Background Statement for SEMI Draft Document 4499A

Background Statement for SEMI Draft Document 4499A REVISION OF SEMI C27-0301 SPECIFICATIONS AND GUIDELINES FOR HYDROCHLORIC ACID

Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.

Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

SEMI C27-0301 was due for 5 year review. This standard was reviewed by the Analytical Methods TF. The changes were made to bring up to current SEMI guidelines.

This letter ballot will be reviewed by the Analytical Methods Task Force and adjudicated by the Liquid Chemicals Committee at their meetings in Dallas, TX, during the week of 7 April, 2008.

Note: Additions are indicated by underline and deletions are indicated by strikethrough. Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 3 3 health and safety appropriate establish to guidelines and of prior andthelimitations use. applicability regulatory to determine practices specifications these of users the of responsibility the is 2.3 microns. 2.2 other ofprior limitations use.applicability regulatoryor to the determine health practices of and thethisand responsibility users establishappropriate to safety standard NOTICE: 2.1 2 yet. test statistically the caseof been validated the guidelines,mayhave In the methods not identified. been has need a which for acid hydrochloric of grades for guidelines provides also document This results. valid statistically give to shown been have methods Test standards. those support to procedures testing and industry 1.1 1 HYDROCHLORIC ACID FOR SEMIC27-0301, OF AND GUIDELINES REVISION SPECIFICATIONS Draft Document SEMI 4499A reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 610.832.9555.Website: www.astm.org610.832.9585, Fax: 1 6 5.1 5 standardsadopted NOTICE ElectronicsSemiconductor in Water Industry GuideUltraUsed and D5127for the ASTM Pure —Standard 4.2 — SEMI C1 4.1 4 3.1

American Society for Testing and Materials,Drive, 100 Barr forHarbor West Society Pennsylvania and Conshohocken, Testing USA. Telephone: American 19428-2959,

Physical Property (for only) information Terminology ReferencedStandards Limitations Scope Purpose

The scope of this document is all grades of hydrochloric acid used in of ishydrochloricacid scope this industry. used the gradesof semiconductor all The document None. ASTM Standard Standard SEMI None. These specifications and guidelines do not purport to address safety issues, if any, associated with their use. It use. their with associated any, if issues, safety address to purport not do guidelines and specifications These The purpose of this document is to standardize requirements for hydrochloric acid used in the semiconductor the in used acid hydrochloric for requirements standardize to is document this of purpose The The VLSI grade purity level is typically required by semiconductor devices with geometries of 0.8–1.2 of geometries with devices semiconductor by required typically is level purity grade VLSI The : Unless otherwise indicated, indicated, otherwise Unless 1995 and respectively; published 2000.previously June 1996,replaces 1992, 1990, 1978, in document published Originally This entirety. their in C12.2 and C11.6, C8.2, C7.2, 2001. C1.7, SEMI March published 1999. be to 17, 2001; October February dated edition www.semi.org ballot at Current letter available Initially by Committee Committee. Standards Chemicals Regional Process American North American the North by the approved of responsibility direct the are and Committee Chemicals Process Global the by approved technically were guidelines and specifications These Chemical Chemical Density at Density 25 This standard does not purport to address safety issues, if any, associated with its use. issues, does if purportany,the standard safety its It not address is This with to associated CAS NumberCAS Specifications Reagents for . Formula s s 1  C and Documents and As listed or revised, or listed As Guide the Analysis ofChemicals for Liquid 1.19 1.19 g/mL 7647-01-0 HCl all documents cited shall be the latest publi latest the be shall cited documents all Page jn l jn 2 Document Document Number: shed versions shed Doc. Date:  SEMI 6/27/2018 cations of cations DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and irgn a 5 m/i, ad peeal, eetoi nerto f pa ra. Te odr o lto s 2,2,4- is elution of order The areas. peak of 1,2-dichloroethane, integration impurity, 2,2,4-trimethylpentane electronic chloroform, benzene, preferably, tetrachloride, carbon and trimethylpentane, mL/min, 75 at nitrogen 1.5 (60/80), W Chromosorb on SESE-30 gum silicone 5% — Column DDT: For areas. peak of integration electronic preferably, 2,2,4- 140 the to of up each of µL 280 at port injection glass; or 1.0 steel Inject separate. to Carbowax 20% — Column satisfactory: be to layers found been the allow have conditions following The detector. and ionization flame a with chromatograph gas a into well, extracts trimethylpentane shake Stopper, two. remaining the of each to water of mL 100 and sample, cooled the of mL 100 add funnel first the To below). (see standard the of mL 5 and water of mL 100 add funnel third a To funnels. separatory mL 250 two of each to water of mL 100 and 8.3 background. white a over vertically View the standard. sample nodarker must than The be tubes. Nessler in sample of mL 100 with 10) No. (APHA standard this 8.2 change.color red-to-yellow a to hydroxide sodium N 1 standardized with titrate and solution, indicator orange methyl add water, with mL 50 about to Dilute reweigh. and immediately, stopper surface, water the near sample of mL 3 about pipet 8.1 NOTE 8 1. 7.1 7 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This is color blue permanent faint a until iodine N 0.01 Add water. oxygen-free of mL 400 to solution indicator starch 8.7 when(SO that ion of 0.05mg nogreater sulfate than produced be should turbidity Any minutes. if 10 stand filter, to allow 19); and mix, solution, + reagent chloride (1 barium of mL acid 1 Add hydrochloric necessary. dilute of mL 1 and water of mL 10 in residue the Dissolve hood. a in dryness of mg 0.01 when produced 8.6 that than greater no be room should at produced stand color to (PO ion phosphate blue Allow Any solution. hours. p-(methylamino)phenol 2 of for mL temperature 1 and solution reagent molybdate ammonium of mL 1 Add acid. sulfuric N 0.5 of mL 25 in residue the Dissolve hood. a in bath steam a on dryness to evaporate 8.5 not should disulfide carbon The mix. and disulfide, carbon of mL a color pink one-half minute. in acquire 1 and solution reagent iodide potassium 2% 8.4 the with interfere that analysis.chromatographic impurities from 2,2,4- free The be should 2,2,4-trimethylpentane. analysis with the and mL standard the 500 both to for used Dilute trimethylpentane solution. the to DDT of mg 25 Add trimethylpentane. 8.3.1 the blank. for (thirdalso corrected standard funnel), the from peaks the under area total the one-half than more by funnel) second from (extract blank the from that than dichloro and chlorobenzene,

