Application Form: LCN Cleanroom Training

Application Form: LCN Cleanroom Training Use this form to request training for the London Centre for Nanotechnology Cleanroom Facility  Training dates are posted on the Website  This training is intended only for people who hold an LCN access card. If you do not have one, copy this form to Denise Ottley to arange this before the date of the training.  Forward this form to your PI who should then send it to [email protected], noting their approval.  Email [email protected] if you have any queries.  Requests for training need to be submitted one week prior to training date.

Applicant details Supervisor details First Name: Last Name: Title (Mr, Dr …): Department: Institute: Telephone: Institututional E-mail: Position: End Date: Date of Birth:

Title of Training Date of Sign name to confirm approval Training Attendee Supervisor Cleanroom Induction & Access

Equipment training is chargeable. Please indicate below the training sessions that you are likely to need to aid us in planning resources required.

Training Sessions Equipment Will Require Thermal and electron beam Thermal evaporation tools evaporators PECVD, DRIE, SRIE, Oxford RIE and Plasma equipment plasma ashers Chemical processing Cleaning, wet etching, HF acid use Sputtering tools and ion milling PVD75 and SVS6000 Optical photolithography Spin coater, MJB3 and Quintel Characterisation tools + Rapid DektakXT, Ellipsometer, Four Point Thermal Processing Probe, Microscope + RTP Back End Lab equipment Dicing saw and wire bonders Electron Beam Lithography Spin coater and Raith 150 Two Scanning Electron Microscopy Zeiss EVO SEM Focused Ion Beam Zeiss XB1540 Crossbeam Other

Office Use Only Stage Date By Stage Date By CR Induction + RA’s Access database EBL Induction + RA LDB database FIB Induction +RA CR Systems access

Steve Etienne 00b455e0bd46698d00301729c4c58ba0.docx 27/04/2018