Procedural Review Voting Sheet

Procedural Review Voting Sheet 2011 Cycle 2 REGION: North America COMMITTEE: Information & Control EVENT: NA Standards Spring 2011 Meetings DATE OF MEETING: March 30, 2011 PLACE OF MEETING: SEMI Headquarters in San Jose, California COMMITTEE CO-CHAIRS: David Bricker/Applied Materials, Jack Ghiselli/Consultant, Lance Rist/Consultant SEMI STAFF: Paul Trio

A&R Voter: Name/Company Date: 200X/MM/DD I. Document Number & Title Document Revision to SEMI E157, Specification for Module Process 4998A Tracking II-1 Line item 1 Line Item 1 Recipe Step Clarification

1. Tally (Staff to fill in) Voting Tally: As-cast tally after the close of the voting period A minimum of 60% of the voting interests that have voting members within the technical committee must return votes. (Regulations ¶9.6.1)

Return Distribution Return Rate Yellow 62 ÷ 103 = 60.2% >=60%

Lilac & Others 4 ------Total Vote 66

Reject 1

Accept 35

Not approved A&R Reason:

A&R Ballot Report Template – Line Items Revision 7.2 2. Rejects Reject 1 (Yoshihisa Takasaki – Dainippon Screen) Negative 1 of Reject 1 Referenced *TF/Committee to fill in if necessary Section *Original negative comment and as well as justification should be included.

Vote Reference Comment Negative 1 1.2.1 Proposal [4998A] The Step Count value does

N Table 2 Actions column from not specified when it e g GENERAL EXECTUTING to reaches to the next of the a t STEP ACTIVE state, max limit. i v e Reason Add one to the StepCount. The StepStarted event occurs after the StepCount Change.

Table 4.[E157-0710] StepCount, Data Type: Integer

GO TO “Related” x No withdrawal made section Withdrawal GO TO “Final”  Withdrawal document received by staff on XXXX (A) “Related” is mutually agreed upon. x *This motion can be appended to the motion for Persuasive (See Motion and Persuasive Section) Reason Negative is related (needs over 1/3 votes to pass) Negative is not related (needs 2/3 or more votes to pass) Reason XXXX

R Motion by/2nd by Name (Company)/Name (Company) e l a t e Discussion d

XX-XX [Negative is related] > 1/3 GO TO “Persuasive” Result of Vote [Negative is not related] < 2/3 (check ONE) 2/3=< [Negative is not related] <90% GO TO “Final”  (B)

90% =< [Negative is not related] GO TO “Not Significant Finding Option” Motion and Negative is related and persuasive (needs over 1/3 votes to pass) Reason x Negative is related and not persuasive (needs 2/3 or more votes to pass)

A&R Ballot Report Template – Line Items Revision 7.2 The integer limit of 2 billion is safely out of reach for all equipment for a single recipe occurrence. The stepcount Reason variable resets to zero when a new recipe execution starts in that chamber. Motion by/2nd by David Bricker (Applied Materials) / Harvey Wohlwend (ISMI) Discussion None 9-0

P [Negative is related and persuasive] > 1/3 GO TO “Final”  e (E) [Negative is related and not persuasive] < 2/3 r Result of Vote s (check ONE) GO TO “Final”  2/3=<[Negative is related and not persuasive] <90% u (C) a s GO TO “Not i x 90% =< [Negative is related and not persuasive] Significant Finding Option” v This option can only be used in either case of “if the committee finds a negative not

N related by a vote equal to or greater than 90% of the persons voting on the action” or “if o t

the committee finds a negative not persuasive by a vote equal to or greater than 90% of S i g the persons voting on the action”. (Regulations ¶ 9.5.3.1.4, 9.5.3.3.2) n i f i c a GO TO  n x It is mutually agreed upon to term the negative “not significant” t

(D) F i n GO TO  d It is mutually agreed upon to term the negative “significant” i n (B) OR (C) g

O Motion The negative is “not significant”. p t i o Motion by/2nd by Name (Company)/Name (Company) n XX-XX Motion passed with simple majority GO TO  (D) Vote XX-XX Motion failed with simple majority GO TO  (B) OR (C) Negative is: (A) withdrawn (counted under h in disposition) (B) not related (significant) (counted under i in disposition) Final (C) related and not persuasive (significant) x (D) not significant (counted under j in disposition) (E) related and persuasive DOCUMENT FAILS Comment generated. See comment #x Not approved A&R Reason:

Negative 2 of Reject 1 Referenced *TF/Committee to fill in if necessary Section Reason *Original negative comment and as well as justification should be included.

