About the Authors Authors

1625

Aditya Aryasomayajula Chapter C.16

McMaster University Dr Aditya Aryasomayajula received his PhD in Electrical Engineering from the Dept. of Mechanical Engineering Technical University Dresden. He worked as a Postdoctoral Fellow at the European Hamilton, Canada Molecular Biology Laboratory on microﬂuidics and genomics, before joining Mc- [email protected], Master University as a Postdoctoral Fellow researching microﬂuidics, electrochemical [email protected] sensors, and bio-sensing technology.

W. Robert Ashurst Chapter I.39

Auburn University Dr W. Robert Ashurst is currently the Uthlaut Family Associate Professor of Chemical Dept. of Chemical Engineering Engineering at Auburn University. He received his PhD in Chemical Engineering from Auburn, USA the University of California at Berkeley. His research focuses on design of molecular [email protected] precursors for advanced monolayer ﬁlms, tribology at the micro and nanoscale, and the inﬂuence of surface chemical treatments on micro and nanoscale devices.

Massood Z. Atashbar Chapter A.3

Western Michigan University Professor Massood Z. Atashbar received degrees in Electrical Engi- Dept. of Electrical & Computer neering from Isfahan University of Technology and Sharif University Engineering of Technology and in 1998 a PhD from RMIT University, Melbourne. Kalamazoo, USA After a postdoctoral at Pennsylvania State University, University Park, he [email protected] joined the Electrical and Computer Engineering Department at Western Michigan University, where he currently is a Professor. His research interests include physical and chemical microsensors development, advanced signal processing, and engineering education.

Wolfgang Bacsa Chapter B.8

Centre National de la Recherche Professor Wolfgang S. Bacsa received his PhD from the Swiss Federal Scientifique, Université de Toulouse Institute of Technology (Zurich, 1990). He worked at Pennsylvania Centre d‘Elaboration de Matériaux et State University and Swiss Federal Institute of Technology in Lausanne d‘Etudes Structurales (CEMES), UPR #8011 and was a Visiting Professor at Boston University and at UNIST Korea. Toulouse, France [email protected] He is now a Professor at CEMES CNRS and the University of Toulouse. His research is dedicated to optical spectroscopy on nanostructured materials and novel optical microscopy techniques.

William S. Bainbridge Chapter J.46

National Science Foundation William Sims Bainbridge is the Director of the Cyber-Human Systems program of the Division of Information & Intelligent National Science Foundation. He earned his PhD in Sociology from Harvard (1976). Systems He has participated centrally in the Nanotechnology and Convergence activities and Arlington, USA has co-edited and edited several books. [email protected]

Antoni Baldi Chapter A.3

Barcelona Microelectronics Institute Dr Antonio Baldi received a degree in Telecommunication Engineering from (IMB-CNM-CSIC) BarcelonaTech (UPC) and a PhD in Electronics Engineering from Universitat Chemical Transducers Group Autònoma de Barcelona (UAB), followed by a postdoctoral at the University of Bellaterra, Spain Minnesota, working in the field of bioMEMS. In 2003, he joined the Chemical Trans- [email protected] ducers Group at the Barcelona Microelectronics Institute (IMB-CNM, CSIC). His current research is focused on electrochemical transducers and lab-on-a-chip devices for chemical sensing and biodetection. ˘ gazici understand hnology. onn. He is interested in Professor Donald Brenner isMaterials Science a and Kobe Engineering Steel atHe Distinguished North received Carolina Professor his State of University. degreesNew in York Chemistry and from Pennusing the State atomic State University. His and University of research multiscaletechnologically interests modelling important to focus processes develop on and materials. and Pouriya Bayat obtained hisIsfahan BSc University in of Technology. Mechanicalbio-fluid During Engineering mechanics. He his from joined studies, the2015, he ACUTE where Lab focused he at on works York on University in solution exchange of microparticles. Chapter C.16 Chapter F.30 Dr Maarten P. de BoerMaterials received Science his from PhD theat in University Carnegie Chemical of Engineering Mellon and Minnesota University, andaddresses in prior challenges 1996. to His in that work tribologyCurrent at research Sandia and topics National thin include Labs, reliability filmirradiation of and mechanical mechanical nanomechanical properties. switches, properties ofof nanocrystalline metals, semi-crystalline strength polymers, andexpansion metamaterials. adjustable coefficient of thermal Dr Wilhelm Barthlott isBiodiversity a Institute Professor at Emeritus and thestructure, former function, University and Head of biomimetic of B application of the has biological published surfaces more and than1997 400 has papers. led His to discoveryconcentrate of innovation on air the in retaining Lotus surface surfaces Effect and technologies.and the in bionics. His relation between current biodiversity interests Chapter I.39 Chapter H.36 Dr Marcie Black is the CEOsilicon nanowire of arrays Advanced for Silicon Group applications, including (ASG).for black ASG less silicon commercializes solar invasive testing, cells, and biosensors and lithium ion has batteries. numerous She patents hasMEng, had pending and over PhD on 25 degrees using patents from issued the nanotechnology. Massachusetts Marcie Institute of earned Tec her BS, Mehmet Z. Baykara received hisUniversity and degree his in PhD Mechanical in EngineeringUniversity. He Mechanical from Engineering is Bo and currently Materials an ScienceEngineering Assistant from and Professor Yale the at National thewhere Nanotechnology Department he Research of leads Center Mechanical the at scanning Bilkent probe University, microscopy research group. Chapter B.9 Chapter E.24 Donald W. Brenner Pouriya Bayat York University Dept. of Mechanical Engineering Toronto, Canada [email protected] Dept. of Materials Science &Raleigh, Engineering USA [email protected] North Carolina State University Chapters 1, D.22, E.23, F.27, F.32–G.35, H.36–I.38, J.47 For biographical profile, please see the section “About the Editor”. Bilkent University Dept. of Mechanical Engineering &Ankara, UNAM Turkey [email protected] Carnegie Mellon University Dept. of Mechanical Engineering Pittsburgh, USA [email protected] University of Bonn Nees-Institute for BiodiversityBonn, Germany of Plants [email protected] Maarten P. de Boer Mehmet Z. Baykara Wilhelm Barthlott

Advanced Silicon Group Lincoln, USA [email protected] Marcie R. Black Bharat Bhushan Authors 1626 About the Authors About the Authors 1627

Jean-Marc Broto Chapter B.8 Authors

Centre National de la Recherche Jean-Marc Broto is a Professor at the University Paul Sabatier Toulouse III. He is Scientifique, Institut National des a specialist in electronic transport and magnetization properties under high magnetic Sciences Appliquées de Toulouse, ﬁelds and contributed to the discovery of giant magnetoresistance in 1988. Université de Toulouse Laboratoire National des Champs Magnétiques Intenses de Toulouse (LNCMI-T), UPR #3228 Toulouse, France [email protected]

Patrizio Candeloro Chapter D.21

University Magna Graecia of Catanzaro Dr Patrizio Candeloro is an Assistant Professor in Physics at the University Magna Dept. of Experimental and Clinical Graecia of Catanzaro and a Senior Researcher at BioNEM laboratory. Throughout his Medicine scientiﬁc career, he worked in the ﬁeld of micro and nanotechnologies for different Catanzaro, Italy purposes and applications. Currently, he develops plasmonic nanostructures for SERS [email protected] spectroscopy and investigates the applications of Raman techniques to biomedical issues.

Brigitte Caussat Chapter B.8

Centre National de la Recherche Brigitte Caussat is a Professor at INP Toulouse, ENSIACET. Since 1991 Scientifique, Université de Toulouse, she has been working on thermal chemical vapor deposition (CVD) Institut National Polytechnique de processes, either on planar substrates or on powders. Her recent research Toulouse activities have dealt with CNT oxidation in dry mode using gaseous Laboratoire de Génie Chimique (LGC), UMR #5503 mixtures containing ozone and CNT decoration by silicon, iron, nickel, Toulouse, France and copper using the ﬂuidized bed CVD process. [email protected]

Chunying Chen Chapter J.45

National Center for Nanoscience & Dr Chunying Chen received her PhD from Huazhong University of Technology of China Science and Technology. She has worked at the Institute of High Energy CAS Key Laboratory for Biomedical Effects Physics of the Chinese Academy of Sciences, the Medical Nobel of Nanomaterials & Nanosafety Institute for Biochemistry at Karolinska Institute of Sweden, and at the Beijing, China [email protected] National Center for Nanoscience and Technology of China. She was one of the earliest researchers in the ﬁeld of nanosafety in China.

Rui Chen Chapter J.45

National Center for Nanoscience & Dr Rui Chen received his PhD from the Chinese Academy of Science in 2005. He Technology of China has worked at the School of Life Sciences of Tsinghua University and at the National CAS Key Laboratory for Biomedical Effects Center for Nanoscience and Technology of China. His research on nanoscience and of Nanomaterials & Nanosafety nanotoxicology focuses on the risk assessment of nanomaterials to the environment Beijing, China [email protected] and human health.

Yu-Ting Cheng Chapter I.43

National Chiao Tung University Yu-Ting Cheng received degrees in Materials Science and Engineering from National Dept. of Electronics Engineering Tsing Hua University and Carnegie Mellon University and a PhD in Electrical Hsinchu, Taiwan Engineering from the University of Michigan Ann Arbor. In 2002, he joined the [email protected] Department of Electronics Engineering at National Chiao Tung University. His research includes the fundamental study of materials for microsystem integration and MEMS applications, SoP, and the design and fabrication of microsensors and microactuators. hnology 2015. He is now lastic, plastic, fracture, interfacial, hnology. His research interests include eceived a PhD in Biomedical Engineering Professor Paolo Decuzzi is aof Senior Technology Researcher in at Genova, thetechnology where Italian for he Institute founded Precision thea Medicine Laboratory European in of Research July Nano- Council 2015to Consolidator rationally with Grant. design the polymeric He nanoconstructs support investigates forand how multi-modal of combination imaging therapy indiseases. cancer, cardiovascular, and neurological Dr Ciro Chiappini is aKing’s College Lecturer in London. Nanomaterials He andfrom r Biointerfaces the at University ofFellow Texas and at Marie Austin Curie inDr Fellow 2011. Chiappini at He develops Imperial worked functional College interfaces asprecision London for Newton medicine. tissue until engineering 2016. and Chapter D.21 Chapter D.21 Dr Maria Laura Coluccio received her PhDgineering from in the Chemical University and of Materials Pisa. En- SheTechnology, worked the at University the Italian of Institute of Reggiobefore Calabria, joining and the the University Magna Universityfocuses Graecia of on of Pisa nanotechnology Catanzaro. applied Her to research plants biomedicine, for including bioextractions, drug membranes, delivery, and tissue engineering. Mu Chiao received his degrees inTaiwan University Mechanical Engineering and from National thea University postdoctoral of at the California Berkeleyas Berkeley. Sensor After and Senior Actuator MEMS Center and EngineerMechanical a at Engineering position Intpax of the Inc.,Assistant University he Professor. of joined His British the current Columbiafabrication Department research as of of interests an MEMS and include nanodevices design for and biomedical applications. Chapter I.43 Chapter D.21 Dr Frank W. DelRio isat a the Research National Scientist Institute in of themeasurements Standards Material and and Measurement Tec Laboratory standards relatedand transport to properties the of e advance thin dmaterials in ﬁlms nanoelectronics, biomedical and and health, small-scale and energy structures, applications. with an emphasis on Dr Alessandro Coclite received hisa PhD Postdoctoral from Politecnico Fellow di in BariHis the research in deals Laboratory with of the vascularimmersed Nanotechnology transport of boundary for nanoconstructs via Precision models, lattice Medicine. Boltzmann- analyzingcoating, and their stiffness. properties in terms of shape, adhesive Dr Lilia Chtcheglova received her PhD fromin the Lausanne. Swiss Federal Afterwards, Institute of sheto Tec joined work the at group Johannesresearch interest of Kepler is Peter focused University on Hinterdorfer nanoscopic andand approaches and in Center their molecular applications continues for recognition in studies molecular Advanced cell Bioanalysis. biology. Her Chapter I.39 Chapter E.25 Chapter D.21 Paolo Decuzzi Ciro Chiappini Genova, Italy [email protected] Italian Institute of Technology Laboratory of Nanotechnology for Precision Medicine King‘s College London Craniofacial Development andBiology Stem Cell London, UK [email protected] National Institute ofTechnology Standards & Material Measurement Laboratory Boulder, USA [email protected] Johannes Kepler University Linz Institute of Biophysics Linz, Austria [email protected] University of British Columbia Dept. of Mechanical Engineering Vancouver, Canada [email protected] [email protected] University Magna Graecia of Catanzaro Dept. of Experimental and Clinical Medicine Catanzaro, Italy Frank W. DelRio Maria Laura Coluccio Lilia A. Chtcheglova Mu Chiao

Genova, Italy [email protected] Italian Institute of Technology Laboratory of Nanotechnology for Precision Medicine Alessandro Coclite Authors 1628 About the Authors About the Authors 1629

Enzo Di Fabrizio Chapter D.21 Authors

King Abdullah University of Science and Professor Enzo Di Fabrizio is a Full Professor at King Abdullah University of Technology Science and Technology and Director of the BioNEM Laboratory at the University Dept. of Physical Science and Engineering of Catanzaro. He is coauthor of more than 400 papers and inventor of more than Thuwal, Saudi Arabia 13 international patents. His scientiﬁc activity is interdisciplinary research between [email protected] physics and biology, which includes basic and applied studies in nanotechnology.

Daniele Di Mascolo Chapter D.21

Italian Institute of Technology Daniele Di Mascolo received his PhD in Biomedical and Computer Laboratory of Nanotechnology for Engineering from Magna Graecia University in 2014. He worked at the Precision Medicine Houston Methodist Research Institute before joining the Italian Institute Genova, Italy of Technology. His research focuses on nano and micro-drug delivery [email protected] systems for the pharmacological treatment of different pathologies.

Lixin Dong Chapter C.18

Michigan State University Lixin Dong is an Associate Professor at Michigan State University. Prior Dept. of Electrical & Computer to joining MSU in December 2008, he held a Senior Research Scientist Engineering position at ETH Zurich, where he led the NanoRobotics Group in the East Lansing, USA Institute of Robotics and Intelligent Systems. He is Associate Editor of [email protected] IEEE Trans. on Nanotechnology and the IEEE Trans. on Automation Science and Engineering. His research interests include nanorobotics, nanoelectromechanical systems, mechatronics, and nanobiomedical devices.

Mildred S. Dresselhaus (deceased) Chapter B.9

Professor Mildred Dresselhaus (1930-2017) received her PhD in Physics from the University of Chicago in 1958. She joined the MIT faculty in 1967. She was active in research across broad areas of solid state physics. Her research activities focused on carbon nanomaterials, transition metal dichalcogenides, and phosphorene. She received several major international awards in physics and 37 honorary degrees.

Andreas Ebner Chapter E.25

Johannes Kepler University Linz Professor Andreas Ebner is an Associate Professor in the Institute of Biophysics at the Institute of Biophysics Johannes Kepler University Linz. He received his PhD in Technical Chemistry from Linz, Austria Johannes Kepler University Linz. After a postdoctoral fellowship at the Comenius [email protected] University Bratislava he habilitated in bionanotechnology in 2016. His expertise lies in biosensing techniques, including AFM force spectroscopy and recognition imaging on biological samples.

Toshiaki Enoki Chapter B.10

Tokyo Institute of Technology Toshiaki Enoki has received his PhD from Kyoto University in 1974. Dept. of Chemistry He has worked at the Institute for Molecular Science in Japan and Tokyo, Japan at Tokyo Institute of Technology. He is an honorary member of Ioffe [email protected] Institute, Russia, and a Visiting Fellow of the Toyota Physical and Chemical Research Institute. His research in physical chemistry focuses on carbon-based nanostructures.

Haig Alexander Eskandarian Chapter D.19

Swiss Federal Institute of Technology Dr Haig Alexander Eskandarian received his PhD from the Pasteur Lausanne (EPFL) Institute in Paris, in 2013. He is a microbiologist working as an EMBO Dept. of Bioengineering Long Term Post-Doctoral Fellow at the Swiss Federal Institute of Lausanne, Switzerland Technology Lausanne (EPFL), in the microbiology lab of John D. [email protected] McKinney and the bioengineering lab of Georg Fantner. 2003. His ecent work is hnology. hnology, Genova. His 2008. Afterwards he aces. hnology Lausanne (EPFL). His research focuses on the interface of Francesco Gentile is an AssociateII Professor in at the Naples. University He Federico the received University his Magna PhD Graeciaworked in of at Biomedical Catanzaro the Engineering in Synchrotron from Texas-Houston, and Laboratories at in the Trieste, Italian atresearch Institute the of is University Tec within of the field of biomedical nanotechnology. Chapter D.21 Enrico Gnecco is ProfessorJena. of He Physics received at his Friedrich PhDas Schiller Postdoctoral from University the Researcher University at ofGroup the Leader Genova, University and at of IMDEA worked Basel Nanosciencenanoscale and Madrid. friction, as His scanning independent research focuses probe-basedand on manipulation nanocrystals, of nanomechanisms of metalglasses, abrasive clusters and wear the in influence polymers of and ultrasonic vibrations on friction. fellow at ICL, University of(carbon Oxford. nanotubes, His graphene, research and dealson related biomedical with materials), applications nanocarbons as with well aimpacts. as special potential focus health and environmental Emmanuel Flahaut is a CNRSin Senior Scientist Toulouse. and After works receivingUniversity at the a of CIRIMAT PhD Toulouse in in 1999, Materials he Science worked from as the a postdoctoral research Chapter F.29 Chapter B.8 Dr Thilo Glatzel received hisdissertation PhD was from focused the onchalcopyrite Free thin the University film of nanoscale solar Berlin analysisBasel, cells. in of Now, his interfaces as work and a focuseson Senior surfaces on insulating Researcher of high-resolution at and scanning semiconducting the probe University surf of microscopy of molecules Christoph Gerber is aResearcher Professor in Nanoscale in Science Physics at IBM at Rüschlikon.to He the has scanning University made tunneling major of contributions microscopy Baselfor and and which an is he Emeritus co-inventor was offocused awarded the on the biochemical atomic Kavli cantilever force array Prize sensors microscope, in based Nanoscience on AFM in tec 2016. His r Technology. He is aFoundation recipient Frontiers of of the Engineering Award. NSF CAREER Award and the NAE Grainger Dr Georg Fantner received hisAfter PhD a from the postdoctoral University position ofInstitute at California of Santa MIT, Tec Barbara. hemicro/nanotechnology joined the and biology. faculty His ofprobe group the microscopy develops Swiss methods new Federal timelife-science. and resolved related scanning technologies, primarily for applications in Philip Feng is anReserve Associate University. His Professor research for is primarily Electricaland focused Engineering integrated on at microsystems. emerging Case He nanoscale devices Western received a PhD from the California Institute of Chapter F.29 Chapter C.15 Chapter D.19 Chapter C.13 Francesco Gentile [email protected] University Naples Federico II Dept. of Electrical Engineering and Information Technology Naples, Italy [email protected] University of Basel Dept. of Physics Basel, Switzerland Swiss Federal Institute of Technology Lausanne (EPFL) Dept. of Bioengineering Lausanne, Switzerland [email protected] Research Jena, Germany [email protected] Friedrich Schiller University Jena Otto Schott Institute of Materials [email protected] Centre National deScientifique, laUniversité Recherche Toulouse, de Institut National Polytechnique de Toulouse Centre Interuniversitaire deet Recherche d’Ingénierie des Matériaux (CIRIMAT), UMR #5085 Toulouse, France Enrico Gnecco Christoph Gerber Emmanuel Flahaut Georg E. Fantner

University of Basel Dept.of Physics Basel, Switzerland [email protected] Dept. of Electrical Engineering & Computer Science Cleveland, USA [email protected] Case Western Reserve University Thilo Glatzel Philip X.-L. Feng Authors 1630 About the Authors About the Authors 1631

Miroslav Haluška Chapter C.14 Authors

ETH Zürich Dr Miroslav Haluška received his degree from the Slovak Technical Dept. of Mechanical & Process University in Bratislava and his PhD in Physics from the University of Engineering Vienna. He was a Postdoctoral Fellow and Visiting Researcher at the Zurich, Switzerland Max Planck Institute, Wake Forest University, and Eindhoven University [email protected] of Technology. In 2009, he joined the Micro and Nanosystems Group at ETH Zurich. His research includes the synthesis of SWCNTs, and their characterization and integration into nanosensors.

Judith A. Harrison Chapter F.30

U.S. Naval Academy Judith A. Harrison is a Professor of Chemistry at the US Naval Academy. She received Dept. of Chemistry her degrees from St. Anselm College and the University of New Hampshire. Before Annapolis, USA joining the faculty of the Naval Academy, she was a Postdoctoral Associate at the [email protected] Naval Research Laboratory. Her research focuses on the theoretical examination of nanometer-scale processes, such as indentation, friction, wear, and tribochemistry of hydrocarbon systems.

Martin Hegner Chapter C.15

Trinity College Dublin Professor Martin Hegner received his PhD from the Swiss Federal Institute of School of Physics, CRANN Technology in Zurich. Since 2007 he has been a Professor in the School of Physics at Dublin, Ireland Trinity College Dublin and Principal Investigator at the CRANN Nanocenter. Martin [email protected] Hegner’s scientiﬁc interests are focused on interdisciplinary research in the ﬁelds of single biomolecule manipulation, biophysics, diagnostics, and development and application of biological sensing devices.

Thomas Helbling Chapter C.14

greenTEG AG Dr Thomas Helbling received his MSc in Electrical Engineering from Zurich, Switzerland the ETH Zurich with a specialization in MEMS technology. In 2009, he [email protected] received his PhD in Mechanical Engineering from ETH Zurich for the use of carbon nanotubes as strain gauge and gas sensing material. Since 2010 Thomas has been with greenTEG, a Swiss spin-off company from ETH Zurich that produces and sells thermal sensor solutions.

Seong-Jun Heo Chapter F.30

Lam Research Corp. Dr Seong-Jun Heo is a Process Engineer in the Conductor Etch Division Fremont, USA at Lam Research Corp. He received his degrees in Materials Engi- [email protected] neering from Hanyang University in Seoul. He worked as a Research Engineer in the Semiconductor Division of Samsung Electronics, before pursuing his PhD at the University of Florida. He is interested in semiconductor processes as well as computational simulation related to nanotechnology.

Barbara Herr Harthorn Chapter J.44

University of California Santa Barbara Professor Barbara Herr Harthorn received her PhD in Anthropology from the Dept. of Anthropology UCLA. She is Professor of Anthropology and the Director of the NSF Center for Santa Barbara, USA Nanotechnology in Society at the University of California at Santa Barbara, as well as [email protected] an Executive Committee member of the UC Center for Environmental Implications of Nanotechnology at UCLA. Her research focuses on multi-stakeholder risk perception and public deliberation on societal aspects of new technologies. physics from Furman ition imaging. ophysics of Johannes Kepler University titute of Bi ophysics at Johannes Kepler University Linz. He is Dr Anne Jourdain received thefrom the MSc Ecole degree Nationale Supérieure in d’Ingénieurs de Opto-Microelectronics her Caën. PhD She received from thejoined University the Joseph Interuniversity Microelectronics Fourier Center ofwhere (IMEC) Grenoble. in she In Leuven, was 1999,2000, involved she she in joined the the MEMSpackaging RF-MEMS of processing team RF-MEMS devices. and development. is In currently in charge of the versity. She now works asManchester. a Her Research research Associate focusesapplications at on of the graphene the University and of production, other properties, two-dimensional and materials. Dr Maria Iliut received her PhD in Physics from Babes-Bolyai Uni- Chapter B.12 Chapter I.40 Esmaiel Jabbari is a Fulling Professor and of Chemical Director and of Biomedicalat the Engineer- the Biomaterials University and of TissueEngineering South Engineering from Carolina. Laboratory Purdue He University receivedresearch and his focuses PhD is on in a the Chemical development Fellowapplications of in of multi-cellular regenerative medicine AIMBE. tissue and His models cancer for therapy. Peter Hinterdorfer is Head ofBiophysics the at Department the of Ins Linz. Applied In Experimental 2001 he wasat appointed the Associate Institute Professor of and Bi a in 2010 recognized Professor expertresolution in topography single-molecule imaging forcesimultaneous of spectroscopy topography biological and and samples recogn high- and inventor of Chapter B.11 Chapter E.25 at North Carolina State University.University and He his received degrees his in degree materialsFlorida. science in His and engineering research from focuses thetheoretical University on of and the computational study approaches of thatstructure materials range methods. in from extreme multi-scale environments to using electronic Jacob Israelachvili earnedheld his positions in PhD the in DepartmentUniversity before of 1971 joining Applied at the Mathematics faculty at the at1986 the the University as Australian University Professor National of of of California, Cambridge.Society Santa Chemical Barbara of He Engineering in London and and Materials.National member Academy He of of is the Sciences. Fellow US of National the Academy Royal of Engineering and the Douglas L. Irving is an Associate Professor of Materials Science and Engineering Professor Christofer Hierold hasZurich been since Professor 2002, of afterAG. Micro having At and worked ETH with Nanosystems Zurich, Siemens atMEMS, his AG ETH on research and advanced is Inﬁneon microsystems, focused Technologies sensors. and on on the Christofer nanotransducers, evaluation of Hierold mainlySciences. new carbon is materials nanotube a for member of the Swiss Academy of Engineering Chapter F.30 Chapter C.14 Chapter F.28 Anne Jourdain Maria Iliut University of Manchester School of Materials Manchester, UK [email protected] [email protected] IMEC Leuven, Belgium North Carolina StateDept. University of Materials Science &Raleigh, Engineering USA [email protected] University of South Carolina Dept. of Chemical Engineering Columbia, USA [email protected] Johannes Kepler University Linz Institute of Biophysics Linz, Austria [email protected] Esmaiel Jabbari Douglas L. Irving Peter Hinterdorfer

Engineering Zurich, Switzerland [email protected] ETH Zürich Dept. of Mechanical & Process Santa Barbara, USA [email protected] University of CaliforniaDept. Santa of Chemical Barbara Engineering &Dept. Materials Jacob N. Israelachvili Christofer Hierold Authors 1632 About the Authors About the Authors 1633

Harold Kahn Chapter I.41 Authors

Charlottesville, USA Dr Harold Kahn received his BS in Metallurgical Engineering from Lafayette College [email protected] and his PhD in Electronic Materials from the Massachusetts Institute of Technology. He retired as Research Associate Professor in Materials Science and Engineering at Case Western Reserve University in Cleveland, where his research focused on wafer-level mechanical testing of MEMS devices.

Gopakumar Kamalakshakurup Chapter C.17

University of California Irvine Dr Gopakumar Kamalakshakurup received his PhD from Wayne State University. He Dept. of Biomedical Engineering worked at BioRad Laboratories, Lawrence Berkeley National Labs prior to joining Irvine, USA the University of California Irvine as a Postdoctoral Fellow. His research includes [email protected] developing microﬂuidic platforms for low cost diagnostics. His work on optoﬂuidic tweezers has resulted in a US patent.

Roger D. Kamm Chapter F.31

Massachusetts Institute of Technology Roger Kamm is the Cecil and Ida Green Distinguished Professor of Bio- Depts. of Mechanical Engineering logical and Mechanical Engineering. He received his PhD in Mechanical & Biological Engineering Engineering from MIT, where he has stayed for his entire career. Roger Cambridge, USA Kamm’s research focuses on the application of ﬂuid and solid mechanics [email protected] to better understand essential biological and physiological phenomena.

Josef A. Käs Chapter D.20

University of Leipzig Professor Josef A. Käs is Head of the Soft Matter Physics Division Peter Debye Institute at the University of Leipzig. He received his PhD from the Technical Leipzig, Germany University of Munich and did postdoctoral work at Harvard Medical [email protected] School. His research interests include all ﬁelds of cell biophysics with a particular focus on cellular biomechanics probed by optical traps, as well as soft matter physics.

