Rotary Table/Vane Type MSU Series Size: 1, 3, 7, 20

Home , 180s

CRB2 CRB1 MSU CRJ CRA1

Peripheral table deflection CRQ2

mm or less MSQ High Precision MSZ Table top deflection mm or less CRQ2X MSQX MRQ

MSUB Series MSUA Series

D-

139 Rotary

Vane Type/ Rotary actuator with lightweight,

High precision type MSUMSUAA SeriesSeries Size: 1, 3, 7, 20 Improved table deflection accuracy: High precision/High rigidity 0.03 mm or less

Special bearing (Duplex single row ball bearing) Easy alignment when mounting the load Table inside/outside diameter tolerance H9/h9 Female threads for load mounting provided in eight places. (Increases freedom in mounting the load) Mounting reference pin holes

Easy alignment when mounting the body Mounting reference pin holes Deflection accuracy: Displacement for 180° rotation (Alignment with center of body) Table top deflection Provided on three sides, excluding port side Peripheral table deflection Reference diameter h9 (Alignment with center of table rotation)

(mm) Angle adjustable Model MSUA 90° ±10°, 180° ±10° Table top deflection 0.03 (0.1 to 0.2) Double vane (MSUB only) 90° ±5° Peripheral table deflection 0.03 (0.1 to 0.2) Values inside ( ) are for MSUB series Scale indication

Disengageable Maintenance work is simplified. The drive unit can be replaced with the load mounted. Angle adjustment screws

Table unit Auto switch capable Drive unit Since switches can be moved anywhere on the circumference, they can be mounted at positions which accommodate the specifications.

140 Table

Size: 1, 3, 7, 20 CRB2 compact table for robotic hands CRB1 MSU Free mount type Can be mounted from three directions: axial, lateral, vertical CRJ Axial mounting Lateral mounting Vertical mounting CRA1 AA Bottom mount Top mount CRQ2 MSU Tapped holes (4) MSU MSQ MSZ

Tapped holes (4) CRQ2X MSQX BB MRQ MSUMSU Through-holes (2) Tapped holes (2)

Tapped holes (2) Through-holes (2)

Bearing

Basic type MSUMSUB SeriesSeries Size: 1, 3, 7, 20 B Single vane and double vane standardized Double vane has the same dimensions as single vane (Except size 1)

Single vane Series Variations Series Size Rotating angle Vane type Applicable auto switch Page 1 90° D-9, D-T99 D- High precision 3 D-9A, D-S99, S9P Single vane type P.142 7 D-R73, D-T79 MSUA 180° 20 D-R80, D-S79, S7P 1 90° Single vane D-9, D-T99 Basic type 3 D-9A, D-S99, S9P P.154 MSUB 7 ∗ D-R73, D-T79 180° Double vane 20 D-R80, D-S79, S7P ∗ Double vane is available with 90° rotation setting only. 141 Rotary Table: High Precision Type Vane Type MSUA Series Size: 1, 3, 7, 20

How to Order Connection port location Bearing type Nil Side ported A High precision type E Axial ported Available with side ported Free mount type only, when equipped with auto switch unit.

Without auto switch MSUA 20 90 S

With auto switch M D SUA 20 90 S LT79 Number of auto switches S 1 pc. ∗ With auto switch ∗∗ (Built-in magnet) Nil 2 pcs. ∗ S (1 auto switch) is shipped with a Nominal size (Torque) right-hand auto switch. 1 MSUA 1 ∗∗ Nil (2 auto switches) is shipped with a right-hand and a left-hand switch. 3 MSUA 3 Electrical entry/Lead wire length 7 MSUA 7 Nil Grommet/Lead wire: 0.5 m 20 MSUA20 L Grommet/Lead wire: 3 m Z Grommet/Lead wire: 5 m Rotating angle C Connector/Lead wire: 0.5 m Applicable Symbol Rotating angle CL Connector/Lead wire: 3 m Single 90 90° CN Connector/Without lead wire vane 180 180 ° ∗ Available only with R73, R80 and T79 type connectors. Rotation adjustment range ∗∗ Lead wire with connector part nos. Single vane: Both ends ±5° each D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m Vane type D-LC50: Lead wire 5 m S Single vane Auto switch Nil Without auto switch (built-in magnet) ∗Refer to the table below for the applicable auto switch model. Applicable Auto Switches/Refer to pages 797 to 850 for further information on auto swiches. Load voltage Lead wire length (m) ∗ Special Electrical Auto switch model Lead wire Pre-wired Applicable Type Wiring 0.5 3 5 None Applicable load function entry type connector model (Output) DC AC (Nil) (L) (Z) (N)

Indicator light Perpendicular In-line Solid 3-wire (NPN) S99V S99 5 V, 12 V Heavy-duty IC circuit state 3-wire (PNP) S9PV S9P auto Yes cord MDSUA1 12 V T99V T99 switch Relay, MDSUA3 Grommet 24 V 5 V, 12 V 5 V, 12 V, 24 V 90 Parallel cord IC circuit Reed No 5 V, 12 V, 5 V, 12 V, PLC 2-wire 100 V 24 V, 100 V 90A Heavy-duty cord auto switch 97 Parallel cord

