Dr. Eui-Hyeok Yang

Department of Mechanical Engineering Charles V. Schaefer, Jr. School of Engineering Stevens Institute of Technology Castle Point on the Hudson Hoboken, NJ 07030 TEL: 201-216-5574 FAX: 201-216-8315 [email protected] http://personal.stevens.edu/~eyang

EDUCATION

- Ph.D: Control and Instrumentation Engineering, Ajou University, Korea (1996). o Dissertation entitled “A Study on the Stress Determination of p+ Silicon Films and Its Application to Microelectromechanical Systems” - - M.S: Control and Instrumentation Engineering, Ajou University, Korea (1992). o Thesis entitled “A Study on a Silicon Resonator for Piezoresistive Accelerometers”

- B.S: Control and Instrumentation Engineering, Ajou University, Korea (1990)

AWARDS AND RECOGNITION

- NASA ICB Space Act Award (2005), JPL o Recognized for developing piezoelectric microvalve for high-pressure applications. - Lew Allen Award for Excellence (2004), JPL o Recognized for his excellence in advancing the use of Micro Electro Mechanical Systems–based actuators for space applications. Developed several significant areas of research in MEMS-based actuators for space applications, utilizing MEMS actuators for the development of high-pressure, low leak-rate microvalves, continuous membrane deformable mirrors and inchworm devices for segmented mirror assembly and control for large aperture, space-based telescopes. - Level C Award (2003), JPL o Recognized for technical accomplishments on 1) demonstrating a piezoelectric microvalve, 2) leading the design of the MEMS inchworm actuator, 3) leading two postdoctoral researchers and one contractor. , - NASA ICB Space Act Award (2003), JPL o Recognized for developing a wafer-level membrane transfer technique. - Level B Bonus Award (2001), JPL o Recognized for technical accomplishments on developing MEMS-based deformable mirror technology using thin-film PZT actuators and electrostatic actuators. - Class 1 NASA Tech Brief Awards (2001-Present), JPL o Recognized for inventions on several microactuator-based components for space applications. - Research Fellowship of the Japan Society for the Promotion of Science (1996-1998), The University of Tokyo, Japan - Scholarship: B.S, M.S and Ph.D courses (1986-1995), Ajou University, Korea - Summa Cum Laude Honor (1990), Ajou University, Korea

RESEARCH EXPERIENCE

- Associate Professor: Stevens Institute of Technology: Aug. 2006 – Present.  Nano and micro technologies for energy conversion and biomedical applications: 2006~Present

- Senior Member of Engineering Staff, Task Manager: Jet Propulsion Laboratory: Oct. 2002 – Aug. 2006.  Inchworm microactuator (Sponsors: National Reconnaissance Office, Spontaneous Concept Research and Technology Development, Research and Technology Development, National Reconnaissance Office Director’s Innovation Initiatives): 2002~Present Initiated the MEMS-based actuator thrust at JPL, and demonstrated the inchworm actuation for microactuators. The task was aimed at demonstrating a robust actuation mechanism that could trigger the creation of a significantly larger, NRO-sponsored program.  MEMS Adaptive optics (Sponsors: Center for Adaptive Optics, Xinetics, Inc., JPL Director’s Research and Development Fund for 3 years, Spontaneous Concept Research and Technology Development, DARPA/LASSO, Phase I,): 2001~Present Initiated the MEMS-based adaptive optics thrust at JPL, and developed a piezoelectric unimorph- based deformable mirror with a continuous single-crystal silicon deformable membrane.  Piezoelectric microvalve (NASA Code R Enabling Technology Thrust for 2 years): 2002~2004 Developed liquid-compatible microvalves and successfully delivered the microvalves for microspacecraft test bed.  Actuated membrane development (Sponsors: National Reconnaissance Office Director’s Innovation Initiatives): 2003~2004 Developed a novel re-configurable mirror concept to the NRO-DII program. Designed grafted elastomer (G-elastomer) membrane structure, and fabricated G-elastomer membranes. Demonstrated the actuation of active silicon membrane mirrors.  Intra Ocular Pressure (IOP) sensor (JPL Spontaneous Concept Research and Technology Development, Caltech President Funding): 2003 Worked, as a major contributor, in generating successful proposals as well as during the development of the pressure switch concept. Successfully demonstrated the breadboard-version of the IOP sensor.

- Member of Engineering Staff, Task Manager: Jet Propulsion Laboratory: March 2001 – Sept. 2002  MEMS microvalve development (NASA Code R Cross Enterprise Technology Development Program): 2001~2002 Developed a first-of-its-kind piezoelectric microvalve technology for high-pressure applications. Demonstrated a “Helium leak detector level” leak performance of a microvalve at high inlet pressures for micropropulsion applications.  Piezoelectric material development (NASA Code R Cross Enterprise Technology Development Program): 2001~2002 Developed lithographically patterned process for MOCVD-deposited PZT thin films using RIE processes for adaptive optics applications.  Microactuator development (Gossamer Space Telescope Technology NRA Phase I) : 2001~2002 Developed inchworm actuator concept resulting in a funded proposal (ranked as ‘excellent’). Developed a design for a large working distance, precision MEMS-based inchworm actuator.

- Caltech Postdoctoral Scholar at JPL: Jet Propulsion Laboratory: Jan. 1999 – Feb. 2001  Meso-gyroscope development (Hughes Space and Communications Company / DARPA-DSO): 2000~2001 Fabricated and tested a precision mesogyro resonator structure and demonstrated the resonator with a Q of 100,000 in vacuum (1e-5 torr) with a frequency split at the measurement resolution limit of 100mHz.  Microactuator design (JPL Technology Development Agreement) : 1999~2000 Developed several MEMS actuation concepts for the alignment mechanism of segmented silicon mirrors in Space.  MEMS deformable mirror: 1999 Designed, modeled and fabricated electrostatic deformable mirror structures. Developed the membrane transfer process for the fabrication of the deformable mirror devices.

- Postdoctoral Research Staff: Electronics and Telecommunications Research Institute (ETRI), Korea: Nov. 1998 – Dec.1998 Designed a surface micromachined thermopneumetic micropump, modeled its actuation/pumping performance for liquid delivery instruments, and successfully transferred the layout and fabrication process to the fabrication team. - Visiting Postdoctoral Fellow: Institute of Industrial Science (IIS), University of Tokyo, Japan: June 1996 – July 1998 Investigated mechanical properties and applications of the poly-crystal and single-crystal silicon films. Fabricated and tested microactuators for deforming other microstructures into three- dimensional shapes using Joule-heating. Designed and fabricated sputtered thin-film TiNi shape memory alloy (SMA) based micromachined optical switches.

- Senior Researcher: Ajou Univ., Korea: March 1996 -June 1996 Developed a novel quantitative method to determine the residual stress along the depth of the p+ silicon films. Fabricated the p+ silicon film structures and determined their stress profiles. Fabricated and tested electrostatic microactuators and microvalves, consisting of the p+ silicon films.

- Graduate Research Assistant: Ajou University, Korea: June 1991 - Feb. 1996 Designed, fabricated and characterized a micromachined piezoresistive accelerometer. Set up several process equipments including anodic bonder, emulsion mask processor, and wet benches for anisotropic etchants.

