Background Statement for SEMI Draft Document 4688B

Background Statement for SEMI Draft Document 4688B NEW STANDARD: MECHANICAL SPECIFICATION FOR 450MM AMHS STOCKER TO TRANSPORT INTERFACE

Note: This background statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this document.

Note: Recipients of this document are invited to submit, with their comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, “patented technology” is defined as technology for which a patent has issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background This document is being developed to define the mechanical interface between stockers and transport components (i.e. OHT, OHS and conveyor) of a 450mm Automated Material Handling System (AMHS). To accommodate differences between transport systems, this document defines multiple interface options. This specification is intended to enable interoperability between AMHS components supplied by multiple vendors. When both stocker and transport components are supplied by the same vendor, the interfaces defined in this document may not apply. Although the ballot for Doc 4688A did not receive any negatives, the TF decided to withdraw it for further work, in light of some comments that could not be corrected by editorial change. All comments from the ballot have been considered by the TF. Changes from 4688A that appear in this document include the following:  editorial changes for clarity of meaning  several additions to the definitions in Terminology  definitions in Terminology edited for consistency with referenced standards  items in Terminology sections listed in alphabetical order  labeled load face plane in relevant figures  definitions of several dimensions in Table 1 were clarified Note: The documents highlighted in this document have been approved by the Physical Interfaces and Carriers committee and are awaiting Letters of Assurance on certain intellectual property matters. Consequently, SEMI Standards designation numbers have not yet been assigned, but will be upon receipt of such letters. If this document is approved prior to the receipt of the Letters of Assurance, it will be held for publication along with the documents in question until the Letters of Assurance are received. This formal letter (yellow) ballot will be discussed and adjudicated at the SEMI NA Spring 2010 Standards Meetings taking place in San Jose, CA, March 28-April 1, 2010.

i Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 2.2 transport to equipment manufacturing SEMI semiconductor mm 450 of interfaces physical covering 2.1 2 systemfollows: and the stocker with. both transport comply that areas must defined interfaces Options of types defining different by done is This between factory. the throughout found requirements handling interfaces material different the physical the define that dimensions transport and features required the provide to 1.1 1 TO TRANSPORT INTERFACE STOCKER STANDARD: FORMECHANICALSPECIFICATION 450MMNEW AMHS Draft Document SEMI reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This NOTICE: 450MM STORE SEMI SEMI 4.1 4 not this in intentionally listed standard. equipmentare and which stocker or may the interfacing Thoselimit competitiveness stocker. of areas FOUP therequirement minimum specifies standard 3.3 This transport defining option. that using system transport 3.2 handFOUP specifies only It system. transport 3.1 3 of priorapplicability regulatorylimitations use to responsibility   conceptual port. The  AshownOption is in  Purpose Referenced StandardsReferenced Limitations Scope 450 of interfaces physical covers standard This of ports load the for requirements dimensional the defines specification This SEMI Standards andDocuments Standards SEMI this of option Each 450 of type every that specify not does standard This Option D Option C Option A Option Option B Option This specification does not does specification This Exxx Exxx Eyyy The dimensional NOTE: equipment and stockers and to facilitate the use of different automated transport systems in order to meet to order in systems transport automated different of use the facilitate to and stockers and equipment Unless otherwise indicated, all documents cited shall be the versions. latestpublished otherwise documents all cited be shall Unless indicated, — — MECHANICAL SPECIFICATION FOR SPECIFICATION MECHANICAL — off

of the users of this specification to establish appropriate safety and health practices and determine the determine and practices health and safety appropriate establish to specification this of users the of

. MECHANICAL INTERFACE SPECIFICATION FOR INTERFACE MECHANICAL

Passive : Passive : Transport Active : : WAFERS (450 FOUP) AND KINEMATIC COUPLING FOUP)WAFERS AND (450 KINEMATIC system Active transport Active The FOUP isThe door Figure 1. illustration FOUP is to door parallel specification specific Transport Transport Transport requirements of Option shownFigure 2. is in of B interface