Yes 100 V 93A Heavy-duty cord 3-wire (NPN) S79 Solid 5 V, 12 V IC circuit state Grommet 3-wire (PNP) S7P auto T79 switch 12 V MDSUA7 Connector Yes T79C Heavy-duty Relay, 24 V MDSUA20 Grommet 100 V R73 cord PLC 2-wire Reed Connector R73C auto switch Grommet 48 V, 100 V 100 V R80 IC circuit Connector No 24 V or less R80C ∗ Lead wire length symbols: 0.5 m ······ Nil (Example) R73C ∗ Auto switches marked with “ ” Order example: MSUA20 single vane type 3 m ······ L (Example) R73CL are made-to-order specifications. (connection port side location selected) 5 m ······ Z (Example) R73CZ 1. Standard type (Without auto switches), Rotation 90°, side port None ······ N (Example) R73CN ∗ Refer to pages 837 and 838 for location ∗ Auto switches are shipped together (but not assembled). detailed solid state auto switches MSUA20-90S with pre-wired connectors. 2. With auto switch unit (Without auto switches), Rotation 180°, side port location MDSUA20-180S 3. With auto switch unit + Auto switch R73, Rotation 180°, Side port location MDSUA20-180S-R73 142 Rotary Table: High Precision Type Vane Type MSUA Series

Specifications

Model ∗2 MSUA1 MSUA3 MSUA7 MSUA20 Vane type Single vane

Rotating angle ∗1 90° ± 10° 180° ± 10° 90° ± 10° 180° ± 10° 90° ± 10° 180° ± 10° 90° ± 10° 180° ± 10° Fluid Air (Non-lube) Proof pressure (MPa) 1.05 1.5 CRB2 Ambient and fluid temperature 5 to 60°C Operating pressure range (MPa) 0.2 to 0.7 0.15 to 0.7 0.15 to 1.0 CRB1 Rotation time adjustment range (s/90°) 0.07 to 0.3 (0.5 MPa) Allowable radial load 20 N 40 N 50 N 60 N MSU Shaft load Allowable thrust load 15 N 30 N 60 N 80 N CRJ Allowable moment 0.3 N·m 0.7 N·m 0.9 N·m 2.9 N·m Bearing Special bearing CRA1 Port location Side ported or Top ported Side ported M3 x 0.5 M5 x 0.8 CRQ2 Port size Top ported M3 x 0.5 M5 x 0.8 Moisture Deflection accuracy 0.03 mm or less MSQ Control Tube ∗ 1 Single vane 90° can be adjusted to 90° ± 10° ∗ 2 Correspondence to equivalent current free- IDK Series (both ends of rotation ± 5° each) mount types MSZ Single vane 180° can be adjusted to 180° ± When operating an actuator with a small diameter Rotary table Free-mount rotary actuator 10° (both ends of rotation ± 5° each) CRQ2X and a short stroke at a high frequency, the dew MSUA 1 CRBU2W10 Note) Refer to page 35 for allowable kinetic energy. condensation (water droplet) may occur inside the MSUA 3 CRBU2W15 MSQX piping depending on the conditions. MSUA 7 CRBU2W20 Simply connecting the moisture control tube to the MSUA20 CRBU2W30 MRQ actuator will prevent dew condensation from oc- Symbol curring. For details, refer to the IDK series in the Best Pneumatics No.6.

Table Rotation Range Weight

Angle adjustment is possible as shown in the drawings below using adjustment (g) bolts (A) and (B). Basic weight Size Rotating angle Auto switch unit Note) Single vane Adjustment range of Adjustment range of adjustment bolt (B) 90° 162 adjustment bolt (A) 1 15 (S): 10° (± 5°) (S): 10° (± 5°) 180° 161 90° 262 3 20 90° 180° 260 90° 440 7 28 180° 436 ° 90° 675 22.5 20 38 180° 671 Positioning pin hole Note) Values above do not include auto switch weight.

Adjustment bolt (A) Adjustment bolt (B) Allowable Load For 90° rotation Do not permit the load and moment applied to the table to exceed the allowable Single vane (S): 80 to 100° adjustable values shown in the table below. (Operation above the allowable values can cause adverse effects on service life, such as play in the table and loss of accuracy.) Adjustment range of Adjustment range of adjustment bolt (A) 180° adjustment bolt (B) D-

10° (± 5°) 10° (± 5°) 22.5°

Positioning pin hole Size Allowable radial load (N) Allowable thrust load (N) Allowable moment (N·m) 1 20 15 0.3 3 40 30 0.7 Adjustment bolt (A) Adjustment bolt (B) 7 50 60 0.9 For 180° rotation 20 60 80 2.9 Single vane (S): 170 to 190° adjustable 143 MSUA Series

Construction

Internal Construction of Rotary Table

For 180° For 90° Single vane (Figure in the middle (Figure with pressure (Figure in the middle position) to A port) position for 180°)

Component Parts No. Description Material Note 1 Body A Aluminum alloy Anodized 2 Body B Aluminum alloy Anodized 3 Body C Aluminum alloy Anodized 4 Vane shaft Stainless steel (MSUA20 is carbon steel) Single vane 5 Stopper Resin Single vane 6 Stopper seal NBR 7 Table Aluminum alloy Anodized, Serigraph 8 Stopper lever Carbon steel Heat treated, Electroless nickel plated 9 Stopper guide Stainless steel Nitriding 10 Lever retainer Carbon steel Zync Chromated 11 Bearing retainer Aluminum alloy Anodized 12 Bearing High carbon chrome bearing steel 13 Special bearing High carbon chrome bearing steel 14 Back-up ring Stainless steel 15 O-ring NBR 16 With adjustment bolt Carbon steel Heat treated 17 Hexagon nut Carbon steel 18 Hexagon socket head cap screw 19 Hexagon socket head cap screw 20 Hexagon socket head cap screw 21 Button bolt 22 Hexagon socket head cap screw SE type only 23 Label ∗ The plug is used only when the connection port is type SE. ∗ Individual part cannot be shipped. Please purchase the whole unit. (Refer to page 170.) 144 Rotary Table: High Precision Type Vane Type MSUA Series

