Installation and Operating Instructions
Turbomolecular pumps Turbo TM 1100 A
Ateliers Busch S.A. Zone industrielle 2906 Chevenez Switzerland 0870564260/ 131105 / Original instructions / Modifications reserved Technical data . . . . . . . . . . . . . . . . . . . . . . . . 26 Table of Contents Gas purge valve 87-900-890-01(A) . . . . . . . . . . . . . . . 27 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 General . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 Product description . . . . . . . . . . . . . . . . . . . . . . . . . 3 Gas purge valve characteristics . . . . . . . . . . . . . . . . 27 Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 Operation notes . . . . . . . . . . . . . . . . . . . . . . . 27 Pump used with corrosive gases . . . . . . . . . . . . . . . . 3 Vent procedure . . . . . . . . . . . . . . . . . . . . . . . . 28 Pump used in presence of magnetic fields . . . . . . . . . . . 4 Principle of operation . . . . . . . . . . . . . . . . . . . . . . . 4 Cooling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 On/ Off switch . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Intended use . . . . . . . . . . . . . . . . . . . . . . . . . . . 4 Safety Guideline for Turbomolecular Pumps . . . . . . . . . . . 4 Safety notes . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 Transport . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 Storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5 Short-term Storage . . . . . . . . . . . . . . . . . . . . . . . . 5 Installation and Commissioning . . . . . . . . . . . . . . . . . . 5 Installation prerequisites . . . . . . . . . . . . . . . . . . . . . 5 Mounting Position and space . . . . . . . . . . . . . . . . . 5 Suction Connection . . . . . . . . . . . . . . . . . . . . . . 6 Electrical connection/ Controls . . . . . . . . . . . . . . . . . . 6 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 Mounting . . . . . . . . . . . . . . . . . . . . . . . . . . . 6 Connecting electrically . . . . . . . . . . . . . . . . . . . . . 6 Controller description (969-8978M005) . . . . . . . . . . . . 7 Interconnections – controller model 969-8978M005. . . . . . 7 P3 – Vent . . . . . . . . . . . . . . . . . . . . . . . . . . . 7 P4 – External fan. . . . . . . . . . . . . . . . . . . . . . . . 7 J1 – In – Out . . . . . . . . . . . . . . . . . . . . . . . . . . 7 Signal description . . . . . . . . . . . . . . . . . . . . . . . 8 FAULT: . . . . . . . . . . . . . . . . . . . . . . . . . . . 8 How to connect the open-collector inputs of the controller. . . . 9 How to connect the outputs of the controller . . . . . . . . . . 10 J2 – Serial. . . . . . . . . . . . . . . . . . . . . . . . . . . 10 RS 232/ RS 485 Communication Description . . . . . . . . . . 10 Introduction Communication Format. . . . . . . . . . . . . . . . . . . . 10 Congratulations on your purchase of the Busch turbomolécular pump. Communication Protocol . . . . . . . . . . . . . . . . . . . 10 With watchful observation of the field’s requirements, innovation and Window Meanings . . . . . . . . . . . . . . . . . . . . . . . 12 steady development Busch delivers modern vacuum and pressure solu- Operation Notes . . . . . . . . . . . . . . . . . . . . . . . . 14 tions worldwide. Application . . . . . . . . . . . . . . . . . . . . . . . . . . 14 Switching on . . . . . . . . . . . . . . . . . . . . . . . . . . 14 This operating instructions contain information for System operating conditions . . . . . . . . . . . . . . . . . 14 – product description, Turbo pump, switching off . . . . . . . . . . . . . . . . . . . 14 – security, Emergency Stop . . . . . . . . . . . . . . . . . . . . . . . 14 – transport, Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . 15 – Inlet Screen Installation . . . . . . . . . . . . . . . . . . . 15 storage, – Water Cooling Kit Installation. . . . . . . . . . . . . . . . . 15 installation and commissioning Vent Accessories . . . . . . . . . . . . . . . . . . . . . . . . 16 – maintenance, Navigator Controller Compatible Vent Valve model 969-9834 16 – accessories, Purge Valve Installation. . . . . . . . . . . . . . . . . . . . 17 – overhaul Serial Cable Installation (for 969-8978M005 Navigator controller only) . . . . . . . . . . . . . . . . . . . . . . . . 17 of the turbomolecular pump. Turbo TM 1100 A Navigator Controller Installation. . . . . . 17 For the purpose of these instructions, «handling » the turbomolecular Bottom mounting. . . . . . . . . . . . . . . . . . . . . . . 17 pump means the transport, storage, installation, commissioning, in- Overhaul . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18 fluence on operating conditions, maintenance and overhaul of the Removal from Service . . . . . . . . . . . . . . . . . . . . . . . 18 turbomolecular pump. Dismantling and Disposal . . . . . . . . . . . . . . . . . . . . 18 The user should read this instruction manual and any other additional Recommissioning . . . . . . . . . . . . . . . . . . . . . . . . 18 information supplied by Busch before operating the equipment. Busch Meaning of the "WEEE" logo found in labels. . . . . . . . . 18 will not be held responsible for any events occurring due to non-com- Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19 pliance, even partial, with these instructions, improper use by untrai- Turbo TM 1100 A . . . . . . . . . . . . . . . . . . . . . . . . 19 ned persons, non-authorized interference with the equipment or any Spare parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21 action contrary to that provided for by specific national standards. Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . 22 Keep this operating instructions and, if applicable, other pertinent EC Declaration of Conformity . . . . . . . . . . . . . . . . . . . 23 operating instructions available on site. Appendix: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25 TV 141 Navigator vent valve . . . . . . . . . . . . . . . . . . 25 Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . 25 Vent valve . . . . . . . . . . . . . . . . . . . . . . . . . . 25 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . 25 Disposal . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
Introduction Page 2 a
a Inlet b Discharge c Controller d Blades e Connecting cable
b
e c
d
Product description Pump used with corrosive gases To prevent damage to the bearings, an inert gas must flow into the Use pump body around the upper bearing towards the forevacuum line. To supply the inert purge gas (e.g.nitrogen) to the pump through the The turbomolecular pump is intended for purge port, connect a gas purge valve between the pressure regulator – the suction and the pump. of Adjust the pressure regulator in order to read a gas flow rate of 0,1 to 0,8 mbar l/s. – air and other dry, non-aggressive, non-toxic and non-explosive ga- ses. CAUTION The Turbo TM 1100 A is turbomolecular pump for high and ultra-high vacuum applications. It can pump any type of gas or gas compound. It To prevent bearing damage, Busch suggests a minimum purge gas is not suitable for pumping liquids or solid particles. flow rate of 20 sccm (0,33 mbar l/s). This value can be exceeded, During normal operation, the motor is fed with a voltage of 56 Vrms according to the process requirements. Please contact Busch for spe- three-phase at 761 Hz. To reduce losses during start-up to a minimum, cific applications. the frequency increases according to a ramp with a higher initial vol- tage/frequency ratio. The purge gas throughput with the recommended forepump allows to achieve a high vacuum pressure in the 10-8 mbar range. This equipment is destined for use by professionals.