Grade Procedures 1 Requirements

Extractable Organic Substances Organic Extractable Free Halogen (as Cl (as Halogen Free The requirements for hydrochloric acid for Grades 1 and 2, 2, and 1 Grades for acid hydrochloric for requirements The Sulfite Phosphate Sulfate Color Assay

2 Standard 1 : laboratoryEach is for the of responsible verifying validity the within own method its operation.  — Dilute 2.0 mL of platinum-cobalt stock solution (APHA No. 500) to 100 mL with water. Compare water. with mL 100 to 500) No. (APHA solution stock platinum-cobalt of mL 2.0 Dilute — a from Deliver water. of mL 30 about containing flask conical glass-stoppered a weigh Accurately — C; carrier gas — nitrogen at 40 mL/min; signal adjusted to give an 80% full-scale deflection; and deflection; full-scale 80% an give to adjusted signal mL/min; 40 at nitrogen — gas carrier C; — Add 1 mL of 10 percent potassium iodide reagent solution, 5 mL of hydrochloric acid, and 2 mL of mL 2 and acid, hydrochloric of mL 5 solution, reagent iodide potassium percent 10 of mL 1 Add — — To To — — To 170 mL (200 g) of sample, add 10 mL of sodium carbonate reagent solution solution reagent carbonate sodium of mL 10 add sample, of g) (200 mL 170 To —  s yig o ad te vlms o iud lse n Tbe 2 it 0 L o 2,2,4- of mL 300 into 2 Table in listed liquid of volumes the add to syringe a Use — 3 mm, injection port — as above; column temperature — isothermal at 205 at isothermal — temperature column above; as — port injection mm, 3 4 ) is treated like the) like sample. treated is 84 84 85 85 2 mL (100 g) of sample, add 10 mL of sodium carbonate reagent solution and evaporate to evaporate and solution reagent carbonate sodium of mL 10 add sample, of g) (100 mL ) — Mix 100 mL of sample and 100 mL of freshly boiled water and cool. Add 0.1 mL of mL 0.1 Add cool. and water boiled freshly of mL 100 and sample of mL 100 Mix — ) - benzene. The total area under the impurity peaks from the sample should be no greater no be should sample the from peaks impurity the under area total The benzene.  C with glass insert; column temperature initially 65 initially temperature column insert; glass with C — Cool 110 mL of sample in an ice bath. Add 5 mL of 2,2,4-trimethylpentaneof mL 5 Add bath. ice an in sample of mL 110 Cool — %Assay  mL Weight of sample  Page N 