Jongbaeg Kim Chapter I.43

Yonsei University Jongbaeg Kim received his degrees in mechanical engineering from Yonsei University, School of Mechanical Engineering the University of Texas Austin, and the University of California, Berkeley. After work- Seoul, Republic of Korea ing with DiCon Fiberoptics, Inc., where he designed and developed high-performance [email protected] optical MEMS components for telecommunication applications, he joined Yonsei University. He is Assistant Professor in the School of Mechanical Engineering. His research interests are modeling, design and fabrication of microsystems, and integrated nanostructures on MEMS.

Marcin Kisiel Chapter F.29

University of Basel Dr Marcin Kisiel received his PhD from Marie Curie-Sklodowska University of Dept. of Physics Lublin. Currently, he is a Postdoctoral Researcher at the University of Basel. His Basel, Switzerland research interest focuses on friction and energy dissipation at the nanoscale under [email protected] ultra-high vacuum conditions and at low temperatures.

Kerstin Koch Chapter H.36

Rhine-Waal University of Applied Professor Kerstin Koch received her Diploma, PhD and Habilitation in Science Biology from the University of Bonn. Her main topics of research include Dept. of Life Science, Biology & molecular self-assembly, molecular architecture of plant surface lipids, Nanobiotechnology biological surfaces, origin and functions of micro and nanostructures, Kleve, Germany [email protected] and superhydrophobic and superhydrophilic biomimetic surfaces. Since 2009 she has been Professor of Biology and Nanobiotechnology at the Rhine-Waal University of Applied Science, Kleve. ophysics at ophysics from the ophysics from the Johannes hnology. His research focuses on developing novel Dr Hans Peter Langof received Basel a PhD in inlow 1994. temperature Physics As from scanning Postdoctoral the tunnelingwork University Fellow, microscopy in he in the emerging Basel, directed fieldat followed research of by IBM nanomechanical on cantilever Rüschlikon. array At sensors applications of Basel cantilever array University, sensors. he focuses on biochemical Melanie Köhler received herKepler PhD University in of Bi Linz.force Her spectroscopy, research high-resolution focuses imaging, onsamples. and single-molecule Currently, mapping she of is biological Group a at Postdoctoral the Fellow Université in Catholique the de Nanobiophysics Louvain. Chapter C.15 Chapter E.25 Dr Constanze Lamprecht receivedJohannes her Kepler PhD University in Linz.at Bi the She University worked of asKiel. Waterloo Postdoctoral She and is Fellow the currently Christian-Albrechts-University affiliatedthe again of Johannes with Kepler the University, Institutemicroscopy of where to Bi she study uses cell AFMprogression transformations that of and lead cancer. fluorescence to the initiation and Chapter E.25 Christophe Laurent is a Professorand of Director Materials of Chemistry at the(CIRIMAT). the For Interuniversity University Center over of of 20 Toulouse Materials years,(CNTs), Research he notably and has to Engineering the dedicatedpreparation his synthesis research and and to characterization properties carbon of ofform nanotubes double-walled of CNT-ceramic CNTs powders, and foams, and and CNT-metal the dense nanocomposites materials. in the and actuation schemes. Professorresearch Kristensen programs has on headed advancingindustrial polymer national production. nano and He and European has micro pioneered fabrication nano-imprint technology lithography for in Denmark. Jan Lammerding is Associateneering and Professor the in Weill Institute theHe for Meinig Cell received School and degrees Molecular from of BiologyMassachusetts Dartmouth Biomedical at Institute College, Cornell Engi- of RWTH University. Aachen Tec experimental University, techniques and to the investigate thefunction, interplay with between a cellular mechanics particular and emphasisforces. on the cell nucleus and its response to mechanical Professor Anders Kristensen receivedCopenhagen his in PhD in 1994.optofluidics Physics He from – joined the the DTU integration University of of Nanotech micro/nano in photonics 2001, and where fluidics for he novel investigates sensing Chapter F.31 Chapter B.8 Chapter A.5 Hans Peter Lang Melanie Koehler University of Basel Dept. of Physics Basel, Switzerland [email protected] Université Catholique de Louvain Institute of Life Sciences Louvain-la-Neuve, Belgium [email protected] Centre Interuniversitaire ded’Ingénierie Recherche des et Matériaux (CIRIMAT), UMR #5085 Toulouse, France [email protected] Centre National deScientifique, laUniversité Recherche Toulouse, de Institut National Polytechnique de Toulouse Technical University of Denmark DTU Nanotech Kongens Lyngby, Denmark [email protected] Institute of Biophysics Linz, Austria [email protected] Johannes Kepler University Linz Christophe Laurent Constanze Lamprecht Anders Kristensen

[email protected] Cornell University Meinig School of Biomedical Engineering Ithaca, USA Jan Lammerding Authors 1634 About the Authors About the Authors 1635

Abraham Lee Chapter C.17 Authors

University of California Irvine Professor Abraham P. Lee is the William J. Link Professor and Chair of the Biomedical Dept. of Biomedical Engineering Engineering Department at the University of California Irvine. He is Director of Irvine, USA the NSF I/UCRC Center for Advanced Design and Manufacturing of Integrated [email protected] Microﬂuidics. Professor Lee is an Associate Editor for the Lab on a Chip journal and Fellow of the AIMBE and ASME.

Aeju Lee Chapter D.21

Kumamoto University Dr Aeju Lee received her PhD in Medicine from Korea University in International Research Organization for 2013. She worked at the Korea Institute of Science and Technology and Advanced Science and Technology the Italian Institute of Technology, before joining Kumamoto University Kumamoto, Japan as an Associate Professor. Her research focuses on developing activatable [email protected] NIR ﬂuorescence imaging sensors, multimodality imaging, and therapy systems for early disease detection and therapy.

Dong Woog Lee Chapter F.28

Ulsan National Institute of Science & Dr Dong Woog Lee received his PhD from the University of California, Technology Santa Barbara in 2014 and then did postdoctoral research at the same School of Energy & Chemical Engineering university. He is currently an Assistant Professor at Ulsan National Ulsan, Republic of Korea Institute of Science and Technology (UNIST). His current research [email protected] focuses on the adhesion and friction of bio and biomimetic materials. He received the Doh Wonsuk Memorial Award in 2013.

Stephen C. Lee Chapter D.22

The Ohio State University Stephen C. Lee is a pioneer in the ﬁeld of semi-biological nanodevices, having Dept. of Biomedical Engineering published the ﬁrst monograph devoted to the topic in 1998. His interests are in Columbus, USA enabling technologies for the incorporation of functional proteins and nucleic acids [email protected] into nanodevices, particularly for application in oncology and cardiovascular disease. He is currently Associate Professor of Cellular and Molecular Biochemistry, Chemical Engineering and Biomedical Engineering at the Ohio State University.

Liwei Lin Chapter I.43

University of California Berkeley Liwei Lin is Professor in the Mechanical Engineering Department and Co-Director Dept. of Mechanical Engineering of the Berkeley Sensor and Actuator Center at the University of California Berkeley. Berkely, USA His research interests are design, modeling, and fabrication of micro/nano structures, [email protected] micro/nano sensors, and micro/nano actuators, and mechanical issues in micro/nano systems, including heat transfer, solid/ﬂuid mechanics and dynamics. He led the effort to establish the MEMS division in ASME and served as its founding Chairman.

Matthias Mail Chapter H.36

University of Bonn Matthias Mail is a graduate physicist from the Karlsruhe Institute of Nees-Institute for Biodiversity of Plants Technology and doctoral student of Wilhelm Barthlott. He leads the Bonn, Germany working group on functional aspects of plant surfaces at the Institute of [email protected] Crop Science and Resource Conservation at the University of Bonn. His main interests are structures, functions, and biomimetic applications of plant surfaces.

Othmar Marti Chapter E.23

Ulm University Professor Othmar Marti is a specialist for scanning probe microscopy Institute of Experimental Physics and optical force measurements. His current research is focused on life Ulm, Germany science (cell mechanics, cytoskeleton systems), optics, plasmonics, and [email protected] combinations thereof. He is the Director of the Institute of Experimental Physics and a Chair for Experimental Physics at Ulm University. titute, where Pierre et Marie physical optics and has active research eaches Professor Vincent Meunier isand the Head Astronomy of Department the athe Physics, Rensselaer Applied holds Polytechnic Physics, the Ins KodoskyPhD Constellation from Chair the since University200 2010. of papers He Namur. in He earned peer-reviewedPhysical has journals his Society. published and approximately is a Fellow of the American Chapter B.9 David Mesguich is anUniversity Assistant Paul Professor Sabatier for Toulouseand III. Materials Chemistry He Carbon at is Nanotubes part teamResearch of in and the the Engineering Nanocomposites Interuniversity (CIRIMAT).synthesis by Center Here catalytic chemical of he vapor Materials works Deposition andmatrix on preparation nanocomposites of nanocarbon metal and carbides,sintered both by as SPS. powders and bulk materials Chapter B.8 and the Department of Material Science and Engineering at the University programs in microscopy, lithography, and data storage. Ernst Meyer is ain Professor friction of force Physics and atactive in the dynamic the University force field of of microscopydetection Basel. sensors with with He based force true is upon microscopy. He micromechanics atomic interested Society, is and of resolution. member magnetic the of He spin Editorial the is resonance Boardforce Swiss of microscopy. and Tribology American Letters, Physical and co-editor of books on atomic Professor Tom D. Milsterthe graduated University with of a Missouri-Rolla degree andUniversity in of received a Arizona. electrical PhD engineering Heof worked in from Arizona for Optical IBM in Sciences 1989. Corporation from Professor before the Milster joining the t University Curie of Illinois at Urbana-Champaign.printing He technology. He is is the currentlycompany lead the HéliosLite, inventor Chief which of Technical develops Semprius’ Officerphotovoltaic innovative core and systems solar co-founder and transfer trackers standard of for the flatplate high photovoltaic concentration modules. Dr Shinji Matsuidegree is in Professor Electrical at EngineeringUniversity the from of Hyogo, Osaka University he University worked of in atdemonstration of Hyogo. NEC 1981. electron-beam Corporation. He induced Prior His deposition significant to obtained andcurrent work joining atomic-beam included his research holography. His the the is PhD focused onchemical-vapor-deposition and three-dimensional nanoimprinting nanofabrication at by room focused-ion-beam temperature. Dr Etienne Menard received a PhD in Chemistry from the University Chapter F.29 Chapter E.26 Chapter A.4 Chapter A.6 Vincent Meunier Rensselaer Polytechnic Institute Dept. of Physics, Applied Physics,Astronomy & Troy, USA [email protected] [email protected] University of Basel Dept. of Physics Basel, Switzerland University of Hyogo Laboratory of Advanced ScienceTechnology & for Industry Hyogo, Japan [email protected] Toulouse Centre Interuniversitaire deet Recherche d’Ingénierie des Matériaux (CIRIMAT), UMR #5085 Toulouse, France [email protected] Centre National deScientifique, laUniversité Recherche Toulouse, de Institut National Polytechnique de Ernst Meyer David Mesguich Shinji Matsui

Tucson, USA [email protected] University of Arizona College of Optical Sciences HeliosLite Le Bourget [email protected] Lac, France Tom D. Milster Etienne Menard Authors 1636 About the Authors About the Authors 1637

Hiroaki Misawa Chapter A.4 Authors

Hokkaido University Hiroaki Misawa is a Professor at Hokkaido University. He received his Research Institute of Electronic Science PhD in Chemistry from the University of Tsukuba in 1984. Prior to Sapporo, Japan joining Hokkaido University, he worked at the University of Tsukuba, [email protected] Microphotoconversion project (ERATO) of JST, and the University of Tokushima. Since 2015, he has also been a Professor at National Chiao Tung University, Taiwan. He studies plasmonic chemistry.

Robert Modliński Chapter I.40

EPCOS AG Dr Robert Modlinski´ received his degrees in electronics and microsys- Munich, Germany tems from Wrocław University of Technology and KU Leuven. His [email protected] main research activities are NEMS/MEMS and CMOS-MEMS integrated products with a strong focus on competitiveness, reliability and price, testing, and characterization. At EPCOS, a TDK Group Company, he focuses on failure mechanisms and degradation models to predict the remaining useful life of MEMS devices and RF front-end modules for mobile applications.

Seyedsina Moeinzadeh Chapter B.11

University of South Carolina Dr Seyedsina Moeinzadeh is a Postdoctoral Fellow at the University of South Carolina. Dept. of Chemical Engineering He received his PhD in Chemical Engineering from the University of South Carolina Columbia, USA for his research on the development of degradable nanostructured hydrogels for [email protected] musculoskeletal tissue engineering. His primary research interests include tissue engineering, biomaterials, nanomaterials, polymers, and nano/microfabrication.

Mohammad R. K. Mofrad Chapter F.31

University of California Berkeley Dr Mohammad R.K. Mofrad is a Professor of Bioengineering and Mechanical Depts. of Bioengineering & Mechanical Engineering at the University of California Berkeley. His research focuses on the Engineering development of molecular and multiscale models of cell mechanobiology, with the Berkeley, USA ultimate aim to shed light on human diseases. He received the National Science [email protected] Foundation CAREER award in 2010 and the American Heart Association Innovative Research Grant Award in 2016. He is Fellow of AIMBE.

Marc Monthioux Chapter B.8

Centre National de la Recherche Marc Monthioux has been working on carbon materials for over 35 years, Scientifique, Université de Toulouse including carbon nanoforms since 1998. He is Director of Research at Centre d‘Elaboration de Matériaux et the French National Center for Scientiﬁc Research in Toulouse, and d‘Etudes Structurales (CEMES), UPR #8011 served as Editor for the journal Carbon for 13 years. He is former Chair Toulouse, France [email protected] of the French Carbon Society, former Chair of the European Carbon Association, and was Chair of the World Conference on Carbon in 2009.

Markus Morgenstern Chapter E.24

RWTH Aachen University Markus Morgenstern earned his PhD from the Institute of Interface II. Institute of Physics B & JARA-FIT Research and Vacuum Physics of the Forschungszentrum Jülich (1996). Aachen, Germany In 2002 he completed his habilitation at the University of Hamburg with [email protected] the subject scanning tunneling spectroscopy on semiconductor systems and nanostructures. In 2004 he became Full Professor at RWTH Aachen University. From 2007–2014, he was Scientiﬁc Director of JARA- FIT, the Jülich–Aachen Research Alliance – Fundamentals of Future Information Technology. 2010. He is ophysics, Johannes obotics from Carnegie Mellon ecame a Professor at ETH Zurich. His primary research Dr Yoojin Oh receivedSeoul. her She PhD is from currently working EwhaKepler at University Womans the Linz. University Institute Her of in main Bi of focus bacteria of and research their is strategies theand to investigation their adhere capability to of abioticmicroscopy-based forming and methods. bioﬁlms biotic surfaces, using different atomic force Chapter E.25 Professor Alain Peigney isChemistry. He a is Ceramic an EngineerUniversity Associate with Professor Paul a of Sabatier PhD Materials in Toulousesynthesis, Chemistry sintering, Physical III. at and the His microstructural characterization research ofceramic ceramics encompasses matrix and nanocomposites. the Sinceon 1994, the he synthesis has ofpreparation been single of concentrating and nanocomposites double-walled containing carbon carbon nanotubes. nanotubes and the Scholar. His research focusesaspects on of studying physiological functionalsingle-cell processes level. and at mechanical the nanoscale on a tissue and Dr Pascal D. Odermatt receivedof his Technology PhD Lausanne from in the 2016. Swiss Heof Federal is California Institute currently working San at the Francisco University and Stanford University as a Postdoctoral Chapter B.8 Chapter D.19 Dr Rémy Pawlak received hiscurrently PhD a from Postdoctoral the Fellow Aix-Marseille at Universitylow-temperature in the investigations University of of single Basel.force His molecules microscopy research and and focuses scanning atoms on high-resolution tunneling by imaging microscopy. means and He force of is spectroscopy. particularly atomic interested in Anna Lisa Palange received her PhDin from 2015. the University She Magna is Graeciafor of now Catanzaro Precision a Medicine. Postdoctoral Her actual Researcherand interests in in deal vitro the with and Laboratory the inand synthesis, of vivo characterization, therapeutic Nanotechnology application studies. of discoidal polymeric nanoconstructs for imaging BICMOS and MEMS, including managing the MEMS development group. Brad Nelson is ProfessorSystems and at Director ETH of the Zurich.University. In Institute He of 2002, received Robotics a hedirection and PhD b Intelligent lies in in R engineering, extending with robotics a special research emphasis into in the emerging area areas of of micro and science nanorobotics. and T. Kieran Nunan received hisIreland, degree while in working with electronics Analog from Deviceshim the Inc. multiple University Kieran’s roles career of on with both Limerick ADI sidesin has of Diffusion landed the CVD Atlantic. He and was TF the manufacturing Engineering and Group also Leader helps process development roles in Chapter F.29 Chapter C.18 Chapter I.42 Chapter D.21 Yoojin Oh Johannes Kepler University Linz Institute of Biophysics Linz, Austria [email protected] Swiss Federal Institute of Technology Institute for Robotics &Systems, Intelligent ETH Zentrum, CLAZurich, H 1.1 Switzerland [email protected] Italian Institute of Technology Laboratory of Nanotechnology for Precision Medicine Genova, Italy [email protected] Centre Interuniversitaire deet Recherche d’Ingénierie des Matériaux (CIRIMAT), UMR #5085 Toulouse, France [email protected] Centre National deScientifique, laUniversité Recherche Toulouse, de Institut National Polytechnique de Toulouse Swiss Federal Institute of Technology Lausanne (EPFL) Dept. of Bioengineering Lausanne, Switzerland [email protected] Alain Peigney Anna Lisa Palange Pascal D. Odermatt Bradley J. Nelson

Basel, Switzerland [email protected] University of Basel Dept. of Physics [email protected] Kieran Nunan Consulting Carlisle, USA Rémy Pawlak T. Kieran Nunan Authors 1638 About the Authors About the Authors 1639

Gerardo Perozziello Chapter D.21 Authors

University Magna Graecia of Catanzaro Dr Gerardo Perozziello works in the nanotechnology laboratory of the Dept. of Experimental and Clinical Department of Experimental and Clinical Medicine of the University Medicine Magna Graecia of Catanzaro, after receiving degrees in Mechanical Catanzaro, Italy Engineering and Micro- and Nanotechnology. His research interests [email protected] and activities range from microﬂuidics to micro and nanofabrication technologies applied to biomedical issues.

Sandra Posch Chapter E.25

Johannes Kepler University Linz Sandra Posch received her PhD in Biophysics from the Johannes Kepler University of Institute of Biophysics Linz. As a Postdoctoral Fellow, she studies the blood protein von Willebrand factor Linz, Austria by AFM and SPR. In 2012, she visited the Institute of Biomedical Technology in [email protected] Tampere to learn standard techniques of molecular biology. In 2013, she received the Upper Austria Research Award.

Robert Puers Chapter I.40

KU Leuven Professor Robert Puers is a Full Professor at KU Leuven.. In 1986, he became ESAT/MICAS Director of the Clean Room Facilities for Silicon and Hybrid Circuit Technology Leuven, Belgium at the ESAT-MICAS Laboratories of the same university. He was a pioneer in the [email protected] European research efforts in silicon micromachined sensors, MEMS, and packaging techniques, for biomedical implantable systems as well as for industrial devices.

Oded Rabin Chapter B.9

University of Maryland Oded Rabin is an Associate Professor of Materials Science and Engi- Dept. of Materials Science & Engineering neering at the University of Maryland. He earned degrees in chemistry College Park, USA from the Technion – Israel Institute of Technology and the Weizmann [email protected] Institute of Science, and received a PhD in Physical Chemistry from the Massachusetts Institute of Technology. His research interests include electrical and thermal transport in low dimensional systems, plasmonic nanostructures for spectroscopy, and nanoparticles as biomedical contrast agents.

Françisco M. Raymo Chapter A.2

University of Miami Françisco M. Raymo is a Professor in the Department of Chemistry Dept. of Chemistry at the University of Miami. His research interests lie at the interface Coral Gables, USA of chemistry and biology. In particular, he develops photo-switchable [email protected] ﬂuorescent probes to image biological samples with nano-scaled resolution and to monitor dynamic processes.

Manitra Razafinimanana Chapter B.8

Centre National de la Recherche Manitra Razaﬁnimanana is a Professor in the Laboratory on Plasma and Conversion Scientifique, Université de Toulouse, of Energy (LAPLACE – UMR 5213) at the University Paul Sabatier Toulouse III. Institut National Polytechnique de He has worked on plasma diagnostics, transport coefﬁcients, and calculation of Toulouse thermodynamical properties. His research at LAPLACE focuses both on arc–material Laboratoire des Plasmas et de Conversion de l’Energie (LAPLACE), UMR #5002 interaction and synthesis of nanomaterials by arc plasma. Toulouse, France [email protected]

Pouya Rezai Chapter C.16

York University Professor Pouya Rezai works in the field of bio-microfluidics. He was a Postdoctoral Dept. of Mechanical Engineering Fellow at the Public Health Agency of Canada before joining York University as an As- Toronto, Canada sistant Professor in 2013. He received his PhD from McMaster University. His research [email protected], interests include advancing microfabrication techniques to develop Lab-on-a-Chip for [email protected] studying interactions between bio-substances and fluids in microenvironments. ecame a Beatriu llinois at Urbana- titute in Villigen. ndustrial Science and jitsu Laboratories Ltd. he hnology Mainz. His work hnology, she b ohoku University and an Assistant 2001. From 2010–2014 he was a group hnology at the University of Helsinki. Dr titute at T noble for his work on modeling carbon nanotube sensors. Shintaro Sato received hisHe PhD joined from Fujitsu Limited theleader in University at of the Minnesota. NationalTechnology. Institute As of a Advanced Researchnow I Manager researches at and Fu developsand nanoelectronics carbon nanotubes. devises using graphene Professor John A. Rogers receivedMIT. He a was PhD a in Technical Staff Physicalas Member Chemistry Director at from Bell of Laboratories andthere. the served He Condensed joined Matter Northwesternand Physics University Kimberly in Research 2016 Querrey Department as ProfessorBiomedical the of Louis Materials Engineering Simpson Science and andDirector Engineering, Medicine, of the where newly endowed he Center on is Bio-Integrated Electronics. the founding Chapter B.10 Chapter A.6 Dr Hélder A. SantosHelsinki obtained University his of degree Technology. Currently, inin he chemical Pharmaceutical is Nanotec engineering an at AdjunctSantos the Professor has published more thanas 160 journal scientific editor publications. and Hejournals. is also serves on the Editorial Board of several international Dr Gemma Riusa graduated Nanolithography from Engineer UAB. andelectronics From Institute PhD 2002 (IMB-CNM, student CSIC). to After atToyota 2008, postdoctoral Technological the work she at Barcelona Ins was the Micro- Professorship at Nagoya Institute ofde Tec Pinós Postdoctoral Fellowfor the at SPS-NATO IMB-CNM project RAWINTS, andnanostructured mainly materials. Principal working Investigator in applications of Chapter A.3 Chapter D.21 nanoimprint lithography as an alternative nanopatterning method. Dr Helmut Schift isfor Head Micro of and theHe Polymer Nanotechnology Nanotechnology received (LMN) Group his at inincludes PhD the the all from Paul Laboratory aspects the Scherrer ofnanorheology. Institute Ins replication He of technology, from has Microtec stamp more manufacturing than to 20 polymer years of experience in the development of Marina Ruths received herin PhD 1996. from She the then UniversityChampaign, of did at California, postdoctoral the Santa research Max-Planck-InstituteÅbo Barbara for at Akademi the Polymer Research University. Universitynanorheology Her in of studies I Mainz, current of and research polymer, at liquid includes crystal, friction, and surfactant adhesion, systems. and Dr Cosmin Roman received hisUniversity MSc of in Bucharest, Electrical and EngineeringPolytechnic his from Institute PhD the of Polytechnic in Gre Micro/NanoelectronicsSince from 2006, the National he hasinterests been include micro a and Senior nanotransducers Researcher for at energy-efficient ETH sensor systems. Zurich. His current research Chapter A.5 Chapter F.28 Chapter C.14 Shintaro Sato John A. Rogers Atsugi, Kanagawa, Japan [email protected] Fujitsu Laboratories Ltd. Devices & Materials Laboratories Northwestern University Dept. of Materials Science &Evanston, Engineering USA [email protected] Laboratory for Micro- &Villigen Nanotechnology PSI, Switzerland [email protected] Paul Scherrer Institute [email protected] ETH Zürich Dept. of Mechanical & Process Engineering Zurich, Switzerland Barcelona Microelectronics Institute (IMB-CNM-CSIC) NEMS & Nanofabrication Group Bellaterra, Spain [email protected] [email protected] University of Helsinki Division of Pharmaceutical Chemistry and Technology Helsinki, Finland Helmut Schift Hélder A. Santos Cosmin I. Roman Gemma Rius

Dept. of Chemistry Lowell, USA [email protected] University of Massachusetts Lowell Marina Ruths Authors 1640 About the Authors About the Authors 1641

Jörg Schnauß Chapter D.20 Authors

University of Leipzig Dr Jörg Schnauß received his PhD in Physics from the University of Leipzig. Peter Debye Institute Subsequently, he joined the Division of Soft Matter Physics of the University Leipzig, Germany of Leipzig and the Fraunhofer Institute for Cell Therapy and Immunology as [email protected] a Postdoctoral Researcher. His research focuses on biological and biomimetic, semiﬂexible polymers. He transfers concepts to the cellular and subcellular level to explore new therapeutic approaches.

Alexander Schwarz Chapter E.24

University of Hamburg Dr Alexander Schwarz belongs to the scientiﬁc staff of the Center Institute of Nanostructure and Solid of Microstructure Research at the Institute of Applied Physics at the State Physics University of Hamburg. He has over 20 years of experience in his ﬁeld. Hamburg, Germany He is a Senior Scientist and works on atomic-force microscopy with [email protected] atomic resolution as well as related magnetically sensitive techniques, i.e., magnetic force microscopy and magnetic exchange force microscopy.

Udo D. Schwarz Chapter E.24

Yale University Dr Udo D. Schwarz received his PhD from the University of Basel. Dept. of Mechanical Engineering & Subsequently he moved to the University of Hamburg, specializing Materials Science in low-temperature scanning force microscopy and nanotribology. New Haven, USA After 1 year at the Lawrence Berkeley National Laboratory, he accepted [email protected] a position as Associate Professor at Yale University and was promoted to Full Professor in 2009. Since 2012, he has been Chair of the Department of Mechanical Engeering and Materials Science.

P. Ravi Selvaganapathy Chapter C.16

McMaster University P. Ravi Selvaganapathy is a Professor in Mechanical Engineering and the Canada Dept. of Mechanical Engineering Research Chair in Biomicrofluidics at McMaster University. He received his PhD from Hamilton, Canada the University of Michigan in 2002 and worked at the Sandia National Laboratories. [email protected] His research interests are in the development of microfluidic devices for drug discovery, drug delivery, diagnostics, and artificial organs.

