Safety Data Sheet Material Name: NTA-V115 SDS ID: 0412 ()

SECTION 1: Identification of the substance/mixture and of the company/undertaking

Product identifier Material Name NTA-V115 Details of the supplier of the safety data sheet Entegris, Inc. 129 Concord Road Building 2 Billerica, MA 01821 USA

Telephone Number: +1-952-556-4181 Telephone Number: +1-800-394-4083 (toll free within North America)

Emergency Telephone Number: Chemtrec Local in Country (Tel Aviv) (972)-37630639 Chemtrec International 1-703-527-3887 E-mail: [email protected]

SECTION 2: Ingredients

CAS Component Name Percent

Other components or impurities which will not Not available 80-90 influence the classification of the product

Proprietary Organic amine 0.1-7

Proprietary Organic sulfoxide 0.1-4

Proprietary Organic amine 0.1-4 Impurities and stabilizing additives contributing to the GHS Classification None

SECTION 3: Hazard Identification

GHS Classification Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 3 ( respiratory system ) Label elements Hazard symbols

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Safety Data Sheet Material Name: NTA-V115 SDS ID: 0412 (ISRAEL)

Signal word Danger Hazard statements H314 Causes severe skin burns and eye damage. H335 May cause respiratory irritation. Precautionary statements Prevention P260 Do not breathe vapor or mist. P264 Wash thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection. P271 Use only outdoors or in a well-ventilated area. Response P310 Immediately call a POISON CENTER or doctor/physician. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P321 Specific treatment (see label). P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P363 Wash contaminated clothing before reuse. P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Storage P403+P233 Store in a well-ventilated place. Keep container tightly closed. P405 Store locked up. Disposal P501 Dispose of contents/container in accordance with local/regional/national/international regulations. Other Hazards Which Do Not Result in Classification None known.

SECTION 4: First aid measures

Description of Necessary Measures Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin contact Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing and shoes before reuse. Destroy contaminated shoes. Eye contact Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention.

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Safety Data Sheet Material Name: NTA-V115 SDS ID: 0412 (ISRAEL)

Ingestion If swallowed, do NOT induce vomiting. Rinse mouth. Get immediate medical attention. Most Important Symptoms/Effects Symptoms: Immediate respiratory tract burns, skin burns, eye burns, mucous membrane burns Symptoms: Delayed No information on significant adverse effects. Note to Physicians For inhalation, consider oxygen. Avoid gastric lavage or emesis. Indication of any immediate medical attention and special treatment needed None known.

SECTION 5: Firefighting measures

Suitable extinguishing media regular dry chemical, carbon dioxide, water spray Unsuitable Extinguishing Media high-pressure water streams Specific hazards arising from the chemical Slight fire hazard. Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. Fire Fighting Measures Move container from fire area if it can be done without risk. Do not scatter spilled material with high- pressure water streams. Fight fire from maximum distance or use unmanned hose holders or monitor nozzles. Do not get water inside container. Cool containers with water spray until well after the fire is out. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. Avoid inhalation of material or combustion by-products. Stay upwind and keep out of low areas. Dike for later disposal. Hazardous Combustion Products oxides of carbon, oxides of nitrogen, oxides of sulfur

SECTION 6: Accidental release measures

Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. Environmental precautions Avoid release to the environment. Methods for Containment Eliminate all ignition sources if safe to do so. Do not touch damaged containers or spilled material unless wearing appropriate protective clothing. Stop leak if possible without personal risk. Prevent entry into waterways, sewers, basements, or confined areas. Absorb with sand or other non-combustible material. Collect spilled material in appropriate container for disposal. Do not get water inside container. Keep unnecessary people away, isolate hazard area and deny entry.

