Theory of Electrochemical Kinetics Based on Nonequilibrium
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Characterization of Copper Electroplating And
CHARACTERIZATION OF COPPER ELECTROPLATING AND ELECTROPOLISHING PROCESSES FOR SEMICONDUCTOR INTERCONNECT METALLIZATION by JULIE MARIE MENDEZ Submitted in partial fulfillment of the requirements For the degree of Doctor of Philosophy Dissertation Advisor: Dr. Uziel Landau Department of Chemical Engineering CASE WESTERN RESERVE UNIVERSITY August, 2009 CASE WESTERN RESERVE UNIVERSITY SCHOOL OF GRADUATE STUDIES We hereby approve the thesis/dissertation of _____________________________________________________ candidate for the ______________________degree *. (signed)_______________________________________________ (chair of the committee) ________________________________________________ ________________________________________________ ________________________________________________ ________________________________________________ ________________________________________________ (date) _______________________ *We also certify that written approval has been obtained for any proprietary material contained therein. TABLE OF CONTENTS Page Number List of Tables 3 List of Figures 4 Acknowledgements 9 List of Symbols 10 Abstract 13 1. Introduction 15 1.1 Semiconductor Interconnect Metallization – Process Description 15 1.2 Mechanistic Aspects of Bottom-up Fill 20 1.3 Electropolishing 22 1.4 Topics Addressed in the Dissertation 24 2. Experimental Studies of Copper Electropolishing 26 2.1 Experimental Procedure 29 2.2 Polarization Studies 30 2.3 Current Steps 34 2.3.1 Current Stepped to a Level below Limiting Current 34 2.3.2 Current Stepped to the Limiting -
The Practice of Chemistry Education (Paper)
CHEMISTRY EDUCATION: THE PRACTICE OF CHEMISTRY EDUCATION RESEARCH AND PRACTICE (PAPER) 2004, Vol. 5, No. 1, pp. 69-87 Concept teaching and learning/ History and philosophy of science (HPS) Juan QUÍLEZ IES José Ballester, Departamento de Física y Química, Valencia (Spain) A HISTORICAL APPROACH TO THE DEVELOPMENT OF CHEMICAL EQUILIBRIUM THROUGH THE EVOLUTION OF THE AFFINITY CONCEPT: SOME EDUCATIONAL SUGGESTIONS Received 20 September 2003; revised 11 February 2004; in final form/accepted 20 February 2004 ABSTRACT: Three basic ideas should be considered when teaching and learning chemical equilibrium: incomplete reaction, reversibility and dynamics. In this study, we concentrate on how these three ideas have eventually defined the chemical equilibrium concept. To this end, we analyse the contexts of scientific inquiry that have allowed the growth of chemical equilibrium from the first ideas of chemical affinity. At the beginning of the 18th century, chemists began the construction of different affinity tables, based on the concept of elective affinities. Berthollet reworked this idea, considering that the amount of the substances involved in a reaction was a key factor accounting for the chemical forces. Guldberg and Waage attempted to measure those forces, formulating the first affinity mathematical equations. Finally, the first ideas providing a molecular interpretation of the macroscopic properties of equilibrium reactions were presented. The historical approach of the first key ideas may serve as a basis for an appropriate sequencing of -
Andrea Deoudes, Kinetics: a Clock Reaction