Product description Page 3 The recommended gas flow maintains a pressure into the pump body The pump consists of a high frequency motor driving a turbine. The higher than the forevacuum pressure. turbine rotates in an anticlockwise direction when viewed from the high vacuum flange end. The turbine is made of high-strength alumi- The recommended procedure to vent the system and the pump avoi- nium alloy, machined from a single block. ding the contact between the pump bearings and the corrosive gas is described in the following points: The turbine rotor is supported by permanently lubricated high precision ceramic ball bearings installed on the forevacuum side of the pump. l Close the corrosive gas flow into the system. The static blades of the stators are supported and accurately positioned l Leaving the Turbo TM 1100 A and the backing pump running and by spacer rings. The Macrotorr stators are in the form of self-positio- the purge gas flowing, wait for enough time to evacuate the corro- ning machined discs with pumping channels and an opening restricted sive gas from the system. by the corresponding rotor discs. These are made of aluminium alloy. l Turn off the Turbo TM 1100 A. In order to avoid the suction of solids, the vacuum pump is equipped l Open the Turbo vent port slowly until to reach atmospheric pres- with a mesh screen in the suction connection. sure in the system. When used with Navigator controller 969-8978M005, the pump is l When the Turbo pump and the backing pump are stopped and the equipped with auxiliary connectors to supply an additional fan, to con- system is at atmospheric pressure, for a better bearing protection it trol the vent valve, to be controlled from a remote site by means of an is advisable to leave the purge gas flowing into the Turbo pump, host computer connected through a serial line (RS232 or RS485). with the chamber or the Turbo vent valve opened, to avoid system The following paragraphs contain all the information necessary to gua- overpressures. If the vent valve can’t be kept opened, the backing rantee the safety of the operator when using the equipment. pump should be left operating. Detailed information is supplied in the appendix « Technical informa- tion ». Cooling
7 The turbomolecular pump must be always water cooled using the dedi- 6 cated channels on the pump body. Minimum required water flow is 3,5 l/min and the water temperature 1 must be between +10°C et + 20°C. 2 NOTE: Select WATER COOLING setting(Navigator Controller: WIN 3 106 = 1) When pumping NITROGEN or lighter gases (in this case the 5 4 max power is 400 W). Select AIR COOLING setting (Navigator Controller: WIN 106 = 0) when pumping ARGON gas (in this case the max. power is 260 W). On/ Off switch Purge layout The turbomolecular pump comes without on/ off switch. The control of the turbomolecular pump is to be provided in the course of installation. 1 Purge gas line 2 Pressure regulator 3 Gas purge valve Safety 4 Gas purge port 5 Forevacuum pump Intended use 6 Turbopump 7 Vent valve DEFINITION: For the purpose of these instructions, “handling” the va- cuum pump means the transport, storage, installation, commissioning, influence on operating conditions, maintenance, troubleshooting and overhaul of the turbomolecular pump. The turbomolecular pump is intended for industrial use. It must only be Pump used in presence of magnetic fields handled by qualified personnel. Magnetic fields induce eddy currents in the rotor of a turbomolecular The allowed media and operational limits according to the “Product pump that tend to oppose to its rotation. The result is increased electri- Description” and the “Installation Prerequisites” of the vacuum pump cal power consumption by the motor, most of which is dissipated in shall be observed both by the manufacturer of the machinery into the rotor. which the turbomolecular pump is to be incorporated and by the ope- Since the rotor is not in contact with the stator the above power can rator. leave the rotor mainly by radiation and hence the rotor may be over- heated while static parts of the pump remain cool. The maintenance instructions shall be observed. This effect is strongly dependant from the intensity, time function and Prior to handling the turbomolecular pump these operating instruc- distribution of the magnetic field. tions shall be read and understood. If anything remains to be clarified In general, therefore, an increase in jump current can be expected.If please contact your Busch representative! this increase is lower than 50% of the current value drawn by the mo- tor in high vacuum operation, no particular problem should be expec- Safety Guideline for Turbomolecular ted. However if the effect is grater, than the case should be carefully reviewed by Busch specialist. Pumps Turbomolecular pumps as described in the following operating manual As a matter of fact, in case of high magnetic fileds, also important for- contain a large amount of kinetic energy due to the high rotational ces might be generated and applied to the rotor. speed in combination with the specific mass of their rotors. Principle of operation In case of a malfunction of the system for example rotor/ stator contact or even a rotor crash the rotational energy may be released. The pumping action is obtained through a high speed turbine (max.45660 rpm) driven by a high performance 3-phase electric motor. The Turbo TM 1100 A is free of contaminating agents and, therefore, is suitable for applications requiring a « clean » vacuum.
Safety Page 4 AVERTISSEMENT Storage
In case of non-compliance with the installation prerequisites: Short-term Storage In order to guarantee the maximum level of performance and reliability Risk of damage or destruction of the vacuum pump and adjoining of turbomolecular pumps, the following guidelines must be followed : plant components! l Make sure that the suction connection/gas inlet and the gas dis- Risk of injury! charge/ pressure connection areclosed (leave the provided plugs in) The installation prerequisites must be complied with. l The storage of turbomolecular pumps must take place under the A thermistor sensor is mounted near the upper bearing to prevent the following environmental conditions: pump from overheating. u Temperature range: -20°C to +70°C Safety notes u Relative humidity range: 0 to 95% (non condensing) l The turbomolecular pumps must be always soft-started when re- The turbomolecular pump has been designed and manufactured accor- ceived and operated for the first time by the customer. ding to the state-of-the-art. Nevertheless, residual risks may remain. These operating instructions inform about potential hazards where ap- l The shelf life of a turbomolecular pump is 10 months from the propriate. Safety notes are tagged with one of the keywords DANGER, shipping date. WARNING and CAUTION as follows: CAUTION
If for any reason the shelf life time is exceeded, the pump has to be DANGER returned to the factory.
Disregard of this safety note will always lead to accidents with fa- Please contact the local Busch Vacuum Sales and Service representa- tal or serious injuries. tive for informations.
NOTE: If the Turbo TM 1100 pump has been stored at a temperature WARNING below 5°C, please wait for the system to reach an ambient operating temperature of +5° to 35°C. Disregard of this safety note may lead to accidents with fatal or se- rious injuries. Installation and CAUTION Commissioning Disregard of this safety note may lead to accidents with minor inju- ries or property damage. Installation prerequisites
NOTE:The notes contain important information taken from the text. CAUTION Transport In case of non-compliance with the installation prerequisites : The Turbo TM 1100 A is supplied in a special protective packing. If this Risk of damage or destruction of the turbomolecular pump and ad- shows signs of damage which may have occured during transport, joining plant components! contact your local sales office. When unpacking the system, be sure not to drop it and avoid any kind Risk of injury! of sudden impact or shock vibration to it. The installation prerequisites must be complied with. Do not dispose of the packing materials in an unauthorized manner. The material is 100% recyclable and complies with EEC Directive l Make sure that the integration of the turbomolecular pump is car- 85/399. ried out such that the essential safety requirements of the Machine Directive 2006/42/EC are complied with (in the responsability of NOTE: Normal exposure to the environment cannot damage the Turbo the designer of the machinery into which the vacuum pump is to TM 1100 A. Nevertheless, it is advisable to keep it closed until it is ins- be incorporated ; see also the note in the EC-Declaration of talled in the system, thus preventing any form of pollution by dust. Conformity) Packed in a packaging, the vacuum pump may be out of the box wi- thout any means of lifting. Mounting Position and space l Do not install or use the pump in an environment exposed to at- mospheric agents (rain, snow, ice), dust, aggressive gases, or in ex- CAUTION plosive environments or those with a high fire risk. In order to prevent outgassing problems, do not use bare hands to l Make sure that the environmental conditions comply with the pro- handle components which will be exposed to vacuum. tection class of the drive motor (according to the nameplate) l During operation, the following environmental conditions must be Always use gloves or other appropriate protection. respected : u Maximum pressure : 2 bar above atmospheric pressure CAUTION u Temperature: from 5°C to +35°C Please check out the weight of the turbomolecular pump before lif- u Relative humidity: 0-95% (non condensing) ting it up (see “Technical Data”).
Use adequate lifting gear for this.
Transport Page 5 Dimension of the suction flange : CAUTION – ISO 200 F
Do not remove the adhesive and protective cap before connecting The following table shows, for the ISO-F suction flange, the necessary the turbopump to the system. number of screws and the relevant fixing torque.