Philippe Serp Chapter B.8

Centre National de la Recherche Philippe Serp has been Professor of Inorganic Chemistry at Toulouse University since Scientifique, Université de Toulouse, 2005. His research interests include the preparation and use of nanostructured catalytic Institut National Polytechnique de materials, a ﬁeld in which he has published over 150 papers. He holds 20 patents and Toulouse received Division Awards of the French Chemical Society in Catalysis (2004) and LaboratoiredeChimiedeCoordination (LCC), UPR #8241 Industrial Chemistry (2012). Toulouse, France [email protected]

Sameer S. Shroff Chapter I.39

Carnegie Mellon University Dr Sameer S. Shroff received his degree in mechanical engineering from Dept. of Mechanical Engineering the University of Pittsburgh. He worked in the Micro and Nanomechanics Pittsburgh, USA Division of Professor de Boer at Carnegie Mellon University and received [email protected] his PhD in 2015, where he was supported by the NSF Graduate Research Fellowship Program. He is currently employed by the Bechtel Marine Propulsion Corporation. ility hnology as ohns Hopkins eceived his PhD in unology as the Head of the DNA Nanodevices Jürgen Strasser studied medical andwell as pharmaceutical biophysics, biotec and isUniversity currently and a the PhD student Center atHis for the Advanced work Johannes Bioanalysis Kepler involves GmbH theresponses in detailed in Linz. the biophysical human investigationhigh-speed body of atomic using force single-molecule immune microscopy force and spectroscopy, quartz crystal microbalance. Dr Mark G.University da at Silva Baltimore. received He hisof worked PhD Maryland in from and academia The thenin at in J the the industry US. University atMEMS Over product Coventor, the and development past and Analogbreakthrough 20 currently Devices years, MEMS manages he inertial developmentapplications. sensor has of worked products extensively for in high performance Chapter E.25 Chapter I.42 Dr W. Merlijn van Spengenthat is designs the Director and of manufactures Falcofor technology Systems, company leading a R&D, high company institutes, voltage anduniversity ampliﬁers universities worldwide. research His at part-time chemistry, the electronics, Technical and University micromechanicsof Delft to micromachines. blends understand He physics, the receivedgrants. reliab the prestigious Dutch Veni and Vidi Chapter I.40 Yu-Chuan Su received his degree inTsing power Hua mechanical engineering University. from He theUniversity received National his of PhD California inUniversity Berkeley. and Mechanical is In Engineering currently from 2004,Science. a the His he Professor research in interests joined the aremicroﬂuidic the design Department systems and of National for fabrication Engineering of biomedical Tsing and polymer-based and nano System Hua energy and related applications. Quan Sun is anPhysics Assistant from Professor Peking at Universityworked Hokkaido in at 2006. University. Laval He Prior University, Canada, r to asinterests working a include at postdoctoral femtosecond Hokkaido researcher. laser His University, he micro/nanofabrication main research and nanophotonics. Chemistry from Iowa StateKentucky University and and the was University on ofapplication the Florida. of faculty Her at computational research the focusesreveal methods University structure–property on to of the relationships. design development and and develop new materials and to Dr David M. Smith received hisnetworks PhD from for the studies University on of phaseUniversity Leipzig. transitions in After of active a polymer Munich postdoctoral at focusingInstitute Ludwig for on Maximilian Cell DNA Therapy nanotechnology,Unit. and he His Imm joined research the exploresto Fraunhofer new study biomedical fundamental applications aspects of of DNA soft nanostructures matter and physics. Dr Susan B. SinnottEngineering at is Pennsylvania Professor State and University. She Department received Head her of PhD Materials in Science Physical and Chapter A.4 Chapter I.43 Chapter D.20 Chapter F.30 Jürgen Strasser Mark G. da Silva [email protected] Center for Advanced BioanalysisLinz, GmbH Austria Analog Devices Inc. High Performance Sensors Wilmington, USA [email protected] Dept. of Engineering & SystemHsinchu, Science Taiwan [email protected] National Tsing Hua University The Pennsylvania State University Dept. of Materials Science &University Engineering Park, USA [email protected] Falco Systems Amsterdam, The Netherlands [email protected] Yu-Chuan Su W. Merlijn van Spengen Susan B. Sinnott

Sapporo, Japan [email protected] Hokkaido University Research Institute of Electronic Science [email protected] Fraunhofer Institute for CellImmunology Therapy (IZI) & DNA Nanodevices Group Leipzig, Germany Quan Sun David M. Smith Authors 1642 About the Authors About the Authors 1643

Flavien Valensi Chapter B.8 Authors

Centre National de la Recherche Flavien Valensi is an Associate Professor in the Laboratory of Plasma Scientifique, Université de Toulouse, and Conversion of (LAPLACE – UMR 5213) in Toulouse. He received Institut National Polytechnique de a PhD in Plasma Physics from Orleans University in 2007. Since 2009 Toulouse his research at LAPLACE has been dealing with the experimental study Laboratoire des Plasmas et de Conversion de l’Energie (LAPLACE), UMR of continuous and transient arcs, with applications such as synthesis of #5002 nanoparticles (carbon, metal) by arc plasma. Toulouse, France [email protected]

Derek Vallejo Chapter C.17

University of California Irvine Dr Derek Vallejo received his PhD in 2016 from the University of Cal- Dept. of Biomedical Engineering ifornia Irvine (UCI) under the guidance of Dr Abraham Lee. His thesis Irvine, USA focused on the microﬂuidic production of biocompatible and storable [email protected] vesicles and multisomes. Currently, Derek is a Postdoctoral Scholar in Dr John Chaput’s laboratory at UCI, developing a microﬂuidic system for rapid directed evolution of XNA polymerases.

Aravind Vijayaraghavan Chapter B.12

University of Manchester Dr Aravind Vijayaraghavan received his PhD in Materials Engineering from Rens- School of Materials selaer Polytechnic Institute in 2006. He was an Alexander von Humboldt Fellow at Manchester, UK the Karlsruhe Institute of Technology, before he started to work as a Lecturer in Na- [email protected] nomaterials at the University of Manchester. His research focuses on the production, properties, and applications of graphene and other two-dimensional materials.

Alicia Weibel Chapter B.8

Centre National de la Recherche Dr Alicia Weibel received her PhD in Materials Science in 2004. Since 2006, she Scientifique, Université de Toulouse, has been an Assistant Professor at the University Paul Sabatier Toulouse III. Her Institut National Polytechnique de research activities involve the synthesis, spark plasma sintering, and microstructural Toulouse and mechanical characterization of ceramics and nanocomposites containing carbon Centre Interuniversitaire de Recherche et d’Ingénierie des Matériaux (CIRIMAT), UMR nanotubes. #5085 Toulouse, France [email protected]

Kurt Winkelmann Chapter J.47

Florida Institute of Technology Kurt Winkelmann is an Associate Professor in the Chemistry Department Dept. of Chemistry at the Florida Institute of Technology. His research interests include Melbourne, USA kinetics of nanoparticle-catalyzed photochemical reactions, toxicology of [email protected] engineered and naturally occurring nanoparticles, and chemical education research of student learning and attitudes in the teaching laboratory.

Darrin J. Young Chapter C.13

University of Utah Darrin J. Young received his degrees and PhD from UC Berkeley. Dept. of Electrical & Computer He pioneered RF MEMS high-Q tunable passive devices for wireless Engineering communications. He worked at the Electrical Engineering and Computer Salt Lake City, USA Science Department at Case Western Reserve University, before joining [email protected] the Electrical and Computer Engineering Department of the University of Utah as USTAR Associate Professor in 2009. His research interests include MEMS design, fabrication, low power ASIC design, and microsystem integration. ition. ophysics of the Johannes Kepler University Linz, focusing on Christian A. Zorman isWestern a Reserve Professor University for with Electrical secondaryEngineering Engineering appointments and at in Mechanical Case Biomedical peer-reviewed Engineering. technical He publications has onof topics authored novel, related over enabling to 250 the materialsMEMS development and and the NEMS requisiteenvironments. with processing techniques an for emphasis on applications in challenging Chapters A.7, C.13 Electrical and Computera Engineering Professor. of His research Purdue interestsmicrosystems, University, are micromachined where related interfaces to with he the BioMEMS issensitive and central currently nervous sensors include system, implantable for and biologicalCareer ultra- Award applications. in Dr BiomedicalAward Ziaie Engineering for is Technological (2001) the Innovations andIEEE in recipient McKnight and Neuroscience of the Endowment American (2002), the Fund Association and for NSF the a Advancement member of of Science. the Dr Rong Zhu earnedUniversity received in his China. PhD Currently inthe he Biomedical Institute is Engineering of working from in Bi Southeast nanopharmacology Professor and Hinterdorfer’s molecular group recogn at Babak Ziaie received hisMichigan PhD in 1994. in From Electricalfor 1995 Engineering Integrated to from Microsystems 1999 the (CIMS) hejoined of University was the the of a Electrical postdoctoral University and of researcherMinnesota Computer Michigan. at as Engineering He the an Department subsequently Center of Assistant the Professor. University Since of 2005, he has been with the School of Chapter E.25 Chapter A.3 Johannes Kepler University Linz Institute of Biophysics Linz, Austria [email protected] Cleveland, USA [email protected] Case Western Reserve University Dept. of Electrical Engineering & Computer Science Christian A. Zorman Rong Zhu

West Lafayette, USA [email protected]; [email protected] Purdue University School of Electrical &Engineering Computer Babak Ziaie Authors 1644 About the Authors 1645

Detailed Contents

List of Abbreviations ...... XXXIII

1 Introduction to Nanotechnology Cont. Detailed Bharat Bhushan ...... 1 1.1 Nanotechnology – Definitions and Examples...... 2 1.1.1 Nanomanufacturing ...... 2 1.1.2 MEMS/NEMS...... 2 1.1.3 Convergence...... 4 1.1.4 Industrial Applications ...... 4 1.2 History and Early Research Expenditures...... 6 1.3 Governance of the National Nanotechnology Initiative...... 7 1.4 Nanotechnology R&D Funding Since 2001 ...... 8 1.5 Worldwide R&D Investments and Output ...... 11 1.5.1 R&D Investments ...... 11 1.5.2 Output ...... 11 1.6 Translation of Basic Research to Technology Commercialization .... 15 1.7 Nanoscience and Nanotechnology Education...... 16 1.7.1 Interdisciplinary Education ...... 16 1.7.2 K-12 Education, Excitement, and Creativity...... 16 1.7.3 Vocational, Undergraduate, Graduate, and Continuing Education Programs...... 16 1.7.4 Educator Training ...... 17 1.7.5 Informal Science Education...... 17 1.8 Summary and Outlook ...... 17 1.9 Organization of the Handbook ...... 18 References ...... 18

Part A Micro/Nanofabrication Techniques

2 Molecule-Based Devices Françisco M. Raymo ...... 23 2.1 Chemical Approaches to Nanostructured Materials...... 24 2.1.1 From Molecular Building Blocks to Nanostructures ...... 24 2.1.2 Nanoscaled Biomolecules: Nucleic Acids and Proteins .... 24 2.1.3 Chemical Synthesis of Artificial Nanostructures ...... 26 2.1.4 From Structural Control to Designed Properties and Functions ...... 27 2.2 Molecular Switches and Logic Gates ...... 28 2.2.1 From Macroscopic to Molecular Switches ...... 28 2.2.2 Digital Processing and Molecular Logic Gates ...... 29 2.2.3 Molecular AND, NOT and OR Gates ...... 29 2.2.4 Combinational Logic at the Molecular Level...... 31 2.2.5 Intermolecular Communication ...... 32 2.3 Solid-State Devices ...... 35 2.3.1 From Functional Solutions to Electroactive and Photoactive Solids...... 35 88 88 89 88 91 47 46 87 93 95 36 40 43 52 52 53 58 62 62 63 51 96 97 97 74 66 75 70 75 82 82 75 78 115 116 117 103 103 113 102 105 109 ...... Butterfly Scale Quasistructure ...... Morpho Chemical Vapor Deposition from a ...... 4.2.1 Focused-Ion-Beam-Induced 4.2.2 3-D Fabrication Process 4.2.3 Mechanical Properties 4.2.4 Free-Space Nanowiring 4.2.5 Electrical Properties 5.1.1 Next-Generation Lithography 5.1.2 Nanoprint and Nanoimprint Lithography 4.2.6 Brilliant Blue Observation 4.4.2 3-D Nanodevices: Fabrication of Photonic Crystals 4.4.1 3-D Nanostructure Fabrication by Femtosecond Laser 2.3.2 Langmuir–Blodgett Films 2.3.3 Self-Assembled Monolayers 2.3.4 Nanogaps and Nanowires 3.1.13.1.2 Lithography 3.1.3 Thin-Film Deposition and Doping Etching and Substrate Removal 3.1.4 Substrate Bonding 3.2.13.2.2 Bulk Micromachining Surface Micromachining 4.3.1 Electron-Beam-Induced Chemical Vapor Deposition 4.3.2 3-D Nanofabrication by Electron-Beam-Induced CVD 3.3.1 E-Beam Nanofabrication 3.2.3 High-Aspect-Ratio Micromachining 3.3.2 Epitaxy and Strain Engineering 3.3.3 Scanning Probe Microscope Techniques 3.3.4 Self-Assembly and Template Manufacturing 4.2 3-D Nanostructure Fabrication by Focused Ion Beam References 4.1 Various 3-D Nanostructure Fabrication Techniques 2.4 Conclusions and Outlook 3.2 MEMS Fabrication Techniques 3.1 Basic Microfabrication Techniques Nanoimprint Lithography Helmut Schift, Anders Kristensen 3-D Nanostructure Fabrication byElectron- Focused-Ion and Beam, Laser Beam Shinji Matsui, Hiroaki Misawa, Quan Sun Introduction to Micro-/Nanofabrication Gemma Rius, Antoni Baldi, Babak Ziaie, Massood Z. Atashbar 4.3 3-D Nanostructure Fabrication by Electron Beam 5.1 Emerging Nanopatterning Methods 4.4 3-D Nanostructure Fabrication by Laser References 3.3 Nanofabrication Techniques References 3.4 Summary and Conclusions

3 5 4

Detailed Cont. 1646 Detailed Contents Detailed Contents 1647

5.2 Nanoimprint Process ...... 119 5.2.1 Limits of Molding ...... 120 5.2.2 Squeeze Flow of Thin Films ...... 120 5.2.3 Residual Layer Thickness Homogeneity ...... 122 5.2.4 Demolding ...... 122 5.2.5 Curing of Resists and UV-Assisted NIL...... 123

5.2.6 Mix-and-Match Methods and Combination Cont. Detailed with Directed Self-Assembly...... 124 5.2.7 Multilayer and Multilevel Systems...... 124 5.2.8 Reversal NIL and Layer Transfer...... 125 5.3 Tools and Materials for Nanoimprint ...... 125 5.3.1 Resist Materials ...... 126 5.3.2 Stamps...... 127 5.3.3 Stamp Fabrication and Tooling ...... 128 5.3.4 Anti-adhesive Coatings ...... 128 5.3.5 Machines ...... 129 5.4 Applications...... 132 5.4.1 Types of Nanoimprint Applications...... 132 5.4.2 Semiconductor Memory Chips ...... 132 5.4.3 Bit-Patterned (Magnetic) Media (BPM) for Hard Disk Drives ...... 133 5.4.4 Subwavelength Metal-Strip Gratings and Transparent Electrodes for Displays ...... 133 5.4.5 High Brightness Light-Emitting Diodes ...... 134 5.4.6 Polymer Optics ...... 135 5.4.7 Biological Applications ...... 136 5.5 Conclusion and Outlook ...... 137 References ...... 138

6 Stamping Techniques for Micro- and Nanofabrication John A. Rogers, Etienne Menard ...... 143 6.1 High-Resolution Stamps ...... 144 6.2 Microcontact Printing ...... 146 6.3 Nanotransfer Printing ...... 148 6.4 Applications...... 152 6.4.1 Unconventional Electronic Systems ...... 152 6.4.2 Lasers and Waveguide Structures ...... 157 6.5 Conclusions ...... 159 References ...... 159

7 Materials Aspects of Micro- and Nanoelectromechanical Systems Christian A. Zorman ...... 163 7.1 Silicon and its Commonly-Used Derivatives...... 163 7.1.1 Single-Crystal Silicon ...... 164 7.1.2 Polycrystalline and Amorphous Silicon ...... 165 7.1.3 Porous Silicon ...... 168 7.1.4 Silicon Dioxide ...... 168 7.1.5 Silicon Nitride...... 169 170 193 194 178 180 171 170 194 171 173 176 173 183 183 180 197 199 182 181 184 183 184 185 185 210 210 213 210 199 208 213 213 207 202 216 215 217 217 217 216 ...... The DC Electric Arc ...... 7.2.1 Polycrystalline Germanium 8.1.1 Single-Wall Nanotubes 7.6.1 Lead Zirconate Titanate 7.2.2 Polycrystalline Silicon Germanium 8.1.2 Multiwall Nanotubes 7.4.2 Diamond 7.4.1 Silicon Carbide 7.7.17.7.2 Polyimide SU-8 7.6.2 Aluminum Nitride 8.2.1 Solid Carbon Source-Based Synthesis Techniques: 7.6.3 Gallium Nitride 7.7.37.7.4 Parylene Liquid Crystal Polymer 8.3.2 Catalytically Activated Growth 8.4.1 Overall Properties of SWNTs 8.3.1 Catalyst-Free Growth 8.2.2 Gaseous Carbon Source-Based Synthesis Techniques 8.4.3 Electronic and Optical Properties 8.4.2 Adsorption Properties 8.2.4 Synthesis with Controlled Orientation 8.2.3 Miscellaneous Techniques 8.4.5 Reactivity 8.4.4 Mechanical Properties 8.5.1 Heteronanotubes 8.5.2 Filled Carbon Nanotubes Marc Monthioux, Philippe Serp, Brigitte Caussat, EmmanuelManitra Flahaut, Razafinimanana, Flavien Valensi,Alain Christophe Peigney, Laurent, David Mesguich,Jean-Marc Alicia Broto Weibel, Wolfgang Bacsa, Carbon Nanotubes 7.2 Germanium-Based Materials 8.1 Structure of Carbon Nanotubes 7.6 Piezoelectric Materials 7.3 Metals 7.4 Semiconductors for Harsh Environment Applications 7.5 GaAs, InP and Related III-V Materials 8.2 Synthesis of Carbon Nanotubes 7.7 Polymer Materials 7.8 Future Trends References 8.4 Properties of Carbon Nanotubes 8.3 Growth Mechanisms of Carbon Nanotubes 8.5 Carbon Nanotube-Based Nano-Objects (Carbon Meta-Nanotubes)

Part B Nanomaterial and Nanostructures 8

Detailed Cont. 1648 Detailed Contents Detailed Contents 1649

8.5.3 Functionalized Nanotubes ...... 220 8.5.4 Coated/Decorated Nanotubes...... 221 8.6 Carbon-Nanotube-Containing Materials (Composites)...... 223 8.6.1 Metal Matrix Composites ...... 223 8.6.2 Ceramic Matrix Composites ...... 223 8.6.3 Polymer-Matrix Composites ...... 224

8.6.4 Composites as Multifunctional Materials ...... 225 Cont. Detailed 8.7 Current Applications of Carbon Nanotubes (on the Market) ...... 227 8.7.1 Carbon Nanotubes and Master Batches...... 227 8.7.2 Near-Field Microscopy Probes ...... 227 8.7.3 Electron Emitter...... 229 8.7.4 Flexible and Touch-Screen Displays...... 229 8.7.5 Nonvolatile Random Access Memory...... 229 8.7.6 Light Absorbants...... 229 8.7.7 Automotive and Aeronautic Industry ...... 230 8.7.8 High-Tech Goods and Clothes ...... 230 8.7.9 Anodes for Li-Ion Batteries ...... 230 8.7.10 Chemical Sensors ...... 230 8.7.11 Catalyst Support ...... 231 8.8 Toxicity and Environmental Impact of Carbon Nanotubes ...... 231 8.9 Concluding Remarks ...... 233 References ...... 233

9 Nanowires Mildred S. Dresselhaus, Marcie R. Black, Vincent Meunier, Oded Rabin..... 249 9.1 Synthesis ...... 250 9.1.1 Template-Assisted Synthesis ...... 250 9.1.2 VLS Method for Nanowire Synthesis ...... 255 9.1.3 Etching Methods...... 257 9.1.4 Other Synthesis Methods...... 258 9.1.5 Nanowire Alignment and Superstructures of Nanowires .. 260 9.2 Characterization and Physical Properties of Nanowires ...... 262 9.2.1 Structural Characterization...... 262 9.2.2 Mechanical Properties...... 266 9.2.3 Transport Properties ...... 267 9.2.4 Optical Properties...... 277 9.3 Applications...... 282 9.3.1 Electrical Applications ...... 282 9.3.2 Optical Applications ...... 284 9.3.3 Energy Applications ...... 286 9.3.4 Chemical and Biochemical Sensing Devices ...... 288 9.3.5 Magnetic Applications...... 289 9.4 Concluding Remarks ...... 290 References ...... 290

10 Nanoribbons Toshiaki Enoki, Shintaro Sato ...... 303 10.1 Graphene Nanoribbons ...... 303 10.2 Electronic and Magnetic Properties ...... 305 10.3 Characterizations ...... 310 365 365 319 317 363 317 366 321 326 324 324 330 331 335 366 335 336 336 336 348 348 349 351 353 353 328 367 368 367 351 349 350 368 369 369 369 372 372 372 372 372 371 370 371 ...... (the Scotch Tape Technique) by Bottom-Up Approaches by Top-Down Approaches ...... 12.1.2 Chemical Vapor Deposition 12.1.1 Micromechanical Exfoliation of Graphite 10.4.3 Graphene Nanoribbon Formation by Other Approaches 10.4.2 Graphene Nanoribbon Formation 10.4.1 Graphene Nanoribbon Formation 12.1.3 Decomposition of Carbides 10.5.3 Other Potential Applications 10.5.2 Interconnect Application 10.5.1 Application to Transistors 12.1.4 Exfoliation in a Solvent 11.2.1 NPs Classification 11.2.2 NPs Synthesis 11.3.1 Size of NPs 11.3.2 Shape of NPs 11.3.3 Magnetic Properties of NPs 12.1.6 Unzipping12.1.7 of Carbon Nanotubes Derivatives of Graphene 12.1.5 Synthetic Organic Chemistry Route 11.3.4 Mechanical Properties of NPs 11.3.5 Electrical Properties of NPs 12.2.3 Electronic Properties 12.2.2 Mechanical Properties 12.2.1 Structure and Physical Properties 12.2.7 Properties of Graphene Derivatives 12.3.1 Optical Microscopy 12.3.2 Transmission Electron Microscopy 12.2.6 Chemical Properties 12.2.4 Optical Properties 12.2.5 Thermal and Thermoelectric Properties 12.1 Methods of Production 10.5 Potential Applications Graphene Aravind Vijayaraghavan, Maria Iliut Nanoparticles and Their Applications Seyedsina Moeinzadeh, Esmaiel Jabbari 10.4 Syntheses: Top-Down Methods and Bottom-Up Methods References 11.1 Overview 11.2 NPs Classification and Synthesis 11.3 Properties of NPs 11.5 Summary References 10.6 Conclusions 11.4 Applications of NPs 12.2 Properties 12.3 Characterization

11 12

Detailed Cont. 1650 Detailed Contents Detailed Contents 1651

12.3.3 Scanning Probe Techniques...... 373 12.3.4 Angle-Resolved Photoemission Spectroscopy (ARPES) ..... 374 12.3.5 Raman Spectroscopy ...... 374 12.3.6 Electrical Characterization ...... 375 12.4 Applications...... 376 12.4.1 Structural and Electrical Composites ...... 377

12.4.2 Transparent Conductive Films ...... 377 Cont. Detailed 12.4.3 Sensors ...... 379 12.4.4 Electronic Applications ...... 379 12.4.5 Spintronics ...... 382 12.4.6 Photonics and Optoelectronics ...... 382 12.4.7 Filters and Barriers ...... 382 12.4.8 Supercapacitors ...... 384 12.4.9 Biomedical Applications ...... 384 12.5 Conclusions and Outlook ...... 385 References ...... 386

Part C MEMS/NEMS

13 MEMS/NEMS Devices and Applications Philip X.-L. Feng, Darrin J. Young, Christian A. Zorman ...... 395 13.1 MEMS Devices and Applications ...... 397 13.1.1 Pressure Sensor ...... 397 13.1.2 Inertial Sensor ...... 400 13.1.3 Optical MEMS ...... 404 13.1.4 RF MEMS ...... 408 13.2 NEMS Devices and Applications ...... 415 13.2.1 Fabrication Techniques for NEMS ...... 415 13.2.2 NEMS Measurement and Signal Transduction ...... 419 13.2.3 NEMS Devices and Emerging Applications ...... 419 13.3 Challenges and Perspectives ...... 425 References ...... 426

14 Single-Walled Carbon Nanotube Sensor Concepts Cosmin I. Roman, Thomas Helbling, Miroslav Haluška, Christofer Hierold . 431 14.1 Sensor Design Considerations ...... 432 14.1.1 CNT Properties for Sensing ...... 432 14.1.2 Carbon Nanotube FET Structures...... 436 14.1.3 Sensor Characterization ...... 438 14.2 Sensor Fabrication: SWNT Synthesis and Integration ...... 439 14.2.1 Methods for SWNT Production ...... 440 14.2.2 Strategies for SWNT Assembly into Devices ...... 441 14.2.3 Process Contaminations and Sensor Performance ...... 444 14.3 Summary of State-of-the-Art, Applications Examples...... 445 14.3.1 Chemical and Biochemical Sensors ...... 445 14.3.2 Piezoresistive Sensors ...... 447 14.3.3 Resonant Sensors ...... 449 14.4 Concluding Remarks ...... 451 References ...... 451 460 464 468 463 468 459 459 465 462 466 464 468 459 465 460 460 468 459 458 494 469 469 495 457 493 489 458 492 492 491 492 458 469 472 469 476 470 470 487 488 477 487 488 476 475 ...... 15.3.4 Further Operation Modes 15.5.4 Membrane Surface Stress Sensors 15.2.3 Disadvantages15.2.4 of Single Microcantilevers Reference and Sensor Cantilevers in an Array 15.5.2 Readout Principles 15.3.3 Heat Mode 15.5.3 Miniaturized Piezoresistive Arrays 15.6.2 Functionalization Methods 15.2.2 Compressive and Tensile Stress 15.5.1 Measurements in Gaseous or Liquid Environment 15.3.1 Static15.3.2 mode Dynamic Mode 15.6.1 General Strategy 15.2.1 Concept 16.3.6 Geometric Control of Two Phase Flow 15.6.3 Microfluidics 15.6.4 Array of Dimension-Matched Capillaries 16.3.5 Electrokinetics 15.1.2 History of Cantilever Sensors 16.3.3 Rapid16.3.4 Heating–Cooling Surface Tension 16.3.1 Laminar Flow 16.3.2 Diffusion in Microfluidics 15.1.1 Cantilevers 15.7.3 Microcantilever Sensors to Measure Physical Properties 15.6.5 Inkjet Spotting 15.7.1 Chemical15.7.2 Detection Biochemical Environment 16.1.1 Why Miniaturize? 16.1.2 Advantages of Microfluidics and Nanofluidics 15.7.4 Recent Developments 15.3 Modes of Operation 15.4 Microfabrication 15.6 Functionalization Techniques 15.5 Measurement Setup 15.2 Cantilever Array Sensors 15.1 Technique 16.3 Dominant Phenomenon and Micro–Nanofluidic Design 15.7 Applications Microfluidic Devices and TheirAdityaApplications Aryasomayajula, PouriyaP. Bayat, Ravi Selvaganapathy Pouya Rezai, Nanomechanical Cantilever Array Sensors Hans Peter Lang, Martin Hegner, Christoph Gerber References 16.1 Preface 16.2 Historical Developments 15.8 Conclusions and Outlook

15 16

Detailed Cont. 1652 Detailed Contents Detailed Contents 1653

16.3.7 Nanoscale Phenomena...... 495 16.4 Fabrication of Micro–Nanofluidic Devices ...... 496 16.4.1 Silicon and Glass ...... 496 16.4.2 Polymers ...... 497 16.4.3 Paper ...... 499 16.4.4 Threads ...... 501

16.4.5 Hydrogels...... 502 Cont. Detailed 16.5 Applications...... 504 16.5.1 Commercial Applications and Their Working Mechanism . 504 16.5.2 Research Applications ...... 519 16.6 Outlook and Future Directions ...... 521 16.6.1 Additive Manufacturing ...... 521 16.6.2 Artificial Organs ...... 521 16.6.3 Biopharmaceutical Production ...... 521 16.6.4 Droplets in Food and Cosmetics ...... 522 16.6.5 Continuous Health Monitoring ...... 522 References ...... 522

17 Microfluidic Micro/Nano Droplets Gopakumar Kamalakshakurup, Derek Vallejo, Abraham Lee ...... 537 17.1 Introduction to Micro/Nano Droplet Microfluidic Technologies ...... 537 17.1.1 Droplet Generation ...... 538 17.1.2 Droplet Merging...... 541 17.2 Overview of Current Trends in Droplet Microfluidic Technologies ... 546 17.3 Fundamental Designs and Techniques for Microfluidic Generation of Droplets...... 547 17.3.1 Passive Droplet Generation Techniques...... 548 17.4 Microfluidic Micro-/Nanodroplet Applications ...... 550 17.4.1 Chemical Reactions in Droplets...... 550 17.4.2 Biomolecule Synthesis ...... 552 17.4.3 Drug Discovery ...... 553 17.5 Conclusion ...... 556 References ...... 556