A Kinetics Experiment The Rate of a Chemical Reaction: A Clock Reaction Andrea Deoudes February 2, 2010 Introduction: The rates of chemical reactions and the ability to control those rates are crucial aspects of life. Chemical kinetics is the study of the rates at which chemical reactions occur, the factors that affect the speed of reactions, and the mechanisms by which reactions proceed. The reaction rate depends on the reactants, the concentrations of the reactants, the temperature at which the reaction takes place, and any catalysts or inhibitors that affect the reaction. If a chemical reaction has a fast rate, a large portion of the molecules react to form products in a given time period. If a chemical reaction has a slow rate, a small portion of molecules react to form products in a given time period. This experiment studied the kinetics of a reaction between an iodide ion (I-1) and a -2 -1 -2 -2 peroxydisulfate ion (S2O8 ) in the first reaction: 2I + S2O8 I2 + 2SO4 . This is a relatively slow reaction. The reaction rate is dependent on the concentrations of the reactants, following -1 m -2 n the rate law: Rate = k[I ] [S2O8 ] . In order to study the kinetics of this reaction, or any reaction, there must be an experimental way to measure the concentration of at least one of the reactants or products as a function of time. -2 -2 -1 This was done in this experiment using a second reaction, 2S2O3 + I2 S4O6 + 2I , which occurred simultaneously with the reaction under investigation. Adding starch to the mixture -2 allowed the S2O3 of the second reaction to act as a built in “clock;” the mixture turned blue -2 -2 when all of the S2O3 had been consumed. -
A Brief Introduction to the History of Chemical Kinetics
Chapter 1 A Brief Introduction to the History of Chemical Kinetics Petr Ptáček, Tomáš Opravil and František Šoukal Additional information is available at the end of the chapter http://dx.doi.org/10.5772/intechopen.78704 Abstract This chapter begins with a general overview of the content of this work, which explains the structure and mutual relation between discussed topics. The following text provides brief historical background to chemical kinetics, lays the foundation of transition state theory (TST), and reaction thermodynamics from the early Wilhelmy quantitative study of acid-catalyzed conversion of sucrose, through the deduction of mathematical models to explain the rates of chemical reactions, to the transition state theory (absolute rate theory) developed by Eyring, Evans, and Polanyi. The concept of chemical kinetics and equilib- rium is then introduced and described in the historical context. Keywords: kinetics, chemical equilibrium, rate constant, activation energy, frequency factor, Arrhenius equation, Van’t Hoff-Le Châtelier’s principle, collision theory, transition state theory 1. Introduction Modern chemical (reaction) kinetics is a science describing and explaining the chemical reac- tion as we understand it in the present day [1]. It can be defined as the study of rate of chemical process or transformations of reactants into the products, which occurs according to the certain mechanism, i.e., the reaction mechanism [2]. The rate of chemical reaction is expressed as the change in concentration of some species in time [3]. It can also be pointed that chemical reactions are also the subject of study of many other chemical and physicochemical disciplines, such as analytical chemistry, chemical thermodynamics, technology, and so on [2]. -
Chapter 14 Chemical Kinetics
Chapter 14 Chemical Kinetics Learning goals and key skills: Understand the factors that affect the rate of chemical reactions Determine the rate of reaction given time and concentration Relate the rate of formation of products and the rate of disappearance of reactants given the balanced chemical equation for the reaction. Understand the form and meaning of a rate law including the ideas of reaction order and rate constant. Determine the rate law and rate constant for a reaction from a series of experiments given the measured rates for various concentrations of reactants. Use the integrated form of a rate law to determine the concentration of a reactant at a given time. Explain how the activation energy affects a rate and be able to use the Arrhenius Equation. Predict a rate law for a reaction having multistep mechanism given the individual steps in the mechanism. Explain how a catalyst works. C (diamond) → C (graphite) DG°rxn = -2.84 kJ spontaneous! C (graphite) + O2 (g) → CO2 (g) DG°rxn = -394.4 kJ spontaneous! 