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Safety Data Sheet Material Name: NTA-V115 SDS ID: 0412 (ISRAEL)

SECTION 7: Handling and storage

Precautions for safe handling Do not breathe vapor or mist. Wear protective gloves/protective clothing/eye protection/face protection. Wash thoroughly after handling. Use only outdoors or in a well-ventilated area. Conditions for safe storage, including any incompatibilities Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store in accordance with all current regulations and standards. Keep separated from incompatible substances. Incompatible Materials oxidizing materials, acids, combustible materials, metals, halogens, metal salts, reducing agents

SECTION 8: Exposure controls/personal protection

Exposure Guidelines Component Exposure Limits Organic amine Proprietary

ACGIH: 20 ppm TWA

Skin - potential significant contribution to overall exposure by the cutaneous route

NIOSH: 20 ppm TWA ; 70 mg/m3 TWA

30 ppm STEL ; 105 mg/m3 STEL

SK: SYS-DIR(COR) (Apr 2017 )

OSHA (US): 20 ppm TWA ; 70 mg/m3 TWA

prevent or reduce skin absorption

OSHA (Vacated): 20 ppm TWA ; 70 mg/m3 TWA

30 ppm STEL ; 105 mg/m3 STEL

Prevent or reduce skin absorption

Israel: 20 ppm TWA

Organic sulfoxide Proprietary

AIHA: 250 ppm TWA

Organic amine Proprietary

ACGIH: 3 ppm TWA

6 ppm STEL

NIOSH: 3 ppm TWA ; 8 mg/m3 TWA

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Safety Data Sheet Material Name: NTA-V115 SDS ID: 0412 (ISRAEL)

6 ppm STEL ; 15 mg/m3 STEL

OSHA (US): 3 ppm TWA ; 6 mg/m3 TWA

OSHA (Vacated): 3 ppm TWA ; 8 mg/m3 TWA

6 ppm STEL ; 15 mg/m3 STEL

Israel: 3 ppm TWA

6 ppm STEL Biological limit value There are no biological limit values for any of this product's components. Appropriate engineering controls Appropriate Engineering Controls/PPE: Ventilation: An industrial hygiene exposure assessment should be performed by the customer to determine if there is any actual need for ventilation and/or respiratory protection based on their conditions of use. In general, no respiratory protection would be required when the material is handled in a well-ventilated area to ensure exposures are kept below the allowable limits. Examples of appropriate ventilation could be locally exhausted equipment, fume hoods, and general room exhaust that keep substance levels below the recommended threshold limit values. Best practice is to use in a closed loop system to avoid any potential exposure. Best practice is to use in a closed loop system to avoid any potential exposure. PPE: If proper ventilation is not available, use a NIOSH approved full-face respirator with canisters or cartridges specifically approved substances. Whenever cartridge or canister respirators are used, ensure the frequent changing of the filter element. For Unknown Concentrations or Immediately Dangerous to Life or Health -: Any supplied-air respirator with a full facepiece that is operated in a pressure- demand or other positive-pressure mode. Where material transfer occurs in an open system with potential for aerosol generation, splash or spill the following guidelines are recommended. - Avoid direct skin contact with product. Identify potential areas for indirect skin contact. - For contact/splash protection, wear nitrile rubber gloves approved to relevant standards (e.g. Europe: EN374, US: F739, AS/NZS: 2161). [Suitability and durability of a glove is dependent on usage, e.g. frequency and duration of contact, chemical resistance of glove material, glove thickness, and dexterity.]. Contaminated gloves should be replaced. - Eye/Face Protection: Chemical splash goggles and face shield approved to EU Standard EN166, AS/NZS:1337. - Body Protection: Chemical resistant gloves/gauntlets, boots, and aprons with integrated sleeves. - Provide basic employee training to prevent / minimize exposures and to report any skin problems that may develop. - Other skin protection measures such as impervious suits and face shields may be required during high dispersion activities which are likely to lead to substantial aerosol release, e.g. spraying. - Use appropriate ventilation and respiratory protection based on your industrial hygiene assessment of each task that may generate exposures.

SECTION 9: Physical and chemical properties

Appearance clear liquid Physical State liquid Odor mild odor Color clear Not Odor Threshold pH 11 - 13.7 available

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Safety Data Sheet Material Name: NTA-V115 SDS ID: 0412 (ISRAEL)

Not Melting Point Boiling Point 100 °C available Not Boiling Point Range Freezing point Not available available Not Not Evaporation Rate Flammability (solid, gas) available applicable

Autoignition Not Flash Point >95 °C Temperature available Not Lower Explosive Limit Decomposition temperature Not available available Not Upper Explosive Limit Vapor Pressure Not available available Not Vapor Density (air=1) Specific Gravity (water=1) 1.01 available

