Visionary Sensor Technology INFICON INFICON Provides You with Precise Pres - Sure Mea Surement Instrumentation and Quality ﬁttings for Any Vacuum Sys - Tem

Vacuum Measurement

Visionary Sensor Technology INFICON INFICON provides you with precise pres - sure mea surement instrumentation and quality ﬁttings for any vacuum sys - tem. Our ceramic capacitance diaphragm gauges deliver higher accuracy, stability and longer lifetime than con ventional metal diaphragm products.

INFICON invented vacuum combination gauge sensors and combine multiple technolgoies in a single unit to accurately measure a wide range of pressures with reduced complexity and cost.

With over 150 years of vacuum experi - ence, INFICON is the worldwide leader in vacuum gauges. INFICON was formed as an independent company with a new market presence and has world-class manufacturing, sales and service fa cilities worldwide. The service spectrum includes deve lopment, production and sales of in - novative products in the vacuum industry. Experience and passion

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LEYBOLD IIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIICOLOGNE IIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIII IIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIII IIIIIIIIIIIIIIIIIIIIIIIIIIII W.C. III IIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIHERAEUS IIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIII HANAU III IIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIII IIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIII GERÄTEBAU-ANSTALT BALZERS IIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIII IIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIII

ARTHUR PFEIFFER III IIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIII WETZLAR III IIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIII 1850/51 1890 1946 1976 1993 1995 EMERG EMERG INFICON ENC ENC at a G lance Y Y

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INFICON refrigerant leak detectors are I I N I I I I N I I D D I I I I

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I I C I I I I C I I I E I E U I U I I I the recognized market leaders in air con - V I I V I I T I T I I T I T I I

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FITTINGS AND FEEDTHROUGHS

THIN FILM CONTROLLERS

LEAK DETECTORS Experts in Precise 1000 mbar (AT M) LOW VACUUM 1 mbar MEDIUM VACUUM 10-3 mbar HIGH VACUUM Vacuum Measurement 10-7 mbar INFICON ceramic capacitance diaphragm Measurement principles IIIII Capacitance Diaphragm gauges (CD G) are designed for deman - ding, highest accuracy (0.15%) applicati - ons in the vacuum industries. The corrosion resistant ultra pure alumina sen - sor guarantees superior performance and best long-term span stability, high accuracy and years of maintenance free life time. INFICON offers a full line 1000 1000 1000 1 1 1 of CDG s starting with low priced Porter

IIII -3 IIII -3 IIII -3 status gauges, ranging to world fastest IIIIIIII 10 IIIIIIII 10 IIIIIIII 10 IIIIIIII IIIIIIII IIIIIIII CDG Stripe with less than 1 ms measu - III III III IIIIIIIIIIIII IIII IIIIIIIIIIIII IIII IIIIIIIIIIIII IIII ) ) ring time, 20 0° C process gauges or the ) IIII III IIII III IIII III M M M III II III II III II T T T II II II II II II A A A IIIIIII I I IIIIIII I I IIIIIII I I ( ( ( II I I II I I II I I

reference gauge Cube showing ex cellent III II I III II I III II I r r r I I I I I I I I I r r r I I I II I I 10 -7 II I I 10 -7 II I I 10 -7 o o o I II I I II I I II I T stability. A large selection of ﬂanges T II I II T II II I II II II I II 7 7 I I III I I 7 III I I - - II I II IIII II I II - IIII II I II 0 0 0 I I I II I I I II I I I 1 1 1 I I I II I I III II I I III II I I – – and interfaces, for example Ether CAT , – I I I I I I I I I II I I I II I I I r r I I I r I I I I I I I I r r I r IIII I IIII I I I I I I I I I I II I I II I I o o o I I I I I I I I I I I I I I I I I T T T I I make them the best choice for easy and I I I II I I I I II I I I I I I I I I I I I I I I I I 0 0 0 I I I I I I I I I I I I I I I 0 0 0