TEACHING EXPERIENCE

Guest Lecturer: Stevens Institute of Technology, Nano 600 Series MEMS and NEMS

Lecturer: Ajou University, Korea: Sept. 1993 - Dec. 1995 Engineering Calculation MEMS instruments (short course)

Teaching Assistant: Ajou University, Korea: March 1990 - Dec. 1992 Electronic Circuits Laboratory Advanced Electronic Circuits Laboratory

PROFESSIONAL SOCIETY

 Senior Member: The Institute of Electronics and Electrical Engineers (IEEE): Conference Committee, Session Chair

 American Society of Mechanical Engineers (ASME): Conference Committee, Session Chair

 The International Society for Optical Engineering (SPIE) : Conference Committee, Session Chair

 Member: Materials Research Society (MRS)

 Member: Korean Institute of Electrical Engineering (KIEE)

PROFESSIONAL SERVICES

 Technical Program Committee, 2006, IEEE Sensors Conference, Daegu, Korea, Oct. 2006.  Technical Program Committee, 2005, IEEE Sensors Conference, Irvine, CA, Oct. 2005.  Program Committee, 2005, SPIE MEMS/MOEMS Components and Their Applications Conference, San Jose, California, USA, January 2005.  Technical Program Committee, 2004, IEEE Sensors Conference, Vienna, Austria, Oct. 2004.  Program Committee, 2004, SPIE MEMS/MOEMS Components and Their Applications Conference, San Jose, California, USA, January 2004.  Program Committee, 2003, SPIE MEMS/MOEMS Components and Their Applications Conference, San Jose, California, USA, January 2003.  Organizer, 2006 Micro and Nano Devices Topic within MEMS Division of the ASME International Mechanical Engineering Congress and Exposition, Chicago, IL, Nov. 2006.  Co-Organizer, 2005 Micro and Nano Devices Topic within MEMS Division of the ASME International Mechanical Engineering Congress and Exposition, Orlando, FL, November 2005.

 Session Chair, ASME International Mechanical Engineering Congress and Exposition, Chicago, IL, Nov. 2006.  Session Chair, 2006, IEEE Sensors Conference, Daegu, Korea, Oct. 2006.  Session Chair, 2005, IEEE Sensors Conference, Irvine, CA, Oct. 2005.  Session Chair, 2005 ASME International Mechanical Engineering Congress and Exposition, Orlando, FL, November 2005.  Session Chair, 2005, SPIE MEMS/MOEMS Components and Their Applications Conference, San Jose, California, USA, January 2005.  Session Chair, 2004, SPIE MEMS/MOEMS Components and Their Applications Conference, San Jose, California, USA, January 2004.

Reviewer of

o Journals and Conference Papers:

IEEE Sensors Journal, 2004, 2006 IEEE/ASME Journal of Microelectromechanical Systems, 2003 IEEE EDS Electron Device Letters, 2005 IOP Journal of Physics: Condensed Matter, 2006 IOP Journal of Micromechanics and Microengineering, 2004, 2005, 2006 IOP Nanotechnology, 2005, 2006 IOP Journal of Optics A: Pure and Applied Optics, 2005 Sensors and Actuators A, 2003 Journal of Micromechatronics, 2006 IEEE Sensors Conference, 2004, 2005, 2006 ASME International Mechanical Engineering Congress and Exposition, 2004, 2005, 2006 SPIE MOEMS and MEMS Conference, 2004, 2005

o Proposals: NASA SBIR Phase I and II, 2000, 2001, 2002, 2003, 2004, 2005 JPL Research and Technology Development, 2005 Ireland Science Foundation, 2005

o Projects: Multi Object Spectrometer (MOS) for NASA’s James Webb Space Telescope (JWST)

RESEARCH ADVISEMENT

Name Title Project Mr. Eric Jones Process Engineer Microgyro, microvalve Mr. Nishant Rohatgi Academic Part Time Microvalve Mr. Larry Wild Process Engineer Microvalve, PZT film development Mr. Toshiro Hatake Packaging Engineer Microvalve, microactuator Dr. Choonsup Lee Postdoctoral Scholar Microvalve, nanochannel Dr. Yoshikazu Hishinuma Postdoctoral Scholar Deformable mirror, active membrane Dr. Risaku Toda Technical Staff Microactuator Mr. Matthew Wright Summer Student PZT actuator testing Ms. Viola Fucsko Summer Student Cu Nanowire fabrication

RESEARCH COLLABORATION

Name Affiliation Project Prof. Hongjun Wang Stevens Inst. Tech. Nanobiotechnology Prof Nosang Myung UC Riverside Electrochemistry/nanowire Prof. Jay Khodadadi Auburn University CFD modeling Prof. Susan Trolier-McKinstry Penn State University PZT film Prof. Thomas Kenny Standford UniversityMicro and nano technology Prof. Junseok Chae Arizona State University Extreme environment Dr. Ji Su NASA LaRC EAP actuator Dr. Xiaoning Jiang TRS Technologies, Inc. PMN-PT actuator Dr. Richard Dekany Caltech Astronomy Dr. Ranga-Ram Chary Caltech Astronomy Dr. Yoseph Bar-Cohen JPL EAP actuation Dr. Dave Redding JPL Wavefront control Dr. Gaj Birur JPL Spacecraft cooling technology Dr. Christopher Shelton JPL Adaptive Optics Dr. B. Martin Levine JPL Large aperture Dr. Eric Bloemhof JPL Nulling interferometer Dr. Juergen Mueller JPL Micropropulsion technology Dr. Gregory Agnes JPL Large mechanical structure Dr. Rhonda Morgan JPL Optics/metrology Dr. Kirill Shcheglov JPL Modeling and characterization Dr. Daniel Choi JPL Nanofabrication Dr. Zensheu Zhang JPL Mechanical modeling Dr. W. Keats Willkie JPL Antenna Dr. Rajeshuni Ramesham JPL Reliability testing Dr. Yijiang Chen JPL Large optical structures FUNDED PROJECTS