A&R Ballot Report Template – Line Items Revision 7.2 Vote Reference Comment Negative 2 E157-0710 Definition of StepID and StepCount 9.8.3 & Table 4 - are dispersed to 9.8.3, Table 4 and specifies StepID and 9.6.5 by this ballot. N StepCount. The dispersion have potential risk of e confusion. g #4998A 9.6.5 specifies StepID and StepCount. a t Withdrawal GO TO “Related” x No withdrawal made section GO TO “Final”  Withdrawal document received by staff on XXXX (A) Motion and x “Related” is mutually agreed upon. Reason *This motion can be appended to the motion for Persuasive (See Persuasive Section) Negative is related (needs over 1/3 votes to pass) Negative is not related (needs 2/3 or more votes to pass) Reason XXXX

R Motion by/2nd by Name (Company)/Name (Company) e l a t e Discussion d

Result of Vote XX-XX (check ONE) [Negative is related] > 1/3 GO TO “Persuasive”

[Negative is not related] < 2/3

2/3=< [Negative is not related] <90% GO TO “Final”  (B)

90% =< [Negative is not related] GO TO “Not Significant Finding Option” Motion and Negative is related and persuasive (needs over 1/3 votes to pass) Reason x Negative is related and not persuasive (needs 2/3 or more votes to pass) The negative does not identify a technical flaw. The text was Reason added to 9.6.5 to explain the use of stepcount and stepID in the context of the STEP ACTIVE state. This was done to add clarity. Motion by/2nd by David Bricker (Applied Materials) / Brian Rubow (Cimetrix) P e Discussion None r s u Result of Vote 10-0 a s (check ONE) GO TO “Final”  i v [Negative is related and persuasive] > 1/3 e (E) [Negative is related and not persuasive] < 2/3

GO TO “Final”  2/3=<[Negative is related and not persuasive] <90% (C)

GO TO “Not x 90% =< [Negative is related and not persuasive] Significant Finding Option”

A&R Ballot Report Template – Line Items Revision 7.2  

(C GO TO (D) GO TO (B) V. Approval OR

included in the (D) (B)

  is not GO TO GO TO GO TO (g) (h) (i) (j) in disposition) i in disposition) in V. Approval Conditions Check Conditions Approval V. j DOCUMENT FAILS DOCUMENT in disposition) in h included in the denominator of is Not Valid and is Valid

Reject Reject Not

 of denominator  Check Conditions  passed with simple majority passed failed with simple majority failed >0 )=0 j j) Motion Motion Motion + + withdrawn (counted under (counted withdrawn under (counted related (significant) not persuasive (significant) and not related significant under (counted not and persuasive related i i + + h h -( -( Reject without a without Reject Negative g g (A) (B) (C) (D) (E) #xcomment See generated. Comment It is mutually agreed upon to term the negative “not significant” “not term the negative to upon agreed is mutually It “significant” term the negative to upon agreed is mutually It significant”. is“not negative The XX-XX XX-XX x Negative is: Negative x (Company) (Company)/Name Name x Notapproved Notapproved Reason: Reason: Vote Motion Final Final of Negatives withdrawn withdrawn Negatives of related not found Negatives of significant not found Negatives of # # # Original number of Negatives of Original number If all of the negative material included with a reject vote is withdrawn, determined to be not related, not be to determined is withdrawn, rejectwith avote included material the negative ofIf all

Motion by/2nd by Motion by/2nd This option can only be used in either relatedcase by a vote equal to or greater ofthan 90% of the persons voting on the“if action” or “if the committee finds a negative thenot committee finds a negative not persuasive by a vote equal to or greater than 90% of thepersons voting on action”. (Regulations the 9.5.3.1.4, 9.5.3.3.2) ¶ A&R A&R 2 Not Significant Finding Option 2 A&R Template Report Revision Items Ballot 7.2 – Line or determined to be not significant, the reject vote is not valid. (Regulations ¶ 9.4.3.3) (Regulations is not valid. reject vote the not be significant, to or determined Note: Disposition 1 of Reject 3. Comments Comment 1 Referenced *TF/Committee to fill in if necessary Section From Yoshihisa Takasaki – Dainippon Screen Vote Reference Comment Comment Figure 2. Current events of Module Process State Model are redundant. StepStarted event (#5 of E157 Table 2, MP State Transition Table) and Comment StepComplete event (#6) are occurs at

C one time for a recepe step change. That o is, two similar events are required for the m

m step change. e Those events could be integrated to one n t step change event.

