Background Statement for SEMI Draft Document #4400B Revision to SEMI S18-1102: Environmental, Health and Safety Guideline for Silane Family Gases Handling with title change to “Environmental, Health and Safety Guideline for Flammable Silicon Compounds”

Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.

Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background Statement:

This is the third technical ballot for revision to SEMI S18-1102. After an attempt to pass S18 with minimum editorial revision had failed, discussions on how we should revise the document to make the document useful and up-to-date for not only semiconductor manufacturing related use but also other electronics manufacturing (e.g., FPD, PV) were held a couple of times in various venues. It was also intensely discussed how the Safety Guideline should address quite different chemical and physical properties of so called “Silane Family Gases” in current SEMI S18. In the previous ballot, 4400A, the document was intensively rewritten to cover safety criteria needed to be observed for each class of flammable silicon compounds covered by the new scope. Although it received many negatives, which were mostly persuasive, it seemed that new scope and structure of the document were generally accepted by the global EH&S committee. In the following ballot, TF tries to incorporate all the TF’s responses to negatives and comments on 4400A while keeping direction of revising S18 same as the previous ballot. Because of the extent of the changes, the changes are not identified within this ballot. You are to vote to Accept or Reject replacing the currently-published SEMI S18 with what is in this ballot. The voting result of Doc.4400B will be reviewed by the S18 Revision Task Force (date is TBD). The formal adjudication of this ballot is scheduled for the EHS Committee meeting, April 19, 2011 at SEMI Japan. Anyone wishing to participate in the discussions should advise Supika Mashiro, Moray Crawford (TF co-leaders), Eric Sklar (NA Support TF leader) or SEMI Staff responsible for EH&S, so that the leaders can ensure that the individual is added to the TF Roster and advised of the teleconference access information and the availability of drafts for review. If you have any questions, please contact the following TF leaders or SEMI staff: S18 Revision TF co-leaders: Supika Mashiro (TOKYO ELECTRON LTD.); e-mail: [email protected], Moray Crawford (Hatsuta Seisakusho); e-mail: [email protected] S18 Revision NA Support TF leader: Eric Sklar (Safety Guru); e-mail: [email protected] SEMI staff: Akiko Yamamoto (SEMI Japan); e-mail: [email protected] Safety Checklist for SEMI Draft Document #4400B Revision to SEMI S18-1102: Environmental, Health and Safety Guideline for Silane Family Gases Handling with title change to “Environmental, Health and Safety Guideline for Flammable Silicon Compounds”

Developing/Revising Body Name/Type: S18 Revision Task Force Technical Committee: EHS Region: Japan

Leadership Position Last First Affiliation Leader Mashiro Supika TOKYO ELECTRON LTD. Leader Crawford Moray Hatsuta Seisakusho Author/Editor* Sklar Eric Safety Guru, LLC Checklist Author* * Only necessary if different from leaders

Documents, Conflicts, and Consideration Safety related codes, standards, and practices used in developing the safety guideline, and the manner in which each item was considered by the technical committee # and Title Manner of Consideration SEMI F1 Referenced applicable criteria. SEMI F6 Referenced applicable criteria. SEMI F5 Referenced applicable criteria. SEMI S1 Referenced applicable criteria. SEMI S2 Referenced applicable criteria. SEMI S4 Referenced applicable criteria. SEMI S5 Referenced applicable criteria. SEMI S6 Referenced applicable criteria. SEMI S10 Referenced applicable criteria. SEMI S13 Referenced applicable criteria. SEMI S14 Referenced applicable criteria. ASME B31.3 Referenced applicable criteria. ISO 10156 Referenced applicable criteria. ISO 10298 Referenced applicable criteria. NFPA 1 Referenced applicable criteria. NFPA318 Referenced applicable criteria. CGA G13 Referenced applicable criteria. CGA P20 Referenced applicable criteria. CGA P23 Referenced applicable criteria. 29CFR 1900.1200 Referenced applicable criteria. Pressure Equipment Directive Referenced applicable criteria. 97/23/EC High Pressure Gas Safety Law Referenced applicable criteria. KHK Application Guide for the High Referenced applicable criteria. Pressure Gas Safety Law Santa Clara County Toxic Gas Referenced applicable criteria. Ordinance No. NS-517.44 Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and NIOSH Pocket Guide NIOSH Pocket reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Referenced applicable criteria.Referenced applicable Page 3 Document Number: Document Doc. Date: 4400B DRAFT 4/9/2018  4400B SEMI  LETTER (YELLOW) BALLOT Known inconsistencies between the safety guideline and any other safety related codes, standards, and practices cited in the safety guideline # and Title Inconsistency with This Safety Guideline High Pressure Gas Safety Law Definition of “highly toxic”, “toxic”, “high pressure gas”

Other conflicts with known codes, standards, and practices or with commonly accepted safety and health principles to the extent practical # and Title Nature of Conflict with This Safety Guideline

Participants and Contributors Last First Affiliation Sakura Hidetoshi Intel Sugihara Kenichi Taiyo Nissan Ibuka Shigehito TEL Yamauchi Yasuhiro Mitsubishi Heavy Industries Fessler Mark TEL Ngai Eugene Chemically Speaking LLC Funk Rowland Salus Desrosiers Robert IBM Sexton David TUV RNA Nogawa Kaoru Safe Techno Larson Sean AMEC

The content requirements of this checklist are documented in Section 14.2 of the Regulations Governing SEMI Standards Committees. Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Table 1 Table 1 2.1 2 that flammable and si other uses equipment manufacturing equipment 1.2 supplycompounds from abatement. to 1.1 1 C “Environmental, Health Guideline toSEMIS1 Revision Draft Document SEMI reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 7. Principles6. General 5. Terminology Standards4. Referenced 3. Limitations 2. Scope 1. Purpose 2.3 information provide 4: NOTE 3: NOTE Safetythis Guideline. 2.2 clarification 2: NOTE 1: NOTE Corrosive (Chlorinated) Corrosive Evaluation ompounds” Scope Purpose Not Flammable silicon compounds that silicon Flammable PV FPD, semiconductor, for criteria design safety of set minimum a as intended also is guideline This flammable of use for criteria health and safety of set minimum a as intended is Guideline Safety This This Safety Guideline includes thesections: following Safety This F lammable mixtures con mixtures lammable chlorinated) C CGA P20 CGA Silane often with toxicis mixed highly flammable such gas as such additionalphosphine. In case requirements apply. “ The “chemicals”includesterm liquids gases. and Chemicals orrosive purpose. iae ihu oiir modifiers without Silane” f

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This Guideline Safety contains following Informationthe Related sections: This safety guideline does not purport to address all of the safety issues associated with its use. It is the is It use. its with associated issues safety the of all address to purport not does guideline safety This Environmental, Health, and Environmental, Health, EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment Exhaustof GuidelineEHS Ventilation for Semiconductor Manufacturing s cin fti aeyGieie swl si oeo h nlddincluded the of some in as well as Guideline, Safety this of ections Fire Detection, Suppression, andFire Detection, Alarm Systems Gas Monitoring P Piping andComponents Flow System Configuration –Bulk System Configurations –Cylinder sources ressurization Testing and Leak Testing Leak and ressurization Testing S Physical and Chemical Properties of Flammable Silicon Compound Silicon Flammable of Properties Chemical and Physical ilane and Documents S afety C Safety Guideline for Semiconductor Manufacturing Equipment Semiconductor Guideline for Manufacturing Safety ontrol S ources S ystems Page

6 supplementary materials supplementary Document Number: Document

s Commonly Used in Used Commonly Doc. Date: 4400B DRAFT 4/9/2018  4400B SEMI , the ,  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Pressure Equipment Directive 97/23/EC Directive Pressure Equipment 4.7 29CFR 4.6 318 NFPA 1—Fire Code NFPA 4.5 ISO 10298 outlets valve cylinder 10156 ISO 4.4 CGA P-23 the ofMixtures Classification for Toxic Gas CGA P-20—Standard CGA G-13 4.3 B31.3ASME 4.2 Equipment S1 SEMI w S13 SEMI SEMI S10 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 9 8 7 6 5 4 41.22.733.34.30; http://www.iso.ch 41.22.749.01.11; Fax: Telephone: 3 2 1 5.1 5 NOTICE: Pocket Guide NIOSH No. GasNS-517.44 County Ordinance Santa Clara Toxic HighInstitute(KHK),Safety PressureGas Japan ApplicationGuidethe HighLaw PressureGas The Safety for of SafetyHigh Law PressureGas MNL33 Manual, ASTM 4.8

Centers for Disease Control and Prevention, for Prevention, Control Disease Centers and TGO Clara County Santa 4-3-9 Sumitomo-Tranomon Toranomon, Bldg., KHK, Minatoku, Tokyo105-8447 4-3-9 Sumitomo-Tranomon Toranomon, Bldg., KHK, Minatoku, Tokyo105-8447 Health SafetyAdministration and Occupational PO Association, Protection Park, BoxMA02269-9101 Fire 9101, Quincy, 1Batterymarch National Geneva 1rueCase56,CH-1211 Secretariat, de 20,Switzerland. for postale Varembé, Organization Central Standardization,ISO International 22202-4102 Gas 1004,Arlington,Virginia 1725JeffersonCompressed Association, Highway, Davis Suite Engineers of Society American Mechanical ith Semiconductor Manufacturingith Equipment Semiconductor Terminology EU Directive EU US Standards (NFPA) National Fire ProtectionAssociation StandardsISO Gas Association Compressed StandardASME Refer to the Refer to Documents Other

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a condition with a risk of Medium, High, or Very High as defined by SEMI S10 or S10 SEMI by defined as High Very or High, Medium, of risk a with condition a  Fundamental concepts of safety and accident prevention ofand concepts safety accident Fundamental h lmal iio opud spl should supply compound silicon flammable the , Paragraph determin flammable Page them in manufacturingfacilities. in like 50 detect current safety status and status safety current detect ) in air of more than 200 parts per million but not more not but million per parts 200 than more of air in ) 10 ing silicon compound silicon . . if a safe status has been has status safe a if lmal sil flammable . handling icon Document Number: Document Corrosiv Y Y Y Y Y Y Y Y Y Y Not Doc.

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GasCompressed 4/9/2018 ve  4400B SEMI Y Y Y Y Y Y Y Y Y Y Liquified Gas Y Y Y Y Y Y Y Y Y Y Liquid  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and of air with of purged be should 6.5.1 6.5 on any before or system condition beginningwork subsystem.abnormal 6.4.2 basis. ona periodic documented 6.4.1 the with accordance documented formally be should jobs the 6.4 energy on working personnel for safety with associated systems provide to appropriate, as performed, be should 6.3.2 perform to necessary levels all at sources or maintenanceon service compound silicon flammable all for provided 6.3.1 6.3 incident frequency. 6.2.6 production. in shouldnecessary amount limitedthe smallest effective to and use for be 6.2.5 risk and 6.2.4.3 identification hazard thorough for techniques of combination a takes assessment. It all. them find 11: NOTE systems. (FMEA) Analysis Effects Mode Failure (Haz-Op), assessment 6.2.4.2 NFPA Sheets, Data Prevention Loss information the on some hazardous of properties flammable Mutual Factory MSDSs, Standards, regulations, including: sources, 10: NOTE reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Evacuation andPurgingEvacuation in concerned personnel All (Lockout/Tagout) Isolation Hazardous Energy hncnetn connecting When any and status current the checking of capable be should technician or operator The Inspection mechanical) electrical, (e.g., sources energy other all of isolation energy Hazardous be should capability out”) out/tag “lock called (previously isolation energy Hazardous minimizing in assist to performed be should assessments prevention accident Periodic Quantity of Minimization they are to perform to are they shouldtheS10 reportedSEMI resultsusing of risk thebe matrix. The analysis risk and identification hazard a use, to prior complete, should supplier The Different analytical methods will identify different system hazards; no single method will method single no hazards; system different identify will methods analytical Different Information c flammable papers. research various and codes, building onsensus [ such as Process Hazard Analysis (PHA), Hazard and Operability Analysis Operability and Hazard (PHA), Analysis Hazard Process as such f sse tts ad eupet cniin sol e promd and performed be should condition equipment and status system of with inert gas inert with regulations. n on silicon compounds silicon flammable h aad fof hazards the flammable flammable and hazards to which they will they which to hazards and

,  such as nitrogen as such flammable and The quantity of any any of quantity The silicon compounds silicon silicon compounds silicon , silicon compound if regulations apply regulations if flammable Paragraph . silicon compound silicon silicon compounds silicon ,

into a safe location to prevent the reaction the prevent to location safe a into

] o l all for , compoundssilicon . flammable Page systems safely. ' piping to equipment, the piping the equipment, to piping , the documentation should be in be should documentation the Related Information 1 also provide also 1 Information Related handling should be trained for trained be should handling be exposed be 11 flammable silicon compounds silicon

is available from various from available is . silicon compound silicon . . All such All training online Document Number: Document s Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y Y Y Not Doc.