Principle Investigator: Total funding of 3.62 million dollars was raised during 2000~2005 period - JPL Research and Technology Development FY06, (Principle Investigator), Title: Cryogenic, Large-Travel, Latching-Type Microactuator for Re-Configurable, Ultra-Large, Ultra-Lightweight Space Telescopes: $193.1K / 1 yr (Oct. 2005~Sept. 2006) - JPL Spontaneous Concepts, Director's Research and Development Fund FY05, (Principle Investigator), Title: Piezoelectric Nanowire Resonator Sensor Arrays for Biochemical Detection: $30K / 3 months (March 2005~May 2006) - National Reconnaissance Office, Director’s Innovation Initiatives FY05, (Principle Investigator), Title: Miniaturized, Lightweight, Latching-Type Inchworm Actuator for Active Shape Correction of Ultra-Large Space Telescope Mirrors: $350K / 1.5 yr (Oct. 2004~March 2005) - JPL Research and Technology Development 05, (Principle Investigator),Title: Cryogenic, Large- Travel, Latching-Type Microactuator for Re-Configurable, Ultra-Large, Ultra-Lightweight Space Telescopes: $150K / 1 yr (Oct. 2004~ Sept. 2005) - JPL Spontaneous Concepts, Research and Technology Development FY04, (Principle Investigator),Title: Inchworm Actuator for Future Ultra-Large Space Telescopes: $30K / 3 months (July 2004~Sept. 2004) - Reimbursable from POC, (Principle Investigator),Title: Fabrication of Membrane Arrays for Differencing Electrostatic Optical Sensors: $103K / 8 months (Oct. 2004~May 2005) - JPL Director's Research and Development Fund FY04 (Co-Principle Investigator), Title: Large- Stroke, Large-Area, Continuous Membrane MEMS Deformable Mirror for Ultra-Large, Ultra- Lightweight Telescopes: $200K / 1.5 yr (Oct. 2003~ March 2005) - National Reconnaissance Office, Director’s Innovation Initiatives FY04, (Principle Investigator),Title: Deployment and Shape Control for Configurable Large Aperture Telescopes: $350K / 1 yr (Oct. 2003~ Sept. 2004) - NASA Code R Enabling Concepts and Technologies (ECT) Program, (Principle Investigator of the microvalve subtask), Title: Integrated Piezoelectric MEMS Microvalve for LCAM: $250K / 1 yr (Oct. 2003~ Sept. 2004) - National Reconnaissance Office direct funding, (Principle Investigator),Title: Vertical Inchworm Microactuator: $150K / 1 yr (Oct. 2003~ Sept. 2004) - Reimbursable from IOCC, (Principle Investigator),Title: Assessment and Preliminary Design of MEMS-actuated Optical Waveguide Device: $25K / 1 month (January 2003) - NASA Code R Enabling Concepts and Technologies (ECT) Program, (Principle Investigator),Title: Integrated Piezoelectric MEMS Microvalve for Microspacecraft Test Bed: $300K / 1 yr (Oct. 2002~ Sept. 2003) - JPL Director's Research and Development Fund FY03 (Co-Principle Investigator), Title: Large- Stroke, Continuous Membrane Deformable Mirror: $200K / 1.5 yr (Oct. 2002~March 2004) - NASA Gossamer Space Telescope Technology NRA (Co-I), Title: Advanced Segmented Silicon Space Telescope: $187K / 1 yr (Feb. 2002~ Jan. 2003) - JPL Director's Research and Development Fund FY02, (Principle Investigator), Title: Membrane Transfer Technology for Continuous Membrane Deformable Mirrors: $120K / 1 yr (Oct. 2001~ Sept. 2002) - Reimbursable from Center for Adaptive Optics Y3, (Principle Investigator), Title: Development of the Fabrication Process for Deformable Mirrors: $25K / 1 yr (Oct. 2001~ Sept. 2002) - NASA Cross Enterprise Technology Development Program, (Principle Investigator), Title: MEMS Microvalve for Space Applications: $200K / 1 yr (Oct. 2001~ Sept. 2002) - NASA Cross Enterprise Technology Development Program, (Principle Investigator), Title: Thin film PZT Microactuators: $120K / 1 yr (Oct. 2001~ Sept. 2002) - NASA Gossamer Space Telescope Technology NRA (Co-Principle Investigator), Title: Advanced Segmented Silicon Space Telescope: $187K / 9 months (Feb. 2001~ Nov. 2002) - Reimbursable from Xinetics, (Principle Investigator), Title: Mirror Wafer Transfer Process: $50K / 1 yr (Dec. 2001~ Nov. 2002) - NASA Cross Enterprise Technology Development Program, (Principle Investigator), Title: MEMS Microvalve: $250K / 1 yr (Oct. 2000~ Sept. 2001) - NASA Cross Enterprise Technology Development Program, (Principle Investigator), Title: Thin film PZT Microactuators: $150K / 1 yr (Oct. 2000~ Sept. 2001)

Co-Investigator - DARPA TTO, Large Aperture Space Surveillance (Optical) (LASSO) Phase I, BAA04-36 (PI: John Hong), Title: In-space Optics Manufacturing and Precision Deployment for Large Aperture Space Surveillance, $500K / 6 months (2005) - NASA NRA, Astrobiology Science and Technology Instrument Development, Bio/nano Technology Program, FY03 (PI: Thomas George), Title: Ultra-small Force-Detected Nuclear Magnetic Resonance Spectrometer system for Biological/Astrobiological Investigations, $500K / yr for 3 years (2004) - Caltech President Funding, FY03 (PI: Wolfgang Fink), Title: Wireless IOP sensor: $120K/ 1 yr (Oct. 2003~ Sept. 2004), JPL Spontaneous Concepts, Director's Research and Development Fund, FY03 (PI: Wolfgang Fink), Title: Wireless IOP sensor: $50K / 6 months (May 2003~ Sept. 2004) - Hughes Space and Communications Company (PI: Roman Gutierez), Title: Mesogyro, $457K / 1 yr (2000~2001) - JPL Technology Development Agreement (PI: Dean Wiberg), Title: Segmented Silicon Mirrors (1999~2000)

TECHNICAL SKILLS  Task management, cost and schedule management  Stress analysis, modeling of microactuation  Image processing (Matlab)  Modeling (Coventor)  Microfabrication, design and characterization: - Microfabrication: photolithography, etching (TMAH, KOH, EDP, RIE and DRIE), LPCVD, PECVD, oxidation and diffusion, evaporation, sputtering, YAG laser, dicing saw, ion milling, wafer bonding (anodic, compression, eutectic, solder bump), etc. - Characterization: SEM, optical profiler, Michelson Interferometer, vibration test and etc. - Mask Design: L-Edit

COURSES TAKEN AT JPL

System Engineering / Science  Science 101: Seeing Beneath the Surface 2005  System Engineering for In-Situ Instrument Scientists & Technology 2005  Radiation Effects in Electronics 2002

Proposal / Project Management  The JPL Project Element Manager 2005  Medium Technology Proposal Preparation 2003  The JPL Task Manager 2002  JPL Proposal Preparation 2001 PUBLICATION LIST