( upr oades aeyise,i n, soitdwt t s. I i h the is It use. its with associated any, if issues, safety address to purport T ( four four 4688 e.g. defines the minimum interface requirements between a stocker load port and a and port load stocker a between requirements interface minimum the defines he he ( ( e.g. parallel e.g. e.g. active OHS) active stocker different options of physical interface physical of options different OHT) conveyor) carries a FOUP internal port carries stocker a to/froman conveyor) FOUP carries OHS or port a to/fromstocker conveyor) passive dimensions dimensions B to the stocker. Option C Option the stocker. shownFigure to is in 3. of Option B arecovered SEMI of B in Option

user and AMHS suppliers suppliers AMHS and user picks or places places picks or the .

stocker. Option DshownFigure 4. Option is in stocker. s loads a FOUPloads a and adequate conditions having andfor adequate OPsokrt rnpr transport to stocker FOUP Page that

FAB WAFER WAFER FAB FOUP jn l jn

are not 2 a FOUP stocker has to interface with every type of 450 mm 450 of type every with interface to has stocker

defined in defined standard. this horizontally

450 mm vertically CARRIER should . .

LOAD PORT LOAD Exxx. This standard only specifies single specifies only standard This to an internal stocker stocker anto internal 450 FOUP 450 to jointly own the the own jointly equipment USED TO TRANSPORT AND TRANSPORT TO USED /from Document Number: 4688BNumber: Document an an an an

stockers. It is intended is It stockers. interface tointerface . external Similar requirements Similar Doc. 4688B Doc. 4688B

Date: 01/11/2010Date: equipment are in are equipment responsibility location four four

s load port. tocker tocker a location 450 options of options . DRAFT load 

SEMI of .  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and 5.2.5 primary [SEMI pins. KC front the with coincident 5.2.4 onthe transport. located 5.2.3 aisle the fab load portstocker and 5.2.2 [SEMI wafers. 5.2.1 5.2 5.1.6 5.1.5 5.1.4 5.1.3 5.1.2 5.1.1 5.1 NOTE 1: 5 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This while rail transport of top on supported typically is OHS An another. to hoist(OHT) transport overhead equipment of piece one from carrier 5.2.11 equipmentis the equipmentwhere sides)of ontheloading side intended (or the of centroid 5.2.10 the stocker. in cutout 5.2.9 Exxx pins. coupling kinematic three the of (tips) points uppermost the of location nominal the with coincident FP), 5.2.8 Note 5.2.7 centerlineof kinematicpins. thecoupling three the center with ofby the defined circle coincident 5.2.6 onthe stocker).ledge Terminology Definitions and AcronymsAbbreviations : These are the carriers specified in SEMI in specified arethe carriers These : ] external stocker load port load stocker external ( plane Bilateral system transport active (LB) boundary load stocker 450 FOUP 450 OHT OHS HP FP BP AMHS internal stocker load port load stocker internal ( plane horizontal FOUP ( plane facial overhead shuttle ( shuttle overhead For many of the used terms, For of terms, many used the odfc ln — plane face load

— — —

— — Facial Plane Facial plane Bilateral H — as used herein, a 450FOUP. —as used a herein, Handling Systems —Automated Material Overhead Hoist Transport Transport Hoist Overhead Overhead Shuttle Overhead orizontal orizontal Exxx — used generally as a ”term” only to identify the front-opening carrier used in fabs for 450 mm 450 for fabs in used carrier front-opening the identify to only ”term” a as generally used — FP nominal location of the rear primary KC pin, and midway between the nominal locations of the of locations nominal the between midway and pin, KC primary rear the of location nominal ] BP )

HP P — ) lane OHS

a vertical plane, defining y=0 of a a of y=0 defining plane, vertical a — )

