Technicalinformation GPSSafetySummaryGPSSafetySummary

tetrachloride SSSubstancenameSubstancenameubstancename Silicontetrachloride CASNo.10026047

GeneralstatementGeneralstatement

Silicontetrachlorideisusedasrawmaterial/intermediateintheproductionof silicon,silica,andothersiliconbasedsubstances. Silicontetrachlorideiscorrosiveandtoxicandreactsviolentlywithwater. Basedonthephysicalchemicalandtoxicologicalpropertiesthereisno intendeduseofsilicontetrachlorideforconsumers. Worker risk and exposure is very unlikely as this substance must be manufactured and handled under strictly controlled conditions in industrial settings. Silicon tetrachloride should not enter surface water and soil. If the risk recommendations are considered, which are mentioned underRISK MANAGEMENTRECOMMENDATIONSMANAGEMENTRECOMMENDATIONS,,,,thesubstancecanbehandledsafely. ChemicalidentityChemicalidentity

Chemicalname(IUPAC) Silicontetrachloride Brandnames Siridion®STC CASnumber 10026047

Molecularformula SiCl 4 Molecularweight 170

Structure Si(Cl) 4 Chemicalcharacterization Synonyms Tetrachlorosilane

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UsesandapplicationUsesandapplication

Silicontetrachlorideisusedasarawmaterial/intermediateintheproduction ofsilicon,silica,andothersiliconbasedsubstances.Silicontetrachlorideis the starting material for the production of pure silicon for manufacture of semiconductors and optical fibres. The substance is manufactured and handledinindustrialsettingsinclosedsystems.

Physical/chemicalproperiesPhysical/chemicalproperies

Silicontetrachlorideisaclearatstandardtemperatureandpressure. Itwillnotselfigniteattemperaturesbelow650°C.Itisnotexplosivenoris itoxidizing.Silicontetrachloridereactsrapidlywithwater.

Property Value Physicalstate Liquid Color Colorless Odor Pungent Density 1.48g/cm 3 at20°C Melting/Boilingpoint 68.9°Cat1013hPa/59°Cat101.4kPa ExplosiveProperties Noexplosiveproperties Selfignitiontemperature >650°C(1010hPa) Vaporpressure 290hPaat22.5°C Water Decompositionbyhydrolysis Flashpoint N.a.inorganic Octanolwaterpartition Decompositionbyhydrolysis coefficient Viscosity 0.52mPa—s(dynamic),0.35mm 2/s (static)at25°C

Healtheffects

Based on corrosivity the substance is acute toxic by oral and inhalation exposure. Also after repeated exposure corrosive effects can occur especially in the respiratory tract. It will cause severe skin burns and damagetoeyes.Silicontetrachloridehasnotshownmutagenicorgenotoxic effects.DatashownoevidencethatSilicontetrachlorideisareproductiveor developmentaltoxinnoristhereevidenceofcarcinogenicity.

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HealtheffectsHealtheffects

EffectAssessment Result Acutetoxicity(oral,dermal basedoncorrosivitytoxicbyoraland andinhalation) inhalation Eye/Skinirritation Corrosive,causessevereskinburnsand damagetoeyes. Sensitization notapplicable,corrosive Toxicityafterrepeated Corrosiveeffects exposure Genotoxicity/mutagenicity Notmutagenic/genotoxic Carcinogenicity Thereisnoevidenceofcarcinogenicity Toxicityforreproduction Thereisnoevidenceofreproduction toxicity

Environmentaleffects

Silicontetrachloridehydrolyzes(halflife<1minute)tosilicicacidand hydrogen.Basedonavailabledataforthehydrolysisproducts, Silicontetrachlorideisconsideredtohavealowtoxicitytoaquatic organisms.Asaninorganicsubstancetestsonbiodegradationarenot relevant.Basedonthebioaccumulationassessment(fasthydrolysis, formationofnonpersistentinorganicsubstances)andtoxicityassessment (notclassifiedforlongtermhumanhealtheffectsorforaquatictoxicity)the substancedoesnotmeetthecriteriaforPBTorvPvB.

EnvironmentalEnvironmentaleffectseffectseffects

EffectAssessment Result Aquatictoxicity fasthydrolysis,hydrolysisproductsare nottoxictowaterorganisms FateandBehavior Result Biodegradation Notrelevant,fasthydrolysis,inorganic substance Bioaccumulationpotential Notrelevant,fasthydrolysis,inorganic substance PBT/vPvBconclusion NotconsideredtobeeitherPBTorvPvB

ReactivityhazardReactivityhazard

Thesubstancereactsvigorouslyinthepresenceofwater,includingmoisture intheair.Oneoftheproductsofthereactionishydrogenchloride,whichis classifiedascorrosive.

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Releasesofhydrogenchlorideorhydrogenvaporsmayoverpressurizethe containerorvessel,resultinginasuddenruptureofthecontainerorvessel. Inaddition,,aminesandalkalisreactviolentlywith, generatingheat.

Itisimportanttokeepthesubstancestrictlyfreeofwaterduring manufactureandstorageandalsopreventcontactwithotherincompatible materials.