jn l jn of 20 M on Chromosorb P (80/100), 3 m m 3 (80/100), P Chromosorb on M 20 3 NaOH 4 VLSI Grade, Grade, VLSI ) as treated is the sample.   3.646 g  and Tiers B and C are listed in Table in listed are C and B Tiers and  C, programmed at 6 at programmed C, Document Document Number: Doc.  C; carrier gas — gas carrier C;  Date: 3 mm stainless mm 3 (SEMI C1) C1) (SEMI  SEMI 6/27/2018  DRAFT C/min  and 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 8.9.3.1 8.9.3 rinsing dilutionblank. for to anitric acid and Run reagent volume. Note: remains. liquid of 2% using flask mL volumetric mL 50 a 2 to quantitatively Transfer Cool. approximately hours. 4 to 1/2 2 until requires typically Evaporation spattering or effervescence by sample of loss avoiding plate, 8.9.2.1 8.9.2 ASTM E1.1in Type D5127. 8.9.1.2 8.9.1.1 8.9.1 item. eachspecified sample value ofhalf spike afor of of125% known the Alternat (Zn). zinc appropriate and (Ti), titanium (Sn), tin (Na), sodium (K), potassium (Ca), (Cu), calcium (B), copper boron (Al), (Cr), aluminum metals: chromium trace following the of each for specified value the at impurities 8.9 arsenic (As).of mg 0.001 containing standard the of that than greater no be should sample the from solution diethyldithiocarbamate C1, SEMI with flask Method for Antimony) theArsenic(and describedGeneral in a of volume Proceedas make 35mL. water to generator a into wash cautiously and Cool trioxide. sulfur of fumes dense to evaporate again and water, of mL 10 add cautiously Cool, hood. a in trioxide sulfur of fumes dense to evaporate and acid, sulfuric of mL 5 and 8.8 mL 0.20 than more Not endpoint. same the beshould required. to iodine N 0.01 with titrate and sample the of mL 85 Add produced. reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This (V), vanadium (Ti), titanium (Mo), (Au), gold (Ge), germanium (Bi), bismuth themetals: following (As)(Ba), (Al), eachof (Sb), aluminum for antimony barium specified arsenic 9.2.1 9.2 9.1 2: NOTE 9 byplasma otheremission all elements spectroscopy spectroscopy. and

Grade Procedures 2

Sulfite Sulfite Sulfate Phosphate Halogen Free (APHA) Color Assay Trace Metals Analysis Trace ImpuritiesNon-Metal Arsenic and Antimony (as As) (as Antimony and Arsenic Trace Metal Analysis Metal Trace

nickel (Ni), (Ni), nickel Analysis Sample Special The following method has given satisfactory results in determining metal ion impurities at the values the at impurities ion metal determining in results satisfactory given has method following The Nitric Acid, UltraNitric Pure 2% Nitric Acid Solution Acid Nitric 2% Each laboratoryEach is for the of responsible verifying validity the within own method its operation. In a clean environment, place 250 mL of sample in a PTFE evaporating dish. Slowly evaporate on a hot a on evaporate Slowly dish. evaporating PTFE a in sample of mL 250 place environment, clean a In sn h cd sml n egn ln, aaye gop 1 eeet y fae aoi absorption atomic flame by elements 1 group analyze blank, reagent and sample acid the Using Section 3.4.5, 3.4.5, Section method validation as per SEMI C1 can be demonstrated. be can C1 SEMI per as validation method oo B,(B), boron

Preparation Reagents niobium (Nb), (Nb), niobium

starting with with starting — See Section 8, which contains procedures for contains procedures thetests: —Seefollowing 8,which Section cadmium (Cd), cadmium — The following method has given satisfactory results in determ in results satisfactory given has method following The — rn(e,la P) ihu L) ansu M) agns M) (Mn), manganese (Mg), magnesium (Li), lithium (Pb), lead (Fe), iron gold (Au), gold n and — Use nitric acid specified for ultra content. for lowmetalion —Usespecified nitricacid — Dilute 20 mL of ultra pure nitric acid to 1 L using water meeting the criteria for criteria the meeting water using L 1 to acid nitric pure ultra of mL 20 Dilute — potassium (K), potassium — To 168 mL (200 g) of sample in a 400 mL beaker, add 10 mL of nitric acid nitric of mL 10 add beaker, mL 400 a in sample of g) (200 mL 168 To — zinc (Zn) zinc tile tile the the iron (Fe), lead (Pb), magnesium (Mg), manganese (Mn), nickel (Ni), nickel (Mn), manganese (Mg), magnesium (Pb), lead (Fe), iron acu C) hoim(r,(Cr), chromium (Ca), calcium , and zirconium (Zr) zirconium and , sentence which begins: “Swirl the flask....” Any red color in the silver the in color red Any flask....” the “Swirl begins: which sentence silver (Ag), silver Page jn l jn 4 sodium (Na), sodium . Alternat . studies demonstrate recovery between 75 — 75 between recovery demonstrate studies

