Safety Data Sheet Material Name: Fluorine Scrubber SDS ID: 0375 ()

SECTION 1: Identification

Product identifier Material Name Fluorine Scrubber Product Description The media contained in this product, when used as designed, under normal operating conditions, and installed and maintained according to product literature, is not expected to be hazardous. Classifications and hazards represented on this Safety Data Sheet are only applicable in the unlikely event that the purifier media is liberated from the filter housing. The purifier has sieves internal to the housing to prevent the media from escaping during intended use. Product Use Removal of halogenated gases from semiconductor manufacturing processes. Restrictions on Use For use with F2, Cl2, Br2, HF, HCl, HBr. Details of the supplier of the safety data sheet Entegris, Inc.

129 Concord Road Building 2 Billerica, MA 01821 USA

Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America)

Local Contact Information/maklumat tempatan untuk dihubungi Entegris Malaysia SDN. BHD. (Penang Office) Unit 14 and 15, Lower Level 5 (Executive Wing), Hotel Equatorial No. 1 Jalan Bukit Jambul, 11900 Bayan Lepas, Penang Malaysia

Telephone/Telefon: +60-4-427-4200 Fax/Faks: +60-4-641-3294

Emergency Phone Numbers/Nombor Telefon Kecemasan 1-800-815-308(CHEMTREC) 1-703-527-3887 (International/Antarabangsa)

E-mail: [email protected]

SECTION 2: Hazards identification

GHS Classification Skin Corrosion/Irritation - Category 2 Serious Eye Damage/Eye Irritation - Category 2 Specific Target Organ Toxicity - Single Exposure - Category 1 ( respiratory system ) Specific Target Organ Toxicity - Repeated Exposure - Category 2 ( respiratory system )

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Safety Data Sheet Material Name: Fluorine Scrubber SDS ID: 0375 (MALAYSIA)

Label elements Hazard symbols

Signal word Danger Hazard statements H315 Causes skin irritation. H319 Causes serious eye irritation. H370 Causes damage to organs. (respiratory system ) H373 May cause damage to organs through prolonged or repeated exposure. (respiratory system ) Precautionary statements Prevention P260 Do not breathe dust. P280 Wear protective gloves and eye/face protection. P264 Wash thoroughly after handling. P270 Do not eat, drink or smoke when using this product. Response P307+P311 If exposed: Call a POISON CENTER or doctor/physician. P321 Specific treatment (see label). P302+P352 IF ON SKIN: Wash with plenty of soap and water. P332+P313 If skin irritation occurs: Get medical advice/attention. P362 Take off contaminated clothing and wash before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P337+P313 If eye irritation persists: Get medical advice/attention. Storage P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Other Hazards Which Do Not Result in Classification In normal use, as installed and maintained according to product literature, this material in its final form is not expected to be hazardous.

SECTION 3: Composition / information on ingredients

CAS Component Name Percent

Proprietary Alkaline Earth Hydroxide 90-100

Proprietary Transition Metal Oxide 1-10 Impurities and stabilizing additives contributing to the GHS Classification None

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Safety Data Sheet Material Name: Fluorine Scrubber SDS ID: 0375 (MALAYSIA)

SECTION 4: First aid measures

Description of Necessary Measures Inhalation First aid is not expected to be necessary if material is used under ordinary conditions and as recommended. If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. Get immediate medical attention. Skin contact First aid is not expected to be necessary if material is used under ordinary conditions and as recommended. Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get medical attention, if needed. Thoroughly clean and dry contaminated clothing and shoes before reuse. Eye contact First aid is not expected to be necessary if material is used under ordinary conditions and as recommended. Immediately flush eyes with plenty of water for at least 15 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion First aid is not expected to be necessary if material is used under ordinary conditions and as recommended. If swallowed, get medical attention. Most Important Symptoms/Effects Acute respiratory tract irritation, skin irritation, eye irritation, respiratory system damage Delayed respiratory system damage Indication of any immediate medical attention and special treatment needed Treat symptomatically and supportively.