Construction

Internal construction with auto switch

MDSUA1/3 MDSUA7/20

CRB2 CRB1 MSU CRJ

Auto switch units CRA1 Auto switches are not included. CRQ2 MSQ

∗ Refer to page 56 for the component parts. MSZ CRQ2X MSQX ∗ The auto switch unit can be retrofitted on a rotary actuator. Auto switches should be ordered separately since they are not included. MRQ Model Auto switch unit part no. M(D)SUA 1 P211070-1 M(D)SUA 3 P211090-1 M(D)SUA 7 P211060-1 M(D)SUA20 P211080-1

Auto switch block unit MDSUA1/3 MDSUA7/20 For solid state auto Combination of reed and For reed auto switch switch solid state auto switches Right-handed Left-handed Combination left & right-handed Combination left & right-handed

Part no.: P211070-8 Part no.: P211070-9 Part no.: P211070-13 Part no.: P211060-8 ∗ The auto switch block unit is included in the auto switch unit. ∗ Auto switch block unit shows the necessary assembly for mounting 1 piece of auto switch to the auto switch unit. ∗ Individual part cannot be shipped.

D-

145 MSUA Series

Dimensions These drawings indicate the condition when the B port is pressurized.

MSUA1 MSUA1-S,SE C 8 x M3 x 0.5 depth 5

ø51

B  31  38 23.5

ø25

4 x M4 x 0.7 depth 4

22.5° 4.5

+0.025 0 2.5H9 A Long groove depth 4 (Positioning pin hole) 0 ° ø35h9 –0.062 +0.025 22.5 3 x 3H9 0 depth 3 +0.043 ø17 H9 0 ( A , B , C ) 27 2.5 2 x 4.5 through 2

0 2 6.5 ø36h9 6.5 12.5 4.2 –0.062

27 16

10.3 9 5 37 Angle adjustment bolt 31.5 4.5 2 x 4.5 through

2 x M3 x 0.5 2 8 1 5 Adjustment: Max. 7.5 0.5 A port B port +0.025 3 x 3H9 0 long groove depth 2.5 –0.004 ( A , B , C ) ø4g6 –0.012

0 ø9h9 –0.036

ø29 4 x M4 x 0.7 depth 8 0 ø36h9 –0.062

Top ported: MSUA1-SE  31

A port 9.5 B port

2 x M3 x 0.5 8.5

146 Rotary Table: High Precision Type Vane Type MSUA Series

These drawings indicate the condition when the B port is pressurized.

With auto switch: MDSUA1-S

CRB 2 ∗1) 24: When using D-90/90A/S99/S99V/S9P/S9PV/T99/T99V  30: When using D-97/93A ∗2) 60°: When using D-90/90A/97/93A CRB1 69°: When using D-S99/S99V/S9P/S9PV/T99/T99V MSU CRJ CRA1 CRQ2 MSQ 12.5 MSZ CRQ2X MSQX

37 MRQ Angle adjustment bolt

2 x M3 x 0.5 (Port location: Side ported type only) ∗ 1 24 A port B port 28

ø18.5

∗2 ) (69° 60° ø29

D-97/93A

∗1 30

D-

147 MSUA Series

Dimensions These drawings indicate the condition when the B port is pressurized.

MSUA3 MSUA3-S/SE

8 x M4 x 0.7 depth 7 C

ø58

B 27 ø30  36  44

4 x M4 x 0.7 depth 5.5

22.5°

0 +0.025 ø41h9 –0.062 0 3H9 A +0.052 Long groove depth 5 ø21H9 0 (Positioning pin hole) 22.5° 29 2.5 +0.025 3 3 x 3H9 0 depth 3 2 x 4.5 through ( A , B , C )

0 3 ø42h9 –0.062 15.5 811 8 55 29 18.3

11 36

Angle adjustment bolt 45 2 x 4.5 through 6 2 2 x M5 x 0.8 Adjustment: Max. 8.2 9 6 1.5

A port 0.5 B port +0.025 3 x 3H9 0 long groove depth 2.5

( A , B , C ) –0.004 ø5g6 –0.012 0 ø12h9 –0.043 4 x M4 x 0.7 depth 8 ø34

0 ø42h9 –0.062

Top ported: MSUA3-SE

 36 A port 10 B port

2 x M3 x 0.5 11

148 Rotary Table: High Precision Type Vane Type MSUA Series

These drawings indicate the condition when the B port is pressurized.

With auto switch: MDSUA3-S

CRB2

∗ 1) 24: When using D-90/90A/S99/S99V/S9P/S9PV/T99/T99V CRB1 30: When using D-97/93A ∗ 2) 60°: When using D-90/90A/97/93A MSU 69°: When using D-S99/S99V/S9P/S9PV/T99/T99V CRJ CRA1 CRQ2 MSQ MSZ

15.5 CRQ2X MSQX MRQ 45 Angle adjustment bolt

2 x M5 x 0.8 (Port location: Side ported type only)

A port B port ∗ 1 29 24

∗2 °) 60° (69 ø18.5 ø34

D-97/93A

15 D- ∗ 1 30

149 MSUA Series

Dimensions These drawings indicate the condition when the B port is pressurized.