1 Chemical kinetics is the study of how fast chemical reactions occur. Factors that affect rates of reactions: 1) physical state of the reactants. 2) concentration of the reactants. 3) temperature of the reaction. 4) presence or absence of a catalyst. 1) Physical State of the Reactants • The more readily the reactants collide, the more rapidly they react. – Homogeneous reactions are often faster. – Heterogeneous reactions that involve solids are faster if the surface area is increased; i.e., a fine powder reacts faster than a pellet. 2) Concentration • Increasing reactant concentration generally increases reaction rate since there are more molecules/vol., more collisions occur. -
Water Splitting by Heterogeneous Catalysis
!"#$ #"%"" &' () * ( +# ,% - . ( (.( ( . %/ .0! 1 ( % 2 3 . 4 . 5 % . . % . . . . . . 3 % !# 3 ( 3 ( 3 ( 3 %/. . - % . (. 6 7 % ( 2!0! . (/ (3 . 7 % ( ( 3 % . 3 ( %/ . 8 9 3 8 % ( :;0 9 . <= 3 9 . % ( . ( 3 > % !"#$ ?@@ %% @ A B ?? ? ? #;C#C# ,8D$CD#$$D$":D! ,8D$CD#$$D$";"C ! " # $ (#" D# WATER SPLITTING BY HETEROGENEOUS CATALYSIS Henrik Svengren Water splitting by heterogeneous catalysis Henrik Svengren ©Henrik Svengren, Stockholm University 2017 ISBN print 978-91-7797-039-2 ISBN PDF 978-91-7797-040-8 Printed in Sweden by Universitetsservice US-AB, Stockholm 2017 Distributed by the Department of Materials and Environmental Chemistry To my beloved family Cover image + Heterogeneous catalysis of water oxidation according to 2H2O ĺ O2 + 4H on CoSbO4/CoSb2O6, investigated in Paper II. The figure is composed of SEM- and TEM images, structural drawings, reactant- and product molecules. i Examination Faculty opponent Docent Tomas Edvinsson Solid State Physics Department of Engineering Sciences Uppsala University, -
Electrochemical Characterisation of Porous Cathodes in the Polymer Electrolyte Fuel Cell
ELECTROCHEMICAL CHARACTERISATION OF POROUS CATHODES IN THE POLYMER ELECTROLYTE FUEL CELL Frédéric Jaouen Doctoral Thesis Department of Chemical Engineering and Technology Applied Electrochemistry Kungl Tekniska Högskolan Stockholm 2003 TRITA-KET R175 ISSN 1104-3466 ISRN KTH/KET/R-175-SE ISBN 91-7283-450-1 ELECTROCHEMICAL CHARACTERISATION OF POROUS CATHODES IN THE POLYMER ELECTROLYTE FUEL CELL Frédéric Jaouen Doctoral Thesis Department of Chemical Engineering and Technology Applied Electrochemistry Kungl Tekniska Högskolan Stockholm 2003 AKADEMISK AVHANDLING som med tillstånd av Kungl Tekniska Högskolan i Stockholm, framlägges till offentlig granskning för avläggande av teknisk doktorsexamen fredagen den 25 april 2003, kl. 10.15 i Kollegiesalen, Valhallavägen 79, Kungl Tekniska Högskolan, Stockholm. Abstract Polymer electrolyte fuel cells (PEFC) convert chemical energy into electrical energy with higher efficiency than internal combustion engines. They are particularly suited for transportation applications or portable devices owing to their high power density and low operating temperature. The latter is however detrimental to the kinetics of electrochemical reactions and in particular to the reduction of oxygen at the cathode. The latter reaction requires enhancing by the very best catalyst, today platinum. Even so, the cathode is responsible for the main loss of voltage in the cell. Moreover, the scarce and expensive nature of platinum craves the optimisation of its use. The purpose of this thesis was to better understand the functioning of the porous cathode in the PEFC. This was achieved by developing physical models to predict the response of the cathode to steady-state polarisation, current interruption (CI) and electrochemical impedance spectroscopy (EIS), and by comparing these results to experimental ones. -
Reaction Rates: Chemical Kinetics