PEER REVIEWED JOURNALS 1. C. M. Hangarter, Y. Rheem, B. Yoo, E. H. Yang, and N. V. Myung, “Hierarchical Magnetic Assembly of Nanowires,” IOP Nanotechnology 2007. in-press 2. E. H. Yang, C. Lee and J. Khodadadi, Invited Paper “Development of MEMS-Based Piezoelectric Microvalve Technologies – Fabrication, Characterization and Modeling,” Journal of Sensors and Materials, Special Issue on Microvalve, 2007. in-press 3. C. A. Johnson, J. M. Khodadadi and E. H. Yang, “Modeling of Frictional Gas Flow Effects in a Piezoelectrically Actuated High-pressure Microvalve under Low Leak-rate Conditions,” Journal of Micromechanics and Microengineering, vol. 16, pp. 2771-2782, 2006. 4. E. H. Yang, Y. Hishinuma, J.-G. Cheng, S. Trolier-McKinstry, E. Bloemhof, and B. M. Levine, “Thin-Film Piezoelectric Unimorph Actuator-based Deformable Mirror with a Transferred Silicon Membrane,” IEEE/ASME Journal of Microelectromechanical Systems,Vol. 15, No. 5, pp. 1214-1225, Oct. 2006. 5. C. Lee, E. H. Yang, S. M. Saeidi and J. Khodadadi, “Fabrication, Characterization and Computational Modeling of a Piezoelectrically Actuated Microvalve for Liquid Flow Control,” IEEE/ASME Journal of Microelectromechanical Systems, Vol. 15, No.3, pp.686-696, June 2006. 6. Y. Hishinuma and E. H. Yang, "Piezoelectric Unimorph Microactuator Arrays for Single-Crystal Silicon Continuous Membrane Deformable Mirror," IEEE/ASME Journal of Microelectromechanical Systems, Vol. 15, No. 2, pp. 370-379, April 2006. 7. E. H. Yang, C. S. Lee, J. Mueller and T. George, "Leak-Tight Piezoelectric Microvalve for High-Pressure Gas Micropropulsion," IEEE/ASME Journal of Microelectromechanical Systems, Vol. 13, No. 5, pp. 799- 807, Oct. 2004. 8. E. H. Yang and D. V. Wiberg "A Wafer-Scale Membrane Transfer Process for the Fabrication of Optical Quality, Large Continuous Membranes," IEEE/ASME Journal of Microelectromechanical Systems, Vol. 12, No. 6, pp. 804-815, Dec. 2003. 9. C. Lee, E. H. Yang, N.V. Myung, and T. George, “A Nanochannel Fabrication Technology without Nanolithography,” American Chemical Society NanoLetters, Vol. 3, No. 10, pp. 1339-1340, Oct. 2003. 10. J. Mueller, J. Polk, E. H. Yang, A. Green, V. White, D. Bame, I. Chakraborty, S. Vargo, and R. Reinicke, Invited Paper “An Overview of MEMS-Based Micropropulsion Developments at JPL,” Acta Astronautica, Vol. 52, No. 9~12, pp. 881-895, 2003. 11. E. H. Yang and H. Fujita, "Reshaping of Single Crystal Silicon Microstructures," Japanese Journal of Applied Physics, Part 1, Vol. 38, No 3A, pp. 1580-1583, March 1999 12. E. H. Yang and H. Fujita, "Determination of the Modification of Young's Modulus due to Joule Heating of Microstructures Using U-Shaped Beams," Sensors and Actuators A, Vol. 70, pp.185-190, 1998. 13. E. H. Yang, S. S. Yang and O. C. Jeong, "Fabrication and Electrostatic Actuation of Thin Diaphragms," KSME International Journal, Vol. 12, pp. 161-169, April 1998. 14. E. H. Yang, S. W. Han and S. S. Yang, "Fabrication and Testing of a Pair of Passive Bivalvular Microvalves Composed of p+ Silicon Diaphragms," Sensors and Actuators A, Vol. 57, pp.75-78, 1996. 15. E. H. Yang and S. S. Yang, "The Quantitative Determination of the Residual Stress Profile in Oxidized p+ Silicon Films," Sensors and Actuators A, vol. 54, pp. 684-686, June 1996. 16. E. H. Yang, S. S. Yang, E. J. Park and S. H. Yoo, "Optimal Valve Design and Fabrication of an Electrostatic Micropump with p+ Diaphragms," Journal of KIEE, Vol. 9, No. 4, pp. 236-242, Dec. 1996. 17. E. H. Yang, S. S. Yang, S. W. Han and S. Y. Kim, "Fabrication and Dynamic Testing of Electrostatic Microactuators with p+ Diaphragms," Sensors and Actuators A, vol. 50, pp. 151-156, Dec. 1995. 18. E. H. Yang, S. S. Yang and S. H. Yoo, "A Technique for Quantitative Determination of the Profile of the Residual Stress along the Depth of p+ Silicon Films," Appl. Phys. Lett., vol. 67 (7), 14, pp. 912-914, August 1995. PEER REVIEWD CONFERENCES