MSUA7 MSUA7-S/SE

Top ported: MSUA7-SE 8 x M4 x 0.7 depth 8 C A port B port ø67 13 2 x M5 x 0.8 14

B 33  41  50

ø37

4 x M5 x 0.8 depth 7 22.5°

+0.025 0 A 3H9 Long groove depth 5 (Positioning pin hole) 22.5°

0 ø47h9 –0.062

+0.052 ø26H9 0 +0.030 36 3 x 4H9 0 depth 4 4 3 ( A , B , C ) 2 x 5.5 through 4.5

0 19 ø48h9 –0.062 10.5 36 76 22.3 13 10.5

11 44

2 x 5.5 through Angle adjustment bolt 58.5 6 Adjustment: Max.10.2

2 x M5 x 0.8 3 10 7 1.5

3 x 4H9 +0.030 long groove depth 3 0 A port 0.5 B port ( A , B , C ) 4 x M5 x 0.8 depth 10 –0.004 ø6g6 –0.012 0 ø14h9 –0.043

ø42

0 ø48h9 –0.062  41

150 Rotary Table: High Precision Type Vane Type MSUA Series

These drawings indicate the condition when the B port is pressurized.

With auto switch: MDSUA7-S

CRB2 CRB1 MSU CRJ CRA1 CRQ2

19 MSQ MSZ CRQ2X MSQX Angle adjustment bolt

58.5 MRQ

2 x M5 x 0.8 (Port location: Side ported type only) 25.5 (34.5: Connector type) 25.5 (34.5: 30 30 A port B port

ø25

ø42

65° Connector Type 8

4 Connector type) 20.5 (26.5: 34.5

Connector type D- 26.5

151 MSUA Series

Dimensions These drawings indicate the condition when the B port is pressurized.

MSUA20 MSUA20-S/SE

8 x M5 x 0.8 depth 10 C Top ported: MSUA20-SE ø78 A port B port 14

2 x M5 x 0.8

B 38  48  59

ø42 15.5

4 x M6 x 1 depth 7 22.5°

+0.025 0 3H9 A Long groove depth 5 (Positioning pin hole) 22.5° 0 ø52h9 –0.074

+0.030 43 ø30H9 +0.052 3 x 4H9 0 depth 4 0 5 ( A , B , C ) 4 2 x 6.6 through

0 5 ø53.5h9 –0.074 21.5 10.5 7

23 43 16 10.5 6

13 46 Angle adjustment bolt 2 x 6.6 through 72

Adjustment: Max. 10.3 6

2 x M5 x 0.8 4 2 8 13 A port +0.030 1 B port 3 x 4H9 0 long groove depth 3 –0.005 ( A , B , C ) ø8g6 –0.014 0 ø16h9 –0.043 4 x M6 x 1 depth 11 ø50

0 ø53.5h9 –0.074  48

152 Rotary Table: High Precision Type Vane Type MSUA Series

These drawings indicate the condition when the B port is pressurized.

With auto switch: MDSUA20-S

CRB2 CRB1 MSU CRJ CRA1 CRQ2

21.5 MSQ MSZ CRQ2X Angle adjustment bolt MSQX

72 MRQ

2 x M5 x 0.8 (Port location: Side ported type only) 25.5 (34.5: Connector type) 25.5 (34.5:

A port B port 31 31

ø25

ø50

65° Connector Type 8

4 20.5 (26.5: Connector type) 20.5 (26.5: 34.5

Connector type

26.5 D-

153 Rotary Table: Basic Type Vane Type MSUB Series Size: 1, 3, 7, 20

How to Order

Bearing type Connection port location B Basic type Nil Side ported E Axial ported Free mount type Available with side ported only, when equipped with auto switch unit. Without auto switch MSUB 20 90 S

With auto switch M D SUB 20 90 S LT79 Number of auto switches With auto switch S 1 pc. ∗ (Built-in magnet) Nil 2 pcs. ∗∗ ∗ S (1 auto switch) is shipped with a Nominal size (Torque) right-hand auto switch. ∗∗ Nil (2 auto switches) is shipped with 1 MSUB 1 a right-hand and a left-hand switch. Rotating angle 3 MSUB 3 Electrical entry/Lead wire length 7 MSUB 7 Application Symbol Rotating angle Nil Grommet/Lead wire: 0.5 m 20 MSUB20 Single 90 90° L Grommet/Lead wire: 3 m vane 180 180° Z Grommet/Lead wire: 5 m Double C Connector/Lead wire: 0.5 m vane 90 90° CL Connector/Lead wire: 3 m Rotation adjustment range CN Connector/Without lead wire Single vane: Both ends ±5° each ∗ Available only with R73, R80 and T79 type connectors. Double vane: Both ends 2.5 each ± ° ∗∗ Lead wire with connector part nos. D-LC05: Lead wire 0.5 m Vane type D-LC30: Lead wire 3 m S Single vane D-LC50: Lead wire 5 m D Double vane Auto switch Nil Without auto switch (built-in magnet) ∗Refer to the table below for the applicable auto switch model. Applicable Auto Switches/Refer to pages 797 to 850 for further information on auto switches. Load voltage Lead wire length (m) ∗ Special Electrical Auto switch model Lead wire Pre-wired Applicable Type Wiring 0.5 3 5 None Applicable load function entry type connector model (Output) DC AC (Nil) (L) (Z) (N)

