04_000479(0380)日東光器／Ｃ裏＿エキシマ（リーフ） Optics for Excimer Laser Lithography Nitto Optical Co., Ltd. provides high-quality optical devices required for semiconductor manufacturing equipment such as excimer laser lithography, KrF and ArF, which become minute and precise with the progress of the semiconductor technology. Major Products and Measuring Instruments ZYGO 12" Interferometer WYKO NT1100 Fabry-Perot Etalon for Excimer Laser Etalon Flatness Etalon Roughness CaF2 Window Surface Flatness Surface Roughness CaF2 Prism Optics for Laser Interferometers Demands for highly accurate measurement technology are expanding these days. Our optical devices for laser interferometers are highly evaluated in the lithography field. Products: Corner Cube Prism (CCP)・Polarizing Beam Splitter (PBS) ・Quarter Wave Plate Quarter Wave Plate Light Source CCP CCP:Beam Deviation: < 2 arc seconds CCP:Transmitted Wavefront Distortion Reference Flat PBS (Fused Silica) P Polarization PBS (Fused Silica) 45゜rotated P&S Polarization S Polarization Detector PBS:Transmitted Wavefront Distortion PBS:Beam Deviation: < 2 arc seconds 1-14-18 Kudankita, Chiyoda-ku, Tokyo 102-0073, Japan TEL:+81-3-3511-8111 FAX:+81-3-3511-8110 E－MAIL:[email protected] URL:http://www.nitto-optical.co.jp/english/index.html 0606 -1- 04_000479(0380)日東光器／C表＿バーミラー（リーフ） Bar Mirror for Semiconductor and LCD Steppers Nitto Optical provides Bar Mirrors which become large, high precision and diversified in materials with demand expansion for semiconductors and LCD market. Size : 100 mm～3500 mm Flattness : μm ～λ Measuring Instrument : Mirror Flatness by ZYGO 32" (φ800) or ZYGO 12" (φ300) interferometers. (please contact us for details about size, shape and materials) LCD Stepper Application Size: 100～3500 mm. (Please contact us for details about size, shape and maretials) Major Products and Measuring Instruments Ultra Long Bar Mirror: 2500 mm Class for G7 and G8 Long Bar Mirror: 1500 mm Class for G6 Measurement of 1500 mm Class Bar Measuring Instrument: ZYGO 32" (φ800) Interferometer Semiconductor Stepper Application Size: 100～1000 mm. (Please contact us for details about size, shape and materials) Major Products and Measuring Instruments Ceramic Bar Mirror 400 mm Class SiC Ceramic Bar Mirror Measuring Instrument: ZYGO 12" Inteferometer Measurement Data: 400 mm Class 0606 -2- 04_000479(0380)日東光器／B裏＿EU（VリLー（フリー） フ ） Optics for Extreme Ultra Violet Lithography Nitto Optical advances production of optical mirrors of the EUV lithography technology, glass plates for mask and Schwarzschild optical system products using the flat processing technology that has been cultivated in 50 years. 1. Multi-layer Reflection Mirror ・Production by Magnetron Sputtering Method ・Mo/Si multi-layer 80% ＝ 70% d 6.9nm 60% 50% e c γ＝ n a 0.4 t 40% c e l f e ＝ ％ （ ） R 30% R 64 present 20% 10% （ ＞ ％） 0% Target 67 12.5 13.0 13.5 14.0 14.5 Wavelength /nm Magnetron Sputtering Machine Spectral Characteristics (reflection rate) 2. Glass for EUV Mask ・Material: Low-Expansion Glass ・Surface Roughness: < 3Å (present) Target < 1.5Å ・Flatness: < 63 nm (present) Target < 50 nm ・Paralleism:< 61.8 nm (present) Target < 50 nm ※ Reference Exhibition Flatness Surface Roughness Rate (AFM) 3. EUV Band Beam Splitter ・Wavelength Band: 13.5 nm 1) Re f e c t a n c e > 30 % 2) Tr a n s m i t t a n c e > 30 % 3) Fla tn es s < 2n m (1 5 m m □ ) ・Transmission/Reflection: >=30% Separation Ratio: 50% Spe ci fi ca ti on of Bea ms pl it te r ・Material: Si ※ Reference Exhibition Multilayer Si Waf er SiC Lay 4. Schwarzschild Optical System ・ Surface Finish: λ/10 ・ Roughness: < 0.3 nm (RMS) ・ Size: < 200 mm diameter ・ Form: SPHERICAL The above products are being developed by the joint research with Kinoshita Laboratory of University of Hyogo. 1-14-18 Kudankita, Chiyoda-ku, Tokyo 102-0073, Japan TEL:+81-3-3511-8111 FAX:+81-3-3511-8110 E－MAIL:[email protected] URL:http://www.nitto-optical.co.jp/english/index.html 0606 -3- 04_000479(0380)日東光器／B表＿フッ化（リーフ） CaF2 Monocrystal Recently, blue or blue purple system LDs and LEDs made from the GaN system compound semiconductors are sold. High energy of short wavelength light damages window materials and lowers luminous efficiency. Nitto Optical introduces window materials made from CaF2 which prevents transmission decrease due to deterioration and enable customers to produce more reliable luminous and optical elements. In addition, Nitto Optical proposes high-efficient elements which convert the ultraviolet rays that cause deterioration into the visible light (blue). 