oat(o,(Co), cobalt strontium (Sr), tantalum (Ta), tantalum (Sr), strontium iv iv e methods may be used as long as long as used be may methods e e methods may be used as long as long as used be may methods e opr(u,(Cu), copper Document Document Number: Doc. in

Date: beryllium (Be), beryllium ing trace metal trace ing gallium (Ga), gallium molybdenum  SEMI 6/27/2018 tin (Sn), tin under under DRAFT  in

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and atomic absorption (GFAA) and the remaining elements by inductively coupled plasma mass spectrometry(ICP/MS). elements coupled and (GFAA) byinductively the plasma remaining atomic absorption 9.2.4.1 9.2.4 well. Runreagentblank. 20µL 20gwiththeinternal nitricacid, rhodium mix to standard, a dilute add of 1% temperature, room to Cool minutes. several for temperature low at plate hot a theon heating of by solution mL acid nitric 5 1% with residue the Dissolve spattering. or effervescence by sample of loss avoiding dryness to plate hot 9.2.3.2 blank. reagent “attainable” 9.2.3.1 9.2.3 standard concentrated solution. rhodium from the(ppm) appropriate 9.2.2.6 cation in E1.1in to analysis. Type D5127 regard criteria for ASTM 9.2.2.5 ASTM E1.1in Type D5127. 9.2.2.4 9.2.2.3 D5127. criteriaforASTM E1.1in Type meeting the 9.2.2.2 9.2.2.1 9.2.2 75 appropriate reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 14.1 14 13 12.1 12 11.1 11 10.1 10 internal rhodium the and standards solution All matrix. contain standard. of 10ng/g asmust rhodium the internal the acid as acid nitric hydrochloric 1% using 3.7% performed is which the vanadium of analysis with the for except up standard made are standards the calibration, For Specific procedures for this grade do not exist. Refer to Sections for exist.Referto 9for grade donot procedures. procedures this 8and available Specific 

125% of a known sample spike for half of the value of each specified element. eachspecified sample value ofhalf spike afor of of125% known the Grade Procedures 4 Tier AProcedures ProceduresGradeVLSI Grade5 Procedures Grade3 Procedures

This section does not apply to not chemical. section this This does apply to not chemical. section this This does apply to not chemical. section this This does apply to not chemical. section this This does apply Analysis Preparation Sample Reagents Special

Nitric Acid, Ultrapure Nitric Acid, Ultrapure Hydrochloric Vanadium 1% Nitric Acid Solution Acid Nitric 1% Using the prepared solutions and blanks, analyze sodium, potassium, calcium and iron by graphite furnace graphite by iron and calcium potassium, sodium, analyze blanks, and solutions prepared the Using ae Water Rhodium Internal Standard Internal Rhodium .%Hdohoi cdSlto Solution Acid Hydrochloric 3.7% n a cen evrnet lc .0 g o ape it ae E ote (0 m) iue with dilute mL), (30 bottle FEP tared a into sample of g 2.00 place environment, clean a In method validation as per SEMI C1 can be demonstrated. be can C1 SEMI per as validation method Type E1.1 Type — The water used for all the dilution, calibration and standards should meet at a minimum the minimum a at meet should standards and calibration dilution, the all for used water The — — In a clean environment, place 20.0 g of sample into a clean PTFE dish. Slowly evaporate on a on evaporate Slowly dish. PTFE clean a into sample of g 20.0 place environment, clean a In — water to a final weight of 20.0 g. Add 20 µL of the rhodium internal standard solution. Run a Run solution. standard internal rhodium the of µL 20 Add g. 20.0 of weight final a to water

