Safety Data Sheet Material Name: 4MS SDS ID: 00202909 (KOREA) SECTION 1: Identification of the substance/mixture and of the company/undertaking Product Identifier Material Name 4MS Synonyms TETRAMETHYLSILANE; TETRAMETHYL SILANE; TMS; TMS (SILANE DERIVATIVE); UN 2749; C4H12Si Chemical Family silanes Product Use Semiconductors Restrictions on Use None known. Supplier Information 한국 인테그리스 주식회사 (Hanguk Entegris Co., Ltd.) 경기도 수원시 영통구 광교로 109 한국나노기술원 13층 우편번호16229 전화번호: +82-31-8065-8300 팩스: +82-31-8065-8301 켐트렉 한국내 무료전화: 003-0813-2549 켐트렉 국제: 1-703-527-3887 긴급전화 : 031-8036-9806 E-mail: [email protected] SECTION 2: Hazards identification Hazard/Risk Classification Flammable Liquids - Category 1 Hazardous to the Aquatic Environment - Chronic - Category 2 Label elements Hazard symbols Signal word Danger. Hazard/Risk Statement H224 Extremely flammable liquid and vapor. H411 Toxic to aquatic life with long lasting effects. Precautionary statements ____________________________________________________________ Page 1 of 10 Issue date: 2021-06-09 Revision 2.15 Print date: 2021-06-09 Safety Data Sheet Material Name: 4MS SDS ID: 00202909 (KOREA) Prevention P210 Keep away from heat/sparks/open flame/hot surfaces - No smoking. P233 Keep container tightly closed. P240 Ground/Bond container and receiving equipment. P241 Use explosion-proof electrical/ventilating/lighting equipment. P242 Use only non-sparking tools. P243 Take precautionary measures against static discharge. P280 Wear protective gloves and eye/face protection. P273 Avoid release to the environment. Response P370+P378 In case of fire: Use appropriate media to extinguish. P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P391 Collect spillage. Storage P403 Store in a well-ventilated place. P235 Keep cool. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations (depending on the information set out in the Waste Control Act). Other Hazards Which Do Not Result in Classification None known. SECTION 3: Composition / information on ingredients CAS Chemical name Other Names Percent 75-76-3 Tetramethylsilane TMS 100 Impurities and stabilizing additives contributing to the GHS Classification None SECTION 4: First aid measures Eye contact Flush eyes with plenty of water for at least 15 minutes. Then get immediate medical attention. Skin contact Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get medical attention, if needed. Thoroughly clean and dry contaminated clothing and shoes before reuse. Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. Get immediate medical attention. Ingestion If swallowed, get medical attention. Most Important Symptoms/Effects Symptoms: Immediate No information on significant adverse effects. Symptoms: Delayed No information on significant adverse effects. Indication of any immediate medical attention and special treatment needed ____________________________________________________________ Page 2 of 10 Issue date: 2021-06-09 Revision 2.15 Print date: 2021-06-09 Safety Data Sheet Material Name: 4MS SDS ID: 00202909 (KOREA) Treat symptomatically and supportively. SECTION 5: Firefighting measures Suitable extinguishing media regular dry chemical, carbon dioxide, water spray, regular foam. Large fires: Use water spray, fog or regular foam. Unsuitable Extinguishing Media high-pressure water streams Specific hazards arising from the chemical Severe fire hazard. Vapor/air mixtures are explosive. The vapor is heavier than air. Vapors or gases may ignite at distant ignition sources and flash back. Containers may rupture or explode if exposed to heat. Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. Fire Fighting Measures Move container from fire area if it can be done without risk. Do not scatter spilled material with high- pressure water streams. Fight fire from maximum distance or use unmanned hose holders or monitor nozzles. Cool containers with water spray until well after the fire is out. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. Stay away from the ends of tanks. Dike for later disposal. For tank, rail car or tank truck, evacuation radius: 800 meters (1/2 mile). Do not attempt to extinguish fire unless flow of material can be stopped first. Flood with fine water spray. Apply water from a protected location or from a safe distance. Avoid inhalation of material or combustion by- products. Stay upwind and keep out of low areas. Combustion oxides of carbon, oxides of silicon SECTION 6: Accidental release measures Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. Environmental precautions Avoid release to the environment. Collect spillage. Methods for Containment Avoid heat, flames, sparks and other sources of ignition. All equipment used when handling the product must be grounded. Do not touch or walk through spilled material. Stop leak if possible without personal risk. Prevent entry into waterways, sewers, basements, or confined areas. Small spills: Absorb with sand or other non-combustible material. Collect spilled material in appropriate container for disposal. Large spills: Dike for later disposal. Reduce vapors with water spray. Keep unnecessary people away, isolate hazard area and deny entry. SECTION 7: Handling and storage Precautions for safe handling Keep away from heat, sparks, open flame, and hot surfaces - No smoking. Keep container tightly closed. Ground/Bond container and receiving equipment. Use explosion-proof electrical/ventilating/lighting equipment. Use only non-sparking tools. Take precautionary measures against static discharges. Wear protective gloves and eye/face protection. Conditions for safe storage, including any incompatibilities ____________________________________________________________ Page 3 of 10 Issue date: 2021-06-09 Revision 2.15 Print date: 2021-06-09 Safety Data Sheet Material Name: 4MS SDS ID: 00202909 (KOREA) Store in a well-ventilated place. Keep cool. Store and handle in accordance with all current regulations and standards. Store under an inert atmosphere. If stored in glass, keep between 0 C and 8 C. Store in a tightly closed container. Store in a cool, dry place. Storing outside or in a detached building is recommended. Protect from physical damage. Avoid contact with water or moisture. Grounding and bonding required. Keep separated from incompatible substances. Incompatible Materials acids, bases, halogens, oxidizing materials SECTION 8: Exposure controls/personal protection Exposure Guidelines Component Exposure Limits Korea and ACGIH have not developed exposure limits for any of this product's components. ACGIH - Threshold Limit Values - Biological Exposure Indices (BEI) There are no biological limit values for any of this product's components. Appropriate engineering controls Ventilation equipment should be explosion-resistant if explosive concentrations of material are present. Provide local exhaust ventilation system. Ensure compliance with applicable exposure limits. PERSONAL PROTECTIVE EQUIPMENT Eye/face protection When contacted directly to the applicable substance or with possible exposure, ensure to wear the required protective goggle/face shield certified by the Korea Occupational Safety and Health Agency (KOSHA). Install eyewash and emergency shower facility near the work area. Skin and Body Protection When contacted directly to the applicable substance or with possible exposure, ensure to wear the required full body protective clothing for chemical types 3, 4 or better certified by the Korea Occupational Safety and Health Agency (KOSHA). Hand protection When contacted directly to the applicable substance or with possible exposure, ensure to wear chemical resistant gloves certified by the Korea Occupational Safety and Health Agency (KOSHA). Protective Materials Not applicable Respiratory Protection When contacted directly to the applicable substance or with possible exposure, ensure to wear the Gas mask for organic compounds or more higher level respirator certified by the Korea Occupational Safety and Health Agency (KOSHA). Gas mask for organic compounds or SCBA recommended during change outs and available in case of emergency. Further information KOSHA , ACGIH, AIHA WEELs, NIOSH RELs, OSHA PELs, DFG MAKs have not developed exposure limits for any of this product's components. SECTION 9: Physical and chemical properties Appearance clear liquid Physical State liquid Physical Form volatile liquid ____________________________________________________________ Page 4 of 10 Issue date: 2021-06-09 Revision 2.15 Print date: 2021-06-09 Safety Data Sheet Material Name: 4MS SDS ID: 00202909 (KOREA) Color colorless Odor odorless Odor Threshold Not available pH (weakly acidic ) Melting Point -99 °C Freezing point Not available Boiling Point 26 - 28 °C Boiling Point Range Not available Flash Point -27 °C Evaporation Rate Not available Flammability (solid, gas) Not applicable Upper Explosive Limit 37.9 % Lower Explosive Limit 1 % Vapor Pressure 589 mmHg @ 20 °C Solubility (Other) Not available Water Solubility (Insoluble in cold water, Reacts ) Vapor Density (air=1) 3 Specific Gravity (water=1) 0.63