— — a transport system that transfers a a transfers that system transport a — a vertical plane, defining x=0 of a system with three orthogonal planes orthogonal three with system a of x=0 defining plane, vertical a the furthest physical vertical boundary plane from the cassette centroid or carrier or centroid cassette the from plane boundary vertical physical furthest the ) see Exxx] a a

vehicle — a load port that is external to the stocker equipment boundary (such as a shelf or shelf a as (such boundary equipment stocker the to external is that port load a — — — — SEMIxxx E horizontal plane, defining z=0 of a system with three orthogonal planes (HP, BP, (HP, planes orthogonal three with system a of z=0 defining plane, horizontal an AMHS vehicle that do that vehicle AMHS an a load port load a — a plane parallel to the facial plane establishing the bound the establishing plane facial the to parallel plane a — s hang from underneath the from underneath the s hang . Eyyy. that is recessed from the stocker equipment boundary (a cavity or cavity (a boundary equipment stocker the from recessed is that

jn l jn 3 es system not use a vertical hoist mechanism to transfer the transfer to mechanism hoist vertical a use not transport carrier with three orthogonal planes orthogonal three with rail. to and from a load port using robotics using port load a from and to

Document Number: 4688BNumber: Document . [SEMI [SEMI Doc. 4688B Doc. 4688B Date: 01/11/2010Date: a (HP, BP, FP) BP, (HP, ry between the between ry (HP, BP, FP) BP, (HP, Exxx

[SEMI DRAFT  ] SEMI , ,  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and delivery from the transport using the secondary set of kinematic pins kinematic of set secondary the using transport the from delivery HP the below volume FOUP the on grooves mating KC the utilizing 6.3.1 or be bescale. to dimensionally and intendedcontainaccurate illustrate thearenot to requirements, options (¶ 6.3 feature alignment and registration the by determined is plane horizontal the in specified the FOUP the loadSEMI port, as and between in tolerance The port. load the on 6.2 Figuresillustrated in 6.1 6 5.2.17 locationin stocker a load port 5.2.16 load 5.2.15 5.2.14 loadthe porttransport. to the equipment 5.2.13 headsfactory personnel. over of floor the 5.2.12 reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This includes This stocker. the for volumes exclusion the position, port stocker This transport. the for volumes exclusion the includes with compatible are that features handling standard SEMI the use a by position port stocker internal 6.3.4 the of FOUP Figure in shown volume 3 (all pins coupling the the includes This transport. the for volumes exclusion the with compatible are that features handling FOUP (e.g. 6.3.3 dimensions SEMI in and volumes, aredefined an from delivery vertical facilitate to above from open is port load stocker internal to/from FOUP the move to device transfer active an with equipped 6.3.2 – volume exclusion the below volume exclusion central The stocker height the exclusion for An reserved are port. door the to closest pins coupling kinematic primary two the features, handling FOUP D1), width (A2+A width D1), 6.3.1, 6.3.1, Requirements primary primary port location. AMHS equipment load ports on450 AMHS equipmentload are placed they time the tilt at nominal zero with up horizontally face oriented be are to the FOUP in wafers The The

passive OHS OHS passive In Option A, a A, Option In In Option D, D, Option In an B, Option In transport system n but , crane stocker stocker system transport passive ( transporthoist overhead In Option Option In OPsalb oddadulae ihwith unloaded and loaded be shall FOUP ¶ the conveyor rail on the FOUP bottom FOUP the on rail conveyor the tce otrbt robot port stocker 6.3.2, 6.3.2, transport systemtransport kinematic coupling pins (allkinematic pins 3 coupling o open volume internal to the stocker is requiredis stocker the to internal volume open o — an AMHS storage device. device. AMHS storage —an ¶ 6.3.3 or or 6.3.3 below the HP has a a has HP the below C or conveyor or , the FOUP is oriented with the FOUP FOUP the with oriented is FOUP the , the FOUP is oriented with the FOUP FOUP the with oriented is FOUP the 2 pins pins 1, n active transport active n ) from that point to a distance D3 away from the FP total (D+D3). thatwith D3 afrom ) away . to depth distance of from point — below as - H OHT 4. tce rnfraetagent transfer stocker accessible) to transfer the FOUP. The FOUP. the transfer to accessible) ¶ 3 stocker shown in Figure 1. This exclusion volume in the stocker load port facilitates FOUP facilitates port load stocker the in volume exclusion This 1. Figure in shown — the component of AMHSmoves that material —the component 6.3.4

to allow for the stocker stocker the for allow to above above

— the . loads . ) ). The dimensional requirements for the configurations are in Table 1. Figures 1-4 Figures 1. Table in are configurations the for requirements dimensional The ). robot for transport transport for robot for pickup by by pickup for — a transport system that requires the equipment to transfer the the transfer to equipment the requires that system transport a — HP is HP crane shall crane OHT the FOUP, the passive transport system (e.g. C (e.g. system transport passive /unloads height ) defined by dimensions H by dimensions defined —

