Micro/Nano Technologies Series Editors Zheng You Department of Precision Instrument Tsinghua University Beijing, China Xiaohao Wang Department of Precision Instrument Tsinghua University Beijing, China The series consists of five volumes: Micro/Nano Fabrication Technology, Micro Electro Mechanical Systems (MEMS), Nanomaterial, Nanomedicine, and Applica- tions of Micro-/Nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas. The series is published under Springer Major Reference Works, which allow continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up- to-date information in micro-/nanotechnologies. It presents an overview of the knowledge base, as well as selected topics, and provides comprehensive and author- itative information on the field for researchers, engineers, scientists, and graduate students who are involved in different aspects of micro-/nanotechnologies. This publication will provide inspiration for innovative research and application ideas for continued growth of the field. Micro-/nanotechnologies are techniques to fabri- cate and build systems with dimensions ranging from nanometers to microns. Advances in these technologies have created many interdisciplinary research oppor- tunities and have been applied in various areas from nanomedicine to space systems. After several decades of development, a knowledge base of micro-/nanotechnologies covering all areas of research has now been created. It includes design and simula- tion, fabrication and manufacturing, packaging and assembly, device and system technologies, and application in different areas. More information about this series at http://www.springer.com/series/13903 Qing-An Huang Editor Micro Electro Mechanical Systems With 1122 Figures and 126 Tables Editor Qing-An Huang Key Laboratory of MEMS of the Ministry of Education Southeast University Nanjing, Jiangsu, China ISBN 978-981-10-5944-5 ISBN 978-981-10-5945-2 (eBook) ISBN 978-981-10-5946-9 (print and electronic bundle) https://doi.org/10.1007/978-981-10-5945-2 Library of Congress Control Number: 2018936659 # Springer Nature Singapore Pte Ltd. 2018 This work is subject to copyright. All rights are reserved by the Publisher, whether the whole or part of the material is concerned, specifically the rights of translation, reprinting, reuse of illustrations, recitation, broadcasting, reproduction on microfilms or in any other physical way, and transmission or information storage and retrieval, electronic adaptation, computer software, or by similar or dissimilar methodology now known or hereafter developed. The use of general descriptive names, registered names, trademarks, service marks, etc. in this publication does not imply, even in the absence of a specific statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. The publisher, the authors and the editors are safe to assume that the advice and information in this book are believed to be true and accurate at the date of publication. Neither the publisher nor the authors or the editors give a warranty, express or implied, with respect to the material contained herein or for any errors or omissions that may have been made. The publisher remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. Printed on acid-free paper This Springer imprint is published by Springer Nature The registered company is Springer Nature Singapore Pte Ltd. The registered company address is: 152 Beach Road, #21-01/04 Gateway East, Singapore 189721, Singapore Series Preface Micro/nano technologies are those techniques to fabricate and build systems with dimensions ranging from nanometer to micron. The advancement of these technol- ogies has been creating many interdisciplinary research opportunities and has been applied in various areas from nanomedicine to space systems. After several decades of development, a knowledge base of micro/nano technologies forms. It comes from every achievement of research and consists of design and simulation, fabrication and manufacturing, packaging and assembly, device and system technologies, and appli- cation in different areas. Main structure of the knowledge base and selected topics are shown in this series of books. This work provides a comprehensive and authoritative knowledge of the field for researchers, engineers, scientists, and graduate students who are engaged in different aspects of micro/nano technologies. The series consists of five books, which are micro/nano fabrication, MEMS, nanomaterial, nanomedicine, and applications of micro/nano technologies in IT/IoT. In the books, the latest researches of micro-nano technology are summarized; the history and roadmap of related techniques, devices, and applications are discussed. The authors invited come from China, USA, Ger- many, Great Britain, Austria, Japan, etc. Their research activities in this area are remarkable and prospective. The readership is not merely specialists in this field but also a broad range of students and researchers from other related disciplines. The Chinese Society of Micro/Nano Technology (CSMNT) has organized the Micro/Nano Technologies series in cooperation with Springer. This series would be the first systematic series of books in micro/nano technologies and provides a comprehensive and authoritative knowledge system. The series is published under Springer Major Reference, which allows continuous online update and publication. These features allow the newcomers and other content users to keep in touch with the most updated information in micro/nano technologies. It is expected that this publication will provide a new window to sparkle innovative research and applica- tion ideas for the continuous growth of the field. Department of Precision Instrument Zheng You Tsinghua University Xiaohao Wang Beijing, China December 2017 v Volume Preface The acronym for micro electro mechanical systems (MEMS) was worldwide adopted in 1989. Since then, we have witnessed an increasing maturity of the MEMS industry and a rapid introduction of new products addressing applications ranging from smartphones, automobiles, aerospace, electronics instrumentation, industrial process control, appliances, biotechnology, healthcare, office equipment, and telecommunications to Internet-of-Things. MEMS devices and microsystems are now found everywhere. In China, MEMS projects have been funded by the National Science Foundation of China (NSFC) since 1989, by the Major State Basic Research Program of China (973 Program) since 1998, and by the National High Technology Research and Development Program (863 Program) since 2000. The National Key Research and Development Program of China (the newly established national R&D program in 2016) continues to support the MEMS field. Hundreds of groups from Chinese universities/institutes have been involved in the MEMS research and development, and more than 200 MEMS companies have been set up in China until 2015. China has made great progress in the MEMS field. The aim of this volume is to introduce the research and development of MEMS in China, which has not yet been globally presented in a systematic way. Because microfluidic chips are to be collected in Vol. 4: Nanomedicine and the processing and packaging of MEMS are to be collected in Vol. 1: Micro and Nano Fabrication Technology, this volume is divided into nine main parts consisting of 40 chapters. Part 1 addresses the modeling of processing, structures, and devices in MEMS. Part 2 covers the characterization and test of materials and microstructures in MEMS. Part 3 describes physical sensors such as pressure sensors, flow sensors, wind sensors, accelerometers, gyroscopes, vacuum sensors, and electric current sensors. Part 4 comprehensively discusses chemical sensors including humidity, gas, trace energetic chemicals, and biochemical sensors. Part 5 presents micro- actuators for relays, inertial switches, microgrippers, and micropumps. Part 6 specif- ically describes RF MEMS devices including switches, microwave power sensors, reconfigurable attenuators, and acoustic devices for wireless communication. Part 7 focuses on uncooled infrared focal plane array. Part 8 is devoted to power MEMS with an emphasis on direct methanol fuel cells, piezoelectric vibration energy vii viii Volume Preface harvesters, and triboelectric nanogenerators. Part 9 provides implantable medical devices in which particular attention is paid to microelectrode arrays. This volume would not have been possible if the top academic authors had not taken some of their valuable time to do this work. And for this, I want to thank them most heartily. I would like to extend words of thanks and gratitude to the reviewers who selflessly gave time for carefully reviewing the chapters, to the Series Editors Zheng You and Xiaohao Wang for providing the vision in navigating the completion of the chapters, to the CSMNT secretary Jun Wang for her support in contacting the Series Editors and Springer Editors, and to the editorial team from Springer Nature, Li Shen, Lijuan Wang, Andrew Spencer, Stephen Yeung, Shanmuga Priya Kaliyamoorthy, and Pavithra Balakrishnan, for their patience in dealing with our unique and independent experts, and their persistence in contacting each of us in order to develop the logistics for the book publishing process. It is my pleasure to serve as an editor for organizing the MEMS volume in Micro/