18 Nanorobotics Bradley J. Nelson, Lixin Dong ...... 559 18.1 Overview of Nanorobotics ...... 560 18.2 Actuation at Nanoscales ...... 561 18.2.1 Electrostatics ...... 562 18.2.2 Electromagnetics ...... 562 18.2.3 Piezoelectrics ...... 562 18.2.4 Other Techniques ...... 563 18.3 Nanorobotic Manipulation Systems...... 563 18.3.1 Overview ...... 563 18.3.2 Nanorobotic Manipulation Systems ...... 565 18.4 Nanorobotic Assembly ...... 568 18.4.1 Overview ...... 568 18.4.2 Carbon Nanotubes...... 569 18.4.3 Nanocoils...... 574 18.5 Applications...... 576 609 609 607 606 606 606 606 622 623 619 621 618 617 601 618 602 601 604 599 600 603 603 599 576 620 587 595 588 594 592 596 594 593 593 578 580 ...... of Single Bacteria and Scattering Force (Biomaterials/Tissue Engineering) from Cell-Indentation Measurements Properties ...... 19.8.4 Antibiotic Effect on Bacterial the Surface Cell 19.8.3 Detecting the Dynamic Motion of Bacteria in Fluid 19.8.2 Detecting Fluctuations in the Buoyant Mass 19.8.1 Characterizing the Impact of Antibiotics 20.2.2 Magnetic Tweezers 20.1.3 Focused Laser Light – Optical Tweezers 20.2.1 Optical Tweezers 20.1.2 Quasiparallel Laser Light – Dual-Beam Laser Trap for Single-Molecule Manipulations 20.1.1 Conservation of Momentum – Gradient 19.5.4 Cell–Cell Interaction 19.5.2 Bacterial Adhesion 19.5.3 Cell–Substrate Interaction 19.7.1 Resonant Mechanical Sensors 19.7.2 Cellular Growth Using Cantilever Based Force Sensor 19.5.1 Tip Functionalization Methods 18.5.2 Nanorobotic Devices 18.5.1 Robotic Biomanipulation 19.3.4 Extracting Materials Properties 19.3.3 Instrument Calibration 19.3.2 Cantilever Calibration 19.3.1 Using MEMS Cantilevers to Measure Cell Mechanical References 19.9 Conclusions and Outlook 20.1 Interaction of Laser Light with Biological Material 19.6 Manipulation of Cells Using MEMS Cantilevers 19.7 Mass Measurements of Single Cells Using Resonant Cantilevers 19.8 Characterization of Antibiotic Action Using MEMS Devices Contact-free Mechanical Manipulation of Biological Materials Jörg Schnauß, Josef A. Käs, David M. Smith Applications of MEMS toGeorg Cell E. Biology Fantner, Pascal D. Odermatt, Haig Alexander Eskandarian 20.2 Optical and Magnetic Tweezers 19.1 Biological Background 19.4 Cancer Detection Using Nanomechanical Sensors 19.2 High Resolution Microscopy Methods for Live Cell Imaging 19.3 Measuring Mechanical Properties on Living Cells 19.5 Measurement of Cell Adhesion References

20 Part D BioMEMS/NEMS 19

Detailed Cont. 1654 Detailed Contents Detailed Contents 1655

20.2.3 Mechanical Measurements of Biomolecular Ensembles ... 624 20.3 Optical and Electric Forces for the Manipulation of Whole Cells..... 629 20.3.1 The Optical Stretcher ...... 629 20.3.2 Cell Deformation via Optical Tweezers ...... 634 20.4 Hydrodynamic Shear Forces for the Manipulation of Single Cells ... 636 20.4.1 Flow-Induced Shear Deformation of Cells ...... 636

20.4.2 High-Throughput Mechanical Phenotyping Cont. Detailed of Cell Populations in Real Time...... 637 20.5 Conclusion and Outlook ...... 638 References ...... 638

21 Nano-Particles for Biomedical Applications Paolo Decuzzi, Alessandro Coclite, Aeju Lee, Anna Lisa Palange, Daniele Di Mascolo, Ciro Chiappini, Hélder A. Santos, Maria Laura Coluccio, Gerardo Perozziello, Patrizio Candeloro, Enzo Di Fabrizio, Francesco Gentile ...... 643 21.1 Overview ...... 644 21.2 Rational Design of Nanoconstructs ...... 646 21.2.1 A Hierarchical Multiscale Approach for Vascular Transport of Nanoconstructs ...... 647 21.3 Multifunctional Polymeric Nanoconstructs ...... 650 21.3.1 Spherical Polymeric Nanoconstructs (SPNs) for Combination Therapy and Biomedical Imaging ...... 650 21.3.2 Discoidal Polymeric Nanoconstructs (DPNs) for Maximizing Accumulation Within Tumor Vasculature . 650 21.4 Sensing and Drug Delivery with Porous Silicon Nanomaterials...... 655 21.4.1 Fabrication ...... 656 21.4.2 Surface Chemistry...... 657 21.4.3 Biointerface ...... 658 21.4.4 Drug Delivery...... 659 21.4.5 Sensing ...... 661 21.5 Nanomedicine Synthesis by Microfluidics Technology...... 662 21.5.1 Why Microfluidics for the Synthesis of Nanomedicines? .. 662 21.5.2 Microfluidic Production of Nanocarriers Using PDMS Microfluidic Devices ...... 664 21.5.3 Microfluidic Production of Nanocarriers Using Glass Capillary Microfluidic Devices ...... 665 21.5.4 Summary ...... 668 21.6 Electroless Formation of Metal Nanoparticle Aggregates...... 669 21.6.1 DLA Methods Can Predict Electroless Formation of Metal Nanoparticles ...... 673 21.7 2-D and 3-D Optical Nanostructures ...... 677 21.7.1 Integration of Optical Nanostructures in Microfluidic Devices ...... 677 21.7.2 Three-Dimensional Optical Nanostructure ...... 679 21.7.3 Two-Dimensional Optical Nanostructure ...... 679 References ...... 681

22 Biological Molecules in Therapeutic Nanodevices Stephen C. Lee, Bharat Bhushan ...... 693 728 727 727 725 758 757 749 763 747 763 730 733 747 731 733 694 745 738 742 695 700 698 695 697 702 708 701 718 718 717 709 710 710 717 713 712 ...... of Planar ImmunoFETs ...... Fundamental Limitations ...... for Cantilever Deflections of Cantilever Beams Conjugation of Biologically Produced Proteins of Nanotechnology? to the The Consequences of Certainty on Micromachined Surfaces ...... 23.1.3 STM Probe Construction 23.1.2 Commercial STMs 23.1.1 The STM Design of Binnig et al. 23.3.4 Scanning and Control Systems 23.3.3 Combinations for 3-D-Force Measurements 23.3.2 Instrumentation and Analyses of Detection Systems 23.2.3 AFM Probe Construction 23.3.1 The Mechanics of Cantilevers 23.2.1 The AFM Design of Binnig et al. 23.2.2 Commercial AFM 22.1.1 Design Issues 23.2.4 Friction Measurement Methods 23.2.5 Normal Force and Friction Force Calibrations 22.1.2 Identification Biomolecularof Components 22.2.1 Low-Throughput Construction Methods 22.1.3 Design Paradigms 22.1.4 Utility and Scope of Therapeutic Nanodevices 22.2.3 Chemoselective Conjugation 22.2.4 Unnatural Amino Acids to Support Chemoselective 22.2.2 Supramolecular Chemistry and Self-Assembly 22.4.2 Are Proteins and Molecules Legitimately Part 22.3.1 Planar FET Protein Sensors 22.3.2 Biotechnology Approaches 241YouDoNotKnowWhatYouDoNotKnow: 22.4.1 22.3.3 Nanotribology of Protein-Sensing Interfaces 23.1 Scanning Tunneling Microscope 23.4 Conclusion References 23.2 Atomic Force Microscope Scanning Probe Microscopy –Instrumentation Principle of and Operation, Probes Bharat Bhushan, Othmar Marti 22.1 Definitions and Scope 23.3 AFM Instrumentation and Analyses 22.2 Assembly Approaches References 22.3 Sensing Devices 22.4 Concluding Remarks: Barriers to Practice

Part E Nanometrology 23

Detailed Cont. 1656 Detailed Contents Detailed Contents 1657

24 Low-Temperature Scanning Probe Microscopy Mehmet Z. Baykara, Markus Morgenstern, Alexander Schwarz, Udo D. Schwarz ...... 769 24.1 Microscope Operation at Low Temperatures...... 771 24.1.1 Drift ...... 771 24.1.2 Noise...... 771

24.1.3 Stability ...... 771 Cont. Detailed 24.1.4 Piezo Relaxation and Hysteresis...... 771 24.2 Instrumentation ...... 772 24.3 Scanning Tunneling Microscopy and Spectroscopy ...... 773 24.3.1 Atomic Manipulation...... 774 24.3.2 High-Resolution Spectroscopy...... 775 24.3.3 Imaging Electronic Wave Functions ...... 779 24.3.4 Imaging Spin Polarization: Nanomagnetism ...... 786 24.4 Scanning Force Microscopy and Spectroscopy...... 788 24.4.1 Atomic-Scale and Intramolecular Imaging ...... 789 24.4.2 Force Spectroscopy ...... 790 24.4.3 Atomic and Molecular Manipulation...... 793 24.4.4 Kelvin Probe Force Microscopy...... 794 24.4.5 Magnetic Force Microscopy...... 795 24.4.6 Magnetic Exchange Force Microscopy and Spectroscopy... 797 24.4.7 Magnetic Resonance Force Microscopy...... 798 24.5 Summary ...... 799 References ...... 799

25 Biomedical Sensing with the Atomic Force Microscope Constanze Lamprecht, Jürgen Strasser, Melanie Koehler, Sandra Posch, Yoojin Oh, Rong Zhu, Lilia A. Chtcheglova, Andreas Ebner, Peter Hinterdorfer...... 809 25.1 Topographical Imaging of Biological Samples ...... 810 25.1.1 Basic Imaging Modes for Biological Application ...... 811 25.1.2 Sample Preparation and Imaging Conditions ...... 812 25.1.3 Imaging Artifacts ...... 812 25.2 Single-Molecule Force Spectroscopy (SMFS) ...... 814 25.2.1 Basic Principle of SMFS ...... 814 25.2.2 Theory of Single-Molecule Binding and Force Spectroscopy ...... 816 25.2.3 Data Evaluation and Determination of Interaction Rate Constants...... 818 25.2.4 AFM Tip Chemistry ...... 819 25.3 Simultaneous Topography and Recognition Imaging (TREC) ...... 821 25.3.1 Principle of TREC ...... 821 25.3.2 Parameter Optimization in TREC ...... 821 25.3.3 Application of TREC ...... 822 25.4 AFM Biomedical Sensing – Examples ...... 827 25.4.1 Isolated Membranes...... 828 25.4.2 Mammalian Cells ...... 830 25.4.3 Bacteria...... 832 25.5 Perspectives and Concluding Remarks...... 836 References ...... 837 858 862 863 864 864 845 847 845 845 849 853 854 856 869 871 882 877 882 875 876 876 875 872 884 878 881 881 887 906 902 906 915 901 899 898 893 891 907 914 911 906 ...... and van der Waals Forces ...... 26.1.2 Point Spread Function (PSF) and Frequency Response 26.1.1 Review of Classical Resolution 27.1.1 Surface Roughness and Friction Force Measurements 27.2.2 Microscale Friction 27.1.7 Localized Surface Elasticity and Viscoelasticity Mapping 27.2.1 Atomic-Scale Imaging and Friction 27.1.4 Surface27.1.5 Potential Measurements In situ Characterization of Local Deformation Studies 27.1.6 Nanoindentation Measurements 27.1.3 Scratching, Wear, and Fabrication/Machining 27.1.2 Adhesion Measurements 27.2.3 Directionality Effect on Microfriction 27.1.8 Boundary Lubrication Measurements 27.1.9 AFM Tip Wear and Nanofabrication/Nanomachining 27.2.4 Surface Roughness-Independent Microscale Friction 27.3.2 Microscale Scratching 27.3.1 Nanoscale Wear 27.2.9 Scale Dependence in Friction 27.2.8 Separation Distance Dependence of Meniscus 27.2.7 Adhesion and Friction in Wet Environments 27.2.6 Nanoscale Friction and Wear Mapping 27.2.5 Velocity Dependence on Micro/Nanoscale Friction 27.3.4 In situ Characterization of Local Deformation 27.3.5 Nanofabrication/Nanomachining 27.3.3 Microscale Wear 26.7 Light-Sheet Microscopy 26.8 Comparison of Techniques for Live-Cell Imaging 26.9 Summary References 26.1 Overview 26.2 Scanning Aperture Techniques 26.3 4-Pi Microscopy 26.4 Enhancement/Depletion Techniques 26.5 Photoactivated Localization 26.6 Structured Illumination Nanotribology, Nanomechanics and Materials Characterization Bharat Bhushan Superresolution Microscopy Tom D. Milster 27.1 Description of AFM/FFM and Various Measurement Techniques 27.2 Surface Imaging, Friction, and Adhesion 27.3 Micro/Nanoscale Wear and Scratching, Local Deformation, 27.4 Indentation

Part F Bio/Nanotribology and Bio/Nanomechanics 27 26

Detailed Cont. 1658 Detailed Contents Detailed Contents 1659

27.4.1 Picoindentation ...... 915 27.4.2 Nanoindentation ...... 915 27.4.3 Localized Surface Elasticity and Viscoelasticity Mapping .. 917 27.5 Boundary Lubrication ...... 919 27.5.1 Perfluoropolyether Lubricants ...... 919 27.5.2 Self-Assembled Monolayers ...... 924

27.5.3 Liquid Film Thickness Measurements ...... 926 Cont. Detailed 27.6 Conclusion ...... 928 References ...... 929

28 Surface Forces and Nanorheology of Molecularly Thin Films Dong Woog Lee, Marina Ruths, Jacob N. Israelachvili...... 935 28.1 Types of Surface Forces...... 936 28.2 Methods Used to Study Surface Forces...... 938 28.2.1 Force Laws...... 938 28.2.2 Adhesion Forces ...... 938 28.2.3 The SFA ...... 940 28.3 Normal Forces Between Dry (Unlubricated) Surfaces ...... 941 28.3.1 Van Der Waals Forces in Vacuum and Inert Vapors ...... 941 28.4 Normal Forces Between Surfaces in Liquids...... 942 28.4.1 Van Der Waals Forces in Liquids ...... 942 28.4.2 Electrostatic Forces ...... 943 28.4.3 Solvation and Structural Forces...... 945 28.4.4 Hydration and Hydrophobic Forces ...... 947 28.4.5 Polymer-Mediated Forces...... 949 28.5 Adhesion and Capillary Forces ...... 951 28.5.1 Capillary Forces ...... 951 28.5.2 Adhesion Mechanics...... 952 28.5.3 Effects of Surface Structure, Roughness, and Lattice Mismatch ...... 952 28.5.4 Nonequilibrium and Rate-Dependent Interactions: Adhesion Hysteresis ...... 954 28.6 Introduction: Different Modes of Friction ...... 956 28.7 Relationship Between Adhesion and Friction ...... 957 28.7.1 Amontons’ Law ...... 957 28.7.2 Adhesion Force and Load Contribution to Interfacial Friction...... 958 28.7.3 Examples of Experimentally Observed Friction of Dry Surfaces ...... 962 28.7.4 Transition from Interfacial to Normal Friction with Wear . 965 28.8 LiquidLubricatedSurfaces...... 966 28.8.1 Viscous Forces and Friction of Thick Films: Continuum Regime ...... 966 28.8.2 Friction of Intermediate Thickness Films ...... 967 28.8.3 Boundary Lubrication of Molecularly Thin Films: Nanorheology...... 969 28.9 Effects of Nanoscale Texture on Friction ...... 976 28.9.1 Role of the Shape of Confined Molecules...... 976 28.9.2 Effects of Surface Structure ...... 978 References ...... 978 990 988 988 992 987 998 995 993 994 996 993 993 998 999 999 1014 1070 1069 1069 1013 1014 1069 1019 1019 1028 1033 1058 1058 1016 1000 1000 1001 1002 1003 1005 1008 1008 1033 1039 1041 ...... in Noncontact Atomic Force Microscopy in Biology and Medicine of Atomic-Scale Friction ...... 29.1.3 Energy Dissipation 29.1.1 Force29.1.2 Calibration Friction Force Microscopy in Ultra High Vacuum 29.1.4 Friction Force Microscopy in Water 30.1.2 Important Approximations 31.1.1 The Importance of Cell Mechanics 30.1.1 Energies and Forces 31.1.2 Examples Drawn from Biology and Pathophysiology 29.4.1 The Prandtl–Tomlinson Model at Finite Temperature 30.2.1 Surfaces 30.2.2 Thin Films 30.3.1 Bare Surfaces 29.2.3 Friction Between Atomically Flat Surfaces 29.2.2 Two-Dimensional Prandtl–Tomlinson Model 29.2.1 One-Dimensional Prandtl–Tomlinson Model 29.4.2 Velocity and Temperature Dependence 29.5.1 Continuum Mechanics of Single Asperities 29.5.2 Dependence of Friction on Load 29.5.3 Estimation of the Contact Area 30.3.2 Decorated Surfaces 30.3.3 Thin Films 31.1 Overview Cellular Nanomechanics Roger D. Kamm, Jan Lammerding, Mohammad R. K. Mofrad Computer Simulations of Nanometer-Scaleand Indentation Friction Susan B. Sinnott, Seong-Jun Heo,Judith Donald A. W. Harrison, Brenner, Douglas L. Irving Atomic Scale Friction Phenomena Enrico Gnecco, Rémy Pawlak, Marcin Kisiel, Thilo Glatzel, Ernst Meyer 30.1 Computational Details 30.3 Friction and Lubrication 29.1 Friction Force Microscopy in Selected Environments References 29.3 Friction Experiments on the Atomic Scale 29.2 The Prandtl–Tomlinson Model 30.2 Indentation 29.4 Thermal Effects Atomicon Friction 29.6 Wear on the Atomic Scale 29.7 Noncontact Friction 98SingleMoleculeFriction 29.8 29.9 Conclusion References 30.4 Conclusions 29.5 Friction on the Nanometer Scale

29 31 30

Detailed Cont. 1660 Detailed Contents Detailed Contents 1661

31.2 Structural Components of a Cell ...... 1071 31.2.1 Membranes ...... 1071 31.2.2 Cytoskeleton ...... 1072 31.2.3 Nucleus ...... 1075 31.2.4 Cell Contractility and Motor Proteins ...... 1076 31.2.5 Adhesion Complexes ...... 1077

31.3 Experimental Methods ...... 1077 Cont. Detailed 31.3.1 Methods of Force Application...... 1077 31.3.2 Rheological Properties ...... 1081 31.3.3 Active Force Generation ...... 1081 31.3.4 Biological Responses ...... 1082 31.3.5 Nonlinear Effects ...... 1082 31.3.6 Homogeneity and Anisotropy ...... 1082 31.4 Theoretical and Computational Descriptions...... 1082 31.4.1 Continuum Models ...... 1083 31.4.2 Biopolymer Models ...... 1084 31.4.3 Cellular Solids ...... 1085 31.4.4 Tensegrity ...... 1086 31.5 Mechanics of Subcellular Structures ...... 1086 31.5.1 Cell–Cell and Cell–Matrix Adhesions ...... 1086 31.5.2 Cell Membranes ...... 1088 31.5.3 Cell Nuclei ...... 1090 31.5.4 Mechanosensing Proteins...... 1091 31.6 Current Understanding and Future Needs...... 1095 References ...... 1096

32 Nanomechanical Properties of Nanostructures and Scale Effects Bharat Bhushan ...... 1101 32.1 Experimental Techniques for Measurement of Mechanical Properties of Nanostructures ...... 1103 32.1.1 Indentation and Scratch Tests Using Micro/Nanoindenters ...... 1103 32.1.2 Bending Tests of Nanostructures Using an AFM ...... 1104 32.1.3 Bending Tests of Micro/Nanostructures Using a Nanoindenter...... 1108 32.2 Experimental Results and Discussion ...... 1109 32.2.1 Indentation and Scratch Tests of Various Ceramic and Metals Using Micro/Nanoindenter...... 1109 32.2.2 Bending Tests of Ceramic Nanobeams Using an AFM ...... 1113 32.2.3 Bending Tests of Metallic Microbeams Using aNanoindenter...... 1116 32.2.4 Indentation and Scratch Tests of Polymeric Mi- crobeams Using a Nanoindenter ...... 1117 32.2.5 Bending Tests of Polymeric Microbeams Using aNanoindenter...... 1121 32.3 Finite Element Analysis of Nanostructures with Roughness and Scratches ...... 1125 32.3.1 Stress Distribution in a Smooth Nanobeam ...... 1126 1145 1179 1145 1154 1154 1161 1132 1126 1134 1179 1141 1148 1146 1180 1148 1149 1149 1150 1153 1154 1168 1173 1174 1175 1131 1131 1130 1180 1182 1182 1183 1183 1186 ...... and Scratches Deposition Technique Which are Elastic, Elastic-Plastic or Elastic-Perfectly Plastic ...... 33.1.1 Filtered Cathodic Arc Deposition Technique 34.1.1 Need for Hydrophobic Surfaces for Nanotribology 33.1.2 Ion-Beam Deposition Technique of Coatings Deposited by Various Techniques 33.3.1 Micromechanical Characterization 33.3.2 Microscratch and Microwear Studies 33.3.3 Macroscale Tribological Characterization and Cantilever Beams 32.3.2 Effect Roughnessof in Longitudinal the Direction 32.3.3 Effect Roughness of in Transverse the Direction 33.1.4 Sputtering Deposition Technique 33.1.3 Electron Cyclotron Resonance Chemical Vapor 34.1.2 Surface Films for Nanotribology and Surface Protection 33.1.5 Plasma-Enhanced Chemical Vapor Deposition Techniqueon Chemical Characteristics and 1148 Physical Properties 33.2.2 Hydrogen Concentrations 33.2.1 EELS and Raman Spectroscopy 33.2.3 Physical Properties 33.2.4 Summary 33.3.4 Coating Continuity Analysis 32.3.4 Effect Stresseson and Displacements Materials for 34.1.3 Scope of the Chapter 34.2.1 Electronegativity/Polarity 34.2.2 Classification and Structure of Organic Compounds 34.2.3 Polar and Nonpolar Groups References Self-Assembled Monolayers for Nanotribology and Surface Protection Bharat Bhushan Nanotribology of Ultrathin and Hard Amorphous CarbonBharat Films Bhushan 34.1 Background 33.1 Description of Commonly Used Deposition Techniques 33.3 Micromechanical and Tribological Characterizations 33.4 Conclusion References 32.4 Summary 32.A Appendix: Fabrication Procedure for the Double-Anchored 33.2 Chemical Characterization and Effect of Deposition Conditions 34.2 A Primer on Organic Chemistry

Part G Molecularly-Thick Films33 for Lubrication 34

Detailed Cont. 1662 Detailed Contents Detailed Contents 1663

34.3 Self-Assembled Monolayers: Substrates, Spacer Chains, and End Groups in the Molecular Chains...... 1186 34.4 Contact Angle and Nanotribological Properties of SAMs...... 1189 34.4.1 Measurement Techniques ...... 1191 34.4.2 Hexadecane Thiol and Biphenyl Thiol SAMs on Au(111) .. 1192 34.4.3 Perfluoroalkylsilane and Alkylsilane SAMs

on Si(100), and Perfluoroalkylphosphonate Cont. Detailed and Alkylphosphonate SAMS on Al ...... 1198 34.4.4 Chemical Degradation and Environmental Studies ...... 1205 34.5 Conclusion ...... 1209 References ...... 1210

35 Nanoscale Boundary Lubrication Studies Bharat Bhushan ...... 1215 35.1 Nanodeformation, Molecular Conformation, Spreading, Nanotribological and Electrical Studies, and Environmental Effects of Commonly Used PFPE Lubricant Films 1216 35.1.1 Nanodeformation, Molecular Conformation, and Spreading ...... 1217 35.1.2 Nanotribological Studies and Environmental Effects ...... 1219 35.2 Nanotribological, Electrical, and Chemical Degradations Studies and Environmental Effects in Novel PFPE Lubricant Films ...... 1233 35.2.1 Nanotribological Studies ...... 1234 35.2.2 Wear Detection by Surface Potential Measurements ...... 1234 35.2.3 Wear Detection by Electrical Resistance Measurements of Z-TETRAOL andtheEffectofCycling...... 1237 35.2.4 Chemical Degradation and Environmental Studies ...... 1239 35.3 Nanotribological and Electrical Studies of Ionic Liquid Films...... 1242 35.3.1 Monocationic Liquid Films ...... 1244 35.3.2 Dicationic Ionic Liquid Films...... 1249 35.4 Conclusion ...... 1257 References ...... 1258

Part H Biomimetics and Bioinspired Surfaces

36 Plant Surfaces: Structures and Functions for Biomimetic Applications Wilhelm Barthlott, Matthias Mail, Bharat Bhushan, Kerstin Koch ...... 1265 36.1 500 Million Years of Evolution for Innovative Technologies ...... 1266 36.2 Chemistry of Plant Surfaces...... 1270 36.2.1 Chemical Composition of Wax ...... 1271 36.2.2 Chemical Heterogeneities ...... 1274 36.2.3 Crystallinity ...... 1275 36.3 Structuring of Plant Surfaces: Hierarchical Architecture Between Nano- and Macrostructures ..... 1279 36.3.1 The Cuticle...... 1279 36.3.2 Hierarchical Sculpturing...... 1279 36.3.3 First Sculptural Level ...... 1280 1310 1307 1310 1310 1313 1318 1318 1318 1320 1320 1307 1323 1315 1315 1319 1324 1324 1281 1283 1284 1285 1289 1289 1289 1311 1285 1286 1286 1289 1294 1294 1291 1294 1291 1293 1291 1294 1294 1294 1298 1298 1295 1296 1297 1297 1297 ...... Surfaces and Aquaplaning ...... Slippery ...... of Spectral Radiation of Spectral Radiation ...... 36.3.4 Second Sculptural Level 37.2.3 Surface Factors 37.2.1 Biofouling Formation 37.2.2 Inorganic Fouling Formation 37.5.1 Fabrication of Micropatterned Samples 37.5.2 Antibiofouling Measurements 37.5.4 Results and Discussion 37.5.5 Antibiofouling and Anti-inorganic Fouling Mechanisms 37.4.1 Prevention Techniques 37.4.2 Self-Cleaning Surfaces and Cleaning Techniques 37.5.3 Anti-inorganic Fouling Measurements 36.3.5 Third Sculptural Level 36.3.6 Fourth Sculptural Level 36.4.1 Static Wetting Processes 36.6.1 Mechanical Properties 36.6.2 Attachment 36.6.3 Reflection, Absorption, and Transmission 36.4.2 Dynamic Interactions 36.6.4 Reduction of Water Loss 36.7.1 Mechanical Properties 36.7.2 Attachment 36.6.6 Superhydrophobicity 36.7.3 Reflection, Transmission, and Absorption 36.6.5 Superhydrophilicity 36.6.7 Anti-adhesive 36.7.4 Reduction of Water Loss 36.7.6 Superhydrophobicity 36.7.5 Superhydrophilicity 36.7.7 Other Applications 36.8.1 Water Plants 36.8.2 Land Plants 37.2 Biofouling and Inorganic Fouling Formation Mechanisms 37.4 Antifouling: Current Prevention and Cleaning Techniques 37.5 Bioinspired Rice Leaf Surfaces for Antifouling Bioinspired Nanostructured Antibiofouling and Anti-inorganic Surfaces Bharat Bhushan 37.1 Fields Susceptible to Fouling 37.6 Closure References 36.4 Physical Basis of Surface Wetting 37.3 Antifouling Strategies from Living Nature 36.6 Functional Diversity of Plant Surfaces 36.5 Superhydrophilic and Superhydrophobic Plant Surfaces 36.7 Biomimetic Application References 36.8 Living Prototypes: Evolution of Plant Surfaces and Biodiversity 36.9 Conclusions

