SCIENTIFIC AND TECHNICAL REPORT 2016 CSEM SA Jaquet-Droz 1 CH-2002 Neuchâtel CSEM Alpnach Untere Gründlistrasse 1 CH-6055 Alpnach Dorf CSEM Landquart Bahnhofstrasse 1 CH-7302 Landquart CSEM Muttenz Tramstrasse 99 CH-4132 Muttenz CSEM Zurich Technoparkstrasse 1 CH-8005 Zurich www.csem.ch [email protected] [email protected] IMPRINT Full report title CSEM Scientific and Technical Report 2016 Editor and publisher CSEM SA [email protected] T +41 32 720 5111 Design CSEM Communications [email protected] T +41 32 720 5111 Publication Frequency yearly Media printed and electronic Website www.csem.ch/str2016 Printing Imprimerie Baillod SA, Bevaix (Switzerland) Cover page Projection of artwork by coherent illumination of designed optical nanostructures. The project creates a connection between nanotechnology and art by using designed nanostructures to project artwork in single and full color. Once the optical nanostructures have been designed and a physical master created, an infinite number of low-cost copies can be reproduced. The original artwork, from the artist Véronique Lecomte, known as Velec, is made of neon light tubes. Courtesy: VELEC www.velec.ch CSEM SA CSEM is a private, non-profit research and technology organization (RTO) and a Swiss innovation accelerator—a catalyst for the transfer of technologies and know-how from fundamental research to industry. CSEM’s extraordinary success in the field of innovation and its diffusion stems from its promotion of technology-based activities that address the next generation of trends—the future of energy, the Internet of Things revolution, the advent of wearable technologies for wellness and medical applications, or the rendering widespread of machine-to- machine (M2M) communications required by Industry 4.0. CSEM’s research strategy is built around five strategic programs: Microsystems technology—Design, integration, and packaging of devices that sense and monitor our environment and aspects of our daily lives, exploring new frontiers at the interface of nanotechnologies, materials science, and biotechnologies and delivering enhanced performance, miniaturization, and new properties. Systems engineering—An application-oriented interdisciplinary program with a special emphasis on system integration, systems engineering aggregates different components and subsystems designed to collaborate and deliver targeted functionality, taking into consideration resource limitations (in terms of processing and power consumption), reliability, production cost, maintenance, and environmental conditions. Ultra-low-power integrated systems—A strong focus on analog and mixed IC design as well as wireless communication and vision technologies, the key technologies required to build very-low-power, wirelessly interconnected, embedded smart systems or remote sensing nodes. Surface engineering—Focuses both on the novel properties of engineered surfaces and interfaces, to deliver breakthrough surface effects, and on their “up compatible” manufacturing processes, to bridge the gap to industrial applications. Photovoltaics & energy management—Development, covering the full chain from prospective PV cell and module technologies through fully integrated energy systems, where energy efficiency and management is delivered by intelligent hardware and algorithms. 1 CONTENTS Fluorescence Lifetime Imaging (FLIM) made easy 42 PREFACE 7 Cell-based Microfluidic Chip to Study Bone Healing Mechanisms 43 Microfluidic in-vitro Model of Bladder Cancer for Drug MULTIDISCIPLINARY INTEGRATED Profiling 44 PROJECTS—MIPS 9 Wearable Sensors for Ion Monitoring 45 MiniNOB−Cooperative Sensor SoC for ECG and EIT 11 Rapid and Cost-effective Detection of Tuberculosis (TB) 46 Glucose Sensors on Demand 47 Wear-a-Watt−Energy Autonomy for the Wearables 12 Controlled, Pressure-driven, Sequential Actuation of ALS−MEMS Scanner for Assisted Laser Surgery 13 Fluids for a Food Quality Monitoring System 48 GWAPO−Generic Wireless Autonomous Conformable RASECAN−Parallel AFM for Rapid Cancer Diagnosis 49 Patch with Display 14 System for Airborne Nanofibers Exposure Monitoring 50 MS-MET−Integrated Inductive Charge Detection Sensor and Analyzer for Mass Spectrometry 15 Asymmetric Color Appearance with Aluminum Plasmonic Substrates 51 ECAM−Image Sensor with Stacked a-Si:H Photodiodes 16 Four Color Filters in One using Large Area Plasmonic SMAC3P−Assembly and Functional Tests of a Flat Substrates 52 Form Factor Miniature Atomic Clock 17 Micro- and Nanostructuring of Steel Inserts for muTish−Tools to Monitor and Handle Medium Sized Aesthetics and Security in High Volume Industrial Biological Entities 18 Injection Molding 53 HybSi—High-precision Mechanisms at the Centimeter Table-top Classification and Sorting System for Small Scale based on Silicon