Chemical Kinetics Reaction Rates: Reaction Rate: The change in the concentration of a reactant or a product with time (M/s). Reactant → Products A → B change in number of moles of B Average rate = change in time ∆()moles of B ∆[B] = = ∆t ∆t ∆[A] Since reactants go away with time: Rate=− ∆t 1 Consider the decomposition of N2O5 to give NO2 and O2: 2N2O5(g)→ 4NO2(g) + O2(g) reactants products decrease with increase with time time 2 From the graph looking at t = 300 to 400 s 0.0009M −61− Rate O2 ==× 9 10 Ms Why do they differ? 100s 0.0037M Rate NO ==× 3.7 10−51 Ms− Recall: 2 100s 0.0019M −51− 2N O (g)→ 4NO (g) + O (g) Rate N O ==× 1.9 10 Ms 2 5 2 2 25 100s To compare the rates one must account for the stoichiometry. 1 Rate O =×× 9 10−−61 Ms =× 9 10 −− 61 Ms 2 1 1 −51−−− 61 Rate NO2 =×× 3.7 10 Ms =× 9.2 10 Ms Now they 4 1 agree! Rate N O =×× 1.9 10−51 Ms−−− = 9.5 × 10 61Ms 25 2 Reaction Rate and Stoichiometry In general for the reaction: aA + bB → cC + dD 11∆∆∆∆[AB] [ ] 11[CD] [ ] Rate ====− − ab∆∆∆ttcdtt∆ 3 Rate Law & Reaction Order The reaction rate law expression relates the rate of a reaction to the concentrations of the reactants. Each concentration is expressed with an order (exponent). The rate constant converts the concentration expression into the correct units of rate (Ms−1). (It also has deeper significance, which will be discussed later) For the general reaction: aA+ bB → cC+ dD x and y are the reactant orders determined from experiment. -
1 Electrochemical Kinetics of Corrosion and Passivity the Basis
Electrochemical Kinetics of Corrosion and Passivity The basis of a rate expression for an electrochemical process is Faraday’s law: Ita m = nF Where m is the mass reacted, I is the measured current in ampere, t is the time, a is the atomic weight, n the number of electrons transferred and F is the Faraday constant (96500 Cmol-1). Dividing Faraday’s law by the surface area A and the time t leads to an expression for the corrosion rate r: m ia r = = tA nF With the current density i defined as i = I/A. Exchange current density: We consider the reaction for the oxidation/reduction of hydrogen: rf + - 2H + 2e H2 rr 0 + This reaction is in the equilibrium state at the standard half cell potential e (H /H2). This means that the forward reaction rate rf and the reverse reaction rate rr have the same magnitude. This can be written as: i a r = r = 0 f r nF In this case is i0 the exchange current density equivalent to the reversible rate at equilibrium. In other words, while the standard half cell potential e0 is the universal thermodynamic parameter, i0 is the fundamental kinetic parameter of an electrochemical reaction. The exchange current density cannot be calculated. It has to be measured for each system. The following figure shows that the exchange current density for the hydrogen reaction depends strongly on the electrode material, whereas the standard half cell potential remains the same. 1 Electrochemical Polarization: Polarization η is the change in the standard half cell potential e caused by a net surface reaction rate. -
An Investigation Into Aqueous Titanium
An Investigation into Aqueous Titanium Speciation Utilising Electrochemical Methods for the Purpose of Implementation into the Sulfate Process for Titanium Dioxide Manufacture Samala Shepherd, BSc. (Hons) Masters of Philosophy in Chemistry University of Newcastle March, 2013 STATEMENT OF ORIGINALITY This thesis contains no material which has been accepted for the award of any other degree or diploma in any university or other tertiary institution and, to the best of my knowledge and belief, contains no material previously published or written by another person, except where due reference has been made in the text. I give consent to this copy of my thesis, when deposited in the University Library**, being made available for loan and photocopying subject to the provisions of the Copyright Act 1968. **Unless an Embargo has been approved for a determined period. Samala L. Shepherd i Acknowledgements There are many people who have helped me and contributed to my work in a number of ways and I’d like to thank them. I’d like to thank BHP Billiton Newcastle Technology Centre for making this project possible. The ARC for support and funding. Dr. Scott Donne for the vast knowledge he provided me with and the friendship and support. Thank you to Carolyn Freeburn, Vicki Thompson, and Stephen Hopkins for the ‘store/equipment room’ when I was in need. Thank you to Dianna Brennan for keeping me supplied. Michael Fitzgerald for his continued support. Last but not least a big thanks to my family, they are stuck with me but bare the burden with smiles and support and I thank them greatly. -