Suction flange Number of screws Fixing torque ISO 200 F 12 5 Nm The class of the steel screws for « F » flange must be > 8.8
Dimension of the exhaust flange : – KF 40 NW A flange ISO 200 F is available to connect the turbomolecular pump to the fore-vacuum pump. A hose or vacuum approved pipe can be used. If a rigid pipe is used, any vibration generated by the mechanical pump must be eliminated through the use of bellows. NOTE: The Turbo TM 1100 A pump is characterized by its high com- pression ratio also for oil vapors. When using a mechanical oil-sealed pump, it is advisable to install a suitable trap between the turbopump and the fore-vacuum pump in order to prevent oil backstreaming. l In the presence of magnetic fields the pump must be protected using a ferromagnetic shield. See the chapter « Technical data ». Electrical connection/ Controls l The turbopump must be connected to a primary pump (See « l Technical Data »). Make sure that the stipulations acc. to the EMC-Directive 2004/108/EC, the EN-standards, electrical and occupational safety l Fix the Turbo TM 1100 A in a stable position mounting the inlet directives and the local or national regulations, respectively, are flange of the turbopump to the system counter-flange, with a complied with (this is in the responsibility of the designer of the connection capable of withstanding a torque of 8900 Nm around machinery into which the vacuum pump is to be incorporated; see its axis. also the note in the EC-Declaration of Conformity). l The Turbo TM 1100 A can be installed in any position. l Make sure that the power supply is compatible with the data on NOTE: The Turbo TM 1100 A cannot be fixed by means of its base. the nameplate of the drive motor l l The pump can operate in any position and can be supported on Make sure that an overload protection according to EN 60204-1 is the high vacuum flange (suction). provided for the drive motor l l Make sure that the turbomolecular pump can neither inadvertently Make sure that the drive of the vacuum pump will not be affected nor intentionally be stopped on and cannot be used as a support by electric or electromagnetic disturbance from the mains; if neces- for heavy objects. sary seek advice from the Busch service l Make sure that the turbomolecular pump cannot be hit by falling Installation objects. l Make sure that the turbomolecular pump will not be touched inad- Mounting vertently during operation, provide a guard if appropriate. l Make sure that the “Installation Prerequisites” are complied with l The pump is balanced after assembly with a residual vibration am- l Set down or mount the vacuum pump at its location plitude less than 0.01 µm. Connecting electrically Suction Connection
WARNING CAUTION Risk of electrical shock, risk of damage to equipment. Do not put hands into the inlet aperture. Electrical installation work must only be executed by qualified per- Risk of body damage! sonnel that knows and observes the following regulations: - IEC 364 or CENELEC HD 384 or DIN VDE 0100, respectively, - IEC-Report 664 or DIN VDE 0110, CAUTION - BGV A2 (VBG 4) or corresponding national accident prevention regulation. Intruding foreign objects or liquids can destroy the vacuum pump. l The Turbo TM 1100 A pump with Navigator controller 969-8978M005 belongs to the second installation (or overvoltage) WARNING category as per directive EN 61010-1. Connect the device to a mains line that satisfies the above category. If a rotor failure occurs, the connection of the pump to the system could be subjected to a significant torque. If the connection is not l The Turbo TM 1100 A pump has Input/Output and serial commu- sufficient to withstand that torque, the pump could detach from nication connectors that must be connected to external circuits in the system or the motor housing could detach from the pump en- such a way that no electrical part is accessible. velope. Be sure that the insulation of the device connected to the Turbo In this case metal fragments could be projected from the pump or TM 1100 A pump is adequate even in the case of single fault as system, wich could cause serious injury or death and/ or damage per directive EN 61010-1. to surrounding equipment. l The Turbo TM 1100 A pump is connected to the controller through an 8-pin connector. Pins B, C and D are the 3-phase sup- ply to the motor, pins A and F are connected to the temperature Installation and Commissioning Page 6 sensor (NTC type, 30 KW resistance at 25°C) and pin E is connec- P3 – Vent ted to the pump ground; pins G and H are not connected. This is a dedicated 24 Vdc connector to control the optional vent valve.
THERMISTOR
COMMON 4 3
2 1 + t° A ENABLE +24VDC G B H I MAX 60mA F C E GND D PUMP MOTOR P4 – External fan This is a dedicated 24 Vdc connector to supply an optional external TURBO-V PUMP fan.
Electrical connection
2 COMMON l If the temperature sensor is disconnected, the pump will not start. To prevent damage to the pump when the temperature exceeds +24VDC 1 60°C, the sensor automatically cuts out the power supply. I MAX 500mA Controller description (969-8978M005) The dedicated controller is a solid-state frequency converter which is driven by a single chip microcomputer and is composed of two PCBs which include power supply and 3-phase output, analog and in- put/output section, microprocessor and digital section. J1 – In – Out The power supply, together with the 3-phase output, converts the This connector carries all the input and output signals to remote control single phase AC mains supply into a 3-phase, low voltage, medium fre- the Turbo TM 1100 A. quency output which is required to power the pump. It is a 15-pins D type connector ; the available signals are detailed in The controller can be operated by a remote host computer via the se- the table, the following paragraphs describe the signal characteristics rial connection. A Window-based software is available (optional). and use. Interconnections – controller model 969-8978M005 The following figure shows the Turbo TM 1100 A interconnections 8 1 with Navigator controller (969-8978M005). For Rack Controller mo- dels see the specific controller manuals. 15 9
J1- In - Out
VENT VALVE
Pin N. Signal Name Input/Output 1 START/STOP (+) IN 2 START/STOP (-) IN 3 INTERLOCK (+) IN
FUSE TYPE T XXA
MP 4 INTERLOCK (-) IN
LD1 5 SPEED SETTING (+) IN VENT VALVE STATUS
P3 P4 J2 SERIAL J1 IN-OUT VENT FAN 6 SPEED SETTING (-) IN EXTERNAL FAN INPUT - OUTPUT 7 SOFT START (+) IN
SERIAL LINE 8 SOFT START (-) IN 9 +24 Vdc OUT 10 SPARE 11 PROGRAMMABLE SET POINT OUT
Installation and Commissioning Page 7 12 SPARE FAULT: 13 FAULT OUTPUT OUT This open collector output signal is ON when a system fault condition is detected. PROGRAMMABLE ANALOG 14 OUT SIGNAL (+) PROGRAMMABLE SET POINT: 15 GROUND OUT This open collector output signal is enabled when the reference quanti- PROGRAMMABLE ANALOG ty chosen (frequency, current or time) is higher than the set threshold. SIGNAL (-) The signal can be – “ high level active ” (that is the output is normally at 0 Vdc and becomes 24 Vdc when actived), or Signal description – “low level active” (that is the output is normally at 24 Vdc and be- comes 0 Vdc when activated). l START/STOP: input signal to start or stop the pump. With the sup- plied cover connector the START/STOP (+) signal is connected to Moreover, if the reference quantity is the frequency or the current the +24 Vdc pin and the START/STOP (-) signal to the GROUND drawn, it is possible to set the hysteresis (in % of the threshold value) pin: in this condition the pump automatically starts as soon as the to avoid bouncing. controller recognises the input supply (“Plug & Pump”). l For example : l INTERLOCK: input signal to control the pump rotation. With the u Reference quantity : frequency supplied cover connector the INTERLOCK (+) signal is connected to the +24 Vdc pin and the INTERLOCK (-) signal to the GROUND u threshold: 500 Hz pin. u hysteresis: 1% l SPEED SETTING: PWM input signal to set the pump speed. The u activation type: “high level” PWM signal characteristics must be the following : u Frequency: 100 Hz +/-20% u Amplitude: 24 V max u Duty cycle range: from 25% to 75% Corresponding to a pump speed from 500 Hz to 761 Hz (see the follo- wing diagram).