GasCompressed e Y Y Y Y Y Y Y Y Y Y Y Y Y Y

Liquified Gas Date: Y Y Y Y Y Y Y Y Y Y Y Y Y Y 4400B Liquid DRAFT Corrosi Y Y Y Y Y Y Y Y Y Y Y Y Y Y

GasCompressed 4/9/2018 ve  4400B SEMI Y Y Y Y Y Y Y Y Y Y Y Y Y Y Liquified Gas Y Y Y Y Y Y Y Y Y Y Y Y Y Y Liquid  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and when the gaswhen purge is farto exposed from atmosphere source contamination. the of 13: NOTE of back-flow prevent to protection differential pressure and prevention back-flow multi-level have should 6.5.5.5 which totallysource is separated the from purge source oxidizer gas for gas lines. 12: NOTE compounds flammable with compatible not are that chemicals or gases for systems distribution 6.5.5.4 pressures gas process 6.5.5.3 pressurehigh source. 6.5.5.2 reverse might that flow.during allow procedures is valve, check the valves. check on solely 6.5.5.1 and 6.5.5 before purged thisis of testing cycles,necessary. therefore exceed number not usually far typically purges adequately Process cycles. of number minimum been define to needed to are has Calculations levels vacuum system necessary the and pressures, insure gas purge minimum cycles, purge minimum 6.5.4 the system. materials incompatiblegases, orfrom and substances other gases 6.5.3 valve purging. require systems sealed where locations at installed 6.5.2 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This through §1 effluent, compound 7.1 7 the Evaluation s Conformance to SEMI S1 SEMI to Conformance An adequate mean adequate An Flammable introduce should user The T and, if not connected to the purge gas, should be sealed gas, and,cap thebe connectedpurge with ifto should not o enable purging without venting into unsafe locations, a purge port should be should port purge a locations, unsafe into venting without purging enable o process gases by accidental backflow. gasesprocess by accidental Purge lines from dedicated bulk supplies (where allowed at all by the jurisdiction) the by all at allowed (where supplies bulk dedicated from lines Purge gas purge The P for gas purge The and gas purge of Separation Back-flow into these bulk purge systems has been known to generate ignitable mixtures ignitable generate to known been has systems purge bulk these into Back-flow (e.g., codes regional Some urge gas pressures pressures gas urge . 5 that are applicable to theorevaluation. system to equipmentunder are applicable 5 that flammable siliconflammable compounds silicon compound silicon preferred for isolating isolating for preferred t and abatement and o prevent backflowof gaseso prevent process source s A control A should be provided to avoid a cross contamination of purge gases purge of contamination cross a avoid to provided be should flammable for flammable silicon compounds should be should compounds silicon flammable for s

for for 8 flammable of of flammable valve, valve, Japan systems should have procedures based on calculated on based procedures have should systems

silicon compounds silicon any any distribution distribution ytm systems Paragraph ’ s flammable silicon compounds silicon flammable such as a a as such High Pressure Gas Safety Law) require a purge gas purge a require Law) Safety Gas Pressure High into systems. bulk flammable silicon compounds silicon silicon compounds silicon should be technically evaluated in accordance with with accordance in evaluated technically be should system pneumatic silicon compounds silicon Page should , process equipment, exhaust equipment, process , . en being Purge ports should have stop have should ports Purge 12 only after purging oxidizing purging after only valve placed before or after or before placed valve be supplied from dedicated from supplied be should should pnd t atmosphere. to opened s or plug or always greater than greater always should not depend not should not be connected to connected be not from other gases other from s . silicon ventilation, flammable silicon flammable ventilation, Document Number: Document Corrosiv Y Y Y Y Y Y Y Y Y Y Y Not Doc.

GasCompressed e the Y Y Y Y Y Y Y Y Y Y Y Date: criteria of § of criteria Liquified Gas Y Y Y Y Y Y Y Y Y 4400B Liquid DRAFT Corrosi Y Y Y Y Y Y Y Y Y Y Y

GasCompressed 4/9/2018 ve  4400B SEMI Y Y Y Y Y Y Y Y Y Y Y Liquified Gas Y Y Y Y Y Y Y Y Y 8 Liquid  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and the inspections are performed and documented performed properly. and the inspectionsare 8.4 on service or to maintenance perform expected 8.3.2 equipment for 8.3.1 8.3 (ES health and safety, environmental, specific or keep issue certificates. train programs, theirand records personnel, education job for curricula education establish failures, 8.2 equipment advances, technological as place take errors,take system or theplace. operating changesin operator should training Additional 8.1.4 past of studies case as well as accidents.compounds silicon flammable of procedures emergency 8.1.3 organization 16: NOTE safecontrol of use and hazards, 8.1.2 training, and education periodic implement and responsibletrainingplan. training,a education and person for necessary the all implementing for program appropriate 8.1.1 gases”pressure provide safety special education their to employees. 15: NOTE handling them hazardous andof methods properties safe about the 8.1 employees not If do handle of characteristics 14: NOTE 8 8 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Education Training and Education P should trainedof fully personnel theirresponsibility. in own be areas Maintenance users and providers service maintenance suppliers, facilities and Equipment handles who Everyone ersons performing periodic inspections should be be should inspections periodic performing ersons Hazardous energy isolation training should be provided to all employees who are who employees all to provided be and should training isolation facilities energy Hazardous of design overall the understand should personnel Maintenance documented. results training the and periodically performed be should Training include should Training the about experience and knowledge sufficient who have personsbe should Instructors should organization each training, and education safety to regard In t my b eesr o rqet te assac f otie eprs eedn n an on depending experts, outside of assistance the request to necessary be may It Japan as (such jurisdictions Some the of understanding their deepen to employees as well as managers for important is It ’ s capabilities.s flammable flammable silicon compounds silicon flammable flammable silicon compoundsflammable silicon compounds flammable safe use, handling, hazardous properties and by-products and by-products and properties hazardous handling, use, safe flammable , U.S. and Europe and U.S. , iio compounds silicon Paragraph silicon compounds that they handle, so as to ensure safe work practices. work safe ensure to as so handle, they that . flammable ,this is applicable. section not Page ) require that users of of users that require ) appropriately trained appropriately silicon compound silicon should be specially educated specially be should 13 . . systems. “ to ensure ensure to maintain an maintain specialty high- specialty assign a assign should & Document Number: Document that H) Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y Y Not Doc.

GasCompressed e Y Y Y Y Y Y Y Y Y Y Y Y Y

Liquified Gas Date: 4400B Y Y Y Y Y Y Y Y Y Y Y Y Liquid DRAFT Corrosi Y Y Y Y Y Y Y Y Y Y Y Y Y

GasCompressed 4/9/2018 ve  4400B SEMI Y Y Y Y Y Y Y Y Y Y Y Y Y Liquified Gas Y Y Y Y Y Y Y Y Y Y Y Y

 Liquid LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational 9.5.1 9.5 actions systems) if necessary. is corrective abatement Perform damaged. not gas 9.4.5 9.4.4 silicon flammable allowing compound 9.4.3 is system entire the 9.4.2 of safety the until restarted be confirmed. not should Systems determined. 9.4.1 9.4 flownot can ventilation 9.3.4 shut was wherebe down. theshould leak detected the area to supplies 9.3.3 to siliconlocation theflammable leak compounds 9.3.2 and fix trainedlocate the leak. mayto enter response personnel and authorized only 9.3.1 9.3 level. acceptable of properties hazardous 9.2.3 9.2.2 of hazard. be should appropriatethe level to analysis and 9.2.1 9.2 fire emergencyincluding left running duringevent, any be 9.1 Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 9 9 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Fire andExplosion from Recovery IdentificationLeak andIsolation Evacuation Exhaust ventilation EmergencyResponse The only safeway ashut source. only extinguish to gas to is the fire fuel The off silicon flammable the (from system the that Confirm ofChange detectors. the if reliability installed thenecessary. detectors Check before safe is system affected the that confirm to tests leak appropriate Perform an with systems inert gas. affected all Sufficiently purge is cause root or original the until incident the investigate should personnel Trained flammable a enclose not Do material hazardous the of all determined, accurately be cannot location leak the If source specific the determined, accurately be can location leak the If enter, to team response a for is situation safe a achieving of method appropriate the If until area the re-enter should one no evacuation, an After regarding thebeprocedures. facilityproperevacuation in should trained personnel All leak to response evacuation for Procedures of Personnel of a Leak and be maintained flammable silicon flammable Incident flammable silicon compound effluent abatement systems abatement effluent silicon should flammable compound

silicon compound silicon

during a leak. This could lead to an to explosion. leak. could lead This during a s back into back the system. Paragraph compounds in use in compounds s should be down.should shut should be developed based on a hazard a on based developed be should installation where adequate exhaust adequate where installation Page in the facility in compound 14

have been reduced to an to reduced been have the risk source systems to the to systems source . s associated with associated s supplying Document Number: Document Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Not Doc. GasCompressed e Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Date: Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Liquified Gas 4400B Liquid Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y DRAFT

GasCompressed 4/9/2018  e Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y 4400B SEMI Liquified Gas Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y

 Liquid LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational necessary. 9.5.5.2 entering equipment before 9.5.5.1 compound 9.5.5 departments. fire as well as teams, response hazard public or teams response emergency plant include should responders 19: NOTE 9.5.4 explosion. risk of unacceptable 9.5.3 ASTM Guidelines” Manual,MNL33. Response Emergency Chlorosilane on “Manual Council, Safety and Health Environmental, Silicones 18: NOTE containers 9.5.2 extinguishing for used be should these things but areas, storage gas at extinguishers fire require countries 17: NOTE Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This other ny tand pronl sol ne n ae fetd b by affected area an enter should personnel trained Only an presents suspected,responders. is the fire emergency When contact gas the off shutting without fire gas a of extinguishing Accidental be should systems deluge or spray Water fe ie eet hc h ntle ie dtcos hne te dtcos if detectors the Change detectors. fire installed the check event, fire protective a appropriate After wearing be should event fire a to responders Trained Local fire departments may not be trained in flammable silicon flammable in trained be not departments fire may Local water. with violently react all compounds silicon flammable corrosive The Many source. fuel the off shutting by except fire gas any extinguish to attempt not Do to prevent other cylinders from heating or other fromoverpressurizing. prevent cylinders to heating fire. than the than gas. the area . Paragraph used only to cool the container or adjacent or container the cool to only Page 15 compounds a lmal silicon flammable . The emergencyThe . ee Refer to the to Document Number: Document Corrosiv Y Y Y Y Y Y Y Y Not Doc. GasCompressed e Y Y Y Y Y Y Y Y Date: Y Y Y Y Y Y Liquified Gas 4400B Liquid Corrosiv Y Y Y Y Y Y Y Y Y DRAFT

GasCompressed 4/9/2018  e Y Y Y Y Y Y Y Y Y 4400B SEMI Liquified Gas Y Y Y Y Y Y Y

 Liquid LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and is recommended is for flammable silicon liquids.corrosive compound 21: NOTE C EXCEPTION: one flame impingement from of of flammable 10.1.4 10.1.3 S4. 10.1.2 dichlorosilane,whichof is flammable both 20: NOTE with presented by flammable thecompatible hazards 10.1.1 10.1 NOTE 23: NOTE if only were singledevice installed. they might be a as experienced falling sideways,fromcylinders prevent to positioned devices non-combustible securing two 10.2.5 transfer.cylinder 10.2.4 22: NOTE the arestoredcylinders for provided be should foot) (1cfm/square meter/second 0.005 building, occupied from independent 10.2.3 area. storage the reasonablyforeseeablecylinder incidentsin from 10.2.2 protective in-place. securelytightenedand valve plug cap cylinder valve 10.2.1 10.2 10 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This General Considerations General Gas Offline ae eue o pike ytm sol e isald oe over installed be should system sprinkler or deluge water A is recommendedtemperature storage The silicon Flammable O A A the of location or construction The cylinders gas If c Gas of cylinders Gas fie soae facility storage ffline Refer standardsto such NFPA or Pressure fordetails. Safety as 318 High Gas Law more system foam expansion medium A dangerous. is liquid water-reactive over system Sprinkler consider to necessary be may it chemicals, certain For gas gas Cylinder StorageCylinder silicon compounds silicon Some jurisdictions impose impose Some additional jurisdictions requirements. ylinders should be stored in an area adequately designed to protect the building the protect to designed adequately area an in stored be should ylinders cylinder should be secured to the structure (directly or indirectly) with at least at with indirectly) or (directly structure the to secured be should cylinder Storage ontainers . Facilities that flammable silicon flammable of volume of 1 liter or less of of volume 1literor compounds contain contain to cool the containers during a fire event and reduce the effect the reduce and event fire a during containers the cool to osrcin mtras sol e nncmutbe and non-combustible be should materials construction container flammable silicon flammable

should be separated from other other from separated be should and corrosive.and m Paragraph echanical or natural ventilation at a minimum of minimum a at ventilation natural or echanical compounds in storage should have the cylinder the have should storage in compounds onanother. a gas lower cylinder storage should not inhibit safe inhibit not should storage cylinder silicon compounds are that are than 40°C. compounds are stored in a structure a in stored are compounds Page exempt from this exempt from multiple hazards multiple 16 structure chemicals , such , criterion trg ra for area storage in which the which in as in the case the in as present. per SEMI per . Document Number: Document Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Not Doc.