( FOUP

a ctive OHS) OHS) ctive a rail guided vehicle and hoist used to transport material above the factory above material transport to used hoist and vehicle rail guided a pins pins HP is defined by dimensions H1, A1, A2 A1, H1, dimensions by defined is HP a FOUP to FOUP a H1, H1,

use the SEMI standard handling features that are compatible with the with compatible are that features handling standard SEMI the use

defined defined Exxx the . accessible). The stockeraccessible). , and the primary kinematic coupling pins (all 3 pins) 3 (all pins coupling kinematic primary the and , stockers mustone to of stockers options conform the configuration following The stocker load port must therefore maintain the center exclusion center the maintain therefore must port load stocker The that moves that width width

stocker the secondary kinematic coupling pins (all 3 3 (all pins coupling kinematic secondary the , Options B,C. or A, of the the of port robot robot port h ordoor the by dimension C dimension by Page loads (A1+A1) extending from the load face plane to a distance (D distance a to plane face the load from extending (A1+A1) /from port robot port door parallel to to parallel door door parallel parallel door Exxx jn l jn carrier to/from to/from carrier /unloads c 4

an external an as in as arriers

transport system transport . parallel to and away from the load face plane as plane face load the from away and to parallel to use the secondary kinematic pins to transfer the transfer to pins kinematic secondary the use to 1, Figure 1, Option A. The center exclusion volumeexclusion center The A. Option 1, Figure onveyor A2 a FOUP to FOUP a OHT ewe between . In option option In . . Although the stocker may use any of the other the of any use may stocker the Although and D4. and , allows for clearance during FOUP transfer FOUP during clearance for allows , port robot to the load face plane plane face load the to . The stocker load port features, exclusion features, port load stocker The .

the load face plane for plane face load the vehicle ) tce stocker

. . from one part of the factory to another. another. factory partto from of one the In In stocker storage location and internal and location storage stocker C, the the C, O

/from must maintain the center exclusion center the maintain must ption ption or conveyor and from/to internal from/to and conveyor or

shall shall load port load storage locations. The stocker The locations. storage a nenlsokrstocker internal an , D, D1 D, , Document Number: 4688BNumber: Document transport system system transport D, the the D, use the secondary kinematic use h tce utmust stocker The . transport system system transport central The D3. and on on pins pins transfer to/from to/from transfer Doc. 4688B Doc. 4688B carrier a passive transport passive a Date: 01/11/2010Date: accessible). . At the internal the At . shall shall to and from and to load port load use the use u DRAFT  se of se shall SEMI

For an be .  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and D1 A1 1 arein dimensions All Table 1 the stocker dimension the in installation system transport reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This H2 H D5 D4 D3 D D C A3 A2 User to specif User to Dim 1 2 transport obstruction the on stocker installation D passive transport the sitting FOUP kinematic coupling from of pins, measured FP transport centerfor pickup the usg secondary Depth cavity cutoutof or in passive the plane on the of sitting onthe the FOUP kinematic pins coupling the pickupsecondary using for center Depth of the of Height faceload plane. position the transfer on transport to system the D por stocker sitting the position the FOUP at transfer on pins coupling pickupcenter using secondary the kinematic Depth the transportor passive (Option D). FOUP the sitting D transport C,D). passive (Option on stocker (Option or sitting the port A) the measured the FOUP from H about (symmetric the BP). the installation transport Width pins aboutcoupling (symmetric the pickupcenter using secondary the kinematic W the about BP). transfer from D1 HP the of centralWidth the exclusion volume below HP to nearest HP the transport passive installation height exclusion Minimum of volume for C,D) ( Dimensional Requirements for 450 mmAMHSLoadPorts Dimensional Requirementsfor450 Option epth exclusion of volume passive for transport istance from istance the from istance the face load plane to of nearesteight the stocker obstacle the above idth of centralidth the exclusion used volume for A3, A3, nearest system and is defined bydimensions and system defined is D4. A2, H1and y . of central the exclusion used volume for of FOUP sitting the FOUP on exclusion the central used volume of which option (see §6). which(see option of stocker por stocker from the facefrom load plane a to distance position A) the transport ( OR system C, C,