Detailed Cont. 1664 Detailed Contents Detailed Contents 1665

Part I Micro/Nanodevice Reliability

38 MEMS/NEMS and BioMEMS/BioNEMS: Tribology, Mechanics, Materials and Devices Bharat Bhushan ...... 1331 38.1 MEMS/NEMS Basics...... 1332 38.1.1 Introduction to MEMS ...... 1334 ealdCont. Detailed 38.1.2 Introduction to NEMS...... 1335 38.1.3 Introduction to BioMEMS/BioNEMS ...... 1336 38.2 Nanotribology and Nanomechanics Issues in MEMS/NEMS and BioMEMS/BioNEMS ...... 1336 38.2.1 MEMS ...... 1337 38.2.2 NEMS...... 1342 38.2.3 BioMEMS...... 1344 38.2.4 BioNEMS ...... 1348 38.2.5 Microfabrication Processes ...... 1351 38.2.6 Tribological Needs ...... 1351 38.3 Nanotribology and Nanomechanics Studies of Silicon and Related Materials...... 1352 38.3.1 Virgin and Treated/Coated Silicon Samples ...... 1352 38.3.2 Nanotribological and Nanomechanical Properties of Polysilicon Films and SiC Films ...... 1357 38.4 Lubrication Studies for MEMS/NEMS ...... 1359 38.4.1 Perfluoropolyether Lubricants ...... 1359 38.4.2 Self-Assembled Monolayers (SAMs) ...... 1361 38.4.3 Hard Diamond-Like Carbon (DLC) Coatings ...... 1365 38.5 Nanoscale Friction, Wear, and Mechanical Behavior of Nano-Objects ...... 1365 38.5.1 Single Nano-Object Friction ...... 1368 38.5.2 Multiple Nano-Object Contact ...... 1369 38.5.3 Summary ...... 1375 38.6 Nanotribological Studies of Biological Molecules on Polystyrene and Silicon Surfaces and Coated Polymer Surfaces.. 1376 38.6.1 Nanoscale Adhesion, Friction, and Wear of Protein Layers on Polystyrene Surfaces ...... 1376 38.6.2 Adhesion, Friction, and Wear of Biomolecules on Si-Based Surfaces ...... 1382 38.6.3 Adhesion of Coated Polymer Surfaces...... 1389 38.7 Trajectory of Submicron Particles for Therapeutics and Diagnostics. 1390 38.8 Component-Level Studies ...... 1392 38.8.1 Surface Roughness Studies of Micromotor Components... 1392 38.8.2 Adhesion Measurements of Microstructures...... 1393 38.8.3 Microtriboapparatus for Adhesion, Friction, and Wear of Microcomponents ...... 1394 38.8.4 Static Friction Force (Stiction) Measurements in MEMS .... 1397 38.8.5 Mechanisms Associated with Observed Stiction Phenomena in Digital Micromirror Devices (DMDs) and Nanomechanical Characterization ...... 1400 38.9 Conclusion ...... 1403 38.A Appendix: Micro/Nanofabrication Techniques ...... 1404 References ...... 1407 1429 1429 1423 1425 1422 1460 1471 1474 1475 1445 1471 1476 1445 1429 1432 1432 1430 1422 1459 1459 1459 1437 1417 1419 1420 1460 1438 1482 1439 1482 1482 1461 1439 1464 1442 1448 1454 1454 1481 1450 1451 ...... with Decades of Range-in-Control Parameters ...... Making Motors and Friction Instruments 39.3.1 Microengines, Pumps and Generators 39.3.2 In-situ TEM for Friction Investigations 39.2.2 Rate-State Friction Measurements 39.2.1 MEMS Rate-State Friction Test Platform 41.2.1 Passive Structures 41.3.2 Mechanical Properties of Other Materials 40.3.2 Fatigue 41.3.1 Mechanical Properties of Silicon and Polysilicon 40.3.1 Creep 41.1.1 Residual Stress Measurements 41.1.2 Mechanical Measurements Using Nanoindentation 39.1.1 Micromachined Test Structures 39.1.2 Monolayer Lubrication in Nano- and MEMS Tribology 42.1.1 Foundry versus Internal Fab 40.2.1 Stiction Due to Surface Forces 42.1.2 The ADI Experience 41.2.2 Active Structures 40.2.2 Stiction Due to Electrostatic Attraction 40.3.3 Wear 40.3.4 Packaging 39.3 Putting MEMS Friction to Use: 41.4 Summary References 39.4 Wear and Tribopolymer Evolution in Micro- and Nanoswitches References 39.5 Concluding Remarks 39.2 Rate-State Friction 41.1 Measuring Mechanical Properties of Films on Substrates 40.1 Failure Modes and Failure Mechanisms 39.1 From Single- to Multiple-Asperity Friction 41.2 Micromachined Structures for Measuring Mechanical Properties 40.2 Stiction and Charge-Related Failure Mechanisms 41.3 Measurements of Mechanical Properties 40.3 Creep, Fatigue, Wear, and Packaging-Related Failures References High Volume Manufacturing andof Field MEMS Stability Products T. Kieran Nunan, Mark G. da Silva Mechanical Properties of Micromachined Structures Harold Kahn Failure Mechanisms in MEMS/NEMSW. Devices Merlijn van Spengen, Robert Modliński, Robert Puers, Anne Jourdain Friction and Wear inMaarten Micro- P. de and Boer, Nanomachines Sameer S. Shroff, Frank W. DelRio, W. Robert Ashurst 42.1 High-Volume Manufacturing Strategy 40.4 Conclusions

42 40 41 39

Detailed Cont. 1666 Detailed Contents Detailed Contents 1667

42.1.3 Foundry Manufacturing ...... 1486 42.1.4 High-Volume Inertial MEMS Manufacturing Worldwide ... 1487 42.2 Robust Design for Volume Manufacturing ...... 1491 42.2.1 MEMS Design for Manufacturability (DfM) ...... 1491 42.3 Stable Field Performance ...... 1496 42.3.1 Electric Field Stability ...... 1496

42.3.2 Mechanical Field Stability...... 1497 Cont. Detailed 42.4 Internet of Things (IoT)...... 1498 42.4.1 Heterogeneous Integration ...... 1499 42.5 Conclusions and Outlook ...... 1503 References ...... 1503

43 Packaging and Reliability Issues in Micro/Nano Systems Yu-Chuan Su, Jongbaeg Kim, Yu-Ting Cheng, Mu Chiao, Liwei Lin ...... 1505 43.1 Introduction to MEMS Packaging ...... 1505 43.1.1 MEMS Packaging Fundamentals ...... 1506 43.1.2 Contemporary MEMS Packaging Approaches...... 1508 43.1.3 Bonding Processes for MEMS Packaging Applications ...... 1508 43.2 Hermetic and Vacuum Packaging ...... 1511 43.2.1 Integrated Micromachining Processes ...... 1511 43.2.2 Postpackaging Processes ...... 1513 43.2.3 Localized Heating and Bonding Processes...... 1515 43.3 Emerging Packaging Approaches ...... 1518 43.3.1 Wafer-Level Packaging ...... 1518 43.3.2 3-D Packaging ...... 1521 43.3.3 Polymer-MEMS Packaging...... 1524 43.4 Thermal Issues and Packaging Reliability ...... 1526 43.4.1 Thermal Issues in Packaging...... 1526 43.4.2 Packaging Reliability ...... 1528 43.4.3 Long-Term and Accelerated MEMS Packaging Tests ...... 1530 43.5 Future Trends and Summary ...... 1533 References ...... 1534

Part J Nanotechnology and Society and Education

44 Nanotechnologies in Societal Context Barbara Herr Harthorn ...... 1543 44.1 Assessing Technological Progress in Societal Terms...... 1545 44.1.1 Approaches to nanoELSI/nanoELSA ...... 1545 44.1.2 Responsible Development and Responsible Innovation .. 1547 44.2 Nanotechnologies and Upstream Societal Engagement ...... 1547 44.3 Ethics ...... 1549 44.4 Governance, Law and Regulation ...... 1550 44.4.1 Standards ...... 1551 44.4.2 EHS/OHS...... 1551 44.4.3 Voluntary Approaches/Soft Law...... 1551 44.4.4 Responsible Development/Responsible Innovation ...... 1552 44.5 Public Perceptions and Participation in Decision-Making ...... 1552 1591 1592 1594 1595 1596 1600 1600 1569 1570 1571 1572 1573 1587 1587 1588 1591 1597 1598 1598 1599 1574 1568 1568 1573 1562 1562 1559 1587 1559 1574 1605 1603 1554 1554 1553 1580 1580 1576 1605 1607 ...... of EHS Impacts Study in Nanotoxicology ...... 46.2.1 Convergence46.2.2 Platforms Handbook Overview of Convergence 46.3.1 Five General Principles 46.3.2 The Information Technology Infrastructure that Determine the Toxicity Impacts 45.3.1 Particle Size and Surface Area 45.3.2 Nanostructure and Shape 45.3.3 Agglomeration and Aggregation 45.3.4 Chemical45.3.5 Composition, Purity, and Impurities Coating, Surface Modification, and Surface Charges on Environment, Health, and Safety Issues 46.1.1 The Convergence Social Movement 46.1.2 The Convergence Conferences 46.1.3 Parallel Activities in Europe 46.4.1 Innovations in Formal Education 46.4.2 Integration of Learning with Life 45.4.1 The Development of Biomarkers for Evaluation 45.2.3 Zinc Oxide Nanoparticles 45.2.2 Silver Nanoparticles 45.2.1 Carbon Nanotubes 45.4.2 Novel Techniques Used for ADME 47.1.1 History of Nanotechnology Education 47.1.2 Essential Nanotechnology Topics 46.3 Concepts and Methods References 46.2 Convergence with Society 46.4 Convergence in Education 46.5 Conclusions 45.3 Physicochemical Characteristics of Nanoparticles 45.4 Novel Techniques and Biomarker Development in Nanotoxicology 45.2 Current Progress of the Most Important Nanomaterials 46.1 Background 45.1 Impacts of the Development of Nanotechnology 47.1 Growth and Trends of Nanotechnology Education Global Perspectives of NanotechnologyKurt Education Winkelmann, Bharat Bhushan Nanoscience and Nanotechnology Convergence William S. Bainbridge 44.6 Integrating the Societal with the Technical Environment, Health and SafetyRui Issues Chen, in Chunying Nanotechnology Chen References 44.7 Concluding Remarks References 45.5 Conclusion and Perspectives

47 45 46

Detailed Cont. 1668 Detailed Contents Detailed Contents 1669

47.2 Primary and Secondary Education ...... 1608 47.2.1 Nanotechnology Field Trip for Primary School Children in Taiwan ...... 1608 47.2.2 Secondary School Nanotechnology Education in Italy..... 1608 47.2.3 Nanotechnology School Programs in Germany...... 1609 47.2.4 Evaluation of Secondary School

Nanotechnology Education in Europe ...... 1609 Cont. Detailed 47.3 Vocational Education Training...... 1610 47.3.1 Potential Areas of Growth for Vocational Education Training ...... 1610 47.3.2 Vocational Education Training in North America ...... 1611 47.4 Undergraduate Education ...... 1611 47.4.1 Different Models of Undergraduate Education in Australia...... 1611 47.4.2 Undergraduate Nanoscience Education in Switzerland ... 1612 47.4.3 Research Experience for US Undergraduate Students...... 1613 47.4.4 Nanotechnology Education in South Africa...... 1613 47.5 Graduate Education ...... 1614 47.5.1 Nanoscience Graduate Program in Switzerland ...... 1614 47.5.2 Nanoscale Science and Technology Master’s Program in Great Britain...... 1615 47.5.3 Laboratory Instrumentation Course in Taiwan ...... 1615 47.5.4 Collaborative, Online Graduate Program in Israel and Europe...... 1616 47.6 Teacher Professional Development...... 1616 47.6.1 Teacher Training in Israel ...... 1617 47.6.2 Teacher Training in South Korea ...... 1617 47.6.3 Online Education for Teachers ...... 1617 47.7 Informal Education...... 1618 47.7.1 Science Festival Activity in Israel ...... 1618 47.7.2 NanoAventura in Brazil ...... 1619 47.8 Summary and Outlook ...... 1620 References ...... 1622

About the Authors...... 1625 Detailed Contents...... 1645 Subject Index ...... 1671 1671

Subject Index

(3,6,9,12,15-pentaoxapentadecane- 3-aminopropyltriethoxysilane – energy hysteresis 960 1,15-diyl)bis(3-hydroxyethyl-1H- (APTES) 713 –force 938, 1421 imidazolium-1-yl) 3-D optical nanostructure 677 – hysteresis 954 di[bis(triﬂuoromethane- 3-D pattern generator system 90 – in microstructure 1397 sulfonyl)imide] (BHPET) 1244 3-D STED PSF 854 – linkage 1093 (3-aminopropyl)-dimethyl- 3-mercaptopropyltrimethoxysilane – measurement 875 ethoxysilane (APDMES) 714, (MPTMS) 150 – molecules 601

1387 4-Pi microscopy 853 – nonspecific 599 Index Subject (3-aminopropyl)-triethoxysilane 5-fluorouracil (5-FU) 348 – of biomolecular film 1387 (APTES) 713, 819 10,10-dibromo-9,9-bianthryl – of biomolecule 1382 (pentane-1,5-diyl)bis(3- (DBBA) 319 –promoter 146 hydroxyethyl-1H-imidazolium-1- – proteoglycan (AP) 600 yl) di[bis(trifluoromethane- A – receptor-mediated 1086 sulfonyl)imide] (BHPT) 1244 – tip–surface 1019 1,10-biphenyl-4-thiol (BPT) 924, Abrikosov lattice 796 – transient 1087 1191 absorption, distribution, metabolism adhesive 1,10-biphenyl-4-thiol crosslinked and excretion (ADME) 1564 –force 735, 938, 1000, 1033, 1395, (BPTC) 924, 1191 acceleration factor (AF) 1531 1421 1,2-dichloroethane (DCE) 321 accelerometer 401, 1334, 1442, – interaction surface 1019 1480 1,2-dioleoyl-sn-glycero-3- – wear 1429, 1450 acoustic streaming 511 phosphocholine (DOPC) adiabatic compression 679 acousto-optical 474 AFM/STM 732 – deflector (AOD) 622 1,2-dipalmitoyl-sn-glycero-3- agglomeration 1373, 1572 – modulator (AOM) 622 phosphocholine (DPPC) aggregation 1572 actin 625 650 – diffusion-limited (DLA) 674 – binding protein (ABP) 1074, air 1,2-distearoyl-sn-glycero-3- 1085 – -induced oscillation 747 phosphoethanolamine-N- – microfilament 1072 – layer 1286 [amino(polyethyleneglycol)-2000] activation energy 1448 (carboxylic acid) (DSPE-PEG) –mass(AM) 286 active 650 – -retaining Salvinia effect 1295 – linearization 760 Airy disk 845 1,4,7,10-tetraazacyclododecane- – merging 541 Al Cooper pair box (CPB) 422 1,4,7,10-tetraacetic acid (DOTA) – sorting 544 Al-Ge eutectic bond 1490 650 – structure 1464 alkanethiolate 146 1-D localization effects 272 actuation 458 – on gold 146 1-ethyl-3-(3-dimethylaminopropyl) – advanced 1444 – on palladium 146 carbodiimide (EDC) 708 –force 1394 – on silver 146 1H,1H,2H,2H- – voltage 1442 allosteric effect 830 perfluorodecyltrichlorosilane actuator 397 allotrope, two-dimensional 363 (FDTS) 1441 additive manufacturing 521 alumina 250 2-[4-(2-hydroxyethyl)-1- adenosine triphosphate (ATP) 625, amino acid (AA) 705 piperazinyl]-ethanesulfonic acid 825, 830, 1073 aminofunctionalization 819 (HEPES) 830 adhesion 725, 1071, 1148, 1220, aminopropyldimethylethoxysilane 2-D 1265, 1291, 1351, 1393, 1420, (APDMES) 714, 1387 – FKT model 995 1424 aminopropyltriethoxysilane (APTES) – histogram technique 1001 – cell–cell 1086 713, 819, 1383 – optical nanostructure 677 – complex 1077 ammonium fluoride 1485 198 574 268 136 1089 699 148 1073 1507 275 817 1115 1113 1085 1072, 697, 830, 348 324 606 460 834 606 1367 210 1440 459 279 324 1439 1088 267 150 748, 1122 1105, 825, 336, 353 467 863 810 321, 1085 589, 744 989 1004 625, 1173 B 786, 1394 properties 98, 437 E. coli bacteria – – mining ballistic – phonon transport – transistor – transport balloon angioplasty bamboo multiwall nanotube band structure, subband bandgap – tunability Bardeen–Cooper–Schrieffer (BCS) base-growth baseline drift beam – bending – Bessel –plane – S-shaped – theory beam deflection – FFM – optical – technique beam–substrate interfacial energy bearing area Bell model Bell–Evans model bending – quasistatic test – stiffness bacteriocidal bacteriostatic ball – grid array (BGA) – milling backlight illumination bacmid system Au nanoparticles, mechanical Au pattern Auger electron spectroscopy (AES) automatic nanoassembly average transmission probability ATP – strength , 4 617, 809, 222, 303, 1037 1204 1077, 58, 592, 770, 1215, 1438, 1103 1401 1002 991 265, 1028 810 746 1035, 1192, 738 761 1448 587, 731, 1013, 697 1189, 1422, 747 1426 208, 1200 747, 878 1420 761 998 733 882 563, 725, 991, 1013, 818 733 753 996 737 176, 1179, 1353, 1614 730 571, 1038 814 726, 1192, 872 727, 810 341 881 458, 701, 952, 956 134, 1154, 1335, 1564, 1163 1544 365, 693, 871, 88, (AFAM) (ATRP) deposition (APCVD) 75, 321, 652, 869, 1102, 1273, 1450, 255 992 atom-by-atom attrition atomic – layer deposition (ALD) – stick–slip – mass unit (AMU) – resolution atomic force acoustic microscopy atomic force microscopy (AFM) atom transfer radical polymerization atomic friction – imaging atomic-scale – force measurement – thermal effect – experiment atmospheric-pressure chemical vapor ASU athermal flow stress asperity – contact lifetime – contact model association – rate constant – adhesion – cantilever – carbon nanotube tip – control electronics – dynamic – feedback loop – for UHV application – imaging – instrumentation – manufacturer – multimode – commercial – noncontact dynamic (NC-AFM) – probe construction – static mode – surface height image –test – tip wear – wear measurement 374 462 731, 1143, 1395 1492 316, 1000, 1483 88, 1089 128 305 328 304 128 754 1320 1419 136 966, 1319 1149 317 1442, ognition 306, 195 713 1518 957, 1387 308, 319 657 1307, 1382 788 1145 819 250 304 1315 376 714, 305, 1483, 1149 1087 626, 305 713, 1184 304 1184

1419 1365 795 spectroscopy (ARPES) (ASIC) optical microscopy (ASNOM) 852 (RGD) (AM-SFM)

Amontons’ law amorphous carbon (a-C) – chemical structure – coating amplitude modulation (AM) aromaticity – scanning force microscopy angle-resolved photoemission angle of twist formula armchair – edge aromatic –ring –sextet – stability – -edged GNR – -edged nanographene – nanoribbon (AGNR) – -type nanotube anodic etching anodization anomalous anti-adhesion performance anti-adhesive property antibiofouling antibody antiferromagnetic antifouling antigen-antibody rec antistiction coating antistiction layer (ASL) APDMES application-specific integrated circuit anti-inorganic fouling antireflection grating apertureless scanning near-field apparent contact area arginine–glycine–aspartic acid arc discharge architectural design phase area expansion modulus Ar ring APTES – -coated silicon

Subject Index 1672 Subject Index Subject Index 1673

benzocyclobutene (BCB) 1451 biomedical – eutectic 1510 Berkovich tip 1162 – applications 627 –fusion 1490, 1509 Bessel beam 863 –device 148, 1101 – interfacial 1519 BHPET 1244 –sensing 810 – localized 1510, 1515, 1524 BHPT 1244 biomedicine 644 – Pyrex glass–aluminum–silicon bias voltage 728 bioMEMS (biological or biomedical 1527 biased enhanced nucleation (BEN) microelectromechanical system) – quartz–aluminum–silicon 1527 177 3, 1102, 1117, 1336, 1344, 1482 – silicon 1508 bi-dimensional optical nanostructure – biosensor application 1382 – solder 1510 679 – polymer 1103, 1348 bone morphogenic protein-2 bifurcation 1427 biomimetic 1270 (BMP-2) 346 – prediction 1428 – application 1265, 1286, 1294 boron ion implantation 730 – steady sliding 1423 – composite material 1294 borophosphosilicate glass (BPSG) bimetallic effect 459 – surface technology 1270 1512 Index Subject binding immunoglobulin protein biomolecular component 695 bottom effect cone correction (BiP) 1575 biomolecule synthesis 552 (BECC) 596 binding probability (BP) 816, 832 bioNEMS (biological bottom-up 349, 578, 1615 binding site, transient 831 nanoelectromechanical system) – approach 319, 336 bio 3, 1102, 1336, 1348 – chemical synthesis 415 – active module 705 bionics 1265, 1269 – fabrication 1407 – adhesion 1310, 1337, 1347, 1351, biotin 289 – method 305, 1332 1389 – surface roughness 1388 boundary – capsule 1348 bipartite lattice, two-dimensional –film 1215 307 – chemical sensor 445, 446 – layer 962 biphenyldimethylchlorosilane –chip 1336 – lubrication 919, 957, 969 (BDCS) 925, 1195 – decoration 1269 – lubrication measurement 881 bipolar complementary metal oxide – degradable 658 – scattering 272 semiconductor (BiCMOS) 64 –device 1389 bovine serum albumin (BSA) 345, bipyridinium (BIPY) 31 – diversity 1298 471, 472, 1376, 1383, 1564 bismuth 271 –film 600 BPTC 924, 1191 – -antimony-alloy nanowire 277 – imaging 335, 353 branched polyethyleneimine (BPEI) –nanowire 255, 270, 280 –marker 597, 645 1568 bit-patterned media (BPM) 132, brilliant blue observation 96 – mimetics 1269 133 – molecule 624 black silicon 257, 286 broken coating chip 1163 – nanotechnology 559, 1612 Bloch Brownian 1488 – polymer 625, 1085 – state 780 – motion 674 – printing 520 –wave 780 – noise 1483 –sensing 335, 351 block copolymer (BCP) 74, 702 bubble pump 510 –sensor 606, 661, 710, 1336, 1348, block-like debris 1170 buckling 1156, 1160 1382 blood –stress 1160 biocompatibility – platelet 810 Buckyball 1142 – graphene 384 – -pressure sensor chip 1336 buffered HF (BHF) 59, 1512 – graphene oxide 384 body-on-chip system 519 buffered oxide etch (BOE) 1484 biofouling 1307, 1349 bond bulk – formation 1310 –energy 816 – diamond 1143 –growthrate 1310 – -order potential 1015 – graphitic carbon 1172 – surface factor 1311 – strength 816 – micromachining 63, 1352 biological bonding – phonon mode 1016 –NP 344, 353 – adhesive 1510 – single crystal 1110 – role model 1265, 1270 – aluminum/silicon-to-glass 1516 bullous pemphigoid antigen 1 – surface 1269, 1279 – anodic 1509 (BPAG1) 1074 biological molecules, – covalent 1015 buoyancy 1392 nanotribological studies 1376 – epoxy 1510 buoyant mass 605 592 622, 1005 1082 1081 1089 1496 88, 782, 1081 937 631, 1155 1085 1083 223 1086 636 1078 512 1069 1095 264 731 1090 1082 1574 1090 520 286 284 633, 604 577 1076 604 1082 633, 1088 1113 1286 262, 262 375 1149 577 1442 1075, 591, 1083 39 645 1091 1085 590 1421 636, (COOH-PS) 1319, catenane cathodic arc carbon CdS nanowire CdSe nanorod cell – -adhesion molecule (CAM) – anisotropy – -based assay – computational description – contractility – deformation –growth – homogeneity – injection – –matrix adhesion – mechanics – mechanics model – membrane – morphology – nucleus – poking – red blood cell membrane – rheological property –strain – viscoelastic property –wall – Young’s modulus cellular – compression – force application – force sensor – mechanosensor – solid – trichomes ceramic – matrix composite – nanobeam chaotic advection characterization – chemical – electrical –nanowire – structural charge – -coupled device (CCD) – density wave (CDW) – discharge model (CDM) – exchange interaction – injection charged carboxylated polystyrene chemical – bonding force 210 194, 450 568, 1365 210, 221 305 1153 146, 559, 1561 1332, 193, 231 , 1143, 3 216 1148 432 210 271 215 431, 780, 88, 1366 222 1350, 1279 215 937 991 217 267, 440 199 363, 741, 91, 353 227 262 1141 1335, 440 368 220 216 202, 221 271 324, 231 231 702, 271 568 335, 1483 258, 217 144 1141 1294, 1151 323, 741 569, (CCVD) 256, 1051, 432 431 431, 1350 – single-wall (SWNT) – sidewall functionalization – resonator sensing capability – semiconducting single-walled – separation – optical property – oxidation – oxidized – property for sensing – reactivity casting catalysis catalyst – support catalytic chemical vapor deposition capping carbon – amorphous (a-C) – unhydrogenated coating carbon nanotube (CNT) – nanofilament – nanohorn (CNH) – -based molecular device – crystalline – magnetron sputtered – meta-nanotube – application – catalyst-free growth – catalytically activated growth – electronic property – enviornmental impact – field-effect transistor (CNFET) – filled – functionalization – helical – mechanical property – toxicity – unzipping carnivorous plants carrier – density – tip –gas – mean free path – mobility – plate exchange Casimir force 475 745 1441 460 739, 743 1132 459 754 755 749 1439, 466, 1053 398 1124 1030 988 748, 989 989 1161 748 951, 1439 458, 466 1393 1334 1442 1116 747 1335 732, 739, 735 633 740, 988 287 760 1052 1075 1134 737, 739 731 1142 289, 732 409 731 602 735 506 460, 1440, 731 715 596, 1395 729, 1030 1000,

C 1077, 60

C – array calorimeter, miniaturized cancer cantilever –film – ultralow friction Cajal body – deflection – deflection calculation – effective mass – flexible – free standing – hollow –mass – material – mechanics – microbeam – motion – mount – passivated reference – piezoelectric – polymer – resonance behavior – thickness – triangular – stainless steel – stiffness – untwisted – V-shaped – wear cantilever beam – array (CBA) – fabrication procedure – -type silicon – friction force calibration capacitance detection capacitive – detection – detector – pressure sensor capacitor –nanowire capillary – condensation – lateral bending cantilever-in-cantilever (CIC) –force – tip –valve capped nanotube

Subject Index 1674 Subject Index Subject Index 1675

– characterization 1149 coefficient of friction (COF) 957, – conductance 1002 – composition 1573 964, 977, 990, 1000, 1034, 1161, – mode 811 – degradation 1192, 1205, 1233 1170 – mode photolithography 154 – force microscopy (CFM) 227 – lubricant 1033, 1057 – printing (CP) 143, 157 – mechanical polishing (CMP) 169, – relationship 743 – stiffness 1158 353, 1405, 1487 coefficient of thermal expansion – time 149, 1286 –sensor 230, 445 (CTE) 223, 463, 1527 contact angle (CA) 1269, 1275, chemical vapor deposition (CVD) coercivity 289 1285, 1322 55, 87, 88, 97, 129, 202, 251, 255, coflowing 548 – hysteresis (CAH) 1285, 1322 323, 366, 742, 1142, 1338, 1463 collagen 828 – nanotribological property 1189 – atmospheric pressure (APCVD) collective intelligence system 1597 contaminating particle 1292 1103 colloidal contamination 732, 1451 – catalytic (CCVD) 202, 440 – particle 335 continuous stiffness measurement