GasCompressed e Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Date: Y Y Y Y Y Y Y Liquified Gas 4400B Liquid DRAFT Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Corrosi

GasCompressed 4/9/2018 ve  4400B SEMI Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y

Y Y Y Y Y Y Liquified Gas

 Liquid LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and eindt slt n oti ees release a contain and isolate to designed 10.3.6 other hazards from separated adequately 10.3.5 transfer.container 10.3.4 24: NOTE the which in structure the liquid for provided be should foot) (1cfm/square meter/second 0.005 of minimum a at ventilation natural or mechanical building, occupied an from independent 10.3.3 storage container in incidents fromarea. the reasonablyforeseeable building 10.3.2 valve coverin-place. protective securelytightened and plug container valve container 10.3.1 10.3 stored NOTE 25: NOTE by required values the of greater the location. that legal in requirements 318andNFPA the than less no lines property and buildings from back 11.2.1 11.2 construction features: locationand following 11.1 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 11 Liquid Container Storage Liquid Container Supply from Outdoor Storage/Dispensing fromStorage/Dispensing SupplyOutdoor Facilities . Location andConstruction Location Bulk containers arestored.containers The storage area for the the for area storage The the for area storage The storage container the of location or construction The of containers If the protect to designed adequately area an in stored be should liquid of Containers C The container and its peripherals should be constructed outside of buildings with set with buildings of outside constructed be should peripherals its and container The nanr f of ontainers Refer to There may beThere that some moremay jurisdictions require separation NFPA than 318. Supply applicable — Bulk flammable silicon compound systems should incorporate the incorporate should systems compound silicon flammable Bulk — iudliquid iud flammable liquid standards as318 such NFPA flammable

containers containers of containers

. Paragraph Paragraph iio opud n soae should storage in compounds silicon liquid liquid f10 ftevlm fof volume the of 150% of iio opud r trd i structure a in stored are compounds silicon liquid liquid of flammable flammable of flammable flammable more fordetail. Page 17 silicon compounds sh compounds silicon sh compounds silicon raarea should not inhibit safe inhibit not should the largest container largest the ae the have ould ould Document Number: Document be be Corrosiv Corrosiv Y Y Y Y Not Not Doc. e GasCompressed GasCompressed e Y Y Y Y Date: Y Y Y Y Liquified Gas Y Y Y Y Liquified Gas 4400B Y Y Y Y Liquid Liquid DRAFT Y Y Y Y Corrosi Corrosi

GasCompressed GasCompressed 4/9/2018 ve ve  Y Y Y Y 4400B SEMI Y Y Y Y

Liquified Gas Y Y Y Y Y Y Y Y Liquified Gas

 Liquid Liquid LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and SEMI S5 forSEMI S5 instructions valve outlet the on source bulk serving 11.3.4 area insilicon work flammable to compound authorized bulk 11.3.3 personnel.authorized 11.3.2 HCl it.of from SiH of molecule a as added, be not should rates release the although A1-5.2 ¶ in stated As SIH of molecule (SiH dichlorosilane example, For 28: NOTE detection 6. Gas/chemical 5. 4. 3. 2. 1. 11.3.1 11.3 firewalls.2-hour-rated 11.2.5 could that compounds silicon flammable enclosures. resultexplosion,unless regulations in require of pocketing for allow not does that ventilation 11.2.4 and suchsabotage. as traffic vehicular the location 11.2.3 11.2.2 27: NOTE flying potential objects. 26: NOTE reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This A system systems automated overfilling for delivery A prevent to and monitorsautomatic gas off, pressure shut with and relief Overpressure both point manual and shutdownvalveof and ofdispensing, thesupply at point the A use for spills,Secondary containment flowExcess protection, Controls andSafeguards A flow limiting device should be be should device limiting flow A persons only the be should personnel site trained and supplier gas the from Workers be should control Access B by station regulator the from and other each from separated be should natural systems Bulk have and construction open of be should configuration storage The with risks other are there if determine to performed be should assessment risk full A at least area have twoexits. storage should The ulk systemsulk thecontrols following with and be safeguards: should equipped D CGA contains exampleG-13 layout.an from activities or structures nearby shield to required be may barriers protective Additional etection etection 2 Cl 2 . Therefore, HCl is generated at twice the rate as the molar release rate of SiH of rate release molar the as rate the twice at generated is HCl Therefore, . of byproducts between target gas/chemical and air air and gas/chemical target between byproducts of should be as small as possible to meet combined process needs. process combined meet to possible as small as be should . The flow limiting device device limiting flow The . of SEMI S6 SEMI of as to how to choose the appropriate size flow limiting size to flow device the appropriate as how choose 2 Cl , both the hazards of SiH2Cl2 and of HCl must be considered, be must HCl of and SiH2Cl2 of hazards the both , 2 ) reacts in moist air to form two molecules of HCl for each for HCl of molecules two form to air moist in reacts ) rvdd t nue ety i etitd t rie and trained to restricted is entry ensure to provided Paragraph placed in the outlet valve outlet the in placed [e.g., restricted flow orifice (RFO) orifice flow restricted Page s 18 . 2 Cl 2 is sometimes more important more sometimes is ceases to exist upon creation upon exist to ceases

of the delivery manifold delivery the of ] size used size . See Document Number: Document 2 Cl 2 . . Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y Y Y Not Doc.

GasCompressed e Y Y Y Y Y Y Y Y Y Y Y Y Y

Liquified Gas Date: 4400B Y Y Y Y Y Y Y Y Y Y Y Y Liquid DRAFT Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Corrosi

GasCompressed 4/9/2018 ve  Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y 4400B SEMI

Y Y Y Y Y Y Y Y Y Y Y Y Y Y Liquified Gas

 Liquid LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and replacement, an automated switching system switching employed the an system. for automated be should replacement, 11.6.1 1 Appendix 35: NOTE detectionThe should all close cylinders 34: NOTE 11.6 33: NOTE 11.5.4 valves. 11.5.3 when cylindersand the are for periods time, stored long of on product as a reserve bank. equilibrates. cylinder that in product the as condense and cylinder cooler the into travel to cylinder warmer the in gas the cause can 32: NOTE 11.5.2 of capacity thecylinders. size and well as be can cylinders many how includes This implemented. 11.5.1 31: NOTE 11.5 30: NOTE minimum be3.7 should height a of the provided, is canopy a Where structures. noncombustible to secured cylinders with sides be should area dispensing The G13. CGA as such standards applicable 11.4.2 building. 11.4.1 11.4 29: NOTE reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Cylinder Pack Systems Pack Cylinder Manifolded Systems Dispensing Cylinders RacksOpen If multiple cylinders are used, in parallel for continuous supply during a cylinder a during supply continuous for parallel in used, are cylinders multiple If restrictedflow with orifices. beCylinders should equipped shutoff pneumatic automatic closed normally with equipped be should Cylinders Systems beManifolded not used should for be should on-line are cylinders which and many how regarding controls of system A with accordance in structures from separated be should areas dispensing Exterior any of inside rooms in located be not should silane for racks dispensing Open An example of the recommended arrangement arrangement recommended the of example An jurisdictions. some by required be may system detection gas a systems, pack cylinder For The has almostindustry movedexclusively this to condition. a system, manifolded a In impose Jurisdictions additional may requirements. CGA contains exampleG-13 layout.an Combined needsprocess include the .

The risk increases with the temperature differential between the cylinders the between differential temperature the with increases risk The

difference of just a few degrees in temperature between cylinders between temperature in degrees few a just of difference

ESOVs m (12m

Paragraph

ft). [NFPA318] influences upon activation.upon liquefied the of deliveryof length the line. in a in Page

cylinder connected gas cylinders. 19 gas supply system is shown is system supply gas in any given bundle as bundle given any in open on open at least three least at Document Number: Document

in Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Not Doc.

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 Liquid LETTER (YELLOW) BALLOT flammable limit and less than 50% of and limit IDLH. less than 50% flammable an either by accomplished lower the of 25% than less to be compounds silicon flammable of dilution or system may abatement treatment The leak. case worst a treating of capability 12.4.2.2 37: NOTE directed 12.4.2.1 12.4.2 purgeused of gas 3. Name the of2. Name the or process bythe equipmentsupplied cabinet of1. Name the 12.4.1 36: NOTE 12.4 12.3 level. 12.2 located indoors.be liquid Non-corrosive EXCEPTION: 12.1 Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and requirements. 11.6.2 12 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Cylinder Systems Using Gas Cabinet UsingGas Cabinet Systems Cylinder cylinderindoors. dispensing be silanenot located Open should for racks f Gaseous supply indoors.Bulk not should located systems be Supply from Indoor Storage/Dispensing fromSupplyIndoor Facilities Exhaust Ventilation Labeling across potential leak points pocketing prevent leak to potential across Flow limiting devices should be only as large as necessary to meet process flow process meet to necessary as large as only be should devices limiting Flow The exhaust The cabinets. for provided be should system exhaust forced A Recommendationsfor exhaust cabinet can found FM7-7.be in Liquid flammable silicon lammable silicon compound silicon lammable f — lammable silicon compoundlammable Labeling on Gas Cabinets should Cabinets theinformation:Labeling following onGas include ventilation

system for flammable silicon compound silicon flammable for system compounds contained in the cabinet in compounds contained the flammable flammable Paragraph Paragraph s may be from supplied may cylinders. s should not be stored in locations below ground below locations in stored be not should silicon compound bulk supply systems may systems supply bulk compound silicon Page . 20 A rir s should have the have should flow should be should flow Document Number: Document Corrosiv Y Y Y Y Y Y Y Y Y Corrosiv Y Not Not GasCompressed e Doc. e Y Y Y Y Y Y Y Y GasCompressed Liquified Gas Y Y Y Y Y Y Y Y Y Liquified Gas Date: 4400B Liquid Corrosiv Y Y Y Y Y Y Y Y Liquid DRAFT Y GasCompressed Corrosi

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 Liquid LETTER (YELLOW) BALLOT not exceed 460liters. exceed not 12.5.1 12.5 43: NOTE cylinders cylinder one than more is 12.4.3 in either regulator, the of This theof limit maximum valve. to gasthe the cylinder is regulator. flow to upstream provided of downstream immediately pigtail be the on or valves process should pressure high with conjunction switches flow excess outlet, 12.4.2.6 psi)) psi) (29 MPa 0.2 42: NOTE largest the abate to capability the meet have cylinder restrictor. flowpossible through flow the to should applicable system when system The abatement requirements. an jurisdictional to routed be should cylinders compound 12.4.2.5 exhaust The atmosphere. surrounding the of that below cabinet the of pressure 12.4.2.4 activatedbe to the abate leak. system abatement and ventilation exhaust the detected, is leak a when provided continuously, operate 41: NOTE in 2.) Div. 1 Class NEC than classified rooms rooms.as flammable less not (e.g., requirements location hazardous meeting construction 40: NOTE 39: NOTE power. backup source of 12.4.2.3 the limiting through flow device full pressure.at cylinder 38: NOTE Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This . Liquid Container CabinetsLiquid Container Total volume of liquid liquid of volume Total Single-cylinder s s ventilation be should monitored. by a 6mm (1/4 byain) steel 6mm plate. If there is no mechanical means of flow restriction (e.g., RFO) at the cylinder the at RFO) (e.g., restriction flow of means mechanical no is there If silicon flammable of regulator the of side pressure high the of lines Vent Mechanical emergency automatic with provided be should system ventilation exhaust The In some jurisdictions, the exhaust ventilation and abatement systems may not be required to required be not may systems abatement and ventilation exhaust the jurisdictions, some In electrical of be to all fixtures lighting and detectors, sensors, require jurisdictions Many Jurisdictional define requirements backup may power. leak case worst A CGA contains exampleG-13 of an plate steel separators. to regulator install to recommended not is It are are made of of made , such as as such flammable

etlto hud b rvdd fr te gs cbnt t ep inner keep to cabinet gas the for provided be should ventilation aluminum flammable flammable dichlorosilane stpclyafl-lwrlaert rmfrom rate release full-flow a typically is silicon compound cylinders in a gas cabinet, and and cabinet, gas a in cylinders compound silicon flammable silicon compound compound silicon flammable

, , silicon compound cabinets are recommended. When thereWhen recommended. are cabinets compound silicon each

(note dichlorosilane has a vapor pressure of 0.16 0.16 of pressure vapor a has dichlorosilane (note aluminum cylinder aluminum Paragraph liquefied Page gas which vapor pressure is less than less is pressure vapor which gas

should be separated from other from separated be should containers in a c a in containers 21 h the largest cylinder largest effectiveness of the of effectiveness abinet abinet one or more or one M installed Pa (23.8 Pa should Document Number: Document Corrosiv Y Y Y Y Y Y Y Y Y Y Not

GasCompressed e Doc. Y Y Y Y Y Y Y Y Y Y Liquified Gas Y Y Y Y Y Y Y Date: 4400B Liquid Corrosiv Y Y Y Y Y Y Y Y Y GasCompressed DRAFT 4/9/2018 e  Y Y Y Y Y Y Y Y Y Y 4400B SEMI Liquified Gas Y Y Y Y Y Y Y Liquid  LETTER (YELLOW) BALLOT of the containerof 12.5.3.3 49: NOTE connection the vapor and female 12.5.3.2 48: NOTE the disconnected. being container to prior container the into Procedures back pushed loosened. be lines the is in remaining connection liquid any that the ensure when released and trapped be can Liquid 12.5.3.1 liquid the to push through diptube feed vaporizer the a in system 47: NOTE push through diptube to liquid the valve fill bubbler the to a in system 46: NOTE compoundsilicon 45: NOTE a in cabinet followsas used arecommonly They most the of container. space) (vapor top the to valve a and (liquid) 44: NOTE System 12.5.3 containerthe largest should sill and alatch the with arrangement, door doorthree-point be should provided (c) The effective riveted, tight Joints ormeans. by(b) some welded, made equally be shall be38mm space. with double-walled, steel (11⁄2in.) sheet) and air gauge be should sidesofat least bottom, door,the1.2 cabinet top, and (a) The 12.5.2.2 251, and remain the door tight seams NFPA in specified curve time–temperature standard ( and cabinet the of center 12.5.2.1 12.5.2.2. 12.5.2 Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 325°F reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This be raised above the bottom of the cabinet to the thecabinet bottom beretain above raised of ,), Liquid Flammable Flammable Liquid Cabinets Gas pressure to the containers containers the to pressure Gas Care outlets and valves The storage satisfy that of all the following: cabinets Metal the limit to constructed and designed cabinets Storage iud fambe slcn cmon oties tpcly hv av ih a diptube a with valve a have typically containers compound silicon flammable Liquid SEMI Figure shows example1 of an typical container a liquid configuration. to valve vapor the through gas inert an with pressurized is This container. process a as Used U flammable the with saturated is diptube, the enters gas carrier a where bubbler a as Used when subjected to a 10-minute fire test fire 10-minute a to subjected when : sed as a bulk supply container. This is pressured with an inert gas through the vapor valve vapor the through gas inert an with pressured is This container. supply bulk a as sed should F96 s' vapor exits theand from vapor valve o containers for gives s typical . be used to connect the proper side. side. proper the connect to used be 25 mm (1 in.) in.) (1 mm 25 S ilicon Compound ilicon f of pecificationfor should should should ftelqi otie container liquid the of iudliquid remain securelyclosedremain should be male Paragraph from the top of the cabinet to not more than more not to cabinet the of top the from sh C ould p be regulated to a pressure below the MAWP the below pressure a to regulated be ort ontainers . et meet c .

onfiguration of that simulates the fire exposure of the of exposure fire the simulates that Page a spill of 110% of the volume a110% spill of of the of Used in Liquid Container Cabinet Container Liquid in Used T . ihr o oh f of both or either are typically oriented vertically. oriented typically are he dip he reuvln. equivalent. or 22

. during the test.