 The primary concern is having too many events, beyond equipment ability to support.  This is a question that has been considered by the Committee in the past and is already a part of the standard (not affected by this ballot). The Discussion reason we need two events is that they report on two different steps. A StepStart may report on the variable parameter values used. The StepEnd may report on the outcome of the step. If you mix the data from the previous step and the next step, it is confusing. The user is not required to use both, but we believe it is necessary in some cases.

The committee agreed to do one of the following actions. x *No motion is required in this step. x No further action was taken by the committee. Refer to the task force for more consideration. New Business Other E d i t o r i a l

C h a n g e

Case 1: No vote in this section :

To be included and voted on in 4. Summary of Editorial Changes.

Case 2: Voted in this section : Original section number and at least one full sentence are required in “FROM” and “TO” fields. FROM: Section xxx 1

A&R Ballot Report Template – Line Items Revision 7.2 To: Section xxx

Justification (If necessary)

FROM: Section xxx

A To: Section xxx c t 2 i o Justification (If necessary) n

p Motion by/2nd Name (Company)/Name (Company) Vote XX-XX Motion passed (or failed) Not approved A&R Reason:

Comment 2 Referenced *TF/Committee to fill in if necessary Section C o

m From Jan Rothe – GLOBALFOUNDRIES m Comment on 4998A: There appears to be the word "of" missing in Paragraph 9.6.5.2: "[...] e n Comment an index that records the number --> of <-- steps executed [...]" t

This is an editorial issue. The “of” should be added as suggested. Discussion The committee agreed to do one of the following actions. x *No motion is required in this step. No further action was taken by the committee. Refer to the task force for more consideration. New Business x Other E d i t o r i a l

C h a n g e

Case 1: No vote in this section : x To be included and voted on in 4. Summary of Editorial Changes.

Case 2: Voted in this section : Original section number and at least one full sentence are required in “FROM” and “TO” fields.

A&R Ballot Report Template – Line Items Revision 7.2 FROM: Section xxx

1 To: Section xxx

Justification (If necessary)

A FROM: Section xxx c t i 2 To: Section xxx o n Justification (If necessary) p Motion by/2nd Name (Company)/Name (Company) Vote XX-XX Motion passed (or failed) Not approved A&R Reason:

Comment 3 Referenced *TF/Committee to fill in if necessary Section From Hiromitsu Matsuda – Hitachi Kokusai Comment for #4998A LI1 StepID and StepCount is currently defined at 9.8.3. This ballot add new C o Comment description(9.6.5.2) about these two values. Then, if this ballot is passed, there are two m

m separated descriptions. I recommend to add this new description to 9.8.3, not 9.6.5. e n t This is a duplication of the comment by Takasaki-san.

The text we placed in Section 9.6.5 was intended to help the user understand that Discussion StepID and StepCount are most important in the context of the Step Active state. My opinion is that this placement of the text is more helpful to understanding. We were careful to place a reference in 9.6.5 to the definitions in 9.8.3.

The committee agreed to do one of the following actions. x *No motion is required in this step. x No further action was taken by the committee. Refer to the task force for more consideration. New Business Other E d i t o r i a l

C h a n g e

A&R Ballot Report Template – Line Items Revision 7.2 Case 1: No vote in this section :

To be included and voted on in 4. Summary of Editorial Changes.

Case 2: Voted in this section : Original section number and at least one full sentence are required in “FROM” and “TO” fields. FROM: Section xxx

To: Section xxx A 1 c t Justification (If necessary) i o FROM: Section xxx n

p 2 To: Section xxx r o Justification (If necessary) p o Motion by/2nd Name (Company)/Name (Company) Vote XX-XX Motion passed (or failed) Not approved A&R Reason:

4. Summary of Editorial Changes Note: Original section number and at least one full sentence are required in “FROM” and “TO” fields. Proposed Change: In the proposed new section 9.6.5.2 of ballot 4998A, add the word “of” to the third sentence as shown: FROM: Section 9.6.5.2

9.6.5.2 Two parameters help track the execution of recipe steps. The StepID parameter identifies the specific subset of recipe instructions that define the step that is being executed. The StepCount parameter is an index that records the number steps executed while the process module is in the EXECUTING state. StepCount does not identify the specific recipe instructions that are executed. See Table 4 for the definitions of StepID and StepCount. Table 2 specifies when and how the StepCount value is changed.