ExposureExposure

Human/Environment Alltheintendedusesareindustrialonly,andtherearenodownstreamuses thatwouldresultinexposuretoconsumers.Silicontetrachlorideisextremely reactiveandnoresidualunreactedstartingmaterialispresentintheend products. Duetothecorrosiveandreactivenatureofthesubstance,allaspectsof Silicontetrachloridehandling,includingonsitestorageandtransfer,must besubjecttohighlycontrolledconditionstominimizethepotentialfor exposuretoworker.Thereisnoexposuretohumansfromsilicon tetrachlorideviatheenvironment,asthesubstanceishighlyreactiveand unstable. Riskmanagementrecommendations

DescriptionDescriptionGeneralmeasuresGeneralmeasures SpecificSpecificHumanHealthriskmanagement HumanHealthriskmanagement SpecificEnvironmentrisk measuresmeasures managementmeasuresmanagementmeasures Production (i)Rigorous (i)LocalExhaustventilation(LEV) (i)Useofairemission (sitespecific) containmentandsafe (ii)PersonalProtectiveEquipment(PPE): abatementequipment handlinginlinewith Gloves/gauntlets(5layerlaminateofPE suchasincineratorsand industrybestpractice. andEVOH(4H)orButyl&Vitontypes scrubbers (ii)Proceduraland recommended;nitrileglovesmayalsobe (ii)Treatmentofeffluent technologicalcontrol usedforshortdurations);Fullface inbiologicalwastewater usingBestAvailable respiratorwithABEKfilter;Gogglesor treatmentplant. Technique(BAT) faceshield;andSelfcontained,positive (iii)Incinerationofwaste pressurebreathingapparatus(for prolongedorhighexposures) (iii)Specificworkers’training (iv)Durationofexposure:<15min Monomer, Rigorouscontainment (i)LocalExhaustventilation(LEV) (i)Useofairemission Chemical andsafehandlingin (ii)PersonalProtectiveEquipment(PPE): abatementequipment intermediate linewithindustrybest Gloves/gauntlets(5layerlaminateofPE suchasincinerators, and practice. andEVOH(4H)orButyl&Vitontypes scrubbersandfabric Semiconducto recommended;nitrileglovesmayalsobe filtersisapplicableasa rManufacture usedforshortdurations);Fullface ‘bestpractice’. (Downstream respiratorwithABEKfilter;Gogglesor (ii)Treatmentofeffluent user) faceshieldandSelfcontained,positive inwastewatertreatment pressurebreathingapparatus(forprolong plant. orhighexposures) (iii)Specificworkers’training (iv)Durationofexposure:<15min

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StateagencyreviewStateagencyreview • EUGHSRegulation(EU)No.1272/2008 • EURiskAssessment(Regulation793/93) • IPCSInternationalChemicalSafetyCard • EUREACHregistration2010 • OECDSIDSProgram

Regulatoryinformation/classificationandlabelling

GHSGHSLabellingLabellingLabelling

StatutorybasisEUGHSasperRegulation(EU)No.1272/2008 Symbol(s)

Signalword DangerDanger H301:ToxicifswallowedH301:Toxicifswallowed H331:ToxicifinhaledH331:Toxicifinhaled H314:CausessevereskinburnsandeyeH314:Causessevereskinburnsandeye damagedamage

EUH014:ReactsviolentlywithwaterEUH014:Reactsviolentlywithwater EUH071:CorrosivetotherespiratorytractEUH071:Corrosivetotherespiratorytract PrecautionstatementsandmoreinformationaboutSilicontetrachloridecan befoundintheSafetyDataSheet.

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ThisGPSSafetySummaryisbasedonEvonik´spresentknowledgeandexperienceasofthedateof issue.However,itimpliesnoliabilityorotherlegalresponsibilityonthepartofEvonik,including withregardstoexistingthirdpartyintellectualpropertyrights,especiallypatentrights.Innoevent shall Evonik be responsible for damages of any nature whatsoever resulting from the use of or relianceupontheinformationhereinorthechemicaltowhichthatinformationrefers.Inparticular, nowarranty,whetherexpressorimplied,orguaranteeinthelegalsenseisintendedorimpliedby Evonik. ThisGPSSafetySummaryisonlyintendedtoprovidegeneralinformationaboutthechemical referredtohereinbutnotanyindepthhealthandsafetyinformation.TheinformationinthisGPS SafetySummaryissuppliedontheconditionthatthepersonsreceivingthesamewillmaketheir owndeterminationastoitssuitabilityfortheirpurposespriortouse.ThisGPSSafetySummary doesnotsupersedeorreplacerequiredregulatoryand/orlegalcommunicationdocuments. Performanceofthechemicaldescribedhereinshouldbeverifiedbytestingwhichshouldbecarried outonlybyqualifiedexperts. Evonik reserves the right to make any changes to this GPS Safety Summary in accordance with technological progress or further developments. Reference to trade names used by other companiesisneitherarecommendation,nordoesitimply,thatsimilarproductscouldnotbeused.

GlossaryGlossary Acutetoxicity harmfuleffectsafterasingleexposure Biodegradable breakdownofmaterialsbyaphysiologicalenvironment Bioaccumulation accumulationofsubstancesintheenvironment Carcinogenicity effectscausingcancer Chronictoxicity harmfuleffectsafterrepeatedexposures GHS GlobalHarmonizedSystemonClassificationandLabelling Mutagenicity effectsthatchangegenes PBT PersistentBioaccumulativeToxic Reprotoxicity teratogenicity,embryotoxicityandharmfuleffectsonfertility Sensitizing allergenic Teratogenic effectsonfoetalmorphology vPvB veryPersistentveryBioaccumulative

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