internal temperature at the at temperature internal liquid container tube connection connection tube

mm thick(No.mm 18 ¶¶ All joints and joints All 2521 and 12.5.2.1 s . should should 163 should Document Number: Document °C be Corrosiv Not

GasCompressed e Doc. Liquified Gas Y Y Y Y Y Y Y Y Y Y Date: 4400B Liquid Corrosiv GasCompressed DRAFT 4/9/2018 e  4400B SEMI Liquified Gas Y Y Y Y Y Y Y Y Y Y Liquid  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This PurgeGas T Liquid Valve ypical ypical ToProcess 3 Valve - way L iquid iquid Tube LiquidContainer Dip C Figure 2 Figure Page ontainer 23 ToVent C onfiguration Vapor 3 Valve Tube - Vapor Valve way Document Number: Document PurgeGas Doc. Date: 4400B DRAFT 4/9/2018  4400B SEMI  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and whenever possible to possibleto whenever 12.6.8 cylinder should performed leak-tight Appendix integrity. insure (See 4) to connection be 12.6.7 formed. 52: NOTE fix to of the leak. the cause and leak the stop to attempt should situation a such handling for trained specifically are points leak potential at deposits 12.6.6 51: NOTE on empty fittings the cylinder. of tasks the during bumped inadvertently may cylinder in-use the of lines the changing empty when other cylinder the cylinder still use. is is in It recognized the that pressurized 50: NOTE close arein proximity which lines pressurized in-use, the to damage prevent to considered be should guarding temporary 12.6.5 theexchanged. cylinder cylinders, cabinet be thecontains to same that gas in 12.6.4 use. the beginningof EXCEPTION: the gas down. shut location and 12.6.3.1 operate below to pressure atmospheric to drops pressure the before place take 12.6.3 changing. and handling 12.6.2 tasks safely. appropriateperformhis trainingto received 12.6.1 12.6 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This evidence of a leak in the system, and the door should not be opened be not should door the and system, the in leak a of evidence Cylinder ChangeProceduresCylinder uosqec Controllers Auto-sequence checking leak of method defined well a exchanged, or installed is cylinder When powder for inspection visual a cylinder, a replace to door cabinet the opening Before system auto-switching an using When purge except cylinders, gas the all for off shut is supply gas that recommended is It the into air of intake accidental prevent To Appropriate Cylinder At a certain minimum pressure, a warning should be provided to an attended an to provided be should warning a pressure, minimum certain a At D cylinder Some monosilane cabinets metal wall have cylinders. between when exposure increased for potential is there system, auto-switching an using When pst n oo color any eposits This atmospheric elcmn hud e efre y w pros Ec sol have should Each persons. two by performed be should replacement is not applicable to cylinders used under sub-atmospheric pressure from pressure sub-atmospheric under used cylinders to applicable not is personal protective equipment ( equipment protective personal

reduce te other the potential for human error in human error for the potential to the to pressure should be performed. If If performed. be should than white than

cylinder － －

 . General Paragraph uosqec otolr r recommended are controllers Auto-sequence indicate to be to changed s cylinder s eil amnsrtv otos sc as such controls administrative pecial that PPE Page r ) . atv eactive should be worn during cylinder during worn be should powder deposits powder , the the , cylinder changecylinder 24 unless cylinder replacement should replacement cylinder silicon the cylinder is intended is cylinder the loosening compounds have been have compounds

. Only personnel Only . are . /

re-tightening of re-tightening present, present, they Document Number: Document Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y Y Y Not Doc.

GasCompressed e Y Y Y Y Y Y Y Y Y Y Y Y Y

Liquified Gas Date: Y 4400B Liquid DRAFT Corrosi Y Y Y Y Y Y Y Y Y Y Y Y Y

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 Liquid LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 12.7.2.4 nut. and 12.7.2.3 gasket 12.7.2.2 protective valve 12.7.2.1 12.7.2 the cabinet.from cylinder used the removing before cap protective valve cylinder the and plug valve cylinder 12.7.1.4 of valve. the cylinder leakage 12.7.1.3 cycles.pre-determined 12.7.1.2 12.7.1.1 12.7.1 12.7 of testingverification the sensingfunction. system the leak and for requirements 4. and 3. and gas the purge eliminated, connected system 2. 1. thefeatures: following incorporate 12.6.8.2 purging. ineffective indicates that change pressure a capture not may monitoring Interrupted system. supply purging the within continuously pressures the monitor to designed be should cylinder 12.6.8.1 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Written procedures for safe source container replacement including verification verification including for procedures replacement safesourcecontainer Written system monitoring conditions, ofandContinuous pressure the operating duringpurges all pressure rise thebymeasuring container leak abilitycheckof performa to The design,Fault-tolerant tighte S tep , with the container valve closed, thevalve container , with at the gasket seat of the supply seat sideat of the gasket the piping Installation of the New Cylinder Installation the New of Cylinder the Used of Removal Connect the supply piping and the cylinder at the cylinder valve outlet connection outlet valve cylinder the at cylinder the and piping supply the Connect P connection. outlet valve cylinder the from gasket used the Remove the Remove place. in it secure and cabinet the in cylinder new the install Carefully the secure and connection outlet valve cylinder the at cylinder the Disconnect step, removal cylinder to proceeding Before valve cylinder the between piping the purge and Pump offShut valve. the cylinder should cabinets cylinder for systems control automatic-sequence of design The the of replacement after test leak the used, is controller sequence auto an When After that, tightenAfter that, by S by n the nut by hand. C hand. by nut the n tep cap Cylinder ChangeProcedure Cylinder and the cylinder valve plug. and valve the cylinder the nut onfirm with the appropriate wrench to the proper torque. to the appropriate with the wrench proper that there is no unusual resistance when when resistance unusual no is there that

under the condition that the condition under Paragraph

of the Page cylinder valve outlet valve connectioncylinder confirm 25 thehas container been and ht tee i o internal no is there that the supply valve for the for valve supply the tightening in the in aelace a new . Document Number: Document the Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y Y Not Doc.

GasCompressed e Y Y Y Y Y Y Y Y Y Y Y Y Y

Liquified Gas Date: 4400B Liquid DRAFT Corrosi Y Y Y Y Y Y Y Y Y Y Y Y Y

GasCompressed 4/9/2018 ve  4400B Y Y Y Y Y Y Y Y Y Y Y Y Y SEMI Liquified Gas

 Liquid LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and have received appropriate performtheir trainingto tasks safely. received have 12.9.2.3 to for the carriage. themeans fixing container 12.9.2.2 coverin theprotective container tightened and 12.9.2.1 12.9.2 integrity. Appendix (See checking 12.9.1.4 formed. 53: NOTE the tocauseof the leak.and fix handling for trained specifically personnel Only opened. be not should aredoor the and deposits system, the in powder leak a If of evidence are they present, performed. be should points leak potential at deposits powder for 12.9.1.3 provided 12.9.1.2 changing. and handling container 12.9.1.1 12.9.1 12.9 the carriage. to thefixing cylinder 12.8.2 cap protective place. in valve the cylinder 12.8.1 12.8 air for remove purged cyclesto components. pre-determined pumped and 12.7.4 Appendix byconfirmed thein pressurizationtest 4. 12.7.3 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Container SystemsContainer UsingLiquid Cabinet CylindersTransportation of Step by Step Step by ChangeProcedures Liquid Container on transported be should Cylinders Cylinder purge gas Inert TestPressurization . iudLiquid securely plugs valve container the with transported be should container Liquid leak of method defined well a exchanged, or installed is container liquid When inspection visual a container, liquid a replace to door cabinet the opening Before liquid during worn be should (PPE) equipment protective personal Appropriate Liquid container replacement should be performed by two persons. Each should Each persons. two by performed be should replacement container Liquid D en fdtriigteaon flqi ntelqi otie container liquid the in liquid of amount the determining of means A pst n oo color any eposits should be transported with the cylinder valve plug securely tightened and tightened securely plug valve cylinder the with transported be should c ontainers should be transported on appropriate carriages with adequate with carriages appropriate on transported be should ontainers Ex change change — Line between the cylinder valve to the supply valve should be should valve supply the to valve cylinder the between Line — 4 — The i —The ) should be performed to insure cylinder connection leak-tight connection cylinder insure to performed be should ) te other P rocedure than white than ntegrity of the cylinder valve outlet be should ntegrity of valve theconnection cylinder Paragraph indicate a a prpit appropriate － － such situation should attempt to stop the leak the stop to attempt should situation such

place. General s that Page r carriages with adequate means for means adequate with carriages

atv eactive 26 silicon compounds have been have compounds should Document Number: Document be Corrosiv Y Y Y Y Y Not Doc.

GasCompressed e Y Y Y Y Y

Liquified Gas Date: Y Y Y Y Y Y Y Y Y Y Y 4400B Liquid DRAFT Corrosi Y Y Y Y Y

GasCompressed 4/9/2018 ve  4400B Y Y Y Y Y SEMI Liquified Gas Y Y Y Y Y Y Y Y Y Y Y

 Liquid LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and requirements for the leak testing and verification of testingverification the sensingfunction. system the leak and for requirements 4. and 3. been has container the that condition the and gas the purge eliminated, connected under closed, valve container the with system, 2. 1. thefeatures: following incorporate 12.9.2.6 indicates that change pressure a capture purging.ineffective not may monitoring Interrupted system. supply the purging within pressures continuously the monitor todesigned beshould container liquid 12.9.2.5 humanchange-out. reduceerror supply possibleto for thein potential whenever 12.9.2.4 shutdown valves at both the point of dispensing of point panel. equipment gas the both at valves shutdown 13.1.3 13.1.2 plug. purge toit aor be with should cap gas, sealed the connected not is it if and, valve the and port the between gauge pressure mechanical a with valve stop purging. require systems sealed where locations at installed 13.1.1 13.1 13 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Fault-tolerant design,Fault-tolerant Continuous pressure monitoring of the system during all purges and operating conditions, operating and purges all during system the of monitoring pressure Continuous The ability to perform a leak check of the container by measuring pressure rise in the in rise pressure measuring by container the of check leak a perform to ability The rte rcdrs fr sf ore cnanr rpaeet icuig verification including replacement container source safe for procedures Written Indoor Distribution Distribution Indoor System General Considerations General Flammable sections should volume possible. the smallest leg Dead be T The design of automatic-sequence control systems for container cabinets should cabinets container for systems control automatic-sequence of design The auto an When Controllers Auto-sequence o enable purging without venting into unsafe locations, a purge port should be should port purge a locations, unsafe into venting without purging enable o silicon compound silicon - sequence controller is used, the leak test after replacement of the of replacement after test leak the used, is controller sequence

delivery systems should be equipped with manual with equipped be should systems delivery － Paragraph Paragraph

uosqec otolr r recommended are controllers Auto-sequence and in the distribution line near the near line distribution the in and Page 27 Each purge port should have a have should port purge Each Document Number: Document Corrosiv Corrosiv Y Y Y Y Not Doc. Not

GasCompressed e

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Liquified Gas Date: Y Y Y 4400B Liquified Gas Y Y Y Y Liquid DRAFT Liquid Corrosi Corrosiv Y Y Y Y

GasCompressed 4/9/2018 ve  GasCompressed 4400B e SEMI Y Y Y Y Liquified Gas

Liquified Gas Y Y Y Y Y Y Y

 Liquid Liquid LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and where the branchbegins.where 13.3.1.4 56: NOTE valve. off shut 13.3.1.3 13.3.1.2 enclosure 13.3.1.1 Appendix described in 3. general criteria to 13.3.1 13.3 should system flammable compounds. down silicon detection shut the sourceof 13.2.3 system flammable compounds. monitoring down silicon shut the sourceof should 13.2.2 55: NOTE to used maintenance. for opened is system the be before to allowed is system the system before and process the to control compounds silicon flammable deliver and piping the of purging complete ensure 13.2.1 13.2 gas. the of properties the including application, the of consideration careful requires use to device which of 54: NOTE flow a to valve set location. pointthat in an than the for excesscontrol appropriate greater set be cannot that device a orifice) by restricting limited flow a is by flow example, (for the mechanical when needed not are valves control flow Excess EXCEPTION: requirements. process to asnecessary be only should much sizedgasthe deliver as valve to compound 13.1.5 limit. the designed above detected is pressure when shutoff gas automatic and relief pressure with monitors pressure 13.1.4 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Piping andComponents Piping Boxes Manifold Valve Piping Piping fire the of Activation detection. fire with provided be should boxes manifold Valve gasof the Activation monitoring. gas with provided be should manifold boxes Valve that means by gas inert an with purged be should boxes manifold valve in Piping silicon flammable every on installed be should valve control flow excess An Flammable If the piping diverges into two or more lines, each line should be provided with a with provided be should line each lines, more or two into diverges piping the If the name Piping with be should labeled p of Connection A shutoff valve for each branch should be provided as close as is practical to practical is as close as provided be should branch each for valve shutoff A Recommendedlocations valve branch of manifold purging are in G-13.points given CGA choice the so flow, available the reducing plugged, become may orifice restricting flow A Some require Some manualjurisdictions both and automatic . s' gas piping system system piping gas of indoor distribution systems should meet the following criteria in addition in criteria following the meet should systems distribution indoor of iio compound silicon pn hud b edd o otie ihn a exhausted an within contained or welded be should iping

as close as practical to the source the to practical as close as eiey sses sol e eupe ih over- with equipped be should systems delivery Paragraph of liquid gas or Page shut valves off 28 and flow direction.and . The excess flow control flow excess The . Document Number: Document Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Doc. Not

GasCompressed e Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Date:

4400B Liquified Gas Y Y Y Y Y Y Y Y Y Y Y

Liquid DRAFT Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y 4/9/2018

 GasCompressed 4400B e SEMI Y Y Y Y Y Y Y Y Y Y Y Y Y Y Y Liquified Gas Y Y Y Y Y Y Y Y Y Y Y  Liquid LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and NOTE 62: NOTE 61: NOTE 60: NOTE circuit open and shut should thecircuit an off temperature, over of event the in alarm should 13.3.4.3 possibilityof from of damage thecorrosion. increased because 13.3.4.2 piping. to damage the and inspected visually 13.3.4.1 In re-liquification. prevent to lines cases,theshould following considered:such be distance long or locations outside in required be may 13.3.4 replace lifetime. its within manufacturer, expected should user the and operations, repeated for data reliability with user the provide should supplier The itself. valve the on or 13.3.3 59: NOTE 13.3.2 compound compound silicon 13.3.1.6 S2. 13.3.1.5 compound 13.3.1.4.2 G13 NFPA respectively.CGA and 318 58: NOTE 13.3.1.4.1 57: NOTE reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Heaters and Heat Insulation Materials Insulation Heat and Heaters Valves PipingCoaxial lcrcl rssac iig haig sses sol e mntrd Monitors monitored. be should systems heating piping resistance Electrical areas wet in placed be not should systems heating piping resistance Electrical be should insulation the insulation, with used is heating resistance electrical If of piping the from isolated be should gases oxidizer of piping The exhaust have should enclosures ventilated The Gas shutdownbe supply required may some byjurisdictions. Increasedearth degradationleakage indicates of heater material. the insulating See 3,A3-3 coaxialAppendix about piping. gasin toxic piping highly or monosilane on valves all for enclosuresrequired Exhausted are The of t purpose having Heaters conform must to requirements the jurisdictional for device type. s gas purgegas lines. h nlsr hudb oioe ihdtcosfrtethe for detectors with monitored be should enclosure The These

present.

