Inficon CDG045D Vacuum Gauge Brochure.Pdf

Visionary Sensor Technology

CDG045D High Precision Vacuum Gauge

True pressure measurement CDG045D Vacuum Gauge

Typical applications • Quality control, reference vacuum • PVD, CVD, Etch • Load Lock • Analytical • Puller, ovens • Oxidation • Industrial Temperature control Gauge protection for increased lifetime CDG working principle Span stability

Any mounting orientation Direct pressure measurement CDG045D Vacuum Gauge • Temperature controlled Level 1 Baffle by diaphragm at ± 0.1°C Stops coating, particles p ΔCΔC Δd ~ p • Fast warm up p Capacitance readout • Immune to ambient environment Level 2 Shield Δd 1 Protects diaphragm ~ p ΔC p

p Electrode Level 3 Protective coating Diaphragm Corrosion protection p = pressure

Interface I/O

• Classic analog signal 0 … 10V Fully ceramic sensor • Wide range power supply • Zero adjust, push button / remote DI • 2 individual setpoints structure combined with Bonded ceramic • Status LED digital signal processing provides superior • Diagnostic port measurement performance. • Fieldbus: DeviceNet, Profibus, EtherCAT, RS-232

DeviceNet

Profibus

EtherCAT

Gas type independence

CDG sensor technology Other typical sensor technologies (mbar)

The INFICON temperature controlled CDG Capacitance Diaphragm Gauge line is designed for the highest accurate total pressure measurement available today. The temperature controlled corrosion resistant ultra-pure ceramic sensor provides Digital signal processing superior span stability over many years paired with state-of-the-art zero stability. Advanced electronics offer the user a wide Uout = a • p + b (a = slope / b = off-set) Longtime full scale stability standard range of suitable filters yielding solutions for all applications and a choice of fieldbus interfaces.A unique sensor shield U dynamic Ceramic sensor (patents granted) protects the gauge from undesired process byproducts. gain offset + technology offers superior long-term stability. Indicated pressure slow Typical applications

• Quality control, reference vacuum • PVD, CVD, Etch stability F.S. • Load Lock • Analytical fast • Puller, ovens • Oxidation measured at PTB • Industrial Setable output P Digital filters 10 time True pressure (mbar) Measuring points of one gauge (years) CDG045D temperature controlled ADVANTAGES AT A GLANCE

• Unprecedented Full Scale stability • No periodical recalibration required • Digital signal processing • Corrosion resistant Alumina sensor

Measurement ranges Temperature coefficient °C Full Scale (Torr) 50 In-situ architecture 0.1 0.15% Accuracy assures an excellent 1 temperature stability of zero and span. 10 25

100

1000 5

0.00001 0.0001 0.001 0.01 0.1 1 10 100 1000 Pressure Temperature coefficient/accuracy (Torr) Excellent Customer Support is a Commitment INFICON provides a global network of sales and service centers. These centers are staffed with local service and application experts who can assist you in choosing the best solution for your individual product application and provide fast support if service is needed.

Asia and Pacifica

CHINA KOREA INFICON Ltd. INFICON Ltd. Beijing Kyunggi-do Phone: +86.10.6590.0164 Phone: +82.31.783.2942 E-mail: reach.china@inficon.com E-mail: [email protected]

INDIA SINGAPORE and AUSTRALIA INFICON PVT. Ltd. INFICON PTE Ltd. Pune Singapore Phone: +91. 20. 4120. 4854 Phone: +65.6631.0300 Americas Europe, Middle East E-mail: reach.india@inficon.com E-mail: [email protected] and Africa INFICON Inc. JAPAN TAIWAN East Syracuse, NY INFICON GmbH INFICON Co. Ltd. INFICON Co. Ltd. Yokohama-shi, Kanagawa-ken Chupei City Phone: +1.315.434.1100 Cologne Phone: +81.45.471.3328 Phone: +886.3.552.5828 E-mail: [email protected] Phone: +49.221.567.881.00 E-mail: reach.germany@inficon.com E-mail: [email protected] E-mail: [email protected]

inficon.com [email protected] Due to our continuing program of product improvements, specifications are subject to change without notice.