— Use nitric acid specified for lowmetalion for — Usespecified content. nitricacid — Dilute 10 mL of ultrapure nitric acid to 1 L using water meeting the criteria for criteria the meeting water using L 1 to acid nitric ultrapure of mL 10 Dilute — — Make up the internal standard solution to a concentration of 20 µg/mL 20 of concentration a to solution standard internal the up Make — — Use hydrochloric acid specified for low metal ion content. hydrochloricacidlowmetalion for —Use specified — Dilute 20 g of ultrapure hydrochloric acid to 200 g using water using g 200 to acid hydrochloric ultrapure of g 20 Dilute — Page jn l jn 5 studies demonstrate a recovery between recovery a demonstrate studies

Document Document Number: Doc. Date:  SEMI 6/27/2018 DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 1 ImpurityLimitsandOtherRequirementsforHydrochloric AcidTable 1 17.1 17 level spikespecified at 50% ofsample the demonstrated be can The Liquid producer. and user by determined be shall methodology test published, are methods test standardized 16.1 16 be can demonstrated SEMIC1 according to validation 75 of recovery a showing The supplier. and user by determined Process be shall methodology test published, are methods test standardized 15.1 15 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Extractable Substances Extractable Organic Residue after (as Ignition SO Arsenic Antimony and (as As)

Previous ReferenceSEMI # TierDProcedures TierCProcedures TierBProcedures

Free Halogen (asFree Cl This section does not apply to not chemical. section this This does apply tnadzd et ehd ae en dvlpd o al prmtr t te uiy ees niae. Until indicated. levels purity the at parameters all for developed being are methods test Standardized Until indicated. levels purity the at parameters all for developed being are methods test Standardized Chemicals Committee considers a test method to be valid valid be to method test a considers Committee Chemicals Free (Cl Chlorine Germanium Germanium (Ge) hmcl omte osdr etmto ob ai nyi if only valid be to method test a considers Committee Chemicals Phosphate (PO Chromium (Cr) Chromium (Al) Aluminum Beryllium (Be) Cadmium (Cd) Cadmium (Sb) Antimony Color (APHA) Color Calcium (Ca) Bromide (Br) Gallium (Ga) Gallium Sulfate (SO Sulfate Bismuth (Bi) Bismuth Arsenic (As) Arsenic Sulfite (SO Copper (Cu) Copper (Ba) Barium (HCl) Assay Cobalt (Co) Gold (Au) Gold Boron (B) there is a documented recovery study showingaof study recovery 75 recovery a is documented there 3 4 ) ) 4 ) 2 ) 2 )  4 125%. Recovery is for a known sample spike at 50% of the specified level specified the of 50% at spike sample known a for is Recovery 125%. ) 0.005ppm max (Specification) 0.05 max0.05 ppm 0.3ppm max 0.1ppm max 0.2ppm max 0.3ppm max 0.1ppm max 0.3ppm max 0.8ppm max 0.5ppm max 36.5–38.0% To pass To test 5 ppm 5 max C1.7-95 Grade 1 Grade 10 max10 ------. (Specification) 800 ppb 800 max ppb 500 max 36.5–38.0 % 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 50 maxppb To test pass 5 ppb 5 max ppb 5 max C7.2-94 Grade 2 10 max . Page ------jn l jn 6 only only 0.005 max0.005 ppm max0.005 ppm max0.005 ppm 0.02ppm max 0.02ppm max 0.01ppm max 0.01ppm max 0.01ppm max 0.02ppm max 0.02ppm max 0.02ppm max 0.05ppm max 0.05ppm max 0.05ppm max 0.2 max0.2 ppm max0.7 ppm max0.5 ppm max0.5 ppm 50 ppm 50 max VLSI Grade VLSI C11.6-1296 (Guideline) 3 maxppm 36–38% 10 max if if ------method validation according to SEMI C1 SEMI to according validation method there is a documented recovery study recovery documented a is there  125%. Recovery is forknown Recoveryis a 125%. 100 maxppb 100 maxppb 500 maxppb 500 maxppb -- -- 37.0–38.0% 50 ppb 50 max (Guideline) 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb C8.2-92 10 max10 Tier B ------Document Document Number: Doc. Date: -- 500 ppb max 100 maxppb 30 max ppb 100 maxppt 100 maxppt 100 maxppt 100 maxppt 100 maxppt 100 maxppt 100 maxppt 100 maxppt 100 maxppt 37.0–38.0% 50 ppb 50 max  (Guideline) 100 maxppt C12.2-96 SEMI 10 max10 Tier C 6/27/2018 ------Process method Liquid DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This labels, product instructions, manufacturer’s to refer to cautioned are Users user. the of responsibility the solely and determination the specifications guidelinesis of forparticularapplication. the The suitability of herein any forth NOTICE: 1,1,1-Trichloro-2,2-bis (p-chlorophenyl)dichlorodiphenyltrichloroethane. NOTE ethane, 1: CompositionofStandard Table 2 C1 counters, particle current of limitations the Due to 1: NOTE , Section 3.9 , Section DDT (see 1) DDT NOTE 1,2-Dichloroethane Previous ReferenceSEMI # Chlorobenzene Chloroform Molybdenum (Mo) Molybdenum Particles bottles in Substance Magnesium (Mg)Magnesium Benzene Manganese(Mn) Zirconium Zirconium (Zr) Vanadium (V) Vanadium (Ta) Tantalum (Sr) Strontium Potassium (K) Niobium (Nb) Niobium Mercury (Hg)Mercury Titanium (Ti) Titanium (Tl) Thallium Platinum (Pt) Platinum Sodium (Na) Lithium (Li)Lithium (size, (size, #/mL) SEMI makes no warranties or representations as to the suitability of the specifications and guidelines set guidelines and specifications the of suitability the to as representations or warranties no makes SEMI Indium (In) Silicon (Si) Silicon (Ni) Nickel Silver (Ag) Lead (Pb) Zinc Zinc (Zn) Iron (Fe) Iron

