Products are warranted to meet the specifications set forth on their label/packaging and/or certificate of analysis at the time of shipment or for the expressly stated duration. EMD provides information and advice on application technologies and relevant regulations based upon its current knowledge and opinion. EMD MAKES NO REPRESENTATION OR WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, INCLUDING MERCHANTABILITY OR FITNESS FOR A PARTICULAR USE REGARDING OUR PRODUCTS, THEIR APPLICATION OR ANY INFORMATION PROVIDED IN CONNECTION THEREWITH. EMD shall not in any event be liable for incidental, consequential, indirect, exemplary or special damages of any kind resulting from any use or failure of the products. Customer is responsible for and must independently determine the suitability of EMD´s products for its products, intended use and processes. The foregoing information and suggestions are also provided without warranty of non-infringement as to intellectual property rights of third parties and shall not be construed as any inducement to infringe the rights of third parties. Customer shall be responsible for obtaining any applicable third party intellectual property licenses. METALORGANIC PRECURSORS All sales are subject to EMD’s complete Terms and Conditions of Sale. Prices are subject to change without notice. EMD reserves the right to discontinue products without prior notice. EMD, EMD Performance Materials and the vibrant M are trademarks of Merck KGaA, Darmstadt, Germany. All other trademarks pertain to their proprietors. We provide Germany Taiwan Merck KGaA Merck Display Technologies Ltd. Quality Frankfurter Straße 250 No. 39, Ching Chien 1 Road 64293 Darmstadt Kuan Yin Industrial Park Phone: +49 6151 72 0 Taoyuan, 32853 A subsidiary of Merck KGaA, Japan Darmstadt, Germany Merck Ltd. Phone: +886 3 483 6521 ARCO Tower, 5F. Fax: +886 3 483 6528 8-1, Shimomeguro 1-chome Meguro-ku China Tokyo 153-8927 Merck Ltd. A subsidiary of Merck KGaA, Block 14 (East Side) Darmstadt, Germany No. 211 Qinqiao Road China (Shanghai) EMD Performance Materials is a business of Phone: +81 3 5434 4700 Free Trade Zone Shanghai, PRC Merck KGaA, Darmstadt, Germany A subsidiary of Merck KGaA, Korea Darmstadt, Germany Merck Performance Materials Ltd. Tel.: +86 21 2083 2200 5th Floor Haesung-2 Building Fax: +86 21 2083 5010 Teheran-Ro 508 Gangnam-Gu Malaysia Seoul 135-725 Merck Sdn. Bhd. A subsidiary of Merck KGaA, Level 3, Menara Sunway Annexe Darmstadt, Germany Jalan Lagoon Timur Phone: +82 2 2185 3800 Bandar Sunway 46150 Petaling Jaya The United States Selangor EMD Performance Materials Corp. A subsidiary of Merck KGaA, One International Plaza, Suite 300 Darmstadt, Germany Philadelphia, PA 19113 Phone: +603 7494 3686 Phone: +1 484 652 5659 Fax: +1 484 652 5668 [email protected] 04/2017 Deposition metalorganic materials sources FOR THIN FILM TECHNOLOGIES EMD Performance Materials provides high-purity materials and solutions based on our nearly Element Product Abbreviation Chemical Formula 350-year-old history within the chemical industry. With our worldwide supply chain we are able to provide the right materials on the right scale for our customers and partners. By the acquisition and Aluminum Trimethylaluminum TMA Al(CH ) integration of SAFC Hitech, our metal organic product line covers alkyls of aluminum, gallium and 3 3 Triethylaluminum TEA Al(C H ) indium, as well as alkoxides, amides and dikentonates of various metal-based dopands frequently 2 5 3 used in the semiconductor industry. Antimony Trimethylantimony TMSB Sb(CH3)3 Tris (dimethylamino)antimony AMSB Sb[N(CH3)2]3 Bismuth Trimethylbismuth TMBI C3H9Bi Boron Triethylboron TEB (C2H5)3B Cadmium Dimethylcadmium DMCD Cd(CH3)2 High batch-to- Carbon Carbontetrabromide CBR4 CBr4 batch uniformity Gallium Trimethylgallium TMG Ga(CH ) for improved yield 3 3 Triethylgallium TEG Ga(C2H5)3 Indium Trimethylindium TMI In(CH3)3 Solution Trimethylindium TMIS In(C2H5)3 Magnesium Bis(cyclopentadienyl)magnesium CPMG Mg(C5H5)2 Nitrogen Dimethylhydrazine DMHZ (CH3)2N∙NH2 Methylhydrazine HZM CH3NHNH2 Tertiarybutylhydrazine TBHZ C4H12N2 Phosphorous Tertiarybutylphosphine TBPH P(C H )H Customized 4 9 2 purity for Selenium Diisopropylselenide DIPSE Se(C3H7)2 different semiconductor Tellurium Diethyltelluride DETE Te(CH2CH3)2 needs Diisopropyltelluride DIPTE Te(C3H7)2 Zinc Dimethylzinc DMZ Zn(CH3)2 Your global supplier Diethylzinc DEZ Zn(C2H5)2 for precursors in Dimethylzinc:Triethylamine ZNAM Zn(CH3)2∙N(C2H5)3 lighting, photovoltaic, optoelectronic and IC industry.