MATERIALS INORGANICS & THIN FILMS GUIDE PERIODIC TABLE OF ELEMENTS Group I A VIII A 1 1,0 2 4,0 H Atomic number 12 24,3 Atomic mass He Hydrogen II A III A IV A V A VI A VII A Helium 3 6,9 4 9,0 5 10,8 6 12,0 7 14,0 8 16,0 9 19,0 10 20,2 Symbol Li Be Mg B C N O F Ne Lithium Beryllium Name Magnesium Boron Carbon Nitrogen Oxygen Fluorine Neon 11 23,0 12 24,3 13 27,0 14 28,1 15 31,0 16 32,1 17 35,5 18 39,9 Na Mg Al Si P S Cl Ar Sodium Magnesium III B IV B V B VI B VII B VIII B I B II B Aluminum Silicon Phosphorus Sulfur Chlorine Argon 19 39,1 20 40,1 21 45,0 22 47,9 23 50,9 24 52,0 25 54,9 26 55,8 27 58,9 28 58,7 29 63,5 30 65,4 31 69,7 32 72,6 33 74,9 34 79,0 35 79,9 36 83,8 K Ca Sc Ti V Cr Mn Fe Co Ni Cu Zn Ga Ge As Se Br Kr Potassium Calcium Scandium Titanium Vanadium Chromium Manganese Iron Cobalt Nickel Copper Zinc Gallium Germanium Arsenic Selenium Bromine Krypton 37 85,5 38 87,6 39 88,9 40 91,2 41 92,9 42 96,0 43 (98) 44 101,1 45 102,9 46 106,4 47 107,9 48 112,4 49 114,8 50 118,7 51 121,8 52 127,6 53 126,9 54 131,3 Rb Sr Y Zr Nb Mo Tc Ru Rh Pd Ag Cd In Sn Sb Te I Xe Rubidium Strontium Yttrium Zirconium Niobium Molybdenum Technetium Ruthenium Rhodium Palladium Silver Cadmium Indium Tin Antimony Tellurium Iodine Xenon 55 132,9 56 137,3 57 138,9 72 178,5 73 180,9 74 183,8 75 186,2 76 190,2 77 192,2 78 195,1 79 197,0 80 200,6 81 204,4 82 207,2 83 209,0 84 (209) 85 (210) 86 (222) Cs Ba La Hf Ta W Re Os Ir Pt Au Hg Tl Pb Bi Po At Rn Cesium Barium Lanthanum Hafnium Tantalum Tungsten Rhenium Osmium Iridium Platinum Gold Mercury Thallium Lead Bismuth Polonium Astatine Radon 87 (223) 88 (226) 89 (227) Fr Ra Ac Francium Radium Actinium 58 140,1 59 140,9 60 144,2 61 (145) 62 150,4 63 152,0 64 157,2 65 158,9 66 162,5 67 164,9 68 167,3 69 168,9 70 173,0 71 175,0 Alkali metals Ce Pr Nd Pm Sm Eu Gd Tb Dy Ho Er Tm Yb Lu Alkaline earth metals Cerium Praseodymium Neodymium Promethium Samarium Europium Gadolinium Terbium Dysprosium Holmium Erbium Thulium Ytterbium Lutetium Transition metals 90 232,0 91 231,0 92 238,0 93 (237) 94 (244) 95 (243) 96 (247) 97 (247) 98 (251) 99 (252) 100 (257) 101 (258) 102 (259) 103 (262) Lanthanides Th Pa U Np Pu Am Cm Bk Cf Es Fm Md No Lr Actinides Thorium Proctatinium Uranium Neptunium Plutonium Americium Curium Berkelium Californium Einsteinium Fermium Mendelevium Nobelium Lawrencium Post-transition metals Metalloids Non metals Halogens Noble gases MATERIALS / INORGANICS & THIN FILMS GUIDE 92 Vacuum Ny Neyconium France Materials Inorganic materials RARE inorganic materials Vacuum DEPOSITION GRADE Materials UHV compatible Materials MATERIALS Technical innovation comes directly from surface modification; Surface modifications derives from vacuum deposition; Thus this new catalog is dedicated to your innovations… 2018 New Edition VACUUM Volume www.neyco.fr MATERIALS / INORGANICS & THIN FILMS GUIDE MATERIALS INORGANICS & THIN FILMS GUIDE VACUUM DEPOSITION GUIDE FUEL CELLS A G • Technical Guide • Electrolyte Powders . G 03 about Thin Films Deposition .......... A 02 • Cathode Powders ....................... G 06 • Vapor Pressures Table................. A 28 • Anode Powders ......................... G 08 • Inks....................................... G 09 POWDERS B • Cells and Substrates .................... G 11 • Particle Size Conversion Table ......... B 03 • Seal Materials........................... G 13 • High Purity Inorganic Powders......... B 04 • Nanopowders............................ B 38 CRUCIBLE LINERS H • Thermal Spray Powders ................ B 44 • Liners .................................... H 03 PELLETS • Evaporation Cones ...................... H 05 C • Crucible Liners Selection Table......... H 06 • Vacuum Deposition Grade Pellets....... C 03 SPUTTERING TARGETS EVAPORATION SOURCES D I • Manufacturing Processes............... D 03 • Evaporation Source Selection Guide .... I 02 • Sputtering Targets ...................... D 04 • Tungsten Filaments • Sputter Yield Guide .................... D 17 for Vacuum Metalizing ................... I 04 • Backing Plates........................... D 20 • Tungsten Rod Source .................... I 07 • Mounting of Sputtering targets........ D 21 • Point Source Loop Filaments ............ I 08 • Heater Filaments......................... I 10 PRECIOUS METALS • Baskets................................... I 11 E • Precious Metals Presentation .......... E 02 • Alumina Coated Baskets ................ I 14 • Vacuum Deposition Materials .......... E 04 • Crucibles . I 15 • Sputtering Targets ...................... E 06 • Heat Shielded Crucible Heaters ......... I 17 • Precious Metals Recycling .............. E 08 • Boat Sources............................. I 20 • Folded Boats ............................. I 32 REFRACTORY VACUUM F • Alumina Coated Evaporation Sources... I 34 • Refractory Metals ....................... F 02 • Special Tantalum Boats.................. I 40 • Refractory Ceramics...................... F 05 • Folded Baffled Box Sources ............. I 44 • Graphite & PG Parts...................... F 08 • Baffled Box Sources for SiO, ZnS....... I 46 • Heating Elements ....................... F 09 • Microelectronic Sources Tungsten – Tantalum – Molybdenum ................. I 52 • Chrome Plated Tungsten Rods .......... I 57 MATERIALS / INORGANICS & THIN FILMS GUIDE A B C D E SUBSTRATES VACUUM DEPOSITION M F J • Silicon Wafers............................ J 04 • Magnetrons............................. M 02 • Single Crystal Substrates ................ J 09 • Power Supplies ......................... M 06 • Glass & Fused Quartz Substrates ....... J 46 • Ion-Guns ................................ M 13 • Ceramic Substrates....................... J 52 • Electron-Guns .......................... M 14 G • Glassy Carbon Substrates................ J 53 • Electron & Ion-Gun Parts .............. M 21 • HOPG & Mica Substrates................. J 55 • Thin Film Deposition System.......... M 25 • Wafer Tweezers .......................... J 57 • Thin Film Deposition Services......... M 27 • Vacuum Pen Dedicated to Fragile H Substrates ................................ J 60 THICKNESS MEASUREMENT • Thermo Patch - Vacuum Environment .. J 61 N • Front Load Single/Dual Sensors....... N 04 • Cool Drawer Single/Dual Sensors ...... N 06 WIRES & FOILS K • Sputtering Sensor....................... N 08 I • Metallization Aluminum Wires.......... K 02 • CrystalSix® Sensor .................... N 09 • Wire Forming • Crystal 12® Sensor .................... N 10 for Vacuum Metallization ............... K 03 • Sensor Crystal for • Protective Aluminum Rolls ............. K 04 Quartz Microbalance .................. N 12 J • Protective Coating NE-200............. K 05 • Q-pod..................................... N 13 • Wires, Foils & Rods ..................... K 06 • XTC/3 Series Thin Film • Bonding Wires ........................... K 07 Deposition Controllers ................. N 14 • SQC-310 Series Thin Film SAMPLE PREPARATION Deposition Controllers ................. N 15 K L • Conductive Paints ....................... L 02 • SQM-160 Multi-Film Rate/Thickness • Conductive Adhesives .................. L 04 Monitors ................................ N 16 • PDMS..................................... L 07 • Density and Acoustic Impedance Values....................... N 17 • Polyimide Silicon Tape.................. L 10 L • High Precision Tweezers . L 12 MANUFACTURING • Grids for SEM & TEM .................... L 17 O & QUALITY • Tripod® Polisher • Manufacturing & Quality ............... 0 03 for Sample Preparation ................. L 24 M • Conversion Tables....................... • CrystalbondTm ............................ L 25 0 07 • Cargille Refractive Index Fluids ........ L 27 INDEX • Plasma Matrix Series (2 gas entries) .. L 28 • Small Tools............................... L 29 N MATERIALS / INORGANICS & THIN FILMS GUIDE O A MATERIALS VACUUM A DEPOSITION GUIDE • Technical Guide about Thin Films Deposition ....................... A 02 • Vapor Pressures Table ................................. A 28 MATERIALS / INORGANICS & THIN FILMS GUIDE A 01 MATERIALS VACUUM DEPOSITION GUIDE Technical Guide about Thin Films Deposition Technical Guide about Thin Films Deposition KEY OF SYMBOLS * Influenced by composition G Good REMARK: ** Cr-plated rod or strip F Fair Data have been collected from reli- *** All metals alumina coated P Poor able literary sources and scientists S Sublimes working on vacuum deposition. Gr Graphite D Decomposes Whilst great care has been taken to Q Quartz RF RF sputtering is effective ensure that the information provided VC Vitreous carbon RF-R Reactive RF sputter in this table is accurate, data should SS Stainless steel is effective be used as a general guide and at Int Intermetallic DC DC sputtering is effective your own risk. Do not hesitate to use Ex Excellent DC-R Reactive DC sputtering a second source for very critical data is effective or consult us. A 02 MATERIALS / INORGANICS & THIN FILMS GUIDE A Temp.(°C) for given Evaporation Techniques Melting Density Vap. Press. (mBar) Index of Material Symbol Point S/D g/cm3 Sputter Refraction Comments E-Beam Thermal Sources (°C) @20°C (@µm) 10-8 10-6 10-4 Suitability Liner Boat Coil Basket Crucible MATERIALS Alloys and wets W. Int, W, Aluminum Al 660 - 2.70 677 807 972 Ex Gr, Int W W Int RF, DC [email protected] Stranded W is best. Slow Al O 2 3 sputtering. Aluminum Antimonide AlSb 1080 - 4.3 - - - - - - - - - RF 3.62 - DEPOSITIONGUIDE VACUUM Aluminum Arsenide AlAs 1600 - 3.7 - - ~1300 - - - - - - RF - - Aluminum Bromide AlBr3 97 - 2.64 - - ~50 - -