The set point output stays at 0 Vdc until the frequency becomes higher than 505 Hz (that 500 Hz + 1% of 500 Hz), then the output goes at 24 Vdc and stays at 24 Vdc until the frequency becomes lower than 495 Hz (that is 500 Hz – 1% of 500 Hz). It is possible to delay the set point checking for a programmable delay time. NOTE: The duty cycle percentage is referred to the low level portion of The PROGGRAMMABLE SET POINT signal has the following default the PWM signal. settings : PROGRAMMABLE ANALOG SIGNAL: u Reference quantity : frequency This output signal is a voltage (from 0 to 10Vdc) proportional to a refe- u Threshold : 643 Hz rence quantity (frequency or power) set by the user. The default set- u Hysteresis : 2% ting is the frequency (see the following example diagram). u Activation type: “high level” u Delay time: 0 second NOTE: The Navigator Software (optional) allows the operator to set all the programmable feature. When no external input-output device is available this connector must be closed with the supplied mating connector that short-circuits the START and INTERLOCK inputs with the GROUND input (see the follo- wing figure).
Installation and Commissioning Page 8 +24 Vdc Customer’s device Controller
+5 Vdc
MATING CONNECTOR
+24 Vdc Controller Customer’s device +5 Vdc How to connect the open-collector inputs of the controller Here below there are the typical connections of the open collector in- put of Turbo TM 1100 A to an external system. Two cases are conside- red : – The customer supplies the 24 Vdc – The customer does not supply the 24 Vdc Please note that on the connector a 24 Vdc, 60mA voltage, a GROUND signal and the open collector pin are available. Case 1 Case no2 with relay utilization Case 2 with relay utilization Case 2 with transistor utilisation
+24 Vdc Customer’s +24 Vdc device Controller +5 Vdc PNP +5 Vdc Customer’s device Controller
NPN
+24 Vdc +24 Vdc Controller
PNP Customer’s +5 Vdc device +5 Vdc
Customer’s device Controller
NPN
Case no1 Case no2 with transistor utilisation
Installation and Commissioning Page 9 How to connect the outputs of the RS 232/ RS 485 Communication controller Description The following figure shows a typical logic output connection (relay coil) Both the RS 232 and the RS 485 interfaces are available on the connec- but any other device may be connected e.g. a LED, a computer, etc., tor J2. and the related simplified circuit of the controller. The communication protocol is the same (see the structure below), but The figure example refers to the programmable set point signal on pins only the RS 485 manages the address field. Therefore to enable the RS 11 and 9. 485 is necessary to select the type of communication as well as the de- vice address by means of the Navigator software. Communication Format l 8 data bit J1 Controller l no parity 8 8 15 15 l 1 stop bit
l Baud rate: 600/1200/2400/4800/9600 programmable Communication Protocol The communication protocol is a MASTER/SLAVE type where: l Host = MASTER +24 V 9 9 l 1 1 Controller = SLAVE The communication is performered in the following way: u the host (MASTER) send a message + CRC to the controller (SLAVE); Typical output connection u the controller answer with an answer + CRC to the host. u The MESSAGE is a string with the following format: u
Data Type Field Length Valid Characters ‘0’ = OFF Logic (L) 1 9 pin D-type serial input/ output connector ‘1’ = ON ‘-’,’.’,’0’...’9’ right Numeric (N) 6 justified with ‘0’ From blank to Alphanumeric (A) 10 ‘_’(ASCII) PIN N. Signal Name 1 SPARE
Installation and Commissioning Page 10 The controller can answers with the following response types: Commande: SOFT-START (ON) The controller can reply with the following types of response: Source: PC
Type Length Value Description Destination: Controller After a read instruction of a 02 80 31 30 30 31 31 03 42 32 Logic - logic window. STX ADDR WINDOW WR ON ETX CRC After a read instruction of a Numeric 6 bytes - numeric window. Source: Controller Alphanumeric 10 bytes - After a read instruction of a alphanumeric window. Destination: PC Execution of the command ACK 1 byte (0x6) has been successful. 02 80 06 03 38 35 Execution of the command NACK 1 byte (0x15) STX ADDR ACK ETX CRC has failed The window specified in Unknow Win- Command: SOFT-START (OFF) dow 1 byte (0x32) the command is not a valid window. Source: PC The data type specified in Data Type the command (Logic, Nu- Destination: Contrôleur Error 1 byte (0x33) meric or Alphanumeric) is not in agreement with the 02 80 31 30 30 31 30 03 42 33 Window specified. STX ADDR WINDOW WR OFF ETX CRC The value expressed during a write command is not wi Out of Range - thin the range value for the Source: Controller specified window. The window specified is Destination: PC Read Only or is temporarily 02 80 06 03 38 35 Win Disabled 1 byte (0x35) disabled (for example you can’t write the Soft Start when the Pump is run- STX ADDR ACK ETX CRC ning).
Examples: COMMAND: START Source: PC
Destination: Controller 02 80 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC
Source: Controller
Destination: PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC
Command: STOP Source: PC
Destination: Controller 02 80 30 30 30 31 30 03 42 32 STX ADDR WINDOW WR OFF ETX CRC
Source: Controller
Destination: PC 02 80 06 03 38 35 STX ADDR ACK ETX CRC
Installation and Commissioning Page 11 Window Meanings
N. Read / Write Data Type Description Admitted Values 000 R/W L Start/Stop Start = 1 (in remote mode the window is a read only) Stop = 0 008 R/W L Remote Remote = 1 (default) or Serial configuration Serial = 0 (default = 1) 100 R/W L Soft Start YES = 1 (write only in Stop condition) NO = 0 101 R/W N Set Point type 0 = Frequency 1 = Current 2 = Time (default = 0) 102 R/W N Set Point threshold (expressed in Hz, mA or s) (default = 582) 103 R/W N Set Point delay: time between the pump start 0 à 99999 and the set point check (seconds) (default = 0) 104 R/W L Set Point signal activation type : the signal can 0 = high level active be “high level active” or “low level active” 1 = low level active (default = 0) 105 R/W N Set point hysteresis 0 to 100 (in % of threshold) (default = 2) 106 R/W L Intercooling 0 = NO 1 = YES 107 R/W L Active Stop 0 = NO (write only in stop) 1 = YES 108 R/W N Baud rate 600 = 0 1200 = 1 2400 = 2 4800 = 3 9600 = 4 (default = 4) 109 W L Pump life / cycle time / cycle number reset To reset write ‘1’ 110 R/W L Interlock type Impulse = 0 (default = 1) Continuous = 1 111 R/W L 0 = frequency Analog output type: output voltage signal 1 = power proportional to frequency or power (default = 0)
120 R/W N Rotational frequency setting (Hz) 500 to 761 (default = 761) 121 R/W N Maximum rotational frequency in Hz (active 500 to 761 only in Stop condition) (default = 761) 122 R/W L Set vent valve on/off On = 1 (on=closed) Off = 0 (default = 1) 123 Reserved to Busch 124 service
125 R/W L Set the vent valve operation Automatic = 0 (see note 1.) On command = 1 (see note 2.) 126 R/W N Vent valve opening delay 0 to 65535 (expressed in 0.2 sec) (corresponding to 0 to 13107 sec) Reserved to Busch 130 service 200 R N Pump current in mA dc 201 R N Pump voltage in Vdc Pump power in W (pump current x pump 202 R N voltage duty cycle) 203 R N Driving frequency in Hz 204 R N Pump temperature in °C 0 to 70 205 R N Pump status Stop = 0 Waiting intlk = 1 Starting = 2 Auto-tuning = 3 Braking = 4 Normal = 5 fail = 6 206 R N Error code Bit description : see the following fi- gure 300 R N Cycle time in minutes (zeroed by the reset 0 to 999999 command)
Installation and Commissioning Page 12 301 R N Cycle number (zeroed by the reset command) 0 to 9999 302 R N Pump life in hours (zeroed by the reset com- 0 to 999999 mand) 320 to Reserved to Busch 399 service 400 R A CRC EPROM (QE) QE5XXXX (or “XXXX” are variable) PA5XXXX 402 R A CRC Param. (PA) (or “XXXX” are variable) Reserved to Busch 500 service
503 R/W N RS 485 address 0 to 31 (default = 0) 0 = RS 232 504 R/W L Serial type select 1 = RS 485 (default = 0)
NOTE: Automatic means that when the controller stops, the vent valve is opened with a delay defined by window n.126; when the controller starts, the vent valve is immediately closed. On command means that the vent valve is opened or closed by means of window n.122.
