Safety Data Sheet Material Name: Antimony pentafluoride SDS ID: 0595P Section 1 - PRODUCT AND COMPANY IDENTIFICATION Material Name Antimony pentafluoride Product Use semiconductor manufacture Restrictions on Use None known. Details of the supplier of the safety data sheet Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America) Emergency Telephone Number: CHEMTREC - U.S. - 1-800-424-9300 CHEMTREC - Intl. - 1-703-527-3887 E-mail: [email protected] Section 2 - HAZARDS IDENTIFICATION Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Corrosive to Metals - Category 1 Acute Toxicity - Oral - Category 4 Acute Toxicity - Inhalation - Vapor - Category 1 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Carcinogenicity - Category 2 Specific Target Organ Toxicity - Single Exposure - Category 1 ( respiratory system , cardiovascular system , liver , kidneys ) Hazardous to the Aquatic Environment - Acute - Category 2 Hazardous to the Aquatic Environment - Chronic - Category 2 GHS Label Elements Symbol(s) Signal Word Danger Hazard Statement(s) ____________________________________________________________ Page 1 of 10 Issue date: 2018-12-20 Revision 1.0 Print date: 2018-12-20 Safety Data Sheet Material Name: Antimony pentafluoride SDS ID: 0595P May be corrosive to metals. Fatal if inhaled. Harmful if swallowed. Causes severe skin burns and eye damage. Suspected of causing cancer. Causes damage to organs. (respiratory system , cardiovascular system , liver , kidneys ) Toxic to aquatic life with long lasting effects. Precautionary Statement(s) Prevention Keep only in original container. Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Wear respiratory protection. Do not eat, drink or smoke when using this product. Use only outdoors or in a well-ventilated area. Obtain special instructions before use. Do not handle until all safety precautions have been read and understood. Avoid release to the environment. Response Absorb spillage to prevent material damage. If exposed: Call a POISON CENTER or doctor/physician. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment is urgent, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Collect spillage. Storage Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store in corrosive resistant container with a resistant inner liner. Disposal Dispose of contents/container in accordance with local/regional/national/international regulations. Other Hazards Contact with water or moist air may form hydrogen fluoride. Section 3 - COMPOSITION / INFORMATION ON INGREDIENTS CAS Component Name Percent 7783-70-2 Antimony pentafluoride 100 Section 4 - FIRST AID MEASURES ____________________________________________________________ Page 2 of 10 Issue date: 2018-12-20 Revision 1.0 Print date: 2018-12-20 Safety Data Sheet Material Name: Antimony pentafluoride SDS ID: 0595P Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing before reuse. Destroy contaminated shoes. Eyes Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion If swallowed, do NOT induce vomiting. Rinse mouth. Get immediate medical attention. Most Important Symptoms/Effects Acute Fatal if inhaled, Harmful if swallowed, respiratory tract burns, skin burns, eye burns, mucous membrane burns, respiratory system damage, cardiovascular system damage, liver damage, kidney damage Delayed cancer Indication of any immediate medical attention and special treatment needed For inhalation, consider oxygen. Avoid gastric lavage or emesis. Section 5 - FIRE FIGHTING MEASURES Extinguishing Media Suitable Extinguishing Media carbon dioxide, dry chemical, dry sand, alcohol-resistant foam. Large fires: water spray or fog, alcohol- resistant foam. Unsuitable Extinguishing Media high-pressure water streams Special Hazards Arising from the Chemical Negligible fire hazard. May ignite or explode on contact with combustible materials. Hazardous Combustion Products Material is non-flammable, however, it may increase fire severity upon contact with combustible materials; oxides of antimony, hydrogen fluoride Advice for firefighters Negligible fire hazard. May ignite or explode on contact with combustible materials. Fire Fighting Measures Move container from fire area if it can be done without risk. Do not scatter spilled material with high- pressure water streams. Fight fire from maximum distance or use unmanned hose holders or monitor nozzles. Do not get water inside container. Cool containers with water spray until well after the fire is out. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. ALWAYS stay away from tanks engulfed in fire. Avoid inhalation of material or combustion by-products. Dike for later disposal. Special Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. ____________________________________________________________ Page 3 of 10 Issue date: 2018-12-20 Revision 1.0 Print date: 2018-12-20 Safety Data Sheet Material Name: Antimony pentafluoride SDS ID: 0595P Section 6 - ACCIDENTAL RELEASE MEASURES Personal Precautions, Protective Equipment and Emergency Procedures Wear personal protective clothing and equipment. Methods and Materials for Containment and Cleaning Up Eliminate all ignition sources if safe to do so. All equipment used when handling the product must be grounded. Stop leak if possible without personal risk. Do not touch spilled material. A vapor suppressing foam may be used to reduce vapors. Prevent entry into waterways, sewers, basements, or confined areas. Do not get water inside container. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. Absorb spill with sand or other non-combustible material. Collect spilled material in appropriate container for disposal. Keep unnecessary people away, isolate hazard area and deny entry. Environmental Precautions Avoid release to the environment. Collect spillage. Section 7 - HANDLING AND STORAGE Precautions for Safe Handling Keep only in original container. Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Wear respiratory protection. Use only outdoors or in a well-ventilated area. Do not eat, drink or smoke when using this product. Obtain special instructions before use. Do not handle until all safety precautions have been read and understood. Conditions for Safe Storage, Including any Incompatibilities Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store in corrosive resistant container with a resistant inner liner. Store in accordance with all current regulations and standards. Keep separated from incompatible substances. Incompatible Materials combustible materials, metals, reducing agents, water Section 8 - EXPOSURE CONTROLS / PERSONAL PROTECTION Component Exposure Limits Antimony pentafluoride 7783-70-2 ACGIH: 0.5 mg/m3 TWA as Sb (related to Antimony compounds) NIOSH: 0.5 mg/m3 TWA as Sb (related to Antimony compounds) 50 mg/m3 IDLH as Sb (related to Antimony compounds) OSHA (US): 0.5 mg/m3 TWA as Sb (related to Antimony compounds) Mexico: 0.5 mg/m3 TWA [VLE-PPT ] as Sb (related to Antimony compounds) ACGIH - Threshold Limit Values - Biological Exposure Indices (BEI) Antimony pentafluoride (7783-70-2) 2 mg/l Medium: urine Time: prior to shift Parameter: Fluoride (background, nonspecific ); 3 mg/l Medium: urine Time: end of shift Parameter: Fluoride (background, nonspecific ) (related to Fluorides) Engineering Controls ____________________________________________________________ Page 4 of 10 Issue date: 2018-12-20 Revision 1.0 Print date: 2018-12-20 Safety Data Sheet Material Name: Antimony pentafluoride SDS ID: 0595P Provide local exhaust or process enclosure ventilation system. Ensure compliance with applicable exposure limits. Individual Protection Measures, such as Personal Protective Equipment Eye/face protection Wear splash resistant safety goggles with a faceshield. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Skin Protection Wear appropriate chemical resistant clothing. Respiratory Protection Respirators depend on exposure level. SCBA with full face piece recommended during change outs and available