1. Ultraviolet Ray Territory Transmission Sealed Glass Materia：l CaF2 Optical Character of CaF2 Monocrystal Transmittance Rate of CaF2 Monocrystal Abbe Number: 95 97 96 Low Refractive Index Low Dispersion Chromatic aberration 95 CaF2 2.00 1.95 ) 94 1.90 % ( e 1.85 R c 93 R G n 1.80 a G B t 1.75 t d B i 92 Quartz n m 1.70 s Quarts n 91 1.65 a r 1.60 T 90 1.55 CaF 2 89 1.50 1.45 Large SiO2 Short 88 1.40 100 90 80 70 60 50 40 30 20 87 General Glass CaF2 νd 255 305 355 405 455 505 555 605 655 705 Wavelength(nm) Comparison of Transmittance Rate with Quartz CaF2 Optical Character 2. Ultraviolet Ray Cut Blue Luminosity Sealed Glass Material:Impurities Addition CaF2 Luminous Character of Impurities Addition CaF2 Monocrystal 7000 ) 6000 s t i n wavelength convertion u y 5000 r a r t i b 4000 r A Exci tation spectrum Emission spectrum ( y t i 3000 s n e t n i 2000 e c n e c 1000 s e n i m 0 u L 250 300 350 400 450 500 550 Wavelength(nm) Luminous Character of Impurities Addition CaF2 3. CaF2 Optical Device The CaF2 material has excellent character which transmits the areas from vacuum ultraviolet to infrared rays. Nitto Optical proposes optical devices for the wavelength band which is not transmitted with a normal glass. 134nm Band Transmission Window/Lens Prism usable for Ultraviolet～Infrared Bands 100 100 95 80 90 ) ) % ( % ( e e 85 c c 60 n n a t a t t i t 80 i m m s n s 40 a n 75 r a r T T 70 20 Sample thickness:2mmt :2mmt 65 0 60 130 180 230 280 330 380 130 380 630 880 1130 1380 1630 1880 2130 2380 UV Spectrophotometer Wavelength(nm) Wavelength(nm) Transmittance Rate of Ultraviolet～Infrared Ranges Transmittance Rate of 134 nm Band Width -4- 04_000479(0380)日東光器／A裏＿blu-ray（リーフ） Optics for Blu-ray Disc and HD DVD Nitto Optical has promptly started the optical part development for the optical pickup of a blue purple laser which is the record format of next generation large-volume optical disc. In addition, Nitto Optical meets customer's request for high-precision/-reliable optical coating for 3 wavelengths (780 nm, 650 nm, 405 nm) and high-power laser, from research to mass production. Design sample for 3 wavelengths 100 100 90 90 80 80 70 3wave 70 60 [%] Reflect Mirror 60 50 [%] 50 40 PDIC 40 0 ゜( 3 0゜) T s [ % ] 30 30 ゜ ゜ Reflectance 45deg Rs [%] ransmittans 0 ( 3 0 ) Tp[%] 20 T 45deg Rp[%] 20 10 10 0 0 350 450 550 650 750 850 3wave DBS 2wave DBS 370 470 570 670 [nm] [nm] Wavelength： B270 FM Wavelength：BK-7 Material 3wave 405nm Material Half Mirror 3wave PBS 785nm 660nm 10 0 100 100 90 90 90 80 80 80 45゜ Ts[%] 70 70 45゜ Tp[%] 70 60 60 60 0゜(30 ゜) Ts[%] 50 0deg Ts[%] [%] 50 [%] 50 0゜(30 ゜) Tp[%] [%] 0deg Tp[%] 40 40 40 30 30 30 20 20 20 Transmittans Transmittans 10 Transmittans 10 10 0 0 0 37 0 470 570 670 77 0 350 450 550 650 750 850 370 470 570 670 770 Wavelength [nm ] ：WavelengthS-BS[nmM] 18 Wavelength [nm ] Material ： B270 Material Material：BK-7 ZYGO-DVD400 1-14-18 Kudankita, Chiyoda-ku, Tokyo 102-0073, Japan TEL:+81-3-3511-8111 FAX:+81-3-3511-8110 E－MAIL:[email protected] URL:http://www.nitto-optical.co.jp/english/index.html 0606 -5- 04_000479(0380)日東光器／A表＿プロジェクター（リーフ） Optics for Projectors The market of front projectors is expanding for a business presentation use recently. The growth of Home Theater and Large Rear-projection Television is also expected in the TV market in addition to business and education fields. Nitto Optical provides the key parts of prisms and filters for projectors. Flat PBS X- CUBE [BDM &RDM] 100 100 90 90 80 80 70 70 ] ] % 60 [ % [ e 60 e c c n n a t a t t i t 50 i 50 m m s s n n a a r r 40 T T 40 30 30 20 20 10 0 10 400 410 420 430 440 450 460 470 480 490 500 510 520 530 540 550 560 570 580 590 600 610 620 630 640 650 660 670 680 690 700 0 Wavelength[nm] 400 420 440 460 480 500 520 540 560 580 600 620 640 660 680 700 BDM Ts[%] BDM Tp[%] RDM Ts[%] RDM Tp[%] Wavelength[nm] 0Rs 0Rp 0Ts 0Tp -3Rs -3Rp -3Ts -3Tp +3Rs +3Ts +3Tp -5Rs -5Rp -5Ts -5Tp +5Rs +5Rp +5Ts X-Cube Prism for LCD and LCOS Projector P-S Converter Optics for Cameras and Scanners Currently, compact and SLR cameras are facing digitalization. Nitto Optical has been engaged in processing pentagonal prisms for SLR cameras since its foundation. The posture to manufacturing remains unchanged, even if an analog changes into digital style.