7 6 5 4 3 2 1 0
TOO HIGH LOAD NO CONNECTION SHORT CIRCUIT PUMP OVERTEMP.
OVERVOLTAGE CONTROLL. OVERTEMP.
AUX FAIL POWER FAIL
Window N. 206, Bit Description
Installation and Commissioning Page 13 Operation Notes l fast fashing (period of about 200 ms): error condition. Application Turbo pump, switching off To switch off the Turbo TM 1100 A pump, it is necessary to remove CAUTION the mains. The integrated controller immediately stops the pump.
The turbomolecular pump is designed for operation under the WARNING conditions described below. The turbomolecular controller must be powered with 3-wire power In case of disregard risk of damage or destruction of the vacuum cord (see orderable parts table) and plug (internationally approved) pump! for user’s safety. Use this power cord and plug in conjunction with a properly grounded power socket to avoid electrical shock and to Risk of Injury! satisfy CE requirements. The turbomolecular pump must be operated under the conditions described below. WARNING
High voltage developped in the controller can cause severe injury or CAUTION death. Before servicing the unit, disconnect the input power cable. Make all electrical an pneumatic connections before the use of the Emergency Stop system. To immediately stop the Turbo TM 1100 A pump in an emergency While heating the vacuum chamber, the temperature of the inlet condition it is necessary to remove the supply cable from the mains flange must not exceed 80°C. plug.
CAUTION
Never use the turbopump when the inlet flange is not connected to the vacuum chamber or is not blanked.
Do not touch the turbopump or any of its accessories during the heating process. The high temperatures may cause burns.
CAUTION
Avoid impacts, oscillations or harsh movements of the pump when in operation. The bearings may become damaged.
Use air or inert gas free from dust or particles forventing the pump. The pressure at the vent port must be less than 2 bar (above atmos- pheric pressure).
For pumping aggressive gases, these pumps are fitted with a special port to allow a steady flow of inert gas (like N2, Ar) for pump bea- ring protection (see the appendix «Technical Information»).
CAUTION
When employing the pump for pumping toxic, flammable, or ra- dioactive gases, please follow the required procedures for each gas disposal.
Do not use the pump in presence of explosive gases. Switching on The following instructions apply to the Turbo TM 1100 A used toge- ther with Navigator controller (model 969-8978M005). To switch on the Turbo TM 1100 A pump it is necessary to supply the mains. The integrated controller automatically recognizes the interlock and start signals presence and start up the pump. The first pump start up is in « Soft Start » mode. When the start up cycle is finished, the « Soft Start » mode automatically is disabled, and the following start ups are without the „Soft Start“ mode. To re-enable the « Soft Start », mode it must be activated by the sui- table software command (see the paragraph « RS232/RS485 COMMUNICATION DESCRIPTION »). System operating conditions l with no flashing: the pump is normally rotating l slowly flashing (period of about 400 ms): the system is in ramp, or in braking, or in Stop, or in « Waiting for interlock » status. Installation and Commissioning Page 14 The screen can be mounted on each pump. Maintenance The screen can be removed as shown in the following figure. The Turbo TM 1100 A pump does not require any maintenance. Any work performed on the system must be carried out by authorized personnel.
WARNING
Before carrying out any work on the system, disconnect it from the mains, vent the pump by opening the appropriate valve, wait until the rotor has stopped turning and wait until the surface tempera- ture of the pump falls below 50°C.
In the case of breakdown, contact your local Busch service center who can supply a reconditioned system to replace that broken down. NOTE: Prior to shipping, the turbomolecular pump must imperatively be decontaminated and the degree of contamination must be docu- Inlet screen removal mented in a declaration of decontamination (« Declaration of Deconta- mination »), which can be downloaded from www.busch-vacuum.com. The following figure shows the overall flange dimensions with the pro- tection screen fitted on pump with ISO flange. Inlet Screen Installation
19.3 ISO 200F
Inlet screen (mod. 969-9304) DIMENSIONS: mm
Overall flange dimensions with the protection screen.
Water Cooling Kit Installation Two types of water cooling kits are available to be mounted. The Tur- bo TM 1100 A pump must be always water cooled. The two models part numbers are: – 969-9825 Inlet screen (mod. 969-9316) – 969-9826
The inlet screens mod.969-9304 and 969-9316 prevent the blades of the pump from being damaged by debris greater than 0,7 mm diame- ter. NOTE: The inlet screen, does reduce the pumping speed by about 10%. The inlet screen is fitted in the upper part of the pump, as shown in the figure.
Model 969-9825
Inlet screen position
Maintenance Page 15 l During operation, the following environmental conditions must be respected: u The water temperature must be between +10°C and +35°C u Inlet pressure between 3 and 5 bar u This allows a flow of about 3,5 l/min. NOTE: The water electrical conductance must be £500 µs/cm. When the conductance is higher, in closed water circuit, the use of up to 20% of Ethyl-Glycole is suggested. Vent Accessories The vent valve and vent device allow to avoid undesired venting of the Model 969-9826 pump during temporary power failure and enables an automatic vent operation. Navigator Controller Compatible Vent Valve model 969-9834 CAUTION
The items of the kit 969-9826 must be assembled as shown in the following figure.
Vent Valve model 969-9834
This vent valve waits before opening a minimum time of about 5 sec. Kit 969-9826 assembling This time can be increased up to about 220 min. by means of a setting of the Navigator software (optional). To install the vent valve, unscrew the threaded plug (see figure below). The assembled kit must be screwed into the suitable holes of the pump body with a recommended closing torque of 5 Nm.
Vent Valve installation
Kit 969-9826 mounting
l Then screw the vent valve into the pump and tighten it using a 16 mm hexagonal spanner with a torque of 2,5 Nm. l Two 6mm (1/4”) internal diameter rubber or plastic hoses from the water supply must be fitted to the two nozzles. l These hoses must be held on the respective nozzles using hose CAUTION clips to avoid that the tube(s) gets loose or disconnected during operation. Do not overtighten the valve as this may damage the thread on the l Cooling may be carried out either through an open circuit with pump. eventual discharge of the water, or using a closed circuit cooling system. Maintenance Page 16 Vent Valve installation Purge Valve installation
l Then connect the cable from the valve to the suitable connector on the controller (see the paragraph “INTERCONNECTIONS”). Purge Valve Installation Serial Cable Installation (for 969-8978M005 A gas purge valve is available to protect the pump bearings against Navigator controller only) particulate and corrosive gases that could move into the pump. The supplied serial cable must be installed when the Turbo TM 1100 A To install the gas purge valve it is necessary to unscrew the purge port or the optional vent valve have to be controlled by means of a remote cover as shown in the following figure: computer. The cable is installed fixing the 9 pin D-type connector into the P2 se- rial connector as shown in the following figure. Turbo TM 1100 A Navigator Controller Installation The controller can be mounted on the pump bottom. To install the controller execute the following procedures: Bottom mounting See the following figure: l Turn the pump upside-down. l Place the three washers on the pump bottom in correspondance of three hole at 120°. l Place the controller on the washers, with the pump cable toward the pump body. l Fix the controller to the pump bottom by means of the three soc- ket head screws M5. l Turn the pump again. l Plug the line card and connect the pump cable to the pump.