Indicator light Perpendicular In-line Solid 3-wire (NPN) S99V S99 5V,12V Heavy-duty IC circuit state 3-wire (PNP) S9PV S9P auto Yes cord MDSUB1 12V T99V T99 switch Relay, MDSUB3 Grommet 24 V 5 V, 12 V 5 V, 12 V, 24 V 90 Parallel cord IC circuit No PLC Reed 2-wire 5 V, 12 V, 5 V, 12 V, 90A Heavy-duty cord auto 100 V 24 V, 100 V switch 97 Parallel cord

Yes 100 V 93A Heavy-duty cord 3-wire (NPN) S79 Solid 5V,12V IC circuit state Grommet 3-wire (PNP) S7P auto T79 switch 12V MDSUB7 Connector Yes T79C Heavy-duty Relay, 24 V MDSUB20 Grommet 100 V R73 cord PLC 2-wire Reed Connector R73C auto switch Grommet 48V,100V 100 V R80 IC circuit Connector No 24 V or less R80C ∗ Lead wire length symbols: 0.5 m ······ Nil (Example) R73C ∗ Auto switches marked with “ ” are Order example: MSUB20 single vane type 3 m ······ L (Example) R73CL made-to-order specifications. (connection port side location selected) 5 m ······ Z (Example) R73CZ 1. Standard type (Without auto switches), Rotation 90°, None ······ N (Example) R73CN ∗ Refer to pages 837 to 838 for side port location MSUB20-90S detailed solid state auto switches ∗ Auto switches are shipped together (but not assembled). 2. With auto switch unit (Without auto switches), Rotation with pre-wired connectors. 180°, Side port location MDSUB20-180S 3. With auto switch unit + Auto switch R73, Rotation 180°, Side port location MDSUB20-180S-R73

154 Rotary Table: Basic Type Vane Type MSUB Series

Specifications

Model ∗3 MSUB1 MSUB3 MSUB7 MSUB20 Single Double Single Double Single Double Single Double Vane type vane vane vane vane vane vane vane vane Rotating angle ∗1 90° ± 10° 180° ± 10° 90° ± 5° 90° ± 10° 180° ± 10° 90° ± 5° 90° ± 10° 180° ± 10° 90° ± 5° 90° ± 10° 180° ± 10° 90° ± 5° Fluid Air (Non-lube) Proof pressure (MPa) 1.05 1.5 CRB2 Ambient and fluid temperature 5 to 60°C Operating pressure range (MPa) 0.2 to 0.7 0.15 to 0.7 0.15 to 1.0 CRB1 Rotation time adjustment range (s/90°) 0.07 to 0.3 (0.5 MPa) Allowable radial load 20 N 40 N 50 N 60 N MSU Allowable 15 N 30 N 60 N 80 N Shaft load thrust load ∗2 10 N 15 N 30 N 40 N CRJ Allowable moment 0.3 N·m 0.7 N·m 0.9 N·m 2.9 N·m Bearing Bearing CRA1 Port location Side ported or Top ported Side ported M3 x 0.5 M5 x 0.8 CRQ2 Port size Moisture Top ported M3 x 0.5 M5 x 0.8 MSQ Control Tube ∗1 Single vane 90° can be adjusted to 90° ± ∗3 Correspondence to equivalent current free- IDK Series 10° (both ends of rotation ± 5° each) mount types Single vane 180° can be adjusted to 180° ± Rotary table Free-mount rotary actuator MSZ When operating an actuator with a small diameter 10° (both ends of rotation ± 5° each) MSUB 1 CRBU2W10 and a short stroke at a high frequency, the dew Double vane 90° type can be adjusted to 90° MSUB 3 CRBU2W15 CRQ2X condensation (water droplet) may occur inside the ± 5° (both ends of rotation ± 2.5° each) MSUB 7 CRBU2W20 MSQX piping depending on the conditions. • Rotation angles other than 90° and 180° MSUB20 CRBU2W30 Simply connecting the moisture control tube to the (single vane) are available by special order. MRQ actuator will prevent dew condensation from oc- ∗2 The allowable thrust load is directional. Refer to the allowable load table below for Symbol curring. For details, refer to the IDK series in the details. Best Pneumatics No.6. Note) Refer to page 35 for allowable kinetic energy.

Table Rotation Range Weight

Angle adjustment is possible as shown in the drawings below using (g) adjustment bolts (A) and (B). Basic weight Rotation Note) Size angle Auto switch unit Adjustment range of Single vane Double vane Adjustment range of adjustment bolt (B) 90° 145 150 adjustment bolt (A) 1 15 (S): 10°(± 5°) 180° 140 (S): 10°(± 5°) (D): 5°(± 2.5°) (D): 5 ( 2.5 ) 90° 230 240 ° ± ° 3 20 180 225 90° ° 90° 360 375 7 28 180° 355 90° 510 580 20 38 22.5 180° 505 Note) Values above do not include auto switch weight. Positioning pin hole

Adjustment bolt (A) Adjustment bolt (B) Allowable Load Do not permit the load and moment applied to the table to exceed the For 90° rotation allowable values shown in the table below. (Operation above the Single vane (S): 80° to 100° adjustable allowable values can cause adverse effects on service life, such as play in Double vane (D): 85° to 95° adjustable the table and loss of accuracy.)