— The state of a valve (open or closed) should be indicated through display through indicated be should closed) or (open valve a of state The — shut off off shut periodically periodically ae. Te ioain sol lo b ple o to applied be also should isolation The gases. valves with be should provided heater heater hese valves for degradation or exposed wiring to avoid electrical arcing electrical avoid to wiring exposed or degradation for power supply power Paragraph is to is or service or cycleenable purging each of line. — External heating of piping and regulators and piping of heating External — and gas supply and the valve, as directed by the valve the by directed as valve, the Page in ventilation an enclosure. exhausted 29 , earth leakage, earth , . monitoring per SEMI per monitoring lmal silicon flammable flammable silicon flammable or a short a or flammable Document Number: Document Corrosiv Y Y Y Y Y Y Y Y Y Doc. Not

GasCompressed e Y Y Y Y Y Y Y Y Y Y Y Y Y Y Date:

4400B Liquified Gas Y Y Y Y Y Y Y Y Y Y Y Y Y

Liquid DRAFT Corrosiv Y Y Y Y Y Y Y 4/9/2018

 GasCompressed 4400B e SEMI Y Y Y Y Y Y Y Y Y Y Y Y Y Y Liquified Gas Y Y Y Y Y Y Y Y Y Y Y Y Y  Liquid LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and before service or maintenance.before between reaction compounds 14.2.5 extinguishing of gasmethod fires. flammable 14.2.4 hazardous safely potentially remove to ability pumping its for monitored and maintained 14.2.3 the equipmentmay be appropriate.shutdown of immediately 14.2.2 containmentprimary is kept always below 63: NOTE enclosures. leak-monitored and exhausted containment secondary 14.2.1 14.2 S2). SEMI in of materialsdefined combustible made (as be not should conditions, failure point single foreseeable reasonable or normal under compounds silicon flammable 14.1.1 point single foreseeable reasonable or normal under compounds defined notcombustible (as should madeSEMIS2). in conditions, failure of materials be silicon flammable contact can that equipment 14.1 14 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This that flow 14.2.9 during can step transition 14.2.8 pressures ofdo thoseand gases compounds silicon flammable the by process 14.2.7 baseline the for recommended cycles of number minimum the equipment supplier. than less be not should number 14.2.6 about the possible information user in provide documentation operators not but personnel, service or maintenance to limited is count cycle the changing of 14.2.5.3 process. 14.2.5.2 of such cycles.the effectiveness 14.2.5.1 point Equipment Using FlammableEquipment Using can be can Design Design Construction of Materials from equipment. from F condition mixture gas a if step process next the initiate not will it that so designed be should equipment The If When to sequence purge/vacuum a performing of capable be should Equipment off shut to designed be should Equipment be should used, when used, are compounds silicon flammable which in chambers for pumps vacuum Process State Safe P components Structural ip lammable silicon compounds silicon lammable If adjustable, this minimum number of cycles should be controlled in such a way that that way a such in controlled be should cycles of number minimum this adjustable, If user the to cycles of number minimum the provide should supplier equipment The decided be should cycles purge/vacuum of number minimum The Secondary containment Secondary . qimn equipment ing gases and liquids upon activation of the f the of activation upon liquids and gases from, automatically shut off by the equipment itself upon detection of unsafe gas condition downstream downstream condition gas unsafe of detection upon itself equipment the by off shut automatically rnsbrings

the appropriate appropriate the for flammable silicon compounds compounds silicon flammable for atmosphere

n and  the equipment into a safe state safe a into equipment the Equipment should be designed so that detection of a flammable a of detection that so designed be should Equipment sdsge oto designed is if if oto pose unacceptable risks. pose unacceptable the piping is piping the euetervltl yrdcsbyproducts volatile their reduce and flammable silicon compounds or reactive byproducts can be be can byproducts reactive or compounds silicon flammable and of the equipment the of numbers of of numbers to a chamber simultaneously, the flows should be controlled controlled be should flows the simultaneously, chamber a to , not including coaxial piping coaxial including — — pose unacceptable risks. unacceptable pose Structural components Structural flow any flammable silicon compounds with other gases incompatible with incompatible gases other with compounds silicon flammable any flow and incompatible gases should have separate piping up to the point where point the to up piping separate have should gases incompatible and Silicon Compounds atmospheric

above- purge cycles for the user the for cycles purge atmospheric , or components used for support of of support for used components or , pressure. between between

supply of flammable silicon compounds as well as as well as compounds silicon flammable of supply ire detection detection ire nldn htigofoff shutting including Page ihnpoeseupeti o sal usually not is equipment process within , of the equipment the of pressure pressure equipment gas panel panel gas equipment 30 in, consequences the process chamber so that risks associated with associated risks that so chamber process the system for the equipment, equipment, the for system ’ and and s own process own s the piping has mechanical joint joint mechanical has piping the of reducing the number of ofthe the cycles. number reducing based on based , or components used for support of of support for used components or , flammable and process chambers chambers process and are determined by the user, the user, the by determined are the results of tests that evaluate that tests of results the the flammable silicon compounds silicon flammable Document Number: Document equipment that can contact can that equipment silicon compounds silicon eoe fambe silicon flammable remove silicon compound silicon as this is the only safe only the is this as so that that so . adequately necessary if inside the inside if necessary The supplier should supplier The access to the means the to access Doc. for each for Date: concentrations 4400B of of should have should controlled outside of outside DRAFT any other any baseline release 4/9/2018 . Safe .  4400B SEMI gas the of  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 14.3.6.1 SEMIS2S6. and per evaluated beand should ventilated 14.3.6 14.3.5 the 14.3.4.3.2 equipment. or personnel other affects failure single-point foreseeable reasonably a from 14.3.4.3.1 14.3.4.3 from supply pressureabove increasing andchamber pressure gas prevents that chamber 14.3.4.2 reasonably to 14.3.4.1 14.3.4 14.3.3 14.3.2 in the seismicprotection to detailed SEMIS2 achieve needed 14.3.1 14.3 andrisks. wouldpose that concentrations unacceptable pressures 14.2.11 the gas flow of 14.2.10 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 65: NOTE satisfied. 64: NOTE systemabatement the dilute 14.4.3 (non-hydrocarbon) should used. oil inert be 14.4.2 stream. the gas 14.4.1 14.4 in specified withinduring maintenanceactivities. silicon SEMIS2 the controlled level flammable mixture is 14.3.8 from supply pressureabove increasing andchamber pressure gas prevents that chamber 14.3.7 enclosure is initiation process or if prevent continuance the open. beto should interlocked 14.3.6.2 SEMIS2S6. and per evaluated beand should ventilated control risks associated with with associated risks control

change procedure and warn the user of the procedurewarn user the possible and change Construction Vacuum Pump Systems Pump Systems Vacuum Purge gases for vacuum pumps should be inert gas. The flow rate of the purge gas should be sufficient to sufficient be should gas purge the of rate flow The gas. inert be should pumps vacuum for gases Purge or type dry be should stream gas the to exposed are that pumps Vacuum pumps vacuum for construction of Materials S SEMI in specified tests gas tracer the of results The chamber Process contain to required is enclosure an If Enclosures Chambers Process gases)should sectionsvolumepossible. the (internal smallest whichtrap can be leg piping Dead The the for points interface Equipment No single component failure should allow for incompatible gases to mix, in manifolds or other areas, at areas, other or manifolds in mix, to gases incompatible for allow should failure component single No protection adequate determine to used be should system the of analysis hazard A ftecabrrpuepoeto sa nlsr,enclosure, an is protection rupture chamber the If contain to required is enclosure an If Ports Viewing chamber Process Chambers More gas may purge flow be if necessarygases other are siliconflammable with compounds.used flammable If positive pressure is used to prevent backflows, then a additional pressure piping code requirements requirements code piping pressure additional a then backflows, prevent to used is pressure positive If viewing ports are are ports viewing If to designed be should they used are ports viewing If external forces on the bending points other bebyuse forces external should bendingmethods. ontheminimized ofor bending reverse foreseeable lmal iio compounds' silicon flammable . below intended intended single point failures or failures misuse. singlepoint s 50% of 50% using flammable silicon compounds should be provided with safety interlock safety with provided be should compounds silicon flammable using

s using flammable silicon compounds should be provided with safety interlock safety with provided be should compounds silicon flammable using for processes processes for intended to be be to intended reasonably foreseeable foreseeable reasonably the LFL . using flammable silicon compounds compounds silicon flammable using

facilities facilities ocnrto n te ppn ewe aum pm ult ad the and outlet pump vacuum between piping the in concentration hazardous gas mixture in the event of of event the in mixture gas hazardous hazardous gas mixture in the event of of event the in mixture gas hazardous user replaceable, replaceable, user , or be provided with with provided be or , gas supply piping should be designed with seismic bracing seismic with designed be should piping supply gas that are exposed to the gas stream stream gas the to exposed are that Page consequences unsafe condition such as acute pressure rise resulted from resulted rise pressure acute as such condition unsafe 31 . l all the user documentation should specify the part and part the specify should documentation user the withstand the maximum pressure that could result could that pressure maximum the withstand 6 h the hudshould , of using non-authentic part of non-authentic using eoal removable guard guard indicate that ambient concentration of concentration ambient that indicate to capture any flying debris before it before debris flying any capture to , should be evaluated for for evaluated be should if if nlsr aespanels enclosure a a chamber rupture, rupture, chamber rotary pump is to be used, only used, be to is pump rotary chamber rupture, rupture, chamber Document Number: Document the the should be should in addition to shutting off shutting to addition in designed range.designed designed range.designed . Doc. compatible with compatible or access doors access or Date: may need to need may 4400B the the the the their ability their s s DRAFT enclosure enclosure between between 4/9/2018  4400B SEMI as be  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and be based on the baseline process and should baseline based and process include:be onthe 14.7.1 14.7 14.6.5 incompatiblean mixture,thus,air be be should also prevented entering from exhaust if gas above piping pyrophoric is LFL 66: NOTE du exhaust 14.6.4 14.6.3 14.6.2 enclosures. pump enclosuresand gas process panel compound silicon flammable of containment primary compound silicon flammable of 14.6.1 containment primary of failure where equipment pump enclosuresand gas equipmentgasprocess enclosures. foreseeable.Suchpartspanel include reasonably of part applicable the 14.6 and managingassessing 14.5.2 determine 14.5.1 14.5 dilution. insure purgeflow theneededto amount adequate drops below if gas the 14.4.4 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This and process include: should beontheinformation baseline should based 14.7.2 highly as reactive of types poly-siloxane. 67: NOTE           the chemicals and their composition, and the chemicals recommended piping size and flow volumes, piping and flow size recommended is stream effluent compound silicon to point-of-usegas a connected flammable equipment the when procedures maintenance recommended is to during the maintenance, expected open ifair duct the hazards at type expected of connection compatibility and requirements their composition, and the chemicals generation)by-product and deposits silicate as (such process the with associated issues maintenance potential on information flow duct size volumes, and recommended gas point-of-use a to connected is ventilation exhaust equipment the when procedures maintenance recommended is to during the maintenance, expected open if air duct the hazards Information on Exhaust Ventilation and Flammable Silicon Compound Effluents Compound Silicon onExhaustInformation Ventilation andFlammable Exhaust Protection The equipment supplier should provide flammable silicon compound effluent information to the user. The user. the to information effluent compound silicon flammable provide should supplier equipment The should information The user. the to information ventilation exhaust provide should supplier equipment The should usedSEMI S6 be secondary the (and enclosures containment secondary the within gases process of mixing Incompatible M flammable compounds tointo besilicon collection should of designed pocketsEnclosures minimize e and Enclosure other any for As Suppression and Detection Fire The abatement abatement An example of anticipated hazards created by exposing the duct to atmosphere is production of unstable polymer such polymer unstable of production is atmosphere to duct the exposing by created hazards anticipated of example An addition In ixing of incompatible process gases within the primary exhaust piping within be of exhaust should gases avoided. process incompatible theixing primary the need for for the need c ts from those enclosures) should be should fromavoided.ts those enclosures) flow rate flow V entilation that may be be may that entilation system, to to of purge gas flow should be interlocked to shut off the off shut to interlockedbe should flow gaspurge of mixing mixing fire detection and suppression. detectionfire and xhaust ventilation should be provided for the applicable part of equipment where failure of failure where equipment of part applicable the for provided be should ventilation xhaust safety safety safety design consideration design safety . two risks. to design to reactive process chemicals, it is noted that any pressurized pyrophoric gas and air also make also air and gas pyrophoric pressurized any that noted is it chemicals, process reactive abatement abatement N ecessary for the the for ecessary — exhaust ventilationexhaust

