Optimisation de jets photoniques pour l’augmentation de la résolution spatiale de la gravure directe par laser Andri Abdurrochman To cite this version: Andri Abdurrochman. Optimisation de jets photoniques pour l’augmentation de la résolution spatiale de la gravure directe par laser. Optics / Photonic. Université de Strasbourg, 2015. English. NNT : 2015STRAD028. tel-01330747 HAL Id: tel-01330747 https://tel.archives-ouvertes.fr/tel-01330747 Submitted on 13 Jun 2016 HAL is a multi-disciplinary open access L’archive ouverte pluridisciplinaire HAL, est archive for the deposit and dissemination of sci- destinée au dépôt et à la diffusion de documents entific research documents, whether they are pub- scientifiques de niveau recherche, publiés ou non, lished or not. 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N° d’ordre: Ecole Doctorale Mathématiques, Sciences de l’Information et de l’Ingénieur UNISTRA – INSA – ENGEES THESE Présentée pour obtenir le grade de Docteur de l’Université de Strasbourg Discipline : Electronique, Electrotechnique, Automatique Spécialité Photonique Par Andri ABDURROCHMAN Photonic jet for spatial resolution improvement in direct pulse near-IR laser micro-etching Soutenue publiquement le 15 septembre 2015 Membres du jury : Rapporteurs externe : Philippe DELAPORTE, DR CNRS, Université d’Aix-Marseille Bruno SAUVIAC, Professeur, Université Jean Monnet Examinateurs : Patrick MEYRUEIS, Professeur, Université de Strasbourg Bernard TUMBELAKA, Professeur, Université Padjadjaran, Indonésie Directeurs de thèse : Joël FONTAINE, Professeur, INSA de Strasbourg Sylvain LECLER, MCF HDR, Université de Strasbourg i TABLE OF CONTENTS TABLE OF CONTENTS ………………………………………………………………………….. ii TABLE OF FIGURES ……………………………………………………………………………… v INTRODUCTION …………………………………..…………………………………………… 0 - 1 1. Context of the research ………………..……………………………………………… 0 - 2 2. Thesis content ………………..…………………………………………..……………… 0 - 2 References ………………..…………………………………………………………………… 0 - 4 I. DIRECT LASER MICRO-ETCHING ....................................................................... 1 - 1 1. Introduction ................................................................................................................. 1 - 2 A. Microfabrication: Laser vs. other techniques .......................................................... 1 - 2 B. Existing power laser................................................................................................ 1 - 3 2. Laser-material interaction ........................................................................................... 1 - 4 A. Fundamentals of laser energy absorption by material ............................................ 1 - 4 B. Laser fluence versus melting threshold of material ................................................. 1 - 8 C. Laser fluence versus ablation threshold fluence of material .................................. 1- 10 3. Infrared lasers............................................................................................................ 1- 12 A. Neodymium-doped Yttrium Aluminum Garnet Lasers (Nd:YAG) ........................... 1- 12 B. Yttribium-doped fiber laser ..................................................................................... 1- 15 C. Nanosecond IR laser application for micro-etching ............................................... 1- 16 References ...………………………………………………………………………………………1- 17 II. PHOTONIC JET: THEORY, EXPERIMENTAL OBSERVATIONS AND APPLICATIONS ........................................................................................................ 2 - 1 1. Introduction ................................................................................................................ 2 - 2 2. Field enhancement and diffraction limit ..................................................................... 2 - 2 3. From near-field optics to photonic jet ......................................................................... 2 - 4 A. Mie theory .............................................................................................................. 2 - 6 B. Finite elements method ......................................................................................... 2 - 9 4. Experimental validation of photonic jet .. ...................................................... ……… 2 - 11 ii iii A. Photonic jet capturing and measurement ............................................................ 2 - 11 B. Photonic jet marks on sample materials .............................................................. 2 - 12 5. Other potential applications of photonic jet .............................................................. 2 - 17 A. Photonic jet microscopy ....................................................................................... 2 - 17 B. Small propagation losses waveguide .................................................................. 2 - 17 C. Photonic jet laser surgery .................................................................................... 2 - 18 D. Fluorescence enhancement ................................................................................ 2 - 18 E. Nanoparticle detector for location, sizing, counting and velocity measurement ... 2 - 18 F. Optical tweezers using photonic jets ................................................................... 2 - 19 G. Photonic jet for optical data storage .................................................................... 2 - 20 References ...................................................................................................................... 2 - 20 III. PJ’S ETCHING USING MICROSPHERES ...................................................... 3 - 1 1. Introduction ................................................................................................................ 3 - 2 2. Electromagnetic simulations of PJs ........................................................................... 3 - 2 3. Experimental setup .................................................................................................... 3 - 5 A. Laser sources and characterization ....................................................................... 3 - 6 B. Samples and microspheres ................................................................................. 3 - 10 C. Micro-localization and repeatability ..................................................................... 3 - 10 D. Laser setting scheme for PJ etching experiments ............................................... 3 - 12 E. Experimental protocol .......................................................................................... 3 - 12 4. PJ etching on silicon wafer using glass microspheres ............................................. 3 - 13 A. PJ etching on silicon wafer using 28ns Nd:YAG laser ......................................... 3 - 14 B. Comparison with the 160 ns YLIA laser ............................................................... 3 - 16 5. PJ etching on glass using glass microspheres ........................................................ 3 - 18 A. PJ etching on glass plates using the Nd:YAG laser ............................................. 3 - 18 B. PJ etching on glass plates using YLIA laser ........................................................ 3 - 19 6. Discussion on PJ using glass microspheres: experiments to simulations ............... 3 - 20 A. Laser induced damage threshold: case of silicon ................................................ 3 - 20 B. Correspondence between etchings and electric field maps ................................. 3 - 21 7. PJ etching using BaTiO3 microspheres on silicon wafer and glass plate ................. 3 - 23 8. Synthesis and limitations ......................................................................................... 3 - 24 References ...................................................................................................................... 3 - 25 IV. PJ’S ETCHING BY OPTICAL FIBER ................................................................ 4 - 1 1. Waveguide driven PJ ................................................................................................. 4 - 2 2. Electromagnetic simulations of PJ generated by a dielectric waveguide with a spheroid tip .............................................................................................................................. 4 - 3 A. Basics of optical fiber for simulation ...................................................................... 4 - 4 B. Mathematical description of the shape of optical fiber tip for simulation ................ 4 - 6 C. Physics of PJ coming out of spheroid-tipped optical fiber ...................................... 4 - 6 D. Justification of the chosen tip shape ..................................................................... 4 - 13 3. Experiment setup ...................................................................................................... 4 - 15 A. Laser beam characterization ................................................................................ 4 - 16 B. Laser injection ...................................................................................................... 4 - 16 C. PJ etching characterization ................................................................................... 4