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I I I I -10 I I I -10 I I I -10 0 0 0 10 10 10 1 1 cost effective integration. Compact and 1 rugged vacuum and differential pressure PORTER™ CDG020 D STRIPE™ CD G100 Dhs CUBE™ CDG sci TEMP. COMPENSATED TEMP. CONTROLLED HIGH SPEED TEMP. CONTROLLED REFERENCE switches round up the product offering. CAPACITANCE DIAPHRAGM GAUGE CAPACITANCE DIAPHRAGM GAUGE CAPACITANCE DIAPHRAGM GAUGE Accurate and gas type independent Faster than 1 ms response time True high precision pressure measurement Compact, smallest size in its class Flexible integration with Ether CAT ﬁeldbus Full stable output – Proven by PTB Corrosion resistant pure ceramic sensor Flexible communication – Various modern interfaces Sterilization Vacuum coating Atomic layer deposition Transfer standard Vacuum monitoring High speed process control Main reference gauge PVD , CVD , Etch Research

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I I I I I I I -10 I I I -10 I I I -10 I -10 0 0 0 10 10 0 10 10 1 1 1 1 SKY ® CDG025 D/CDG025D-X3 SK Y ® CDG045 D/CDG200D EDGE™ CDG045D 2/CD G100D2 SPOT™ CDS500 D/CDS550D TEMP. COMPENSATED TEMP. CONTROLLED TEMP. CONTROLLED COMPACT TEMP. COMPENSATED OEM CAPACITANCE DIAPHRAGM GAUGE CAPACITANCE DIAPHRAGM GAUGE CAPACITANCE DIAPHRAGM GAUGE CAPACITANCE DIAPHRAGM SENSOR Very accurate and gas type independent Very accurate and gas type independent Compact, saves valuable tool space Excellent repeatability and long-term stability Excellent long-term and temperature stability Long lifetime due to double sensor protection Long lifetime due to double sensor protection Fast response time Corrosion resistant pure ceramic sensor Corrosion resistant pure ceramic sensor Corrosion resistant pure ceramic sensor Corrosion resistant pure ceramic sensor Semiconductor and other plasma processes Semiconductor and other harsh processes Semiconductor and other harsh processes For integration into vacuum instrumentation and systems Industrial vacuum applications Chemical and corrosive vacuum applications Chemical and corrosive applications Accurate pressure measurement Quality and reference pressure monitoring Sterilization 1000 mbar (AT M) LOW VACUUM Experts in Wide range 1 mbar MEDIUM VACUUM 10-3 mbar HIGH VACUUM 10-7 mbar ULTRA HIGH VACUUM Vacuum Measurement 10-1 0 mbar Measurement principles INFICON wide range vacuum gauges IIIII Hot Ion IIIII Cold Cathode offer superior accuracy and reliability IIIII Pirani in compact designs. Four physical tech - IIIII Capacitance Diaphragm nologies cover the whole range of vacuum from ultra-high vacuum up to atmosphere.

The INFICON Pirani technology enables cost effective measurement in the low 1000 1000 1000 1 1 1 vacuum range and up to atmospheric

pressure whereas the high- and ultra high 10 -3 IIIIIIIIII 10-3 10 -3 IIIIIIIII vacuum ranges and medium vacuum II ) ) IIIIIIII IIIIIIII IIII ) IIIIIIII M M IIIII IIIII II M IIIII T T III III II T III A range. The INFICON miniature capa - A II II I A II ( ( I I I ( I

I I I I r r II II II r III II a a II II II a IIIIII II b b b I citance diaphragm technology enables III III II IIII III m m II 10 -7 II I 10-7 m II II 10 -7 0 0 I I I 0 I I 1 1 I 1 I - - precise measurement in the low vacuum II II I - II II 0 0 I I I 0 I I 1 1 I 1 II II I II II – – I I I – II I r r I I I r I range, whereas the ultra- and high- I I a a I I a I I I I I I I b b I I I b I I I I I I I m vacuum ranges are covered by the hot m I I I m I I I I I I I 0 0 0 I I I I I 0 0 0