SECTION 5: Firefighting measures

Flammable Properties Negligible fire hazard. May generate heat on contact with water. Suitable extinguishing media Use extinguishing agents appropriate for surrounding fire. Unsuitable Extinguishing Media high-pressure water streams Specific hazards arising from the chemical Negligible fire hazard. May generate heat on contact with water. Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. Fire Fighting Measures This product will remain stable when housed in the purifier body. Combustion alkaline earth oxides

SECTION 6: Accidental release measures

Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. In normal use, as installed and maintained according to product literature, this material in its final form is not expected to be hazardous. Classifications and hazards represented on this Safety Data Sheet are only applicable in the unlikely event that the purifier media is

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Safety Data Sheet Material Name: Fluorine Scrubber SDS ID: 0375 (MALAYSIA)

liberated from the filter housing. The purifier has sieves internal to the housing to prevent the media from escaping during intended use. Environmental precautions Avoid release to the environment. Methods and Materials for Containment and Cleaning Up Eliminate all sources of ignition. Minimize dust generation and accumulation. Collect spill using a vacuum cleaner with a HEPA filter or wet and scoop up dry spills. Avoid sweeping spilled dry material. If sweeping of a contaminated area is necessary, use a dust suppressant agent. Do not touch damaged containers or spilled material unless wearing appropriate protective clothing. Prevent entry into waterways, sewers, basements, or confined areas. Stop leak if possible without personal risk. Keep unnecessary people away, isolate hazard area and deny entry. Eliminate ignition sources including sources of electrical, static or frictional sparks.

SECTION 7: Handling and storage

Precautions for safe handling Do not breathe dust. Wash thoroughly after handling. Wear protective gloves and eye/face protection. Do not eat, drink or smoke when using this product. Conditions for safe storage, including any incompatibilities Store locked up. Store and handle in accordance with all current regulations and standards. Store in a well-ventilated place. Keep container tightly closed. Keep dry. Keep separated from incompatible substances. Incompatible Materials Carbon dioxide. Minimize exposure to atmosphere.

SECTION 8: Exposure controls/personal protection

Exposure Guidelines Component Exposure Limits Alkaline Earth Proprietary Hydroxide

ACGIH: 5 mg/m3 TWA

NIOSH: 5 mg/m3 TWA

OSHA (US): 15 mg/m3 TWA total dust ; 5 mg/m3 TWA respirable fraction

Malaysia: 5 mg/m3 TWA

Transition Proprietary Metal Oxide

ACGIH: 5 mg/m3 TWA respirable particulate matter

NIOSH: 5 mg/m3 TWA as Fe dust and fume

10 mg/m3 TWA fume ; 15 mg/m3 TWA total dust ; 5 mg/m3 TWA respirable OSHA (US): fraction

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Safety Data Sheet Material Name: Fluorine Scrubber SDS ID: 0375 (MALAYSIA)

2 ppm TWA dust and fume, particulate matter containing no Asbestos and <1% Malaysia: crystalline Silica ; 5 mg/m3 TWA dust and fume, particulate matter containing no Asbestos and <1% crystalline Silica ACGIH - Threshold Limit Values - Biological Exposure Indices (BEI) There are no biological limit values for any of this product's components. Engineering controls Provide local exhaust or process enclosure ventilation system. Ensure that dust-handling systems (such as exhaust ducts, dust collectors, vessels, and processing equipment) are designed in a manner to prevent the escape of dust into the work area (i.e., there is no leakage from the equipment). Ensure compliance with applicable exposure limits. PERSONAL PROTECTIVE EQUIPMENT Eye/face protection Wear splash resistant safety goggles with a faceshield. Body protection Wear appropriate chemical resistant clothing. Hand protection Wear appropriate chemical resistant gloves. Respiratory Protection None necessary for normal use.

SECTION 9: Physical and chemical properties

Appearance white solid Physical State solid

Odor odorless Color white Odor Threshold Not available pH Not available Melting Point 580 °C Boiling Point Not available Boiling Point Range Not available Freezing point Not available Not Evaporation Rate Not available Flammability (solid, gas) flammable

Autoignition Not Not available Flash Point Temperature applicable Lower Explosive Not available Decomposition temperature Not available Limit

Upper Explosive Not available Vapor Pressure Not available Limit Vapor Density (air=1) Not available Specific Gravity (water=1) Not available (Insoluble, Partition coefficient: n- Water Solubility Not available Reacts ) octanol/water Viscosity Not available Kinematic viscosity Not available Solubility (Other) Not available Density 0.8 kg/L

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Safety Data Sheet Material Name: Fluorine Scrubber SDS ID: 0375 (MALAYSIA)