180° A B Adjustment range of Adjustment range of adjustment bolt (A) adjustment bolt (B) D-

10°(± 5°) 10°(± 5°) 22.5°

Size Allowable radial load (N) Allowable thrust load (N) Allowable moment (N·m) Positioning pin hole 1 20 A 15 B 10 0.3 Adjustment bolt (A) Adjustment bolt (B) 3 40 30 15 0.7

For 180° rotation 7 50 60 30 0.9 Single vane (S): 170° to 190° adjustable 20 60 80 40 2.9 ∗ The double vane type is not available with 180° rotation. 155 MSUB Series

Construction

Internal Construction of Rotary Table

For 180° For 90° Single vane Double vane Figure in the Figure with Figure in the middle Figure with middle position pressure to A port position for 180° pressure to A port

Single vane: Size 1, 3, 7, 20 Double vane: Size 1 Double vane: Size 3, 7, 20

Component Parts No. Description Material Note 1 Body (A) Aluminum alloy Anodized 2 Body (B) Aluminum alloy Anodized Stainless steel (MSUB20: Carbon steel) Single vane 3 Vane shaft Carbon steel Double vane 4 Stopper Resin Single vane 5 Stopper Stainless steel Double vane 6 Stopper seal NBR 7 Table Aluminum alloy Anodized, Serigraph 8 Stopper lever (D) Carbon steel Heat treated, Electroless nickel plated 9 Stopper lever (S) Carbon steel Heat treated, Electroless nickel plated 10 Lever retainer Carbon steel Zync Chromated 11 Ring collar Carbon steel Zync Chromated 12 Bearing High carbon chrome bearing steel 13 Bearing High carbon chrome bearing steel 14 Back-up ring Stainless steel 15 Scraper NBR 16 O-ring NBR 17 Adjustment bolt Carbon steel Heat treated 18 Hexagon nut Carbon steel 19 Hexagon socket head cap screw 20 Hexagon socket head cap screw 21 Hexagon socket head cap screw 22 Button bolt 23 Rubber cap NBR 24 Hexagon socket head set screw SE type only 25 Cover Aluminum alloy 26 Plate Resin 27 Gasket NBR 28 O-ring NBR 29 O-ring NBR 30 Label ∗ The plug is used only when the connection port is type SE. ∗ Individual part cannot be shipped. 156 Rotary Table: Basic Type Vane Type MSUB Series

Construction

Internal construction with auto switch Units are common for both single and double vane.

MDSUB1, 3 MDSUB7, 20

CRB2 CRB1 MSU CRJ Auto switch unit CRA1 Auto switches are not included. CRQ2 MDSUB 1 double vane type has a different figure. MSQ ∗ Refer to page 56 for the component parts. MSZ CRQ2X MSQX ∗ The auto switch unit can be retrofitted on a rotary actuator. Auto switches should be ordered separately since they are not included. MRQ Model Auto switch unit part no. M(D)SUB 1 P211070-1 M(D)SUB 3 P211090-1 M(D)SUB 7 P211060-1 M(D)SUB20 P211080-1

Auto switch block unit MDSUB1/3 MDSUB7/20 For solid state auto Combination of reed and For reed auto switch switch solid state auto switches Right-handed Left-handed Combination left & right-handed Combination left & right-handed

D-

157 MSUB Series

Dimensions These drawings indicate the condition when the B port is pressurized.

MSUB1 (Single vane)

MSUB1-S/SE

4 x M3 x 0.5 depth 5

2 x 4.5 through

2 x M4 x 0.7 depth 8

Long groove depth 5 (Positioning pin hole)

+0.025 2 x 4.5 through 3 x 3H9 0 depth 5

Adjustment bolt ∗

2 x 4.5 through Adjustment: A port Max. 5.75 B port 2 x M3 x 0.5

2 x M4 x 0.7 depth 8

Top ported: MSUB1-SE A port B port

2 x M3 x 0.5

∗ If the adjustment bolt is removed, rotation will be approximately 270° for the single vane type and 100° for the double vane type. Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values.

158 Rotary Table: Basic Type Vane Type MSUB Series

These drawings indicate the condition when the B port is pressurized.

With auto switch: MDSUB1-S ∗1) 24: When using D-90/90A/S99(V)/T99(V)/S9P(V) 30: When using D-97/93A ∗2) 60°: When using D-90/90A/97/93A 69°: When using D-S99(V)/T99(V)/S9P(V) CRB2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MSZ CRQ2X MSQX MRQ

Adjustment bolt ∗

MSU_018.eps A port B port

∗ 1 2 x M3 x 0.5

24 (Port position: Side port type only)

∗2 60° (69°)

D-97/93A ∗ 1 30

D-

159 MSUB Series

Dimensions These drawings indicate the condition when the B port is pressurized.

MSUB1 (Double vane)

MSUB1-D

4 x M3 x 0.5 depth 5 2 x 4.5 through

2 x M4 x 0.7 depth 8

Long groove depth 5 (Positioning pin hole)

+0.025 3 x 3H9 0 depth 5 2 x 4.5 through ( A , B , C )

Adjustment bolt ∗

2 x 4.5 through A port B port Adjustment: Max. 5.75

2 x M3 x 0.5

2 x M4 x 0.7 depth 8

Top ported: MSUB1-DE

A port B port 2 x M3 x 0.5

160 Rotary Table: Basic Type Vane Type MSUB Series

These drawings indicate the condition when the B port is pressurized.

With auto switch: MDSUB1-D ∗1) 24: When using D-90/90A/S99(V)/T99(V)/S9P(V) 30: When using D-97/93A ∗2) 60°: When using D-90/90A/97/93A 69°: When using D-S99(V)/T99(V)/S9P(V) CRB2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MSZ CRQ2X MSQX

Adjustment bolt ∗ MRQ

A port B port

2 x M3 x 0.5 (Port location: Side ported type only) ∗ 1 24

∗2 60° (69°) D-97/93A ∗ 1 30

D-

161 MSUB Series

Dimensions These drawings indicate the condition when the B port is pressurized.