– graphene 366 – probe 600 (CSM) 1104, 1158 Index Subject – hot filament (HFCVD) 176 – probe experiment 601 continuous wave (CW) 855 – low pressure (LPCVD) 55, 165, colony forming unit (CFU) 606 continuum 1109, 1352, 1404, 1471, 1511 coloration signal 1290 – mechanic of single asperity 1000 – metalorganic (MOCVD) 56, 179, compact disc, capillary 114 – model 996 251 complementarity determining region –regime 966 – STEM electron-beam-induced (CDR) 709 – theory 944 100 complementary contracting cell 1078 chemically assisted ion beam etching metal-oxide-semiconductor contrast (CAIBE) 417 (CMOS) 58, 115, 132, 167, 257, – agent 645 chemiluminescence 1609 324, 398, 431, 471, 542, 1341, – in photon emission 857 chemoselective conjugation 708, 1480, 1508, 1520 control 709 – bipolar (BiCMOS) 64 –system 758, 761 chemotherapy 645, 706 complex pattern 148 – unit (CU) 728 chiral angle 196 composition of matter 1619 controlled chirped-pulsed amplifier (CPA) 105 compression-decompression cycle –geometry(CG) 730 CHO-K1 830 962 – orientation 208 chord theorem 951 compressive 459 convergence–divergence cycle circular dichroism spectroscopy (CS) – forces nanotube 1054 1596 1576 –stress 1160 converging technology 1588, 1590, circularly permuted (CP) 708 compute pattern generator (CPG) 1591 – biofunctional 708 93 cooling, rapid 492 Clar’s aromatic sextet rule 304, 311 computed tomography (CT) 1577 copper clay nanoparticle 1118 conductance 288 – Cu(111) 1003 climb 1445 – quantized 267, 268 – hexadecafluorophthalocyanine climbing plants 1289 –thermal 275 154 coated polymer surface, adhesion conductivity – surface adhesion 1034 1389 – differential 775 – surface wear 1034 coating 1573 –nanowire 273 – tip 1034 – continuity 1173 –thermal 273 coprecipitation 336, 349, 353 – damage 1170 confinement 937 Coriolis acceleration 403 – failure 1167 confocal laser scanning microscopy corona splash 1286 – friction and wear behavior 1019 (CLSM) 837, 1577 cost of good (COG) 699 – friction coefficient 1032 consilience 1590 Coulomb –hard 1145, 1365 constant – interaction potential 1016 – mass density 1150 – current mode 728 –law 1423 – microstructure 1149 – force mode 761 – law of friction 998 – properties 1145 – height mode 728 covalent bonding, modeling of – substrate interface 1166 – NVE 1018 material 1015 – thickness 1157, 1160 contact CP (microcontact printing) 146, cobblestone model 958 – area estimation 1001 156 1365 89, 1006 1160 1486 1355, 571 1149, 749 1495 1494 252 501 1027 353 1181, 1353 732, 1419 1143, 1382 1437 937 349, 1451 1145 345 937 516 1141, 1167, 645, 1000, 1360 1153 1036 1032, 544 472 874 1519 1141 338, 91 950 637 1143 1365, 1143 897 748 1146 952, 1032, 1162, 516 Overbeek (DLVO) 945 595, (DLD) 894, 1359, (ddNTP) (DDT) dewetting DI TESP diagnostic – tools dialysis deoxythymidine triphosphate (dTTP) depletion – attraction –force – stabilization deposition –rate – sealing – technique Derjaguin–Landau–Verwey– Derjaguin–Muller–Toporov (DMT) design – for reliability – of experiments (DOE) –rule – rule check (DRC) desolvation destructive fabrication detection system deterministic lateral displacement diamond –bulk – coating –film – friction – nanoindentation – tip diamond-like carbon (DLC) – coating die per wafer (DPW) dichlorvos (DDV) dideoxynucleotide triphosphate – coating microstructure –film – pillar diblock copolymer dibromoterfluorene (DBTF) dichlorodiphenyltrichloroethane 316 1507 25, 277, 623, 518 214, 564 1489, 268, 117 268 587, 1562 148 473 1163 1160 577, 673 707 487, 154 1604 462, 1075, 513, 1153, 136, 595 821 1017 , 152, 122 336 149 814 697, 627 1390 273 660 258, 289 943 312 132 319 1170 321 776 627, 440 165, 81, D 68 1441 61, 433, 516 516 516 77, 626, 367, – sensitivity dehydration reaction deflection deformable mirror display (DMD) degree of freedom (DOF) delamination defect site deep ultraviolet (DUV) – of defect density of states (DOS) damage mechanism Damascus steel D-band DBBA DCE DDMS (dimethyldichlorosilane) de Broglie wavelength debris Debye – frequency – length deep reactive-ion etching (DRIE) – gradient ultracentrifugation (DGU) delivery – particle –system demolding dendrimer dendritic structure density – functional theory (DFT) – phonon deoxyadenosine triphosphate (dATP) deoxycytidine triphosphate (dCTP) deoxyguanosine triphosphate (dGTP) deoxyribonucleic acid (DNA) – complementary (cDNA) – double stranded – hybridization –origami –sensor – tetrahedra 547 702 1082 1529 498, 98 474 1072, 1021 975 253 830 1082 1597 590, 1072 650 253 1081 153 272 1003 147 1277 152 1365 752 957 1281 1072 253 147 1454 1275 1445 733 1611 589 636 1158 762 123 972 647 548 588 1279 1118, 1156

1092 1087

cyclotron radius cytoskeleton (CSK) cyclic – fatigue – oleﬁn copolymer (COC) cylindrical – mirror analyzer (CMA) – roller stamp – shape cytometry cytoplasm cytoskeletal matrix – structure crystallinity cumulative failure function curing agent cuticle cuticular fold crystal – birefringent – growth direction – morphology – orientation – preferred orientation curcumin (CURC) curved surface – normal load – linked – -linking protein – sectioning crosstalk – model critical – concentration – micelle concentration (CMC) – shear stress – thinking – velocity for stick–slip Crk-associated substrate (CAS) cross – -domain language –-ﬂow – hair alignment creep C-reactive protein (CRP) crack crater formation, surface cytosol cytosolic side (c-side) – computational description – constituent – nonlinear response

Subject Index 1676 Subject Index Subject Index 1677

dielectric 1443 – polymeric nanoconstruct (DPN) driving frequency 750 –charging 1442 650, 655 droplet – function 278 – shape 647 – application 550 dielectrophoresis (DEP) 513, 541, discrete track recording (DTR) 133 – chemical reaction 550 634 disease 645 – detection technique 542 dielectrophoretic force 261 – infectious 606 – digital polymerase chain reaction differential conductivity 775 dislocation (ddPCR) 546 differential scanning calorimetry – defect accumulation 1449 – generation 538 (DSC) 267 – glide 1447 – merging 541 diffusion-limited aggregation (DLA) – motion 957 – microﬂuidic 537 674 – nanoindentation 1022 – sorting 543 – stick–slip 1038 digital – splitting 541 dispersion interaction 937 – feedback 761 Drosophila melanogaster dopamine

displacement sensor 1394 Index Subject – light processing (DLP) 1335, transporter (dDAT) 830 display 229 1482 drug – paperlike 152 – binding 830 – micromirror device (DMD) 5, dissociation 814 404, 1181, 1331, 1400, 1437, 1446 – discovery 553 –path 819 – screening 519 – signal processor (DSP) 728 – rate constant 818 diisopropyl methylphosphonate –target 606 distance distribution function 1440 drug delivery 335, 353, 662, 1102 (DIMP) 471, 472 distortion 759 dilatancy 968 –device 1336 distributed – graphene 384 dimethyl sulfoxide (DMSO) 349, – Bragg reﬂector (DBR) 157 – vehicle 704 819 – feedback (DFB) 157 dry etching 60 dimethylacetamide (DMAc) 349 – laser resonator 157 dry sliding friction 1033 dimethyldichlorosilane (DDMS) dithiol monolayer 151 DSPE-PEG 650 1441 DMA 367 dual-in-line packaging (DIP) 1513 dimethylformamide (DMF) 349 DNA 25, 77, 81, 132, 136, 487, Dupré equation 955 dimethylmethylphosphonate 587, 623, 626, 627, 697, 1075, dye penetrant 1453 (DMMP) 472 1562 dynamic diode 268 – complementary (cDNA) 518 – (atomic) force microscopy 872 – light-emitting 282 – double stranded 707 – force spectroscopy (DFS) 817 – hybridization 462, 473 –nanowire 282 – interaction 937 –origami 627 dip-pen nanolithography (DPN) 77, – light scattering (DLS) 668 –sensor 289 701 – mode 460, 462, 731 Dirac – tetrahedra 821 docetaxel (DTXL) 650 – cone 307 E –fermion 304 domain pattern 795 donor impurity concentration 278 – point 307 dopant 54 E. coli bacteria 810, 834 direct DOPC 474 Earth-scale platform 1593 – current/radio frequency (DC/RF) DOTA 650 EDC 708 1144 double edge 303 – gap material 435 – -layer interaction 937, 943 – armchair 305 – laser writing (DLW) 103 – -wall nanotube (DWNT) 201, 440 – disorder 147 – numerical simulation (DNS) 647 doxorubicin (Dox) 346 –geometry 305 – stochastic optical reconstruction DP 1198, 1363 – state 307, 316, 321, 328 microscopy (dSTORM) 858 DPPC 650 – zigzag 305 – write electron beam/focused ion drag 1265 effective beam lithography 144 – -reducing shark skin 1270 – medium theory 278 directed self-assembly (DSA) 74, – reduction 1265 – PSF 853 317 drift – shear stress 1002 discoidal – correction 792 – spring constant 835, 994 – nanoparticle 657 –thermal 459 – stiffness 1083 75, 1272 819 56, 1560 1268, 960 1570 317 261 645 1282 1014 1563 1265, 56, 832 1283 1507 312, 957 748 1564 502 58 1550 1283 816 1520 961 626, 589 58 308, 1268, 1575 519, 1281 814 650 1487 264, 256 144 937 858 59 304, 1268, 60 656 1407 59 816 (EMT) (EPR) (ELISA) 257, 179, (EDS) – sacriﬁcial – through wafer –wet ethanolamine-hydrochloride ethylenediamine pyrocatechol (EDP) eukaryotes Euler equation epi-poly epitaxial growth epitaxy – molecular beam (MBE) equilibrium dissociation constant equity issues ER stress erythrocyte (EC) etching – anisotropic –dry – isotropic – metal-assisted chemical (MACE) epithelial–mesenchymal transition – dose –gap – landscape – MD simulation – -transfer mechanism engineered – nanomaterial (ENM) – nanoparticle (ENP) enhanced permeability and retention entangled state entropic –force – repulsion enzyme-linked immunosorbent assay epicuticular wax –crystal epidermal surface epidermis – cell endothelium barrier energy – barrier – -dispersive x-ray spectroscopy 338 1496 305, 568 1574 345 541 1275 118, 1438, 469 772 701 1391 510 149 75, 353 98 1365 1405 336 230, 1016 97, 75 1507 1442 1445 1183 506 1530 336, 1167 647 353 263 651, 87, 57, 1506 149, 511 1148, 97 154 943, 727 1394 , 306 304 335, 1511, 1424 441, 1574 733 1145, 148 937 154 418, 1148 1015 102 fabrication 317, -electron electron beam – unpaired – tunneling – lithography (EBL) – induced deposition (EBID) – evaporation – assisted evaporation electronic electron diffraction (ED) – low energy (LEED) – selected area electron-beam-induced CVD – in situ observation – three-dimensional nanofabrication electronegativity –ink – newspaper – noise electroosmotic pump electroplating – CVD coating electrospraying electrostatic – actuated valve – actuation – discharge (ESD) – double layer (EDL) –force electron cyclotron resonance (ECR) –CVD – loading electrowetting – micropump – -on-dielectric (EWOD) elliptical shape elongation speed embedded atom method (EAM) embedding energy embossing technique emulsion inversion point (EIP) emulsion–solvent extraction – vacuum encapsulation endoplasmic reticulum (ER) –stress – nanofabrication –resist – three-dimensional nanostructure 346 321 1430 282 1027 1154 312, 230 268 261 310, 669 1118, 148 737 462 1000 1520 966 494 200 95 309, 1083 146, 315 317 1149 260 1103, 657 1419 513 229 957, 646 254 510 510 738 941 730 1348 253 1551 1146,

(EHL) 251, (ELNES) 265 384 265,

– deformation – modulus EHS eigenfrequency elastic – contact – continuum elastohydrodynamic lubrication – tip–surface interaction elastin-like polypeptide (ELP) electromagnetic –energy –force – interference (EMI) electron – correlation – emitter –STM electrochemical deposition (ECD) – pulsed – selective electrohydrodynamic – mixing – pump electrokinetic –ﬂow electroless – deposition electroluminescence (EL) – energy loss near edge structure – pump – ﬁeld gradient microscopy (EFM) – force gradient electrical – contact resistance (ECR) – double-layer capacitor (EDLC) – feedthrough electrochemical –AFM –nanowiregrowth electric – -arc reactor elastomer stamp – energy loss spectroscopy (EELS) – transport – Fermi wavelength – holography

Subject Index 1678 Subject Index Subject Index 1679

evaporation fetal bovine serum (FBS) 1389 – element modeling (FEM) 1103, – electron beam-assisted 469 few-layer graphene (FLG) 372 1443 –thermal 469 fiber – -size effect 280 exchange, carrier plate 991 –matrix 1085 fish-hooked hairs 1289 exciton, diffusion length 286 – optical interferometer 751 flavonoid 1274, 1279 exfoliation 367 FIB-milled probe 741 flexible – graphite 365 fibrinogen (BFg) 1564 – cantilever 732 – high-shear mixing 367 field – electronic device 152 – micromechanical 365 – cooling 796 flip-chip technique 1507 – solvent 367 – emission 283 floating catalyst method 205 flow – ultrasonication 367 field-effect transistor (FET) 172, – -focusing configuration 540 exosome 345 230, 269, 282, 325, 379, 432, 569, – -focusing geometry 549 external 693, 702, 1348

– laminar 492 Index Subject – foundry 1483 – carbon nanotube 436 – nanoliter 1345 – vibrations 729 – heterojunction 713 fluid extracellular – immunoFET 710 – drag reduction 1293 –matrix(ECM) 502, 592, 1077 –nanowire 269 – nanoparticle 344 – force microscopy (FluidFM) 602 – protein sensing 693, 710 fluidized bed (FB) 203 – polymeric substance (EPS) 1310 – sensing channel 711 – signal-regulated kinase (ERK) – CCVD reactor 204 –spin 329 1574 fluorescence 29 field-emission scanning electron extreme ultraviolet (EUV) 53, 117 – (or Förster) resonant energy microscopy (FESEM) 564, 1565 transfer (FRET) 1080 field-programmable logic arrays F – -activated droplet sorting (FADS) (FPGA) 283 544 filament – total internal reflection (TIRF) fabricated silicon 1390 – cross-linker 1094 832, 857 fabrication technology 395 – elastic property 1074 fluorescent photoactivated – destructive 571 – intermediate 1086 localization microscopy (fPALM) faceted cavity 284 filled carbon nanotube 217 857 F-actin 1072 – in situ filling method 218 fluorescent polystyrene particle failure – molten-state filling method 218 1573 – density function 1529 – wet chemistry filling method 218 fluorinated silane monolayer 149 – mechanism 1172, 1437 fluorographene 369 – mode 1437 filled hairs 1283 film 53, 1028 focal adhesion kinase (FAK) 1092 – modes and effects analysis focused ion beam (FIB) 87, 128, (FMEA) 1496 – bulk acoustic resonator (FBAR) 1519 671, 730, 1438 fatigue 1158, 1448 – cross section 1450 –C60 729, 1052 – crack 1170 force – graphene 377 – cyclic 1158 – attractive 937 – nanoindentation thickness 1028 – damage 1158 – between surfaces in liquid 937 – nonconductive 1146 – measurement 1469 – between surfaces in vacuum 937 – surface interface viscosity 1045 – strength 1107, 1114 – calibration 988 –test 1161 – transparent conductive 377 – calibration plot (FCP) 1220 FDTS 1441 filtered cathodic arc (FCA) 1145, – Casimir 937 feedback 1146, 1365 – colloidal 937 – circuit 733 – coating 1155 – detection 748 – loop 762, 990 – deposition 1145 – determination 1080 –network 727 fimbriae 592 – –distance curve 593, 737 femtosecond laser (fs-laser) 87, 103 fine leak 1453 – electrostatic 937 – nanofabrication 103 finite – entropic 937 – photopolymerization 104 – -difference time-domain (FDTD) – generation 624, 1081 fenestration 650 107 – hydration 937 ferritin 345 – element analysis (FEA) 1461 – hydrodynamic 937 832 352, 957, 1367 1022 1367 288 365 126, 1564 999 272 645, 281, 363, 385 372 449 372 -Ig) 366 812 250 262, 305, 1293 376 368, 377 269 257 285 1143 469 727 1489 548 821 303, 150 370 374 149 150 312 1072 147 146 377 147, 1489 1279 149 1483 730 316 170 1335 105 1562 1117 gap – stability gas exchange gate control gauge factor (GF) G-band Ge –nanowire geometry – effect in nanocontact getter giant magnetoresistive (GMR) –stamp – wafer G-actin gamma-globulin ( GaN nanowire glancing angle deposition (GLAD) gland glass – capillary – frit – nanochannel – slide – transition temperature glucose transporter 4 (GLUT4) glutaraldehyde glutathione peroxidase (GSH-Px) gold – -coated – eutectic –film – nanomechanical properties – nanoparticle (GNP) –nanowire – pattern grain – boundary scattering – nanoindentation boundary –size graphene – application – bilayer – composite – decomposition – derivatives – doping – few-layer (FLG) –film – gene transfection 1044, 977, 999 1189, 742 220 998, 968, 1428 1052 1013, 902 1057 1141 1000 1450 1170 731, 962, 1382 1397 1474 1034 872 1199 1490 987, 781, 716, 941 1033, 1033 735 744 957, 1419, 1360 286 1161, 572 1422 1387 993 959, 1070 1142 1429 1033 702, 1110 329 762 1046 994 1001 1398, 1392 1034, 149 870, 994 G 749 521 1353, 725, 1161, 1000, – in water fuel cell fullerene – frictional property – particle functionalized nanotube – tip fundamental resonant frequency fused deposition modeling (FDM) fusion bonding friction force microscopy (FFM) – measurement – of Si(100) –curve – magnitude –map – dry sliding – interlayer – load dependence – loop – lubrication – measurement – measurement methods –MEMS – metal surface – of biomolecule – of polysilicon –profile – rate-state –SAM – scale dependence – surface – temperature dependence – -torque model – velocity dependence friction force – coefficient – and wear – attachment – calibration GaAs – nanowires G protein 788 791 988 972, 1428 771, 757 761, 1006 1114, 795 1033, 1439 93 95 626, 731, 1394 1109, 1463 937 1013, 1014 937 1486 1116 1253 599, 937 991, 1169 1027 757 937 937 676 987, 937 1103, 1164, 937 817 937 937 847 1115 1483 995 1116 732, 1105 725, 1307 673 1470 1157, 938

1220, 1563 1149 spectroscopy 975 (FKT) microscopy (FM-SFM) 1154,

– response frication time dependence friction – accelerated – electrical property free standing cantilever free-space nanowiring freezing-melting transition frequency – measurement precision – modulation (FM) – -modulation scanning force – nonequilibrium – oscillatory – protrusion – repulsive – sensing tip –sensor –law – MD simulation – solvation – spectroscopy – indentation – ion correlation – spectrum – structural – undulation foreign body giant cell (FBGC) forward recoil spectrometry (FRS) fouling foundry – manufacturing –MEMS Fourier transform infrared fractal –dimension fracture – failure – Grifﬁth theory – hydrophobic four-quadrant photodetector –stress – surfaces – toughness Frenkel–Kontorova (FK) Frenkel–Kontorova–Tomlinson

Subject Index 1680 Subject Index Subject Index 1681

– nanoribbon (GNR) 303, 366, hemodynamic resistance 1392 – printing 143, 147 379, 1006 HEPES 830 –stamp 144 – nanostructure 303 hermeticity 1442, 1451 – transmission electron microscopy – properties 369 herringbone texture 197 (HRTEM) 219, 263, 564 – quantum dot 379 Hertz contact model 595 high-temperature – transistor 379 Hertz-plus-offset relation 1000 –MEMS/NEMS 1403 – zigzag-edged 306 hetero-coagulation 343 – superconductor (HTSC) 785 graphene oxide (GO) 367 heterodyne interferometer 750 high-throughput 637 – reduced 367 heterogeneous CCVD 203 – screening (HTS) 520, 537, 1575 graphite 1141 heterointegration 1500 high-volume manufacturing (HVM) – cathode 1145 heteronanotube 217 137 –ﬂake 1053 hexadecane thiol (HDT) 147, 924, hinge memory effect 1446 – intercalation compounds (GIC) 1191, 1395 hollow

364 hexadecyl trimethyl ammonium – cantilever 602 Index Subject – sheet 1053 bromide (CTAB) 955, 1573 – nanoparticle 345 grating 157 hexagonal boron nitride (hBN) 380 holographic optical tweezers (HOT) – antireflection 136 hexagonal honeycomb polysilicon 635 green fluorescent protein (GFP) (HEXSIL) 72 homodyne interferometer 750 832, 1090 hexamethyldisilazane (HMDS) 52 honeycomb lattice 303, 304 Greenwood and Williamson (GW) hierarchical Hooke’s law 814 1420, 1440 – sculpturing 1279 horizontal coupling 729 Griffith fracture theory 1116 – structure 1265 hot embossing lithography (HEL) gross leak 1453 high aspect ratio 122 117 – combined poly- and single-crystal ground-state depletion (GSD) 855 – thermoplastic 117 silicon (HARPSS) 73 guanosine triphosphate (GTP) 1074 hot filament chemical vapor – MEMS (HARMEMS) 1334, gyroscope 403, 1480 deposition (HFCVD) 176 1406 human – tip (HART) 741 – body model (HBM) 1496 H high content screening (HCS) 1573 – –computer interaction 1594 high density interconnect (HDI) Hagen–Poiseuille equation 501 – interleukin (hIL) 708 1508 – -scale convergence 1592 hair 1276 high density lipoprotein (HDL) 345 – -scale platform 1594 Hall effect 375 high electron mobility transistor – quantum 376 (HEMT) 182 – serum albumin (HSA) 345, 474 Hamaker constant 902, 939, 942, high school education 1607 Human Genome Program 1336, 1391 high-angle annular 1549 hard dark-field-scanning transmission hybrid – amorphous carbon 1145 electron microscope – continuum-atomistic thermostat – coating 1365 (HAADF-STEM) 101 1018 –law 1552 high-cycle fatigue 1449 – nanocarrier 664 hardness 1103, 1118, 1149, 1154, high-definition television 132 – self-assembly-based chip-to-wafer 1354 higher harmonic 812 bonding (HAS-CtW) 1502 harmonic oscillator, driven damped highest occupied molecular orbital hybridization 312, 518, 646 462 (HOMO) 780 hydration force 947 heat 646 highly ordered monolayer 146 hydrocarbon 1183 – curable prepolymer 144 highly oriented pyrolytic graphite – precursor 1148 – dissipation 1526 (HOPG) 81, 260, 315, 737, 882, – unsaturated 1184 – mode 460 1277 hydrodynamic heating high-modulus elastomer 146 –radius 501 – localized 1510, 1515 high-pressure liquid chromatography – shear forces 636 –rapid 492 (HPLC) 543 hydrogel 502 – rapid cooling 492 high-resolution hydrogen helical nanotube 195 – electrode 154 – concentration 1150 helium ion microscope 318 – patterning 152 – content 1153 1498 313 814 1430, 957 655 1550 307, 814 1146 811 1145 542 1145 1146 1268 572 732 743 132 967 1356 814 1438 1153 1144, 693 327 326 98 313 308 1487 790 1091 574 1074 1095 958 1146 1161 1164 732 344 739 826 752 detection (IC3D) intracellular –NP – pathway intracuticular wax intramolecular – junction – structure intravalley – scattering – transition intravital microscopy intrinsic stress invariant natural killer T (iNKT) cell InvenSense involuntary exposure ion – channel – implantation – plating technique – pump (IP) – source ion beam (IB) intervalley transition – polymer optic – tip interaction rate constant interatomic – attractive force –force – spring constant intercalation interconnect interfacial – defect – engineering – friction –stress interferometric detection sensitivity interferometry interlayer friction intermediate –filament – or mixed lubrication – thickness film intermittent contact intermolecular force internet of things (IoT) – deposition (IBD) – sputtered carbon – comprehensive droplet digital 1487 1614 353 229, 848 353, 1023 728 349, 1160 152, 1611, 343 324, , 1291 146 286 342 1507 1310 163, 1311 1605, 1482 400 264 278 1157 1120 261 279, 336, 834 51, 1577 645 778 1104 469 725 157 1102 1573 472 1154, 1104, 1025 504 378 1506 1575 (ICA) 283, 172 1487 395, 1577 (ICP-OES) indium tin oxide (ITO) –depth integrated – circuit (IC) instrumentation input/output (I/O) insect catching plants inorganic–organic NP inositol-requiring protein 1 (IRE1) InP nanowire in-plane – mechanical strain – stresses nanoindentation – induced compression –rate independent component analysis inductively coupled plasma (ICP) – mass spectrometry (ICP-MS) – optical emission spectroscopy – hardness imprint – lithography – polymer indentation – creep – experiment impurity in situ – growth study – sharpening of the tips incoherent cutoff frequency inelastic –regime – tunneling inertial measurement unit (IMU) inertial MEMS – high-volume manufacturing inertial sensors infrared (IR) – spectroscopy inkjet – -spotting inorganic fouling – surface factors inorganic NP 718 1344 1397, 1180 1145 473, 278 327 349 763 1363, 849 1293 517 312 1285, 759 731 712 1284 710 703 1280 738 712 1280 762 1293 712 647 267, 1483 661 1441 1149 1285 1149 693, 1049 1049 948 733, 1037 263 ® 712

I 647 (IFEM) 1608 1030, 695,

immersed boundary method (IBM) immersed ﬁnite element method immunoFET – limitation – molecular nanocomponent –planar – receptor immunoglobuline G (IgG) image – processing software – topography imaging – bandwidth –therapy – tool iMEMS illumination function hydrothermal synthesis IBD (ion beam deposition) illumina sequence hyperbolic metamaterial –SAM – surface for nanotribology hydrophobicity hyperconjugation hysteresis – loop hydrophobic – coating –force – interaction – silsesquioxane (HSQ) hydrogenated – carbon – coating hydrogen-terminated diamond hydrophilic – anchor cell – coverage –SAM – surface – surface chemistry – evolution recovery (HER)

