Background Statement for SEMI Draft Document 4412B

Background Statement for SEMI Draft Document 4412B REVISION TO SEMI E94, SPECIFICATION FOR CONTROL JOB MANAGEMENT

Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.

Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided. Note: Additions are indicated by underline and deletions are indicated by strikethrough.

Purpose To propose additions, modifications and/or deletions to the following standards:  SEMI E94-1106, SPECIFICATION FOR CONTROL JOB MANAGEMENT

Line item specific background statements are found within each line item definition below.

Impact The proposals in this document represent a change to the following documents that may have an impact on current implementations.  SEMI E94

Proposals This section contains the lines item(s) for this ballot. The following is a summary list of line item(s) contained in this document.

 Line item – Clarify Attribute DVVAL Content on Object Extinction

The results of this ballot will be discussed at the next I&C committee meeting on November 1, 2007 in conjunction with North America Fall Standards Meetings in San Diego, California. Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and makers (and has no known opposition from has (and noknownany opposition makers).makers device byseveraldevice and by ansupported maker ofis theICdevice broughtattention to the task force was E94 standard the object deficiency data EDAThis of reporting. to wellregarding as of the concepts E87as approvedchange that with alignment E94 in 1of changewouldplace wascycle changedwas2006.This in passed was E87) that standard the (exceptcaseof in ballotchangethis 4255the (4255madeproposes that item LI#2) same ballot line that A this theWhat is history of and issue ballot? possible includedall with parameters be events. can transient clear onwhich cannot be EDA objectVariables onextinction, areforattribute Data what the values the state Job a E94does Because clearly for Control not legal eachevent object. data for and variables the theTell events following: the ability event. withEDAanswer arevalid to the that Forexample, has the parameters (DVNAME) and stateof all generatedmachine events the transient may that by be the hasthe legal define servicesthat EDA variables, and In to the data thoseaddition the events. events objects with associated andreporting 300mm the of the may by has that beany objects.of theall generated SEMIdefined ability EDA the report events to represent must these implementations, implementations also of has because impactonEDA consistency a lack negative This host consistency collection lackdifficult. makes of data The not byis equipmentto the host the event in received consistentfrom equipment. report Therefore,the data event. theon DVsextinction third different ways softwarein populated suppliers and have Equipment party should onextinction. of be objectVariables(DVs) the isvalue attribute Data standard clear onwhat not The solved? theWhat is problem being 1.1 1 MANAGEMENT FOR SEMIE94,SPECIFICATION CONTROL JOB TO REVISION Draft Document SEMI 4412B reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This ControlRevision began that butthe activity, activity a E87. is extension with new This a of is natural achange toexistingIs this an is activity? solution, or, it anew small eachof a minority these.may of affect this softwarethat somesuppliers. and believed equipmentsuppliers, It party is ICmakers third may affect ballot this wouldrequire. mostThis that taskimplementations item force line dowhat existing believes currently The willWho effect?How? Why? this of requirement above). thesection existing 13.1(stated nullify in event not this the it attributereports, data truecapable non-extinction ofdoes is While the that host collecting itremoved. at the time of was know the the object finalwill state well, sothe otherhost left be hostwhichtheshould equipment), attributeas variables object the has could know the must Since the ObjIDbe (otherwise, mayevent. valid how bethat with variable associated anddata report event Note is thoseextinction forthat shalleventwith objects.” associated available in reports an inclusion objects be the theattributes the objectsof JobManagement, identifiers and the Forobjectsbyof "13.1 Control of all defined report statement databe reads: byThis to event collectable definition. is indicatesattribute that addition clearly the statementprior the ofproposed to assertionE94,because consistent This not is event. currentrequirements with useful attributeshould DVVALs information onthe destruction contain stated ofobject not that theOne negatives 4of cycle 2007. in is rewrite the of4412A ballot failed versionthat ballot This a of Line Item --ClarifyLine E94 Attribute ContentObjectExtinction DVVAL on Background Page jn l jn 2 Document Number: Document Doc. Date: 4412B 5/8/2018

DRAFT  4412B SEMI  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 28 July 2007 23 Apr 2007 2006 4 Dec Date In E94, section 13.1, delete theaddtextas struck-out E94,section the follows: 13.1,delete underlined and text In 1.2 perEntrieshavebeenmade the SEMI. by taskforce.results activity records the within taskforceandThis control submit revision aswell asformal resubmit dates and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This own suchresponsibility. infringementareentirely rights their the of risk of this in mentioned item any with connection in rights any copyrights, are expressly such determination and standard asserted that of of patent or Users this standard. advised copyrights or rights position patent no any of takes validity (SEMI) the International respecting Materials and Equipment Semiconductor standard, this of publication By other and notice.without change to sheets, subject are data standards These product herein. labels, mentioned equipment product or materials instructions, any respecting manufacturer’s literature relevant to refer to cautioned are Users user. the of responsibility the solely is standard(s) the of suitability the of determination The application. particular any NOTICE: Proposal Proposal    

allows the receiver of the report to know the final condition of the object itdeleted at know the of time to theof finalwas receiver the report condition the allows the for13.1.1 event byutilizingin available in specified the reports variables inclusion be isevent, extinction the event an 13.1.3 If conditionthe object. of know of to the the current receiver the report allows requirement 13.1.1 in reportsspecified the inclusionvariables befor shall event bytransition available in utilizing after the object attribute isvalues non-extinctionevent, state transition model the event a 13.1.2 If string). ASCII is ASCIIalso shall be string,then therepresenting variable an ifit attribute thean (e.g. attribute as shall datathe of thetype attributeeventsame in Thebe reports. usedvariable represent is that to this be typeshall in ofspecified there an standard, variable an associated object 13.1.1 Foreachattribute used: CtrlJobID. likely theattribute most be is to with associated reports inclusion thethose objects objects. befor shall event available in of of all the theattributes theobjects JobManagement, identifiers and 13.1 Forobjectsby Control of defined SEMI makes no warranties or representations as to the suitability of the standard(s) set forth herein for herein forth set standard(s) the of suitability the to as representations or warranties no makes SEMI 1.2 1.1 1.0 Version Christian Hoffmann David Bricker Doug Rust Les Marshall Chris Winemiller Eberhard Teichmann David Bricker Doug Rust David Bricker Name the object attribute values before the extinction transition shall transition the extinction attribute values before the object 3 2nd Draft First Draft Edits Page rd Draft

This requirement shall be shall requirement theway: achievedfollowing This in jn l jn 3 Document Number: Document . This requirement requirement . This Doc. The following Date: 4412B . 5/8/2018

DRAFT . This  4412B SEMI  LETTER (YELLOW) BALLOT