Pump S Vibration Absorption

Vibration Isolation for Vacuum Pumps January 22

PRODUCT DESIGN SPECIFICATIONS REPORT 2011

Sponsoring Company: Team Members: Edwards Vacuum Ltd Ron Pahle Khoa T. Tran Contact Engineer: Duc M. Le Mark Romeo Thanh Q. Nguyen Shafi ? Advisor: Dr. Dave Turcic Table of Contents 1. Project Background

Undesired noise and vibrations are a major problem in many engineering activities and domains. At Edwards Vacuum Ltd., vibrations from vacuum pumps present problems to their customers at Intel Corp. Multiple vacuum pumps are used for atmospheric control in sensitive manufacturing processes such as microchip fabrication. These vacuum pumps are seated on a rigid steel frame within a limited space requirement (Fig. 1). These pumps propagate vibration waves through the rigid frame to the floor and other piping fixtures attached to the frame. Those vibrations add unwanted noise which adversely affects the microchip fabrication operations at Intel.

Vibration isolation can be passive, active or semi- active. Passive vibration isolation is implemented by proper structural design to make sure the optimal dynamics properties, namely the stiffness and damping properties, are achieved. Active vibration isolation can be performed by measuring the sources of vibration and generate a controllable force to compensate that vibration. Active vibration isolation involves typical feedback control systems which require sensors, micro-computers and power actuators. Semi-active vibration isolation is also an active control system but instead of generating power to the structure, this type of system seeks to control the damping and/or stiffness dynamically through the use of innovating material like magnetically active fluids or piezoelectric components. This approach results in less power consumption and higher space constraints. All approaches will be explored, discussed and evaluated on the criteria of cost, performance and space requirements.

2. Purpose of the Product Design Specification Document

The product design specification document must clearly define design criteria, metrics, targets, priorities and customer needs. Some prominent criteria include: cost, percentage reduction in vibration, size and service life. A detail list of criteria is provided in Appendix A. The team and our customer are to agree on this document as a principal guideline for product delivery. This document will be referred to in case of dispute over product’s performance or related issues.

3. Mission Statement

Derive a solution to minimize the vibration propagated from the pump system through the steel frame and surrounding workplace. This is meant to reduce any interference the pumps vibration has on sensitive manufacturing equipment above the pumps. There are a variety of constraints that will be addressed including seismic regulations, environmental cleanliness, and space limitations. Our customers for this solution will be Edwards Vacuum Ltd. and their correspondents at Intel. The solution will be needed for full scale testing by May ?, and a finalized design to be due on June ?.

4. Project Plan

The details of the projects timeline are detailed in the Gantt Chart which is shown in Appendix B. This timeline was constructed based on deadlines provided by ME492 and by Mark Romeo of Edward Vacuum Ltd. The main features of this plan include the Product Design Specifications, External and Internal Research, Design Evaluation, Prototyping, and Evaluation.

5. Customer Identification

The main external customer of this project is Edwards Vacuum Ltd. The other external customers are companies that operate the system and machine technicians responsible for operation and maintenance of the pump system.

The main internal customer of the project is capstone courses ME 491/492/493. Other internal customers are PSU department advisors and team members.

6. Customer Interview and Feedback Summary

The initial meeting with the sponsor took place during the ME 491 course. Another meeting and tour at Edwards Vacuum’s facility was held later, where the general design specifications were discussed. Some technical and functional requirements were determined in the interview with Mark, engineer from Edwards Vacuum Ltd as followed: 1. The system must reduce vibration from the pump to the ground and from the pump to the pipes.

2. The vibration absorbing system needs to be compact enough to fit the size of the existing frames.

3. The system should work for a variety of pump speeds (frequencies from 30 – 150 Hz).

7. Product Design Specification The Product design specification is the most important part of this report. In this section, all the criteria related to the product are listed down with their priority. Those criteria has been discussing and developing by the team basing on requirements from sponsor as well as advices from expert. The idea of this PDS is to help describe the general picture of how the final product would be.

Criteria Priority Page Performance High 5 Environment High 5 Life in service Low 5 Cost of production per part Medium 6 Size Medium 6 Weight Low 6 Maintenance Low 6 Installation High 6 Ergonomics (Ease of operation) Low 6 Materials High 6 Quality and Reliability High 6 Documentation High 6 Competition products Medium 6 Timelines High 6

Table 1: Applicable PDS criteria and page. Legend: High priority Medium priority Low priority

PERFORMANCE Priority Requirement Customer Metrics Target Target basis Verification Vibration reduction Edwards % 25-75 Edwards required Prototype Power consumption Edwards Watt 0 Edwards required Prototype Ease of use Edwards N/A Totally passive Edwards required Prototype operation Life in service Edwards Years 10 Edwards required Design

ENVIRONMENT Priority Requirement Customer Metrics Target Target basis Verification Clean room compatible End user yes/no Clean room End user required Design qualified Eco friendly product Self yes/no Green Self interest Design material

SIZE, SHAPE AND WEIGHT Priority Requirement Customer Metrics Target Target basis Verification Size Edwards yes/no Fitting within Ergonomic Prototype the frame Weight Edwards/ lbs < 100 Product portability Prototype Self

INSTALLATION AND MAINTENANCE Priority Requirement Customer Metrics Target Target basis Verification Time to Edwards Minutes < 15 Product Prototype assemble/disassemb complexity/ le Edwards required Tool requirement Edwards Number of 0 Product Prototype special tool complexity/ Edwards required Mechanical Edwards Yes/No Yes Edwards required Prototype compatibility Maintenance Edwards Number of 0 Edwards required Testing frequency maintenanc e per 10 years

MATERIAL Priority Requirement Customer Metrics Target Target basis Verification Clean room End user Yes/No Clean room End user required Design compatible qualified materials Reasonable price Self N/A Inexpensive Budget Design Easy to machine Self N/A Can be Self/Expert Prototype machined in the machine shop

COST Priority Requirement Customer Metrics Target Target basis Verification Price per pump Edwards $ < 1000 Edwards required Design Testing equipment Self $ < 3000 Budget/Expert Testing DOCUMENTATION Priority Requirement Customer Metrics Target Target basis Verification PDS PSU Deadline PSU Report Progress report PSU Deadline PSU Report Final report PSU/ Deadline PSU/Edwards Report Edwards Timeline Self/ Deadline Self/Edwards Report Edwards

8. House of Quality

9. Conclusions

10. Appendix A. PDS B. Gantt Chart

11. Glossary of Terms

Because design specifications are highly specialized and technical documents, a glossary of terms affords a consistent application of the technical language.