Purge Valve installation l Connect the mating connector with the jumper on the interlock si- gnal to start the pump.
l Screw the gas purge valve (with a torque of 2,5 Nm) as shown in the following figure.
Maintenance Page 17 SERIAL CABLE
Serial Cable installation
WASHER Removal from Service
GROWER Dismantling and Disposal
SCREW M5x80 Recommissioning
CAUTION Bottom mounting Only authorised personnel may carry out dismantling work on the vacuum pump. Before work begins, the operator of the turbomole- cular pump must fill in a form or a « Declaration of Decontamina- tion » that provides information on possible dangers and Overhaul appropriate measures. If this form has not been filled in completely and signed, the CAUTION vacuum pump may not be dismantled.
In order to achieve best efficiency and a long life the turbomolecular CAUTION pump was assembled and adjusted with precisely defined tolerances. During dismantling of the turbomolecular pump protective equip- This adjustment will be lost during dismantling of the vacuum ment and clothing must be worn. pump. u dispose of the turbomolecular pump as scrap metal It is therefore strictly recommended that any dismantling of the va- – cuum pump that is beyond of what is described in this manual shall dispose of the different components of the turbomolecular pump be done by the Busch service. in compliance with applicable regulations Meaning of the "WEEE" logo found in labels CAUTION The following symbol is applied in accordance with the EC WEEE (Waste Electrical and Electronic Equipment) Directive. This symbol (va- Improper work on the turbomolecular pump put the operating safe- lid only in countries of the European Community) indicates that the ty at risk. product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste Risk of explosion! collection system. The end user is therefore invited to contact the sup- plier of the device, whether the Parent Company or a retailer, to ini- Approval for operation will be void! tiate the collection and disposal process after checking the contractual terms and conditions of sale. Any dismantling of the turbomolecular pump that is beyond of what is described in this manual must be done by specially trained Busch service personnel only.
According to the best knowledge at the time of printing of this manual the materials used for the manufacture of the turbomolecular pump.
Product No. Certificate of Compliance CSA TM 1100 A 1381564280 969-8978**** Made in EU
Removal from Service Page 18 Dimensions Turbo TM 1100 A The following figure show the Turbo TM 1100 A outlines (dimensions are in mm)
284.86
ISO 200 F
VENT
FORELINE KF25 Water Cooling 1/4’’G 263.60
145.50 IN - OUT WATER CIRCUIT 90 ELECTRICAL 65 65
51 CONNECTOR
GAS PURGE
FORELINE KF40 135.30
UPPER VIEW ISO DN 200F VENT IN-OUT WATER CIRCUIT GAS PURGE 133.67 138
ELECTRICAL CONNECTOR
868-8962R001 (Inlet flange ISO 200 F – KF40 foreline flange)
Dimensions Page 19
Pumping speed diagram for 869-8962R001 (ISO 200F flange) turbopump model, with a 36 m3/h foreline pump.
Graph of compression ratio vs foreline pressure
Dimensions Page 20 Spare parts NOTE: when ordering spare parts or accessories acc. to the table below please always quote the type and the serial no. of the vacuum pump. This will allow Busch service to check if the vacuum pump is compa- tible with a modified or improved part. The exclusive use of genuine spare parts and consumables is a prere- quisite for the proper function of the vacuum pump and for the gran- ting of warranty, guarantee or goodwill. This parts list applies to a typical configuration of the standard vacuum pump. Depending on the specific order deviating parts data may apply.
Spare parts Page 21 Technical data
Technical data Turbo TM 1100 A N2: 3888 He: 4140 Pumping speed m3/h H2: 2628 Ar: 3744 N2: 5 x 10 7 He: 4 x 10 4 Compression ratio H2: 1,5 x 10 4 Ar: 5 x 10 8 Base pressure with recommended forepump hPa (mbar) 1 x 10 -10 * Inlet flange, nominal diameter ISO 200-F Foreline flange, nominal diameter KF 40 NW Rotational speed min-1 45660 Start-up time minutes < 5 Recommended forepump m3/h 36 Operating position Any Operating ambient temperature °C +5°C...+35°C Bakeout temperature °C 80°C at inlet flange max.(ISO flange) Vibration level mm < 0.01 at inlet flange Lubricant Permanent lubrication Cooling requirements Water Minimum l/min 3.5 flow Coolant water Temperature °C +10...+20
Pressure bar 3...5 Noise level (EN ISO 2151) dB(A) <45 (at 1 meter) Power supply: Input voltage : Vac 100-240 Input frequence : Hz 50-60 Max input power : VA 600 Stand-by power W 30 to 35 400 W using Nitrogen or lighter gases (WATER cooling setting) Max operating power 260 W using ARGON (AIR cooling setting) Protection fuse A 1 x 6.3 (Navigator Controller) Power cable With European or NEMA plug 3 meters long (optional) RS232 cable with a 9-pin D type male connector and a 9-pin D fe- Serial communication (Navigator kit) male connector, and Navigator software (optional) Installation category II Pollution degree 2 Storage temperature -20°C to +70°C Weight (flange ISO 200) kg 26.7 Navigator Controller kg 5.4
*According to standard DIN 28428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with a Turbopump fitted with a Conflat flange and using the recommended pre-vacuum pump.
Technical data Page 22 EC Declaration of Conformity NOTE: This Declaration of Conformity and the -mark affixed to the nameplate are valid for the vacuum pump within the Busch-scope of delivery. When this vacuum pump is integrated into a larger machinery the manufacturer of the larger machinery (this can be operator, too) must conduct the conformity assessment process acc. to the Directive Machinery 2006/42/EC for the larger machine, issue the Declaration of Conformity for it and af- fix the -mark. We Ateliers Busch S.A. Zone Industrielle 2906 Chevenez Switzerland represented in the European Union by Dr.-Ing. K. Busch GmbH Schauinslandstr. 1 79689 Maulburg Germany declare that the vacuum pumps Turbo TM 1100 A in accordance with the European Directives “Machinery” 2006/42/EC, “Electromagnetic Compatibility” 2004/108/EC have been designed and manufactured to the following specifications:
Standards Title of the standard Harmonised standards UNI EN 292-1 Fundamental concepts, general design principles - terminology, basic methodology; Part 1 UNI EN 292-2 Fundamental concepts, general design principles - Specifications and technical principles; Part 2 EN 55011CI.A Industrial, scientific and medical (ISM) radio-frequency equipment - Radio disturbance characteristics - Limits and methods of measurement EN ISO 13857 Safety of machinery - Safety distances to prevent hazard zones being reached by upper and lower limbs EN 1012-2 Compressors and vacuum pumps - Safety requirements - Part 2 EN 61010-1 Electrical equipment of machines - Part 1: EN 61000-4-2 Electromagnetic compatibility (EMC) – Electrostatic discharge immunity test; Part 2 EN 61000-4-3 Electromagnetic compatibility (EMC) – Radiated, radio-frequency, electromagnetic field immunity test; Part 3 EN 61000-4-4 Electromagnetic compatibility (EMC) – Testing and measurement techniques - Electrical fas transient/burst immunity test ; Part 4 EN 61000-4-5 Electromagnetic compatibility (EMC) – Testing and measurement techniques - Surge immunity test; Part 5 EN ISO 2151 Acoustics - Noise test code for compressors and vacuum pumps - Engineering method (grade 2)
Manufacturer Mandatory within the EC: Person authorised to compile the technical file
Christian Hoffmann Dr.-Ing. Karl Busch Gerd Rohweder General director General director Product manager
Appendix: Power 2.5 W
TV 141 Navigator vent valve Bakeout temperature 60°C
Weight 140 g (0.3 lbs)