exclusion the of FOUP at FP a sitting the the on stockerobstruction the t measured the facetoward load plane H2 exclusion below volume the measured from measured , D , mm unless otherwise indicated unless otherwise mm the port on stocker (symmetric

on stocker (Option the port A) at transfer at position obstruction on obstruction Definition FP and D5. For pickup of the FOUP by the stocker crane an exclusion volume is required in required is volume exclusion an crane stocker the by FOUP the of pickup For D5. and

t volume away from the load face from away the load from FP the to measured of the top of FOUP top the

measured from FP stocker load stocker port passive for FOUP transfer transfer measured the from BP the to stocker.the FP the of sitting at sitting BP the the FP on the on Option from the position . ) nearest

HP an exclusion volume is volume exclusion an of the s N/A 156(min) 183(min) N/A 200(min) N/A N/A 245(min) N/A 245(max) 295(max) 80(min) Page Option A Option jn l jn 5

N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A 1 Option B Option

required in the stocker and is defined by defined is and stocker the in required 2 80(min) N/A 156(min) N/A N/A 200(min) N/A 175(min) N/A 380(max) N/A N/A Option 4688BNumber: Document C Doc. 4688B Doc. 4688B Date: 01/11/2010Date: 500(min) 156(min) N/A 300(min) 200(min) 245(max) 175(min) 295 80(min) N/A N/A N/A Option D (max) DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Active Transport in dimensions SEMI Bspecified forare 2 All Option reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This ( Kinematic CouplingKinematic Pin Pick-Up) Option A - FP A - H1 C (e.g. active OHS) active (e.g. horizontally A A2 A 1 A2 H 1 1 200 (min) A - A’ A’ - A View primarysetof couplingkinematic pins. v Top viewofNOTE1: central exclusion olume. the olume. - - BP BP A1 (min) A1 - - 183 s A2 A2 A A tockeruses the 1 1 Exxx AMH -HP- D1 S

LoadOption A Port d A2( elivers aFOUP to an elivers 156 Figure 1 Figure min Page A’ transport Active ) jn l jn D 6 C (min) 80

i nternal D (max) D 295 s tocker Document Number: 4688BNumber: Document Active Active transport - D3 Option A Option FP - D1 (max) D1 load port load 245 coupling kine of uses Transport NOTE2: Doc. 4688B Doc. 4688B Date: 01/11/2010Date: Stocker s econdary set econdary matic matic pins. D3(min) 245 DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This Page jn l jn 7 Document Number: 4688BNumber: Document Doc. 4688B Doc. 4688B Date: 01/11/2010Date: DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and Active Transport reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This

( T h eg is is e.g. illustration . OHT)

picks or places picks is reference only. Actual dimensions are according only. dimensions is Actual are reference AMHS a FOUP

Load PortLoad Option B OptionB Figure 2 Figure Page jn l jn vertically vertically 8 to /from t ransport Active Active an external Document Number: 4688BNumber: Document to SEMIto

s tocker Exxx Doc. 4688B Doc. 4688B Date: 01/11/2010Date: load port. load DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and The Passive reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This designedwill NOTE ( Kinematic Coupling Pin Pick-Up) CouplingKinematic Pin of kinematic coupling pins. pins. coupling kinematic of secondary set uses robot Stocker NOTE1: A FOUP door is FOUP dooris