Subject Index 1682 Subject Index Subject Index 1683

ionic liquid film 1242 Laplace ligand 591 – dicationic 1249 –force 1221 – -receptor interaction 810 ionizing radiation 1442 – pressure 951 light irreversible deformation 1445 large-scale integrated circuit (LSI) – absorbant 229 isofunctional object 699 324 – beam deflection galvanometer isogeometric analysis (IA) 647 laser 284, 618 752 isoleucine–lysine–valine–alanine– – ablation 257, 336, 1406 – -emitting diode (LED) 132, valine (IKVAV) – assisted growth 256 282–284, 1617 703 – -based vapor deposition 348 – -induced fluorescent (LIF) 542 isopropanol alcohol (IPA) 1513 – deflection technique 733 – -sheet microscopy 862 isopropyl-ˇ-D-thiogalactoside – interference lithography 145 limit-of-detection (LoD) 438 (IPTG) 836 –nanowire 284 linear variable differential isospectral structure 781 – three-dimensional nanostructure transformer (LVDT) 760 isotopic tracing (IT) 1577 fabrication 103 linearization, active 760 Index Subject isotropic etching 147 – tracking microrheology (LTM) linker of nucleoskeleton and I–V characteristics 277, 424 635 cytoskeleton (LINC) 1075 –trap 619 linker protein 1074 J – trapping 565 lipid 645 – tweezers Raman spectroscopy – bilayer 590, 1071 Jahn–Teller effect 782 (LTRS) 635 – vesicle 1089 jellium approximation 1016 lasing threshold 284 liposome 1390 jet-and-flash imprint lithography lateral liquid 936, 1042 – bending 1124 (JFIL) 118 – -crystal display (LCD) 134 – contact stiffness 987 Johnson–Kendall–Roberts (JKR) – crystal on silicon (LCoS) 134 –force 754, 988, 998 595, 952, 1000, 1419 – film thickness measurement 926 – force microscopy (LFM) 146, jump into contact 1392 – lubricant 1042 725, 871, 988 jump-to-contact (JC) 789, 1019 lithium ion battery 230, 286 – manipulation 793 lithography 52, 115, 261, 336, 701, – resolution 728, 731 1332, 1349 K – spring constant 738 – hot embossing (HEL) 117 – stiffness 761, 1002 Kelvin probe force microscopy –imprint 261 laterally integrated nanogenerator (KPFM) 769, 794 (LING) 288 – jet-and-flash imprint (JFIL) 118 kinesin 625 lattice – laser interference 145 kinetic friction 994 – Boltzmann method (LBM) 647 – multiple beam interference 103 knife-edge blocking 760 –every 959 – nanoimprint (NIL) 113, 1406 Kohn anomaly 374 – imaging 732 – self-aligned imprint (SAIL) 124 Kondo effect 778 layer –soft(SL) 114, 1406 Kramers’ diffusion model 818 – lubricant 1042 – step-and-stamp imprinting (SSIL) kurtosis 1392 –ofresist 144 131 layer-by-layer (LBL) 377 –STM 318 L lead zirconate titanate (PZT) 57, – substrate conformal imprint (SCIL) 164, 180, 287, 562, 728, 1343 130 lab-on-chip (LoC) 132, 488, 538, leaf margins 1284 lithography, electroforming and 1336, 1345 leaf surface 1268, 1275, 1283 molding (LIGA) 70, 169, 509, –system 514 Lennard-Jones (LJ) 1016 1101, 1337, 1404, 1446 laminar flow 492 – potential 902, 1016 – microsample 1446 laminated n-channel transistor 154 leukocyte rolling 1087 – process 1406 Landau level 273 Lieb’s theorem 308 – technique 1101 Langevin dynamics approach 1017 life cycle 1544, 1551 living plant material 1276 Langmuir–Blodgett (L–B) 260, lifetime 816 living prototype 1265 924, 1033, 1181, 1216, 1361 – broadening 776 load –film 36 Lifshitz theory 942 – -carrying capacity 1171 – technique 260 lift mode 738 – dependence of friction 1000 154 510 307 144 1148 1115, 1103 1562 1441, 98 1000 304, 553 465 603 279 1102, 725 633 1052 846 272 554 1144 810 629 1497 1611 636 731 944 509 1490 458 272, 329 1057 268 1593 654 603 1531 1445 1487, 462, 1459 1023 (MLE) ionization (MALDI) 1531 (MALDI-TOF) (MRAM) – experimental technique measurement chamber mechanical – deflection – field stability – micropump – phenotyping – properties of cells – stability fullerene – stiffness –stress mechanical property maximum load, nanoindentation mCube mean – -field theory – free path – time to failure (MTTF) Matthiessen’s rule Maugis–Dugdale model maximum likelihood estimator – -time of flight mass spectrometer magnetohydrodynamic pump magnetron sputtered carbon malondialdehyde (MDA) mammalian cell manipulation – of individual atom – of whole cells manufacturing marginal ray angle mask, high resolution stamp mass – flow controller (MFC) – of cantilever – sensors, beam-based massless Dirac fermion material – initiative – lubricant matrix electronic paper, active matrix-assisted laser desorption – resistance – resistive random access memory magneto – -optical Kerr effect 1168 352, 506 134, 1043 1344 798 798 1496 1077 1352 1078 1359 290 1034 1031 1057 1290 797 796 289 798 1172 289 737 353, 626 694 312 1577 795 1144 1343 289 1422 769, 738 812 798 279, 769, 335, 623, 336 310, 646 798, 769, 1352 290, 645 1359 623 349, 718, 738, M 661, nanoparticles (MSCK) (MExFS) 265, (MRFM) (MExFM) – layered structure – liquid – long-chain hydrocarbon – perfluoropolyether lubrication – monolayer – property ceramics – property polymer luminescent moss – resonance imaging (MRI) –storage – thin-film head – tweezers – twisting cytometry magnetic force microscopy (MFM) – sensitivity – vortex imaging magnetically actuated valve magnetization switching – shell cross-linked knedel-like – exchange force spectroscopy – exchange interaction –field – force gradient – force microscopy (MFM) – logic architectures – memory array –moment –nanowire –NP – resonance force microscopy – application – bead microrheology –datastorage – tribological characterization magnetic – exchange force microscopy machine model (MM) machining macromolecule macroscale – friction MAC mode 937, 165, 308, 476 1483, 515 1575 991 55, 876 1471, 1157 169 1449 672 917 1103 794 1104 68, 1270 1157 856 277 283 732 1404, 1384 773 814 276 780 878, 772 761 769, 29, 319 272, 1123 1265, 1105, 1352, 1041, 1608 1286 473 775 311,

942 755 ampliﬁcation (LAMP) concentration (LOEC) 345, (LEED) (LUMO) 1103, deposition (LPCVD) 1511 (LT-STM) 311, 308, (LCPD)

London dispersion interaction longitudinal piezoresistive effect loop-mediated isothermal lotus – effect – leaf low-cycle fatigue lowest observable effect low-density lipoproteins (LDL) low-energy electron diffraction lowest unoccupied molecular orbital low-noise measurement low-pressure chemical vapor – scanning tunneling microscopy low-temperature (LT) –AFM/STM – oxide (LTO) lubricant –ﬁlm locked nuclei acid (LNA) – stiffness localization – effects –microscopy localized surface – elasticity – plasmon (LSP) logic gate – deformation study – density approximation (LDA) – density of states (LDOS) –proﬁle loading rate local – contact potential difference – peak indentation –curve – peak-to-peak load–displacement – characteristic

Subject Index 1684 Subject Index Subject Index 1685

– measurement 1471 metallic – packaging 1480, 1505 – of DLC coating 1161 – bonding, modeling of material – polymer 1524 mechanically controlled break 1015 – radio frequency (RF MEMS) 172 junction (MCBJ) 267 – microbeam 1116 – resonator 413 mechanics of cantilever 747 –nanowire 268 – resonator-based oscillator 414 mechanochemistry 573 –NP 337, 351 – static friction force 1397 mechanosensing 1094 – single-walled carbon nanotube – stiction 1397 – protein 1091 (m-SWNT) 432 – tunable capacitors 410 mechanosensitive channel of large metalorganic chemical vapor microemulsiﬁcation 338 conductance (MscL) 1095 deposition (MOCVD) 56, 179, microemulsion 336, 348, 353 mechanotransduction 1070, 1092 251, 255 microengine 1338, 1429 megacity initiative 1593 metal–oxide–semiconductor (MOS) microfabrication 146, 396, 464, 88, 1442 Meissner effect 796 1351, 1406

metal–oxide–semiconductor Index Subject melting temperature 1445 microfilament 1072 field-effect transistor (MOSFET) membrane 830, 1071 microflow-focusing device (MFFD) 325, 713, 1348, 1430 – deformation 1088 664 metal-to-metal contact 1471 microfluid diffusion 492 – stiffness 1088 metastases 596 – surface tension 1089 microfluidic 260, 489, 662, 1345 methotrexate (MTX) 668 –device 516 membrane-type surface stress sensor methylmethanesulfonate (MMS) (MSS) 468 – fuel cell 521 1566 – mixing 662 MEMS fabrication 62 mica 737, 812, 996 –network(FN) 469 – material properties 1495 micelle 349 – paper-based analytical device – process control parameters 1495 – worm-like 349 (PAD) 499 MEMS/NEMS micro total analysis system (TAS) – sequence 516 – lubrication studies 1359 488, 490, 1344 –system 634 – mechanical property 1102 micro wine glass 89 – technology 488 – microfabrication processes 1351 micro/nanoindenters 1103 –trap 678 – nanotribology 1336 micro/nanoscale friction, velocity microfriction directionality effect – radio frequency 1332 dependence 893 887 – tribological property 1352 micro/nanostructures using bending microimplant 1382 tests 1108 meniscus force 902 microindenter 1077 mercaptopropyltrimethoxysilane microactuator 1339 microamplification device 515 microinductor 575 (MPTMS) 150 micromachine 1102 mesoporous microcantilever (MC) 459, 471, 1335, 1342 micromachined – silicon particle 645 – inductor 411 – structure 659 micro-computer tomography (micro-CT) 514 – polysilicon beam 1393 messenger ribonucleic acid (mRNA) microcontact printing (CP) 114, – silicon 1332 518 117, 146, 1181 – structure 1460 metal 171, 645 microdevice 1101 – surface 713 – -assisted chemical etching (MACE) microelectromechanical system micromanipulation 565 257, 656 (MEMS) 2, 51, 163, 395, 441, micromechanical calorimetry 464 – eutectic bond 1485 443, 561, 869, 1013, 1077, 1101, micromechanical characterization – evaporated (ME) 911, 1144 1102, 1145, 1179, 1216, 1331, 1154 – matrix composite 223 1334, 1419, 1437, 1459, 1481, micromirror array 68, 407, 1335 –NP 352 1505 micromotor 396, 1392, 1397 – oxide NP 336, 337 – electric field stability 1496 – component, surface roughness – oxide surface 789 – field performance 1496 1392 – particle (MP) 911, 1172 – foundry 1483 – lubricated 1398 – particle (MP) tape 1172 – friction 1419, 1429 micro-nanofluidic 504 – salt reduction 336, 353 – manufacturing strategy 1482 – application 504 – tip, deformable 1019 – nonsilicon 1334 –design 491 metal/insulator/metal (MIM) 155 – optical 404 – fabrication 496 1016 559, 419 367 1051 396, 874, 1102, 1419 1576 1437, 146, 40, 1405 395, 742, 1430 132 1101, 103, 1595 645 1565 1615 1331, 1390 1365, 693 163, 1216 567, 697 574 88, 650 869, 559 1407 1619 646 607 62, 657 415 104, 1366, 1216, 1505, 340 , 197, 695, 1158 1149, 645 695 2 carbon) nanotube 1573 1543 914 559, 679 1620 1118 625 1350, 1179, 1481, 726, 441, 198 198 -dimethylamide (DMA) N N 1054, 1511 (MWNT) paradigm 644, (MPPD) 415, 1145, 1459, (NEMS) -acetyl-cysteine (NAC) , –bc –bh myocbacteria myosin N multiple-asperity friction multipole interaction potential multistage strategy multi-user MEMS process (MUMP) multiwalled ( N NAND flash memory nanoasperity junction – nanoassembly NanoAventura nanobarcode nanobiological device, design nanobiotechnology nanocapsule nanocarrier nanochannel nanofatigue – fabrication – radio frequency resonators nanoelectronic nanoELSI nanofabrication multiple path particle dosimetry nanochemistry nanoclay nanocomposite material nanocrystal nanocone nanoconstruct – accumulation nanodeformation nanodevice – supramolecular NanoEIS nanoelectromechanical system 816 179, 1018 472 1422 75, 1508 1244 710 1265 56, 1014, 1030 74 818 1276 1094 1359 1051 327 993, 1284 737 697 266 1217 1078, 1362 657 103 693 821 1283 1493 435 116 1549 1609 1265, 1172 781 1076, 625 705 120 150 28 155 144 ponent device 252 1284 1279 nanoparticle 3 542 96 lithography 1407 – imaging – motors – recognition – recognition phases (MRP) –sieve – spring model – switch – weight monocationic liquid film – dynamics (MD) – engineering monolayer indentation monolithic elastomer device (MED) Monte Carlo MoO – conformation – cloning device molding molecular – adsorption – beam epitaxy (MBE) Moore’s law moral order More Moore approach morpho butterfly scale quasistructure MoSe nanowire most probable unbinding force most-probable rupture motor –neuron – protein MPTMS multiasperity measurement multicellular –base –hair – structure multichip module (MCM) multicom multiple beam interference multimolecular layer multifunctional surface multilayer –device – graphene (MLG) – nanoparticle multilayered wax film multimedia multimode AFM – thin-film , 2 1086 747 1392 1016 1406 1074, 1347 157 1522 1194 978 1353, 1394 537 1077 1406 625, 1079 1574 156 1352 906 1167 1353 1393 562 1346, 1348 1332, 155 1609 , 1251, 343 1154 3 1161 514 602 1430 397, 875, 748 1077– 907, 995 618 509, 1082, 505, 1161, 344 1094 1335 884, 606 326 725, 336 875, 1332

(mSBF) (MOEMS) 177 1149 measurements (MAPK) 1102, (MIC)

modulus – elastic – of rigidity micropipette – aspiration microplate platform microplate stretcher micropump micropatterned SAM mobile exhibit mobility mode coupling grating modified EAM (MEAM) modified simulated body fluid microoptoelectromechanical systems –filament microvalve microwave plasma CVD (MPCVD) microwave-PECVD (MPECVD) microwear microswitch microsystem technology (MST) microstructures, adhesion microspark erosion microscope eigenfrequency microsensor microscopic asperity microscratch misfit angle mitogen-activated protein kinase microreactor microscale – friction – wear – scratching microtransformer microtriboapparatus microtubule (MT) Mie regime millimeter-scale device milling millipede MIM capacitor miniature device miniemulsion minimum inhibitory concentration

Subject Index 1686 Subject Index Subject Index 1687

nanofiber 346 nanoparticle (NP) 41, 201, 221, nanostructure 1276, 1571 nanofluidic 335, 643, 1051, 1366, 1559 – bending test 1104 – channel 136 – application 351 – bi-dimensional optical 679 –device 1101, 1348 –Au 1367 – fabrication, three-dimensional 88, – silicon array 1348 – classification 336 103 nanogap 43 –clay 1118 – finite element analysis 1125 nanogel 340, 352 – discoidal 657 – hybrid 707 nanogenerator – electrical property 351 – measurement of mechanical – laterally integrated (LING) 288 – extracellular 344 properties 1103 – vertically integrated (VING) 287 – hollow 345 – roughness 1125 nanographene 303 – hybrid 336, 342, 353 – scratch 1125 nanohardness 1153 – inorganic 336, 342, 353 – scratch test 1103 nanohelix 23 – intracellular 344 – space-filling 702 nanoimprint lithography (NIL) 113, – magnetic 349, 646, 1348 – stress and deformation analysis Index Subject 1406 – magnetic property 349 1101 nanoindentation 915, 1019, 1154, – mechanical property 350 nanoswitch 1430 1354, 1460 – metal 336, 352 nanosystem technology (NST) 2, – hardness measurement 875 – naturally occurring 344 1102, 1332 – maximum load 1023 –organic 338, 344, 353 nanotechnology 2 – MD simulation 1019 – polymer 336, 352, 646 – material 695 – measurement 877 – property 348 – method 644 – surface atom relaxation 1021 – quasihemispherical 657 nanotherapeutic device – shape 349 nanoindenter 1103, 1108 – barrier to practice 717 –size 348 – construction method 701 nanoinjection 660 – synthesis 336 – intellectual property 701 nanolens array 672 – tip 1051 nanothermometer 267 nanoliposome 664 nanopharmacological 831 nanotransfer printing (nTP) 148, nanolithography 701, 1335 nanopillars 657 155 nanomachine 561 nanopore 1349 nanotribological properties of silicon nanomachining 726 – sequence 517 1355 nanomanufacturing 2, 335, 353 nanopositioning 758 nanotribology 713, 870, 1219, nanomaterial, heterologous 707 nanoprecipitation 338, 341, 349, 1352, 1422, 1429 nanomechanical characterization 353, 663 nanoTruck 1609 1402 nanorobotic nanotube (NT) 23, 256, 336, 346, nanomechanics 1069, 1352 – assembly 568 349, 415, 572 nanomedicine 645, 1619 – manipulation 560 – assembly 572 – synthesis 662 – manipulator (NRM) 563 – bamboo multiwall 198 nanometer 1013 nanorobotics 559 – -based sensor 1335 – resolution 144 nanorod (NR) 1366 – bundle 1053 nanometer-scale –CdSe 286 – capped 1030 –device 1013, 1332 nanorope 703 –coated 221 – electronic device 1051 nanoscale – decorated 221 – friction 999, 1013 – adhesion 1352 – double-wall (DWNT) 201, 440 – friction, ceramics 1034 – adhesion measurement 1377 – field-effect transistor (FET) 703 – indentation 1013 – antibiotics 706 – functionalized 220 – lubrication 1013 –device 1365 – helical 195 – material property 1019 – distance, tunable 700 – junction 573 nanomotor 563 – friction measurement 1378 – zigzag-type 195 nanoneedle 657 – friction wear mapping 898 nanovesicle 346 nano-objects – protein interface 693 nanowire (NW) 43, 63, 415, 657, – friction 1365 –texture 976 1335 – mechanical behavior 1365 – wear 906 – aligned 262, 263 nanooptoelectromechanical systems – wear test 1380 – applications 290 (NOEMS) 3, 1332 nanoshuttle 1609 – arrangement 262 80, 994, 798, 1091 1576 1076 215, 857 782, 262 105, 811 630 702, 564 326 846 148 732 267 407 749 629, 630 1363 564, 1342 1363 971 280 1441 862 24 278 1363 1442 407 1091 731 434, 404 1198, 284 284 1198, 618 735 147 1422, 1198, 363, O 1050 1189, (OMCTS) 249, 1423 1578 (O-E-O) 1275 ODDMS octadecyltrichlorosilane (ODTS) octadecyltrichlorosilane (OTS) –fiber –force – head – interferometer –MEMS – microscope (OM) – microswitch – properties – ridge waveguide – sectioning – stretcher (OS) – switch octamethylcyclotetrasiloxane ODMS ODP one-dimensional (1-D) – analytical technique (NAT) – magnetic resonance (NMR) nuclear – analytical and related technique – quantum effect on-off current ratio optical – absorption – beam deflection – cavity – data switching – deformability – detector – -electronic-optical switches – pore complex (NPC) – radiation – stiffness nucleation of nanowire nucleic acid nucleocytoskeletal coupling nucleus, mechanical property numerical aperture Nyquist sampling theorem 820 305, 820 155 1363 1017 752 1363 26 1086 1278 729 510 860 957 1359 1198, 1146 1334 1198, 705 access memory 1271, 1001 277 860 992 1596 733 -electron state 229 1084 731 1548 341 1003 830 754 439 957 1363 on MEMS (NSS) 1577 115 silane (ODDMS) (NMP) 1198, (NRAM) silane (ODMS) 306 (NC-AFM) -hydroxysuccinimide (NHS) -octadecylmethyl (dimethylamino) -octadecylphosphonate (ODP) -octyldimethyl (dimethylamino) n network shear modulus neuroactive agent neuroscience neurotransmitter sodium symporter neutron activation analysis (NAA) Newtonian –flow – viscosity next-generation lithography (NGL) N n nitroxide mediated polymerization nitrile-tri-acetic acid (NTA) nTP (nanotransfer printing) normative Nosé–Hoover thermostat n nonspherical tip nonvolatile random non-mechanical pump non-Newtonian flow nonpolar end group nonsilic – I–V behavior noise – electronic –power – source Nomarski interferometer nonacosan-10-ol nonbonding nonconductive sample noncontact – dynamic force microscopy nonconducting film – illumination – friction noncovalent interaction nonlinear – enhancement factor – imaging 258 284 1198, 647 277, 315 256 260 274 1048 272 288 262 271 385 265, 267 262 278 254, 257 711 260 256 281 284, 259 260 289 849 285 256 262 261 258 252 227 253, 95 289 265 266, 711 250 287 279, 279, 255 661 282 254 257 288 269 253 261, 269, 284 257

1363 structure (NEXAFS) (NSOM)

-decylphosphonate (DP) – synthesis – thermal conductivity – thermal stability – transport property nanowire growth – electrochemical – laser-assisted –ZnO –MACE – oxide-enhanced –RIE – solution phase – stress-induced – plasma-assisted – template Navier–Stokes equation n – scanning optical microscopy near-field –microscopy near-infrared (NIR) – imaging negative contact force – Raman spectra – pearl-shaped – position control – semiconducting – boundary scattering – capacitor –CdS – characterization – palladium – photodetector – physical properties –sensor – superlattice – compositionally modulated – diameter distribution –FET – film, aligned – free-space – gating – junction – magnetic – metal – metallic – morphology – optical bandgap – core-shell – crystallinity near-edge x-ray absorption fine

Subject Index 1688 Subject Index Subject Index 1689

– transfer function (OTF) 848 –IC 1506 perfluorodecyltricholorosilane – transition, phonon-assisted 280 –MEMS 1505 (PFTS) 1198, 1363 –trap 618, 622, 633, 1077–1079 – polymer-MEMS 1524 perfluorodecyltriethoxysilane – tweezers (OT) 620, 1079 – vacuum 1511 (PFDTES) 1365, 1389 – tweezers Raman spectroscopy – wafer-level 1518 perfluoropolyether (PFPE) 919, (OTRS) 635 packed system friction 1046 1215, 1359 optical lever 752 paclitaxel (PTX) 664 perfluoropolyether lubricants 1359 – angular sensitivity 754 palladium nanowire 289 periclinal wall 1283 – deflection method 761 paperlike display 152 periodic – optimal sensitivity 754 papilla 1282 – boundary condition (PBC) 676, optimal beam waist 754 papillated epidermal cell 1290 1016 optoelectronic papillose 1283 – potential 994 – component 156 parasitic perpendicular scan 744

– graphene 382 – capacitance 1483 persistence length 628 Index Subject order –charge 1442 personal meaning mapping (PMM) – long-range 957 particle size 1570 1619 – out-of-plane 957 passivated reference cantilevers Persson 1000 organ model 519 459 perylenetetracarboxylic dianhydride organ on a chip 519 passive (PTCDA) 1006 organic – linearization 759 petal 1282 – inverter circuit 154 – merging 541 pH 472 –sensor 288 – light-emitting device (OLED) – sorting 543 pharmacokinetic 519 132 – structure 1461 pharmacophore 703 –NP 338, 344, 353 pathogen 1279 phase –system 646 pattern – transistor 152, 154 – -breaking length 272 –ofink 144 organic chemistry 1182 – change micropump 510 – transfer 149 – graphene 367 –inversion 338 patterned – synthetic 367 – inversion temperature (PIT) 338 – self-assembled monolayer (SAM) organic–inorganic hybrid NP 342 – lock loop (PLL) 463, 992 146 organisms – transformation, nanoindentation – substrate 262 – multicellular 589 1026 patterning 261 – unicellular 589 – transition model 973 Pauli repulsion 902 organometallic vapor phase epitaxy phenanthrene 88 paxillin (Pax) 1092 (OMVPE) 1407 phonon 374 peak indentation load 1157 organosilsesquioxane 150 – confinement effect 280 peak-to-peak load 1104 ormocer 128 – density of states 273 peapod 703 oscillating tip 734 – mean free path 273 pearl-shaped nanowire 262 oscillatory – -phonon scattering 274 –force 946 peel number 1441 phosphate buffered saline (PBS) – simple shear 1084 Peierls instability 782 716, 1377, 1384 osmotic force 950 pendulum AFM 992 phosphatidylinositol-3-kinase (PI3K) Ostwald ripening 337 pentaerythritol tetranitrate (PETN) 1082 oxidation furnace 54 472 phosphosilicate glass (PSG) 55, 68, oxide enhanced growth 257 peptide 167, 1512 oxidized carbon nanotube – amphiphile (PA) 346, 703 photoactivatable green fluorescent functionalization 221 –NP 346 protein (PA-GFP) 857 – nucleic acid (PNA) 476 photoactivatable protein fluorophores P – toroid 705 (PA-PF) 857 peptidoglycan 590 photoactivated localization package design 1493 perfluorodecanoic acid (PFDA) microscopy (PALM) 593, 857 packaging 1182, 1341 photodamage 858 –3-D 1521 perfluorodecylphosphonate (PFDP) photodetector – hermetic 1511 1198, 1363 – four-quadrant 988 466 349 1101, 345, 471 -(2,5- 252, 473 700 338, 664 co 1525 1318, 498, 348 339 224, 346, 339, 967 441, 498 384 367 1348 173, 1406, 1181, 1051 317 1101 322 1568 416, 183, 305, 135, 343 342 342 1103, -glycolide fumarate) 1389, 1133, 225 -dimethylsiloxane) 702 1134 -glycolic acid) (PLGA) b -phenylenevinylene)] 225, co 1084 349 819, 372, p co 303– 117, 645 1043 1319, 1117 1103, 1406 -phenylenevinylene)- 471, 473 650 339, -isopropylacrylamide) 102, m N (PAH) 348 (PEDOT) 384, 342, 71, 287, 1117, dioctoxy- (PmPV) (PNIPAm) 1103, (PPGMA) (PS-b-PDMS) 1101, 1365, (PEGMA) 150 (PLGF) 339, polyamidoamine (PAMAM) polyaniline (PANI) polybutadiene (PBD) polycaprolactone (PCL) polycyclic aromatic hydrocarbon polylactic acid (PLA) polymer – biocompatible – bioMEMS polyether ether ketone (PEEK) polyethylene (PE) polyethylene dioxythiophene polyethylene glycol (PEG) polyethylenimine (PEI) polyglycolic acid (PGA) polyimide (PI) polyelectrolyte complexation poly( poly(styrene- poly[( –brush – cantilever –chemistry –filament poly(methacrylic acid) (PMAA) poly(methyl methacrylate) (PMMA) poly(propyl methacrylate) (PPMA) poly(propylene glycol) methacrylate poly(ether urethane) (PEUT) poly(ethylene glycol) methacrylate poly(ethylene terephthalate) (PET) poly(lactic- poly(lactide- poly(lactide fumarate) (PLAF) 469, 847 155, 1145, 1160 508 1080, 711 1172 1472 366, 1573 679 55, 1113 1440 730 755 1286 967, 693, 1441 1109, 1041, 1286 153 288, 1365, 1023 256 397 1284 901 154 282 811, 1021 874, 149, 155 1267 755 1441 283 1340, 278 269, 755 1265 629 651, 1283 739, 1405 1143 1022 1027 146, 152 447 1183 1181, 541, 319, 127, 80, 490, (PDGF) chloride) (PPDDAC) 678 167, 1148, deposition (PECVD) poly(dimethylsiloxane) (PDMS) – surface plastic/elastic model platelet-derived growth factor platinum-iridium tip p-n junction –nanowire pneumatic actuated valve point spread function (PSF) polarity pole-tip recession (PTR) polishing poly(diallyldimethylammonium – electronics – large area circuit plasmon polariton (PP) plasmonic nanostructured device plastic – circuit – contact regime plastic deformation – frequency – etching – deposition – -enhanced chemical vapor plasma – assisted growth – deposited coating – coefficient – detection – pressure sensor –sensor pigment particle pile-up – nanoindentation – surface – surface atom piranha etch solution planar immunoFET plant hair plant surface – superhydrophilic – superhydrophobic plant systematics – longitudinal effect – structure 132 507 134 344 1404 542 460, 102, 115, 126 105 278, 88, 53, 146 858 103, 382 103 759 336 329 103 144 144 284 148 863 915 154 position (PVD) 1289 c fabrication 772 123 460 255, 285, 856 287 772 772 755 762 758 285 147, 563 180 762 144 1133 222, 758 760 727 734 729, 991 776 167,

316, 464 343 56,

–nanowire – quad photoemission spectroscopy (PES) photoinitiator photolithographi photolithography (PL) – contact mode – pattern – projection mode – near-field conformal – proximity mode photoluminescence (PL) – NSOM imaging photomodification photon flux rate photomultiplier tube (PMT) photon noise photonic band gap (PBG) photonic crystal (PhC) photonics, graphene photopolymerization photoresist –master photosolidification photoswitchable dyes photosynthesis photothermal spectroscopy photovoltaics physical vapor de – effect Pickering emulsion polymerization picoindentation picomotor piezo – ceramic material – hysteresis – nonlinearity – relaxation – scanner – stack – translator – tube piezoelectric –drive –leg – material piezoelectrically actuated valve physisorption piezoresistive – cantilever