I I I I -10 -10 I -10 0 0 10 10 0 10 1 1 or cold ionization technologies. 1 PSG500 PCG50 0/PSG550 GEMINI MAG50 0/MPG500 PIRANI STANDARD GAUGE PIRANI CAPACITANCE DIAPHRAGM GAUG E COLD CATHODE GAUGE Each measurement technology is avai l- Stainless steel measuring cell PIRANI STANDARD GAUGE COLD CATHODE AND PIRANI GAUGE able as a stand-alone sensor or com - Streamlined design Single or Dual Sensor Technology Long lifetime in harsh environments bined with complementary measurement Replaceable sensor Tungsten, Nickel or fully ceramic coated sensor Excellent ignition properties High accuracy and gas type independence above 10 mbar No stray magnetic ﬁeld technologies to enable optimum price Fore vacuum pressure measurement Interlocks in vacuum systems Load lock control Analytical and R& D applications to performance ratio over the complete General vacuum measurement and control from low to high vacuum Fore vacuum pressure measurement General vacuum measurement vacuum range. Interlocks in vacuum systems Base pressure monitoring and control, from atmosphere to ultra-high vacuum

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I I I -10 I -10 I -10 -10 0 0 0 10 10 0 10 10 1 1 1 1 BPG40 0/BAG40 2/BPG400 HPG400 TRIPLEGAUG E ® BCG450 VS A/VSD200 BAYARD ALPERT GAUGE HIGH PRESSURE IONIZATION BAYARD-ALPERT PIRANI CAPACITANCE ABSOLUT E/ DIFFERENTIAL BAYARD ALPERT AND PIRANI GAUGE PIRANI GAUGE DIAPHRAGM GAUGE VACUUM SWITCH Dual sensor technology Dual sensor technology Triple sensor technology Corrosion resistant fully stainless steel sensor Long lifetime Long lifetime Gas type independence above 10 mbar High accuracy Automatic emission control Automatic emission control Long lifetime Excellent long-term stability Semiconductor process and transfer chambers Sputter applications Semiconductor process and transfer chambers Atmospheric pressure detection Industrial coating Semiconductor process and transfer chambers Industrial coating Pressure interlocks Measurement and control from atmosphere to ultra-high vacuum Industrial coating Measurement and control from atmosphere to ultra-high vacuum Industrial vacuum applications Experts in Vacuum Control and Components

VGC4 01/ 40 2/403 PGD400 FITTINGS HEATED COMPONENTS GAUGE CONTROLLER PIRANI GAUGE DISPLAY FEEDTHROUGHS AND ASSEMBLIES FOR ALL SENSORS INCL. CDG FOR PSG, PCG, MP G& MAG VIEWPORTS Automatic gauge identiﬁcation Far readable display High quality ﬁttings and viewports according to international standards Fully vulcanized surface heater for low power consumption High signal resolution Compact design for use on benchtop or rack mount Stocked worldwide for immediate delivery Customized design with molded hard shell covers Up to 6 free adjustable setpoints Low cost of ownership pressure visualization device Wide variety of mechanical and electrical feedthroughs Cool to the touch on the outside Remote gauge control applications Filling stations in the automotive and RAC industry All vacuum processes from low to ultra-high vacuum Exhaust line applications Process pressure control Pressure control in light bulb production lines High current feedthrough applications Condensation exposed vacuum processes Production site and test lab monitoring General vacuum process and test lab monitoring Visual inspection of vacuum systems through viewports All vacuum systems Maximizing Productivity and Yield