1. Ji Su, E.-H. Yang, T.-B. Xu, R. Morgan, Z. Chang, “Active Membrane Using Electrostrictive Graft Elastomer for Deployable and Lightweight Mirrors,” SPIE Smart Structures and Materials Confererence, San Diego, CA, 18–22 March 2007 2. B. Yoo, Y. Rheem, C. Hangarter, E. H. Yang, and N. V. Myung, “Site-Specific Magnetic Assembly of Nanostructures for Sensor Arrays,” Proceedings of 2006 IEEE Sensors Conference, Daegu, Korea, October, 2006. 3. R. Toda and E. H. Yang, “Zero-Power Latching, Large-stroke, High-precision Linear Microactuator for Lightweight Structures in Space,” IEEE Micro Electro Mechanical Systems (MEMS) Conference, Istanbul, Turkey, January 2006. 4. R. Toda and E. H. Yang, “Development of Latching Type Large Vertical Travel Microactuator,” ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS and Electronic Systems (InterPACK ’05), San Francisco, USA, July 17-22, 2005. 5. Y. Hishinuma and E. H. Yang, “Large Aperture Deformable Mirror with a Transferred Single-Crystal Silicon Membrane Actuated Using Large-Stroke PZT Unimorph Actuators,” IEEE Int. Conf. Solid-State Sensors and Actuators (Transducers '05), Seoul, Korea, June 2005. 6. S.M. Saeidi, J.M. Khodadadi, C.A. Johnson, C. Lee and E. H. Yang, “Computational Modeling of a Piezoelectrically Actuated Microvalve for the Control of Liquid Flowrate”, 2005 NSTI Nanotechnology Conference and Trade Show, Nanotech 2005, May 8-12, 2005, Anaheim, California, U.S.A. 7. R. Toda and E. H. Yang, “Fabrication and Characterization of Vertical Travel Linear Microactuator,” SPIE Photonics West, MOEMS-MEMS Conference, San Jose, California, USA, January 2005. 8. Y. Hishinuma, E. H. Yang, Eric Bloemhof, and B. Martin Levine, “Piezoelectric Unimorph MEMS Deformable Mirror for Ultra-Large Telescopes,” SPIE Photonics West, MOEMS-MEMS Conference, San Jose, California, USA, January 2005. 9. R. Toda and E. H. Yang, “Fabrication and Characterization of Vertical Inchworm Microactuator,” Proceedings of 2004 ASME International Mechanical Engineering Congress and Exposition, Anaheim, California, November 13-19, 2004. 10. Y. Hishinuma, E. H. Yang, J. –G. Cheng, and Susan Trolier-McKinstry, “Optimized Design, Fabrication and Characterization of PZT Unimorph Microactuators for Large-Stroke, Continuous Membrane Deformable Mirrors,” Proceedings of 2004 ASME International Mechanical Engineering Congress and Exposition, Anaheim, California, November 13-19, 2004. 11. Y. Hishinuma and E. H. Yang, “Single-Crystal Silicon Continuous Membrane Deformable Mirror with PZT Unimorph Microactuator Arrays,” Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island, South Carolina, June 6-10, 2004. 12. C. Lee and E. H. Yang, “Piezoelectric Liquid-Compatible Microvalve for Integrated Micropropulsion,” Solid State Sensor, Actuator and Microsystems Workshop (Hilton Head 2004), Hilton Head Island, South Carolina, June 6-10, 2004. 13. C. Lee, E. H. Yang, N.V. Myung, and T. George, “A Nanochannel Fabrication Technology without Nanolithography,” Micro-TAS Conference, Lake Tahoe, CA, USA, Oct. 5-9, 2003. 14. C. Lee, E. H. Yang, N.V. Myung, and T. George, “A Nanochannel Fabrication Technique Using Chemical- Mechanical Polishing (CMP) and Thermal Oxidation,” IEEE-Nano 2003, San Francisco, CA, USA, August 12-14, 2003. 15. S. N. Gullapalli, E. H. Yang and S. –S. Lih, “New Technologies for the Actuation and Control of Large Aperture Lightweight Optical Quality Mirrors,” IEEE Aerospace Conference, Big Sky, Montana, USA, 2003. 16. D. S. Choi and E. H. Yang, “Fabrication of 20 nm Embedded Longitudinal Nanochannels by Etching Sacrificial Nanowires,” Nanotechnology Conference and Trade Show, San Francisco, California, USA, February 23-27, 2003. 17. E. H. Yang, C. Lee and J. Mueller, “Normally-Closed, Leak-Tight Piezoelectric Microvalve with Ultra- High Pressure Upstream Flow Control for Integrated Micropropulsion,” IEEE International Conference on Microelectromechanical Systems (MEMS ’03) Conference, Kyoto, Japan, Jan. 2003, pp. 80-83. 18. E. H. Yang, R. Dekany and S. Padin, “Design and Fabrication of a Large Vertical Travel Silicon Inchworm Microactuator for Advanced Segmented Silicon Space Telescope (ASSiST),” SPIE Photonics West, Micromachining and Microfabrication Conference, San Jose, California, USA, January 2003. 19. E. H. Yang, K. Shcheglov and Susan Trolier-McKinstry, “Concept, Modeling and Fabrication Techniques for Large-Stroke Piezoelectric Unimorph Deformable Mirrors,” SPIE Photonics West, Micromachining and Microfabrication Conference, San Jose, California, USA, January 2003. 20. E. H. Yang and C. Lee, "Piezoelectric Microvalves for Micropropulsion," ASME International Mechanical Engineering Congress and Exposition, Orlando, FL, November 2002. 21. E. H. Yang, N. Rohatgi and L. Wild, "A Piezoelectric Microvalve for Micropropulsion," AIAA Conference on Nanotech 2002 - "At the Edge of Revolution", Houston, Texas, 9 - 12 Sep. 2002. 22. J. Mueller, C. Marrese, J. Ziemer, A. Green, M. Mojarradi, T. Johnson, E. H. Yang, V. White, D. Bame, R. Wirz, M. Tajmar, J. Schein, R. Reinicke, and V. Hruby "JPL Micro-Thrust Propulsion Activities," AIAA Conference on Nanotech 2002 - "At the Edge of Revolution", Houston, Texas, 9 - 12 Sep. 2002. 23. E. H. Yang, and K. Shcheglov, "A Piezoelectric Bimorph Deformable Mirror Concept by Wafer Transfer for Ultra Large Space Telescopes," SPIE International symposium on Astronomical Telescopes and Instrumentation, Adaptive Optical System Technologies II, Waikoloa, Hawaii, USA, 22-28 August 2002. 24. R. Dekany, D. McMartin, S. Padin, E. H. Yang and M. Troy, "Advanced Segmented Silicon Space Telescopes (ASSiST)," SPIE International symposium on Astronomical Telescopes and Instrumentation, Adaptive Optical System Technologies II, Waikoloa, Hawaii, USA, 22-28 August 2002. 25. E. H. Yang and D. V. Wiberg, "A Wafer Transfer Technology for MEMS Adaptive Optics," ASME International Mechanical Engineering Congress and Exposition, Novel Micromachining Processes and Packaging for MEMS, New York, New York, November 2001. 26. E. H. Yang and D. V. Wiberg, "A New Wafer-Level Membrane Transfer Technique for MEMS Deformable Mirrors," IEEE International Conference on Microelectromechanical Systems (MEMS ’01) Conference, Interlaken, Switzerland, Jan. 2000, pp. 80-83. 27. E. H. Yang, D. V. Wiberg, and Richard G Dekany, "Design and Fabrication of Electrostatic Actuators with Corrugated Membranes for MEMS Deformable Mirror in Space," SPIE Int’l Symp. Optical Science and Technology, Vol. 4091, San Diego, July 30 - Aug. 4, 2000, pp. 83-89. 28. P. Surbled, B. Le Pioufle, E. H. Yang, H. Fujita, "Shape Memory Alloys for Micromembranes Actuation", Europto Series (EOS/SPIE symposia), Munich (D), 14-18 June 1999, pp. 63-70. 29. E. H. Yang and H. Fujita, “Fabrication of Thin Film TiNi Shape Memory Alloy Microactuators for Optical Switching Applications," SPIE Micromachining and Microfabrication Conference, Microlectronic Structures and MEMS for Optical Processing IV, Vol. 3513, September 21-22, 1998. 30. E. H. Yang and H. Fujita, "Reshaping of Single Crystalline Silicon Microstructures for 3D MEMS," Micro Mechanics Europe 97 (MME 97), Southampton, England, Sept. 1997, pp. 67-70. 31. E. H. Yang and H. Fujita, "Fabrication and Characterization of U-shaped Beams for the Determination of the Modification of Young's Modulus after Joule Heating of Polysilicon Microstructures," IEEE Int. Conf. Solid-State Sensors and Actuators (Transducers '97), Chicago, USA, June 1997, pp. 603-606. 32. E. H. Yang and H. Fujita, "Plastic Deformation of Single Crystalline Silicon Microstructures by Joule Heating," Sensor Symposium, Late News, Kawasaki, Japan, June 1997, p.L73. 33. Y. Fukuta, D. Collard, T. Akiyama, E. H. Yang and H. Fujita," Microactuated Self-Assembling of 3D Polysilicon Structures with Reshaping Technology," IEEE International Conference on Microelectromechanical Systems (MEMS '97), Nagoya, Japan, Jan. 1997, pp. 477-481. 34. E. H. Yang and H. Fujita, "Modification of Young's Modulus due to the Joule Heating of Polysilicon U- shaped Beams," IEEJ Annual Conference, Vol. 3, Kyoto, Japan, March, 1997, pp. 247-248. 35. E. H. Yang, S. S. Yang, E. J. Park and S. H. Yoo, "Dynamic Characteristics of the Corrugated and the Flat p+ Diaphragms Actuated Electrostatically under Residual Stress)," International Mechanical Engineering Congress and Exposition (96 Winter Annual Meeting), Atlanta, U.S.A., DSC-Vol. 59, Nov. 1996, pp. 441- 445. 36. E. H. Yang, S. S. Yang and S. H. Yoo, "Design and Fabrication of Electrostatic Microactuators with Silicon Diaphragms," Int. Workshop on Advanced Mechatronics, Cheju, Korea, Dec. 1995, pp. 247-256. 37. E. H. Yang, S. S. Yang, S. W. Han, and S. Y. Kim, "Fabrication and Dynamic Testing of Electrostatic Microactuators with p+ Diaphragms," IEEE Region 10 Conference on Microelectronics and VLSI, Hong Kong, Nov. 1995, pp. 28-31. 38. E. H. Yang and S. S. Yang, "Fabrication of an Electrostatic Micropump with p+ Diaphragms," Int. Symp. on Microsystems, Intelligent Materials and Robots, Sendai, Japan, Sept. 1995, pp. 106-109. 39. E. H. Yang and S. S. Yang, "A New Technique for Quantitative Determination of the Stress Profile along the Depth of p+ Silicon Films," IEEE Int. Conf. Solid-State Sensors and Actuators, (Transducers ’95), Stockholm, Sweden, June 1995, pp. 68-71. 40. S. S. Yang, E. H. Yang, S. Y. Kim, J. D. Seo, and S. H. Yoo, "Fabrication of an Electrostatic Actuator and Passive Valves with p+ Diaphragms for Micropumps," ASME Winter Annual Meeting, DSC-vol. 55-2, Chicago, U.S.A., Nov. 1994, pp. 733-740.