2 The following figure shows the valve's overall dimensions.
20 15 3 1
4
43.5
1 Vent valve 2 Valve-controller cable 3 Control unit 4 Input connector 49.0 17.0 Overview Figure 1 Dimensions in mm The “TV 141 Navigator Vent Valve” kit, consisting of a control unit and valve, is a complete unit for automatic pump venting when the pump is switched off or during a power failure. The valve is normally open during power off conditions, is electromechanically activated and Installation secured (Viton-sealed) by means of an M8 thread with related O-ring The following figures show the various components of the TV 141 Na- on the high vacuum port. The air input into the valve is filtered by vigator Vent Valve kit. These components come disassembled and it is means of a specific filter located on the valve’s own air inlet. therefore up to the customer to assemble the kit. The control unit is powered by the Turbo-V controller which is not sui- table for rack mounting. The control unit is activated with a preset delay of approximately 0.8 seconds to avoid undesired venting during a temporary power failure O-ring Valve/ coil Adapter and to allow the closure of the system valves before venting. Air filter Vent valve
Valve status Normally open (closed when power is supplied)
Vacuum connection M8 thread Valve-controller cable Air intake filter Sintered bronze
Hole dimension 1.2 mm (0.05 inch)
Pressure ranges 10-6 mbar to 1 bar (10-7 Torr to 760 Torr)
Air intake adapter Æ 6.35 mm (1/4 inch) Figure 2.a Kit Components Leak rate £ 1 x 10-7 mbar l/s
Life span 1 million cycles
Input voltage 24 Vdc ± 10 %
Appendix: Page 25 between the electrovalve control unit to the pump’s controller. Use the velcrose provided to secure the controller box.
Output connector Disposal Meaning of the “WEEE” logo found in labels Control unit pump controller The following symbol is applied in accordance with the EC WEEE (Waste connection cable Electrical and Electronic Equipment) Directive. This symbol (valid only in countries of the European Community) indica- tes that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system. The end user is therefore invited to contact the supplier of the device, Valve control unit whether the Parent Company or a retailer, to initiate the collection and disposal process after checking the contractual terms and conditions of Input connector sale.
Figure 2.b Kit Components
CAUTION Technical data When assembling the kit, be careful not to unscrew the coil securing ring and nut inside the valve. Control unit l Once the kit is assembled, install it on the pump. Input voltage 24 Vdc ± 10 % l Remove the screw cap from the pump, then secure the valve to the pump using a 16 mm wrench making sure to tighten the nut with a torque equivalent to 2.5 Nm. - power (max) 2.5 W The following figure shows an example of installation. Output voltage (max) 24 Vcc ± 10 %
- power (max) 1,2 W
Delay Approx. 0.8 seconds
Operating temperature 0 to 40°C
Storage temperature -20 to 50°C Valve Connection cables
Control unit Input 120 mm (4.72 inches)
Output from valve 200 mm (7.87 inches) Connection cables
Figure 3 Installation
CAUTION
To avoid damaging the pump, do not tighten the nut with a torque greater than 2.5 Nm.
Upon completion of the mechanical installation, attach the connection cable between the valve to the control unit, and the connection cable
Appendix: Page 26 Gas purge valve 87-900-890-01(A) where: General - MN2 is the molecular weight of Nitrogen
The gas purge valve is a protection device to protect the pump bea- - Mx is the molecular weight of the other gas. rings against particulate and corrosive gases that could move into the pump. For example the gas purge flow rate for 1000 mbar of Ar for the single This device is available with: tube valve is: - Large leak (see Fig. 1).
Q » QN2 · fAr = QN2 ·Ö 28 40
where QN2 is the corresponding nitrogen flowrate at 1000 mbar.
Operation notes Always use no less than Agilent minimum suggested purge flow rates to properly purge the pump (see the relevant pump manual). Please note that you can use all the purging flows between the minimum spe- cified into the instruction manual and 3500 sccm, if your system is able Model 969-9242 to pump and withstand higher flow-rates. Always operate the pump with gas purge on: during pump running, during stops, even if corrosive gases were not flowing. This provides Fig. 1 Gas purge valve model protection against particulate that could move into the pump. Non-observation of this basic, simple rules could affect pump warranty. The following table shows the model part number: NOTE: The Soft start is recommended for the installation of the pump and may be disabled when the pump is continuously operated and the interval between different run is not more than 1 week. Fittings/ Version Large Leak
Swagelock 7/16" 969-9242 M12
The valve is made with a thin calibrate sapphire orifice mounted into a cartridge, with two special PTFE membranes on each tube side. This is to avoid any particulate, powder and any liquid to come into and occlude the thin hole. The pieces are mounted altogether into a SST leak tight body.
Gas purge valve characteristics
The Large leak version of the valve is suited for a particular application: - Large leak (~ 20 sccm at 1000 mbar) for heavy corrosive operations -5 (etching, CVD), when the partial pressure of the corrosive gas is >10 mbar. Fig. 2 Installation diagram 1 Purge gas line If you wish to use a different flowrate, you might change the supply 2 Pressure regulator pressure. For a given supply pressure value, the gas purge valve can 3 Gas purge valve give you a fixed flowrate value. 4 Gas purge port 5 Forevacuum pump Please note that the flow amount does not depend on the vacuum side 6 Turbopump pressure of the valve, if the pressure is lower than ~ 0.5 of the supply 7 Vent valve pressure.
Refers to the following diagrams to find the precise correlation. These diagrams refer to dry nitrogen and argon, for other gases you may cor- rect the flowrate according to the calibration factor:
fx = Mx M N2
Page 27 Vent procedure Venting may be done in three different ways:
1. Through the vent port (using vent valve or vent device). In this case the only precaution required is to keep the gas purge port on even during vent procedure.
2. Through the gas purge port The maximum air flow allowed for venting through the gas purge port is 3500 sccm (58.3 mbarl/sec). If the required flow for venting the tur- bopump is higher than the flow allowed by the gas purge valve, a “T” connector can be put on the purge port. On one side is connected the vent valve, and on the other side is connected the gas purge valve.
CAUTION
When venting is performed through the gas purge port, be sure that the foreline pump is on, in order to avoid overpressure.
3. Through the chamber The vent flow rate into the chamber must be less than three times the chamber volume (in litres) multiplied by the flow rate through the gas purge port. This is done to maintain the pressure into the pump body higher than into the chamber in order to avoid any corrosive or powder flow-back.
E.g. chamber volume : 250 litres; gas purge flow: 20 sccm (0.33 mbarl/sec)
chamber venting flow rate = 3x250x20 = 15000 sccm
and the venting time will be:
chamber venting = = (chamber volumex1000)/chamber flow rate= = (250 x 1000)/15000 = 17 min.