Cathodic Hydrogen Evolution Reaction on Gold Catalyzed by Proton-Carriers
Int. J. Electrochem. Sci., 9 (2014) 4465 - 4477 International Journal of ELECTROCHEMICAL SCIENCE www.electrochemsci.org Cathodic Hydrogen Evolution Reaction on Gold Catalyzed by Proton-Carriers Raluca Creţu, Andrea Kellenberger, Mihai Medeleanu, Nicolae Vaszilcsin* Universitatea Politehnica Timişoara, Faculty of Industrial Chemistry and Environmental Engineering, 300006 Piata Victoriei 2, Timişoara, Romania *E-mail: [email protected] Received: 6 March 2014 / Accepted: 3 April 2014 / Published: 19 May 2014 Several amines with aromatic and aliphatic substituents have been investigated as catalysts in the solution for the hydrogen evolution reaction, based on their ability to increase the concentration of protons in the electric double layer at the interface, by transporting protons from the bulk solution to the cathode surface. The highest electrocatalytic activity, expressed by the activation energy for hydrogen evolution reaction has been obtained for methylamine, 4-chloroaniline and aniline. In this series, the catalytic activity is primarily influenced by the molecular coverage area, which determines the number of protonated molecules that can adsorb on the cathode surface. The second factor that affects catalytic activity is the magnitude of the dipole moment, which determines a preferential orientation of the protonated molecule at the interface. As a consequence, methylamine shows the highest catalytic activity due to its low coverage area and 4-chloroaniline has a stronger effect than aniline due to its larger dipole moment induced by the electron-withdrawing inductive effect of chlorine. A mechanism for hydrogen evolution reaction in the presence of amines has been proposed, where both hydronium and ammonium ions are involved in the charge transfer process. Keywords: Hydrogen evolution reaction, proton carriers, Tafel plots, Arrhenius plots, Charge transfer coefficient 1. -
Empirical Chemical Kinetics
Empirical Chemical Kinetics time dependence of reactant and product concentrations e.g. for A + 2B → 3C + D d[A] 1 d[B] 1 d[C] d[D] rate =− =− = = d2d3ddtttt =ν In general, a chemical equation is 0∑ ii R i nt()− n (0 ) The extent of a reaction (the advancement) = ii ν i For an infinitesmal advancement dξ each reactant/product =ν ξ concentration changes by d[Ri ]i d . d1d[R]ξ By definition, the rate == i ν ddtti Reaction rates usually depend on reactant concentrations, e.g., rate= k [A]xy [B] order in B total order = x+y rate constant In elementary reaction steps the orders are always integral, but they may not be so in multi-step reactions. The molecularity is the number of molecules in a reaction step. Rate Laws d[A] Zero order: −=k dt 0 [A] = [A]00 -[A]t kt [A]0 t1 = 2 2k 0 0 t −=d[A] First order: k1[A] [A] ln[A] dt − = kt1 [A]t [A]0 e ln 2 0 t 0 t t1 = 2 k1 d[A] 2 Second order: −=2[A]k [A] dt 2 [A] [A] = 0 t + 12[A]kt20 0 t -1=+ -1 [A]t [A]02 2kt 1 t1 = 2 2[A]k20 [A]-1 0 t Second-order Kinetics: Two Reactants A + B k → products da rate=− =kab a = [A], b =[B] dt =− − ka()()00 x b x ddxa Since aa=− x, =− 0 ddtt dx So =−ka()() x b − x dt 00 x dx kt = ∫ ()()−− 0 axbx00 −111x =−dx ()−−−∫ ()() ab000 ax 0 bx 0 −1 ab = ln 0 ()− ab00 ab 0 or more usefully, aa=+−0 ln ln ()abkt00 bb0 Data Analysis “Classical” methods of data analysis are often useful to explore the order of reactions, or to display the results (e.g.