Safety Data Sheet Material Name: Antimony pentafluoride Compliant with GB/T 16483 and Revision date: 2020-03-23 GB/T 17519 SDS ID: 0595 (CHINA) Version 1.0 Section 1 - PRODUCT AND COMPANY IDENTIFICATION Product identifier Material Name Antimony pentafluoride Details of the supplier of the safety data sheet 当地信息 (Local information)： 艾微美科材国际贸易(上海)有限公司 ATMI International Trading Co,LTD 上海市科苑路88号德国中心二号楼523-533室 Unit 523-533, Tower 2, German Center, No.88 Keyuan Road, Shanghai 201203, China 邮政编码： 201203 Zip Code: 201203 电话：86-21-80236500 Telephone: 86-21-80236500 应急电话： Emergency Call: 400-6267911 (中国24小时化学事故应急咨询服务热线) 4001-204937 (ChemTrec 中国) 1-703-527-3887 （ChemTrec 国际） 86-21-80236500 （上海） E-mail: [email protected] Product Use semiconductor manufacture Restrictions on Use None known. Section 2 - HAZARDS IDENTIFICATION Emergency Overview Liquid. Fatal if inhaled. Causes severe skin burns and eye damage. Causes damage to organs. GHS hazard classification (according to GB 30000.2-GB 30000.29) Acute Toxicity - Inhalation - Vapor - Category 1 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 1 ( respiratory system , cardiovascular system , liver , kidneys ) Hazardous to the Aquatic Environment - Acute - Category 2 Hazardous to the Aquatic Environment - Chronic - Category 2 Label elements Symbol(s) 1 / 9 Page Print date: 2020-03-23 Material Name: Antimony pentafluoride Revision date: 2020-03-23 SDS ID: 0595 (CHINA) Signal word Danger Hazard Statement(s) Fatal if inhaled. Causes severe skin burns and eye damage. Causes damage to organs. （respiratory system , cardiovascular system , liver , kidneys ） Toxic to aquatic life with long lasting effects. Precautionary statements Prevention Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Wear respiratory protection. Use only outdoors or in a well-ventilated area. Do not eat, drink or smoke when using this product. Avoid release to the environment. Response If exposed or concerned: Call a POISON CENTER or doctor/physician. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. Collect spillage. Storage Store in a well-ventilated place. Keep container tightly closed. Store locked up. Disposal Dispose of contents/container in accordance with local/regional/national/international regulations. Physical and Chemical Hazards No data available Health Hazards Fatal if inhaled. Causes severe skin burns and eye damage. Causes damage to organs. Potential Environmental Effects Toxic to aquatic life with long lasting effects. Other Hazards Which Do Not Result in Classification Contact with water or moist air may form hydrogen fluoride. Section 3 - COMPOSITION / INFORMATION ON INGREDIENTS CAS Component Name Percent 7783-70-2 Antimony pentafluoride 100 2 / 9 Page Print date: 2020-03-23 Material Name: Antimony pentafluoride Revision date: 2020-03-23 SDS ID: 0595 (CHINA) Section 4 - FIRST AID MEASURES Description of Necessary Measures Inhalation If adverse effects occur, remove to uncontaminated area. Give artificial respiration if not breathing. If breathing is difficult, oxygen should be administered by qualified personnel. Get immediate medical attention. Skin contact Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get immediate medical attention. Thoroughly clean and dry contaminated clothing before reuse. Destroy contaminated shoes. Eye contact Immediately flush eyes with plenty of water for at least 60 minutes. Remove contact lenses, if present and easy to do. Continue rinsing. Then get immediate medical attention. Ingestion If swallowed, do NOT induce vomiting. Rinse mouth. Get immediate medical attention. Most Important Symptoms/Effects Immediate Fatal if inhaled, respiratory tract burns, skin burns, eye burns, mucous membrane burns, respiratory system damage, cardiovascular system damage, liver damage, kidney damage Delayed No information on significant adverse effects. Protection of first-aiders Wear suitable protective clothing. Perform first aid measures in a safe area. Note to Physicians Treat symptomatically and supportively. Indication of any immediate medical attention and special treatment needed For inhalation, consider oxygen. Avoid gastric lavage or emesis. Section 5 - FIRE FIGHTING MEASURES Suitable extinguishing media carbon dioxide, dry chemical, dry sand, alcohol-resistant foam. Large fires: water spray or fog, alcohol- resistant foam. Unsuitable Extinguishing Media high-pressure