Hybridization 19 Model Organisms 54 TeraXplore−Single Detector for Multi-color Terahertz Development of Electrochemical Flow-cell for Advanced (THz) Imaging 20 in situ X-ray Investigations 55 Slot Die Deposition of Functional Films 56 MICROSYSTEMS 21 Large Area Nanoreplication on Flexible Substrate 57 Integration of New Sol-gel Films into Miniaturized A MEMS-based Gas Chromatograph Front-end for a Optical CO2 Sensors for Air Quality Monitoring 58 Miniature Spectrometer 24 Advanced Microlenses Fabrication Techniques 59 A MEMS UV Laser Pointing Mirror for Atmosphere Monitoring 25 Ultra-thin Direct-lit LED Modules with Beam-shaping Thin-film optics 60 3D Printing for Advanced Manufacturing 26 Printed Sun Sensors for Satellites 61 Novel Microfabricated Infrared Optical Filters 27 Inkjet Printing Structural Colors based on Plasmonics 62 How Robust are MEMS for Space Applications? 28 Aerosol-jet Printing, an enabling Technology for printing − MAMOS Metal-based Additive Manufacturing on Electrodes, Interconnects, Sensors or Antennas on 2-or Silicon 29 3-D Parts 63 Low-temperature Reactive Nanofoil Die-attach Bonding for MEMS 30 Low-temperature Laser-assisted Sealing of Glass Lid PV-CENTER & ENERGY on Silicon 31 MANAGEMENT 65 − ACTION Technologies for Cochlear Implants 32 Platform for High-efficiency Silicon Heterojunction Solar ACTION−Hermetic Packages and Flexible Substrates Cells 68 for Implants 33 Back-contacted Silicon Heterojunction Solar Cells with a Improved Lifetime of Miniaturized Vapor Cells in Atomic Simplified Photolithography-free Processing 69 Clocks 34 Direct Interconnection of plated Silicon Heterojunction Nanofoil Bonding of Laser Micromachined Components 35 Solar Cells 70 Multiple Metallization Schemes enabled by Multi-wire SURFACE ENGINEERING 37 Interconnection. 71 Above 30% Efficiency Tandem Solar Cells using Silicon A Photolinker Polymer with High Density Functional Heterojunction Bottom Cell 72 Groups for more Sensitive Bioassays 39 Development of Indium-free TCOs for Silicon Online Monitoring of Water Contaminants with an Heterojunction Solar Cells 73 Optical Biosensor 40 Upscaling of Perovskite-based PV Devices within Detecting and Measuring Nanoparticles in Complex Project CHEOPS 74 Matrices: the SMART-NANO Platform 41 3 Silicon Photovoltaics for Hydrogen Production 75 ULTRA-LOW-POWER INTEGRATED Plastics Compounding Platform for Reliable and SYSTEMS 103 Dedicated Packaging Materials for PV Modules 76 Solarstratos—a Solar Airplane to the Edge of Space 77 Illumination for a Laser Profilometry System Targeting Fast Moving Objects 105 Embedded Light Management Films for All-season Energy-harvesting in Printed Photovoltaics 78 Real-time Face Detection and Recognition on the Vision-In-Package System 106 Results from Non-intrusive Load Monitoring 79 A Contactless Vision-based Technology for Heart and TRIBUTE—Automatic Building Simulation Model Respiration Rates Estimation 107 Calibration and Diagnostics 80 Compact and Flexible Tracking System for Total Knee Electrical Energy Storage Optimization based on Replacement Surgery 108 Predictive Control 81 An Integrated Circuit for Future X-ray Imaging Detectors Battery Performance Evaluation and Modelling for based on a Ge Pillars Absorption Layer 109 Stationary Applications 82 Vision-based Monitoring of Manual Assembly Set-up and Operation of a Low-voltage DC Micro-grid Processes 110 Demonstrator 83 Hyperspectral Imaging using a Commercial Light-field Towards High Efficiency Flexible Printed Tandem Solar Camera 111 Modules 84 RF Sensing of Human Physical Condition in the mm-Wave / THz Frequency Range 112 SYSTEMS 85 3D Printed Antennas for mmW / Sub-THz A Wearable Dietary Monitor using a PPG-based (100GHz−500GHz) Applications 113 Chewing Sensor 87 WiseSkin for the Restoration of Natural Sense of Touch 114 Wrist-located Optical Monitoring Device for Atrial REP—Making Self-healing Wireless Networks Efficient 115 Fibrillation Screening 88 Publish-Subscribe Communication for Swarms of Novel Ambient Light Rejection System for PPG-based Unmanned Vehicles 116 Measurement Devices 89 Autonomous Sensor Network for Smart Street Lighting 117 Cuffless Blood Pressure Monitoring: CSEM's catalog of Secure Wireless Link for Ultra-low Power Wireless applications 90 Sensor Networks 118 WELCOME—Wearable Sensors for Patients Suffering Long Range Low-power Localization 119 from Cardiopulmonary Diseases 91 IoT Objects Localization based on Time Difference of Autonomous Medical Monitoring and Diagnostics 92 Arrival Measurements 120 Light Management for Treatment of Chronic Wounds 93 Reactive Low-power Software Stack for BTLE X-ray Phase Contrast Imaging: from High Resolution to Implementation 121 High Speed 94 Indoor Localization using IR-UWB 122 VISARD—Vision Automation Robotics Designer 95