Not Partition coefficient: n- Water Solubility Not available available octanol/water Not Viscosity Kinematic viscosity Not available available Not Solubility (Other) Density 1.01 g/mL available

Physical Form liquid Molecular Weight Not available

SECTION 10: Stability and reactivity

Reactivity No reactivity hazard is expected. Chemical stability Stable at normal temperatures and pressure. Possibility of hazardous reactions Will not polymerize. Conditions to avoid Avoid contact with incompatible materials. Materials to Avoid (Incompatibilities) oxidizing materials, acids, combustible materials, metals, halogens, metal salts, reducing agents Hazardous decomposition products oxides of carbon, oxides of nitrogen, oxides of sulfur

SECTION 11: Toxicological information

Information on Likely Routes of Exposure Inhalation burns Skin ______Page 6 of 12 Issue date: 2018-02-01 Revision 1.0 Print date: 2018-02-01

Safety Data Sheet Material Name: NTA-V115 SDS ID: 0412 (ISRAEL)

burns Eye burns Ingestion burns Component Analysis - LD50/LC50 The components of this material have been reviewed in various sources and the following selected endpoints are published: Organic amine (Proprietary) Oral LD50 Rat 1050 mg/kg Dermal LD50 Rabbit 310 - 810 mg/kg Inhalation LC50 Rat >8000 ppm 8 h (no deaths occurred ) Organic sulfoxide (Proprietary) Oral LD50 Rat 28300 mg/kg Inhalation LC50 Rat >5.33 mg/L 4 h (no deaths occurred ) Organic amine (Proprietary) Oral LD50 Rat 1720 mg/kg Dermal LD50 Rabbit 1000 mg/kg Acute Toxicity Estimate Dermal > 2000 mg/kg

Inhalation - Vapor > 20 mg/L

Oral > 2000 mg/kg Immediate Effects May cause: respiratory tract burns, skin burns, eye burns, mucous membrane burns Delayed Effects No information on significant adverse effects. Irritation/Corrosivity Data May cause: respiratory tract burns, skin burns, eye burns, mucous membrane burns Respiratory Sensitization No data available. Dermal Sensitization No data available. Component Carcinogenicity Organic amine Proprietary

ACGIH: A4 - Not Classifiable as a Human Carcinogen

IARC: Monograph 71 [1999] ; Monograph 47 [1989] (Group 3 (not classifiable)) Mutagenic Data No data available for the mixture. Reproductive Effects Data No data available for the mixture. Tumorigenic Data No data available for the mixture. Specific Target Organ Toxicity - Single Exposure respiratory tract

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Safety Data Sheet Material Name: NTA-V115 SDS ID: 0412 (ISRAEL)

Specific Target Organ Toxicity - Repeated Exposure No data available. Aspiration hazard No data available. Medical Conditions Aggravated by Exposure eye disorders, respiratory disorders, skin disorders and allergies Additional Data This section is to be used by EHS professionals to plan the use of the chemical.

SECTION 12: Ecological information

Component Analysis - Aquatic Toxicity Organic Proprietary amine

LC50 96 h Lepomis macrochirus 350 mg/L [static ]; LC50 96 h Oncorhynchus mykiss Fish: 375 - 460 mg/L; LC50 96 h Brachydanio rerio >1000 mg/L [static ]

Algae: EC50 96 h Pseudokirchneriella subcapitata 28 mg/L [static ] EPA

Organic Proprietary sulfoxide

LC50 96 h Pimephales promelas 34000 mg/L; LC50 96 h Oncorhynchus mykiss 33 - 37 Fish: g/L [static ]; LC50 96 h Lepomis macrochirus >40 g/L [static ]; LC50 96 h Cyprinus carpio 41.7 g/L

Organic Proprietary amine

LC50 96 h Pimephales promelas 227 mg/L [flow-through ]; LC50 96 h Brachydanio rerio 3684 mg/L [static ]; LC50 96 h Lepomis macrochirus 300 - 1000 mg/L [static ]; Fish: LC50 96 h Oncorhynchus mykiss 114 - 196 mg/L [static ]; LC50 96 h Oncorhynchus mykiss >200 mg/L [flow-through ]

Algae: EC50 72 h Desmodesmus subspicatus 15 mg/L IUCLID

Invertebrate: EC50 48 h Daphnia magna 65 mg/L IUCLID Other Ecotoxicity Information No data available. Mobility in soil No data available for the mixture. Persistence and Degradability No data available for the mixture. Bioaccumulative potential No data available for the mixture. Other adverse effects None known.