Volatility <5 % Molecular Weight Not available

SECTION 10: Stability and reactivity

Reactivity May react with evolution of heat on contact with water. Chemical stability Stable at normal temperatures and pressure. Possibility of hazardous reactions Will not polymerize. Conditions to avoid Avoid accumulation of airborne dusts. Avoid heat, flames, sparks and other sources of ignition. Avoid contact with incompatible materials. Materials to Avoid (Incompatibilities) Carbon dioxide. Minimize exposure to atmosphere. Hazardous decomposition products Thermal decomposition products alkaline earth oxides

SECTION 11: Toxicological information

Inhalation irritation, respiratory system damage Skin irritation Eyes severe eye irritation, eye damage Ingestion gastrointestinal irritation Component Analysis - LD50/LC50 The components of this material have been reviewed in various sources and the following selected endpoints are published: Alkaline Earth Hydroxide (Proprietary) Oral LD50 Rat 7340 mg/kg Transition Metal Oxide (Proprietary) Oral LD50 Rat >10000 mg/kg Acute Toxicity Estimate Oral > 2000 mg/kg Immediate Effects respiratory tract irritation, skin irritation, eye irritation, respiratory system damage Delayed Effects respiratory system damage Irritation/Corrosivity Data respiratory tract irritation, skin irritation, eye irritation Respiratory Sensitization No data available. Dermal Sensitization No data available. Carcinogenicity ______Page 6 of 10 Issue date: 2018-01-11 Revision 1.0 Print date: 2018-01-11

Safety Data Sheet Material Name: Fluorine Scrubber SDS ID: 0375 (MALAYSIA)

Component Carcinogenicity Transition Metal Proprietary Oxide

ACGIH: A4 - Not Classifiable as a Human Carcinogen

IARC: Supplement 7 [1987] ; Monograph 1 [1972] (Group 3 (not classifiable))

Category 3B (could be carcinogenic for man ;with the exception of non- DFG: bioavailable ferrous oxides ) Mutagenic Data No data available for the mixture. Reproductive Effects Data No data available for the mixture. Tumorigenic Data No data available for the mixture. Specific Target Organ Toxicity - Single Exposure respiratory system Specific Target Organ Toxicity - Repeated Exposure respiratory system Aspiration hazard No data available. Medical Conditions Aggravated by Exposure skin disorders and allergies Additional Data In normal use, as installed and maintained according to product literature, this material in its final form is not expected to be hazardous.

SECTION 12: Ecological information

Component Analysis - Aquatic Toxicity No LOLI ecotoxicity data are available for this product's components. Persistence and Degradability No information available for the mixture. Bioaccumulative potential No information available for the mixture. Mobility in soil No information available for the mixture. Other adverse effects No data available.

SECTION 13: Disposal considerations

Disposal Methods Dispose in accordance with all applicable regulations. Contaminated packaging disposal Dispose in accordance with all applicable regulations.

SECTION 14: Transport information

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Safety Data Sheet Material Name: Fluorine Scrubber SDS ID: 0375 (MALAYSIA)

IATA Information: UN#: Not regulated

IMDG Information: UN#: Not regulated

ICAO Information: UN#: Not regulated International Bulk Chemical Code This material contains one or more of the following chemicals required by the IBC Code to be identified as dangerous chemicals in bulk. Alkaline Earth Hydroxide Proprietary

IBC Code: Category Z (slurry ) Special precautions None

SECTION 15: Regulatory information

Malaysia Regulations Malaysia Poisons List No components of this material are listed. Component Analysis - Inventory Alkaline Earth Hydroxide (Proprietary) KR KR JP - JP - KECI KECI KR - VN A M T US CA EU PH ENC ISH - - REAC CN NZ (Draft U X W S L Anne Anne H CCA ) x 1 x 2

Ye DS EI Ye Ye Ye Ye Ye Ye Yes Yes Yes No No Yes s L N s s s s s s

Transition Metal Oxide (Proprietary) KR KR JP - JP - KECI KECI KR - VN A M T US CA EU PH ENC ISH - - REAC CN NZ (Draft U X W S L Anne Anne H CCA ) x 1 x 2

Ye DS EI Ye Ye Ye Ye Ye Ye Yes Yes Yes No No Yes s L N s s s s s s

SECTION 16: Other information

NFPA Ratings

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Safety Data Sheet Material Name: Fluorine Scrubber SDS ID: 0375 (MALAYSIA)