s h eut o h ikassmn assessment risk the of results the Use system, and

s Page seto of aspect is reasonably foreseeable. Such parts include equipment gas equipment include parts Such foreseeable. reasonably is E quipment 32 of enclosures. of process equipment, SEMI S2 provides criteria for criteria provides S2 SEMI equipment, process the — — outlet of the vacuum pump,outlet the vacuum of E xhaust ventilation should be provided for provided be should ventilation xhaust supply of flammable silicon compounds silicon flammable of supply Document Number: Document described Doc. n in Date: SEMI S14 SEMI 4400B DRAFT . 4/9/2018 reactive  . 4400B SEMI s to is  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and should be should decided 14.8.2 measures. recommended hazards,protective and compounds, their 14.8.1 14.8 systems pump ofgases incompatible consideration separate for 14.7.3 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This    maximum distance from the pump to the facility connection or facilitythe toconnection point-of-useabatement. distancethe pump maximum from the and pump, the distancethechambervacuum reaction to maximum from generation),by-product and deposits silicate as (such process the with associated issues maintenance potential on information Other InformationOther Hazard alert labels should be should labels alert Hazard Manuals The need need , as defined in SEMI S13, should include information and training and information include should S13, SEMI in defined as to route the flammable silicon compound effluents to the proper gas gas proper the to effluents compound silicon flammable the route to in accordance with accordance in designed in conformance with SEMI S1. Where such labels are to be placed be to are labels such Where S1. SEMI with conformance in designed SEMI S2. SEMI Page 33 . requirement abatement abatement Document Number: Document on flammable silicon flammable on system Doc. Date: 4400B may require may DRAFT reactive 4/9/2018  4400B SEMI  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and very unstable very and reactive atmosphere.very to 69: NOTE ducts to 15.2.1 15.2 presented. the hazards with If capability. ports View blocked. 15.1.3 plug valve stopa have anddeposits 15.1.2 system maintenance.treatment 68: NOTE enclosures foreseeable reasonable in or condition operation 15.1.1.5 and expansion to subjected when compounds. especially leaks, of risk contraction increased to lead fittings 15.1.1.4 single-point theequipment. process foreseeableworstof failure case, ain reasonably the of by pressuretheof reaction potential generated 15.1.1.3 joints. seal 15.1.1.2 may be and which reactions, heat the with compatible 15.1.1.1 15.1.1 System) Abatement 15.1 15 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This . Exhaust Effluent, Flammable Silicon Ventilation, and Compound Flammable Siliconand Effluent Flammable Compound Design Prior to performing performing to Prior The sampling chemical for Ports Materials of examine Mechanical fittings fittings Mechanical face-seal Metal-gasket F to used be should tape) or adhesive (including compound joint combustible No containing piping for Materials L iudo oi niae ul-po ecinpout.Sc ecinpout r are products reaction Such products. reaction of build-up indicates solid or Liquid . lammable silicon compound silicon lammable aigeaking ytmsystem of of sampling ofsampling asdcaused effluents including byproducts are byproducts including effluents Flammable Silicon Compound Effluent Systems Effluent Compound Silicon Flammable

and if there is any liquid or anysolid is if liquid there a b be can C hudb eindt aeamaso eemnn fif determining of means a have to designed be should , if not connected to a sampling device, should be sealed with a cap or cap awith sealed be should device, samplinga to connected if not , y itral unn n extinguishing and burning internally by flet nldn including effluents onstruction onstruction hud be should asdb by caused gas composition and concentration in the piping. in composition and the gas concentration maintenance that can be exposed to above above to exposed be can that fittings should be used wherever possible. Compression possible. wherever used be should fittings periodic present h rsl fof result the hudb rvddprovided be should Paragraph effluent piping should withstand the maximum the withstand should piping effluent , m ,

downstream of downstream flammable silicon compound silicon flammable yrdcsbyproducts ally aintenance personnel should inspect piping and piping inspect should personnel aintenance material accumulated material clean corrosive, these ports should be compatible be should ports corrosive, these assembly and disassembly during pump and pump during disassembly and assembly Exhaust failure ed flammable compound silicon and should provide should and Page o poie fr aeut viewing adequate for provide to

the should be enclosed in exhausted in enclosed be should Ventilation S nodrorder in atmospheric reaction chamber. reaction 34

(from Pump to the Inlet of Inlet the to Pump (from f fambe silicon flammable of oto . nbeiseto inspection enable ystem ystem effluent pressure at normal at pressure Each port should Each protection from protection Maintenance h iigpiping the s should be should Abatement Systems effluent often Document Number: Document of is s Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y Not

GasCompressed e Doc. Y Y Y Y Y Y Y Y Y Y Y Y Liquified Gas Y Y Y Y Date: Y Y Y Y Y Y Y Y Y 4400B Liquid Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y GasCompressed DRAFT 4/9/2018 e  Y Y Y Y Y Y Y Y Y Y Y Y 4400B SEMI Liquified Gas Y Y Y Y Y Y Y Y Y Y Y Y Y Liquid  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and bu eest f iet gs dlto r hvn having or dilution gas inert system.abatement of necessity about 15.3.1.5 and operation normal for failures. provided be should information treated. be to need not do that equipment abatement the into flow can that chemicals 15.3.1.4 to important very is information This design systems. abatement on requesting before quotations treated, be to chemical, all of gas) or liquid (solid, phases possible and 15.3.1.3 facilities. and 15.3.1.2 system.abatement 15.3.1.1 15.3.1 15.3 flammable tocompounds. equipmentusing process silicon other connected procedure 15.2.2.2 manuals. lines the toexhaust accumulatedin the maintenance likely in substances be on maintenance perform 15.2.2.1 to allowed be should explosions siliconflammable compound or fires small reactions, compound 15.2.2 implemented stabilize 15.2.1.2 being removed. are they ensure and deposits characterize to and hazards new generated not have quantities 15.2.1.1 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Abatement ing Selection associated hazards the to Due or neutralize or This The abatement system manufacturer should provide the user with information with user the provide should manufacturer system abatement The and gases the all of rate flow maximum and name provide also should user The minute per amount concentration, composition, the determine should user The equipment both for consideration with selected be should system abatement An appropriate the determine to information and techniques for F5 SEMI to Refer that users notify also should suppliers Equipment provide should suppliers Equipment to procedure a unstable, or reactive is deposit the indicates investigation the If an appropriate abatement system. appropriate abatement an s flet, ol aneac okr rie o hnl h oeta for potential the handle to trained workers maintenance only effluents,

provided provided . inspection Systems of Abatement of System in the maintenance manuals manuals maintenance the in the deposit before opening the piping or duct to air should be should air to duct or piping the opening before deposit the should be performed periodically to insure gas composition and composition gas insure to periodically performed be should effluent pipingexhaust effluent ducts. and

Paragraph with deposits stabilizing might not work if the exhaust lines are lines exhaust the if work not might incompatible Page omd fo lmal silicon flammable from formed or neutralizing procedures for procedures neutralizing or 35 l esnbe reasonable all tblzn r neutralizing or stabilizing hmcl yas the bypass chemicals selecting or selecting foreseeable The Document Number: Document Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y Not

GasCompressed e Doc. Y Y Y Y Y Y Y Y Y Y Y Y Liquified Gas Y Y Y Date: Y Y Y Y Y Y Y Y Y 4400B Liquid Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y GasCompressed DRAFT 4/9/2018 e  Y Y Y Y Y Y Y Y Y Y Y Y 4400B SEMI Liquified Gas Y Y Y Y Y Y Y Y Y Y Y Y Liquid  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 15.3.6 15.3.5.2 beshould provided 15.3.5.1 be should it system, abatement the ofupstreamtype preventwaterinto systems to flow designed reverse combustion or adsorbent an of downstream used is 15.3.5 concentration gas/chemical be of status should atuseddetecting those the parameters. outlet monitor for abnormal a and monitor temperature exhaust an sensor, rate airflow an 15.3.4 to back-up employed a switch to off. shut be should system system abatement abatement failed the to connected 15.3.3.2 the to according absorbent the of breakthrough abatement detect to appropriate be should points sample of location The absorbent. of breakthrough detects that system alarm and detection gas each that ensure To systems. 15.3.3.1 15.3.3 all over configuration facility the of including process and abatement equipment the system. 70: NOTE effluent for 15.3.2.3 effluent 15.3.2.2 effluent 15.3.2.1 15.3.2 the manufacturer. train be should workers Maintenance system. the maintains manufacturer of characteristics the compound considering silicon form, written in procedures, maintenance 15.3.1.6 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This ek.Uo ekdtcin naamsol eatvtdadgsadand gas and activated be should alarm an detection, leak Upon leaks. Operation Systems Abatement Wet-type with Combination Systems Combustion Absorbent Systems Interlocks to the to the to the to The abatement system manufacturer should provide the user with recommended with user the provide should manufacturer system abatement The The system should be equipped with a water leak shouldsensor. system equipped a with water The be of determineabnormal condition the to wet-typesystemMonitoring operating any detected, is breakthrough When detection leak Gas systems abatement Some of flow the stop to locations appropriate at provided be should Interlocks of flow the stop to locations appropriate at provided be should Interlocks Shutting off of the gas and chemicals at the source may be deemed necessaryon deemed depending be may source chemicalsthe and at gas the of off Shutting system instructions. system abatement abatement abatement

effluents should be replaced immediately replaced be should . system system system system that can be treated by the gas abatement system abatement gas the by treated be can that — In a combustion-type abatement system, a flame detector, flame a system, abatement combustion-type a In — and and during maintenance and service during maintenance should be off.should shut w absorbent bedabsorbent orabatement redundant breakthrough detection detection breakthrough abatement hen abnormal status status hen abnormal need Paragraph enclosure the gas and and gas the system functions properly, it should have gas have should it properly, functions system . s

. . Alternatively a Alternatively Such Such Page chemical of an abatementof an system — If a wet-type a If — should be provided provided be should enclosure 36 supplies to the the to supplies . switching system can be can system switching bobn Absorbent s should be monitored be should system.

ed abatement system abatement as specified by specified as for absorbent for in the failed the in , even if the if even , is detectedis the flow of flow the flammable equipment process process Document Number: Document . Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y Y Not

GasCompressed e Doc. Y Y Y Y Y Y Y Y Y Y Y Y Y Liquified Gas Y Y Y Y Date: Y Y Y Y Y Y Y Y Y 4400B Liquid Y Corrosiv Y Y Y Y Y Y Y Y Y Y Y Y GasCompressed DRAFT 4/9/2018 e  Y Y Y Y Y Y Y Y Y Y Y Y Y 4400B SEMI Liquified Gas Y Y Y Y Y Y Y Y Y Y Y Y Y Liquid  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and automatically restart. 15.3.6.2 system abatement the situation, a such be allowedmay start a is to when leak detected. In “dispensed”. not and “stored” is gas when jurisdictions 72: NOTE maximum the reach emissions the if down amount.allowable shut be to have also may gas source The jurisdictions. 71: NOTE 15.3.6.1 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Adequate performance of the abatement system should be should performanceofsystem ensuredattimes. all the abatement Adequate When the abatement system has been stopped by malfunction, it should not should it malfunction, by stopped been has system abatement the When t my nt b eesr o btmn ytm o b osaty “nln” i some in “on-line” constantly be to systems abatement for necessary be not may It some by required be may outlet the at concentration the of monitoring Constant Paragraph Page 37 Document Number: Document Corrosiv Y Y Y Y Not

GasCompressed e Doc. Y Y Y Y Liquified Gas Y Y Y Y Date: 4400B Liquid Corrosiv Y Y Y Y GasCompressed DRAFT 4/9/2018 e  Y Y Y Y 4400B SEMI Liquified Gas Y Y Y Y Liquid  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and are used for multiple use for points.are used multiple A1.1.1 A1.1 ( NOTICE System–Configuration Cylinder 1 APPENDIX reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This date of date approval Silane cylinders Silane Ar N / Indoor Indoor 2 Equipment for indoor installations consists of gas cabinet, process gas panel, and purge gas panel. VMBs panel. gas purge and panel, gas process cabinet, gas of consists installations indoor for Equipment : The material in this appendix is an official part of SEMI of part official an is appendix this in material The : ESOV To To Inert vent C ). ylinder ylinder RFO I nstallations N transducer purge gas gas purge Pressure 2 panel / 3 Ar Ar from valve - port port control valve control Pressure vacuum vent vacuum Typical Panel Gas Purge Silane Silane transducer Pressure Figure Figure A1.1 Process Gas Panel Process Page S control valve control Pressure ources 38 transducer Pressure S18 and was approved by full letter ballot procedures on procedures ballot letter full by approved was and To Process gas panel Process To Document Number: Document Doc. Silane out Silane Date: 4400B DRAFT 4/9/2018  4400B SEMI  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Silane in Silane Silane out Silane Typical Process Panel Gas Typical Schematic VMB control valve control Silanevent Pressure Pressure indicator Figure Figure A1.2 Figure Figure A1.3 VMB enclosure VMB Page 39 Purge gas Purge Document Number: Document Doc. Date: 4400B DRAFT 4/9/2018  4400B SEMI  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and accordance jurisdictional with requirements 73: NOTE ( NOTICE SystemConfiguration 2 APPENDIX reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This date of date approval N Ar / 2 : The material in this appendix is an official part of SEMI of part official an is appendix this in material The :

Purge Panel Gas Separation and setback considerations for flammable for considerations setback and Separation ). RFO Y Y cylinder – Typical Monosilane Flow Bulk System Bulk Sources . RFO transducer Pressure Figure Figure A1.1 Bulk Bulk container control valve control Page Pressure Process Gas Panel 40 Heater silicon compound silicon S18 control valve control and was approved by full letter ballot procedures on procedures ballot letter full by approved was and Pressure transducer vacuum vent Pressure Silane soaeaddsesn ra utmust areas dispensing and storage Outdoor Indoor Document Number: Document VMB Doc. Date: 4400B To To point of use DRAFT 4/9/2018  4400B SEMI be in be  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and eetdoeain,s h srcnshdl elcmn ftethe lifetimes. expected of replacement schedule can user the so operations, repeated A3.2.4 pocketing A3.2.3 of fuel. provideadditional incompatible) donot gasketsthat acompression (unless source A3.2.2 78: NOTE singlepoint conditions. orfailure conditions reasonablyforeseeable A3.2.1 A3.2 77: NOTE recommended other by jurisdictions. 76: NOTE heat-resistive materials stable and of be chemically should made A3.1.3 are braid) used,the static large charge can PTFE example, (for lines conductive non If bubblers. as such 75: NOTE A3.1.2 considered 74: NOTE corrosion. be A3.1.1 A3.1 ( NOTICE Piping 3 APPENDIX reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This date of date approval utbe fr mitiig srcua integrity structural maintaining for suitable Materials Flow Piping should compounds silicon flammable and corrosive with use for selected Materials Gas cabinet or equipment suppliers should provide the user with reliability data for data reliability with user the provide should suppliers equipment or cabinet Gas minimize that structures with selected be should piping the in used Components metal-surface single-use be should they used are gaskets connection cylinder When Flow compounds silicon flammable and corrosive for used O-rings or gaskets Plastic Some Some require regions components be to approved. Refer to Some to liquid a as transferred are compounds silicon liquid the cases, most In be may XM-27 or Hastelloy Monel, SUS316L, SUS316, SUS304, as such Materials . . : The material in this appendix is an official part of SEMI of part official an is appendix this in material The : Components a opnnsComponents nd for jurisdictions § ). liquid flammable compounds should silicon conductive. liquid be for on 13 criteria heating insulation. Flow Flow o nt pri h s f PF o hs proe lhuh i is it although purpose, this for PTFE of use the permit not do should Components e be

discharge discharge thethrough PTFE eetd s s nt t nrae rs ne normal under risk increase to not as so selected Paragraph

n and Page

rvd dqae poeto from protection adequate provide flexible lines with stainless steel metal steel stainless with lines flexible 41 , S18 it.puncturing . and was approved by full letter ballot procedures on procedures ballot letter full by approved was and components

process containers, process within their within Document Number: Document Corrosiv Y Y Y Y Y Y Y Y Y Y Not Doc.