water streams Specific hazards arising from the chemical Negligible fire hazard. May ignite or explode on contact with combustible materials. Hazardous combustion products Material is non-flammable, however, it may increase fire severity upon contact with combustible materials; oxides of antimony, hydrogen fluoride Fire Fighting Measures Move container from fire area if it can be done without risk. Do not scatter spilled material with high- pressure water streams. Fight fire from maximum distance or use unmanned hose holders or monitor nozzles. Do not get water inside container. Cool containers with water spray until well after the fire is out. Withdraw immediately in case of rising sound from venting safety device or any discoloration of tanks due to fire. ALWAYS stay away from tanks engulfed in fire. Avoid inhalation of material or combustion by-products. Dike for later disposal. Protective Equipment and Precautions for Firefighters Wear full protective fire fighting gear including self contained breathing apparatus (SCBA) for protection against possible exposure. Section 6 - ACCIDENTAL RELEASE MEASURES Personal precautions, protective equipment and emergency procedures Wear personal protective clothing and equipment. Environmental precautions 3 / 9 Page Print date: 2020-03-23 Material Name: Antimony pentafluoride Revision date: 2020-03-23 SDS ID: 0595 (CHINA) Avoid release to the environment. Collect spillage. Methods and Materials for Containment and Cleaning Up Eliminate all ignition sources if safe to do so. All equipment used when handling the product must be grounded. Stop leak if possible without personal risk. Do not touch spilled material. A vapor suppressing foam may be used to reduce vapors. Prevent entry into waterways, sewers, basements, or confined areas. Do not get water inside container. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. Absorb spill with sand or other non-combustible material. Collect spilled material in appropriate container for disposal. Keep unnecessary people away, isolate hazard area and deny entry. Secondary disaster prevention measures No data available Section 7 - HANDLING AND STORAGE Precautions for safe handling Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Wear respiratory protection. Use only outdoors or in a well- ventilated area. Do not eat, drink or smoke when using this product. Conditions for safe storage, including any incompatibilities Store in a well-ventilated place. Keep container tightly closed. Store locked up. Store in accordance with all current regulations and standards. Keep separated from incompatible substances. Incompatible Materials combustible materials, metals, reducing agents, water Section 8 - EXPOSURE CONTROLS / PERSONAL PROTECTION Exposure Guidelines Component Exposure Limits Antimony pentafluoride 7783-70-2 Highly Toxic Goods: 0.5 mg/m3 TWA (related to Antimony compounds) 1.5 mg/m3 STEL (related to Antimony compounds) China: 0.5 mg/m3 TWA as Sb (related to Antimony compounds) ACGIH: 0.5 mg/m3 TWA as Sb (related to Antimony compounds) Hong Kong: 0.5 mg/m3 TWA as Sb (related to Antimony compounds) Biological limit value Antimony pentafluoride (7783-70-2) China: 85 µg/l Medium: urine Time: end of workweek Parameter: Antimony (related to Antimony compounds) ACGIH: 2 mg/l Medium: urine Time: prior to shift Parameter: Fluoride (background, nonspecific ); 3 mg/l Medium: urine Time: end of shift Parameter: Fluoride (background, nonspecific ) (related to Fluorides) Appropriate engineering controls Provide local exhaust or process enclosure ventilation system. Ensure compliance with applicable exposure limits. Personal protective equipment Respiratory Protection Respirators depend on exposure level. SCBA with full face piece recommended during change outs and available in case of emergency. Hand protection Wear appropriate chemical resistant gloves. 4 / 9 Page Print date: 2020-03-23 Material Name: Antimony pentafluoride Revision date: 2020-03-23 SDS ID: 0595 (CHINA) Eye/face protection Wear splash resistant safety goggles with a faceshield. Provide an emergency eye wash fountain and quick drench shower in the immediate work area. Skin and Body Protection Wear appropriate chemical resistant clothing. Section 9 - PHYSICAL AND CHEMICAL PROPERTIES Appearance viscous liquid Physical State liquid Odor sharp Color colorless (Not applicable, Odor Threshold