MSUB3 (Single vane/Double vane)

MSUB3-S/D Top ported: MSUB3-SE/DE

A port B port 4 x M4 x 0.7 depth 7 2 x M3 x 0.5 2 x 4.5 through

(Single vane)

2 x M4 x 0.7 depth 8

Long groove depth 5 (Positioning pin hole)

+0.025 2 x 4.5 through 3 x 3H9 0 depth 5 ( A ,, B C )

Adjustment bolt ∗

2 x 4.5 through A port Adjustment: Max. 6.25

B port 2 x M5 x 0.8

2 x M4 x 0.7 depth 8 Chamfer Chamfer

(Single vane) (Double vane)

The outside drawings show the single vane type, but only the ∗ If the adjustment bolt is removed, rotation will be position of the chamfered sections shown in the above drawings approximately 270° for the single vane type and 100° for differs from single and double vane. the double vane type. Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 162 Rotary Table: Basic Type Vane Type MSUB Series

These drawings indicate the condition when the B port is pressurized.

With auto switch: MDSUB3 ∗1) 24: When using D-90/90A/S99(V)/T99(V)/S9P(V) 30: When using D-97/93A ∗2) 60°: When using D-90/90A/97/93A 69°: When using D-S99(V)/T99(V)/S9P(V) CRB2

∗ If the adjustment bolt is removed, rotation will be CRB1 approximately 270° for the single vane type and 100° for the double vane type. Since this will make it impossible to MSU satisfy the specifications, operate with adjustment within the range of maximum values. CRJ CRA1 CRQ2 MSQ MSZ CRQ2X MSQX MRQ

Adjustment bolt ∗

A port B port

∗ 1 2 x M5 x 0.8 24 (Port location: Side ported type only)

∗2 60° (69°) D-97/93A

∗ 1 D- 30

163 MSUB Series

Dimensions These drawings indicate the condition when the B port is pressurized.

MSUB7 (Single vane/Double vane)

MSUB7-S/D Top ported: MSUB7-SE A port B port 4 x M4 x 0.7 depth 7 2 x 5.5 through 2 x M5 x 0.8

Single vane

2 x M5 x 0.8 depth 10

Long groove depth 5 (Positioning pin hole)

2 x 5.5 through +0.030 3 x 4H9 0 depth 6 ( A ,, B C )

Adjustment bolt ∗

2 x 5.5 through Adjustment: Max. 8.25 A port B port

2 x M5 x 0.8

2 x M5 x 0.8 depth 10 Chamfer Chamfer

(Single vane) (Double vane) The outside drawings show the single vane type, but only the ∗ If the adjustment bolt is removed, rotation will be position of the chamfered sections shown in the above drawings approximately 270° for the single vane type and 100° for differs from single and double vane. the double vane type. Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values.

164 Rotary Table: Basic Type Vane Type MSUB Series

These drawings indicate the condition when the B port is pressurized.

With auto switch: MDSUB7 ∗1) 25.5: Grommet type 34.5: Connector type ∗2) 20.5: Grommet type 26.5: Connector type CRB2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MSZ CRQ2X MSQX

Adjustment bolt ∗ MRQ

A port B port

2 x M5 x 0.8 (Port location: Side ported type only) ∗ 1 25.5 ∗ 2 Connector Type 20.5 ∗ 1 34.5

D- Connector

∗ If the adjustment bolt is removed, rotation will be approximately 270° for the single vane type and 100° for ∗ 2 the double vane type. Since this will make it impossible to satisfy the specifications, operate with adjustment within 26.5 the range of maximum values.

165 MSUB Series

Dimensions These drawings indicate the condition when the B port is pressurized. MSUB20 (Single vane/Double vane)

MSUB20-S/D

Top ported: MSUB20-SE 4 x M5 x 0.8 depth 8 A port B port 2 x 6.6 through 2 x M5 x 0.8

(Single vane) 2 x M6 x 1 Depth 12

Long groove depth 5 (Positioning pin hole)

2 x 6.6 through +0.030 3 x 4H9 0 depth 6 ( A ,, B C )

Adjustment bolt ∗

2 x 6.6 through A port B port

Adjustment: Max. 8.75

2 x M5 x 0.8

2 x M6 x 1 depth 12 Chamfer Chamfer

(Single vane) (Double vane) ∗ If the adjustment bolt is removed, rotation will be approximately 270° for the single vane type and 100° for The outside drawings show the single vane type, but only the the double vane type. Since this will make it impossible to position of the chamfered sections shown in the above drawings satisfy the specifications, operate with adjustment within differs from single and double vane. the range of maximum values.

166 Rotary Table: Basic Type Vane Type MSUB Series

These drawings indicate the condition when the B port is pressurized.

With auto switch: MDSUB20 ∗1) 25.5: Grommet type 34.5: Connector type ∗2) 20.5: Grommet type 26.5: Connector type CRB2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MSZ CRQ2X MSQX MRQ Adjustment bolt ∗

A port B port

2 x M5 x 0.8 (Port location: Side ported type only) ∗ 1

25.5 ∗ 2 Connector Type 20.5 ∗ 1

34.5 D- Connector

∗ If the adjustment bolt is removed, rotation will be

approximately 270 for the single vane type and 100 for ∗ 2

° ° the double vane type. Since this will make it impossible to

satisfy the specifications, operate with adjustment within 26.5 the range of maximum values.