GasCompressed e Y Y Y Y Y Y Y Y Y Y

Liquified Gas Date: Y Y Y Y Y Y Y Y Y Y Y Y 4400B Liquid DRAFT Corrosi Y Y Y Y Y Y Y Y Y Y Y Y

GasCompressed 4/9/2018 ve  4400B SEMI Y Y Y Y Y Y Y Y Y Y Y Y Liquified Gas Y Y Y Y Y Y Y Y Y Y Y Y Y Y

 Liquid LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and nearest up-stream valve.nearest flammable the off shut also should sensor pressure The occurs. changea when location attended constantly at a alarm and should monitored be should space A3.3.1.2 compound silicon shut should detector flammable the for detectors with monitored A3.3.1.1 gas A3.3.1 the line damaged.if inner is released gas process of amount total the reduce may and breach, the of facility the alerts interlock The addressed. be worker. the alerts jacket the pressurize then to used gas inert escaping the should of sound The jacket. the damage which hazards other and accidentally who persons to warning local a provide lines coax interlocked and monitored, pressurized, costs substantial add may piping Coaxial enclosures. secondary within are fittings non-welded as long as appropriate, is gases these for piping coaxial that evidence little is there believe Some construction. (coaxial) contained secondarily 82: NOTE A3.3 an prevent over-pressurization piping and of systems vessels. to means safety primary the are these regulations, pressure international the Within selected. devices 81: NOTE to necessary that verify not compliance as design is lost future modifications are occur. audits system quality periodic and processes, control change engineering supplier’s requirements. PED and ASME final both to conformance show the to performed be to need may tests Equivalency I). to (Annex use” for “suitability justify to 80: NOTE documentation supporting the have and (ref. component auditors/inspectors. 304.7.2), “Unlisted” approved Paragraph ASME an as B31.3 or 304.7.1) Paragraph B31.3 (ref. components 79: NOTE KHK) or PED, code, ASME example, (for or regulation standard appropriate an to conform to Laboratories) utilize fittings) they filters, gauges, that transducers, ensure pressure selection should valves, component design(e.g., individual system the piping The of the for part time. process integral over integrity an mechanical considered ensure be to should analyses effects external other and cycling, A3.2.5 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This (e.g., Nitrogen, (e.g., Ar CoaxialPiping rsue Cmoet Selection Components Pressure When coaxial piping is installed, the annular space should be pressurized with inert with pressurized be should space annular the installed, is piping coaxial When Some jurisdictions require require jurisdictions Some relief over-pressure of types the to related is selection component for sub-set important An ( Body Notified European “Listed” as specifically components approved defines Code) Piping (B31.3 ASME The If a pressure or vacuum method is used, the pressure or vacuum in this annular this in vacuum or pressure the used, is method vacuum or pressure a If be should piping coaxial the from gases purge the used, is method purge a If ” and that the component is deemed suitable for use in the suitableapplication. theforin componentdeemed that is use and off gon the source when a leak when detected. is a the source ) , purged, or maintained at a vacuum. or, purged, maintained

“ flammable silicon compound silicon flammable ne h the under If a component has been approved for use by testing, then the then testing, by use for approved been has component a If a component certified by an ATL (Accredited Testing (Accredited ATL an by certified component a Paragraph rsue ftge orso, cep thermal creep, corrosion, fatigue, Pressure — PED) approves these piping system components for components system piping these approves PED) Page gas piping inside buildings to be of be to buildings inside piping gas 42 silicon compound compound silicon in the inner piping inner the in However, gas at the at gas . This . Document Number: Document Corrosiv Y Y Y Y Y Y Y Y Y Not Doc.

GasCompressed e Y Y Y Y Y

Liquified Gas Date: Y 4400B Liquid DRAFT Corrosi Y Y Y Y Y Y Y Y Y

GasCompressed 4/9/2018 ve  4400B SEMI Y Y Y Y Y Liquified Gas Y

 Liquid LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and “keyed” between“keyed” differentiation gas types. 84: NOTE containingan gas.cylinder incompatible A3.4.5 cylinders A3.4.4 contractionchanges.and by temperature 83: NOTE be required.disassembly will joints Mechanical possible. A3.4.3 exhausted for the need enclosures.reduce A3.4.2 A3.4.1 A3.4 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Construction The c The used recognized ongasOnly cylinderbe approvedby authorityshould a connections Fittings to possible wherever welding by be should components steel stainless of Assembly facilitiesshould andfromEquipment, protected piping discharge. electrostatic be . Special style connections such as CGA-DISS can provide added protection by their use of use their by protection added provide can CGA-DISS as such connections style Special expansion to subjected when especially leaks, of risk increased to lead fittings Compression

onnection — Fittings should be welded, (preferably orbital-butt-welded) wherever orbital-butt-welded) (preferably welded, be should Fittings — to the cylinder cylinder the to mtlgse aesa fittings face-seal (metal-gasket should be selected so as as so selected be should Paragraph Page 43 hud b sd when used be should ) to prevent connection of a of connection prevent to Document Number: Document Corrosiv Y Y Y Y Y Y Y Y Not Doc.

GasCompressed e Y Y Y Y Y Y Y Y

Liquified Gas Date: Y Y Y Y Y Y Y Y 4400B Liquid DRAFT Corrosi Y Y Y Y Y Y Y Y

GasCompressed 4/9/2018 ve  4400B SEMI Y Y Y Y Y Y Y Y Liquified Gas Y Y Y Y Y Y Y Y

 Liquid LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and NOTE 87: NOTE example, (for regulation or standard Section ((97/23/EC) 345,PED Section Annex1 B31.3, A.S.ME 3.2.2) piping process appropriate the following gas inert an using MAWP 110% at tested pressure be should welds system’s piping the and operation, initial to prior The documented be to needs plan test KHK). or PED, code, ASME example, (for regulation or standard piping process appropriate the following A4.1.2.4 gauge. error within ofis the the correction) temperature (with deviation pressure the that confirm and gauge pressure the Read duration. appropriate A4.1.2.3 testing. A4.1.2.2 A4.1.2.1 or (e.g. for checking are you 86: NOTE A4.1.2 85: NOTE A4.1.1 A4.1 ( on NOTICE PressurizationTesting Leakand Testing 4 APPENDIX reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This section thetest with leak. a indicates gas tracer any of the Detection gas. of tracer presence for piping the of exterior the search to system detection leak a Use temperature. room at operation p 1MPa, than higher A4.1.2.8 indicates a leak.gas gas tracer the to piping the exteriorof its the exteriorof thegas piping, fittingssystem. Expose jointsasource.While the to tracer exposing and A4.1.2.7 89: NOTE 88: NOTE A4.1.2.6 toprior testing. regulation ( or of standard testedtheusing MOP inertfollowing appropriate at piping 110% gas,process beto pressure an and maintenance section theunder effected only requiresthat priorand successfully continued it to operation, completed testingdisassembly/re-assembly testing) after (outboard any static pressure task pipingthrough Fittingintegrity —Each Testing should system validatedits Integrity Mechanical for mechanical be A4.1.2.5 re-assembly re-assembly after maintenance) date approval of Pressur Pressurization Testing supplyEach should system both leak piping tested. be and pressure-tested : The material in this appendix is an official part of SEMI ( SEMI of part official an is appendix this in material The : It recommendedis that l Some requireregulations testing inboard outboard. both and beThere pressure may to requirements higher regulations.under levels some which tests pressurization different two are There Leak alonetesting (as SEMI purity will detect in F1 testing) not potential increased-pressure failures. Outboard Leak Testing Leak Outboard Testing Leak Inboard Leak Testing — Testing Integrity Weld Procedure A assembled toPressurization beofpiping. the should integrity performed the determine testing calibrated pressure ga pressure calibrated for for ization example ).

tracer ressurize the test section with the the with section test the ressurize  — , Seal the test target and pressurize pressurize and target test the Seal initial weld integrity testing or mechanical fitting integrity, which is a verification of correct assembly correct of verification a is which integrity, fitting mechanical or testing integrity weld initial and TestingLeak gas 1 to , Leak testing byusingLeak be should done A.S.ME PCC-2, Part 5, EEMUA 168) Each of these test plans test 168)of PCC-2, A.S.ME Each these Part 5,EEMUA plans , watch the leak detection system for detection of the tracer gas. Detection of any tracer any of Detection gas. tracer the of detection for system detection leak the watch . eak testing eak be with gas performedas a such helium. (Vacuum testing) (Vacuum — — 1 u 0% of the pressure expected during normal operation at room temperature. operation pressure0% expected at ofduring normal the ge that is accurate in the range to be tested be to range the in accurate is that ge For For h editgiyo rsueppn ytm hudb be should system piping pressure of integrity weld The portion of the s the of portion — Generate a vacuum within the test section with a leak check leak a with section test the within vacuum a Generate — Page are necessary to necessary are For For tracer ystems it it 44 systems which systems to the test pressure. Maintain the test condition for an for condition test the Maintain pressure. test the to gas to 150% of the pressure expected during normal during expected pressure the of 150% to gas doc# which i nboard leak testing leak or nboard ) and was approved by full letter ballot procedures ballot letter full by approved was and ) be done based on what type of mechanical integrity mechanical of type what on based done be operate operate operate higher than 1MPa, p 1MPa, than higher operate . above atmospheric atmospheric above The plan statictest should be used for pressurization for used be should o Document Number: Document utboard testing. should be documented be Doc. validated through validated pressure should Date: 4400B ressurize the ressurize DRAFT be but not but 4/9/2018 

4400B SEMI  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and contents. failure pressure expected the be could what A4.2.1 92: NOTE A4.2 A4.1.2.9 91: NOTE and mix) the(He Nitrogen for 90: NOTE reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This . Testingo The expected pressure is determined by evaluation of the foreseen operating pressure and exhaust piping exhaust and pressure operating foreseen the of evaluation by determined is pressure expected The Flammable silicon compound effluent and and effluent compound silicon Flammable Flammable compoundFlammable silicon effluent does include piping not facility ducts.exhaust Authorities Jurisdiction mayHaving (AHJs) require pressures. higher gas tracer using by test one in performed be can 1MPa than higher operate which systems for Testing Leak Outboard Corrective Actions f

Flammable PipingCompoundEffluent Flammable Silicon

Weld TestingIntegrity — If any pressure or tracer gas gauge change is detected, repair the leak and repairretest. detected, the gasleak changeis or gauge tracer any —If pressure ihnwithin the piping during piping the and abatement Mechanical Integrity Fitting Testing Page 45 system piping should be pressure tested to to tested pressure be should piping system os aeraoal reasonable case worst a . Document Number: Document foreseeable Doc. Date: 4400B single point single DRAFT 100 4/9/2018  4400B SEMI % of %  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and A5.3.1 A5.3.1 A5.3 as system notunder silane condition. ignite such may situations. some 94: NOTE within the flammable areas all across A5.2.1.2 of to levelthe at least one-half down a A5.2.1.1 preventcan the 93: NOTE A5.2.1 A5.2 cantaken. be actions A5.1.2 byworkers. andseen heard A5.1.1 A5.1 on( procedures NOTICE Monitoring Gas 5 APPENDIX reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This A5.3.4.2 detectiongas-leak system. 96: NOTE detector. volume) be(or to monitored by each A5.3.4.1 points orthea normal service,detection mightrelease. when detect not maintenance A5.3.4 A5.3.3 95: NOTE technology, A5.3.2 gas    or vapor to detect leaksequipmentgas within detect to in fromor detectsystem the the cylinder, atwill piping locationsthat leaks gasin cabinets Leak Installation Detection Flammable General valve Gas should detectors placed:Leak also be detection the to appropriate intervals at points detection with installed be should system detection leak A gravity specific of byconsidering should detectionthe determined patterns, The points airflow location of be Leak appropriate that so location attended constantly a at provided be should alarms visual and audible Remote alarms visual and Audible A detection point is a collection opening for a suction type gas leak detection system or a detector for a diffusion-type a for detector a or system detection leak gas type suction a for opening collection a is point detection A Some have regions regulations the of on installation leak detection. in detectors gas for limits detectable than lower levels at signature heat the detect to able be may detection UV/IR flow air as rate flow air ventilation exhaust high with cabinet gas a in leak detect to effective be not may detector Heat : The material in this appendix is an official part of SEMI of part official an is appendix this in material The : The coverage should be tested afterperformance. installation verify be to The should tested coverage area the and capabilities detector from determined be should points detection of location and number The used is detection UV/IR If Chemical detectors should be provided or specified for locations where potential exposure is anticipated during anticipated is exposure potential where locations for specified or provided be should detectors so that it is able to detect a reasonably itaso that ablereasonably is detect to equipmentheight., surrounding barriers, conditions, and manifoldboxes flammable for s can be detected directly with gas detectors or indirectly with heat or f or withdetectors heat indirectly with be directly gas can detected temperature However, UV/IR sensors may not detect leak when silane is leaking from high pressure container or piping or container pressure high from leaking is silane when leak detect not may sensors UV/IR However, date of approvaldate eeto detection Silicon Compounds Gas Monitoring Silicon Monitoring Gas Compounds rise. nwrigae area working in ). from a gas monitoring system system monitoring gas a from

for fire protection purpose protection fire for silicon compounds OEL panel enclosurespanel silicon compound silicon level. should be capable of detecting the flammable the detecting of capable be should foreseeable Page ' exhausted enclosure where leaks may occur. leaks may enclosure where exhausted for equipment using flammable equipmentusing for 46 leak gas distribution systems,gas and Practice , it should be designed to focus its detection beam detection its focus to designed be should it , should be provided at a location where they can be can they where location a at provided be should

in in exhaust cylinder ducts or storage. S18 and was approved by full letter ballot letter full by approved was and lame Document Number: Document detectors. silicon compounds silicon silicon compounds silicon Doc.

