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Atomic layer deposition

  • Atomic Layer Deposition of High-K Insulators on Epitaxial Graphene: a Review

    Atomic Layer Deposition of High-K Insulators on Epitaxial Graphene: a Review

  • Integrated Sustainability Analysis of Atomic Layer Deposition for Microelectronics Manufacturing

    Integrated Sustainability Analysis of Atomic Layer Deposition for Microelectronics Manufacturing

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    Ald)

  • High-Temperature Atomic Layer Deposition of Gan on 1D Nanostructures

    High-Temperature Atomic Layer Deposition of Gan on 1D Nanostructures

  • Atomic Layer Deposition on Phase-Shift Lithography Generated Photoresist Patterns ARTICLE for 1D Nanochannel Fabrication

    Atomic Layer Deposition on Phase-Shift Lithography Generated Photoresist Patterns ARTICLE for 1D Nanochannel Fabrication

  • Atomic Layer Deposition (ALD): from Precursors to Thin Film Structures

    Atomic Layer Deposition (ALD): from Precursors to Thin Film Structures

  • Investigation of Gate Dielectric Materials and Dielectric/Silicon Interfaces for Metal Oxide Semiconductor Devices

    Investigation of Gate Dielectric Materials and Dielectric/Silicon Interfaces for Metal Oxide Semiconductor Devices

  • Atomic Layer Deposition Applications in Nanotechnology Alexandra Burke Taylor University

    Atomic Layer Deposition Applications in Nanotechnology Alexandra Burke Taylor University

  • Atomic Layer Deposition of Advanced Gate Oxides for Scaled MOSFET

    Atomic Layer Deposition of Advanced Gate Oxides for Scaled MOSFET

  • Ozone As the Oxidizing Precursor in Atomic Layer Deposition

    Ozone As the Oxidizing Precursor in Atomic Layer Deposition

  • Development of Nanostructures by Atomic and Molecular Layer Deposition

    Development of Nanostructures by Atomic and Molecular Layer Deposition

  • Atomic Layer Deposition of Aluminum (111) Thin Film by Dimethylethylaminealane

    Atomic Layer Deposition of Aluminum (111) Thin Film by Dimethylethylaminealane

  • Planar Gaas Nanowire Tri-Gate Mosfets by Vaporâ

    Planar Gaas Nanowire Tri-Gate Mosfets by Vaporâ

  • Ingaas Finfets with Sub-5 Nm Fin-Width Featuring in Situ ALE-ALD

    Ingaas Finfets with Sub-5 Nm Fin-Width Featuring in Situ ALE-ALD

  • Atomic Layer Deposition of Hafnium Dioxide on Sulfur- Passivated Silicon-Germanium Surfaces

    Atomic Layer Deposition of Hafnium Dioxide on Sulfur- Passivated Silicon-Germanium Surfaces

  • Atomic Layer Deposition for Semiconductors Cheol Seong Hwang Editor

    Atomic Layer Deposition for Semiconductors Cheol Seong Hwang Editor

  • Applications of Vapor Deposition in Microelectronics and Dye-Sensitized Solar Cells

    Applications of Vapor Deposition in Microelectronics and Dye-Sensitized Solar Cells

  • Atomic Layer Deposition of Metal, Metal Oxide, and Metal Carbide Thin Films

    Atomic Layer Deposition of Metal, Metal Oxide, and Metal Carbide Thin Films

Top View
  • Hafnium Oxide-Based Dielectrics by Atomic Layer Deposition
  • The Integration of High-K Dielectric on Two-Dimensional Crystals By
  • Plasma-Enhanced Atomic Layer Deposition of Boron Carbide For
  • Atomic Layer Deposition Prepared Nanostructured Materials for Various Catalytic Reactions
  • Silicon Diffusion Control in Atomic-Layer-Deposited Al2o3
  • Coating Strategies for Atomic Layer Deposition Films [5]
  • Chemical Vapor Deposited Monolayer Mos2 Top-Gate MOSFET with Atomic-Layer-Deposited Zro2 As Gate Dielectric
  • Atomic Layer Deposition of Inorganic Thin Films on 3D Polymer Nanonetworks
  • Atomic Layer Deposition of Hafnium and Zirconium Oxides Using Metal Amide Precursors
  • Emerging Technologies and Moore's
  • Atomic Layer Deposition for Nanoscale Devices
  • Precursors for Atomic Layer Deposition of High-K Dielectrics
  • Surface Engineering of Synthetic Nanopores by Atomic Layer Deposition and Their Applications
  • Mos2 Dual-Gate MOSFET with Atomic-Layer-Deposited Al2o3 As Top-Gate Dielectric Han Liu and Peide D
  • Atomic Layer Deposition for Continuous Roll-To-Roll Processing S.M
  • Gaas Metal–Oxide–Semiconductor Field-Effect Transistor with Nanometer
  • NANOCHIP Technology Journal
  • Challenges for Non-Ideal Atomic Layer Deposition Processes and Systems


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