Health: 2 Fire: 0 Reactivity: 2 Hazard Scale: 0 = Minimal 1 = Slight 2 = Moderate 3 = Serious 4 = Severe Preparation and Revision Date 01/05/2018 Key / Legend ACGIH - American Conference of Governmental Industrial Hygienists; ADR - European Road Transport; AU - Australia; BOD - Biochemical Oxygen Demand; C - Celsius; CA - Canada; CA/MA/MN/NJ/PA - California/Massachusetts/Minnesota/New Jersey/Pennsylvania*; CAS - Chemical Abstracts Service; CERCLA - Comprehensive Environmental Response, Compensation, and Liability Act; CFR - Code of Federal Regulations (US); CLP - Classification, Labelling, and Packaging; CN - ; CPR - Controlled Products Regulations; DFG - Deutsche Forschungsgemeinschaft; DOT - Department of Transportation; DSD - Dangerous Substance Directive; DSL - Domestic Substances List; EC – European Commission; EEC - European Economic Community; EIN - European Inventory of (Existing Commercial Chemical Substances); EINECS - European Inventory of Existing Commercial Chemical Substances; ENCS - Existing and New Chemical Substance Inventory; EPA - Environmental Protection Agency; EU - European Union; F - Fahrenheit; F - Background (for Venezuela Biological Exposure Indices); IARC - International Agency for Research on Cancer; IATA - International Air Transport Association; ICAO - International Civil Aviation Organization; IDL - Ingredient Disclosure List; IDLH - Immediately Dangerous to Life and Health; IMDG - International Maritime Dangerous Goods; ISHL - Japan Industrial Safety and Health Law; IUCLID - International Uniform Chemical Information Database; JP - Japan; Kow - Octanol/water partition coefficient; KR KECI Annex 1 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL); KR KECI Annex 2 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL) , KR - Korea; LD50/LC50 - Lethal Dose/ Lethal Concentration; LEL - Lower Explosive Limit; LLV - Level Limit Value; LOLI - List Of LIsts™ - ChemADVISOR’s Regulatory Database; MAK - Maximum Concentration Value in the Workplace; MEL - Maximum Exposure Limits; MX – Mexico; Ne- Non-specific; NFPA - National Fire Protection Agency; NIOSH - National Institute for Occupational Safety and Health; NJTSR - New Jersey Trade Secret Registry; Nq - Non-quantitative; NSL – Non-Domestic Substance List (Canada); NTP - National Toxicology Program; NZ - New Zealand; OSHA - Occupational Safety and Health Administration; PEL- Permissible Exposure Limit; PH - Philippines; RCRA - Resource Conservation and Recovery Act; REACH- Registration, Evaluation, Authorisation, and restriction of Chemicals; RID - European Rail Transport; SARA - Superfund Amendments and Reauthorization Act; Sc - Semi-quantitative; STEL - Short-term Exposure Limit; TCCA – Korea Toxic Chemicals Control Act; TDG - Transportation of Dangerous Goods; TLV - Threshold Limit Value; TSCA - Toxic Substances Control Act; TW – ; TWA - Time Weighted Average; UEL - Upper Explosive Limit; UN/NA - United Nations /North American; US - United States; VLE - Exposure Limit Value (Mexico); VN (Draft) - Vietnam (Draft); WHMIS - Workplace Hazardous Materials Information System (Canada). Other Information Disclaimer: The information in this (Material) Safety Data Sheet ("(M)SDS") is believed to be current and accurate as of the time of shipment of the product by Entegris. Entegris makes no warranties, express or implied, with respect to such information, including, without limitation, the implied warranties of merchantability and fitness for a particular purpose. Entegris assumes no liability for any loss or injury which may result from the use of the information contained in this (M)SDS. The chemical, physical and toxicological properties of the Entegris product described in this (M)SDS have not been thoroughly investigated. Users are responsible for exercising due care in using the Entegris product, and for conducting their own investigation to determine whether the product is fit for their particular purpose and suitable for their method of use or application. It is the user's responsibility to ensure that its activities comply with all applicable laws and regulations. Entegris is a registered trademark of Entegris Inc. or an affiliated company. © 2015 Entegris Inc. or affiliated company. All rights reserved. ______Page 9 of 10 Issue date: 2018-01-11 Revision 1.0 Print date: 2018-01-11

Safety Data Sheet Material Name: Fluorine Scrubber SDS ID: 0375 (MALAYSIA)

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