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Safety Data Sheet Material Name: NTA-V115 SDS ID: 0412 (ISRAEL)

SECTION 13: Disposal considerations

Disposal Methods Dispose in accordance with all applicable regulations. Contaminated packaging disposal Dispose in accordance with all applicable regulations.

SECTION 14: Transport information

IATA Information: Shipping Name: CORROSIVE LIQUID, BASIC, ORGANIC, N.O.S. , ( Contains: Morpholine , Ethanolamine ) Hazard Class: 8 UN#: UN3267 Packing Group: II Required Label(s): 8

IMDG Information: Shipping Name: CORROSIVE LIQUID, BASIC, ORGANIC, N.O.S. , ( Contains: Morpholine , Ethanolamine ) Hazard Class: 8 UN#: UN3267 Packing Group: II Required Label(s): 8

ICAO Information: Shipping Name: CORROSIVE LIQUID, BASIC, ORGANIC, N.O.S. , ( Contains: Morpholine , Ethanolamine ) Hazard Class: 8 UN#: UN3267 Packing Group: II Required Label(s): 8 International Bulk Chemical Code This material contains one or more of the following chemicals required by the IBC Code to be identified as dangerous chemicals in bulk. Organic amine Proprietary

IBC Code: Category Y

Organic amine Proprietary

IBC Code: Category Y Special precautions None

SECTION 15: Regulatory information

Environmental Protection Law - Pollutant Release and Transfer Register (PRTR) - Threshold Quantities None of this product's components are on the list ______Page 9 of 12 Issue date: 2018-02-01 Revision 1.0 Print date: 2018-02-01

Safety Data Sheet Material Name: NTA-V115 SDS ID: 0412 (ISRAEL)

Risk Management for Hazardous Materials - Separation Distances in Stationary Hazardous Sources - Toxic Substances None of this product's components are on the list Risk Management for Hazardous Materials - Policy of Accidental Release Prevention - Flammable Substances None of this product's components are on the list Risk Management for Hazardous Materials - Policy of Accidental Release Prevention - Propellant Substances None of this product's components are on the list Component Analysis - Inventory Other components or impurities which will not influence the classification of the product (Not available) KR KR JP - JP - KECI KECI KR - VN U C E A P C N M T ENC ISH - - REAC (Draft S A U U H N Z X W S L Anne Anne H CCA ) x 1 x 2

No No No No No No No No No No No No No No No

Organic amine (Proprietary) KR KR JP - JP - KECI KECI KR - VN A M T US CA EU PH ENC ISH - - REAC CN NZ (Draft U X W S L Anne Anne H CCA ) x 1 x 2

Ye DS EI Ye Ye Ye Ye Ye Ye Yes Yes Yes No No Yes s L N s s s s s s

Organic sulfoxide (Proprietary) KR KR JP - JP - KECI KECI KR - VN A M T US CA EU PH ENC ISH - - REAC CN NZ (Draft U X W S L Anne Anne H CCA ) x 1 x 2

Ye DS EI Ye Ye Ye Ye Ye Ye Yes Yes Yes No No Yes s L N s s s s s s

Organic amine (Proprietary) KR KR JP - JP - KECI KECI KR - VN A M T US CA EU PH ENC ISH - - REAC CN NZ (Draft U X W S L Anne Anne H CCA ) x 1 x 2

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Safety Data Sheet Material Name: NTA-V115 SDS ID: 0412 (ISRAEL)

