cable 1 o ft.for 10ft. long for legacy GP 275 Convectron Controllers 10ft. long for GP 375 or 475 convectron controllers Convectron or Baratron P/N P104873 307027 Price $220.00 P/N P1 02691 2751 17 Price $399.95 P/N P1 041 11 475012-10 Price $126.95

GP 375 or 475 Convectron P/N P1041 11 (10ft.) 475012-10 Price $126.95 controller signal cable P/N P1 04184 (25ft.) 475012-25 Price $155.00 Different lengths for 375 or 475 P/N P1 04185 (SOft.) 475012-50 Price $182.50 Granville Phillips Pressure P/N P1 041 86 (1OOft.) 475012-100 Price $283.75 Gauge Controllers P/N P1 041 87 (200ft.) 475012-200 Price $400.00 P/N P1 041 88 (500ft.) 475012-500 Price $843.75

* Catalog Pricing Subject to Change

www.idealvac.com (505)872-0037 fDVacuum Pressure Measurement

"""""'"""""'"""""'"""""'"""""'"""""'"""""'"""Pressure &auges Bourdon

These Bourdon needle dial vacuum pressure gauges measure G a g e 5 both positive pressure from 0 to 30 PSI (pounds per square inch) Bo rdon and vacuum pressure from to inHg (inches of mercury). There is mmHg u u 0 30 760 C U U m U n g (29.92 inHg) of atmospheric pressure at sea level. These Bourdon vacuum pressure Va PreSS r e R a e measurement gauges are low cost eing qui kand easy to us .However, they are • ? � � 0 to 30 inHG (in of mercury) or very low accuracy gauges. Each tiCk mark m the vacuum IS around 25.4 Torr. 0 to 30 PSI (pounds per sq. in.)

P103891 P104860 P103558 Bourdon Needle Dial Vacuum Gauges Bourdon Needle Valves Size Range inHG (mercury) IDEAL P/N Price* Bourdon Needle Gauge 1/4 inch MNPT 0 to 30 inHg P103558 $44.99 Bourdon Needle Gauge (fitting on back) 1/4 inch MNPT 0 to 30 inHg P103891 $55.00 Deluxe Bourdon Gauge (liguid filled) 1/4 inch MNPT 0 to 30 inHg P104860 $175.00 Bourdon Needle Gauge NWKF10 0 to 30 inHg P101662 $121.80 Bourdon Needle Gauge NWKF16 0 to 30 inHg P101663 $121.80 Bourdon Needle Gauge NWKF25 0 to 30 inHg P101664 $127.05 Bourdon Needle Gauge NWKF40 0 to 30 inHg P101665 $137.55 Bourdon Needle Gauge NWKFSO 0 to 30 inHg P101666 $149.10

* Catalog Pricing Subject to Change

www.idealvac.com (505)872-0037