1 TO: Section 9.6.5.2

9.6.5.2 Two parameters help track the execution of recipe steps. The StepID parameter identifies the specific subset of recipe instructions that define the step that is being executed. The StepCount parameter is an index that records the number of steps executed while the process module is in the EXECUTING state. StepCount does not identify the specific recipe instructions that are executed. See Table 4 for the definitions of StepID and StepCount. Table 2 specifies when and how the StepCount value is changed.

Justification: (if necessary) Editorial change proposed to correct grammatical error. Motion To approve the above editorial changes

A&R Ballot Report Template – Line Items Revision 7.2 Motion David Bricker (Applied Materials) / Wontae Kim (IT Innovation) by/2nd by Discussion None Vote 10-0 Motion passed Not approved A&R Reason:

5. Approval Conditions Check APPROVAL CONDITION 1: All negatives have been discussed and were withdrawn, found not related, or not persuasive. (Regulations ¶ 9.6.2) APPROVAL CONDITION 2: At least 90% of the sum of the valid accept and reject votes must be accept. (Regulations ¶ 9.6.3) Note: if both approval conditions are not satisfied, the balloted item fails.

Accepts (Accepts + Valid Rejects)

Approval Rate = 35 / 35 = 100.0% >=90%

6. Preliminary action for this line item This line item passed committee review as balloted. n o i

t x This line item passed committee review with editorial changes o

M This line item failed committee review and will be returned to the task force for rework. This line item failed committee review and work will be discontinued. Motion by/ 2nd by David Bricker (Applied Materials) / Wontae Kim (IT Innovation) Discussion None Vote 10-0 x Motion passed Final Action Motion failed Approved A&R Not approved Reason:

A&R Ballot Report Template – Line Items Revision 7.2 III. Safety Check This section applies to the entire document. See Section 14 of the Regulations for further information This is not a Safety Document: when all safety-related information is removed, the document is still x technically sound and complete. : n

o This is a Safety Document: when all safety-related information is removed, the document is not technically i t

o sound and complete.

M Safety Checklist is complete and has been included with the document throughout the balloting process.

(Regulations ¶14.3) Motion by/ 2nd by David Bricker (Applied Materials) / Jack Ghiselli (Consultant) Discussion None Vote 10-0 Motion passed Not approved A&R Reason:

IV. Intellectual Property Check Note: This ballot may be all or part of a Standard or Safety Guideline. This IP check applies to the entire Standard or Safety Guideline. See § 15 of the Regulations for further information x The meeting chair asked those present in person or by electronic link, if they were aware of any potentially material patented technology or copyrighted items* in the Standard or Guideline. x No potentially material patented technology or copyrighted items GO TO SECTION V are known Potentially material patented technology or copyrighted items are known but a Letter of Assurance (LOA) or copyright release for GO TO SECTION V such material has been obtained or presented to the committee. Potentially material patented technology or copyrighted items are known but an LOA or copyright release for some of the material(s) has NOT been obtained or presented to the committee

M Ask ISC for special permission to publish O T I

O Quit activity N Wait for LOA for patented technology or release of copyrighted items. Motion by/2nd by Name (Company)/Name (Company) Discussion XXXX Vote XX-XX Motion Passed Final Action Motion Failed Not approved A&R Reason:

* Note: Such potentially material patented technology or copyrighted items might have become known since the Standard or Safety Guideline was last reviewed, or might become relevant due to this ballot.

A&R Ballot Report Template – Line Items Revision 7.2 V. Action for this document

n Line item(s) [X], [X] and [X] passed committee review as balloted and will be forwarded to the o i t A&R for procedural review. o

M Line item(s) [1] passed committee review with editorial changes and will be forwarded to the A&R

e x l for procedural review. b a

c Line item(s) [X], [X] and [X] failed committee review and will be returned to the task force for i l

p rework. ) p s a

m l l e t a i

Line item(s) [X], [X] and [X] failed committee review and work will be discontinued. k c e

Motionh by/ 2nd by David Bricker (Applied Materials) / Wontae Kim (IT Innovation) C ( Discussion None Vote 10-0 x Motion passed Final Action Motion failed Approved A&R Not approved Reason:

A&R Ballot Report Template – Line Items Revision 7.2