INVITED CONFERENCE PAPERS

1. E. H. Yang, "Microactuators for Wavefront Correction in Space,” Invited Paper, SPIE Defense and Security Symposium, Micro and Nanotechnologies for Defense and Security, Proceeding of SPIE, Vol. 6556, Orlando, FL, April 2007. 2. P. Krulevitch, P. Bierden, T. Bifano, E. Carr, C. Dimas, H. Dyson, M. Helmbrecht, P. Kurczynski, R. Muller, S. Olivier, Y. Peter, B. Sadoulet, O. Solgaard, and E. H. Yang, “MOEMS Spatial Light Modulator Development at the Center for Adaptive Optics,” Invited Paper, SPIE Photonics West, Micromachining and Microfabrication Conference, San Jose, California, USA, January 2003. 3. J. Mueller, E. H. Yang, A. Green, V. White, I. Chakraborty and R. Reinicke, "Design and Fabrication of MEMS-Based Micropropulsion Devices at JPL", Invited Paper, Reliability, Testing, and Characterization of MEMS/MOEMS, Proceedings of SPIE Vol. 4558, San Francisco, October (2001), pp. 57-71. 4. J. Mueller, J. Polk, E. H. Yang, A. Green, V. White, D. Bame, I. Chakraborty, S. Vargo, and R. Reinicke, “An Overview of MEMS-Based Micropropulsion Developments at JPL,” Invited Paper IAA-B3-1004, 3rd International Symposium of the International Academy of Astronautics (IAA) for Small Satellites for Earth Observation, Berlin, Germany, April 2-6, 2001. 5. T. George, Y. Bae, I. Chakraborty, H. Cherry, C. Evans, F. Eyre, A. Hui, K.King, L.Kim, R.Lawtona, G. Lin, C.Marreseb, J.Mueller, J.Podosek, K.Shcheglov, T.Tang, T.VanZandt, S.Vargo, J.Wellmana, V.White, D.Wiberg and E. H. Yang, "MEMS Technology at NASA's Jet Propulsion Laboratory," Invited Paper, SPIE Int’l Symp. Optical Science and Technology, San Diego, July 30 - Aug. 4, 2000. 6. E. H. Yang, “Microsystems Research of Fujita laboratory at the University of Tokyo,” Invited Paper Korean Society of Electronic Materials, Vol. 11, No. 4, pp. 323-328, 1998.) (in Korean) 7. S. S. Yang, E. H. Yang, "Research Trends in Fabrication and Applications of Micropumps," Invited Paper, Journal of KSME, Vol. 33, No. 6, pp. 529-551, 1993. (in Korean)

INVITED PRESENTATIONS 1. E. H. Yang, “Piezoelectric Microactuator Technologies for Space Applications,” NJIT, Feb. 2007. 2. E. H. Yang, “Piezoelectric Microactuator Technologies for Space Applications,” Picatinny Arsenal, NJ, Feb. 2007.E. H. Yang, “Piezoelectric Microactuators Technologies for Space Applications,” Columbia University, Nov. 2006. 3. E. H. Yang, “Microactuators Technologies for Wavefront Correction in Space,” Rutgers University, Oct. 2006. 4. E. H. Yang, “Development of Microactuators Technologies for Space Applications,” Seoul National University, Seoul, Korea, July 2006. 5. E. H. Yang, “Development of Microactuators Technologies for Space Applications,” Ihwa Woman’s University, Seoul, Korea, July 2006. 6. E. H. Yang, “Development of Microactuators Technologies for Space Applications,” Ajou University, Suwon, Korea, July 2006. 7. E. H. Yang, “Development of Microactuators Technologies for Space Applications,” IEEE Metropolitan LA Section General Membership Dinner Meeting, California Institute of Technology, Pasadena, CA, April, 2006. 8. E. H. Yang, “Development of Microactuators Technologies for Space Applications,” Mechanical Engineering Seminar Series, Stevens Institute of Technology, Hoboken, NJ, March, 2006. 9. E. H. Yang, “Development of Microactuators Technologies for Space Applications,” BSAC Lunch Time Seminar Series, University of California, Berkeley, November, 2005. 10. E. H. Yang, “Development of Microactuators Technologies for Space Applications,” WIMS Center Seminar Series, NSF Engineering Research Center for Wireless Integrated MicroSystems at the University of Michigan, Ann Arbor, September 2005. 11. E. H. Yang, “Development of Microactuators Technologies for Space Applications,” Lunch Time Seminar Series, Northrop Grumman Corporation, Woodland Hills, CA, August 2005. 12. E. H. Yang, “Development of Wavefront Corrector Technologies for Space Applications,” NASA Mirror Tech Days 2005, Huntsville, Alabama, August 2005. 13. E. H. Yang, “Deployable Optical Mirror with Controlled Deformation,” DARPA MTO Polymer MEMS Workshop, Washington DC, March 2~3, 2005. 14. E. H. Yang, “Adaptive Optics – MEMS Deformable Mirror Development at JPL,” JPL Advanced Planning and Integration (APIO), Jet Propulsion Laboratory, Nov. 4, 2004. 15. E. H. Yang, “Development of Microactuators Technologies for Space Applications,” Korea Advanced Institute of Science and Technology, June 1, 2005. 16. E. H. Yang, “Development of Microactuators Technologies for Space Applications,” Guwangju Institute of Science and Technology, May 31, 2005. 17. E. H. Yang, “MEMS Actuators for Space Applications,” JPL Division 32-38 Joint Seminar, Jet Propulsion Laboratory, April 2004. 18. E. H. Yang, “MEMS Actuators for Space Applications,” Ajou University, August 2004. 19. E. H. Yang, “Large-Stroke Continuous Membrane Deformable Mirror for Medical Diagnosis,” NASA Medical Technology Summit, Pasadena, Feb. 11-13, 2003. 20. E. H. Yang, “Variable Control MEMS Valve for Gas/Liquid Systems,” EXPLORER WORKSHOP, Washington, DC, March 12, 2002. 21. E. H. Yang, “MEMS Adaptive Optics,” EXPLORER WORKSHOP, Washington, DC, March 12, 2002. 22. E. H. Yang, “A Wafer Transfer Technology for MEMS Adaptive Optics,” CfAO MEMS Workshop, CfAO, UC Berkeley, Feb. 2002. 23. E. H. Yang, “A Wafer Transfer Technique for MEMS Deformable Mirrors,” MEMS Workshop for Adaptive Optics, CfAO, UC Berkeley, Nov. 2000. 24. E. H. Yang, “Electrostatic Actuators and Micropumps,” Electronics and Telecommunication Research Institute, Oct. 1998. 25. E. H. Yang, “Reshaping-based Polysilicon and Single-Crystal Silicon Microactuator Technology,” Korea Advanced Institute of Science and Technology, June, 1997. 26. E. H. Yang, “A Quantitative Determination of Stress Profiles along the Depth of Boron Doped Silicon Films,” Samsung Electronics, March, 1996.