Ye DS EI Ye Ye Ye Ye Ye Ye Yes Yes Yes No No Yes s L N s s s s s s

SECTION 16: Other information

NFPA Ratings Health: 3 Fire: 1 Reactivity: 0 Hazard Scale: 0 = Minimal 1 = Slight 2 = Moderate 3 = Serious 4 = Severe Preparation Date 1/2/2018 Product Use semiconductor manufacture Restrictions on Use None known. Key / Legend ACGIH - American Conference of Governmental Industrial Hygienists; ADR - European Road Transport; AU - Australia; BOD - Biochemical Oxygen Demand; C - Celsius; CA - Canada; CA/MA/MN/NJ/PA - California/Massachusetts/Minnesota/New Jersey/Pennsylvania*; CAS - Chemical Abstracts Service; CERCLA - Comprehensive Environmental Response, Compensation, and Liability Act; CFR - Code of Federal Regulations (US); CLP - Classification, Labelling, and Packaging; CN - ; CPR - Controlled Products Regulations; DFG - Deutsche Forschungsgemeinschaft; DOT - Department of Transportation; DSD - Dangerous Substance Directive; DSL - Domestic Substances List; EC – European Commission; EEC - European Economic Community; EIN - European Inventory of (Existing Commercial Chemical Substances); EINECS - European Inventory of Existing Commercial Chemical Substances; ENCS - Existing and New Chemical Substance Inventory; EPA - Environmental Protection Agency; EU - European Union; F - Fahrenheit; F - Background (for Venezuela Biological Exposure Indices); IARC - International Agency for Research on Cancer; IATA - International Air Transport Association; ICAO - International Civil Aviation Organization; IDL - Ingredient Disclosure List; IDLH - Immediately Dangerous to Life and Health; IMDG - International Maritime Dangerous Goods; ISHL - Japan Industrial Safety and Health Law; IUCLID - International Uniform Chemical Information Database; JP - Japan; Kow - Octanol/water partition coefficient; KR KECI Annex 1 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL); KR KECI Annex 2 - Korea Existing Chemicals Inventory (KECI) / Korea Existing Chemicals List (KECL) , KR - Korea; LD50/LC50 - Lethal Dose/ Lethal Concentration; LEL - Lower Explosive Limit; LLV - Level Limit Value; LOLI - List Of LIsts™ - ChemADVISOR’s Regulatory Database; MAK - Maximum Concentration Value in the Workplace; MEL - Maximum Exposure Limits; MX – Mexico; Ne- Non-specific; NFPA - National Fire Protection Agency; NIOSH - National Institute for Occupational Safety and Health; NJTSR - New Jersey Trade Secret Registry; Nq - Non-quantitative; NSL – Non-Domestic Substance List (Canada); NTP - National Toxicology Program; NZ - New Zealand; OSHA - Occupational Safety and Health Administration; PEL- Permissible Exposure Limit; PH - Philippines; RCRA - Resource Conservation and Recovery Act; REACH- Registration, Evaluation, Authorisation, and restriction of Chemicals; RID - European Rail Transport; SARA - Superfund Amendments and Reauthorization Act; Sc - Semi-quantitative; STEL - Short-term Exposure Limit; TCCA – Korea Toxic Chemicals Control Act; TDG - Transportation of Dangerous Goods; TLV - Threshold Limit Value; TSCA - Toxic Substances Control Act; TW – ; TWA - Time Weighted Average; UEL - Upper Explosive Limit; UN/NA - United Nations /North American; US - United States; VLE - Exposure Limit Value (Mexico); VN (Draft) - Vietnam (Draft); WHMIS - Workplace Hazardous Materials Information System (Canada). Other Information Disclaimer:

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Safety Data Sheet Material Name: NTA-V115 SDS ID: 0412 (ISRAEL)

The information in this (Material) Safety Data Sheet ("(M)SDS") is believed to be current and accurate as of the time of shipment of the product by Entegris. Entegris makes no warranties, express or implied, with respect to such information, including, without limitation, the implied warranties of merchantability and fitness for a particular purpose. Entegris assumes no liability for any loss or injury which may result from the use of the information contained in this (M)SDS. The chemical, physical and toxicological properties of the Entegris product described in this (M)SDS have not been thoroughly investigated. Users are responsible for exercising due care in using the Entegris product, and for conducting their own investigation to determine whether the product is fit for their particular purpose and suitable for their method of use or application. It is the user's responsibility to ensure that its activities comply with all applicable laws and regulations. Entegris is a registered trademark of Entegris Inc. or an affiliated company. © 2015 Entegris Inc. or affiliated company. All rights reserved. The information contained in this sheet is based on the best knowledge and experience currently available.

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