B 4 : Conveyor is: Transport Option , stocker interface to interface C only only ( parallel eg H1 s e.g. h NOTE3: (e own AMHS LoadOption Port . A2 g. vehicle unit lift conveyor or g. . passive OHS or Conveyor) carries a FOUP to/from stockerport position. passive carriesaFOUP Conveyor) to/from OHS or conveyor shouldconveyor in 3D illustration inillustration 3D to the stocker. to E xclusion volume in passive transportxclusion volume passive in Stocker Robot B -B’ View B Port A - A’ View A A’ - H 1 -BP- 200 (min) -BP- be added in this figure or option. addedin this be new in this

A2 9 ） figure coupling pins. kinematic of set primary usesconveyor the Vehicle or NOTE2:

-HP- C A2 (min) A2 to no Figure 3 Figure (Kinematic Coupling Pick-Up) (Kinematic Pin Page 156 fixed designconcept today. to stockerconveyor fixed interface of jn l jn 9 A’ Load FacePlane Load B’

C(min)

(e.g. OHS) D4 C transport Passive Passive Document Number: 4688BNumber: Document D 2 ( -FP- 380 D2 max ) (e.g. conveyor) Doc. 4688B Doc. 4688B Date: 01/11/2010Date: Stocker transport Passive robot port Stocker D4(min D4(min )

W 175 hen it hen DRAFT  SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and T Passive reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This exampleof The ( Kinematic Coupling Pin Coupling Kinematic he FOUP door is he FOUP dooris B Option Pick-Up) A Transport D lifting H1 ( parallel mechanism mechanism shown is eg e.g A2 AMHS LoadOption Coupling D Port Pick-Up) (Kinematic Pin (min) . 200 H1 conveyor -BP- to the stocker. to -BP- A3

B-B’ View A-A’ View pickup. volume transport passive Exclusion NOTE1: A3 ) carries a FOUP to/from anposition. ) stockerport carriesaFOUP internal (min) H2 300 in Related in A2 must H2 R1-1.2Information fr tce crane stocker for (min 156 A2 Figure 4 Figure ) Page -HP- jn l jn A’ Load FacePlane Load

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C (min) 80 C D4 -FP- (max) 295 Document Number: 4688BNumber: Document Passive transport Passive D (e.g. conveyor) D stocker stocker crane End effector of D5 (min) Doc. 4688B Doc. 4688B Stocker 175 Date: 01/11/2010Date: D4 (max) DRAFT  245 D5 SEMI  LETTER BALLOT Informational (Blue) Ballot1000AInformational (Blue) Ballot Ballot1000AInformational (Blue) (Blue) Informational Phone:408.943.6900 Fax: 408.943.7943Phone:408.943.6900 Fax: CASan 95134-2127Jose, 3081 Zanker Road Equipment Semiconductor InternationalMaterials and for Option D, although the locator could be rotated about a vertical axis by 90 degrees for Option vertical for couldaboutC. D,bea axis by Option althoughthe90degrees locator rotated for R1.1.3 the with R1.1.2 in defined interfaces the document mayapply.this not vendor, same the by supplied are components transport and storage both When vendors. R1.1.1 on byletterprocedure full publication ballot NOTICE: 1 RELATED INFORMATION reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other All activity. development) (document committee Standards International SEMI of scope the within reproduction without distribution and/or SEMIwritten the ofprior isprohibited.consent only part, in or whole in document, this distribute and/or reproduce to granted is Permission standard. adopted or official an as construed be to is page this on material No program. Standards International SEMI the of document draft a is This own suchresponsibility. infringementareentirely rights their the of risk of this in mentioned item any with connection in rights any copyrights, are expressly such determination and standard that of of patent or Users this standard. advised asserted copyrights or rights position patent no any of takes validity (SEMI) the International respecting Materials and Equipment Semiconductor standard, this of publication By other and notice.without change to sheets, subject are data standards These product herein. labels, mentioned equipment product or materials instructions, any respecting literature manufacturer’s relevant to refer to cautioned are Users user. the of responsibility the solely is standard(s) the of suitability the of determination The application. particular any NOTICE:

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