TECHNICAL PRESENTATIONS

1. J. Su, E. H. Yang, T. Xu, R. M. Morgan, Z. Chang, “Active membrane using electrostrictive graft elastomer for deployable and lightweight mirrors,” SPIE Smart Structures and Materials and NDE for Health Monitoring and Diagonostics, San Diego, California USA, 18 – 22 March 2007. US PATENTS

1. W. Fink, E.H. Yang, C. Lee, M. Humayun, and G. Y. Fujii, “Wireless Intraocular Pressure Sensor (WIPS),” US 7,131,945 B2 US Patent 2. E.H. Yang and D. Wiberg, “A Wafer-Level Transfer of Membranes in Semiconductor Processing,” US 6,777,312 B2 US Patent 3. N.V. Myung, E.H. Yang, B.–Y. Yoo, Y. Rheem, and D.S. Choi, “Magnetically Assembled Nanowires,” CIT- 4566-P, filed for provisional patent application on 2/15/06. 4. R. Toda and E.H. Yang, “Four Point Latching Microactuator,” CIT-4481-P, filed for provisional patent application on 9/07/05. 5. E.H. Yang, L. Wild, N. Rohatgi and D. Bame, “A Piezoelectric Microvalve under Ultra-High Upstream Pressure for Integrated Micropropulsion and Method for Operating the Same”, CIT-3889, US Patent Pending, 10/853,072. 6. E.H. Yang, “Wafer Level Transfer of Membranes with Gas-Phase Etching and Wet Etching Methods,” CIT- 3325, US Patent Pending, 10/678,359. 7. E.H. Yang, “A PZT Bimorph based, High Stroke MEMS Deformable Mirror with a Continuous Membrane for Active Optical Systems” CIT-3475, US Patent Pending, 10/474,978.

NANO TECH BRIEFS

1. “Fabrication of Channels for Nanobiotechnological Devices”, Nanotech Briefs vol. 1, No. 1, page 15, Jan. 2004.

NASA TECH BRIEFS

1. N.V. Myung, E.H. Yang, B.–Y. Yoo, Y. Rheem, and D.S. Choi, “Magnetically Assembled Nanowires,” (NPO-42952) 2. D.S. Choi, Y. Bae, C. Ramsey, E.H. Yang, “Fabricating an Ordered Array of Nanometer-Scale Dots by Lift- off using a Thin Alumina Nanopore Template,” (NPO-42271) 3. D.S. Choi, Y. Bae, C. Ramsey, E.H. Yang, “Fabrication of Copper Nanotubes by Electrodeposition,” (NPO- 42261) 4. E.H. Yang, “Re-Configurable, Segmented Silicon Telescope,” (NPO-42106) 5. E.H. Yang, Y. Hishinuma, D. S. Choi, K. Shcheglov, “Amplification of Thermoionic Cooling Power Using Precision Metal Nanowire Arrays,” (NPO-42101) 6. R. Toda and E. H Yang, “Four Point Latching Microactuator,” (NPO-42041) 7. Y. Hishinuma and E. H Yang, “Large-Stroke Piezoelectric Unimorph Actuator” (NPO-41617) 8. R. Toda and E. H Yang, “Latching-Type, Large Vertical Travel Inchworm Microactuator Array for Space Applications” (NPO-40749) 9. R. Toda and E. H Yang, “Improved Design for a Vertical Inchworm Microactuator” (NPO-40480) 10. E.H. Yang, B. M. Levine, R. Morgan, and Y. Bar-Cohen, “Re-Configurable Large Optical Mirror in Space,” (NPO-40453) 11. E.H. Yang, “Stress-Free Membrane Transfer Technique using XeFe2 Etching” (NPO-40276) 12. E.H. Yang, K. Shcheglov, A. Ksendzov, and D. Wiberg, “MEMS Actuation for Optical Waveguide Switch” (NPO-40200) 13. W. Fink, E.H. Yang, C. Lee, M. Humayun, and G. Y. Fujii, “Wireless Intraocular Pressure Sensor (WIPS)” (NPO-30861) 14. D. S. Choi and E.H. Yang, “Embedded Longitudinal Nanochannels Transferred from Metal Nanowire Patterns” (NPO-30839) 15. C. Lee and E.H. Yang, “Fabrication of Channels for Nanobiotechnological Devices” (NPO-30678) NASA Tech Briefs, vol. 28, No. 2, p. 52. 16. E.H. Yang, “A MEMS-based Large Travel Inchworm Actuator with Nanometer Step Motion” (NPO-30672) NASA Tech Briefs, vol. 27, No. 6, p. 68. 17. E.H. Yang, “A High Stroke Microvalve Actuated by Miniaturized Piezoelectric Bender Actuator for Miniaturized Liquid Systems with Particulates” (NPO-30563) NASA Tech Briefs, vol. 27, No. 12, p. 54. 18. E.H. Yang, “An Improved Design of Microvalve Actuated by Miniaturized Piezoelectric Stack for High Pressure Liquid System Applications “(NPO-30562) NASA Tech Briefs, vol. 27, No. 12, p. 53. 19. E.H. Yang, “Back actuators for segmented mirrors and other applications” (NPO-30550) 20. E.H. Yang, “Micro-Ball-Lens Optical Switch Driven by SMA Actuator” (NPO-30434) NASA Tech Briefs, vol. 27, No. 1, p. 20a. 21. E.H. Yang, “Making Precise Resonators for Mesoscale Vibratory Gyroscopes” (NPO-30431) NASA Tech Briefs, vol. 28, No. 6, p. 56. 22. E.H. Yang, “Miniature Inchworm Actuators Fabricated by Use of LIGA” (NPO-30429) NASA Tech Briefs, vol. 27, No. 2, p. 9a. 23. E.H. Yang and Larry Wild, “A Reactive Ion Etch Process for the High Selective Patterning of PZT Capacitor Films” (NPO-30349) NASA Tech Briefs, vol. 27, No. 1, p. 61. 24. E.H. Yang, “Membrane Mirrors with Bimorph Shape Actuators” (NPO-30230) NASA Tech Briefs, vol. 27, No. 5, p. 10a. 25. E.H. Yang and Larry Wild and Nishant Rohatgi, “Improvements in a Piezoelectrically Actuated Microvalve” (NPO-30338), NASA Tech Briefs, vol. 26, No. 3, p. 75. 26. E.H. Yang and D. Bame, “Improved Piezoelectrically Actuated Microvalve” (NPO-30158), NASA Tech Briefs, vol. 26, No. 1, p. 29. 27. E.H. Yang and D. Wiberg, “Silicon Membrane Mirrors with Electrostatic Shape Actuators” (NPO-21120) NASA Tech Briefs, vol. 27, No. 1, p. 62. 28. E.H. Yang and D. Wiberg, “A Wafer-Level Membrane-Transfer Process for Fabricating MEMS” (NPO- 21088) NASA Tech Briefs, vol. 27, No. 1, p. 58.