Page 28 Fig. 3 Gas purge valve flow rate vs supplying pressure for Nitrogen
Fig. 4 Gas purge valve flow rate vs supplying pressure for Argon
Page 29 Note Note Busch – All over the World in Industry www.busch-vacuum.com Argentina Finland Malaysia Spain Busch Argentina S.R.L. Busch Vakuumteknik Oy Busch Malaysia Sdn Bhd. Busch Ibérica S.A. 4&6, Jalan Taboh 33/22, Seksyen 33 Santo Domingo 3076 Sinikellontie 4 Pol. Ind. Coll de la Manya 01300 Vantaa Shah Alam Technology Park C1293AGN-Capital Federal C/ Jaume Ferran, 6-8 Phone: +358 9 774 60 60 40400 Shah Alam Buenos Aires 08403 Granollers Phone: +54 11 4302 8183 Fax: +358 9 774 60 666 Selangor Darul Ehsan e-mail: [email protected] Phone: +60 3 5122 2128 Phone: +34 93 861 61 60 Fax: +54 11 4301 0896 Fax: +34 93 840 91 56 e-mail: [email protected] Fax +60 3 5122 2108 e-mail: [email protected] e-mail: [email protected] France Australia Busch France S.A.S. Mexico 16, Rue du Bois Chaland Sweden Busch Australia Pty. Ltd. 91090 Lisses Busch Vacuum Mexico S. de R.L. de C.V. 30 Lakeside Drive Busch Vakuumteknik AB Phone: +33 16989 8989 Tlaquepaque 4865, Los Altos Broadmeadows, Vic. 3047 Fax: +33 16989 8958 Monterrey, Nuevo Leon Bråta Industriområde Phone: +61 3 93 55 06 00 e-mail: [email protected] Mexico 64370 435 33 Mölnlycke Fax: +61 3 93 55 06 99 Phone: +52 81 8311-1385 Phone: +46 31-338 00 80 e-mail: [email protected] Fax: +52 81 8311-1386 Fax: +46 31-338 00 89 e-mail: [email protected] e-mail: [email protected] Germany Austria Dr.-Ing. K. Busch GmbH Schauinslandstrasse 1 Netherlands Busch Austria GmbH 79689 Maulburg Switzerland Industriepark Nord Phone: +49 7622 681-0 Busch B.V. 2100 Korneuburg Fax: +49 7622 6 5484 Pompmolenlaan 2 Busch AG Phone: +43 2262 / 756 65-0 e-mail: [email protected] 3447 GK Woerden Waldweg 22 Fax: +43 2262 / 756 65-20 Phone: +31 348-462300 4312 Magden e-mail: [email protected] Fax: +31 348-422939 Phone: +41 61 / 845 90 90 e-mail: [email protected] Fax: +41 61 / 845 90 99 Hungary e-mail: [email protected] Belgium Busch Vacuum Kft. Gyári út 23. New Zealand Busch N.V. 2310 Szigetszentmiklós Busch New Zealand Ltd. Kruinstraat 7 Phone: +36 24 887 308 Unit D, 41 Arrenway Drive Taiwan 9160 Lokeren Fax: +36 24 887 309 Albany, Auckland 1330 Busch Taiwan Corporation Phone: +32 9 / 348 47 22 e-mail: [email protected] Phone: +64 9 414 7782 1F. No. 69, Sec. 3, Beishen Road Fax: +32 9 / 348 65 35 Fax: +64 9 414 7783 e-mail: [email protected] e-mail: [email protected] Shenkeng Township, Taipei County 222 India Phone: +886 2 2662 0775 Brazil Busch Vacuum India Pvt Ltd. Fax: +886 2 2662 0796 103, Sector 5 Norway e-mail: [email protected] Busch do Brasil Ltda. IMT Manesar Busch Vakuumteknikk AS Estrada Municipal Santo Gastaldi, 160 Gurgaon Hestehagen 2 13240-000 Jarinu-SP Haryana - 122 050 1440 Drøbak Phone: +55 11 4016 1400 Phone: +91 124 4050091 Phone: +47 64 98 98 50 Thailand Fax: +55 11 4016 5399 Fax: +91 124 2292103 Fax: +47 64 93 66 21 e-mail: [email protected] e-mail: [email protected] e-mail: [email protected] Busch Vacuum (Thailand) Co., Ltd. 29/10 Moo 7, Soi Poolchareon, Bangna-Trad Road, Ireland Poland Bangchalong, Bangplee Canada Samutprakarn 10540 Busch Polska Sp. z o.o. Busch Vacuum Technics Inc. Busch Ireland Ltd. Phone: +66 2 3370360-2 A10-11 Howth Junction Business Centre Ul. Chopina 27 1740, Lionel Bertrand Fax: +66 2 3370363 Kilbarrack, Dublin 5 Boisbriand, Québec J7H 1N7 e-mail: [email protected] Phone: +1 450 435 6899 Phone: +353 1 832 1466 87-800 Wloclawek Fax: +1 450 430 5132 Fax: +353 1 832 1470 Phone: +48 54 2315400 e-mail: [email protected] e-mail: [email protected] Fax: +48 54 2327076 e-mail: [email protected] Turkey Israel VAKUTEK Chile Portugal Emlak Kredi Ishani No: 179 Busch Chile S. A. Busch Israel Ltd. 34672 Üsküdar-Istanbul 1 Mevo Sivan Street Busch lbérica S.A., Sucursal em Portugal Calle El Roble N° 375-G Marco da Raposa - Z.I. EN 1 Norte Phone: +90 216 310 0573 Lampa - Santiago Qiryat Gat 82022, Israel Phone: +972 (0)8 6810485 3750-753 Raso de Travassô - Agueda Fax: +90 216 343 5126 Phone: +56 2 3765136 Aveiro, Portugal e-mail: [email protected] Fax: +56 2 7387092 Fax +972 (0)8 6810486 e-mail: [email protected] Phone: +351 234 648 070 e-mail: [email protected] Fax: +351 234 648 068 e-mail: [email protected] United Arab Emirates Italy China Busch Vacuum FZE Busch Italia S.r.l. Russia A-3/71, Sharjah Airport International Free zone (SAIF-Zone), Busch Vacuum (Shanghai) Co., Ltd Via Ettore Majorana, 16 No.5, Lane 195 Xipu Road Busch Vacuum Russia OOO P.B.No: 121855, Sharjah 20054 Nova Milanese Kotlyakovskaya str., 6/9 Songjiang Industrial Estate East New Zone Phone: +39 0362 370 91 Phone: +971 06 5529 174 Shanghai 201611 PRC 115201 Moscow Fax: +971 6 5528 653 Fax: +39 0362 370 999 Phone: +7 495 6486726 Phone: +86 (0)21 67600800 e-mail: [email protected] e-mail: [email protected] Fax: +86 (0)21 67600700 Fax: +7 495 6486724 e-mail: [email protected] e-mail: [email protected] Japan United Kingdom Czech Republic Nippon Busch K.K. Singapore Busch (UK) Ltd 1-23-33, Megumigaoka Busch Vacuum Singapore Pte. Ltd. Busch Vakuum s.r.o. Hiratsuka City, Kanagawa Hortonwood 30 77A Joo Koon Circle Telford Shropshire TF1 7YB Jugoslávská 868/4a Japan 259-1220 Singapore 629098 Phone: +44 1952 677 432 613 00 Brno Phone: +81 463-50-4000 Phone: +65 6488 0866 Phone: +420 530 504 410 Fax: +81 463-50-4004 Fax: +65 6288 0877 Fax: +44 1952 677 423 Fax: +420 530 504 420 e-mail: [email protected] e-mail: [email protected] e-mail: [email protected] e-mail: [email protected]
Korea South Africa USA Denmark Busch SVG Korea, Inc Busch Vacuum South Africa (Pty) Ltd. Busch Vakuumteknik A/S 189-51, Soicheon-ro, Majang-myun, 87 Mimetes Road Busch LLC Parallelvej 11 Icheon-si, Gyunggi-do, 467-813, Denver 516-B Viking Drive 8680 Ry Republic of Korea Johannesburg Virginia Beach, VA 23452 Phone: +45 87 88 07 77 Phone: +82 31 645 2700 Phone: +27 11 856 0650/6 Phone: +1 757 463-7800 Fax: +45 87 88 07 88 Fax: +82 31 631 2898 Fax: +27 11 856 0625 Fax: +1 757 463 7407 e-mail: [email protected] e-mail: [email protected] e-mail: [email protected] e-mail: [email protected]