LEAK DETECTORS THIN FILM INFICON refrigerant, hydrogen and helium leak detectors are the worldwide leading INFICON market-leading thin film depo sition controllers, monitors and QCM mea - brand for quality control at refrigeration, air conditioner, appliance and automotive surement instruments control deposition rate and thickness of simple or complex pro - manufacturing facilites and their supply chains, as well as in the semiconducto r/ cesses with unsurpassed measurement speed and precision. INFICON quartz crystals coating markets. As product quality, safety and environmental concerns lead to UL1 000 and sensor heads offer proven quality and reliability confirmed by millions of success - IC6 THIN FILM HELIUM LEAK DETECTOR more stringent leak testing requirements, INFICON helps you respond by providing ful process runs with a wide range of materials, applications and industries. DEPOSITION CONTROLLER a complete line of highly sensitive leak detectors in a variety of confi gurations for sub-assembly and mid-production quality testing, as well as final testing to ensure system integrity. Field service professionals in air conditionin g/ refri geration and automotive rely on the superior performance of our reliable, convenient and affordable service tools.

The INFICON toolbox of market-leading products for service tech nicians includes innovative refrigerant leak detectors, combustible gas leak detectors, ultra sonic leak CHEMICAL IDENTIFI CATION SENSISTOR ISH2000 detectors, refrigerant recovery systems, refrigerant charging scales and vacuum HYDROGEN LEAK DETECTOR AND MONITORING SYSTEMS pressure gauges. With INFICON service tools, you are assured of having the right Gas chromatograph y/ mass spectrometry (GC/ MS) sets the benchmark for the most tool to get the job done quickly and accurately, saving you time and money. accurate identification of organic chemicals of any analytical technique. INFICON technology is being used throughout the world for emergency response, chemical warfare agent detection, early detection of chemical contamination in water source and distribution systems, hazardous waste site investigation and industrial hygiene. HAPSITE Chemical Identification System gives you immediate, laboratory quality results in the field, and gives you the answers you need to make better and faster HAPSITE ER GAS ANALYSIS decisions about critical health and safety issues. CHEMICAL IDENTIFICATION SYSTEM INFICON instruments are used in oil and gas production, hydrocarbon processing, refining and chemical productions. From research and development to production, we are investing in gas analysis technologies to help enable you to operate more efficiently. INFICON offers compact, transportable, easy-to-use instruments, like MICRO GC FUSION GAS ANALYZER our Micro GC Fusion Gas Analyzer to make measurements in the lab, at the pilot plant or in the field close to the sample point. The accurate analysis provides better understanding of raw materials, process control of intermediates or the quality of final products.

MPH TRANSPECTOR Visionary Sensor Techno logy EXCELLENT CUSTOMER SUPPORT IS A COMMITMENT INFICON provides a global network of sales and service centers. These centers are staffed with local service and application experts who can assist you in choosing the best solution for your individual product application and provide fast support if service is needed.

ASIA AND PACIFICA CHINA KOREA INFICON Ltd. INFICON Ltd. Beijing Kyunggi-do Phon e: +86 10 6590 01 64 Phon e: +82 31 783 2942 E-mai l: reach.china@inﬁcon.com E-mai l: reach.korea@inﬁcon.com

INDIA SINGAPORE AND AUSTRALIA INFICON PVT. Ltd. INFICON PTE Ltd. Pune Singapore Phon e: + 91 20 4120 4854 Phon e: +65 66 31 0300 E-mai l: reach.india@inficon.com E-mai l: reach.singapore@inficon.com EUROPE, MIDDLE EAST AMERICAS AND AFRICA JAPAN TAIWAN INFICON Inc. INFICON GmbH INFICON Co. Ltd. INFICON Co. Ltd. East Syracuse, NY Cologne Yokohama-shi, Kanagawa-ken Chupei City Phon e: +1 315 434 1100 Phon e: +49 221 567 881 00 Phon e: + 81 45 471 3328 Phon e: +886 3 552 5828 E-mai l: reach.us@inficon.com E-mai l: reach.germany@inficon.com E-mai l: reach.japan@inficon.com E-mai l: reach.taiwan@inficon.com