PRESS RELEASES

1. Forging Nanochannels Without Nanolithography, (http://nanotechweb.org/articles/news/2/10/2/1) 2. http://tainano.com/TNN%20Vol.%20II%20%20No.%2019.htm 3. The Taiwan Nanotechnology Newsletters, Vol. II, No. 19, 10/16/2003

MISCELLENEOUS PUBLICATIONS AND PRESENTATIONS

1. E. H. Yang and S. S. Yang, "An Accelerometer with Polysilicon Piezoresistors Bulk-Micromachined using p+ Silicon Etch Stop Layer," Trans. KIEE, vol. 45, pp.1509-1511, Oct. 1996. 2. O. C. Jeong, E. H. Yang and S. S. Yang, "An Experimental Study on Electrochemical Discharge Machining Technique for Micromachining of Pyrex Glasses," Trans. KIEE, vol. 45, pp. 1374-1379, Sep. 1996. (in Korean) 3. O. C. Jeong, E. H. Yang and S. S. Yang, "A Study on EDM Techniques for Micromachining of Glass Plates," Journal of Research Institute of Engineering, Ajou University, vol. 19, pp. 309-314, 1996. (in Korean) 4. K. N. Kim, E. H. Yang and S. S. Yang, "Fabrication of a Silicon Piezoresistive Accelerometer with Reduced-Lateral Sensitivity," Journal of Research Institute of Science and Engineering, Ajou University, vol. 17, pp. 163-168, 1995. (in Korean) 5. E. H. Yang and S. S. Yang, "A Silicon Piezoresistive Accelerometer with Silicon-On-Insulator Structure," Trans. KIEE, vol. 43, pp 1036-1038, June 1994. 6. S. S. Yang, E. H. Yang, S. Y. Kim and J. D. Seo, "Development of Design and Process Technique for the Fabrication of Micropumps," Trans. KIEE, vol. 43, pp 1891-1907, Nov. 1994. (in Korean) 7. W. Han, E. H. Yang and S. S. Yang, "Fabrication of an Electrostatic Actuator with p+ Silicon Diaphragms," Journal of Research Institute of Science and Engineering, Ajou University, vol. 17, pp. 169-174, 1994. (in Korean) 8. E. H. Yang and S. S. Yang, "A Study on a Silicon Resonator for Piezoresistive Accelerometers," Trans. KIEE, vol. 41, pp. 1164-1171, Oct. 1992. (in Korean) 9. E. H. Yang, Y. Fukuta, T. Akiyama, D. Collard and H. Fujita, "Three-Dimensional Microstructures Fabricated by Reshaping of Silicon Thin Films," KIEE MEMS '98 Conference, Taejun, Korea, April 1998, pp. 235-244. 10. E. H. Yang, F. Benoit, D. Collard and H. Fujita, "Realization and Determination of Reshaping Technology for 3 Dimensional MEMS," KIEE MEMS '97 Conference, Seoul, Korea, April 1997, pp. 33-48. 11. E. H. Yang, S. S. Yang, E. J. Park and S. H. Yoo, "A Study on the Dynamic Characteristics of the Corrugated and Flat Diaphragms under Residual Stress and Air Damping," KIEE MEMS '96 Conference, Suwon, Korea, April, 1996, pp.67-74. 12. E. H. Yang, O. C. Jeong and S. S. Yang, "Fabrication and Testing of a Polysilicon Piezoresistive Accelerometer using the p+ Silicon Diaphragm," KIEE 96 Annual Summer Conference, Yong Pyong, Korea, July, 1996, pp. 1994-1996.(in Korean) 13. Y. S. Kim, Y. H. Ji, E. H. Yang and S. S. Yang, "Fabrication of a Thermopneumatic Actuator using Microheater," KIEE MEMS '96 Conference, Suwon, Korea, April, 1996, pp. 13-19. (in Korean) 14. E. H. Yang and S. S. Yang, "Effect of Process Parameters on the Residual Stress Distribution in p+ Silicon Diaphragms," KIEE 95 Annual Summer Conference, vol. 1, Daejun, Korea, July, 1995, pp. 1437-1439. 15. E. H. Yang and S. S. Yang, "Design and Fabrication of an Electrostatic Micropump with p+ Diaphragms," KIEE MEMS '95 Conference, Seoul, Korea, April 1995, pp.79-92. 16. O. C. Jeong, E. H. Yang and S. S. Yang, "Determination of the Residual Stress along the Depth of p+ Silicon using X-Ray Diffraction Method," KIEE 95 Annual Autumn Conference, Seoul, Korea, July, 1995, pp. 593-596. (in Korean) 17. O. C. Jeong, E. H. Yang and S. S. Yang, "Micromachining of Pyrex Glass using Electric Discharge Machining Technique," KIEE 95 Annual Summer Conference, vol. 1, Daejun, Korea, July, 1995, pp. 1422- 1424. (in Korean) 18. E. H. Yang, S. S. Yang, E. J. Park and S. H. Yoo, "Estimation of the Stress Profile of p+ Silicon Diaphragms, KIEE 94 Annual Autumn Conference, Seoul, Korea, July, 1994, pp. 413-415. 19. E. H. Yang, S. S. Yang. S. H. Hwang and H. S. Kim, "Fabrication of a Silicon Piezoresistive Accelerometer with Silicon-On-Insulator Structure," KSME 94 Annual Spring Conference, vol.1, Daejun, Korea, April 1994, pp.684-686. 20. Y. H. Ji, E. H. Yang and S. S. Yang, "Fabrication of a Polysilicon Piezoresistive Accelerometer using p+ Cantilever Beams," KIEE 94 Annual Autumn Conference, Seoul, Korea, July, 1994, pp. 416-418. (in Korean) 21. E. H. Yang, S. S. Yang and Y. H. Ji, "An Experimental Study on the Deformation of Highly Boron Doped Silicon Diaphragms due to Residual Stresses," KIEE 94 Annual Summer Conference, vol. A, Kyungju, Korea, July 1994, pp. 72-75. (in Korean) 22. S. W. Han, E. H. Yang and S. S. Yang, "Fabrication of an Electrostatic Microactuator with p+ Diaphragms as an Electrode," KIEE 94 Annual Summer Conference, vol. A, Kyungju, Korea, July 1994, pp. 141-143. (in Korean) 23. S. S. Yang, E. H. Yang, S. Y. Kim and J. D. Seo, "Fabrication of an Electrostatic Actuator and Passive Valves for Micropumps," KSME 94 Annual Spring Conference, vol.1, Daejun, Korea, April, 1994, pp.632- 635. (in Korean) 24. E. H. Yang, S. S. Yang and S. W. Han, "Design and Fabrication of a Silicon Piezoresistive Accelerometer using SOI Structure," KIEE 93 Annual Autumn Conference, Ansan, Korea, July, 1993, pp. 192-194. (in Korean) 25. J. D. Seo, E. H. Yang and S. S. Yang, "Fabrication of Two One-Way Silicon Passive Microvalves using Boron Etch-Stop Layers," KIEE 93 Annual Autumn Conference, Ansan, Korea, July, 1993, pp. 210-212. (in Korean) 26. S. Y. Kim, E. H. Yang and S. S. Yang, "Fabrication of an Electrostatic Microactuator with a Corrugated Diaphragm as an Electrode," KIEE 93 Annual Autumn Conference, Ansan, Korea, July 1993, pp.207-209. (in Korean) 27. S. S. Yang and E. H. Yang, "A Study on a Silicon Resonator for Piezoresistive Accelerometers," KSME 92 Annual Spring Conference, vol.1, Daejun, Korea, April, 1992, pp.697-700. (in Korean) 28. K. N. Kim, E. H. Yang and S. S. Yang, "Fabrication of a Silicon Piezoresistive Accelerometer with Reduced-Lateral Sensitivity," KIEE 92 Annual Autumn Conference, Seoul, Korea, July 1992, pp.271-273. (in Korean) 29. E. H. Yang and S. S. Yang, "Study on a Silicon Resonator for Piezoresistive Accelerometers," KIEE 91 Annual Autumn Conference, Seoul, Korea, July 1991, pp.274-277. (in Korean)