Georgia State University ScholarWorks @ Georgia State University Physics and Astronomy Dissertations Department of Physics and Astronomy 5-4-2020 MIGRATION ENHANCED PLASMA ASSISTED METAL ORGANIC CHEMICAL VAPOR DEPOSITION OF INDIUM NITRIDE Zaheer Ahmad Follow this and additional works at: https://scholarworks.gsu.edu/phy_astr_diss Recommended Citation Ahmad, Zaheer, "MIGRATION ENHANCED PLASMA ASSISTED METAL ORGANIC CHEMICAL VAPOR DEPOSITION OF INDIUM NITRIDE." Dissertation, Georgia State University, 2020. https://scholarworks.gsu.edu/phy_astr_diss/123 This Dissertation is brought to you for free and open access by the Department of Physics and Astronomy at ScholarWorks @ Georgia State University. It has been accepted for inclusion in Physics and Astronomy Dissertations by an authorized administrator of ScholarWorks @ Georgia State University. For more information, please contact
[email protected]. MIGRATION ENHANCED PLASMA ASSISTED METAL ORGANIC CHEMICAL VAPOR DEPOSITION OF INDIUM NITRIDE by ZAHEER AHMAD Under the Direction of Alexander Kozhanov, PhD ABSTRACT The influence of various plasma species on the growth and structural properties of indium nitride in migration-enhanced plasma-assisted metalorganic chemical vapor deposition (MEPA- MOCVD). The atomic nitrogen ions’ flux has been found to have a significant effect on the growth rate as well as the crystalline quality of indium nitride. No apparent effect of atomic neutrals, molecular ions, and neutral nitrogen molecules has been observed on either the growth rate or crystalline quality. A thermodynamic supersaturation model for plasma-assisted metalorganic chemical vapor deposition of InN has also been developed. The model is based on the chemical combination of indium with plasma-generated atomic nitrogen ions. In supersaturation was analyzed for indium nitride films grown by PA-MOCVD with varying input flow of indium precursor.