micromachines Review Development Trends and Perspectives of Future Sensors and MEMS/NEMS 1,2,3,4, 1,2,3, 1,2,3,4 1,2,3,4 Jianxiong Zhu y, Xinmiao Liu y, Qiongfeng Shi , Tianyiyi He , Zhongda Sun 1,2,3, Xinge Guo 1,2,3, Weixin Liu 1,2,3, Othman Bin Sulaiman 1,2,3, Bowei Dong 1,2,3,4,5 and Chengkuo Lee 1,2,3,4,5,* 1 Department of Electrical and Computer Engineering, National University of Singapore, Singapore 117583, Singapore;
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[email protected] (B.D.) 2 Center for Intelligent Sensors and MEMS (CISM), National University of Singapore, Singapore 117608, Singapore 3 Hybrid-Integrated Flexible (Stretchable) Electronic Systems Program, National University of Singapore, Singapore 117608, Singapore 4 NUS Suzhou Research Institute (NUSRI), Suzhou Industrial Park, Suzhou 215123, China 5 NUS Graduate School for Integrative Science and Engineering (NGS), National University of Singapore, Singapore 119077, Singapore * Correspondence:
[email protected]; Tel.:+65-6516-5865 These authors contributed equally. y Received: 3 November 2019; Accepted: 12 December 2019; Published: 18 December 2019 Abstract: With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life.