Tin (Sn) Tin “Calibration and Measurement Method for Particles Measurement in“Calibration Liquids for Method and Amount in mL 2,2,4-trimethylpentane Amount 500 of (See 1.)NOTE 1.0 1.0 (Specification) 0.3ppm max 0.3ppm max 0.3ppm max 0.3ppm max 0.3ppm max 0.1ppm max 0.3ppm max 0.3ppm max 0.1ppm max 0.2ppm max 6.8 5.5  34 20 L  C1.7-95 Grade 1 Grade m, maxm, 25 ------solution  particle size and number are to be agreed upon between supplier and user. See SEMISee user. and supplier upon between agreed be to are number and size particle (See NOTE (See 1.) 0.5 (Specification) 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 10 maxppb 5 ppb 5 max  C7.2-94 Grade 2 m,25 max Page ------mg 25 50 25 6 6 jn l jn 7 ”  . 

0.5 0.02ppm max 0.05ppm max 0.02ppm max 0.01ppm max 0.02ppm max 0.02ppm max 0.01ppm max 0.05ppm max 0.02ppm max 0.02ppm max 0.02ppm max 0.02ppm max 0.05ppm max 0.02ppm max 0.05ppm max 0.02ppm max 0.02ppm max 0.02ppm max 0.1 max0.1 ppm max0.1 ppm VLSI Grade VLSI C11.6-1296 (Guideline) Concentration ppm 5 of in for mL standard 100 in  m,250 max Allowance Allowance CCl for ------Total Total (See 1.)NOTE mL mL g) HCl (120 of 0.5 0.5  0.2 (Guideline) 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb 1 maxppb  C8.2-92 Tier B m, maxm, 10 4  ------m,TBD Document Document Number: Doc.  Date: (See 1.)NOTE -- -- 10.0 100 maxppt 100 maxppt 100 maxppt 100 maxppt 100 maxppt 100 maxppt 100 maxppt 100 maxppt 100 maxppt 100 maxppt 100 maxppt  (Guideline) 1.0 9.0 2.0 4.0 2.0 0.5 0.5 100 maxppt 100 maxppt C12.2-96 SEMI Tier C 6/27/2018 ------DRAFT 

LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and oyih y SM® (eiodco qimn n Materials and consent SEMI.of written express without forbidden is part in Equipment or whole in contents the of Reproduction (Semiconductor SEMI® International), by Copyright expressly advised that determination of any such patent rights or copyrights, and the risk of infringement of such of infringement of risk the their own responsibility.rights, areentirely and copyrights, or are rights guidelines patent such and any specifications of these determination of that advised Users expressly guidelines. and specifications these in mentioned item any with connection in asserted copyrights or rights patent any of validity the respecting position no takes SEMI guidelines, and specifications these of publication By rights. patent by covered invention an of or material copyrighted of use require may guidelines and specifications these with compliance that possibility the to called is attention user’s The specifications These notice. guidelinesaresubjectchangewithout to and herein. mentioned materials any respecting literature relevant other and sheets, data product reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 0 at Mdlfed Ra, Muti iw A 94043. CA View, Mountain Road, Middlefield East 805 Page jn l jn 8 Document Document Number: Doc. Date:  SEMI 6/27/2018 DRAFT 

LETTER (YELLOW) BALLOT