Date: 4400B DRAFT 4/9/2018  . 4400B SEMI  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and A5.5.3 A5.5.3 A5.5.2 be Inspection maintenanceshould system recorded. bythe gas and detection provided manufacturer. procedures A5.5.1 A5.5 during short-termbe fail-safe. interruptionfunction power or A5.4.9 §14.3.5. in referenced A5.4.8 A5.4.7 level. of or the warning alarm athe concentration concentrationabove which has leak, A5.4.6 A5.4.5 levels. DangerousLifeHealth) at leastto to (Immediately ½IDLH continuing and A5.4.4 used. be should regulation applicable an by set concentration the or practical technically concentration detectable lowest a for available not is value OEL the If level. concentration OEL at activated be should alarms, visual and audible and notifications activate do which Alarms, use. of country the of regulation applicable an in specified as or OEL below or to equal level concentration A5.4.3 of gas detected. is concentration A5.4.2 A5.4.1 A5.4 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 99: NOTE for section details. 98: NOTE 97: NOTE A5.5.4 Maintenance Leak Systems Detection Characteristics the toaccuracycriteria. shouldCalibration performed enough meet frequently be the following system intervals bythe specified detection manufacturer.The be should system calibratedat maintained and inspected periodically be should systems alarm and detection leak Gas its maintain to etc.) power, emergency UPS, (e.g., power up back have should system detection leak gas The valve off shut cylinder automatic the close should cabinet gas a in system detection leak the of Activation detection. varies continue is should until ifafter The the it concentration even alarm manuallyreset, a to point,detection the exposure of ofminute one within release, a detecting of capable be should Detection concentration. 30% producemorethe variationindicated not changein A should than 10%a voltage and OEL, the of ½ least at level a at beginning gas target the detecting of capable be should system The which Warnings, e use should systems detection Leak detectionbeLeak should systems fail The back up power should be periodically tested or inspected and the test inspection documented. tested and or be the or should inspected The uppower periodically back Gas detection be ducts by in required may regulation permits.or System Abatement the See breakthrough. detect to systems abatement some in detection gas for need a be may There The inspection,testing, the the and documentation be accordance must in with applicable any regulations. a r or may flammable silicon compound silicon flammable a o ciae te adbe ad vsa lrs hud b eeae t a at generated be should alarms, visual and audible the activate not may ffective detection that can generate warnings and alarms when a given a when alarms and warnings generate can that detection ffective - safe. Page 47 , or if the value is impractical for the system, the system, the for impractical is value the if or , Document Number: Document Doc. Date: 4400B DRAFT 4/9/2018  4400B SEMI  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and initiate the water spray system and should close emergency shutoff valves (ESOVs). ESOVs should be located be should ESOVs (ESOVs). valves shutoff emergency theas container ontheto sourceorpossible. as onthe piping, close directly close should and system spray water the initiate A6.2.2.3 container. 100: NOTE of thepurpose cooling system. A6.2.2.2 the cooling system.of A6.2.2.1 A6.2.2 and system detection fire systems.safety from power remove not should system detection fire the of Activation 2: EXCEPTION such fire system. Maintenance 1: of detection the EXCEPTION whether determining for guidelines for S14 SEMI See modes. and areappropriate systems maintenance in or down shut are facilities A6.2.1 A6.2 A6.1.1 A6.1 ( NOTICE Detection, Fire AlarmSystemsand Suppression, 6 APPENDIX reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This to be theshould used determine A6.2.3 date of date approval FireDetection and AlarmSystems Fires within valve manifold boxes (VMBs) may impinge on other lines within the VMBs. VMBs. the within lines other on impinge may (VMBs) boxes manifold valve within Fires andSuppressionSilane forFire Detection Bulk Systems Fire with theaccordance SEMIS2. facility to in Alarms connect should : The material in this appendix is an official part of SEMI of part official an is appendix this in material The : Activation of the optical flame detectors, detectors, flame optical the of Activation system spray water a by protected be also should areas panel control and station regulator The system silane bulk any for provided be should system spray water fixed automatic An NFPA 318 provides a method to calculate the design density, area and duration appropriate to the surface area of the of area surface the to appropriate duration and area density, design the calculate to method a provides 318 NFPA d etection and suppression system(s) should be operational at all times, including when equipment or equipment when including times, all at operational be should system(s) suppression and etection ). SEMI S2 SEMI S uppression uppression need for fire protection. fire for need for designingthem. for S ystem heat detectors, heat-link activators, or or activators, heat-link detectors, heat Page 48 S18 and was approved by full letter ballot procedures on procedures ballot letter full by approved was and Document Number: Document manual activation, should activation, manual only only Doc. Risk Risk for for Date: 4400B only only the the assessment DRAFT purpose 4/9/2018  for for 4400B SEMI the  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and monochlorosilane tetramethylsilane trimethylsilane dimethylsilane monomethylsilane Trisilane Disilane Silane silane trimethylchloro silane dimethyldichloro silane methyltrichloro silane methyldichloro methylchlorosilane trichlorosilane dichlorosilane Table R1.1 Table R1.1 information NOTICE Used andCommonly in FPD, ManufacturingSemiconductor, PV PhysicalChemicaland ofFlammable CompoundProperties Silicon 1 RELATED INFORMATION reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This "Gas 10298 ISO the in equivalency HCl on based toxicity chlorosilane estimate to study this a –Determination working ofor gas mixture" cylinders group. toxicity gas accepted and reviewed have US and Europe #4 #3 #2 #1: h 06DwCrigSuyhsdtrie htthat determined has Study Corning Dow 2006 The : have assumed the In whichbyproduct level,TWA anusers for absence the of many is hydrolysis the HCl established : :

CG: Compressed gas,CG: Compressed LG: In the absence of an established level, many established haveTWA adopted forIn level, the an users absence silane of the Name hs rltd ifrain i o n ofca at o SEMI of part official an not is information related This : Physical and Chemical Properties ofFlammableSiliconCompounds Physical andChemicalProperties ). This related information was by This publication approvedfor ). information related - - - - Si(CH SiCH SiCH SiCH SiHCl SiH SiH Si(CH Si(CH Si(CH SiCH Si Si SiH Si(CH Chemical 3 2 formula H H 2 3 4 Cl Cl 8 6 3 3 3 3 3 Cl Cl ClH H 3 3 3 3 3 Liquefied 2 ) ) ) ) ) 4 4 3 2 3 2 3 2 H H Cl Cl H 2 2 2 75-77-4 75-78-5 75-79-6 75-54-7 993-00-0 10025-78-2 4109-96-0 13465-78-6 75-76-3 993-07-7 1111-74-6 992-94-9 7783-26-8 1590-87-0 7803-62-5 CAS Number gas, L:Liquid gas, L L L L L L LG LG L LG LG LG L LG CG Form c hlorosilane toxicity can be predicted based on HCl equivalency. Toxicologist from Toxicologist equivalency. HCl on based predicted be can toxicity hlorosilane #1 0.037 0.345 N/A 0.015 0.015 0.018 0.047 0.018 0.065 0.160 0.561 0.080 0.168 0.385 1.296 Pressure @20ºC @20ºC [MPa] Vapor Page 49 unk 2.2 1.1 3.8 4.5 5.2 4.0 unk 4.7 3.5 2.34 unk 2.66 unk 1.6 Relative to Relative Air Vapor Density Vapor @20ºC . letter ballot unk -75 -100 -50 400 425 395 345 230 unk 215 185 58 <30 325 245 unk unk S18 [ºC] AIT n a eie rm ( from derived was and unk 0.5? 1.4 2.0 3.4 7.2 3.1 unk 6.9 4.7 4.1 4.8 4.6 0.9 1.4 unk 1.3 LFL [%] on( Document Number: Document unk 99.8? 96 6.4 10.4 11.9 70.0 unk 80 96.0 98.8 94.0 98.0 36.5 51.3 unk 88.0 date of approvaldate UFL [%] #2 #2 5 #3 #3 #3 #3 #3 #3 #3 #3 #2 #2 #2 #2 . Doc. [ppm] TLV- TWA Date: 4400B unknown unknown : 19,200 3262 1629 1066 1785 2810 : 2767 1629 314 3262 unknown unknown unknown unknown Toxicity ). DRAFT LC50 (1 rgn of origin hr,rat) [ppm] Acute 4/9/2018  #4 #4 #4 #4 4400B s SEMI

 LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Jean, P. A., Gallavan, R. H., Kolesar, G. B., Siddiqui, W. B., Oxley, J. A. and Meeks, R. G. “Chlorosilane Acute Inhalation of 2006 an ToxicityPredictionModel” Toxicology,18:515–522, Development LC50 Inhalation and “Chlorosilane G. R. Meeks, and A. J. Oxley, B., W. Siddiqui, B., G. Kolesar, H., R. Gallavan, A., P. Jean, reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Page 50 Document Number: Document Doc. Date: 4400B DRAFT 4/9/2018  4400B SEMI  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and to ALL types of controls, including fire protection, leak detection, ofprotection,monitoring. and fire controls,leak safety ALLprocess including to types criterion This mixture. the igniting of capable be not should devices control the failure, credible single, a of R2.1.4 features: compound the ensures that R2.1.3 being monitored. they control, they R2.1.2 R2.1.1 R2.1 information NOTICE Safety ControlSilane Systems 2 RELATED INFORMATION reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This 4. 3. 2. 1. R2.1.3.1 4. 3. 2. 1. Require review and approval by a supervisory entity before it be supervisoryonline. can placed before reviewandby a entity approval Require and a aschange), errorswant make keystroke (such asking accidental ifto you to really tolerance Have versionactive be in systems, versioncan installed before controller testing the Require personnel, byunauthorized fromProtected access it be supervisoryonline. can placed before reviewandby a entity approval Require and a aschange), errorswant make keystroke (such asking accidental ifto you to really tolerance Have versionactive be in systems, versioncan installed before controller testing the Require personnel, byunauthorized fromProtected access SilaneSafetyControl Systems In In counters cycle and transducers, pressure as such Devices that system delivery gas the of status the monitor continually to Systems Control Safety Silane for order In systemsThese hs rltd ifrain i o n ofca at o SEMI of part official an not is information related This : s locations where ignitable mixtures of air and flammable gas can form in normal operation or as the result the as or operation normal in form can gas flammable and air of mixtures ignitable where locations otold otae(imae htmntr h aafo uhdvcsdevices such from data the monitors that (firmware) Software controlled. Software (firmware) that monitors the data from such the data devices (firmware)monitors Software that from ). This related information was by This publication approvedfor ). information related ausvalues should should be connected to devices that provide real-time information on the parameters of the system the of parameters the on information real-time provide that devices to connected be (pressure, counts, etc.) are within the safe operating limits for the flammable silicon flammable the for limits operating safe the within are etc.) counts, (pressure, be fail-safe and fault-tolerant in order to performeffectively. andorderto be in fault-tolerant fail-safe Page 51 should letter ballot should operate in conjunction with the software the with conjunction in operate S18 n a eie rm ( from derived was and have thefeatures: following have on( Document Number: Document date of approvaldate hudshould have the following the have Doc. Date: 4400B ). DRAFT rgn of origin 4/9/2018 applies  4400B SEMI  LETTER (YELLOW) BALLOT Informational (Blue) Ballot1000A (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and this safety guideline. Users of this guideline are expressly advised that determination of any such patent rights or rights patent such rights their of theowncopyrights, risk ofsuch responsibility. infringement areentirely and any of determination that advised expressly are guideline this of Users guideline. safety no this takes (SEMI) International in mentioned Materials item any with connection in asserted and copyrights or rights patent any of Equipment validity the respecting position Semiconductor guideline, safety this of publication By to withoutsubject notice. change are guidelines safety These herein. mentioned equipment or materials any respecting literature, relevant other and sheets, data product labels, product instructions, manufacturer's to refer to cautioned are Users user. the of responsibility the solely is guidelines safety the of suitability the of determination The application. particular any for NOTICE: reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This SEMI makes no warranties or representations as to the suitability of the safety guidelines set forth herein forth set guidelines safety the of suitability the to as representations or warranties no makes SEMI Page 52 Document Number: Document Doc. Date: 4400B DRAFT 4/9/2018  4400B SEMI  LETTER (YELLOW) BALLOT