W&M ScholarWorks Dissertations, Theses, and Masters Projects Theses, Dissertations, & Master Projects 1999 Studies in microwave and RF capacitively coupled excimer lamp Joseph Divine Ametepe College of William & Mary - Arts & Sciences Follow this and additional works at: https://scholarworks.wm.edu/etd Part of the Electrical and Computer Engineering Commons Recommended Citation Ametepe, Joseph Divine, "Studies in microwave and RF capacitively coupled excimer lamp" (1999). Dissertations, Theses, and Masters Projects. Paper 1539623954. https://dx.doi.org/doi:10.21220/s2-hzya-5811 This Dissertation is brought to you for free and open access by the Theses, Dissertations, & Master Projects at W&M ScholarWorks. It has been accepted for inclusion in Dissertations, Theses, and Masters Projects by an authorized administrator of W&M ScholarWorks. For more information, please contact [email protected]. INFORMATION TO USERS This manuscript has been reproduced from the microfilm master. UMI films the text directly from the original or copy submitted. Thus, some thesis and dissertation copies are in typewriter face, while others may be from any type of computer printer. The quality of this reproduction is dependent upon the quality of the copy submitted. Broken or indistinct print, colored or poor quality illustrations and photographs, print bleedthrough, substandard margins, and improper alignment can adversely affect reproduction. In the unlikely event that the author did not send UMI a complete manuscript and there are missing pages, these will be noted. Also, if unauthorized copyright material had to be removed, a note will indicate the deletion. Oversize materials (e.g., maps, drawings, charts) are reproduced by sectioning the original, beginning at the upper left-hand comer and continuing from left to right in equal sections with small overlaps. Photographs included in the original manuscript have been reproduced xerographically in this copy. Higher quality 6* x 9” black and white photographic prints are available for any photographs or illustrations appearing in this copy for an additional charge. Contact UMI directly to order. Bell & Howell Information and Learning 300 North Zeeb Road, Ann Arbor, Ml 48106-1346 USA 800-521-0600 Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. Reproduced with with permission permission of the of copyright the copyright owner. owner.Further Further reproduction reproduction prohibited withoutprohibited permission. without permission. STUDIES IN MICROWAVE AND RF CAPACITIVELY COUPLED EXCIMER LAMP A dissertation presented to The Faculty o f the Department o f Applied Science The College o f W illiam & Mary in Virginia In Partial Fulfillment O f the Requirement for the Degree o f Doctor o f Philosophy By Joseph D. Ametepe Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. UMI Number. 9961158 UMI* UMI Microform9961158 Copyright 2000 by Bell & Howell Information and Learning Company. All rights reserved. This microform edition is protected against unauthorized copying under Title 17, United States Code. Bell & Howell Information and Learning Company 300 North Zeeb Road P.O. Box 1346 Ann Arbor, Ml 48106-1346 Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. APPROVAL SHEET This dissertation is submitted in partial fulfillm ent o f the requirements for the degree o f Doctor o f Philosophy. ^ w l X j u l s ^ j ) >J Joseph D. Ametepe Approved, July 1999 Dr. Dennis M. Manos Dr. Michael J. Kelley I I — Dr. Karl Schoenbach Old Dominion University Dr. Fred Dylla Thomas Jefferson National Acceleration Facility Dr. Brian Holloway & Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. TABLE OF CONTENTS Acknowledgements ......................................................................................... v List o f Tables ..................................................................................................... v ii List o f Figures .................................................................................................. v iii Abstract ............................................................................................................ x Chapter 1: Introduction ....................................................................................... 1 1.1. Overview and Motivation .............................................................1 1.2. Theory and formation o f excimers ................................................ 4 1.3. Different excitation techniques .................................................... 10 1.4. Advantages o f excimer lamps ....................................................... 11 1.5. Commercially available lamps ...................................................... 12 t .6. Goals o f this work ........................................................................ 16 1.7. Outline o f the thesis ................................................................... 17 Chapter 2: Plasma Fundamentals 2.1. Plasma fundamentals ..................................................................22 2.1.1. Plasma Sheath ...................................................................26 2.2. Microwave and RF breakdown o f Gases ..................................... 29 2.3. Electron loss processes ............................................................... 34 2.3.1. Diffusion ......................................................................... 34 2.3.2. Attachment .......................................................................38 2.3.3. Recombination ................................................................... 39 Chapter 3: Characterization and Modeling o f a 2.45 GHz Microwave Xe excimer lamp 3.1. Experimental Facilities .............................................................. 41 3.1.1. Lamp Cavity ........................................................ 44 3.1.2. Lamp Cooling ...................................................... 45 3.1.3. Safety Issues ........................................................ 45 3.2. Lamp Characterization .............................................................. 49 3.2.1. Intensity Calibration .............................................. 50 3.2.2. Wavelength-Calibration ........................................ 51 3.3. Discharge tube cleaning ............................................................. 53 3.4. Results and Discussion Chapter 4: Capacitively Coupled RF Driven Xe/Xe-Ar Excimer Lamp .............. 79 4.1. Introduction to 13.56 MHz RF excimer drive ............................ 79 4.2. 13.56 MHz RF Experimental Facilities ..................................... 80 4.2.1. Capacitively coupled lamp ................................... 80 4.2.2. 13.56 MHz lamp characterization .......................... 85 iii Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. 4.2.3. DOE Experiment ................................................... 85 4.3. Results and discussion ................................................................ 87 4.3.1. Xenon ....................................................................91 4.3.2. Xenon-Argon mixture ............................................ 91 4.4. Optical power output ...................................................................92 Chapter 5: A 2.45 GHz KrI Excimer Lamp ..........................................................102 5.1. KrI introduction ........................................................................... 102 5.2. KrI experimentatl facility ............................................................. 103 5.3. K rI Results and discussion ........................................................... 104 Chapter 6: Simulation o f 13.56 MHz rf Excimer Lamp ........................................ 118 6.2. Model description ........................................................................ 120 6.3. Model results and discussion ....................................................... 129 Chapter 7: Conclusion and Future Work ............................................................. 144 7.1. Conclusions ................................................................................ 144 7.2. Future works ...............................................................................146 APPENDIXES Appendix 1 ........................................................................................... 148 Appendix 2 ........................................................................................... 149 Appendix 3a ......................................................................................... 150 Appendix 3b ......................................................................................... 151 Appendix 4 ........................................................................................... 152 Appendix 5 ........................................................................................... 153 Appendix 6 ........................................................................................... 154 BIBLIOGRAPHY................................................................................................ 156 iv Reproduced with permission of the copyright owner. Further reproduction prohibited without permission. ACKNOWLEDGEMENTS Special thanks go to Professor Dennis M. Manos (my advisor and principal investigator o f this work)