167 MDSU Series Auto Switch Mounting

Table Positioning Pin Hole Rotation Range and Auto Switch Mounting Position

MSU1/3 Single vane type Double vane type (MSUB only) Auto Switch for END 1 Auto Switch for END 2 Auto Switch for END 1

Auto Switch Auto Switch for END 1 for END 2 Auto Switch for END 2 MSU7/20 Single vane type Double vane type (MSUB only) Auto Switch for END 1 Auto Switch Auto Switch for END 2 for END 1

Auto Switch Auto Switch for END 1 for END 2 Auto Switch for END 2

• In drawings that show the rotation range, the arrows on the solid line 90° (180°) Auto Switch Operating Angle and indicate the rotation range of the positioning pin holes on the table surface. Hysteresis Angle When the pin hole is at END1, the END1 auto switch operates, and when the pin hole is at END2, the END2 auto switch operates. Model Operating angle Hysteresis angle • The arrows on the broken line indicate the rotation range of the internal magnet. MDSU1, 3 110° The rotation range of each auto switch can be reduced by moving the END1 10° MDSU7, 20 90° auto switch clockwise and the END2 auto switch counterclockwise. Note) Since the above values are only provided as a guideline, they are not guaranteed. In the Table actual setting, adjust them after confirming B port Auto switch the auto switch performance. Refer to page 102 for operating angle of auto switch and angle of hysteresis and the procedure for moving the auto switch detection position.

A port Positioning pin hole

168 Auto Switch Mounting MDSU Series

MSU1·3Auto Switch Mounting External view and descriptions of auto switch unit The following shows the external view and typical descriptions of the auto switch. Cover (B) CRB2 Cross recessed round head screw (1) (Right-hand and left-hand) CRB1

Cross recessed round head screw (2) Cover (A) MSU (Right-hand and left-hand) CRJ CRA1

Switch block (B) Switch block (A) CRQ2 (Left-hand) (Right-hand) MSQ MSZ CRQ2X Solid state auto switch Reed auto switch MSQX MRQ 3-wire······ D-S99(V)/S9P(V) D-97/93A(With indicator light) 2-wire······ D-T99(V) D-90/90A(Without indicator light) ∗ For details about shape and specifications of the auto switch, refer to ∗ For details about shape and specifications of the auto switch, refer to SMC’s catalog. SMC’s catalog. qSwitch block detaching Holding block (A) qPreparations Remove the cross recessed Loosen the cross recessed round round head screw (1) to de- head screw (2). (About 2 to 3 turns) tach the switch block. ∗ This screw has been secured temporarily at shipment.

D-93A wSolid state auto switch wReed auto switch mounting mounting D-T99 Insert the reed auto switch until it Secure the solid state auto is in contact with the hole in the switch with the cross recessed switch block. round head screw (1) and ∗ Insert the D-97/93A in the di- holding block (A). rection shown in the figure on Proper tightening torque: the right. 0.4 to 0.6(N·m) ∗ Since the D-90/90A is a round type, it has no directionality. ∗ Since the holding block (A) moves inside the groove, move it to the mounting position beforehand. ∗ Use the auto switch after the operating position has been eReed auto switch securing adjusted with the cross re- Tighten the cross recessed round cessed round head screw head screw (2) to secure the reed D- (1). For details about how to auto switch. adjust the operating position, Proper tightening torque: refer to SMC’s catalog. 0.4 to 0.6(N·m) ∗ Use the auto switch after the operating position has been adjusted with the cross recessed round head screw (1). For details about how to adjust the operating position, refer to SMC’s catalog.

169 MSU Series Specific Product Precautions Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 4 to 14 for Rotary Actuator and Auto Switch Precautions.

Selection Maintenance Warning Caution 1. Ensure the load energy within the product’s allowable energy value. In case a rotary unit and table unit are required for Operation with a load kinetic energy exceeding the allowable maintenance, order with the unit part numbers shown value can cause human injury and/or damage to equipment or below. machinery. (Refer to model section procedures in this catalog.) Rotary unit Model Unit part no. MSUA 1-S P402070-2A Caution MSUA 1-SE P402070-2B 1. When there are load fluctuations, allow a sufficient MSUA 3-S P402090-2A margin in the actuator torque. MSUA 3-SE P402090-2B In case of horizontal mounting (operation with MSUA 7-S P402060-2A product facing sideways), malfunction may occur MSUA 7-SE P402060-2B due to load fluctuations. MSUA20-S P402080-2A MSUA20-SE P402080-2B Mounting

Caution Table unit Model Unit part no. 1. Adjust the rotation angle within the prescribed MSUA 1- 90 P402070-3A ranges. MSUA 1-180 P402070-3B Single vane type: (90°±10°, 180°±10°) (±5° at end of rotation) P402090-3A Double vane type: (90°±10°) (±2.5° at end of rotation) MSUA 3- 90 ∗ MSUB series only. MSUA 3-180 P402090-3B Adjustment outside the prescribed ranges may cause MSUA 7- 90 P402060-3A malfunction of the product or failure of switches to operate. MSUA 7-180 P402060-3B 2. Adjust the rotation time within the prescribed values MSUA20- 90 P402080-3A using a speed controller, etc. (0.07 to 0.3 s/90°) MSUA20-180 P402080-3B Adjustment to a speed slower than 0.3 s/90° can cause Note 1) Note that the rotation angle should not be changed even though sticking and slipping or stopping of operation. the rotary unit has been changed. For maintenance, order units with a part number suitable for the model being used. Note 2) Due to the integral construction of the MSUB series, the rotary and table units cannot be ordered separately.

170