Subject Index 1690 Subject Index Subject Index 1691

–film 714 position-sensitive detector (PSD) pull-in voltage 1443 – hydrophilic 461 465, 595, 734 pull-out voltage 1444 – hydrophobic 461 power pulsed laser deposition (PLD) 58 – ion-track–etched foil 250 – dissipation 992 pure water repellency 1295 – material 183 – factor 275 purine nucleotide (PN) 830 – mediated force 949 – spectrum density function 677 PZT (lead zirconate titanate) 57, – microbeam 1133 – spectrum, MD simulation 1040 164, 180, 287, 562, 728, 1343 –NP 352 Prandtl–Tomlinson model 993 – tube scanner 728, 733 – sensing layers 461 – finite temperature 998 – transparent microcapsule 154 – one-dimensional 993 Q – unfilled 1123 – two-dimensional 994 polymerase chain reaction (PCR) precipitation 348 Q-(quality) factor 411, 462, 738, 489, 552, 1346, 1526 – hardening 1448 748, 821, 1515, 1532

– -capillary electrophoresis prepolymer 147 quad photodetector 734 Index Subject (PCR-CE) 508 pressure quadrant polymeric – and flow sensing 475 – detector 753 – domain 702 – injection technique 252 – photodiode (QPD) 622 – nanocarrier 645 – osmotic 588, 589 quantitative structure–activity – nanoparticle 336, 344, 349, 646 –sensor 398 relationship (QSAR) 1569, 1575 – unit self-assembling 705 – touch-point 398 quantum polymeric microbeam 1117 – turgor 589 – boxes (QB) 1335 – bending 1121 prestress 1086 – computer 329 – scratch tests 1117 primary creep 1446 – conductance 437 polymer-matrix composite 224 printed – confinement 268, 270, 278, 290 polymersome 664 –coil 156 – dot (QD) 329, 351, 352, 379, polymorphonuclear (PMN) 1563 – DFB resonator 157 665, 1407, 1561 polyoxymethylene (POM) 1337 probability density function (PDF) – electromechanics (QEM) 422 polypeptide 25 816 – Hall effect (QHE) 376 polypropylene nonwoven fabric process – size effect 271, 317 (PPNF) 502 – design kit (PDK) 1485 –wire(QWR) 1335 polysaccharide NP 346 –gas 1148 quartz polysilicon (poly-Si) 496, 1459 processing contamination 444 – crystal microbalance (QCM) – doped 1357 projection mode photolithography 1014 –film 1109, 1357 144 – film, nanotribological 1357 prokaryotes 589 – tuning fork 772 – hexagonal honeycomb (HEXSIL) promyelocytic leukemia body (PML) quasi-continuum model 1026 72 1075 quasihemispherical nanoparticle – mechanical property 1471 prostate-specific antigen (PSA) 474 657 – undoped 1357 protein 24 quasistatic bending tests 1115 polystyrene (PS) 135, 339, 498, – biologically produced 709 quasistructure 97 967, 1103, 1117, 1573 – circular permuted 710 polystyrene/nanoclay composite – coating 1382 R (PS/clay) 1117 – database 696 polytetrafluoroethylene (PTFE) – kinase (PKA) 474 radial cracking 1156 963, 1051, 1181 –kinaseC(PKC) 1082 radio frequency (RF) 55, 409, polyvinyledene fluoride (PVDF) – kinase inhibitor (PKI) 474 1332, 1438, 1471 562 – layer, nanoscale adhesion 1376 – magnetron sputtering 1144 pore 656 –NP 345 – MEMS (RF MEMS) 172, 408, poroelastic solid 1083 – protein interaction 1078 1334, 1443, 1444, 1449 porous silicon – sensing interface 713 –MEMS/NEMS 1332 – particle 659 –sensor 693 – NEMS resonators 419 – pillar 657 – unfolding 1078 radius of curvature 461 porphyrin 1007 pseudospin 307 radius of gyration 120, 967 position accuracy 762 p-type/intrinsic/n-type (PIN) 172 Raleigh’s method 747 726 265, 1453 64, 741, 1337, 76 75, 262, 458, 1605 726, 252, 1266, 849 855 145 1451, 652, 516 166, 1565 726, 1156, 1237 769, 1049 564, 1284 594 146, 1512 735 564, 564, 744 876, 726 726 1279 726 726 726, 788, 502, 1112, 758 1274, 735 759 1265 758 125, 728 735 736 729 1462, 563, 876 876 769, 396, 988, 88, (SSRM) 227, 726 (SNOM) 726, (SEcM) 726 (SCPM) 726, (FESEM) 726, 75, 366, 908, 1438, (SICM) (SEFM) –system – thermal microscopy (SThM) – probe lithography – probe microscopy (SPM) – -probe-induced oxidation – speed – spreading resistance microscopy – magnetic microscopy (SMM) – near-field optical microscopy – Kelvin probe microscopy (SKPM) – electrochemical microscopy – force acoustic microscopy (SFAM) – force microscopy (SFM) – electron microscopy (SEM) – chemical potential microscopy – effect – paradox Sanger sequencing saturation irradiance scan –area – direction – frequency – range –rate –size – speed scanning – acoustic microscopy (SAM) – capacitance microscopy (SCM) – field emission electron microscopy – head – ion conductance microscopy – electrostatic force microscopy Sader method Salvinia 554 878, 710, 1459, 270 715, 854 588, 1450 1076 1393 1024 277 1316 603 1160, 1493 370 731 978 1337 738 462, 1318 1440 1392, 1309, 1459 281 1222 120 1153, 631 952, 1421 509 458, 606 277 786 1597 1126, 340 1520 119, 38 449 559 1086 1349 1199, S 1075 1143, (RKKY) 1471 transition (RESLOFT) (RAFT) rheology ribonucleic acid (RNA) rice leaf surfaces rigidity robotics robust design phase roll embossing root mean square (RMS) rotary pump rotaxane rotor – –hub interface – –stator interface rough surface roughness – saturable optical fluorescence Ruderman–Kittel–Kasuya–Yoshida rubbing/sliding surface – -transcription PCR (RT-PCR) reversible – addition and fragmentation transfer repulsive tip–substrate residual stress – measurement resistance – antibiotic – negative differential – temperature-dependence resolution, vertical resonance – curve detection – frequency – Raman effect resonant –sensor – tunneling resonator, graphene rest time effect reverse – mapping –osmosis(RO) sacrificial – etching – layer Sad1p/UNC-84 (SUN) 229 1149 659 1417, 165, 1227, 1513 1449 166 635 1519 644, 753 1562 58 134, 899, 821 1088 739 1086 635 312, 460 60, 753 1036 1087 144 1092 1419 341 1425 957 281, 646 1398 1276 1528 267 147 637 289 338, 846 1437 492 618 1547 816 591 1532 324

diffraction (RHEED) 1338, 1422 (RT-DC) solution 257,

rate-and-state friction (RSF) ratchet mechanism recognition, molecular rectangular cantilever – transmembrane red blood cell (RBC) redistribution layer (RDL) – -mediated adhesion reference cantilever – –ligand complex reflection high-energy electron receptor – binding, Bell model reflexive regeneration relative humidity (RH) reliability – packaging relief on a surface repetitive mechanical stress relaxation time release profile of the payload remanence remote detection system – measurement –regime reaction force reactive – ion etching (RIE) rational design Rayleigh – criterion – instability real-time deformability cytometry – oxygen species (ROS) – spreading readout electronics real contact area – spectroscopy ramping random access memory (RAM) rapid – cooling – thermal annealing (RTA) – thermal processing (RTP) rapid expansion, supercritical Raman – optical tweezers (OTRS)

Subject Index 1692 Subject Index Subject Index 1693

– transmission electron microscope –terminal 1186 – -thickening (dilatant) fluid 966 (STEM) 88, 256 – tribological property 1362 – -thinning (pseudoplastic) fluid – tunneling microscopy (STM) 4, self-assembled structure 1045 966 75, 257, 265, 303, 373, 561, 725, self-assembly 36, 78, 282, 283, shifted order 859 730, 769, 774, 870, 992, 1020, 348, 349, 702, 1271, 1275 Shockley–Queisser limit 286 1335 – chemical 78 shot noise 754 – tunneling microscopy (STM) – physical 78 shrinkage 106 lithography 318 self-assembly-based signal-to-noise ratio (SNR) 438 – tunneling spectroscopy (STS) multi-chip-to-wafer bonding silane 265, 303, 374, 771, 774 (SA-MCtW) 1502 –chemistry 128 scattering 273, 276 self-cleaning –film 715 – forces 620 – lotus effect 1269, 1295 – fluorinated monolayer 149 Schottky barrier (SB) 437, 438 – surfaces 1315, 1318 – polymer 714

silanization process 1384 Index Subject scratch self-healing 1288 silicon 149, 163, 732, 755, 1352 – critical load 1171 self-replicating assembly 574 – anode 287 – damage mechanism 1164 self-similar chain 672 – APTES-coated 713 –depth 1034 semiconducting single-walled carbon – -based surface 1382 – drive actuator (SDA) 1418 nanotube (s-SWNT) 432 –force 1034 – beam 1113 semiconductor 173 – black 257, 286 – induced damage 1161 – nanowire, gating 275 – measurement 725 – cantilever 988 semimetal-semiconductor transition –coated 1352 – resistance 1104, 1110, 1121, 271, 276 1196 – fabricated 1390 semisynthetic nanodevice 708 – high pressure phase 1026 –test 1109, 1162 sensing device 710 – mechanical property 1471 S-curve 1449 sensitivity 449, 755, 989 – microimplant 1382 sealing 1506 sensor 269, 458 – nanobeam 1131 –glas 1483 – biological 288 – nanotribological properties 1355 – hermetic 1510 – characterization 438 –nanowire 257, 263, 274, 287 second harmonic generation (SHG) – chemical 288, 379 – nitride (Si N ) 732 280 3 4 –DNA 289 – on-insulator (SOI) 577 second phase inversion 338 – fabrication 439 – oxidation 54 secondary alcohol 1274 –gas 379 – porous 657 secondary battery 329 – graphene 379 – Si(100) 1167, 1353 Seebeck coefficient 275 – hydrogen gas 289 –stamp 149 selected area electron diffraction –mass 379 – thermal conductivity 274 (SAED) 263, 266 –nanowire 288 – tip 990 selective plane illumination – tribological performance 1352 microscopy (SPIM) 862 –neuron 705 – performance 444 – wafer 144, 147 selenium 259 – wear data 1357 –pH 288 self-aligned imprint lithography silicon carbide SiC 173, 323 – release 1483 (SAIL) 124 – bulk properties 1353 –thermal 274 self-assembled monolayer (SAM) – decomposition 366 sequencing 516 40, 69, 117, 146, 442, 459, 471, –film 1357 serotonin transporter (SERT) 830 819, 924, 1029, 1179, 1186, 1216, silicon nitride Si3N4 990 1315, 1359, 1361, 1425, 1441 shape 1571 – tip 739, 1389 –memoryalloy(SMA) 507 – coated surface 1390 silicon oxide SiO2 beam 1113 – coating 1441 shear 1445 silicon-on-insulator (SOI) 164, – edge resolution 146 – deformation 636 410, 577, 1509 – head group 1186 –flow 1077, 1079 – microelectromechanical systems – micropatterned 1194 – melting 957 (SOIMEMS) 1483 – spacer chain 1186 – modulus 988, 1081, 1083 – substrate 416 – sudden failure 1365 – strength 1000 silicon-on-sapphire (SoS) 56 – surface 1186 –stress 1078 siloxane polymer lattice 1387 422 1521 989 105 786 319 146 169, 814, 1144 151 262 310, 1043 1286 1285 741 329 1398 1148 121 745 1288 1439 594, 1398 336, 149 777 307, 1428 753 321 154 746 120 144 647 57, 146 329 382 328 738 994 727 305, 738 1154 149 460 148 329 1153 405 microscopy (SP-STM) –power square spiral architecture squeeze flow S-shaped beam stamp –AucoatedPDMS – Au/Ti coated – composite –depth – fabrication – mechanical property – positioning – rigid standard quantum limit (SQL) standing wave static – contact angle – friction – friction force – friction torque – mode – mode AFM – random access memory (SRAM) – wetting process steady sliding steady-state sliding Stefan equation stellar shape – quantization spin-on-glass (SOG) spintronics –device – graphene splash phenomena spring – -shaped nanowire – sheet cantilever –system spring constant – calculation – lateral – measurement – vertical sputtered coatings, physical property sputtering (SP) – deposition – coherence time –FET – MOSFET – -polarized scanning tunneling 1149 223 257 650 1563 1042 644, 1406 374 1035 1402 1126 285 1588 374, 114, 1448 1126 1269 88 1595 148 1056 312, 1543, 1027 353 286 286 1031 1296 1155 1192 1392 1401 346 1544 285 281, 150 1617 1161 1543 988 822 1041 655 336, 1551 346 1445 (SLIPS) decapentaplegic (Smad) 3 374 – of tip – velocity –work slip slippery liquid-infused surfaces S-layer sliding – induced chemistry skewness small mothers against solid thin film solution hardening solid–lubricant interaction solution–liquid–solid (SLS) sp – stuck micromirror smooth nanobeam – stress distribution societal – context – impact – implication – -scale platform soft –DPN –law – lithography (SL) – polymer stamp – stiction – substrate solar cell – efficiency – inorganic-organic –nanowire sol-gel – scanning tunneling spherical – micelle spectral reflection spectroscopy – angle-resolved photoemission – Raman –NP – polymeric nanoconstruct – bonded tip – bonding – carbon spark plasma sintering (SPS) spatial resolution spin – casting 809 647 569, 65 1564, 645, 739 422, 447 434 602 1577 431, 434 432 445 1368 820 1350, 432, 147 517 1005 194, 435 1422 621 1332, 712 1000 858 146, 431 440 439 , 431 1350 441 1608 3 593 432 780, 1568 695, 1419 1422 900 741, 672, 644

702, 1566 (SWNT) (sptPALM) tomography (SPECT) metallization (SCREAM) 646, 594 (SCFv) 268 (SMLM) 569

– assembly – biosensor – optical property – production – advantage – application – application example – electronic property – integration – mechanical property – metallic (m-SWNT) – sensor energy efﬁciency – structure site-directed coupling size – and scale – effect, one-dimensional (1-D) – shape, surface and stiffness single-walled (carbon) nanotube silver nanoparticle (AgNP) – real-time (SMRT) single-particle tracking PALM single-photon emission computed – manipulation single-molecule – force spectroscopy (SMFS) single-crystal reactive etching and simple harmonic oscillator (SHO) single – cell force spectroscopy – crystal, silicon cantilever – electron transistor (SET) – molecule friction – molecule localization microscopy – friction – mode optical ﬁber single-asperity – contact – friction – measurement single-chain fragment variable – nano-object friction

Subject Index 1694 Subject Index Subject Index 1695

STEM electron-beam-induced CVD – integrity 1086, 1102 –bare 1033 100 – lubricity 995 –charge 1573 step edge 260 structured illumination microscopy – charge density 944 step-and-repeat (S&R) 131 (SIM) 858 –chemistry 148, 1265 step-and-stamp imprinting stuck micromirror 1400 –curved 147 lithography (SSIL) 131 subcellular structure 633, 1086 –diffusion 148 stick–slip 968, 972, 976, 977, 1428 subcuticular inclusions 1281 –energy 1142 – friction 1034 sublattice 307 – energy measurement 1191 – mechanism 993 submicron particle 1390 – enhanced Raman scattering (SERS) stiction 1337, 1439, 1443, 1470 substrate 260 678 – electrostatic attraction 1442 – conformal imprint lithography stiffness 1167 (SCIL) 130 – -enhanced Raman spectroscopy – continuous measurement (CSM) – curvature measurement 1447 644 –force 1439 1158 –strain 1079 Index Subject – nuclear 1091 subwavelength – force apparatus (SFA) 870, 938, – torsional 748 – grating 133 1014, 1393, 1422, 1451 Stillinger–Weber potential 1015, – polarizer 136 – free energy measurement 1199 1025 sulfur–gold bond 150 – friction 1033 stimulated emission depletion supercapacitor 384 – interaction energy 1439 (STED) 593, 618, 837, 854 superconductivity 782, 796 – micromachining 66 stochastic optical reconstruction – magnetic levitation 727 – modification 269, 1573 microscopy (STORM) 593, 618, – vortices 796 – nanometer-scale mechanical 837, 858 superconductor–normal property 1019 Stoney’s formula 461 metal–superconductor (SNS) 96 – oxide 264 strain 1079, 1445 supercritical solution, rapid – phonon mode 1016 – energy difference 1157 expansion 338, 341, 353 – plasmon resonance (SPR) 623 – graphene 374 superhydrophilic – potential 944, 1146 – shear (torsional) 434 – pinning anchor cells 1274 – potential measurement 876, 1234 – tensile (axial) 434 – surface 1285 stray capacitance 756 superhydrophilicity 1265, 1269, –profiler 1394 streptavidin (STA) 289 1291, 1294 – protection 1180 – adsorbed 714 superhydrophobicity 1265, 1291, – roughness 872, 952, 978, 1392 – adsorbed to silicon 713 1295 – rubbing/sliding 1450 – binding 714 superimposed wax 1268 –stress 459 – biotin wear 1388 superlattice 277, 311 – structure 263, 978, 1268 – coating 1384 –nanowire 277 – structuring 1268 stress 1131 – structure 260 – temperature simulation 1026 – corrosion cracking (SCC) 1449 superlubricity 995, 1042 –tension 493, 1089, 1090 – distribution 1126 superoxide dismutase (SOD) 1562 – topography 988 –fiber 1074, 1094 superparamagnetic – -to-volume ratio (S=V) 491, 644, – gradient measurement 1462 – limit 289 658 – intensity 1106 –NP 646 – transfer chemistry 148 – intrinsic 1153 superresolution microscopy 847 surfactant 253, 259 – measurement 1461 superresolution optical fluctuation suspended beam 1121 – relaxation test 1446 imaging (SOFI) 858 – residual 1153, 1160, 1459, 1471 supersaturation 255, 256 suspended micro-channel resonator – shear 1078 supported lipid bilayer 812 (SMR) 604 – –strain ratio 1084 supramolecular switching – tensile 1105, 1116, 1447 – assembly 31 –energy 284 –thermal 1526 –chemistry 702 – speed 284 stretch-sensitive ion channel 1095 surface synchrotron radiation circular Stribeck curve 966 – acoustic wave (SAW) 544 dichroism spectroscopy (SRCD) structural – anti-adhesive 1293 1576 – characterization 262 –area 1570 synthetic vesicle 1390 415 398 263, 710 1229 734 879 1615 538 821 759 987 1087 154 255, 149 730 398 998 578, 1161, 810, ) 662 1500 897, x 380 379 196, 706 810 349, 1332 857 738, 282 1508 88, 1404 1036 588 380 379 336 324 993 1021 458 731, 317, 305, 832, 75, 153, 988 1082 730 1080 1564 (TEM) (TIRF) (TB-BGA) functionalization touch-mode pressure sensor touch-point pressure traction force microscopy (TFM) transcription – factor transducer transfer – printing process – ribonucleic acid (tRNA) transforming growth factor (TGF) transient cell adhesion transistor – graphene – high-frequency – laminated n-channel – single-electron – structure – tunneling transmission electron microscopy – fabrication – lithographical nanopatterning – method topographical – and recognition imaging (TREC) top-down – approach – imaging topography measurement toroid structure torsional resonance (TR) torus model calculation total internal reflection fluorescence T-junction configuration Tomlinson model – finite temperature top–bottom ball grid array – preparation method – Pt-Ir – radius effect – potential tissue engineering titanium oxide (TiO – sliding tip–surface – interaction – interface 507 408, 769, 277 220 471 1270, 87, 1519 363, 725, 1593 275, 58, 372 1106, 757 990 1156 273 1039 860 1488, 249, 712, 788 599 949 149 1577, 499 499 1039 1507 343 1079, 197, 663, 1273 1276 1019 53 1505, 771 633 275 623 1039 174, 636, 1004, 210 821 1028 1031 634 729 1283 999 condition 1003 1498, 1016 151, 559, 854, 470 . / 280 284 (TTS) 114, 489, 834, 1357, thermal conductivity thermo – electric figure-of-merit – electric power (TEP) – electrics – gravimetric analysis (TGA) – lubric – mechanical noise – phoresis – plastic polymer – pneumatically actuated valve – responsive NP – rheology – setting polymer –stat theta thin film – deposition thiol – monolayer, self-assembled –terminatedSAM thiolated third harmonic generation (THG) third-body molecule – frictional force third-order response three-dimensional (3-D) – force measurements – wax platelet – wax crystals through – -silicon via (TSV) – -thickness cracking – -wafer etching time-resolved emission dynamics time-temperature superposition – elasticity – functionalization –-growth – jumping tin plant tip –apex –coated – deformable – mount – preparation in UHV 79 739 872, 463, 816 341 341 353 811, 999 31 223, 693 221, 349, 1494 700 834 731, 1447 1084 336, 81 1344 1268 594 1171 1116 701 261 1530 989, 1103 1382 275 1446 490, 645 645 1086 661 259 514 1290 253, 696 274 698 1227 1277 998 1105, 54 459 771 488, 1093

T 879 1527 TAS

talin Tannerella forsythia tapping mode (TM) – etched silicon probe (TESP) tellurium temperature – control – dependence of friction – effect template – assisted self-assembly (TASA) – effect – manufacturing tensegrity tensile –stress – ﬂuctuation test – (ATE) development – accelerated – environment – specimen tetrahydrocurcumin (THC) tetrahydrofuran (THF) – stress relaxation terrestrial plants tetrathiafulvalene (TTF) – decomposition theranostic therapeutic –device therapeutic nanodevice – assembly approach – utility therapeutics – commercial thermal – activation model, lifetime – oxide – mixing – noise method – processing –sensor –therapy thermal conductance – quantized – drift – effect – expansion coefﬁcient

Subject Index 1696 Subject Index Subject Index 1697

303, 372, 665, 726, 908, 1269, 1106, 1273, 1357, 1404, 1418, – phase cocondensation 150 1366, 1430, 1448, 1469, 1566 1516 – -phase etching (VPE) 61 – electron-beam-induced CVD 98 – electron system (2-DES) 782 – –solid–solid (VSS) 257 – environmental chamber 265 two-photon vapor–liquid–solid (VLS) 210, 251, transmission x-ray microscopy – 4-Pi fluorescence microscopy 854 255, 269, 288 (TXM) 1577 – emission 860 – mechanism 255 transport type-2 diabetes 832 vapor-phase epitaxy (VPE) 56 – ballistic 267 –organic(OMVPE) 1407 –diffusive 267 U variable force mode 761 – mechanics of nanoconstruct 649 variable heavy–heavy (VHH) 712 – of ions in matter (TRIM) 94 ultra high frequency (UHF) 419 vascular endothelial (VE) 825 – properties electrical 267 ultra large scale integration (ULSI) – growth factor (VEGF) 352, 660 – properties nanowire 267 451 vascular plants 1270, 1279 transversal piezo-resistive effect ultrafine particle (UFP) 1560 velocity Index Subject 755 ultrahigh vacuum (UHV) 319, 564, – -dependent friction model 973 transverse magnification 846 733, 772, 990, 1019 – effect 1225 trapping site 1442 –-AVM 991 – rescaling 1017 triangular cantilever 739, 748, 754 ultralow limit of analyte detection – strengthening of friction 999 tribo 661 – weakening 999 – -apparatus 1450 ultra-low power consumption 449 vertical –charging 1442 ultrananocrystalline diamond – -cavity surface-emitting laser – chemical reaction mechanism (UNCD) 178, 1451 (VCSEL) 135, 465 1396 ultrathin DLC coating 1144 – coupling 729 –chemistry 1041 ultraviolet (UV) 52, 113, 175, 500, – manipulation 793 – meter 1353 820, 1266, 1404 – nanotube 1055 – polymer (TP) 1431 – exposure 123 – nanowire array integrated tribological – light 285 nanogenerator (VING) 287 –C 1051 60 – reflection 1290 vertical-cavity surface-emitting laser – characterization of coating 1154 Umklapp process 274 (VCSEL) 135 – performance of coating 1168 unfolded protein response (UPR) very large-scale integration (VLSI) trichome 1283 1574 52 tricresyl phosphate (TCP) 1050 unified modeling language (UML) very low density lipoprotein (VLDL) trimethylaluminum (TMA) 181 697, 699 345 trinitrotoluene (TNT) 472 unit cell 1085 vibrometry 1438 tubular nanoparticle 657 tumor 596 unloading curve 1023 Vickers indentation 1104, 1109 – targeting 650 unnatural AA (UAA) 709 vinculin binding site (VBS) 1093 tungsten 730 unpaired electron 306 virus-like particle 345 – sphere 989 viscoelastic – tip 730 V – mapping 878 tuning fork AFM 992 – solid 1083 tunnel field-effect transistor (TFET) vacancy viscoelasticity mapping 917 325 –chain 1597 vital-sign monitoring (VSM) 1494 tunneling –diffusion 1445 volatile organic compound (VOC) – current 727 van der Waals (vdW) 565 468, 471 – detector 731 – attraction 743 voltage-controlled oscillator (VCO) turbo-molecular pump (TMP) 99 –force 901, 942, 1390, 1392, 1439 409 turgor pressure 834 – interaction 1391 vortex 796 turn-on voltage 269 – surface 789 V-shaped cantilever 740, 989 tweezers, optical (OT) 626, 1079 Van Hove singularity 215 two phase flow 495 vapor 936 W two-dimensional (2-D) 88, 134, – deposition 336, 348, 353 182, 277, 303, 330, 363, 432, 503, – -grown carbon nanofilament W tip 730 563, 782, 854, 882, 995, 1088, (VGCNF) 199 wafer acceptance test (WAT) 1494 517 1275 564 288 461, 265, 493 1025 834, 1464 363, 306 1193 1254 1360 1577 284, 127, 253, 761, 1459, 1577 91, 1244, 195 266, 745, 328 1404 1394, 1568, 261, 957 1190, 1453 654, 321 304 1072, 595, 1143, Z Y 568, 1000, 502, (XANES) – diffraction (XRD) – fluorescence (XRF) – imaging – lithography – photoelectron spectroscopy (XPS) – absorption near-edge structure Z-DOL (fully bonded) zero-dimensional (0-D) zero-mode waveguide (ZMW) ZGNR – half-metallic zigzag – edge – -edged nanographene – -type nanotube ZnO –nanowire yield point yield strength simulation Young–Dupre equation Young–Laplace equation Young’s modulus 1291, 1529 1196 755 1283, 105 1470 466, 134 349 1170, 1382 1275, 1365 1041 132 725, 1430 307 1167, 738 59 1268, 1285 1169, 1168 1019 1400 1034 716, 1039 X 1360 1576 x-ray – absorption fine structure (XAFS) – track – tribopolymer – tip wearless friction Weibull distribution function wet etching wettability –mark – measurement – of biomolecule – process – resistance –test – grid polarizer wetting –behavior Weyl equation Wheatstone bridge wire – cantilever – grating polarizer woodpiles architecture worm-like micelle – surface 1271 1271 1285 253 1495 307 1425 1245 353 1291 1268 1275 1171 1268 1274 289 1272 1492, 1274 335, 285 1237, 1231, 1052 1171 1274 1267, 1274 1297 1274 716 1274 1384 1013,

(WLCSP)

waveguiding –nanowire –plants – -repellent surface – treatment wave interference wax – aggregate – chemical composition Washburn equation water – loss reduction – vapor content – compound –crystal wafer-level chip-scale packaging – crystal morphology – tubule wear –ester – platelet – rodlet – superimposed – intracuticular – self-assembly – damage –depth – detection – fullerene –map

Subject Index 1698 Subject Index Recently Published Springer Handbooks

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